Test head and probe card having the same

Abstract

The application discloses a test head and a probe card with the test head, which is locked to a fixed frame to test a chip, comprising: a plurality of probes, and an upper guide plate, a support plate, a plurality of upper and lower stacked adjusting pieces and a lower guide plate arranged in sequence from top to bottom; the lower end of the probe is used to contact the chip; the upper guide plate and the lower guide plate are respectively provided with a plurality of guide holes corresponding to the probes for the probes to pass through; the support plate is provided with a through slot penetrating from top to bottom, and the through slot is used for the plurality of probes to pass through; the upper guide plate and the support plate are combined and fixed as a whole to strengthen the strength of the upper guide plate; the support plate has an abutting portion which exceeds the periphery of the upper guide plate in the horizontal direction so that the abutting portion abuts against the fixed frame in the vertical direction; when the test head is unlocked from the fixed frame, the adjusting pieces can be removed, and the length of the probes exposed from the lower guide plate is adjusted by removing the adjusting pieces, so that the service life of the probe card is prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to a test head and a probe card having the same, and more particularly, to a test head for testing a chip and a probe card having the same.

BACKGROUND

[0002] Testing performed on an integrated circuit is particularly useful for detecting and isolating faulty circuits that have existed in manufacturing steps. Therefore, a probe card is generally used to electrically test a circuit integrated on a chip before the circuit is cut and assembled in a chip package.

[0003] The probe card includes a test head having at least two guide plates separated by a partition and a plurality of probes passing through the guide plates, the guide plates are provided with a plurality of through holes corresponding to the probes one by one, the probes are bent in the gap between the two guide plates and axially slide in the through holes during pressing contact, the upper end of the probe contacts a contact pad of a space transformer, the lower end contacts a contact pad of a chip under test, the test function of the probe card on the circuit of the chip under test is realized by the contact tip of the lower end of the probe contacting the chip under test, long-term use of the probe card to test the chip will cause a certain wear to the probe, therefore a part of the length of the probe tip needs to be ground off to continue to use, when reaching the minimum length, the probe needs to be replaced or the probe card is directly scrapped; since the process of replacing the probe is too numerous and complex, and in the process of replacement, other components of the probe card can be damaged, and directly scrapping the probe card is too wasteful to cause the cost of testing the chip to be high.

[0004] Therefore, it is necessary to design a new probe card to overcome the above problems.

SUMMARY

[0005] To solve the above problems of the prior art, the purpose of the present application is to provide a new probe card which can increase the strength of the upper guide plate and prolong the service life of the probe card without replacing the probe.

[0006] To achieve the above object, the present application provides a test head which is locked to a fixed frame for testing a chip, comprising: a plurality of probes, and an upper guide plate, a support plate, a plurality of upper and lower stacked adjusting pieces, and a lower guide plate which are sequentially arranged from top to bottom; the lower end of the probe is used to contact the chip; the upper guide plate and the lower guide plate are respectively provided with a plurality of guide holes corresponding to the probes for the probes to pass through; the support plate is provided with a through slot which penetrates from top to bottom, and the through slot is used for the plurality of probes to pass through; the upper guide plate and the support plate are combined and fixed as a whole to strengthen the strength of the upper guide plate, and the support plate has an abutting portion which exceeds the periphery of the upper guide plate in the horizontal direction so that the abutting portion abuts against the fixed frame in the vertical direction; when the test head is unlocked from the fixed frame, the adjusting pieces can be removed, and the length of the probe exposed to the lower guide plate is adjusted by removing the adjusting pieces.

[0007] Further, the adjusting pieces are in two separate halves in the horizontal direction, so that when the adjusting pieces are removed, the adjusting pieces are pulled out in the horizontal direction.

[0008] Further, the side edge of the support plate is concavely provided with a groove, the side edge of the adjusting piece has a pull-out portion which is exposed to the groove, and the pull-out portions of the plurality of adjusting pieces are arranged in multiple steps.

[0009] Further, a plurality of screws pass through the support plate and the upper guide plate, the adjusting piece has a plurality of sliding grooves which extend in the horizontal direction, the screws are accommodated in the sliding grooves, and when the adjusting piece is pulled out, the sliding grooves slide in the horizontal direction relative to the screws.

[0010] Further, the abutting portion has a locking hole through which the screw passes to lock the support plate to the fixed frame.

[0011] Further, the material of the support plate is different from that of the upper guide plate, and the material of the support plate has stronger stress and tensile resistance than that of the upper guide plate.

[0012] Further, the upper guide plate and the support plate are adhered together, or the two are locked by screws.

[0013] The present application also provides a probe card, comprising: the test head and the fixed frame according to any one of the above.

[0014] Further, a partition plate is provided, the thickness of the partition plate is greater than the thickness of the support plate, the partition plate is located between the adjusting pieces and the lower guide plate, the partition plate is provided with a receiving cavity for the plurality of probes to pass through, and the support plate is locked to the partition plate through a plurality of screws.

[0015] Further, the recess further has an abutting surface, the abutting surface is lower than the top surface of the recess, the partition plate abuts against the abutting surface upwardly, and the screw passes through the partition plate, the abutting portion and the fixed frame to lock the abutting portion to the fixed frame.

[0016] The application further provides a test head locked to a fixed frame for testing a chip, comprising: a plurality of probes, and an upper guide plate, a partition plate, a plurality of upper and lower stacked adjusting pieces, a lower substrate and a lower guide plate arranged in sequence from top to bottom; the lower end of the probe is used to contact the chip; the upper guide plate and the lower guide plate are respectively provided with a plurality of guide holes corresponding to the probes for the probes to pass through; the lower substrate is provided with a through slot penetrating from top to bottom, and the partition plate is provided with a receiving cavity penetrating from top to bottom, and the through slot and the receiving cavity are respectively used for the plurality of probes to pass through; the partition plate is locked to a fixed frame, and the lower guide plate and the lower substrate are combined with each other to form an integral whole to strengthen the strength of the lower guide plate; when the partition plate is unlocked from the fixed frame, the adjusting pieces can be removed, and the length of the probes exposed from the lower guide plate is adjusted by removing the adjusting pieces.

[0017] Further, the lower substrate has an extension part, the extension part exceeds the periphery of the lower guide plate in the horizontal direction, so that the extension part overlaps the fixed frame when viewed from bottom to top, and the extension part supports the adjusting pieces upwardly.

[0018] Compared with the prior art, the application has the following beneficial effects:

[0019] The support plate of the test head is combined with the upper guide plate to form an integral whole to strengthen the strength of the upper guide plate; the support plate is provided with an abutting portion, the abutting portion abuts against the fixed frame in the vertical direction, so that the position of the support plate remains unchanged before and after the adjusting pieces are removed, the lower guide plate is displaced upwardly when the test head is locked to the fixed frame again after the adjusting pieces are removed, so that the length of the probes exposed from the lower guide plate is increased, and the service life of the probe card is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1Figure 1 is an exploded perspective view of the test head of the first embodiment;

[0021] Figure 2 Figure 2 is an exploded perspective view of the test head and the fixture of the first embodiment;

[0022] Figure 3 Figure 3 is a perspective view of the test head and the fixture of the first embodiment with the upper guide plate and the upper substrate adhered together and the lower guide plate and the lower substrate adhered together; Figure 2 Figure 4 is a perspective view of the test head and the fixture of the first embodiment upside down;

[0023] Figure 4 Figure 5 is an assembled perspective view of the test head and the fixture of the first embodiment; Figure 1 Figure 6 is a perspective view of the test head and the fixture of the first embodiment with the adjustment tabs locked in place;

[0024] Figure 5 Figure 7 is a close-up view of the area A of Figure 6; Figure 1 Figure 8 is a top view of the adjustment tab;

[0025] Figure 6 Figure 9 is a plan cross-sectional view of the probe card of the first embodiment;

[0026] Figure 7 Figure 10 is a schematic view of one of the adjustment tabs of the first embodiment being pulled out;

[0027] Figure 8 Figure 11 is a plan cross-sectional view of the probe card of the first embodiment with one of the adjustment tabs pulled out;

[0028] Figure 9 Figure 12 is a plan cross-sectional view of the probe card of the second embodiment;

[0029] Figure 10 Figure 13 is a perspective view of the lower substrate of the second embodiment;

[0030] Figure 11 Figure 14 is a plan cross-sectional view of the probe card of the third embodiment;

[0031] Figure 12 Figure 15 is an exploded perspective view of the probe card of the fourth embodiment upside down;

[0032] Figure 13 Figure 16 is a perspective view of the probe card of the fourth embodiment with the components assembled together;

[0033] Figure 14 Figure 17 is a perspective view of the probe card of the fourth embodiment with the lower guide plate, the lower substrate and the partition removed; Figure 13 Figure 18 is a perspective view of the probe card of the fourth embodiment with the components assembled together;

[0034] Figure 15 Figure 19 is a perspective view of the probe card of the fourth embodiment with the lower guide plate, the lower substrate and the partition removed; Figure 14

[0035]

[0036] ​

Detailed Implementation Methods

[0037] To facilitate a better understanding of the purpose, structure, and features of this invention, the invention will now be further described in conjunction with the accompanying drawings and specific embodiments.

[0038] like Figures 1 to 9 As shown, this is a first embodiment of the probe card of the present invention. The probe card includes a test head 100 and a fixing frame 200. The test head 100 is housed in and locked in the fixing frame 200. The test head 100 is used to test a chip and includes: a plurality of probes 1 (for simplicity, ...). Figures 7-9 Only three probes are shown in the diagram, and from top to bottom, the upper substrate 2, upper guide plate 3, support plate 4, multiple stacked adjustment pieces 5, partition plate 6, lower substrate 7, and lower guide plate 8 are arranged in sequence. The upper end of probe 1 extends out of the upper substrate 2 for contacting a space converter, and the lower end of probe 1 extends out of the lower guide plate 8 for contacting the chip. The upper guide plate 3 has multiple upper guide holes 31 corresponding to probe 1 for probe 1 to pass through. The lower guide plate 8 has multiple lower guide holes 31 corresponding to probe 1 for probe 1 to pass through. The upper substrate 2 has two vertically penetrating relief grooves 21. The support plate 4 has two vertically penetrating through slots 41. The partition plate 6 has two vertically penetrating receiving cavities 61. The lower substrate 7 has two vertically penetrating receiving grooves 71. Each of the relief grooves 21, through slots 41, receiving cavities 61, and receiving grooves 71 is used to receive multiple probes 1. Multiple first screws N1 pass through the upper substrate 2, upper guide plate 3, support plate 4, and partition plate 6 to lock the support plate 4 to the partition plate 6. Multiple second screws N2 pass through the lower guide plate 8, lower substrate 7, and partition plate 6 to lock the lower substrate 7 to the partition plate 6.

[0039] The upper substrate 2 is stacked on top of the upper guide plate 3 and bonded to the upper guide plate 3 (in this embodiment, the upper substrate 2 and the upper guide plate 3 are aligned at their boundaries; of course, in other embodiments, the upper substrate 2 and the upper guide plate 3 may be different in size and their boundaries may not be aligned).

[0040] The support plate 4 and the upper guide plate 3 are combined and fixed together as a whole to strengthen the upper guide plate 3. In this embodiment, the support plate 4 and the upper guide plate 3 are bonded together (of course, in other embodiments, the support plate 4 and the upper guide plate 3 can also be fixed together as a whole by screws). The support plate 4 has an abutment portion 42, which has a locking hole 421 for the third screw N3 to pass through. The abutment portion 42 extends horizontally beyond the periphery of the upper guide plate 3 so that the abutment portion 42 abuts against the fixing frame 200 in the vertical direction, and is locked by multiple third screws N3. The partition plate 5 is fixed in place; the side of the support plate 4 is recessed inward with a groove 43; in this embodiment, the material of the support plate 4 is different from that of the upper guide plate 3, and the material of the support plate 4 is preferably stronger in stress and tensile strength than that of the upper guide plate 3; however, in other embodiments, the material of the support plate 4 can be the same as that of the upper guide plate 3, and the material of the support plate 4 can be metal, ceramic, glass or plastic, and the materials of the upper guide plate 3 and the lower guide plate 8 are the same and can be ceramic, glass or plastic; the upper substrate 2 and the lower substrate 7 are made of the same material as the support plate 4; the material of the partition plate 6 is stainless steel. The thickness of the support part 4 is the same as the thickness of the upper substrate 2 and the lower substrate 7.

[0041] like Figure 7 As shown, the adjustment piece 5 is sandwiched between the support plate 4 and the partition plate 6. The adjustment piece 5 is divided into two halves in the horizontal direction. The outer periphery of the adjustment piece 5 is provided with an inwardly recessed notch 51. The side of the notch 51 has an outwardly protruding pull-out portion 52 (the side closer to the probe is the inner side, and the side farther from the probe is the outer side). The pull-out portion 52 is partially exposed in the groove 43 so that the adjustment piece 5 can be pulled out horizontally when it is removed. In this embodiment, the pull-out portion 52 of different adjustment pieces 5 is provided with a different number of small holes 521 for identifying the adjustment piece 5. Specifically, from top to bottom... The first adjusting piece 5 has one small hole 521, the second adjusting piece 5 has two small holes 521, and so on (of course, in other embodiments, the pull-out portion 52 of the adjusting piece 5 may also be marked with other markings for identification of the adjusting piece 5). The pull-out portions 52 of the multiple adjusting pieces 5 are arranged in a multi-step manner. The adjusting piece 5 also has multiple sliding grooves 53, which are U-shaped. The first screw N1 and the third screw N3 are received in the sliding grooves 53 so that when the adjusting piece 5 needs to be removed, the first screw N1 and the third screw N3 can be used to pull the adjusting piece 5 horizontally along the trajectory of the sliding grooves 53 without disassembling.

[0042] The lower substrate 7 is stacked above the lower guide plate 8 and bonded in alignment with the lower guide plate 8, the lower substrate 7 and the lower guide plate 8 are completely consistent with the size and thickness of the upper substrate 2 and the upper guide plate 3; and the upper substrate 2 and the upper guide plate 3 are arranged in alignment with the lower substrate 7 and the lower guide plate 8 in the up-down direction; the thicknesses of the upper substrate 2, the upper guide plate 3, the support plate 4, the lower substrate 7 and the lower guide plate 8 are all less than the thickness of the partition plate 6.

[0043] As shown in Figure 3 and Figure 4 The fixed frame 200 is provided with a frame opening 210 penetrating from top to bottom, the bottom surface of the fixed frame 200 is concave upward to form a recess 220, the recess 220 is connected and surrounds the frame opening 210, the upper substrate 2 and the upper guide plate 3 are accommodated in the frame opening 210, the abutting part 42 of the support plate 4 abuts against the top surface of the recess 220, the partition plate 6 is accommodated in the recess 220, and the fourth screw N4 passes through the recess 220 to lock the partition plate 6 to the fixed frame 200; when the test head 100 is unlocked from the fixed frame 200, the adjusting piece 5 can be removed, and the length of the probe 1 exposed below the lower guide plate 8 is adjusted by removing the adjusting piece 5. Generally, the normal probe 1 is exposed downward by a length of about 12-18 mils, when the probe 1 is shortened due to test loss, when the exposed length of the probe 1 is shortened to 6-8 mils, one adjusting piece 5 should be removed, the exposed length of the probe 1 is increased to maintain 12-18 mils, until the last adjusting piece 5 is removed and the last exposed length of the probe 1 is 6-8 mils, and then the test head 100 is scrapped.

[0044] The assembly steps of the test head 100 and the fixed frame 200 of the embodiment are as follows:

[0045] 1. The lower substrate 7 and the lower guide plate 8 are bonded in alignment and then the lower substrate 7 is placed in alignment on the corresponding position of the partition plate 6 and locked by the second screw N2;

[0046] 2. The lower guide plate 8, the lower substrate 7 and the partition plate 6 are turned over by 180 degrees, and the plurality of adjusting pieces 5 are stacked on the partition plate 6;

[0047] 3. The upper substrate 2, the upper guide plate 3 and the support plate 4 are bonded in alignment, then the support plate 4 is placed on the adjusting pieces 5 in alignment with the partition plate 6 in the up-down direction, and the support plate 4 and the partition plate 6 are locked by the first screw N1 and the third screw N3;

[0048] 4. The plurality of probes 1 are inserted from above the upper substrate 2, and the lower ends of the probes 1 are exposed below the lower guide plate 8;

[0049] 5. The upper guide plate 3 and the lower guide plate 8 are misaligned and offset;

[0050] 6. Finally, the partition 6 is locked onto the fixed frame 200, thereby achieving the locking of the test head 100 and the fixed frame 200.

[0051] like Figures 10 to 11 The second embodiment of the present invention is shown. The difference between the second embodiment and the first embodiment is that the boundary of the support plate 4 is aligned vertically with the upper substrate 2 and the upper guide plate 3 (that is, the surface of the support plate 4 is smaller, and the abutment part 42 and the locking hole 421 are not present). The lower substrate 7 is provided with an extension part 72, which extends horizontally beyond the periphery of the lower guide plate 8. The extension part 72 supports the adjusting piece 5 upward. The extension part 72 has a screw hole 721 through which the third screw N3 passes, so that the extension part 72 in the vertical direction is locked to the partition plate 5 and the fixing frame 200 by a plurality of third screws N3. The side of the lower substrate 7 is recessed inward with a notch 73, and the pull-out part 52 of the adjusting piece 5 is exposed in the notch 73. The adjusting piece 5 is located between the partition plate 6 and the lower substrate 7. The rest of the structure is the same as that in the first embodiment, so it will not be described again.

[0052] like Figure 12 The third embodiment of the present invention is shown. The difference between the third embodiment and the first embodiment is that the thickness of the support plate 4 in the third embodiment is greater than that of the support plate 4 in the first embodiment, and the partition 6 is eliminated. The lower substrate 7 extends horizontally outward beyond the periphery of the lower guide plate 8, so the structure of the lower substrate 7 is the same as that of the support plate 4 in this embodiment (the materials and thicknesses of the support plate 4 and the lower substrate 7 are the same in this embodiment and the first embodiment, and the lower guide plate 8 is bonded to the lower substrate 7, so the thickness of the lower substrate 7 in this embodiment is also greater than that of the lower substrate 7 in the first embodiment). The lower substrate 7 is locked to the support plate 4 by the second screw N2, and the lower substrate 7 is locked to the support plate 4 and the fixing frame 200 by the third screw N3 and the fourth screw N4 (that is, in the first embodiment, the support plate 4 is not locked to the fixing frame 200, and is not locked to the lower substrate 7 and the lower guide plate 8). The adjusting piece 5 is located between the support plate 4 and the lower substrate 7. The rest of the structure is the same as that in the first embodiment, so it will not be described again.

[0053] like Figures 13 to 15The fourth embodiment of the present application is shown; the fourth embodiment is different from the first embodiment in that the adjusting piece 5 has a plurality of outwardly protruding protrusions 54, the protrusions 54 have accommodating grooves 541 for the third screw N3 to pass through (i.e. the third screw N3 is accommodated in the accommodating grooves 541 and not in the sliding grooves 53), the abutting portion 42 of the support plate 4 is in the shape of a plurality of small protrusions horizontally extending outwardly, when the test head 100 is assembled, the protrusions 54 of the adjusting piece 5 are located below the abutting portion 42; the recessed portion 220 of the fixed frame 200 is further provided with an abutting surface 221, the abutting surface 221 is lower than the top surface 222 of the recessed portion 220, the partition plate 6 abuts upwardly against the abutting surface 221, the abutting portion 42 abuts upwardly against the top surface 222 of the recessed portion 220 and locks the support plate 4, the partition plate 6 and the fixed frame 200 together by the third screw N3.

[0054] In summary, the first embodiment and the fourth embodiment of the present application combine the lower base plate 7 and the lower guide plate 8 to form an integral whole to enhance the strength of the lower guide plate 8, combine the support plate 4, the upper base plate 2 and the upper guide plate 3 to form an integral whole to enhance the strength of the upper guide plate 3, extend the support plate 4 so that the support plate 4 can abut against the fixed frame 200 to fix the support plate 4 so that the position of the support plate 4 remains unchanged before and after the adjusting piece 5 is removed; when the fourth screw N4 that locks the partition plate 6 and the fixed frame 200 is removed to unlock the test head 100 and the fixed frame 200, the length of the probe 1 exposed below the lower guide plate 8 is increased by horizontally pulling out the adjusting piece 5, moving the partition plate 6 upwardly and exposing the probe 1 (specifically, Figure 7 The length of the probe 1 exposed below the lower guide plate 8 is L1, Figure 9 The length of the probe 1 exposed below the lower guide plate 8 is L2, L2>L1), to prolong the service life of the probe card.

[0055] The second embodiment of the present application combines the support plate 4, the upper base plate 2 and the upper guide plate 3 to form an integral whole to enhance the strength of the upper guide plate 3, combines the lower base plate 7 and the lower guide plate 8 to form an integral whole to enhance the strength of the lower guide plate 8, extends the plate surface of the lower base plate 7 so that the partition plate 6 can be locked together with the lower base plate 7 and the fixed frame 200; the partition plate 6 abuts against the fixed frame 200 to fix the partition plate 6 so that the position of the partition plate 6 remains unchanged before and after the adjusting piece 5 is removed; when the test head 100 is unlocked from the fixed frame 200, after the adjusting piece 5 is pulled out, the lower base plate 7 moves upwardly during the process of relocking the test head 100 and the fixed frame 200, to increase the length of the probe 1 exposed below the lower guide plate 8 to prolong the service life of the probe card.

[0056] The third embodiment of the present application enhances the strength of the upper guide plate 3 by combining and fixing the support plate 4, the upper substrate 2 and the upper guide plate 3 as a whole, enhances the strength of the lower guide plate 8 by combining and fixing the lower substrate 7 and the lower guide plate 8 as a whole, extends the support plate 4 so that the support plate 4 can be abutted against the fixing frame 200, thereby fixing the support plate 4 so that the position of the support plate 4 remains unchanged before and after the removal of the adjusting piece 5, extends the lower substrate 7 so that the lower substrate 7 can be locked with the support plate 4 and the fixing frame 200 through the third screw N3, and when the fourth screw N4 that locks the support plate 4 and the fixing frame 200 is removed, the third screw N3 makes the test head 100 and the fixing frame 200 unlocked, and by horizontally pulling out the adjusting piece 5, the lower substrate 7 is moved upward, the length of the probe 1 exposed from the lower guide plate 8 is increased, thereby prolonging the service life of the probe card.

[0057] The above detailed description is only for the preferred embodiments of the present application, and is not intended to limit the patent scope of the present application. Therefore, any equivalent technical changes made according to the description and drawings of the present application are included in the patent scope of the present application.

Claims

1. A test head for securing to a fixture for testing a die, comprising: The test head comprises a plurality of probes, an upper guide plate, a support plate, a plurality of upper and lower stacked adjusting pieces, and a lower guide plate arranged in sequence from top to bottom; the lower end of the probe is used to contact the chip; the upper guide plate and the lower guide plate are respectively provided with a plurality of guide holes corresponding to the probes for the probes to pass through; the support plate is provided with a through slot penetrating from top to bottom, and the through slot is used for the plurality of probes to pass through; the upper guide plate and the support plate are combined and fixed as a whole to strengthen the strength of the upper guide plate; the support plate has an abutting portion which exceeds the periphery of the upper guide plate in the horizontal direction so that the abutting portion abuts against the fixed frame in the vertical direction; when the test head is unlocked from the fixed frame, the adjusting pieces can be removed, and the length of the probe exposed to the lower guide plate is adjusted by removing the adjusting pieces. The adjusting pieces are separated into two halves in the horizontal direction, so that when the adjusting pieces are removed, the adjusting pieces are pulled out in the horizontal direction.

2. The test head of claim 1, wherein: The side edge of the support plate is concave, and the side edge of the adjusting piece has a pull-out portion which is exposed to the concave groove; the pull-out portions of the plurality of adjusting pieces are arranged in multiple steps.

3. The test head of claim 2, wherein: A plurality of screws pass through the support plate and the upper guide plate; the adjusting piece has a plurality of sliding grooves extending in the horizontal direction, and the screws are accommodated in the sliding grooves; when the adjusting piece is pulled out, the sliding groove slides relative to the screw in the horizontal direction.

4. The test head of claim 2, wherein: The abutting portion has a locking hole for the screw to pass through to lock the support plate to the fixed frame.

5. The test head of claim 1, wherein: The material of the support plate is different from that of the upper guide plate, and the material of the support plate has stronger stress and tensile resistance than that of the upper guide plate.

6. The test head of claim 1, wherein: The upper guide plate and the support plate are bonded together, or the two are locked together by screws.

7. The test head of claim 1, wherein: The test head and the fixed frame as claimed in any one of claims 1 to 7.

8. A probe card characterized by Further comprising a partition plate, the thickness of the partition plate is greater than the thickness of the support plate, the partition plate is located between the adjusting piece and the lower guide plate, the partition plate is provided with an accommodation cavity for the plurality of probes to pass through, and the support plate is locked to the partition plate by a plurality of screws; the fixed frame is provided with a frame opening penetrating from top to bottom, the bottom surface of the fixed frame is concave upward to form a recess, the recess is connected to and surrounds the frame opening, the upper guide plate is located in the frame opening, the partition plate and the support plate are accommodated in the recess, the screw passes through the recess to lock the partition plate to the fixed frame, and the abutting portion abuts against the top surface of the recess upward. The recess further has an abutting surface which is lower than the top surface of the recess, the partition plate abuts against the abutting surface upward, and the screw passes through the partition plate, the abutting portion, and the fixed frame to lock the abutting portion to the fixed frame.

9. The probe card of claim 8, wherein: The test head and the fixed frame as claimed in any one of claims 1 to 7.

10. The probe card of claim 9, wherein: ​ 11. A test head for securing to a fixture for testing a die, comprising: ​ A plurality of probes, and from top to bottom, an upper guide plate, a partition plate, a plurality of upper and lower stacked adjusting pieces, a lower base plate, and a lower guide plate; the lower end of the probe is used to contact the chip; the upper guide plate and the lower guide plate are respectively provided with a plurality of guide holes corresponding to the probes for the probes to pass through; the lower base plate is provided with a through slot penetrating from top to bottom, and the partition plate is provided with a receiving cavity penetrating from top to bottom, and the through slot and the receiving cavity are respectively used for the plurality of probes to pass through; the partition plate is locked to a fixed frame, the lower guide plate and the lower base plate are combined and fixed as a whole to strengthen the strength of the lower guide plate, when the partition plate and the fixed frame are unlocked, the adjusting piece can be removed, and the length of the probe exposed to the lower guide plate is adjusted by removing the adjusting piece.

12. The test head of claim 11, wherein: The lower base plate has an extension part which exceeds the periphery of the lower guide plate in the horizontal direction, so that the extension part overlaps the fixed frame when viewed from bottom to top, and the extension part supports the adjusting piece upward.

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