High-frequency high-performance radio frequency probe card correction equipment

Abstract

The utility model discloses high-frequency high-performance radio frequency probe card correction equipment which comprises a front-back moving mechanism and a detection groove formed in the upper end of the front-back moving mechanism, a detector is arranged on the upper side of the front-back moving mechanism, and the outer wall of the lower end of the detector is fixedly connected with a correction head. A fixing frame is fixedly connected to the outer wall of the rear end of the detector, a driver is arranged on the upper side of the fixing frame to drive the fixing frame to move up and down, and by installing a push plate, a vertical rod and a guide plate, when the high-frequency and high-performance radio frequency probe card in the detection groove needs to be taken out, the guide plate can be pressed down, and the guide plate takes the vertical rod as a fulcrum to take out the high-frequency and high-performance radio frequency probe card. The left push plate is driven to jack up the high-frequency high-performance radio frequency probe card in the detection groove, so that the step of taking the card is greatly simplified, the complexity of manual operation is reduced, the working efficiency is improved, the need of directly and manually contacting the probe card can be reduced, and the risk of damage or misoperation is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the probe correction related technical field, concretely relates to a high frequency high performance radio frequency probe card correction equipment. BACKGROUND

[0002] Radio frequency probe card correction equipment is usually used for high frequency test and measurement to ensure the performance and accuracy of radio frequency probe cards. These devices are very important in semiconductor testing, radio frequency component testing, and network equipment testing.

[0003] However, when taking out the probe card in the detection slot, it often takes a certain amount of time to take out the probe card from the detection slot, and when taking out, secondary damage to the pins may occur. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of high frequency high performance radio frequency probe card correction equipment to solve the problem that probe card in detection slot is often taken out and takes a certain amount of time to take out the probe card from the detection slot in the above background technology.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of high frequency high performance radio frequency probe card correction equipment, including front and back moving mechanism and detection slot being opened in the upper end of front and back moving mechanism;

[0006] The upper side of the front and back moving mechanism is provided with a detector;

[0007] The lower end outer wall of the detector is fixedly connected with a correction head;

[0008] The rear end outer wall of the detector is fixedly connected with a fixed frame, and the upper side of the fixed frame is provided with a driver to drive the fixed frame to move up and down;

[0009] The inside of the detection slot is provided with two push plates, and the right end outer wall between the two push plates is fixedly connected with a guide plate, and the lower side of the guide plate is provided with a vertical rod.

[0010] Preferably, a clamping groove a is opened in the right end outer wall of the detection slot, and a clamping groove b is opened in the right side of the clamping groove a.

[0011] Preferably, the right end outer wall of the guide plate is fixedly connected with a fixed plate.

[0012] Preferably, the upper end outer wall of the fixed plate is fixedly connected with a fixed rod, and the upper end outer wall of the fixed rod is fixedly connected with a button.

[0013] Preferably, the guide plate is inclined.

[0014] Preferably, the front and rear moving mechanism is provided with a horizontal moving mechanism, and the horizontal moving mechanism is provided with a base.

[0015] Preferably, the upper end outer wall of the base is fixedly connected with guide rails b respectively near the front and rear sides, so as to limit and guide the movement of the horizontal moving mechanism.

[0016] Preferably, the upper end outer wall of the base is fixedly connected with a stand near the rear side, so as to limit the installation position of the driver.

[0017] Compared with the prior art, the high-frequency high-performance RF probe card correction equipment has the following beneficial effects:

[0018] When the high-frequency high-performance RF probe card in the detection groove needs to be taken out, the guide plate is pressed, the guide plate takes the stand as a fulcrum, drives the left push plate, and lifts up the high-frequency high-performance RF probe card in the detection groove, so that the steps of taking the card are greatly simplified, the complexity of manual operation is reduced, the work efficiency is improved, the need for directly manually contacting the probe card is reduced, the risk of damage or incorrect operation is reduced, and the integrity of the high-frequency high-performance RF probe card is protected. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a high-frequency high-performance RF probe card correction equipment structural schematic view of the utility model.

[0020] Figure 2 It is a detector area front view structural schematic view of the utility model.

[0021] Figure 3 It is a detection groove area local structural schematic view of the utility model.

[0022] Figure 4 It is a card slot a area front view partial structural schematic view of the utility model.

[0023] In the drawing: 1, base; 2, horizontal moving mechanism; 3, guide rail a; 4, front and rear moving mechanism; 5, detection groove; 6, stand; 7, driver; 8, fixed frame; 9, detector; 10, guide rail b; 11, correction head; 12, card slot a; 13, card slot b; 14, fixed rod; 15, button; 16, push plate; 17, stand; 18, fixed plate; 19, guide plate. DETAILED DESCRIPTION

[0024] Clearly and completely describe the technical scheme in the embodiments of the utility model with the drawings in the embodiments of the utility model below, obviously, the described embodiments are only some embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor belong to the scope of the utility model protection.

[0025] The utility model provides a high frequency high performance radio frequency probe card correction equipment as Figures 1-4 As shown in a kind of high frequency high performance radio frequency probe card correction equipment, including front and rear moving mechanism 4 and the detection groove 5 being opened in the upper end of front and rear moving mechanism 4;

[0026] The upper side of front and rear moving mechanism 4 is provided with detector 9;

[0027] The lower end outer wall of detector 9 is fixedly connected with correction head 11;

[0028] The rear end outer wall of detector 9 is fixedly connected with fixed frame 8, the upper side of fixed frame 8 is provided with driver 7, to drive fixed frame 8 to move up and down, before correction, first place high frequency high performance radio frequency probe card in detection groove 5, ensure its stability, start detector 9, detector 9 moves down, so that correction head 11 contacts probe card, carries out preliminary detection, detector 9 reads the performance parameters of probe card, such as resistance, impedance etc., through its connection with correction head 11, according to the difference of performance parameter, correction is carried out through correction head, then the probe card is taken out, and the next probe card can be corrected;

[0029] The inside of detection groove 5 is provided with two push plates 16, the right end outer wall between two push plates 16 is fixedly connected with guide plate 19, the lower side of guide plate 19 is provided with vertical rod 17, when taking out probe card, press down guide plate 19, guide plate 19 will take vertical rod 17 as fulcrum, and the probe card on the upper side of push plate 16 is lifted by push plate 16, and the probe card is lifted on one side, so that the probe card is taken out from detection groove 5 by operator.

[0030] As shown in Figure 3 And Figure 4 The right end outer wall of detection groove 5 is provided with clamping groove a12, the right side of clamping groove a12 is provided with clamping groove b13, and the right end outer wall of guide plate 19 is fixedly connected with fixed plate 18.

[0031] Guide plate 19 is arranged in clamping groove a12 and clamping groove b13, and vertical rod 17 is also arranged in clamping groove a12 and is located at the junction of clamping groove a12 and clamping groove b13.

[0032] As shown in Figure 3 And Figure 4As shown, the upper end of the fixed plate 18 is fixedly connected with a fixed rod 14, and the upper end of the fixed rod 14 is fixedly connected with a button 15. The guide plate 19 is inclined.

[0033] When the guide plate 19 is pressed, the operator presses the button 15 downward by fingers, so as to press the fixed plate 18 downward through the fixed rod 14. The fixed plate 18 and the guide plate 19 are pressed downward, and after the pressing is completed, the probe card is placed on the upper side of the push plate 16 again, so as to reset the guide plate 19.

[0034] As shown in the figure, Figure 1 The lower side of the front and rear moving mechanism 4 is provided with a horizontal moving mechanism 2, and the lower side of the horizontal moving mechanism 2 is provided with a base 1. The upper end of the base 1 is fixedly connected with guide rails b10 near the front and rear sides respectively, so as to limit and guide the movement of the horizontal moving mechanism 2. The upper end of the horizontal moving mechanism 2 is fixedly connected with guide rails a3 near the left and right sides respectively, so as to limit and guide the movement of the front and rear moving mechanism 4.

[0035] The base 1 provides stable support for the whole device and ensures that other components do not move during operation. The horizontal moving mechanism 2 is located above the base 1 and can move accurately in the horizontal direction through the guide rails b10. The front and rear moving mechanism 4 is installed on the upper part of the horizontal moving mechanism 2 and is guided by the guide rails a3 to ensure its movement in the front and rear directions.

[0036] As shown in the figure, Figure 1 The upper end of the base 1 is fixedly connected with a vertical column 6 near the rear side, so as to limit the installation position of the driver 7.

[0037] The vertical column 6 is a support component that is fixed to the rear side of the base 1 to provide a solid installation position for the driver 7, ensuring its stability and support for the optical system, avoiding the influence of vibration on the correction accuracy.

[0038] The principle of this embodiment is as follows: before correction, first place a high-frequency high-performance RF probe card in the detection groove 5 to ensure its stability, start the detector 9, and move the detector 9 downward so that the correction head 11 contacts the probe card and performs preliminary detection. The detector 9 reads the performance parameters of the probe card, such as resistance and impedance, through its connection with the correction head 11. Then, according to the difference in performance parameters, the correction head is used for correction. After the probe card is taken out, the next probe card can be corrected. When the probe card is taken out, the guide plate 19 is pressed, and the guide plate 19 will be pivoted on the vertical rod 17, and the probe card on the upper side of the push plate 16 will be lifted by the push plate 16. The probe card will be lifted on one side, which is convenient for the operator to take out the probe card from the detection groove 5.

[0039] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application has been described in detail, for the skilled in the art, it still can be modified, or for part of the technical features of the equivalent replacement, the spirit and principles of the present application, made any modification, equivalent replacement, improvement, etc., should be included within the scope of the present application.

Claims

1. A high-frequency high-performance radio frequency probe card correction equipment, comprising a front and rear moving mechanism (4) and a detection slot (5) opened on the upper end of the front and rear moving mechanism (4); The upper side of the front and rear moving mechanism (4) is provided with a detector (9); The lower end outer wall of the detector (9) is fixedly connected with a correction head (11); The rear end outer wall of the detector (9) is fixedly connected with a fixed frame (8), and the upper side of the fixed frame (8) is provided with a driver (7) to drive the fixed frame (8) to move up and down; characterized in that The inside of the detection slot (5) is provided with two push plates (16), and the right end outer walls of the two push plates (16) are fixedly connected with a guide plate (19), and the lower side of the guide plate (19) is provided with a vertical rod (17).

2. A high-frequency high-performance RF probe card correction apparatus according to claim 1, characterized by: The right end outer wall of the detection slot (5) is provided with a clamping groove a (12), and the right side of the clamping groove a (12) is provided with a clamping groove b (13).

3. A high frequency high performance RF probe card correction apparatus according to claim 1, wherein: The right end outer wall of the guide plate (19) is fixedly connected with a fixed plate (18).

4. A high frequency, high performance RF probe card correction apparatus as claimed in claim 3, wherein: The upper end outer wall of the fixed plate (18) is fixedly connected with a fixed rod (14), and the upper end outer wall of the fixed rod (14) is fixedly connected with a button (15).

5. The high frequency high performance RF probe card correction apparatus according to claim 1, wherein: The guide plate (19) is inclined.

6. A high frequency high performance RF probe card correction apparatus as claimed in claim 1, wherein: The lower side of the front and rear moving mechanism (4) is provided with a horizontal moving mechanism (2), and the lower side of the horizontal moving mechanism (2) is provided with a base (1).

7. A high frequency, high performance RF probe card correction apparatus as claimed in claim 6, wherein: The upper end outer wall of the base (1) is fixedly connected with guide rails b (10) near the front and rear sides respectively, so as to limit and guide the movement of the horizontal moving mechanism (2), and the upper end outer wall of the horizontal moving mechanism (2) is fixedly connected with guide rails a (3) near the left and right sides respectively, so as to limit and guide the movement of the front and rear moving mechanism (4).

8. A high frequency, high performance RF probe card correction apparatus as claimed in claim 6, wherein: The upper end outer wall of the base (1) is fixedly connected with a vertical column (6) near the rear side, so as to limit the installation position of the driver (7).

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