Needle grinding machine

Abstract

The utility model discloses a kind of needle grinding machines, the needle grinding machine includes main body, work platform, fixed module and movement module;Work platform is installed on main body;Movement module includes movement platform and the drive portion that can drive movement platform movement;The position of work platform corresponding to movement platform is provided with work window;Fixed module is set on work platform, and movement platform can be driven in drive portion in work window movement to carry out grinding to the probe of probe card;First image module and second image module are further provided on work platform;First image module includes the first mechanical arm being set on work platform, the microscopic imaging device being set on first mechanical arm and first display screen;Second image module includes the camera being set on work platform and second display screen.The first image module and second image module of the present application can display the specific grinding condition of the probe of probe card in the grinding process from multiple angles, thereby providing accurate reference for user.

Description

Technical Field

[0001] This utility model relates to the field of high-end equipment manufacturing, specifically to a needle grinding machine. Background Technology

[0002] The chip industry is currently booming. During chip manufacturing, before chip packaging, wafers need to be inspected to prevent defective wafers from being further processed. Wafer inspection requires probe cards, which consist of multiple probes that transmit test signals by directly contacting the pads or bumps on the wafer. During probe card manufacturing, newly manufactured probe tips are typically quite sharp. Direct contact with the wafer can easily lead to problems such as poor connections, loose connections, or scratches on the pads, thus affecting test accuracy and causing yield losses. Therefore, a probe grinding machine is used to grind the probe tips into a spherical or near-spherical shape to increase the contact area, reduce contact resistance, and ensure test stability.

[0003] Currently, during the grinding process of probe tips, images are generally captured and displayed using a single-view camera, or the grinding effect is observed manually.

[0004] However, the current monitoring methods for needle grinding machines are relatively simple, which makes it difficult to fully reflect the grinding status of the probe tip. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this application provides a needle grinding machine that, through a first image module and a second image module, can display the specific grinding status of the probes on the probe card from multiple angles during the grinding process, thereby providing users with accurate references.

[0006] To solve the above problems, this utility model provides the following technical solution:

[0007] In a first aspect, embodiments of this application provide a needle grinding machine, which includes a main body, a working platform, a fixing module, and a motion module;

[0008] The working platform is mounted on the main body;

[0009] The motion module includes a motion platform and a drive unit that can move the motion platform;

[0010] The work platform has a work window corresponding to the position of the motion platform, and the size of the work window is larger than the size of the motion platform.

[0011] The fixing module is disposed on the working platform. The fixing module includes multiple sets of symmetrically arranged fixing brackets. The multiple sets of fixing brackets are used to fix the probe card in the working window at the position corresponding to the motion platform. The motion platform can move in the working window under the drive of the driving part to grind the probe of the probe card.

[0012] The working platform is also equipped with a first image module and a second image module;

[0013] The first image module includes a first robotic arm mounted on the working platform, a microscopic imaging device mounted on the first robotic arm, and a first display screen. The first robotic arm can drive the microscopic imaging device to move, and the first display screen can display an image obtained by the microscopic imaging device from a first angle of the probe card.

[0014] The second image module includes a camera and a second display screen mounted on the working platform. The second display screen can display an image captured by the camera from a second angle, which is different from the first angle.

[0015] In some embodiments, the working platform is provided with a plurality of mounting holes arranged in a preset relationship for each of the fixed brackets, which allow the magnetic fastener to be installed. The fixed bracket includes a magnet that attracts the magnetic fastener.

[0016] In some embodiments, the second image module has multiple cameras, which are positioned at different locations on the working platform.

[0017] In some embodiments, the driving unit includes a first driving unit, a second driving unit, and a third driving unit;

[0018] The first driving unit includes a first slider and a first electromagnetic driving member, wherein the first electromagnetic driving member can drive the first slider to move along a first direction;

[0019] The second driving unit includes a second slider and a second electromagnetic driving member, wherein the second electromagnetic driving member can drive the second slider to move along a second direction;

[0020] The motion platform is fixedly connected to the first slider of the first drive unit, the first drive unit is fixedly connected to the second slider of the second drive unit, and the second drive unit is fixedly connected to the third slider of the third drive unit. The third slider can move along a third direction, and the first direction, the second direction and the third direction are different from each other.

[0021] In some embodiments, the motion platform includes a first connecting plate and a second connecting plate, wherein the first connecting plate is fixedly connected to the first slider, and the second connecting plate is fixedly connected to the first connecting plate;

[0022] The first connecting plate includes a first hole;

[0023] The first driving unit further includes a grating ruler and a fourth slider connected to the sliding part of the grating ruler. The fourth slider is embedded in the first hole and fixedly connected to the first connecting plate by a plurality of fasteners.

[0024] In some embodiments, the first driving unit further includes a first limiting device, which can limit the movement of the first slider in the first direction;

[0025] The second drive unit also includes a second limiting device, which can limit the movement of the second slider in the second direction.

[0026] In some embodiments, the first drive unit further includes a first slide rail, and there are two first slide rails. Each first slide rail includes a first slide rail groove, a first slide rail assembly, and a second slide rail assembly. The first slide rail assembly is fixedly connected to the motion platform and located in the first slide rail groove. The second slide rail assembly is fixedly disposed on the first slide rail groove and parallel to the first slide rail assembly. The second slide rail assembly can restrict the first slide rail assembly to slide within the first slide rail groove.

[0027] The second drive unit further includes a second slide rail, and there are two second slide rails. Each second slide rail includes a second slide rail groove, a third slide rail assembly, and a fourth slide rail assembly. The third slide rail assembly is fixedly connected to the first drive unit and located in the second slide rail groove. The fourth slide rail assembly is fixedly disposed on the second slide rail groove and parallel to the third slide rail assembly. The fourth slide rail assembly can restrict the third slide rail assembly to slide within the second slide rail groove.

[0028] In some embodiments, the second slide rail assembly is provided with a first slide rail adjustment device, which can adjust the fixed position of the second slide rail assembly to adjust the first distance between the first slide rail assembly and the second slide rail assembly;

[0029] The second slide rail assembly is provided with a second slide rail adjustment device, which can adjust the fixed position of the fourth slide rail assembly to adjust the second distance between the third slide rail assembly and the fourth slide rail assembly.

[0030] In some embodiments, the third drive unit further includes a servo motor, a lead screw, and a vertical motion assembly;

[0031] The servo motor is connected to the lead screw, the lead screw is movably connected to the vertical motion component, and the vertical motion component is fixedly connected to the third slider. The vertical motion component can convert the rotational motion of the lead screw into the vertical motion of the third slider. The third direction is the vertical direction.

[0032] In some embodiments, the working platform is further provided with a plane calibration device, which includes a guide rod arranged in a vertical direction, a sliding assembly slidably sleeved on the guide rod, and a micrometer screw mounted on the sliding assembly, wherein the micrometer screw is facing the plane of the working platform.

[0033] This application provides a needle grinding machine. Through a first image module and a second image module, this application can display the specific grinding status of the probes on the probe card from multiple angles during the grinding process, thereby providing users with accurate reference. Attached Figure Description

[0034] Figure 1 This is a three-dimensional structural diagram of the grinding needle machine provided in the embodiments of this application.

[0035] Figure 2 This is an exploded schematic diagram of the grinding needle machine provided in the embodiments of this application.

[0036] Figure 3 This is a schematic diagram of the first connector, the first drive unit, and the second drive unit of the grinding needle machine provided in the embodiments of this application.

[0037] Figure 4 This is a schematic diagram of the servo motor, lead screw, and vertical motion assembly of the third drive unit of the grinding needle machine provided in the embodiments of this application. Detailed Implementation

[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0040] This application provides a needle grinding machine, which, through a first image module and a second image module, can display the specific grinding status of the probes on the probe card from multiple angles during the grinding process, thereby providing users with accurate reference.

[0041] The grinding needle machine provided in this application will now be described in detail with reference to the accompanying drawings.

[0042] Please see Figure 1 and Figure 2 , Figure 1 This is a three-dimensional structural diagram of the needle grinding machine provided in the embodiments of this application. Figure 2 This is an exploded view of the grinding needle machine provided in an embodiment of this application. Figure 1 and Figure 2 As shown, in some embodiments, the needle grinding machine 1 includes a main body 10, a working platform 11, a fixing module 30, and a motion module 20. The working platform 11 is mounted on the main body 10.

[0043] Optionally, the main body 10 includes a cabinet with a receiving space, and the cabinet has a door that is movably connected to the cabinet opening. The needle grinding machine 1 also includes electronic equipment for controlling the operation of the needle grinding machine 1, and both the electronic equipment and the motion module 20 are disposed within the receiving space of the cabinet.

[0044] In some embodiments, the motion module 20 includes a motion platform 21 and a drive unit D that can move the motion platform 21. The motion platform 21 is used to move under the drive of the drive unit D to grind the probes of the probe card.

[0045] Optionally, abrasive paper for grinding the probes of the probe card can be fixed on the motion platform 21.

[0046] like Figure 1 As shown, in some embodiments, the work platform 11 has a work window 40 at a position corresponding to the motion platform 21, and the size of the work window 40 is larger than the size of the motion platform 21.

[0047] Optionally, the work platform 11 may be made of marble.

[0048] Optionally, the fixing module 30 is disposed on the working platform 11. The fixing module 30 includes multiple sets of symmetrically arranged fixing brackets. The multiple sets of fixing brackets are used to fix the probe card in the working window 40 at the position corresponding to the motion platform 21. The motion platform 21 can move in the working window 40 under the drive of the drive unit D to grind the probe of the probe card.

[0049] like Figure 2 As shown, in some embodiments, multiple sets of symmetrically arranged fixing brackets include a fixing bracket 31 for fixing a square probe card and a fixing bracket 32 ​​for fixing a round probe card.

[0050] In some embodiments, the working platform 11 is provided with a plurality of mounting holes K arranged in a preset arrangement for each fixed bracket position, which allow the magnetic fastener to be installed. The fixed bracket includes a magnet that attracts the magnetic fastener.

[0051] Alternatively, the magnetic fastener can be a magnetic strip.

[0052] like Figure 1 As shown, in some embodiments, the working platform 11 is further provided with a first image module 50 and a second image module 60. The first image module 50 includes a first robotic arm 51 disposed on the working platform 11, a microscopic imaging device 52 disposed on the first robotic arm 51, and a first display screen 53. The first robotic arm 51 can drive the microscopic imaging device 52 to move, and the first display screen 53 can display an image obtained by the microscopic imaging device 52 from a first angle of the probe card. The second image module 60 includes a camera 61 disposed on the working platform 11 and a second display screen 62. The second display screen 62 can display an image obtained by the camera 61 from a second angle of the probe card, which is different from the first angle.

[0053] Optionally, the second image module 60 may have multiple cameras 61, which are positioned at different locations on the work platform 11. Therefore, each camera 61 can have a different shooting angle.

[0054] Optionally, the second image module 60 may include a camera 61 disposed on the work platform 11 and located on the side of the work window 40.

[0055] Optionally, the second image module 60 may include a camera 61 disposed on the work platform 11 and located directly above the work window 40.

[0056] like Figure 1 As shown, in some embodiments, the main body 10 of the needle grinding machine 1 is further provided with a third display screen 70 and a plurality of operation buttons 80. The third display screen 70 is used to display the control interface of the needle grinding machine 1 system. Optionally, the third display screen 70 can be a touch screen. The plurality of operation buttons 80 may include a start button, an emergency stop button, and a reset button, etc. The third display screen 70 and the plurality of operation buttons 80 can be used to send control commands to electronic devices.

[0057] In some embodiments, the grinding machine 1 also includes an alarm device. The alarm device is used to send alarm information to the third display screen 70 for display when an abnormality is detected in the grinding process. The alarm information includes the current date, alarm trigger time, details of the abnormality, and recovery time.

[0058] In some embodiments, the third display screen 70 can also be used to display monitoring content of the grinding process. The monitoring content may include the operating parameters of the first drive unit D1, the second drive unit D2, and the third drive unit D3 during the grinding process. Operating parameters may include the number of movements and the distance traveled, etc.

[0059] like Figure 2 As shown, in some embodiments, the driving unit D includes a first driving unit D1, a second driving unit D2, and a third driving unit D3. The first driving unit D1 includes a first slider D11 and a first electromagnetic drive member D12, which drives the first slider D11 to move along a first direction. The second driving unit D2 includes a second slider and a second electromagnetic drive member, which drives the second slider to move along a second direction. The third driving unit D3 includes a movable third slider D34. Optionally, the third driving unit D3 further includes a servo motor D31, a lead screw D32, and a vertical motion assembly D33. The vertical motion assembly D33 is fixedly connected to the third slider D34. The servo motor D31 drives the lead screw D32 to rotate, and the vertical motion assembly D33 converts the rotational motion of the lead screw D32 into the vertical motion of the third slider D34. The motion platform 21 is fixedly connected to the first slider D11 of the first drive unit D1. The first drive unit D1 is fixedly connected to the second slider of the second drive unit D2. The second drive unit D2 is fixedly connected to the third slider D34 of the third drive unit D3. The third slider D34 can move along a third direction, and the first direction, the second direction, and the third direction are different from each other. In this way, the drive unit D can drive the motion platform 21 to move arbitrarily in space, thereby enabling the needle grinding machine 1 to perform various grinding methods and making it suitable for grinding various types of probe cards.

[0060] Optionally, the first direction, the second direction, and the third direction are perpendicular to each other.

[0061] In some implementations, the first direction is the Y-axis of the spatial coordinate system, the second direction is the X-axis of the spatial coordinate system, and the third direction is the Z-axis of the spatial coordinate system. The plane containing the X-axis and Y-axis is a horizontal plane, and the Z-axis direction is a vertical direction.

[0062] Optionally, the first electromagnetic drive unit D12 and the second electromagnetic drive unit can be an iron core or a magnetic core. When the first drive unit D1 is energized, the first electromagnetic drive unit D12 can drive the first slider D11 to move along a first direction through electromagnetic action. When the second drive unit D2 is energized, the second electromagnetic drive unit can drive the second slider to move along a second direction through electromagnetic action.

[0063] like Figure 2As shown, in some embodiments, the motion platform 21 includes a first connecting plate 211 and a second connecting plate 212. The first connecting plate 211 is fixedly connected to the first slider D11, and the second connecting plate 212 is fixedly connected to the first connecting plate 211. Please refer to [link / reference]. Figure 3 , Figure 3 This is a schematic diagram of the first connecting member, the first driving part, and the second driving part of the grinding needle machine provided in the embodiments of this application. Figure 3 As shown, the first connecting plate 211 includes a first hole 2111. The first driving part D1 also includes a first grating ruler and a fourth slider D13 connected to the sliding part G1 of the first grating ruler. The fourth slider D13 is embedded in the first hole 2111 and fixedly connected to the first connecting plate 211 by a plurality of fasteners.

[0064] Alternatively, the fastener can be a screw or rivet, etc.

[0065] Through the first connecting plate 211, the motion platform 21 can move under the drive of the first slider D11 of the first drive unit D1. When the first connecting plate 211 moves, it can drive the fourth slider D13 connected to the sliding part G1 of the first grating ruler to move, thereby making the first grating ruler work. Through the first grating ruler, the high-precision position feedback control of the linear motor of the first drive unit D1 can be realized, thereby accurately controlling the movement of the motion platform 21.

[0066] In some embodiments, the first drive unit D1, near the second drive unit D2, further includes a third connecting plate, which is fixedly connected to the second slider of the second drive unit D2. Optionally, the third connecting plate includes a second hole. The second drive unit D2 also includes a second grating ruler and a fifth slider connected to the sliding part of the second grating ruler. The fifth slider is embedded in the second hole and fixedly connected to the third connecting plate by multiple fasteners. Through the third connecting plate, the first drive unit D1 can move under the drive of the second slider of the second drive unit D2. When the third connecting plate moves, it can drive the fifth slider connected to the sliding part of the second grating ruler to move, thereby making the second grating ruler work. Through the second grating ruler, high-precision position feedback control of the linear motor of the second drive unit D2 can be realized, thereby accurately controlling the movement of the first drive unit D1.

[0067] In some embodiments, the first driving unit D1 further includes a first limiting device D14, which can limit the movement of the first slider D11 in a first direction. When the first limiting device D14 is triggered by the first slider D11, it can stop the first electromagnetic driving member D12 from driving the first slider D11 to move.

[0068] In some embodiments, the second drive unit D2 further includes a second limiting device, which can restrict the movement of the second slider in a second direction. When the second limiting device is triggered by the second slider, it can stop the second electromagnetic drive member from driving the movement of the second slider.

[0069] Optionally, the first limiting device D14 or the second limiting device can be a limiting sensor, which may include photoelectric limiting sensors, contact limiting sensors, and electromagnetic induction limiting sensors, etc.

[0070] In some embodiments, the first drive unit D1 further includes a first slide rail D15. There are two first slide rails D15, each including a first slide rail groove D151, a first slide rail assembly D152, and a second slide rail assembly D153. The first slide rail assembly D152 is fixedly connected to the motion platform 21 and located within the first slide rail groove D151. The second slide rail assembly D153 is fixedly disposed on the first slide rail groove D151 and parallel to the first slide rail assembly D152, and the second slide rail assembly D153 can restrict the first slide rail assembly D152 to slide within the first slide rail groove D151.

[0071] Optionally, the first slide rail assembly D152 of the two first slide rails D15 is fixedly connected to the first connecting plate 211 of the motion platform 21. The two first slide rails D15 can restrict the motion platform 21 to slide in a first direction defined by the first slide rail groove D151.

[0072] In some embodiments, the second drive unit D2 further includes a second slide rail. There are two second slide rails. Each second slide rail includes a second slide rail groove, a third slide rail assembly, and a fourth slide rail assembly. The third slide rail assembly is fixedly connected to the motion platform 21 and located in the second slide rail groove. The fourth slide rail assembly is fixedly disposed on the second slide rail groove and parallel to the third slide rail assembly. The fourth slide rail assembly can restrict the third slide rail assembly to slide within the second slide rail groove.

[0073] Optionally, the third slide rail assembly of the two second slide rails is fixedly connected to the third connecting plate of the first drive unit D1. The two second slide rails restrict the first drive unit D1 to slide in a second direction defined by the second slide rail grooves. Simultaneously, the first drive unit D1 can drive the motion platform 21 to move in a first direction, and the third drive unit D3 can drive the second drive unit D2 to move in a third direction, thereby enabling the motion platform 21 to perform composite movements in the first, second, and third directions. Because the first, second, and third directions are different from each other, the drive unit D1 can drive the motion platform 21 to move arbitrarily in space.

[0074] like Figure 3As shown, in some embodiments, a first slide rail adjustment device D154 is provided on the second slide rail assembly D153. The first slide rail adjustment device D154 can adjust the fixed position of the second slide rail assembly D153 to adjust the first distance between the first slide rail assembly D152 and the second slide rail assembly D153.

[0075] In some embodiments, the second slide rail assembly D153 is provided with a second slide rail adjustment device, which can adjust the fixed position of the fourth slide rail assembly to adjust the second gap between the third slide rail assembly and the fourth slide rail assembly.

[0076] Optionally, the first slide rail adjusting device D154 or the second slide rail adjusting device may include screws or rivets, etc.

[0077] Please see Figure 4 , Figure 4 This is a schematic diagram of the servo motor, lead screw, and vertical motion assembly of the third drive unit of the grinding machine provided in this application embodiment. Figure 4 As shown, in some embodiments, the third drive unit D3 further includes a servo motor D31, a lead screw D32, and a vertical motion component D33. The servo motor D31 is connected to the lead screw D32, the lead screw D32 is movably connected to the vertical motion component D33, and the vertical motion component D33 is fixedly connected to the third slider D34. The vertical motion component D33 can convert the rotational motion of the lead screw D32 into the vertical motion of the third slider D34. The third direction is the vertical direction.

[0078] Optionally, the vertical motion component D33 includes a fifth slide rail component D331 and a sixth slide rail component D332. The third slider D34 is slidably connected to the fifth slide rail component D331 and the sixth slide rail component D332. The lead screw D32 movably passes through the vertical motion component D33. When the servo motor D31 drives the lead screw D32 to rotate, the lead screw D32 drives the vertical motion component D33 to move horizontally, while the third slider D34 can move vertically under the guidance of the fifth slide rail component D331 and the sixth slide rail component D332.

[0079] In some embodiments, the third drive unit D3 further includes an origin detection device D35 disposed on the vertical motion component D33. The origin detection device D35 is used to detect whether the vertical motion component D33 has moved to a preset origin position.

[0080] In some embodiments, a plane calibration device is also provided on the working platform 11. The plane calibration device includes a guide rod arranged vertically, a sliding assembly slidably sleeved on the guide rod, and a micrometer screw mounted on the sliding assembly, with the micrometer screw facing the plane of the working platform 11. The micrometer screw is used to measure the distance between the motion platform 21 and the micrometer screw, so that the operator can adjust the motion platform 21 so that the upper surface of the motion platform 21 and the working platform 11 are on the same plane, thereby allowing the motion platform 21 to uniformly grind the probe.

[0081] This application also provides a control method for a needle grinding machine, used to control the needle grinding machine 1 as described above. In some embodiments, the control method for the needle grinding machine includes steps S100 to S400.

[0082] Step S100: When the probe card has been fixed by the fixing module of the needle grinding machine, obtain the arrangement type of the probe tips of the probe card.

[0083] The type of probe tip arrangement on the probe card refers to the type of lines formed by the arrangement of the probe tips on the probe card.

[0084] In some embodiments, probe cards include vertical probe cards and cantilever probe cards. The arrangement of the probe tips on a probe card includes, but is not limited to, vertical, linear, and arc-shaped arrangements. A vertical probe card has its probe tips arranged vertically, meaning the probes are perpendicular to the substrate and located in the vertical direction. Vertical probe cards can include vertical spring-loaded probe cards, a special type of vertical probe card whose probes employ a spring-loaded structure. A cantilever probe card is a probe card that includes a tiny cantilever beam structure, where the probes contact the wafer surface through elastic bending. Cantilever probe cards have various probe tip arrangements, including linear, arc-shaped, and arbitrary shapes.

[0085] Step S200: Determine the grinding method corresponding to the arrangement type based on the arrangement type and the first preset rule.

[0086] The first preset rule includes determining the grinding method of the probe card as a circular motion grinding method when the arrangement type is vertical, and taking an image of the probe card when the arrangement type is linear or arc-shaped, and determining the grinding method corresponding to the arrangement type based on the image of the probe card.

[0087] Optionally, the grinding method can be any specified motion that causes the motion platform 21 of the grinding needle machine 1 to make a grinding motion. For example, the grinding method may include circular motion grinding method, linear reciprocating motion grinding method, compound motion grinding method, reciprocating motion grinding method along an arc, reciprocating motion grinding method along an arbitrary curve, and other motion grinding methods, which are not limited here.

[0088] Optionally, the circular motion grinding method can further include a full-circular reciprocating motion grinding method and a semi-circular reciprocating motion grinding method. In the circular motion grinding method, the direction of rotation can be changed.

[0089] In some implementations, the linear reciprocating motion grinding method may include a grinding method that involves reciprocating motion along a specified or calculated linear line.

[0090] Optionally, the first preset rule further includes determining the grinding method corresponding to the arrangement type based on the arrangement type and the preset correspondence information between the arrangement type and the grinding method, and directly determining the grinding method corresponding to the arrangement type based on manually input instructions. In this case, step S200 includes step S210 or step S220.

[0091] Step S210: Determine the grinding method corresponding to the arrangement type based on the arrangement type and the preset correspondence information between the arrangement type and the grinding method.

[0092] In some implementations, in the preset correspondence information between arrangement types and grinding methods, one arrangement type corresponds to one grinding method, and the grinding method corresponding to the arrangement type can be determined according to the correspondence information between arrangement types and grinding methods.

[0093] Step S220: Display the arrangement type, and in response to receiving the grinding method determination instruction, obtain the grinding method corresponding to the arrangement type according to the grinding method determination instruction.

[0094] Optionally, the grinding method determination instruction includes the motion trajectory of the specified motion platform 21, and the grinding method corresponding to the arrangement type can be directly obtained according to the grinding method determination instruction.

[0095] When determining the grinding method corresponding to the arrangement type, it is necessary to move the motion platform 21 along the straight line of the probe itself as much as possible to reduce the frictional force on the probe tip in directions other than the straight line of the probe itself, thereby reducing the degree of probe deformation. For example, when the straight line of the probe itself is in the X-axis direction, the motion platform 21 is moved back and forth in the X-axis direction so that the probe tip will not deform due to friction in the Y-axis direction. Here, the X-axis is perpendicular to the Y-axis.

[0096] In some implementations, step S200 includes: capturing an image of the probe card; determining a first expression for a first line formed by the arrangement of multiple probe tips and a second expression for a second line where each probe is located based on the image of the probe card; calculating a motion mode that causes the velocity direction of the motion platform 21 to approach the second line where the probe is located based on the first expression and the second expression; and then determining a grinding mode based on the motion mode.

[0097] Optionally, an artificial intelligence model can be used to calculate the motion mode of the motion platform 21 based on the first and second expressions. The artificial intelligence model can be a deep Q-network model or a neural network model, etc.

[0098] Step S300: Determine the grinding parameters corresponding to the grinding method according to the grinding method and the second preset rule.

[0099] The grinding parameters include the first motion parameters of the first drive unit D1, the first motion parameters of the second drive unit D2, and the third motion parameters of the third drive unit D3 of the grinding needle machine 1.

[0100] Optionally, the first motion parameter includes motion speed, motion direction, number of motions, and distance of one motion.

[0101] Optionally, the second motion parameter includes motion speed, motion direction, number of motions, and distance of one motion.

[0102] Optionally, the third motion parameters include the grinding needle height, rising speed, number of rising strokes, height per rising stroke, falling speed, return-to-origin speed, and falling speed after the grinding process ends.

[0103] In some implementations, step S300 includes steps S310, S320, or steps S330 to S340.

[0104] Step S310: Determine the grinding parameters corresponding to the grinding method based on the grinding method and the preset correspondence information between the grinding method and the grinding parameters.

[0105] In some implementations, a preset correspondence between grinding methods and grinding parameters is provided, where one grinding method corresponds to a set of grinding parameters. Based on the grinding method and the correspondence between grinding methods and grinding parameters, the grinding parameters corresponding to that grinding method can be determined.

[0106] Optionally, in the preset correspondence information between grinding methods and grinding parameters, one grinding method corresponds to multiple sets of grinding parameters. The system can display the grinding methods and their corresponding sets of grinding parameters, and in response to receiving a grinding parameter determination command, retrieve the grinding parameters corresponding to the grinding method based on the command.

[0107] In some implementations, the number of each grinding parameter group, the height of the grinding needle, the number of times the motion platform 21 moves, the number of times the third drive unit D3 rises, the height of each rise, and the current position can be displayed.

[0108] Step S320: Display the grinding mode, and in response to receiving the grinding parameter determination instruction, obtain the grinding parameters corresponding to the grinding mode according to the grinding parameter determination instruction.

[0109] In some implementations, the grinding parameters can be manually input and determined based on the grinding parameters. This allows for arbitrary grinding methods, increasing the diversity of grinding approaches, and enabling targeted grinding of probes even when the arrangement is complex.

[0110] In some embodiments, when the grinding method has been calculated and determined, the grinding method can be displayed, and the movement speed and movement time of the first drive unit D1, the second drive unit D2, and the third drive unit D3 of the grinding needle machine 1 can be obtained from the grinding parameters corresponding to the manually input grinding method according to the grinding parameter determination instruction. At this time, the movement direction of the first drive unit D1, the second drive unit D2, and the third drive unit D3 can be automatically determined according to the grinding method.

[0111] In steps S330 and S340, grinding parameters can be automatically calculated based on the grinding method.

[0112] Step S330: Determine the motion trajectory and speed of the motion platform according to the grinding method.

[0113] For example, when the grinding method is a linear reciprocating motion along a trend line, the motion trajectory of the motion platform 21 can be determined to be a partial line segment on the trend line, and the motion speed corresponding to the grinding method can be determined according to the preset correspondence information between the grinding method and the motion speed.

[0114] Step S340: Determine the first motion parameters of the first drive unit, the first motion parameters of the second drive unit, and the third motion parameters of the third drive unit based on the motion trajectory and motion speed, thereby determining the grinding parameters corresponding to the grinding method.

[0115] In some embodiments, based on the mechanical connection relationship between the first drive unit D1, the second drive unit D2, the third drive unit D3, and the motion platform 21, the conversion model between the motion trajectory and motion speed of the motion platform 21 and the grinding parameters can be predetermined. Using the conversion model, the first motion parameters of the first drive unit D1, the first motion parameters of the second drive unit D2, and the third motion parameters of the third drive unit D3 can be determined based on the motion trajectory and motion speed, thereby determining the grinding parameters corresponding to the grinding method.

[0116] Step S400: Based on the grinding parameters, control the first drive unit, the second drive unit and the third drive unit of the grinding machine to drive the motion platform to move, so as to grind the probe tip of the probe card using the grinding method corresponding to the probe card.

[0117] In summary, the needle grinding machine provided in this application has the following advantages:

[0118] 1. Through the first image module 50 and the second image module 60, the specific grinding condition of the probe on the probe card during the grinding process can be displayed from multiple angles, thereby providing users with accurate reference.

[0119] 2. The first drive unit D1 drives the motion platform 21 of the needle grinding machine 1 to move along the first direction, the second drive unit D2 drives the motion platform 21 to move along the second direction, and the third drive unit D3 drives the motion platform 21 to move along the third direction. The first direction, the second direction and the third direction are different from each other, which enables the motion platform 21 to move arbitrarily in space, so that the needle grinding machine 1 can realize multiple grinding methods and is suitable for grinding various types of probe cards.

[0120] In summary, this application provides a needle grinding machine 1, which includes a main body 10, a working platform 11, a fixing module 30, and a motion module 20. The working platform 11 is mounted on the main body 10. The motion module 20 includes a motion platform 21 and a drive unit that can drive the motion platform 21 to move. The working platform 11 has a working window 40 corresponding to the position of the motion platform 21, and the size of the working window 40 is larger than the size of the motion platform 21. The fixing module 30 is disposed on the working platform 11 and includes multiple sets of symmetrically arranged fixing brackets. The multiple sets of fixing brackets are used to fix the probe card in the working window 40 at the position corresponding to the motion platform 21. The motion platform 21 can move in the working window 40 under the drive of the drive unit. The movement is used to grind the probes on the probe card. A first image module 50 and a second image module 60 are also provided on the working platform 11. The first image module 50 includes a first robotic arm 51, a microscopic imaging device 52, and a first display screen 53, all mounted on the working platform 11. The first robotic arm 51 can move the microscopic imaging device 52, and the first display screen 53 can display images of the probe card taken by the microscopic imaging device 52 from a first angle. The second image module 60 includes a camera 61 and a second display screen 62, all mounted on the working platform 11. The second display screen 62 can display images of the probe card taken by the camera 61 from a second angle, which is different from the first angle. This application, through the first image module 50 and the second image module 60, can display the specific grinding condition of the probes on the probe card from multiple angles during the grinding process, thereby providing users with accurate reference.

[0121] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A needle grinding machine, characterized in that, The needle grinding machine includes a main body, a working platform, a fixed module, and a motion module; The working platform is mounted on the main body; The motion module includes a motion platform and a drive unit that can move the motion platform; The work platform has a work window corresponding to the position of the motion platform, and the size of the work window is larger than the size of the motion platform. The fixing module is disposed on the working platform. The fixing module includes multiple sets of symmetrically arranged fixing brackets. The multiple sets of fixing brackets are used to fix the probe card in the working window at the position corresponding to the motion platform. The motion platform can move in the working window under the drive of the driving part to grind the probe of the probe card. The working platform is also equipped with a first image module and a second image module; The first image module includes a first robotic arm mounted on the working platform, a microscopic imaging device mounted on the first robotic arm, and a first display screen. The first robotic arm can drive the microscopic imaging device to move, and the first display screen can display an image obtained by the microscopic imaging device from a first angle of the probe card. The second image module includes a camera and a second display screen mounted on the working platform. The second display screen can display an image captured by the camera from a second angle, which is different from the first angle.

2. The needle grinding machine according to claim 1, characterized in that, The working platform is provided with multiple mounting holes arranged in a preset relationship for each of the fixed brackets, which allow the magnetic fastener to be installed. The fixed bracket includes a magnet that attracts the magnetic fastener.

3. The needle grinding machine according to claim 1, characterized in that, The second image module has multiple cameras, which are positioned at different locations on the working platform.

4. The needle grinding machine according to claim 1, characterized in that, The drive unit includes a first drive unit, a second drive unit, and a third drive unit; The first driving unit includes a first slider and a first electromagnetic driving member, wherein the first electromagnetic driving member can drive the first slider to move along a first direction; The second driving unit includes a second slider and a second electromagnetic driving member, wherein the second electromagnetic driving member can drive the second slider to move along a second direction; The motion platform is fixedly connected to the first slider of the first drive unit, the first drive unit is fixedly connected to the second slider of the second drive unit, and the second drive unit is fixedly connected to the third slider of the third drive unit. The third slider can move along a third direction, and the first direction, the second direction and the third direction are different from each other.

5. The needle grinding machine according to claim 4, characterized in that, The motion platform includes a first connecting plate and a second connecting plate, wherein the first connecting plate is fixedly connected to the first slider, and the second connecting plate is fixedly connected to the first connecting plate; The first connecting plate includes a first hole; The first driving unit further includes a grating ruler and a fourth slider connected to the sliding part of the grating ruler. The fourth slider is embedded in the first hole and fixedly connected to the first connecting plate by a plurality of fasteners.

6. The needle grinding machine according to claim 4, characterized in that, The first driving unit further includes a first limiting device, which can limit the movement of the first slider in the first direction; The second drive unit also includes a second limiting device, which can limit the movement of the second slider in the second direction.

7. The needle grinding machine according to claim 4, characterized in that, The first drive unit further includes a first slide rail, and there are two first slide rails. Each first slide rail includes a first slide rail groove, a first slide rail assembly, and a second slide rail assembly. The first slide rail assembly is fixedly connected to the motion platform and located in the first slide rail groove. The second slide rail assembly is fixedly disposed on the first slide rail groove and is parallel to the first slide rail assembly. The second slide rail assembly can restrict the first slide rail assembly to slide within the first slide rail groove. The second drive unit further includes a second slide rail, and there are two second slide rails. Each second slide rail includes a second slide rail groove, a third slide rail assembly, and a fourth slide rail assembly. The third slide rail assembly is fixedly connected to the first drive unit and located in the second slide rail groove. The fourth slide rail assembly is fixedly disposed on the second slide rail groove and parallel to the third slide rail assembly. The fourth slide rail assembly can restrict the third slide rail assembly to slide within the second slide rail groove.

8. The needle grinding machine according to claim 7, characterized in that, The second slide rail assembly is provided with a first slide rail adjustment device, which can adjust the fixed position of the second slide rail assembly to adjust the first distance between the first slide rail assembly and the second slide rail assembly; The second slide rail assembly is provided with a second slide rail adjustment device, which can adjust the fixed position of the fourth slide rail assembly to adjust the second distance between the third slide rail assembly and the fourth slide rail assembly.

9. The needle grinding machine according to claim 4, characterized in that, The third drive unit also includes a servo motor, a lead screw, and a vertical motion assembly; The servo motor is connected to the lead screw, the lead screw is movably connected to the vertical motion component, and the vertical motion component is fixedly connected to the third slider. The vertical motion component can convert the rotational motion of the lead screw into the vertical motion of the third slider. The third direction is the vertical direction.

10. The needle grinding machine according to claim 1, characterized in that, The working platform is also equipped with a plane calibration device, which includes a guide rod arranged in the vertical direction, a sliding assembly slidably sleeved on the guide rod, and a micrometer screw mounted on the sliding assembly. The micrometer screw is facing the plane of the working platform.

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