Method for electrical testing of semiconductor devices and testing structure

Abstract

The present disclosure relates to the technical field of semiconductor, and discloses a method for testing electrical property of semiconductor device and a testing structure. The method comprises: providing a semiconductor structure, wherein the semiconductor structure comprises an array region and a bulk lead-out region, the array region comprises a plurality of spaced-apart word lines, and each word line is provided with a conductive contact plug and a bit line on both sides thereof; forming conductive structures of the lead-out bit line, the conductive contact plug, the bulk lead-out region, any word line and the word line adjacent to the both sides of the word line, respectively; and applying voltages to the conductive structures, respectively, to complete the electrical property test. The method can reduce the deviation of test results and improve the test accuracy.

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