A high-power fiber-coupled semiconductor laser testing system and its application method

Abstract

This invention relates to a testing system for high-power fiber-coupled semiconductor lasers and its usage method. The system includes a water-cooling system, a fiber optic positioning system, a drive system, a photoelectric parameter system, a motion control system, and an optical isolation platform. The water-cooling system is mounted on the optical isolation platform, and the laser is mounted on the water-cooling system and connected to the drive system. The motion control system is mounted on the optical isolation platform and includes the photoelectric parameter system. A fiber optic positioning system is located on one side of the motion control system and connected to the fiber optic output end of the laser. This invention enables automated testing of key characteristic indicators of high-power fiber-coupled semiconductor lasers, such as LIV, spectrum, and NA, avoiding the inefficiencies and complexities of manual testing. It also achieves integrated testing of the entire system, improving automation, reducing human interference, shortening the testing cycle, and contributing to product consistency.

Description

Technical Field

[0001] This invention relates to a high-power fiber-coupled semiconductor laser testing system and its usage method, belonging to the field of semiconductor laser testing technology. Background Technology

[0002] With the increasing maturity of semiconductor technology, semiconductor lasers, characterized by high conversion efficiency, small size, light weight, high reliability, and direct modulation capabilities, have been increasingly widely used in scientific research, industry, military, and medical fields, leading to revolutionary breakthroughs in many areas. Market demand and development potential are enormous. High-power fiber-coupled semiconductor lasers require complex manufacturing processes and production flows, among which testing is an indispensable requirement. To ensure the quality, consistency, and yield of high-power fiber-coupled semiconductor laser shipments, and to obtain key parameters of the products before and after packaging and aging, testing is essential. Furthermore, based on the recorded data analysis, the entire packaging process can be reviewed in a targeted and purposeful manner to further optimize the product process.

[0003] Currently, in the field of semiconductor laser packaging, the testing of high-power fiber-coupled semiconductor lasers is mainly carried out manually. The fiber output end of the semiconductor laser is manually inserted into the adapter of the integrating sphere, and then the power is manually turned on for testing. Data such as power and wavelength are manually recorded. This manual testing is inefficient, complicated and difficult to operate, and prone to errors and omissions, making it impossible to test the NA quickly and effectively.

[0004] Chinese patent document CN210198679U discloses a semiconductor laser power testing and spot recognition device. This device includes a base support with a first crossbeam at the top and a second crossbeam in the middle. An integrating sphere is fixedly mounted at one end of the first crossbeam, and two semi-transparent mirror supports are located at the bottom of the integrating sphere. The two ends of each semi-transparent mirror are fixedly connected to its respective support. A laser socket is fixedly mounted on the base support. A semi-transparent screen is fixedly mounted at one end of the second crossbeam, and a CCD camera is fixedly mounted at the other end. A test probe is located on the top of the integrating sphere. This device still requires manual intervention for testing and has a low degree of automation. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a high-power fiber-coupled semiconductor laser testing system that enables automated testing of key performance indicators such as LIV, spectrum, and NA of high-power fiber-coupled semiconductor lasers. This avoids the drawbacks of low efficiency and complex operation associated with manual testing. Furthermore, it achieves integrated testing of the entire system, improving automation, reducing human interference, shortening the testing cycle, and facilitating product consistency.

[0006] The present invention also provides a method for using the above-mentioned high-power fiber-coupled semiconductor laser testing system.

[0007] Terminology Explanation:

[0008] NA: Numerical aperture;

[0009] LIV: Laser power, operating current, and operating voltage.

[0010] The technical solution of the present invention is as follows:

[0011] A high-power fiber-coupled semiconductor laser testing system includes a water-cooling system, a fiber positioning system, a driving system, a photoelectric parameter system, a motion control system, and an optical vibration isolation platform.

[0012] A water-cooling system is installed on the optical vibration isolation platform, and a laser is mounted on the water-cooling system. The water-cooling system dissipates heat from the laser. The laser is connected to a drive system, which drives the laser to operate. A motion control system is installed on the optical vibration isolation platform, and a photoelectric parameter system is installed on the motion control system. The motion control system drives the photoelectric parameter system to move, and the photoelectric parameter system is used to test LIV, spectral, and NA parameters. A fiber optic positioning system is installed on one side of the motion control system. The fiber optic positioning system is connected to the fiber optic output end of the laser, and the laser position emitted by the laser is adjusted through the fiber optic positioning system.

[0013] Preferably, the water cooling system includes a water-cooled metal plate and supply and return water pipes. The laser is mounted on the water-cooled metal plate, which is a rectangular metal plate. The supply and return water pipes are built into the water-cooled metal plate and are connected to the plant water pipes through a water supply ball valve. The cooling water flow in the supply and return water pipes cools the water-cooled metal plate, thereby completing the heat dissipation of the laser.

[0014] Preferably, the drive system includes a DC power supply and an industrial computer. The industrial computer is connected to the DC power supply, which is connected to the positive and negative terminals of the laser's power-on pin, forming a closed loop. The industrial computer controls the DC power supply to increase the output current to the laser's operating current in a ramp mode. After the test is completed, the output current is automatically reduced to 0, and then the output is turned off. This process helps protect the laser from damage caused by overshoot, while also allowing for the acquisition of more LIV and spectral data.

[0015] In a further preferred embodiment, the industrial computer is connected to a monitor, and the readings are displayed on the monitor.

[0016] Preferably, the motion control system includes a linear module and a motion controller. The linear module is mounted on an optical vibration isolation platform and is connected to the motion controller, which drives the linear module to reciprocate.

[0017] Further preferably, a cable chain is provided on the linear module to protect the built-in cable.

[0018] Preferably, the photoelectric parameter system includes an integrating sphere, a photoelectric parameter tester, an optical fiber adapter A, and a power detector. The integrating sphere is mounted on a linear module and has two outputs. One output is connected to the photoelectric parameter tester via optical fiber adapter A and an optical fiber, while the other output is connected to the power detector. The power detector is connected to the photoelectric parameter tester, which is fixed to an optical vibration isolation platform and connected to an industrial control computer. The entrance aperture of the integrating sphere is used to receive the laser emitted from the optical fiber output end of the laser. After multiple reflections inside the integrating sphere, the laser is uniformly scattered within the sphere. Using the integrating sphere to measure luminous flux provides more reliable measurement results. The integrating sphere can reduce and eliminate measurement errors caused by the shape of the light, the divergence angle, and the difference in responsivity at different positions on the power detector. The LIV and spectral data are then recorded and saved via the industrial control computer.

[0019] Preferably, the fiber optic positioning system includes a base, an adjustable bracket, and a fiber optic adapter B. The base is set on an optical vibration isolation platform on one side of the linear module. The adjustable bracket is set on the base, and the fiber optic adapter B is set on the adjustable bracket. The fiber optic output end of the laser is set inside the fiber optic adapter B.

[0020] In a further preferred embodiment, the adjustable bracket includes a hollow column and a movable connecting rod. The movable connecting rod is housed inside the hollow column, and a set screw is provided at the top of the hollow column. The hollow column is mounted on a base, and an optical fiber adapter B is provided at the top of the movable connecting rod. After the movable connecting rod is adjusted and determined in the up / down and left / right directions, the set screw is tightened to fix the relative position of the hollow column and the movable connecting rod.

[0021] The operating steps for using the above-mentioned high-power fiber-coupled semiconductor laser testing system are as follows:

[0022] (1) Open the water supply ball valve of the water cooling system, introduce the circulating cooling plant water, and use a torque screwdriver to fasten the laser to the water-cooled metal plate, ensuring complete contact and seamless fit.

[0023] (2) Insert the fiber optic output end of the laser into the fiber optic adapter B, and make adjustments in multiple directions (up, down, left, right) using the adjustable bracket to align the fiber optic output end with the entrance hole of the integrating sphere. No recalibration is required after the initial calibration.

[0024] (3) Connect the output terminal of the DC power supply to the positive and negative terminals of the power-on needle of the laser;

[0025] (4) Use an industrial control computer to control the DC power supply to increase the output current to the working current in ramp mode. At this time, the integrating sphere synchronously receives the laser and sends the signal to the photoelectric parameter tester through the power detector and optical fiber. Then the industrial control computer reads and displays the LIV and spectral data on the display, and finally records and saves it to the database.

[0026] (5) After completing the LIV and spectrum test, perform the NA test. The motion controller controls the linear module to move the integrating sphere to the set power position. The industrial control computer records the data of this position and calculates the corresponding NA value. The straight distance from the center of the fiber output end to the center of the integrating sphere entrance hole is L, the diameter of the integrating sphere entrance hole is D, and NA = D / L.

[0027] (6) After all tests are completed, the DC power supply will automatically reduce the output current to 0 and then turn off the output. The linear module and the integrating sphere will return to the origin and wait for the next test.

[0028] The beneficial effects of this invention are as follows:

[0029] 1. This invention enables automated testing of key performance indicators such as LIV, spectrum, and NA of high-power fiber-coupled semiconductor lasers, avoiding the drawbacks of low efficiency and complex operation of manual testing. At the same time, it realizes integrated testing of the whole machine, improves the degree of automation, reduces human interference, shortens the testing cycle, and helps to achieve product consistency.

[0030] 2. The present invention has a simplified structure, high stability and reliability, and can more directly and effectively realize NA testing. It also calculates the laser parameters of multi-point current and plots curves, providing a large amount of detailed data for process analysis. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the present invention;

[0032] The components include: 1. Water-cooled metal plate; 2. Fiber optic adapter B; 3. Movable extension rod; 4. Hollow column; 5. Base; 6. Industrial computer; 7. DC power supply; 8. Photoelectric parameter tester; 9. Integrating sphere; 10. Entrance aperture; 11. Power detector; 12. Fiber optic adapter A; 13. Motion controller; 14. Linear module; 15. Cable chain; 16. Optical vibration isolation platform; 17. Display. Detailed Implementation

[0033] The present invention will be further described below with reference to the embodiments and accompanying drawings, but is not limited thereto.

[0034] Example 1:

[0035] like Figure 1As shown, this embodiment provides a high-power fiber-coupled semiconductor laser testing system, including a water-cooling system, a fiber optic positioning system, a driving system, a photoelectric parameter system, a motion control system, and an optical vibration isolation platform.

[0036] A water-cooling system is installed on the optical vibration isolation platform 16, and a laser is mounted on the water-cooling system. The water-cooling system dissipates heat from the laser. The laser is connected to a drive system, which drives the laser to work. A motion control system is installed on the optical vibration isolation platform, and a photoelectric parameter system is installed on the motion control system. The motion control system drives the photoelectric parameter system to move, and the photoelectric parameter system is used to test LIV, spectral, and NA parameters. A fiber optic positioning system is installed on one side of the motion control system. The fiber optic positioning system is connected to the fiber optic output end of the laser, and the laser position emitted by the laser is adjusted through the fiber optic positioning system.

[0037] The water cooling system includes a water-cooled metal plate 1 and supply and return water pipes. The laser is mounted on the water-cooled metal plate, which is a rectangular metal plate. The supply and return water pipes are built into the water-cooled metal plate and are connected to the plant water pipes through a water supply ball valve. The cooling water in the supply and return water pipes is used to cool the water-cooled metal plate, thereby completing the heat dissipation of the laser.

[0038] The drive system includes a DC power supply 7 and an industrial computer 6. The industrial computer 6 is connected to the DC power supply 7, and the DC power supply 7 is connected to the positive and negative terminals of the laser's power-on pin, forming a closed loop. The industrial computer controls the DC power supply to increase the output current to the laser's operating current in a ramp mode. After the test is completed, the output current is automatically reduced to 0, and then the output is turned off. This process helps protect the laser from damage caused by overshoot, while also allowing for the acquisition of more LIV and spectral data.

[0039] The industrial computer 6 is connected to the display 17, and the readings are displayed on the display 17.

[0040] The motion control system includes a linear module 14 and a motion controller 13. The linear module 14 is mounted on the optical vibration isolation platform 16 and is connected to the motion controller 13. The motion controller 13 drives the linear module to reciprocate.

[0041] The photoelectric parameter system includes an integrating sphere 9, a photoelectric parameter tester 8, an optical fiber adapter A12, and a power detector 11. The integrating sphere 9 is mounted on the linear module 14. The integrating sphere has two outputs: one output is connected to the photoelectric parameter tester 8 via the optical fiber adapter A12 and an optical fiber, and the other output is connected to the power detector 11. The power detector is connected to the photoelectric parameter tester, which is fixed to an optical vibration isolation platform and connected to an industrial control computer. The entrance aperture 10 of the integrating sphere receives the laser emitted from the optical fiber output end of the laser. After multiple reflections inside the integrating sphere, the laser is uniformly scattered within the sphere. Using the integrating sphere to measure luminous flux provides more reliable measurement results. The integrating sphere can reduce and eliminate measurement errors caused by the shape of the light, the divergence angle, and the responsivity differences at different positions on the power detector. The LIV and spectral data are then recorded and saved via the industrial control computer.

[0042] The fiber optic positioning system includes a base 5, an adjustable bracket, and a fiber optic adapter B2. The base 5 is set on an optical vibration isolation platform on one side of the linear module. The adjustable bracket is set on the base, and the fiber optic adapter B is set on the adjustable bracket. The fiber optic output end of the laser is set inside the fiber optic adapter B.

[0043] The operating steps for using the above-mentioned high-power fiber-coupled semiconductor laser testing system are as follows:

[0044] (1) Open the water supply ball valve of the water cooling system, introduce the circulating cooling plant water, and use a torque screwdriver to fasten the laser to the water-cooled metal plate, ensuring complete contact and seamless fit.

[0045] (2) Insert the fiber optic output end of the laser into the fiber optic adapter B, and make adjustments in multiple directions (up, down, left, right) using the adjustable bracket to align the fiber optic output end with the entrance hole of the integrating sphere. No recalibration is required after the initial calibration.

[0046] (3) Connect the output terminal of the DC power supply to the positive and negative terminals of the power-on needle of the laser;

[0047] (4) Use an industrial control computer to control the DC power supply to increase the output current to the working current in ramp mode. At this time, the integrating sphere synchronously receives the laser and sends the signal to the photoelectric parameter tester through the power detector and optical fiber. Then the industrial control computer reads and displays the LIV and spectral data on the display, and finally records and saves it to the database.

[0048] (5) After completing the LIV and spectrum test, perform the NA test. The motion controller controls the linear module to move the integrating sphere to the set power position. The industrial control computer records the data of this position and calculates the corresponding NA value. The straight distance from the center of the fiber output end to the center of the integrating sphere entrance hole is L, the diameter of the integrating sphere entrance hole is D, and NA = D / L.

[0049] (6) After all tests are completed, the DC power supply will automatically reduce the output current to 0 and then turn off the output. The linear module and the integrating sphere will return to the origin and wait for the next test.

[0050] Example 2:

[0051] A high-power fiber-coupled semiconductor laser testing system is provided, with the structure described in Example 1, except that a drag chain 15 is provided on the linear module 14 to protect the built-in cable.

[0052] Example 3:

[0053] A high-power fiber-coupled semiconductor laser testing system is provided, with the structure described in Example 1, except that the adjustable support includes a hollow column 4 and a movable connecting rod 3. The movable connecting rod 3 is housed inside the hollow column 4. A set screw is provided at the top of the hollow column, which is mounted on a base. An optical fiber adapter B is provided at the top of the movable connecting rod. After the movable connecting rod is adjusted and determined in the up / down and left / right directions, the set screw is tightened to fix the relative position of the hollow column and the movable connecting rod.

Claims

1. A method of using a high-power fiber-coupled semiconductor laser test system, comprising: The test system comprises a water cooling system, a fiber positioning system, a driving system, an optoelectronic parameter system, a motion control system and an optical vibration isolation platform, wherein, The water cooling system is arranged on the optical vibration isolation platform, the laser is arranged on the water cooling system, the water cooling system is used for heat dissipation of the laser, the laser is connected to the driving system, the driving system is used for driving the laser to work, the motion control system is arranged on the optical vibration isolation platform, the optoelectronic parameter system is arranged on the motion control system, the motion control system is used for driving the optoelectronic parameter system to move, the optoelectronic parameter system is used for testing LIV, spectrum and NA parameters, the fiber positioning system is arranged on one side of the motion control system, the fiber positioning system is connected to the fiber output end of the laser, and the fiber positioning system is used for adjusting the position of the laser emitted by the laser; The water cooling system comprises a water cooling metal plate and a water supply and return pipeline, the laser is arranged on the water cooling metal plate, the water cooling metal plate is a rectangular metal plate, the water cooling metal plate is internally provided with the water supply and return pipeline, and the water supply and return pipeline is connected to a factory water pipeline through a water supply ball valve; The driving system comprises a direct current power supply and an industrial computer, the industrial computer is connected to the direct current power supply, the direct current power supply is connected to the positive and negative poles of the power-on needle of the laser, and a closed loop is formed; The optoelectronic parameter system comprises an integrating sphere, an optoelectronic parameter tester, a fiber adapter A and a power detector, the integrating sphere is arranged on the linear module, two output ends of the integrating sphere, one output end is connected to the optoelectronic parameter tester through the fiber adapter A and the fiber, and the other output end is connected to the power detector, the power detector is connected to the optoelectronic parameter tester, the optoelectronic parameter tester is fixed on the optical vibration isolation platform, and the optoelectronic tester is connected to the industrial computer; The fiber positioning system comprises a base, an adjustable support and a fiber adapter B, the base is arranged on the optical vibration isolation platform on one side of the linear module, the adjustable support is arranged on the base, the fiber adapter B is arranged on the adjustable support, and the fiber output end of the laser is arranged in the fiber adapter B; The use method of the above high-power fiber-coupled semiconductor laser test system is as follows: (1) open the water supply ball valve of the water cooling system, and circulate the cooling factory water, use a torque screwdriver to fasten the laser on the water cooling metal plate, and completely contact without gap; (2) insert the fiber output end of the laser into the fiber adapter B, adjust the fiber output end in multiple directions up and down and left and right through the adjustable support, so that the fiber output end is aligned with the incident hole of the integrating sphere, and no repeated calibration is needed after initial calibration; (3) connect the output end of the direct current power supply to the positive and negative poles of the power-on needle of the laser; (4) use the industrial computer to control the direct current power supply to increase the output current to the working current in the ramp mode, at this time, the integrating sphere synchronously receives the laser, the power detector and the fiber send signals to the optoelectronic parameter tester, then the industrial computer reads and displays the LIV and spectrum data through the display, and finally records and saves the data to the database; (5) After the LIV and spectrum test is completed, the NA test is performed, the motion controller controls the linear module to move the integrating sphere to a set power position, the industrial computer records the position data, and meanwhile calculates the corresponding NA value, the straight line distance from the center of the fiber output end to the center of the integrating sphere entrance hole is L, the diameter of the integrating sphere entrance hole is D, and NA=D / L; (6) After all the tests are completed, the output current of the direct current power supply is automatically reduced to 0, then the output is turned off, the linear module is returned to the original position together with the integrating sphere, and the next test is waited.

2. The method of using a high power fiber coupled semiconductor laser test system of claim 1, wherein, The industrial computer is connected to the display.

3. The method of using a high power fiber coupled semiconductor laser test system of claim 1, wherein, The motion control system comprises a linear module and a motion controller, the linear module is arranged on the optical vibration isolation platform, and the linear module is connected to the motion controller.

4. The method of using a high power fiber coupled semiconductor laser test system of claim 1, wherein, A drag chain is arranged on the linear module.

5. The method of using a high power fiber coupled semiconductor laser test system of claim 1, wherein, The adjustable support comprises a hollow column and a movable connecting rod, the movable connecting rod is sleeved in the hollow column, a top screw is arranged at the top end of the hollow column, the hollow column is arranged on the base, and the movable connecting rod is provided with the fiber adapter B at the top end.

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