Probe fixture, probe holder and test platform having the probe holder

Abstract

The present invention provides a probe fixture, a probe holder, and a test platform having the probe holder, belonging to the field of chip testing. Among them, the probe fixture includes a base, a sliding column, a sliding member, and an elastic member. The first end of the sliding column is connected to the base, and a clamping hole for passing through the probe is formed at the second end of the sliding column. The sliding member is slidably connected to the sliding column, and the elastic member is connected to the sliding member. The elastic member has an elastic force for driving the sliding member to slide in the direction of the second end of the sliding column. The probe fixture provided by the present invention can facilitate the replacement of the elastic member, thereby being beneficial to flexibly adjusting the elastic clamping force of the elastic member and reducing production costs.

Description

Technical Field

[0001] The present invention relates to the technical field of chip testing, and particularly to a probe fixture, a probe holder and a test platform having the probe holder. Background Art

[0002] In the production of optical communication chips, the wafer is not directly cut into individual chips, but is first cut into several strips, which we call bar strips. There are multiple chips in a bar strip. During production, it is necessary to test the parameters of the chips among them. The existing method for testing chips generally uses a test platform. After the probes on the test platform contact the chips, power is applied to simulate the actual working conditions for detection.

[0003] On the current test platform, the probes are generally clamped and fixed by a probe holder. If the end of the probe that contacts the chip is worn and needs to be replaced, the clamping holder can be manually loosened to replace the probe. However, for different chips, different probes need to be used, and different clamping forces are required for different probes. The existing probe fixture structure is relatively complex and not convenient to adjust the clamping force. Therefore, for different probes, only different probe fixtures can be replaced. In this way, in production, a variety of different probe fixtures need to be prepared, increasing the production cost. Summary of the Invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that in the test platform of the prior art, the probe fixture for fixing the probe needs to be replaced as a whole to adapt to different probes, thereby providing a probe fixture, a probe holder and a test platform having the probe holder.

[0005] To solve the above problems, the present invention provides a probe fixture, comprising:

[0006] A base;

[0007] A sliding column, the first end of the sliding column is connected to the base, and a clamping hole for passing through the probe is formed at the second end of the sliding column;

[0008] A sliding member, detachably slidably connected to the sliding column;

[0009] An elastic member, sleeved on the sliding column, the elastic member is connected to the sliding member, and the elastic member has an elastic force for driving the sliding member to slide towards the second end of the sliding column.

[0010] Further, the clamping hole is an inclined hole that is not perpendicular to the axis of the sliding column.

[0011] Further, on the end face of the sliding member facing the second end of the sliding column, a groove for embedding the probe is formed.

[0012] Further, the bottom surface of the groove has an inclination, and the inclination of the bottom surface of the groove is the same as that of the inclined hole.

[0013] Further, a flat cut surface is provided on the outer side wall of the sliding column, and the sliding member is arranged in cooperation with the outer side wall of the sliding column.

[0014] Further, a through hole adapted for the insertion of a blocking member is provided at the second end of the sliding column.

[0015] Further, an adjusting member is provided on the sliding column, and the position of the adjusting member on the sliding column is adjustable. One end of the elastic member abuts against the adjusting member, and the other end of the elastic member abuts against the sliding member.

[0016] In addition, the present invention further provides a probe holder, which includes a frame and the probe fixture as described in any one of the above, and the base of the probe fixture is installed on the frame.

[0017] Further, a pressure elastic piece is provided on the frame, and the base of the probe fixture is connected to the pressure elastic piece through an extension plate.

[0018] In addition, the present invention further provides a test platform, which includes the probe holder as described above.

[0019] The technical solution of the present invention has the following advantages:

[0020] 1. For the probe fixture provided by the present invention, a sliding column is connected to the base, a clamping hole for passing through the probe is formed on the sliding column, a sliding member is detachably slidably connected to the sliding column, and an elastic member is sleeved on the sliding column and connected to the sliding member. After the sliding member is detached from the sliding column, the elastic member can be disengaged from the sliding column, so as to facilitate the replacement of the elastic member and is conducive to selecting and assembling elastic members with different elastic forces; when the probe passes through the clamping hole, it will be clamped in the clamping hole due to the elastic force of the elastic member. Since the elastic member is connected to the sliding member, different elastic members can be selected to adjust the elastic force according to the actual size of the tested probe, so that the probe can be fixed in the clamping hole, and it can be avoided that the probe cannot be clamped due to too small elastic force or the probe is damaged due to too large elastic force.

[0021] 2. For the probe fixture provided by the present invention, the clamping hole is set as an inclined hole that is not perpendicular to the circumferential direction of the sliding column, which is conducive to the probe tilting towards the bar to be tested, so as to facilitate the detection of the bar by the probe.

[0022] 3. For the probe fixture provided by the present invention, a groove for embedding the probe is provided on the sliding member, which can further achieve an embedding effect with the probe, so as to ensure the fixed state of the sliding member and the probe.

[0023] 4. The probe holder provided by the present invention has all the advantages of the probe fixture because it has the probe fixture as described above.

[0024] 5. The probe holder provided by the present invention is provided with a pressure elastic piece. The movement of the probe is realized through the elastic deformation of the material of the pressure elastic piece itself. The pressure elastic piece will only undergo elastic deformation. After being damaged, only the elastic piece needs to be replaced, and it will not produce destructive loss due to the cooperation and contact with other parts, effectively improving the service life.

[0025] 6. The test platform described in the present invention has all the advantages of the probe holder because it has the probe holder as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 Schematic diagram of the assembly of the probe fixture and the probe in the embodiment of the present invention;

[0028] Figure 2 Schematic diagram of the structure of the sliding column in the embodiment of the present invention;

[0029] Figure 3 Schematic diagram of the structure of the sliding member in the embodiment of the present invention;

[0030] Figure 4 Exploded view of the probe fixture in the embodiment of the present invention;

[0031] Figure 5 Stereogram of the probe holder in the embodiment of the present invention.

[0032] Description of the reference numerals in the drawings:

[0033] 1, base; 2, sliding column; 3, sliding member; 4, elastic member; 5, frame; 6, probe; 7, adjusting member;

[0034] 21, clamping hole; 22, through hole; 23, blocking member; 24, flat cut surface; 25, threaded section;

[0035] 31, groove; 32, bottom surface of the groove;

[0036] 51, pressure elastic piece; 52, extension plate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative work belong to the scope of protection of the present invention.

[0038] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0039] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0040] In addition, the technical features involved in different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0041] Embodiment 1

[0042] This embodiment provides a probe fixture for fixing the probe 6 on a test platform so that the probe 6 on the probe fixture can detect a chip to be tested. Here, the probe fixture can be applied to a chip detection device to make the probe 6 detect the chip, or it can be applied to a bar detection device to make the probe 6 detect the bar.

[0043] As Figure 1 shown, the probe fixture described in this embodiment includes a base 1, a sliding column 2, a sliding member 3, and an elastic member 4. Among them, the first end of the sliding column 2 is connected to the base 1, and a clamping hole 21 for passing through the probe 6 is formed on the second section of the sliding column 2. The sliding member 3 is slidably connected to the sliding column 2, and the elastic member 4 is connected to the sliding member 3. The elastic member 4 has an elastic force for driving the sliding member 3 to slide in the direction of the second end of the sliding column 2.

[0044] When the probe 6 passes through the clamping hole 21, it will be clamped in the clamping hole 21 due to the elastic force of the elastic member 4. Since the elastic member 4 is sleeved on the sliding column 2 and the sliding member 3 is detachably slidably connected to the sliding column, the elastic member 4 can be removed by disassembling the sliding member 3, thus facilitating the replacement of different elastic members. According to the different sizes of the probe 6 in actual tests, different elastic members 4 can be selected to adjust the elastic force, so as to ensure the elastic force for fixing the probe 6 in the clamping hole 21 and avoid damaging the probe 6 due to excessive elastic force. At the same time, without replacing the entire probe fixture, only by replacing the elastic member 4 can the fixed state of the probe be ensured, effectively reducing the production cost.

[0045] As Figure 2 shown, the sliding column 2 in this embodiment is a cylinder horizontally arranged relative to the base 1. The first end of the sliding column 2 is the connection end fixedly connected to the base 1, and the second end of the sliding column 2 is the free end away from the base 1. The clamping hole 21 is an inclined hole that is not perpendicular to the axis of the sliding column 2. Here, the inclined hole can be set to form an acute angle or an obtuse angle with the axis of the sliding column 2 according to the actual detection position of the probe 6.

[0046] Here, the clamping hole 21 is preferably a cylindrical hole. As an alternative embodiment, the cross-section of the clamping hole 21 can also be strip-shaped to further facilitate the adaptation to different specifications of the probe 6.

[0047] The outer side wall of the sliding column 2 in this embodiment has a flat cut surface 24. The sliding member 3 is arranged to fit the outer side wall of the sliding column 2. The setting of the flat cut surface 24 can facilitate the sliding member to pass through the sliding column 2 and play a guiding role for the sliding member 3, avoiding the circumferential deflection of the groove 31 on the sliding member 3 and being unable to align with the probe. As an alternative embodiment, the sliding column 2 can also be set as a prism, or other guiding structures that can restrict the circumferential rotation of the sliding member 3.

[0048] A through hole 22 suitable for inserting the blocking member 23 is provided at the second end of the sliding column 2 in this example. The through hole 22 is a horizontal through hole. The blocking member 23 can be detachably inserted into the through hole 22, and both ends of the blocking member 23 extend out of the through hole 22 respectively, so as to play a role in blocking the sliding member 3 from detaching from the sliding column 2. Since the blocking member 23 and the through hole 22 are separately arranged, when different elastic members 4 need to be used for different specifications of the probe 6, the blocking member 23 can be removed and then the sliding member 3 can be taken out to replace the elastic member 4, and the whole disassembly process is simple and convenient.

[0049] Here, the blocking member 23 and the through hole 22 are connected by screwing. The blocking member 23 is horizontally arranged relative to the sliding column 2 through the through hole 22, which can enhance the limiting effect between the blocking member 23 and the sliding member 3. As an alternative embodiment, the blocking member 23 and the through hole 22 can also be fixed by snap-fit.

[0050] As shown Figure 4 in the figure, in this embodiment, the elastic member 4 is sleeved on the sliding column 2. One end of the elastic member 4 abuts against the base 1, and the other end abuts against the sliding member 3, so that the sliding member 3 has an elastic acting force away from the base 1.

[0051] In this embodiment, as shown Figure 1 and Figure 3 in the figure, the sliding member 3 is slidably disposed through the sliding column 2. A groove 31 for embedding the probe 6 is formed on the end surface of the sliding member 3 facing the second end of the sliding column 2. Since the clamping hole 21 is an inclined hole in this embodiment, the groove bottom surface 32 of the groove 31 has an inclination, and the inclination of the groove bottom surface 32 is the same as that of the inclined hole. The sliding member 3 is elastically pushed by the elastic member 4 to make the groove 31 and the probe 6 in a clamping fit, so as to keep the probe 6 in a fixed state in the clamping hole 21. As an alternative embodiment, a slide rail is provided on the sliding column 2, and the sliding member 3 is clamped into the slide rail to achieve sliding cooperation with the sliding column 2.

[0052] Still as shown Figure 3 in the figure, in this embodiment, the groove 31 is provided through the side end of the sliding member 3. Under the elastic force of the elastic member 4, the groove bottom surface 32 of the groove 31 is in full contact with the probe 6 and pressed tightly in the clamping hole 21. As an alternative embodiment, the groove 31 may also be provided only in the upper half or the lower half of the sliding member 3 located on the sliding column 2. As the first alternative embodiment, the groove bottom surface 32 of the groove 31 is a rough surface covered with rubber material to further improve the fixing effect between the sliding member 3 and the probe 6.

[0053] As shown Figure 2 and Figure 4 in the figure, an adjusting member 7 is provided on the sliding column 2, and the position of the adjusting member 7 on the sliding column 2 is adjustable. Specifically, a threaded section 25 is provided on the sliding column 2, and the adjusting member 7 is screwed onto the adjusting member 7 through the threaded section 25. Two ends of the elastic member 4 respectively abut against the adjusting member 7 and the sliding member 3. When the size of the probe 6 is large, the adjusting member 7 is screwed towards the probe 6, and the elastic potential energy of the elastic member 4 increases due to compression; when the diameter of the probe 6 is small, the adjusting member 7 is screwed towards the base 1, and the elastic potential energy of the elastic member 4 decreases. This setting can further facilitate the adjustment of the elastic potential energy of the elastic member 4 on the sliding column 2, with simple adjustment and reduced replacement frequency of the elastic member 4.

[0054] As an alternative embodiment, the adjusting member 7 can also be clamped on the sliding column 2, or slidably disposed on the sliding column 2 in a telescopic manner, as long as it can push the elastic member 4 to change its elastic potential energy.

[0055] Assembly process:

[0056] On the base 1, the adjusting member 7 is screwed onto the threaded section 25 of the sliding column 2;

[0057] Remove the blocking member 23, slide the sliding member 3 and the elastic member 4 away from the sliding column 2 in sequence, and then re-insert the matching elastic member 4 on the sliding column 2;

[0058] The sliding member 3 is inserted through the through hole 22, and the blocking member 23 is inserted into the through hole 22;

[0059] The sliding member 3 is moved to compress the elastic member 4. During this process, the sliding member 3 moves out of the clamping hole 21, and the probe 6 is inserted into the clamping hole 21.

[0060] The sliding member 3 is released, and the groove 31 of the sliding member 3 is engaged with the probe 6 under the elastic force of the elastic member 4 , and the probe 6 is fixed on the sliding column 2 .

[0061] Example 2

[0062] This embodiment provides a probe holder, such as Figure 5 As shown, it includes a frame 5 and the probe fixture as described in Example 1, and the base 1 of the probe fixture is installed on the frame 5.

[0063] The frame 5 of the probe 6 in this embodiment has a pressure spring 51, and the base 1 of the probe fixture is connected to the pressure spring 51 through an extension plate 52. The movement of the probe 6 is achieved by the elastic deformation of the material of the pressure spring 51 itself. The pressure spring 51 will only undergo elastic deformation. After damage, only the spring needs to be replaced. It will not come into contact with other parts to cause destructive loss, thereby effectively improving the service life.

[0064] Example 3

[0065] This embodiment provides a test platform, including the probe rack as described in Embodiment 2. Since it has the probe rack as described above, it has all the advantages of the probe rack. Here, the test platform can be a test platform for detecting chips, or a test platform for detecting bars.

[0066] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A probe fixture, characterized in that, comprising: a base (1); a sliding column (2), a first end of the sliding column (2) being connected to the base (1), and a clamping hole (21) for passing through a probe (6) being formed at a second end of the sliding column (2); a sliding member (3) detachably and slidably connected to the sliding column (2); an elastic member (4) sleeved on the sliding column (2), the elastic member (4) being connected to the sliding member (3), and the elastic member (4) having an elastic force for driving the sliding member (3) to slide towards the second end direction of the sliding column (2); an adjusting member (7) provided on the sliding column (2), the position of the adjusting member (7) on the sliding column (2) being adjustable, one end of the elastic member (4) abutting against the adjusting member (7), and the other end of the elastic member (4) abutting against the sliding member (3).

2. The probe fixture according to claim 1, characterized in that, the clamping hole (21) is an inclined hole that is not perpendicular to the axis of the sliding column (2).

3. The probe fixture according to claim 2, characterized in that, a groove (31) for embedding the probe (6) is formed on an end surface of the sliding member (3) facing the second end of the sliding column (2).

4. The probe fixture according to claim 3, characterized in that, a bottom surface (32) of the groove (31) has a slope, and the slope of the bottom surface (32) of the groove (31) is the same as the slope of the inclined hole.

5. The probe fixture according to any one of claims 1-4, characterized in that, a flat cut surface (24) is provided on an outer side wall of the sliding column (2), and the sliding member is arranged in cooperation with the outer side wall of the sliding column.

6. The probe fixture according to any one of claims 1-4, characterized in that, a through hole (22) suitable for inserting a blocking member (23) is provided at the second end of the sliding column (2).

7. A probe holder, characterized in that, comprising: a frame (5) and the probe fixture according to any one of claims 1-6, and the base (1) of the probe fixture is installed on the frame (5).

8. The probe holder according to claim 7, characterized in that, a pressure elastic sheet (51) is provided on the frame (5), and the base (1) of the probe fixture is connected to the pressure elastic sheet (51) through an extension plate (52).

9. A test platform, characterized in that, comprising: the probe holder according to claim 7 or 8.

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