Plasma device and installation method of power cable

Abstract

The present invention provides a plasma device and a method for installing a power cable that can more firmly fix a cable to a plasma head. The plasma device comprises: a plasma head that supplies power to an electrode to generate plasma gas; a head moving device that moves the plasma head; a power cable, the front end of which is connected to the electrode and the base end of which is connected to a power supply unit, and the power cable supplies power to the electrode from the power supply unit; a first limiting component installed on the plasma head to limit the relative movement of the power cable and the like relative to the plasma head; and a second limiting component that is arranged at the front end side of the power cable compared to the position of the first limiting component, installed on the plasma head to limit the relative movement of the power cable relative to the plasma head.

Description

Technical Field

[0001] The present disclosure relates to a plasma device that generates plasma using a plasma head and a method for installing a power cable in the plasma device. Background Art

[0002] In the past, various plasma devices have been proposed that eject plasma gas from a plasma head toward a workpiece to perform plasma treatment. For example, the plasma device disclosed in Patent Document 1 below has a plasma head mounted on the front end of a multi-jointed robot, and the multi-jointed robot changes the position and angle of the plasma head to perform plasma treatment on the workpiece.

[0003] Prior art literature

[0004] Patent Document 1: International Publication No. WO2019 / 150447 Summary of the invention

[0005] Problems to be solved by the invention

[0006] In the plasma device of Patent Document 1, a plasma head and a power supply and a gas supply unit are connected by a plurality of cables. According to the movement of the multi-jointed robot, a tensile or bending force is applied to the cables. Depending on the magnitude of the applied force, the cables may fall off from the plasma head or the cables or wires in the cables may break.

[0007] The present disclosure has been made in view of such actual circumstances, and an object of the present disclosure is to provide a plasma device and a method for installing a power cable, which are capable of more firmly fixing the cable to a plasma head.

[0008] Technical solutions to solve problems

[0009] In order to solve the above-mentioned problems, the present specification discloses a plasma device, which includes: a plasma head, which supplies power to an electrode to generate plasma; a head moving device, which moves the above-mentioned plasma head; a power cable, the front end of the above-mentioned power cable is connected to the above-mentioned electrode, the base end of the above-mentioned power cable is connected to a power supply unit, and the above-mentioned power cable supplies power to the above-mentioned electrode from the above-mentioned power supply unit; a first limiting component, which is installed on the above-mentioned plasma head and limits the relative movement of the above-mentioned power cable with respect to the above-mentioned plasma head; and a second limiting component, which is arranged at the front end side of the above-mentioned power cable compared with the position of the above-mentioned first limiting component, and is installed on the above-mentioned plasma head to limit the relative movement of the above-mentioned power cable with respect to the above-mentioned plasma head.

[0010] In addition, the content of the present disclosure is not limited to implementation as a plasma device, and can also be implemented as a method for installing a power cable in a plasma device, etc.

[0011] Effects of the Invention

[0012] According to the present disclosure, when the head moving device moves the plasma head, the first and second limiting components are used to limit the relative movement of the power cable relative to the plasma head. The first and second limiting components are installed at different positions of the power cable to limit the movement of the power cable. Thus, by limiting the movement of the power cable at two locations, the position of the power cable can be suppressed from being relatively offset from the position of the plasma head. It is possible to suppress the occurrence of situations such as the power cable falling off from the plasma head as the plasma head moves or the power cable being disconnected due to the position deviating from the plasma head. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a diagram showing a plasma device according to the first embodiment.

[0014] Figure 2 yes Figure 1 , which is a partially enlarged view showing the interior of the plasma head in a perspective manner.

[0015] Figure 3 It is a diagram showing the state of the electrode connected to the power cable.

[0016] Figure 4 It is a partial cross-sectional view showing a cross section in which the first restriction member is partially cut away.

[0017] Figure 5 The figure shows the second restriction member and the metal plate, and is a perspective view of the power cable.

[0018] Figure 6 It is a perspective view showing the second restriction member and the metal plate.

[0019] Figure 7 It is a diagram showing another example of the second restriction member.

[0020] Figure 8 It is a perspective view of a cross section of the plasma head cut along the X direction and the Z direction at the position of the electrode and the plasma passage on the main body side.

[0021] Fig. 9 yes Figure 8 A partial enlarged view of .

[0022] Fig.10 yes Fig. 9 A partial enlarged view of .

[0023] Fig.11 It is a schematic diagram schematically showing the conductor exposed from the opening of the conductor covering member.

[0024] Fig.12 It is a diagram showing another example of the first restriction member.

[0025] Fig.13 This is an exploded perspective view of a plasma head and a power cable according to a second embodiment.

[0026] Fig.14 It is a side view of the plasma head and the power cable of the second embodiment.

[0027] Fig.15 is an exploded perspective view of the second connector.

[0028] Fig.16 This is an enlarged view of the metal plate and supporting parts.

[0029] Fig.17 It is a figure which shows the state which attached the metal plate to the jig.

[0030] Fig.18 It is a figure which shows the state which attached the electric power cable to the clamp. DETAILED DESCRIPTION

[0031] (First Embodiment)

[0032] Hereinafter, one embodiment of the present disclosure will be described in detail with reference to the drawings.

[0033] Figure 1 2 shows a plasma device 10 according to the first embodiment. Figure 1 As shown, the plasma device 10 of the first embodiment includes: a plasma head 11, a robot 13 and a control box 15. The plasma head 11 is detachably mounted on the front end of the robot 13. The robot 13 is, for example, a serial link type robot (which can also be called a multi-jointed robot). The plasma head 11 can irradiate plasma gas while being held at the front end of the robot 13. The plasma head 11 changes its position or orientation according to the driving of the robot 13 and can move three-dimensionally.

[0034] The control box 15 is mainly composed of a computer and generally controls the plasma device 10. The control box 15 includes a power supply unit 15A for supplying power to the plasma head 11 and a gas supply unit 15B for supplying a processing gas to the plasma head 11. The power supply unit 15A is connected to the plasma head 11 via a power cable 16. The power supply unit 15A changes the electrode 33 (see FIG. 1 ) of the plasma head 11 based on the control of the control box 15. Figure 3 ) applied voltage.

[0035] In addition, the gas supply unit 15B is connected to the plasma head 11 via a plurality of (three in the present embodiment) gas pipes 19. The gas supply unit 15B supplies the reaction gas and the carrier gas described later as the process gas to the plasma head 11 under the control of the control box 15. The control box 15 controls the gas supply unit 15B to control the amount of the process gas supplied from the gas supply unit 15B to the plasma head 11. Furthermore, the plasma device 10 operates the robot 13 under the control of the control box 15, and irradiates the plasma gas from the plasma head 11 to the object to be processed W placed on the workbench 17.

[0036] The control box 15 also includes an operation unit 15C having a touch panel or various switches. The control box 15 displays various setting screens and operating states (for example, gas supply state, etc.) on the touch panel of the operation unit 15C. The control box 15 also receives various information based on operation input to the operation unit 15C.

[0037] Figure 2 yes Figure 1 The partial enlarged view shows the interior of the plasma head 11 in perspective. In order to avoid the drawings becoming complicated, Figure 2 The gas pipe 19 is omitted. Figure 2 As shown in FIG. 1 , the plasma head 11 is in a substantially rectangular parallelepiped shape that is long in one direction. The plasma head 11 is provided in a manner that allows it to be detached from a mounting plate 13A provided at the front end of the robot 13. Thus, the plasma head 11 can be replaced with a plasma head 11 of a different type. The plasma head 11 includes a plasma generating unit 21. The plasma generating unit 21 generates a plasma from a gas supply unit 15B (see FIG. 14 ) of the control box 15. Figure 1 ) is converted into plasma to generate plasma gas. The plasma head 11 of this embodiment generates the plasma gas generated in the plasma generating section 21 to the plasma head 11. Figure 1 The object W to be processed is ejected. In the plasma head 11, Figure 2 The process gas is supplied from the upstream side to the downstream side in the direction of the arrow shown.

[0038] in addition, Figure 2 The structure of the plasma head 11 shown is an example. For example, the plasma head 11 may also be a structure that ejects heated heating gas together with plasma gas toward the object to be processed W. In addition, the plasma head 11 may also include a pipe for supplying heating gas and a heater for heating the heating gas. The heating gas is, for example, heated air, and functions as a shielding gas for shielding the plasma gas.

[0039] Figure 3 The electrode 33 connected to the power cable 16 is schematically shown. Figure 2 and Figure 3 As shown, the power cable 16 has a pair of power lines 16A and a cable covering member 16B covering the pair of power lines 16A. The pair of power lines 16A respectively have a conductor 16C and a conductor covering member 16F. The conductors 16C are respectively inserted into the pair of conductor covering members 16F. The base ends of the pair of conductors 16C are respectively connected to the power supply unit 15A of the control box 15, and the terminals 16D are connected to the front ends. Electrodes 33 are respectively electrically connected to the terminals 16D of the conductors 16C. The electrodes 33 are supplied with power from the power supply unit 15A via the conductors 16C. In addition, Figure 3 The electrode 33 is schematically shown. Figure 3 Illustration of the housing of the plasma head 11 and the plasma generating portion 21 is omitted.

[0040] A pair of power lines 16A are inserted into the cable covering part 16B. The conductor covering part 16F of the power lines 16A is formed of, for example, an insulating resin material. The pair of power lines 16A is covered by, for example, an insulating tape to suppress positional deviation within the cable covering part 16B. Therefore, the pair of power lines 16A move together with the cable covering part 16B in coordination with the movement (stretching, bending, twisting) of the cable covering part 16B. In addition, the pair of power lines 16A may also be a structure that can move relatively within the cable covering part 16B. In addition, the pair of power lines 16A may also be a structure covered by different cable covering parts 16B.

[0041] The cable covering member 16B is a resin material having insulating properties, for example, a rubber having high rigidity. The cable covering member 16B covers a pair of power lines 16A from the inside of the control box 15 to the inside of the plasma head 11, for example. The cable covering member 16B is mounted on the plasma head 11 through the first limiting member 41 and the second limiting member 43, and limits the relative movement with respect to the plasma head 11. The details of the first limiting member 41 and the second limiting member 43 will be described later.

[0042] The cable cover 16B has a stepped portion 16E at the front end portion in the plasma head 11, which has a tapered shape and reduces its outer diameter in multiple stages (two stages in the example shown). A pair of power lines 16A are discharged outward from the opening at the front end of the stepped portion 16E and branched into two branches. A power line insertion portion 21A for inserting the power line 16A and a gas tube insertion portion 21B for inserting the gas tube 19 are provided on the upper surface of the plasma generating portion 21 (see FIG. 1 ). Figure 2 The pair of power lines 16A extending from the step portion 16E are respectively inserted into the pair of power line insertion portions 21A and connected to the electrode 33 in the plasma generating portion 21 .

[0043] The plasma generating unit 21 is formed of, for example, a ceramic having high heat resistance, and has a reaction chamber 73 (see Figure 8 The pair of electrodes 33 are fixed, for example, in a state where the tip portions thereof protrude toward the reaction chamber 73. In the following description, the pair of electrodes 33 may be simply referred to as electrodes 33.

[0044] In addition, each gas pipe 19 is inserted into the plasma head 11 and into each gas pipe insertion portion 21B of the plasma generating unit 21. The front end of each gas pipe 19 communicates with the reaction chamber 73. The three gas pipes 19 are, for example, one gas pipe 19 for supplying a reaction gas and two gas pipes 19 for supplying a carrier gas.

[0045] As the reaction gas (seed gas), oxygen (O 2 The gas supply unit 15B supplies oxygen and nitrogen (N 2 ) flows between the electrodes 33 of the reaction chamber 73. Hereinafter, for convenience, the mixed gas is sometimes referred to as the reaction gas, and oxygen is referred to as the seed gas. Nitrogen can be used as the carrier gas. The gas supply unit 15B flows the carrier gas through the two gas pipes 19 so as to surround each electrode 33 in the pair of electrodes 33.

[0046] An alternating voltage is applied to the pair of electrodes 33 from the power supply unit 15A of the control box 15. By applying the voltage, in the reaction chamber 73 (refer to Figure 8 ) generates a simulated arc A between a pair of electrodes 33 (refer to Figure 8 ). When the reaction gas passes through the simulated arc A, the reaction gas is converted into plasma. Therefore, the pair of electrodes 33 generates discharge of the simulated arc A, converts the reaction gas into plasma, and generates plasma gas.

[0047] In addition, a nozzle 35 (see Figure 2 The nozzle 35 is formed of, for example, ceramics having high heat resistance. The nozzle 35 is mounted on the lower surface of the plasma generating unit 21 by bolts or the like and can be detached. A plurality of nozzle-side plasma passages 89 are formed in the nozzle 35 (see Figure 8 The upstream side of the plurality of nozzle-side plasma passages 89 is connected to the reaction chamber 73, and the downstream side of the plurality of nozzle-side plasma passages 89 is connected to the opening 89A of the lower end surface of the nozzle 35 (see Figure 8 )connect.

[0048] In the plasma head 11 having the above structure, discharge occurs in the reaction chamber 73 of the plasma generating unit 21 to generate plasma gas, which is then ejected from the front end of the nozzle 35 to perform plasma treatment on the object W. The wettability of the object W can be improved by the effect of the plasma gas.

[0049] Next, the first restriction member 41 and the second restriction member 43 that restrict the movement of the power cable 16 will be described. Figure 4 4 is a partial cross-sectional view showing a cross section of a part of the first limiting member 41. Figure 4 As shown in FIG. 1 , the first limiting component 41 includes: a limiting body 45, a locking nut 47, and a screw-on component 49. The first limiting component 41 is, for example, a so-called cable fixing head, and is formed of resin. In addition, the first limiting component 41 may also be formed of metal. In addition, the first limiting component 41 may also be a structure partially formed of metal or resin. For example, the limiting body 45 and the screw-on component 49 may also be formed of metal. In the following description, Figure 4 The following description is based on the status shown in the figure. Figure 4 In the description, the upper side of the paper is considered as the upper side, and the lower side of the paper is considered as the lower side.

[0050] like Figure 4 As shown in the figure, the limiting body 45 is in a generally cylindrical shape extending in the vertical direction, and a flange 45A is formed in the central portion in the vertical direction. The flange 45A protrudes outward from the limiting body 45, for example, and is in a plate shape having a predetermined thickness in the vertical direction. The flange 45A is formed integrally with the limiting body 45 and is fixed to the limiting body 45. The outer peripheral shape of the flange 45A is formed in a regular hexagon, for example.

[0051] The limiting body 45 has a first threaded portion 45B formed above the flange 45A and a second threaded portion 45C formed below the flange 45A. The first threaded portion 45B and the second threaded portion 45C are formed on the outer peripheral surface of the limiting body 45 at a predetermined pitch in the vertical direction.

[0052] A fixing plate 51 for mounting the first limiting member 41 is provided on the upper surface of the plasma head 11. An insertion hole 51A (see FIG. 5A ) is formed in the fixing plate 51 corresponding to the position where the power cable 16 is inserted. Figure 5 The insertion hole 51A has a substantially circular cross section and penetrates the fixing plate 51 in the vertical direction. The inner diameter of the insertion hole 51A is larger than the outer diameter of the power cable 16 and is formed to match the outer diameter of the restriction body 45 .

[0053] The first limiting member 41 is attached to the fixing plate 51 in a state where the lower end of the limiting body 45 is inserted into the insertion hole 51A and the second screwed portion 45C protrudes downward from the fixing plate 51. The first limiting member 41 is in a state where the flange portion 45A is in contact with the upper surface of the fixing plate 51. The first limiting member 41 screws the lock nut 47 with the second screwed portion 45C from the lower end, and is sandwiched between the flange portion 45A and the lock nut 47 to fix the fixing plate 51 to the fixing plate 51. In addition, an adjustment member such as a washer may be arranged between the lock nut 47 and the fixing plate 51.

[0054] In addition, the first limiting component 41 has an elastic component 53 on the inner side of the screw-in component 49. The elastic component 53 is, for example, an annular rubber. In addition, a claw component 54 is installed between the screw-in component 49 and the elastic component 53. The claw component 54 is, for example, a cylindrical shape that is long in the up-down direction, and is a so-called collet shape formed with a plurality of slits. The claw component 54 increases the force of tightening the elastic component 53 to the power cable 16 as the screw-in component 49 is screwed with the first screwed portion 45B, for example, as the screw-in component 49 is tightened downward from the upper end of the first screwed portion 45B. The first limiting component 41 makes the elastic component 53, which is rubber, contact the outer peripheral surface of the cable covering component 16B, and restricts the movement of the power cable 16 by friction. In this way, the first limiting component 41 is fixed to the plasma head 11 by the lock nut 47, and restricts the movement of the power cable 16 by the screw-in component 49.

[0055] In the plasma device 10 of the present embodiment, for example, various forces act on the power cable 16 according to the operation of the robot 13 (movement of the plasma head 11, change of the orientation of the plasma head 11, etc.). Figure 3 As shown, a force in a tensile direction 55 to pull the power cable 16 out of the plasma head 11, a force in a direction 56 to bend the power cable 16, a force in a direction 57 to twist the power cable 16, etc. are applied to the power cable 16. As a result, the position of the power cable 16 may be offset. In particular, the conductor 16C is less flexible than the cable covering member 16B made of a resin material, so the possibility of disconnection due to tensile force, etc. is high. In response to this, the first limiting member 41 of the present embodiment limits the relative movement of the power cable 16 with respect to the plasma head 11 (movement in directions 55, 56, 57), and suppresses the occurrence of positional offset of the power cable 16 with respect to the plasma head 11. As a result, the positional offset and disconnection of the cable covering member 16B and the conductor 16C can be suppressed.

[0056] Therefore, the first limiting member 41 of the present embodiment includes an elastic member 53 into which the power cable 16 can be inserted and a limiting body 45 mounted on the plasma head 11. The screwing member 49 of the first limiting member 41 is inserted into the elastic member 53, screwed with the first screwed portion 45B provided on the limiting body 45, and the force for tightening the elastic member 53 to the power cable 16 is changed according to the position in the up-down direction of the screwing.

[0057] Thus, the first restricting member 41 brings the resin elastic member 53 into contact with the power cable 16, restricting the movement of the power cable 16 by tightening the elastic member 53. Thus, when the movement of the power cable 16 is restricted, damage or disconnection of the power cable 16 can be suppressed.

[0058] In addition, in the plasma apparatus 10 of the present embodiment, the movement of the power cable 16 is also restricted by the second restriction member 43 . Figure 5 The second limiting member 43 and the metal plate 61 to which the second limiting member 43 is fixed are shown, and the power cable 16 is shown in a transparent manner. Figure 5 The plasma head 11 is partially omitted in the illustration, showing a state where the first limiting member 41 is removed. Figure 6 A perspective view showing the second restriction member 43 and the metal plate 61 .

[0059] like Figure 5 and Figure 6 As shown in FIG. 1 , the second limiting member 43 includes a metal band 63 and a bolt 65. In addition, a metal plate 61 is installed in the plasma head 11. The metal plate 61 is substantially T-shaped and includes a base 61A and a protruding portion 61B. The base 61A is substantially rectangular and thin, and through holes 61C are formed at both ends in the longitudinal direction. The metal plate 61 is fixed to the plasma head 11 by screwing bolts (not shown) inserted into the through holes 61C and the main body of the plasma head 11.

[0060] The protrusion 61B is formed integrally with the base 61A and is in the shape of a plate that protrudes upward from the center of the base 61A in the longitudinal direction. The protrusion 61B extends upward with a certain width, and a pair of engaging portions 61D are formed at the front end. The pair of engaging portions 61D protrude at the front end of the protrusion 61B in a direction orthogonal to the longitudinal direction of the protrusion 61B (from the front end to both sides).

[0061] The second limiting member 43 fixes the front end of the power cable 16 led out from the first limiting member 41 and the metal plate 61. The metal belt 63 of the second limiting member 43 is wound around both the power cable 16 (cable cover member 16B) and the protrusion 61B below the first limiting member 41. Figures 4 to 6The metal band 63 has a certain width in the vertical direction. The inner diameter of the metal band 63 decreases as the bolt 65 is tightened. The structure for tightening the metal band 63 by the bolt 65 is not particularly limited. For example, the distance between a pair of screwed portions provided at both ends of the metal band 63 may be made closer as the bolt 65 is tightened, so that the inner diameter of the metal band 63 is gradually reduced.

[0062] in addition, Figure 5 and Figure 6 The structure of the second limiting member 43 shown in FIG. Figure 7 As shown, the metal band 63 as the second limiting member 43 may also be an arc-shaped band. In addition, a rectangular plate may be used as the metal plate 61. Furthermore, the two ends of the second limiting member 43 may be fixed to the metal plate 61 by bolts 65, and the power cable 16 may be fixed to the metal plate 61 by the arc-shaped metal band 63.

[0063] like Figure 6 As shown, the metal belt 63 is wound around the protrusion 61B below the engaging portion 61D of the metal plate 61. Thus, the metal belt 63 is engaged with the engaging portion 61D while being wound around the power cable 16 and the protrusion 61B, thereby preventing the metal belt 63 from falling off the metal plate 61. The second limiting member 43 of this embodiment, like the first limiting member 41, limits the relative movement (movement in directions 55, 56, and 57) of the power cable 16 relative to the plasma head 11, thereby preventing the power cable 16 from being displaced relative to the plasma head 11. Thus, it is possible to prevent the cable covering member 16B, the conductor 16C, etc. from being displaced or disconnected.

[0064] Therefore, the first limiting member 41 of the present embodiment makes the resin member (elastic member 53) contact the power cable 16 to limit the movement of the power cable 16. In addition, the second limiting member 43 makes the metal member (metal belt 63) contact the power cable 16 to limit the movement of the power cable 16. Here, the first limiting member 41 is installed on the base end side (control box 15 side) of the power cable 16 compared to the position of the second limiting member 43. Therefore, when the power cable 16 is bent or twisted to the left and right, front and back as the plasma head 11 moves, it is deformed starting from the first limiting member 41 (refer to Figure 3 In other words, the power cable 16 is bent or twisted while in contact with the first limiting member 41. In contrast, the first limiting member 41 causes the elastic member 53 made of a resin such as rubber to contact the power cable 16 to limit the movement of the power cable 16. Thus, when the movement of the power cable 16 is limited, damage to the power cable 16 and disconnection can be suppressed.

[0065] In addition, the second limiting member 43 makes the metal band 63 contact the power cable 16 to limit the movement of the power cable 16. Metal parts have higher rigidity than resin parts and can more firmly fix the power cable 16. On the other hand, metal parts are more likely to damage the power cable 16 than resin parts. In view of this, the second limiting member 43 is provided at the front end side of the power cable 16 ( Figure 3 Thus, for example, the movement of the power cable 16 in the bending direction 56 and the twisting direction 57 can be restricted by the first restriction member 41 on the base end side, and the movement of the power cable 16 in the falling direction 55 can be firmly restricted by the second restriction member 43 on the front end side.

[0066] In addition, the second limiting member 43 has a metal band 63, and is fixed to the plasma head 11 in a state where the power cable 16 is fastened by the metal band 63. Thus, by using the metal band 63 as the second limiting member 43, the power cable 16 can be more firmly fixed to the plasma head 11. In particular, the movement of the power cable 16 in the falling direction 55 can be firmly limited by the metal band 63.

[0067] In addition, the plasma head 11 includes a metal plate 61 (protrusion 61B) inserted into the metal band 63. The metal band 63 is inserted into the power cable 16 and the metal plate 61 to fasten and fix the power cable 16 to the metal plate 61. Thus, the metal band 63 fastens the power cable 16 together with the metal plate 61 of the plasma head 11 (fastens by so-called co-fastening), and fixes the power cable 16 to the plasma head 11. Thus, the power cable 16 can be fastened to the plate-shaped metal plate 61 and firmly fixed to the plasma head 11.

[0068] In addition, if Figure 3 As shown, the first limiting member 41 fixes the position of the power cable 16 in a state where the power cable 16 is along the fixed axis 59. The fixed axis 59 is, for example, along the direction of inserting the power cable 16 into the plasma head 11. In addition, the second limiting member 43 also fixes the position of the power cable 16 in a state where the power cable 16 is along the fixed axis 59. That is, the second limiting member 43 fixes the power cable 16 on the same axis as the first limiting member 41. For example, the center of the power cable 16 inserted into the first limiting member 41 and the center of the power cable 16 inserted into the second limiting member 43 are on the fixed axis 59.

[0069] Thus, by making the fixed axis the same axis, the ability to restrict the above-mentioned movement such as bending, twisting, and falling off can be complemented well. The power cable 16 and the conductor 16C can be firmly fixed without damage. In addition, by making the fixed axis 59 the same axis, the space for arranging the first limiting member 41 and the second limiting member 43 can be reduced, and the plasma head 11 can be miniaturized.

[0070] (Detailed Structure of Plasma Generating Unit 21)

[0071] Next, refer to Figure 8 to Figure 11 The structure of the case where a folded portion is provided in the conductor 16C exposed from the conductor covering member 16F will be described. Figure 8 to Figure 11 This is an example of a structure in which a return portion (redundant, surplus portion) is provided in the conductor 16C of the plasma device 10, and there are portions that are different from the above-mentioned embodiment in shape and the like. Figure 8 As shown in FIG. 1 , the plasma generating unit 21 includes a head body 71 and a pair of electrodes 33. The pair of electrodes 33 are each cylindrical, for example, and are fixed by an electrode fixing member 75 in a state where the front end portions thereof protrude toward the reaction chamber 73 of the head body 71. In the following description, Figure 8 As shown in the figure, the direction in which the pair of electrodes 33 are arranged is called the X direction, the axial direction of the cylindrical electrode 33 is called the Z direction, and the direction orthogonal to the X direction and the Z direction is called the Y direction.

[0072] A portion of the electrode 33 and the electrode fixing member 75 are surrounded by an electrode cover 77 made of an insulator such as ceramic. The gap between the inner peripheral surface of the electrode cover 77 and the outer peripheral surface of the electrode 33 functions as a gas passage 79. The downstream opening of the electrode cover 77 is connected to the reaction chamber 73. In addition, a reaction gas flow path 81 and a pair of carrier gas flow paths 83 are formed inside the head body 71. The reaction gas flow path 81 allows the gas to pass through the gas pipe 19 (see Figure 1 ) and the reaction gas supplied from the gas supply unit 15B flows into the reaction chamber 73. In addition, a pair of carrier gas flow paths 83 are respectively connected to a pair of gas pipes 19, and carrier gas is supplied from the gas supply unit 15B. The carrier gas flow path 83 allows the carrier gas to flow into the reaction chamber 73 via the gas passage 79. In addition, the number of electrodes 33 provided in the plasma head 11 is not limited to two, and may be other multiple.

[0073] In addition, a plurality of main body side plasma passages 85 are formed in the downstream portion of the reaction chamber 73 in the head main body 71. The upstream ends of the plurality of main body side plasma passages 85 are connected to the reaction chamber 73, and the downstream ends are opened at the lower end surface of the head main body 71. In addition, a plurality of nozzle side plasma passages 89 penetrating along the Z direction are formed in the nozzle 35. Each of the plurality of nozzle side plasma passages 89 is connected to each of the plurality of main body side plasma passages 85 at the upper end. The plasma gas generated in the reaction chamber 73 is ejected from the opening 89A at the lower end of the nozzle side plasma passage 89 through the main body side plasma passage 85 and the nozzle side plasma passage 89 together with the carrier gas.

[0074] like Fig. 9 and Fig.10 As shown, the power line 16A of the power cable 16 includes: a conductor 16C, a conductor covering member 16F covering the conductor 16C, and a terminal 16D. The conductor 16C is, for example, a copper metal wire. The conductor covering member 16F is, for example, a cylindrical tube formed of an insulating resin material. In addition, the material of the conductor disclosed in the present invention is not limited to copper, and may also be other conductive materials such as gold.

[0075] The terminal 16D is a conductive metal component, a so-called round terminal. The terminal 16D has a crimping portion 91 and a terminal plate 93. The crimping portion 91 is, for example, cylindrical in shape, and is crimped to the front end of the conductor 16C. The terminal plate 93 is in the shape of a thin plate, and is fixed to the electrode 33 by screwing a screw component 95 (bolt, etc.) inserted into a through hole (not shown) into the electrode fixing component 75. In this way, the conductor 16C can be firmly fixed to the electrode 33 both electrically and physically. In addition, the connecting component that connects the conductor 16C to the electrode 33 is not limited to a round terminal, and other connecting components such as a U-shaped terminal can be used. In addition, the installation position of the terminal 16D is not limited to the front end of the conductor 16C, and it can also be a position in the middle of the exposed portion of the conductor 16C. In addition, as shown in FIG. Figure 8 As shown, in the power cable 16 of this embodiment, in addition to the pair of conductors 16C, a ground wire 90 is inserted. The front end of the ground wire 90 is fixed to a metal plate provided on the wall surface of the plasma head 11 by a bolt 90A. In addition, the base end of the ground wire 90 is grounded in the control box 15. The control box 15 can detect power abnormality and the like by detecting the induced current flowing through the ground wire 90 and the like.

[0076] In addition, if Fig. 9 and Fig.10As shown in FIG. 1 , the conductor 16C extends from the opening 97 at the front end of the conductor covering member 16F by a predetermined length and becomes exposed. The conductor 16C is provided with a crimping portion 91 at the exposed front end thereof. In addition, the conductor 16C is bent in the middle of the exposed portion to form a bent portion 99. Therefore, the crimping portion 91 is provided at a position closer to the front end than the bent portion 99 of the conductor 16C. Furthermore, the conductor 16C is fixed to the electrode 33 by the terminal 16D in the bent state.

[0077] Here, as described above, the power cable 16 of the present embodiment is mounted on the plasma head 11 by the first limiting member 41 and the second limiting member 43, and the movement is restricted. Even if the movement is restricted by the first limiting member 41 and the second limiting member 43, the conductor 16C of the power cable 16 may be slightly (for example, at a level of several hundred μm) stretched due to the movement speed, acceleration, etc. of the robot 13. Assuming that the front end portion of the conductor 16C does not have a margin and the conductor 16C is fixed in a state of being connected from the opening 97 of the conductor covering member 16F to the terminal 16D at the shortest distance, even a slight deviation (stretching action) of several hundred μm may cause the conductor 16C to be damaged or disconnected.

[0078] Therefore, the conductor 16C of this embodiment is bent by providing a curved portion 99 at the portion exposed from the conductor covering member 16F. Even if the conductor 16C is stretched toward the base end due to the action of the robot 13, the deviation caused by the stretching is absorbed by extending the curved portion 99, thereby reducing the tensile force applied to the front end of the conductor 16C. As a result, the occurrence of damage to the conductor 16C is suppressed. Therefore, the bending amount (the length of the excess) of the curved portion 99 is preferably set to a length greater than the maximum length of the deviation of the conductor 16C stretched due to the action of the robot 13 in a state where the movement is restricted by the first restricting member 41 and the second restricting member 43.

[0079] like Fig.11 As shown in FIG. 1 , the conductor 16C extends from a base end position 101 drawn out from the opening 97 on the base end side to a front end position 103 crimped to the crimping portion 91. The length of the portion of the conductor 16C exposed from the conductor covering member 16F (opening 97) is longer than the shortest distance L connecting the position of the conductor 16C in the opening 97, that is, the base end position 101 and the front end position 103 where the conductor 16C is attached to the crimping portion 91. The conductor 16C is bent, for example, in an S-shape, and is bent by an excess amount longer than the shortest distance L to form a bent portion 99. Thus, even if the conductor 16C is bent to the side, the conductor 16C is not bent. Fig.11 The upward stretch in the middle can also absorb the displacement caused by the stretch by stretching the bent portion 99.

[0080] (Installation method of power cable 16)

[0081] Next, an example of the installation procedure of the power cable 16 will be described. Specifically, first, the operator inserts the front end portion of the power cable 16 inserted into the first limiting member 41 into the insertion hole 51A of the plasma head 11 (see Figure 4 ). Next, the inserted tip of the power cable 16 is attached to the plasma head 11 by the second limiting member 43. The bolt 65 (see Figure 4 ) and the movement of the power cable 16 is restricted by tightening the second restriction member 43 (an example of the first installation process of the present disclosure).

[0082] Next, the conductor 16C exposed from the conductor covering member 16F is bent and the terminal 16D is fixed to the electrode 33 (an example of the second installation process of the present disclosure). For example, when the power cable 16 is fixed at a predetermined position by the second limiting member 43, the length of the conductor 16C exposed from the conductor covering member 16F is adjusted to be greater than the shortest distance L mentioned above (greater than the maximum length of the offset). Thus, when the operator fixes the terminal 16D, the excess portion is bent to form a bent portion 99. In addition, the operator installs the first limiting member 41 provided on the base end side of the power cable 16 to the insertion hole 51A of the plasma head 11, etc. (an example of the third installation process of the present disclosure). The power cable 16 is fixed to the plasma head 11. In this way, by pre-adjusting the length of the exposed portion of the conductor 16C and performing the installation operation, the conductor 16C can be fixed in a state where the bent portion 99 is formed.

[0083] In addition, the electrode 33 of this embodiment is in the shape of a cylinder extending along the Z direction (an example of the longitudinal direction of the present disclosure). Fig.11 As shown in FIG. 1 , the terminal 16D and the opening 97 of the conductor covering member 16F are arranged on a straight line parallel to the Z direction. In other words, the conductor 16C extends downward from the opening 97 in the Z direction and is fixed by the terminal 16D at the front end portion below. Thus, the opening 97, the conductor 16C, the terminal 16D, the electrode fixing member 75, and the electrode 33 can be arranged on a straight line parallel to the Z direction, and the arrangement space can be reduced. As a result, the bending portion 99 can be provided to suppress the disconnection of the wire, etc., and the plasma head 11 can be miniaturized.

[0084] Incidentally, the power supply unit 15A is an example of a power supply unit. The robot 13 is an example of a head moving device. The terminal 16D is an example of a connecting member. The screw member 49 is an example of an annular screw member. The first screwed portion 45B is an example of a screwed portion.

[0085] As described above, in the above-mentioned first embodiment, the following effects are achieved.

[0086] In one mode of the present embodiment, the power cable 16 that supplies power to the plasma head 11 is restricted in movement by the first restriction member 41 and the second restriction member 43. The second restriction member 43 is disposed at the front end side of the power cable 16 compared to the position of the first restriction member 41, is mounted on the plasma head 11, and restricts the relative movement of the power cable 16 with respect to the plasma head 11.

[0087] Thus, when the robot 13 moves the plasma head 11, the first limiting member 41 and the second limiting member 43 are used to limit the relative movement of the power cable 16 with respect to the plasma head 11. The first limiting member 41 and the second limiting member 43 are mounted at different positions of the power cable 16 to limit the movement of the power cable 16. Thus, by limiting the movement of the power cable 16 at two locations, it is possible to suppress the relative deviation of the position of the power cable 16 from the position of the plasma head 11. It is possible to suppress the occurrence of situations such as the power cable 16 falling off from the plasma head 11 as the plasma head 11 moves or the power cable 16 being disconnected due to the position deviation from the plasma head 11.

[0088] (Second Embodiment)

[0089] Next, a second embodiment of the present disclosure will be described. In the first embodiment described above, the second limiting member 43 is disposed inside the plasma head 11. In contrast, in the second embodiment, Fig.13 and Fig.14 As shown, the first limiting member 111 and the second limiting member 112 are provided outside the plasma head 11A. In the following description, the same reference numerals are given to the same structures as those in the first embodiment, and the description thereof is omitted as appropriate.

[0090] In detail, Fig.13 and Fig.14 As shown, the plasma device 10 of the second embodiment includes: a plasma head 11A, a power cable 16, a bracket 113 and a metal plate 114. On the upper surface of the plasma head 11A, a first connector 116 is provided at the portion where the power cable 16 is installed. In addition, a second connector 117 installed on the first connector 116 is installed at the front end of the power cable 16. In addition, Fig.13 and Fig.14 The gas pipe 19 is omitted (see Figure 1 ) icon.

[0091] The first and second connectors 116 and 117 are formed of, for example, an insulating resin, and can connect the pair of power lines 16A of the power cable 16 through different paths. Fig.15 The internal structure of the second connector 117 is shown in perspective. Fig.15As shown, the second connector 117 has a main body 117A and a pair of clamping parts 117B. The main body 117A has a passage through which the pair of power lines 16A pass respectively and is branched into two branches. The two-branched parts of the main body 117A are respectively inserted into a pair of insertion holes 116A provided in the first connector 116 (see Fig.13 ). In addition, a pin 117C is provided at the front end of the conductor 16C of the power line 16A inserted into the main body 117A. The pins 117C provided on the pair of conductors 16C and the pin insertion portion 118 provided on the first connector 116 (see Fig.14 ) is electrically connected. The pin insertion portion 118 is electrically connected to the electrode 33 (see Figure 8 )Electrical connection.

[0092] A pair of clamping parts 117B are formed with two grooves that are consistent with the shape of the power line 16A, and the power line 16A is clamped from the side when it is embedded in each groove. In this way, the two power lines 16A can be clamped and fixed while achieving insulation. Insertion holes 117D that can insert bolts (not shown) from above are formed in the clamping parts 117B and the main body 117A. The second connector 117 clamps the power line 16A using a pair of clamping parts 117B, and the bolts are inserted into the insertion holes 117D of the clamping parts 117B installed above the main body 117A. By screwing the bolts with the internal threads (not shown) of the first connector 116, the second connector 117 can be fixed to the first connector 116, that is, the power cable 16 can be fixed to the plasma head 11A.

[0093] In addition, if Fig.13 and Fig.14 As shown, the bracket 113 is a plate-shaped metal component that is long in one direction, for example, made of iron. The bracket 113 is, for example, disposed at Figure 2 The mounting plate 13A at the front end of the robot 13 shown in the figure or a component mounted on the mounting plate 13A. The bracket 113 is in the shape of a substantially rectangular plate that is long in one direction, for example, along the insertion direction of the first connector 116 into the second connector 117. On the downstream side ( Fig.13 A first mounting plate 113A in the form of a thin plate is fixed to the end portion of the mounting bracket 113 (below the side). The first mounting plate 113A is fixed to the back surface 115 of the plasma head 11A by a plurality of bolts 119. The back surface 115 is an example of the outer peripheral surface of the present disclosure. In addition, the outer peripheral surface of the mounting bracket 113 is not limited to the back surface 115, and may also be a side surface or a front surface.

[0094] In addition, a thin plate-shaped second mounting plate 113B is fixed to the upstream end of the bracket 113. The support member 121 is mounted on the second mounting plate 113B. Fig.14 and Fig.16As shown, the support member 121 is a plate-shaped member with both ends facing the same direction ( Fig.14 The bracket 113 is bent into a shape (below the bracket 113), and the base end 121A with the base end bent is fixed to the second mounting plate 113B by a bolt 123. In addition, the metal plate 114 is fixed to the bent front end 121B of the support member 121 by a pair of bolts 124. In addition, the fixing method of the bracket 113, the support member 121 and the metal plate 114 is not limited to the bolts 119, 123, and 124, and a method using screws and nuts or a fixing method based on welding may also be used.

[0095] The metal plate 114 is in a roughly T-shaped shape, and has a base 114A and a protrusion 114B. The base 114A is in a roughly rectangular thin plate shape, and through holes 114C for inserting the bolts 124 are formed at both ends in the longitudinal direction. The protrusion 114B is formed integrally with the base 114A, and is in a plate shape that protrudes upward from the central part of the base 114A in the longitudinal direction. Two first limiting components 111 and a second limiting component 112 are installed on the protrusion 114B. The first limiting component 111 is, for example, a resin binding tape such as INSULOK (registered trademark). The two first limiting components 111 are arranged with a predetermined gap therebetween in the extension direction of the protrusion 114B, in other words, in the extension direction of the power cable 16 fixed to the metal plate 114.

[0096] The second limiting member 112 is provided at the front end side (downstream side) of the power cable 16 compared to the position of the first limiting member 111. The second limiting member 112 includes, for example, a metal band 126 and a bolt 127 (see Fig.18 ). The metal band 126 fastens the power cable 16 to the metal plate 114 by tightening the bolt 127. In addition, the first limiting member 111 may be one or more than three. In addition, the second limiting member 112 may be more than one.

[0097] The protrusion 114B is formed with a groove 114D formed by cutting out in accordance with the position of fastening the first and second limiting members 111 and 112. The groove 114D is formed by recessing the side edge of the protrusion 114B inward in the width direction. The first and second limiting members 111 and 112 are respectively inserted into the power cable 16 and the protrusion 114B, and the power cable 16 is fastened to the metal plate 114. In addition, the first and second limiting members 111 and 112 are respectively inserted into the groove 114D, and the power cable 16 is fastened to the metal plate 114, and the extension direction of the power cable 16 is limited by the groove 114D ( Fig.16Thus, the first and second limiting members 111 and 112 are firmly attached to the plasma head 11A via the metal plate 114, the support member 121, and the bracket 113, respectively. By limiting the movement of the power cable 16 at three locations, the relative displacement of the position of the power cable 16 relative to the plasma head 11A can be suppressed. It is possible to suppress the power cable 16 from falling off from the plasma head 11A as the plasma head 11A moves or from being disconnected due to the displacement of the position from the plasma head 11A.

[0098] In addition, if Fig.14 As shown in FIG. 1 , the power cable 16 is attached to the metal plate 114 through the first and second limiting members 111 and 112 in a state of being bent between the second connector 117 (pin 117C) and the metal plate 114. Specifically, the power cable 16 is fixed to the metal plate 114 at a position away from the second mounting plate 113B (bracket 113) by the amount of the support member 121. The portion of the power cable 16 attached to the metal plate 114 is arranged to be closer to the plasma head 11A than the portion of the power cable 16 (second connector 117). Fig.14 Furthermore, when viewed from the side, the power cable 16 is fixed to the plasma head 11A in a state of being bent in a substantially S-shape from the position where it is fixed to the metal plate 114 .

[0099] Here, even if the movement is restricted by the first and second restriction members 111 and 112, the conductor 16C of the power cable 16 may be slightly pulled due to the movement speed or acceleration of the robot 13. Fig.15 As shown, the front end of the conductor 16C of the second embodiment is mounted on a pin 117C fixed to the second connector 117. Assuming that the power cable 16 has no margin and is connected to the second connector 117 from the metal plate 114 at the shortest distance, the conductor 16C may be disconnected from the pin 117C even if it is slightly offset by several hundred μm. Therefore, the power cable 16 of the second embodiment is bent and flexed between the metal plate 114 and the second connector 117. Assuming that the power cable 16 is bent toward the base end side ( Figure 1 The power cable 16 is pulled by the robot 13 (towards the control box 15 in the robot 13), and the deviation caused by the pulling can be absorbed by stretching the pre-bent portion of the power cable 16, thereby reducing the tensile force applied to the front end of the conductor 16C. As a result, the damage to the conductor 16C is suppressed. Therefore, the bending amount (extra length) of the power cable 16 is preferably set to a length greater than the maximum length of the deviation of the conductor 16C pulled by the action of the robot 13 in a state where the movement is restricted by the first and second limiting members 111 and 112.

[0100] In addition, if Fig.14 and Fig.16 As shown in FIG. 1 , a bent portion 114E is formed at the upstream end of the metal plate 114. The bent portion 114E is formed as it approaches the upstream side from the downstream side (as it approaches the upstream side from the downstream side). Fig.14 The lower part in the figure is close to the upper part) and the direction away from the power cable 16 ( Fig.14 Here, the curved portion 114E is formed, for example, along the Fig.14 In the case of a straight line in the up-down direction in the robot 13, the edge (edge) on the upstream side of the metal plate 114 is located close to the power cable 16. When the power cable 16 moves in response to the movement of the robot 13, the power cable 16 may be damaged due to friction between the edge and the power cable 16. Therefore, in order to make the edge (edge) located further away from the power cable 16, the metal plate 114 is bent in a direction away from the upstream end to form a bent portion 114E. As a result, the contact between the edge of the bent portion 114E and the power cable 16 can be avoided, and the damage to the power cable 16 can be suppressed.

[0101] (Installation method of power cable 16)

[0102] Next, an example of the installation procedure of the power cable 16 is described. In the installation of the power cable 16, use Fig.17 The clamp 129 is shown. Fig.17 The metal plate 114 is shown in a state where it is attached to the jig 129 .

[0103] like Fig.17 As shown, the clamp 129 is formed of a metal plate that is long in one direction and has a shape that simulates the bracket 113. The clamp 129 is formed with, for example, a hole 129A that achieves lightness and is easier to handle than the bracket 113. Fig.17 The left end portion of the base 114A is provided with a plate mounting portion 131 to which the metal plate 114 can be mounted. The plate mounting portion 131 and the through hole 114C of the base 114A (see Fig.16 ) is formed with an internal thread (not shown) capable of fastening the bolt 124. In addition, a connector mounting portion 132 capable of mounting the second connector 117 is provided at the end of the clamp 129 on the opposite side of the plate mounting portion 131. For example, a simulated connector 133 simulating the first connector 116 is mounted on the connector mounting portion 132, and the second connector 117 can be mounted.

[0104] The board mounting portion 131 and the connector mounting portion 132 are disposed at positions separated by a predetermined distance in the longitudinal direction of the clamp 129. The predetermined distance is, for example, Fig.17 The distance L1 shown is Fig.14The distance L1 is the distance between the downstream end of the metal plate 114 (base 114A) mounted on the clamp 129 and the upper end of the dummy connector 133. In addition, the distance L2 is the distance between the lower end of the metal plate 114 fixed to the bracket 113 and the upper end of the second connector 117. The board mounting portion 131 and the connector mounting portion 132 are configured, for example, in the same plane along the plane of the board mounting portion 131. When the power cable 16 is mounted on the metal plate 114 of the board mounting portion 131 and the second connector 117 of the power cable 16 is mounted on the dummy connector 133, the power cable 16 is, for example, on a straight line between the metal plate 114 and the second connector 117. In other words, the power cable 16 is, for example, the length of the distance L1 specified by the clamp 129 between the metal plate 114 and the second connector 117. The distance L1 is longer than the distance L2. Furthermore, when the power cable 16 removed from the clamp 129 is mounted on the bracket 113, as shown in FIG. Fig.14 As shown, the distance L1 is defined so as to bend the power cable 16. In other words, the operator can bend the power cable 16 by the same amount when actually attaching it to the plasma head 11A (bracket 113) by attaching the metal plate 114 and the power cable 16 to the jig 129 in advance.

[0105] In the installation work, first, the operator prepares the clamp 129 and the power cable 16 with the second connector 117 installed. The operator installs the second connector 117 to the dummy connector 133 of the connector mounting portion 132. In addition, the metal plate 114 is installed to the plate mounting portion 131 by the bolts 124 (an example of the clamp installation process of the present disclosure).

[0106] Fig.18 129 shows a state where the power cable 16 is installed in the clamp 129. Fig.18 In the embodiment, the electromagnetic shielding cover 135 is installed on the power cable 16. Fig.18As shown, after the operator mounts the metal plate 114 on the plate mounting portion 131 and mounts the second connector 117 on the dummy connector 133, the operator arranges the power cable 16 in a straightly extending state on the metal plate 114. Next, the first and second limiting components 111 and 112 are wound around the power cable 16 and the metal plate 114, and the power cable 16 is fastened to the metal plate 114 by the first and second limiting components 111 and 112 (an example of a retaining component fixing process disclosed in the present invention). Then, the metal plate 114 and the second connector 117 are removed from the clamp 129, the second connector 117 is mounted on the first connector 116 of the plasma head 11A, and the metal plate 114 is mounted on the bracket 113 mounted on the plasma head 11A (an example of a head mounting process disclosed in the present invention). Thus, as described above, the metal plate 114 is pre-fixed to the power cable 16 at a position of the distance L1 specified by the clamp 129, as shown in FIG. Fig.14 As shown, when the power cable 16 is mounted on the bracket 113 , the power cable 16 can be mounted on the clamp 129 in a state where the power cable 16 is bent between the second connector 117 and the metal plate 114 .

[0107] The content and order of the above-mentioned installation steps are only examples. For example, after the metal plate 114 is installed on the bracket 113, the bracket 113 may be installed on the plasma head 11A. In addition, after the metal plate 114 is installed on the bracket 113, the second connector 117 may be installed on the first connector 116.

[0108] Incidentally, in the above-mentioned second embodiment, the metal plate 114 is an example of a holding member. The back surface 115 is an example of an outer peripheral surface. The first connector 116 is an example of a head-side connector. The second connector 117 is an example of a cable-side connector.

[0109] As described above, in the second embodiment described above, the same effects as those of the first embodiment are achieved. In addition, in the second embodiment, the following effects are achieved.

[0110] In one mode of the present embodiment, the metal plate 114 is fixed to a bracket 113 mounted on the back side 115 of the plasma head 11A. The power cable 16 is fixed to the metal plate 114 by two first limiting members 111 on the upstream side and a second limiting member 112 on the downstream side. The first and second limiting members 111, 112 limit the relative movement of the power cable 16 with respect to the plasma head 11.

[0111] Thus, by restricting the movement of the power cable 16 at three locations, the power cable 16 can be prevented from being displaced relative to the plasma head 11. The power cable 16 can be prevented from being dropped from the plasma head 11 or disconnected due to displacement from the plasma head 11.

[0112] In addition, the present disclosure is not limited to the above-described embodiments, and can be implemented in various forms in which various changes and improvements are made based on the knowledge of those skilled in the art.

[0113] Specifically, for example, the cable whose movement is restricted by the first restricting member 41, 111 and the second restricting member 43, 112 is not limited to the power cable 16, but may be other cables such as the gas pipe 19 that connect the plasma head 11 to the control box 15. That is, the structure of the first restricting member 41, 111 and the second restricting member 43, 112 may be applied to various cables used in the plasma device 10.

[0114] In addition, the head moving device that moves the plasma head 11 is not limited to the multi-articulated robot, and may be another head moving device such as an XY robot.

[0115] In addition, the structure of the first limiting member 41 and the second limiting member 43 in the first embodiment is an example. Fig.12 As shown in FIG. 1 , a resin binding tape such as INSULOK (registered trademark) may be used as the first limiting member 41. Fig.12 As shown, for example, the metal plate 67 fixed to the back surface of the plasma head 11 and the power cable 16 may be fixed by the first restricting member 41 (binding band).

[0116] In addition, the first limiting member 41 and the second limiting member 43 may be configured such that both the resin member and the power cable 16 are in contact with each other to limit the movement of the power cable 16. For example, both the first limiting member 41 and the second limiting member 43 may be so-called cable fixing heads. In addition, the first limiting member 41 and the second limiting member 43 may be configured such that both the metal member and the power cable 16 are in contact with each other to limit the movement of the power cable 16. For example, both the first limiting member 41 and the second limiting member 43 may be metal belts. In addition, the first limiting member 41 may be configured such that both the metal member and the power cable 16 are in contact with each other, and the second limiting member 43 may be configured such that both the resin member and the power cable 16 are in contact with each other.

[0117] In addition, the fixing axis 59 for fixing the power cable 16 by the first limiting member 41 and the fixing axis 59 for fixing the power cable 16 by the second limiting member 43 may be axes of different positions, directions, inclinations, etc.

[0118] The power supply unit 15A and the gas supply unit 15B may be devices separate from the control box 15. The plasma apparatus 10 may not include the power supply unit 15A and may receive power from an external power supply unit.

[0119] In the second embodiment, the metal plate 114 may not include the groove portion 114D but may include a linear edge portion.

[0120] In addition, although the metal plate 114 is used as the holding member of the present disclosure, the present invention is not limited thereto and the holding member may be a member formed of wood, resin, or the like other than metal.

[0121] Alternatively, the metal plate 114 may be formed in a straight plate shape without the bent portion 114E.

[0122] In addition, if Fig.14 As shown, the power cable 16 may be bent instead of being bent between the metal plate 114 and the second connector 117. For example, the power cable 16 may be arranged on a straight line between the metal plate 114 and the second connector 117.

[0123] In addition, both the first and second restricting members 111 and 112 may be members made of resin such as INSULOK (registered trademark). In addition, both the first and second restricting members 111 and 112 may be members made of metal.

[0124] Description of Reference Numerals

[0125] 10 plasma device, 11, 11A plasma head, 15A power supply part (power supply unit), 16 power cable, 16C conductor, 16D terminal (connecting part), 16F conductor covering part, 33 electrode, 41, 111 first limiting part, 43, 112 second limiting part, 45 limiting body part, 45B first screwed part (screwed part), 49 screwed part (annular screwed part), 53 elastic part, 59 fixed shaft, 61 metal plate, 63 metal belt, 91 crimping part, 93 terminal plate, 95 screwed part, 99 bending part, 101 base end position, 103 front end position, L shortest distance, 113 bracket, 114 metal plate (holding part), 115 back side (outer peripheral surface), 116 first connector (head side connector), 117 second connector (cable side connector), 114D groove part, 114E bending part, 129 clamp.

Claims

1. A plasma device comprising: A plasma head supplies power to the electrodes to generate plasma; A head moving device moves the plasma head; a power cable, wherein a front end portion of the power cable is connected to the electrode, a base end portion of the power cable is connected to a power supply unit, and the power cable supplies power from the power supply unit to the electrode; a first limiting component, mounted on the plasma head, to limit the relative movement of the power cable with respect to the plasma head; and A second limiting member is disposed at a front end side of the power cable compared to the position of the first limiting member, and is mounted on the plasma head to limit the relative movement of the power cable with respect to the plasma head. The first restricting member restricts movement of the power cable by bringing a resin member into contact with the power cable. The second limiting member causes a metal member to contact the power cable to limit movement of the power cable. The second limiting member includes a metal band, and the power cable is fixed to the plasma head in a state of being fastened by the metal band. The plasma head includes a metal plate inserted into the metal belt, The metal belt is inserted into the power cable and the metal plate, and firmly fixes the power cable to the metal plate. The first limiting component comprises: An elastic component capable of being inserted into the power cable; A limiting body portion, mounted on the plasma head; and The annular screw-fitting member is inserted into the elastic member and screw-fitted with the screw-fitting portion provided on the limiting body portion, and the force for tightening the elastic member to the power cable is changed according to the screw-fitting position. The movement of the power cable in the bending direction and the twisting direction is restricted by the first restriction member on the base end side, and the movement of the power cable in the falling-off direction is restricted by the second restriction member on the front end side.

2. The plasma device according to claim 1, in, The first limiting member limits movement of the power cable in a state where the power cable is arranged along a fixed axis. The second restriction member restricts movement of the power cable in a state where the power cable is arranged along the same fixed axis as that of the first restriction member.

3. The plasma device according to claim 1 or 2, in, The power cable has: conductor; a conductor covering member covering the conductor; and a connecting member connecting the conductor and the electrode, The conductor is exposed from the opening of the conductor covering member and is bent, and the connecting member is provided at a distal end side of the bent portion. The conductor is attached to the electrode through the connecting member while being bent.

4. The plasma device according to claim 3, in, The length of the portion of the conductor exposed from the opening of the conductor covering member is longer than the shortest distance between a position of the conductor in the opening of the conductor covering member and a position where the conductor is attached to the connecting member. The conductor is bent by an excess amount longer than the shortest distance.

5. The plasma device according to claim 3, in, The electrode is in the shape of a column extending along the length direction. The openings of the connection member and the conductor covering member are arranged on a straight line parallel to the longitudinal direction of the electrode.

6. The plasma device according to claim 3, in, The connecting component has: A crimping portion, crimped to a front end of the conductor; and The terminal plate connects the crimping portion and the electrode and is fixed to the electrode by a screw member.

7. The plasma device according to claim 1, in, The plasma device comprises: A bracket mounted on the outer peripheral surface of the plasma head; and A retaining member mounted on the bracket, The first limiting member and the second limiting member are respectively inserted into the power cable and the holding member, and the power cable is firmly fixed to the holding member. The first limiting member and the second limiting member are respectively attached to the plasma head via the bracket.

8. The plasma device according to claim 7, in, The plasma head has a head-side connector connected to the electrode, The power cable has a cable-side connector at the front end portion connected to the head-side connector, The bracket is a plate-shaped metal component that is long in one direction. The power cable is attached to the holding member via the first restriction member and the second restriction member in a state where the power cable is held bent between the cable-side connector and the holding member.

9. The plasma device according to claim 7, in, The holding member has a groove portion cut out corresponding to a position where the first limiting member and the second limiting member are fastened. The first restriction member and the second restriction member fasten the power cable to the holding member in a state of being inserted into the groove, and are restricted from moving toward the base end portion by the groove.

10. The plasma device according to claim 7, in, The holding member has a bent portion formed on the base end side, the bent portion being bent in a direction away from the power cable as it approaches the base end side from the front end side.

11. A method for installing a power cable, which is a method for installing a power cable in a plasma device. The plasma device comprises: A plasma head supplies power to the electrodes to generate plasma; a power cable, a front end portion of the power cable being connected to the electrode, a base end portion of the power cable being connected to a power supply unit, and the power cable supplying power from the power supply unit to the electrode; a first limiting component, mounted on the plasma head, to limit the relative movement of the power cable with respect to the plasma head; and A second limiting member is disposed at a front end side of the power cable compared to the position of the first limiting member, and is mounted on the plasma head to limit the relative movement of the power cable with respect to the plasma head. The first restricting member restricts movement of the power cable by bringing a resin member into contact with the power cable. The second limiting member causes a metal member to contact the power cable to limit movement of the power cable. The second limiting member has a metal band, and the power cable is fixed to the plasma head in a state of being fastened by the metal band. The plasma head includes a metal plate inserted into the metal belt, The metal belt is inserted into the power cable and the metal plate, and firmly fixes the power cable to the metal plate. The first limiting component comprises: An elastic component capable of being inserted into the power cable; A limiting body portion, mounted on the plasma head; and The annular screw-in component is inserted into the elastic component and screwed with the screwed portion provided on the limiting body, and the force for tightening the elastic component to the power cable is changed according to the screwed position. The first limiting member on the base end side limits the movement of the power cable in the bending direction and the twisting direction, and the second limiting member on the front end side limits the movement of the power cable in the falling direction. The power cable has: conductor; a conductor covering member covering the conductor; and a connecting member connecting the conductor and the electrode, The power cable installation method comprises the following steps: a first installation step of installing the second limiting component to limit the movement of the power cable; a second mounting step of mounting the conductor exposed from the opening of the conductor covering member to the electrode through the connecting member while the conductor is kept bent; and In a third mounting step, the first restriction member is mounted to restrict movement of the power cable.

12. A method for installing a power cable, which is a method for installing a power cable in a plasma device. The plasma device comprises: A plasma head supplies power to the electrodes to generate plasma; a power cable, a front end portion of the power cable being connected to the electrode, a base end portion of the power cable being connected to a power supply unit, and the power cable supplying power from the power supply unit to the electrode; A bracket, mounted on the outer peripheral surface of the plasma head; A retaining member mounted on the bracket; a first limiting component, mounted on the holding component, to limit the relative movement of the power cable with respect to the plasma head; and A second limiting member is provided at a front end side of the power cable compared to the position of the first limiting member, is mounted on the holding member, and limits the relative movement of the power cable with respect to the plasma head. The first restricting member restricts movement of the power cable by bringing a resin member into contact with the power cable. The second limiting member causes a metal member to contact the power cable to limit movement of the power cable. The second limiting member has a metal band, and the power cable is fixed to the plasma head in a state of being fastened by the metal band. The plasma head includes a metal plate inserted into the metal belt, The metal belt is inserted into the power cable and the metal plate, and firmly fixes the power cable to the metal plate. The first limiting component comprises: An elastic component capable of being inserted into the power cable; A limiting body portion, mounted on the plasma head; and The annular screw-fitting member is inserted into the elastic member and screw-fitted with the screw-fitting portion provided on the limiting body portion, and the force for tightening the elastic member to the power cable is changed according to the screw-fitting position. The first limiting member on the base end side limits the movement of the power cable in the bending direction and the twisting direction, and the second limiting member on the front end side limits the movement of the power cable in the falling direction. The plasma head has a head-side connector connected to the electrode, The power cable has a cable-side connector at the front end portion connected to the head-side connector, The power cable installation method comprises the following steps: a jig installation step of installing the cable-side connector on the connector installation portion and installing the holding member on the board installation portion using a jig in which a plate installation portion on which the holding member can be installed and a connector installation portion on which the cable-side connector can be installed are arranged at positions separated by a predetermined distance; a holding member fixing step of winding the first limiting member and the second limiting member around the power cable connected to the cable-side connector and the holding member, and firmly fixing the power cable to the holding member by the first limiting member and the second limiting member; and The head mounting step is to remove the holding member and the cable-side connector from the jig, mount the cable-side connector to the head-side connector, and mount the holding member to the bracket.

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