EBSD sample disassembly and assembly platform and EBSD detection method of sample

Abstract

The present invention discloses an EBSD sample disassembly and assembly station and an EBSD detection method for a sample. The EBSD sample disassembly and assembly station comprises: a sample disassembly and assembly body, wherein the sample disassembly and assembly body is provided with a fixed adhesive surface, a conductive filling surface and an active recessed portion; the conductive filling surface is connected to the fixed adhesive surface and is recessed in the fixed adhesive surface in a direction away from the sample; the active recessed portion and the fixed adhesive surface are connected and arranged, and the sample is acted on through the active recessed portion. By providing a sample disassembly and assembly body, wherein the fixed adhesive surface and the conductive filling surface ensure appropriate fixed adhesive surface and conductive filling surface to provide sufficient and appropriate adhesive performance and conductive performance, mechanical drift and thermal drift can be avoided, and through the active recessed portion, an active tool can be used to knock the sample through the active recessed portion to separate the sample and the sample disassembly and assembly body, without the need for a long period of soaking to separate the sample and the sample disassembly and assembly body.

Description

Technical Field

[0001] The present invention relates to the technical field of EBSD, and in particular to an EBSD sample disassembly and assembly platform and an EBSD detection method for a sample. Background Art

[0002] Electron backscatter diffraction (EBSD) technology is widely used in characterizing the microstructure and microtexture of materials. EBSD can reveal information about a material's grain structure, substructure, precipitated phases, microtexture, and grain misorientation. This technique is of great significance for studying material properties and is now widely used in microscopic studies of various structural materials.

[0003] The prior art discloses an EBSD sample disassembly station, which includes a sample disassembly body and a stud fixed to the bottom of the sample disassembly body. The sample disassembly body has a first outer bevel and a second outer bevel, which can be bonded to samples of appropriate sizes separately or simultaneously.

[0004] However, after the sample test is completed, the sample disassembly body with the sample bonded to it needs to be immersed in a solution such as acetone for a long time to dissolve the adhesive and separate the sample from the sample disassembly body, which is inconvenient for subsequent testing. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that a sample disassembly and assembly body to which a sample is bonded needs to be immersed in a solution such as acetone for a long time to dissolve the adhesive to separate the sample and the sample disassembly and assembly body, which is inconvenient for subsequent detection, thereby providing an EBSD sample disassembly and assembly table and an EBSD detection method for a sample.

[0006] An EBSD sample disassembly and assembly platform, comprising:

[0007] The sample disassembly and assembly body is provided with a fixed adhesive surface, a conductive filling surface and an active recessed portion, wherein the fixed adhesive surface is used to adhere the sample; the conductive filling surface is connected to the fixed adhesive surface and is recessed in the fixed adhesive surface in a direction away from the sample; the active recessed portion and the fixed adhesive surface are connected, and the active recessed portion acts on the sample to separate the sample and the sample disassembly and assembly body.

[0008] Furthermore, the fixed bonding surfaces are symmetrically arranged on both sides of the active recessed portion.

[0009] Furthermore, the fixed bonding surface is a plane.

[0010] Furthermore, the conductive filling surfaces are symmetrically arranged on both sides of the active recess.

[0011] Furthermore, the conductive filling surface is an inclined surface, and the inclined surface is gradually arranged away from the sample in a direction away from the fixed bonding surface.

[0012] Furthermore, it also includes a supporting body and a base, wherein the supporting body is arranged on a side of the sample disassembly and assembly body away from the sample; the base is provided with a mounting hole, and the mounting hole is used to install the supporting body.

[0013] Furthermore, the base is provided with an adapting groove, which is provided on a side of the mounting hole close to the sample, and the adapting groove is used to install the sample disassembly and assembly body.

[0014] Furthermore, it also includes a locking piece, which is installed in the locking hole of the base, and is abutted against the support body by the locking piece to lock the support body, wherein the locking hole is connected to the installation hole.

[0015] A sample EBSD detection method comprises the following steps:

[0016] Installation: The sample is bonded to the fixed bonding surface of the sample disassembly body by adhesive, and conductive adhesive is filled between the sample and the conductive filling surface of the sample disassembly body;

[0017] Testing: performing EBSD testing on the sample mounted on the sample disassembly body;

[0018] Disassembly: Use an action tool to act on the sample through the action recess of the sample disassembly body to separate the sample and the sample disassembly body.

[0019] Furthermore, based on the above-mentioned EBSD sample disassembly and assembly station.

[0020] The technical solution of the present invention has the following advantages:

[0021] 1. The present invention provides an EBSD sample disassembly and assembly station, comprising: a sample disassembly and assembly body, wherein the sample disassembly and assembly body is provided with a fixed bonding surface, a conductive filling surface and an active recessed portion, wherein the fixed bonding surface is used to bond the sample; the conductive filling surface is connected to the fixed bonding surface and is recessed in the fixed bonding surface in a direction away from the sample; the active recessed portion and the fixed bonding surface are connected, and the active recessed portion acts on the sample to separate the sample and the sample disassembly and assembly body. An EBSD sample disassembly and assembly station of this structure is provided with a sample disassembly and assembly body, wherein a fixed bonding surface and a conductive filling surface are ensured to be suitable so as to provide sufficient and suitable bonding performance and conductive performance to avoid mechanical drift and thermal drift, thereby improving the stability and accuracy of the test results. Moreover, through the action recess, since the bonding area of ​​the fixed bonding surface is suitable, an action tool such as a small screwdriver for repairing watches can be used to knock on the sample through the action recess to separate the sample and the sample disassembly and assembly body, without the need for a long period of soaking to separate the sample and the sample disassembly and assembly body. Sampling is convenient, fast and damage-free, does not affect subsequent testing, and improves the convenience and efficiency of testing.

[0022] 2. The present invention provides an EBSD sample disassembly and assembly platform, further comprising a support body and a base, wherein the support body is disposed on a side of the sample disassembly and assembly platform away from the sample; and the base is provided with mounting holes for mounting the support body. This structure of the EBSD sample disassembly and assembly platform, through the provision of the support body and base, provides support, facilitating the installation and removal of samples from the sample disassembly and assembly platform.

[0023] 3. The present invention provides an EBSD sample disassembly and assembly station, wherein the base is provided with an adapter slot, which is located on the side of the mounting hole closest to the sample, and is used to mount the sample disassembly and assembly body. The EBSD sample disassembly and assembly station of this structure facilitates the installation of the sample disassembly and assembly body by providing the adapter slot.

[0024] 4. The present invention provides an EBSD detection method for a sample, comprising the following steps: installation: bonding the sample to a fixed bonding surface of a sample disassembly body by adhesive, and filling conductive adhesive between the sample and the conductive filling surface of the sample disassembly body; detection: performing detection on the sample installed on the sample disassembly body; disassembly: using an action tool to act on the sample through an action recess of the sample disassembly body to separate the sample and the sample disassembly body. The EBSD detection method for a sample of this structure ensures that the fixed bonding surface and the conductive filling surface are suitable to provide sufficient and suitable bonding performance and conductive performance to avoid mechanical drift and thermal drift, thereby improving the stability and accuracy of the detection results. In addition, through the action recess, since the bonding area of ​​the fixed bonding surface is suitable, an action tool such as a small screwdriver for repairing watches can be used to knock on the sample through the action recess to separate the sample and the sample disassembly body. There is no need to separate the sample and the sample disassembly body through soaking for a long time. Sampling is convenient, fast, and damage-free, and does not affect subsequent detection, thereby improving the convenience and efficiency of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 This is a schematic structural diagram of the EBSD sample disassembly and assembly station provided in Example 1 of the present invention;

[0027] Figure 2 for Figure 1 Exploded diagram of the EBSD sample disassembly and assembly station shown;

[0028] Figure 3 for Figure 1 A cross-sectional view of the EBSD sample disassembly and assembly stage is shown;

[0029] Figure 4 for Figure 1 The schematic diagram of the structure of the sample disassembly body and the support body shown;

[0030] Figure 5 A diagram showing the test results of EBSD testing of a sample mounted on the EBSD sample disassembly and assembly station provided in Example 1 of the present invention;

[0031] Figure 6EBSD test results for samples using other methods and showing mechanical offset and thermal drift;

[0032] Description of reference numerals:

[0033] 1-sample disassembly and assembly body, 11-fixed bonding surface, 12-conductive filling surface, 13-action recess, 131-first opening, 132-second opening, 14-clamping recess, 2-support body, 3-base, 31-mounting hole, 32-adaptation slot, 33-locking hole, 4-locking piece. DETAILED DESCRIPTION

[0034] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0035] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0037] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0038] Example 1

[0039] This embodiment provides Figures 1 to 4The EBSD sample disassembly and assembly platform shown here includes a sample disassembly and assembly body 1, a support body 2, a base 3, and a locking member 4. The EBSD sample disassembly and assembly platform allows for sample disassembly and assembly for EBSD testing. Specifically, the sample disassembly and assembly body 1 can be cylindrical, prismatic, or other shapes; the base 3 can be rectangular, cylindrical, or other shapes; and the sample can be spring steel or other materials.

[0040] like Figure 1 and Figure 2 As shown, the surface of the sample assembly body 1 away from the base 3 is provided with a fixed adhesive surface 11, a conductive filling surface 12, an active recess 13, and a clamping recess 14. The fixed adhesive surface 11 is used to adhere the sample; the conductive filling surface 12 is connected to the fixed adhesive surface 11 and recessed into the fixed adhesive surface 11 in a direction away from the sample; a first opening 131 of the active recess 13 is connected to the fixed adhesive surface 11, and a second opening 132 of the active recess 13 is connected to a side surface of the sample assembly body 1. The active recess 13 acts on the sample to separate the sample from the sample assembly body 1; and the clamping recess 14 is symmetrically arranged on both sides of the sample assembly body 1. A clamping tool is placed in the clamping recess 14 to clamp the sample assembly body 1. Specifically, the clamping tool can be tweezers or other tools.

[0041] like Figure 1 As shown, the fixed bonding surface 11 is symmetrically arranged on both sides of the active recess 13, and the conductive filling surface 12 is symmetrically arranged on both sides of the active recess 13. Specifically, the conductive filling surface 12 is an inclined surface that gradually moves away from the sample in a direction away from the fixed bonding surface 11; the fixed bonding surface 11 is a flat surface.

[0042] like Figures 1 to 4 As shown, the support body 2 is arranged on the side of the sample disassembly body 1 away from the sample; the base 3 is provided with a mounting hole 31, and the mounting hole 31 is used to install the support body 2. Specifically, part of the support body 2 can be cylindrical and the other part can be truncated cone-shaped. Of course, other shapes can also be arranged. Figure 3 As shown, the base 3 is provided with an adapting groove 32 , which is provided on a side of the mounting hole 31 close to the sample, and the adapting groove 32 is used for mounting the sample disassembly body 1 .

[0043] The support body 2 and the base 3 provide support, making it easy to install and remove samples on the sample detachable body 1. The adapting groove 32 facilitates installation of the sample detachable body 1.

[0044] like Figures 1 to 3As shown, the locking member 4 is installed in the locking hole 33 of the base 3, and the locking member 4 abuts against the support body 2 to lock the support body 2, wherein the locking hole 33 is connected to the mounting hole 31. Specifically, the locking hole 33 can be a threaded hole, and the locking member 4 can be a screw, and the two are threadedly connected. Figure 2 As shown, each side wall of the base 3 is provided with a locking hole 33, and each locking hole 33 corresponds to a locking member 4. Of course, the locking holes 33 are also provided on some side walls of the base 3, and the side wall of one of the locking holes 33 can also be provided with two or more locking members 4. The position of the locking holes 33, the number of locking holes 33, and the locking members 4 can be set according to needs, and are not limited to Figure 2 The content in.

[0045] As an alternative embodiment, it can also be arranged that: the support body 2 is provided with partial threads, the mounting hole 31 can be a threaded hole, and the two are threadedly connected. In this case, the locking hole 33 and the locking member 4 may not be provided.

[0046] In the embodiment of the present invention, an EBSD sample disassembly station is provided with a sample disassembly body 1, wherein a fixed bonding surface 11 and a conductive filling surface 12 are provided to ensure that the fixed bonding surface 11 and the conductive filling surface 12 are suitable, so as to provide sufficient and suitable bonding performance and conductive performance to avoid the occurrence of mechanical drift and thermal drift, thereby improving the stability and accuracy of the test results. As well as through the action recess 13, since the bonding area of ​​the fixed bonding surface 11 is suitable, a tool such as a screwdriver or a steel rod can be used to knock the sample through the action recess 13 to separate the sample and the sample disassembly body 1, without having to soak the sample for a long time to separate the sample and the sample disassembly body 1, and sampling is convenient, fast and damage-free, and does not affect subsequent detection, thereby improving the convenience and efficiency of detection. It should be noted that the action tool needs to be able to be inserted into the action recess 13 and can knock the sample and is not limited to the listed ones, wherein the screwdriver can be a small screwdriver for repairing clocks.

[0047] Example 2

[0048] This embodiment provides an EBSD detection method for a sample, based on the EBSD sample disassembly and assembly station in Example 1, including the following steps:

[0049] Installation: Adhere the sample to the fixed adhesive surface 11 of the sample disassembly body 1 using adhesive such as 502 glue, and apply conductive glue such as silver conductive glue between the surface of the sample close to the base 3 and the conductive filling surface 12 of the sample disassembly body 1 to make the sample conductive. At this time, the sample disassembly body 1 is locked on the base 3 by the locking member 4;

[0050] Detection: Remove the sample disassembly body 1 containing the sample and place it on a dedicated sample stage of a detection device such as an electron microscope. The dedicated sample stage can be tilted 70°, and the working distance can be greater than or equal to 10mm and less than or equal to 25mm. Insert the EBSD probe, the voltage can be greater than or equal to 15kV and less than 30kV, and the current can be greater than or equal to 2nA and less than or equal to 10nA. Perform EBSD detection on the central area of ​​the sample installed in the sample disassembly body 1;

[0051] Disassembly: After the test is completed, take out the sample disassembly body 1, lock the sample disassembly body 1 on the base 3 through the locking piece 4, insert the working tool into the working recess 13, and use the working tool to knock on the sample through the working recess 13 of the sample disassembly body 1 to separate the sample and the sample disassembly body 1, and then proceed with subsequent testing. Figure 5 This is the test result diagram corresponding to this embodiment without mechanical offset and thermal drift. There is no mechanical offset and thermal drift, and the detection effect is good. Figure 6 Other methods are used for the sample and the test results with mechanical offset and thermal drift are shown.

[0052] In the present embodiment, an EBSD detection method for a sample is provided by fixing the bonding surface 11 and the conductive filling surface 12 to ensure that the bonding surface 11 and the conductive filling surface 12 are suitable, so as to provide sufficient and appropriate bonding performance and conductive performance to avoid mechanical drift and thermal drift, thereby improving the stability and accuracy of the detection result. In addition, due to the appropriate bonding area of ​​the fixed bonding surface 11, an acting tool such as a small screwdriver for repairing watches can be used to tap the sample through the acting recess 13 to separate the sample and the sample disassembly body 1. There is no need to separate the sample and the sample disassembly body 1 through soaking for a long time. Sampling is convenient, fast, and damage-free, and does not affect subsequent detection, thereby improving the convenience and efficiency of detection.

[0053] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. An EBSD sample disassembly and assembly station, characterized in that: include: The sample disassembly and assembly body is provided with a fixed adhesive surface, a conductive filling surface and an active recessed portion, wherein the fixed adhesive surfaces are symmetrically arranged on both sides of the active recessed portion and are used to adhere the sample; the conductive filling surface is connected to the fixed adhesive surface and is recessed in the fixed adhesive surface in a direction away from the sample; The first opening of the action recess is connected to the fixed adhesive surface, and the second opening of the action recess is connected to the side of the sample disassembly body. The action tool can separate the sample and the sample disassembly body by knocking on the sample through the action recess.

2. An EBSD sample disassembly and assembly station according to claim 1, characterized in that: The fixed bonding surface is a plane.

3. An EBSD sample disassembly and assembly station according to claim 1 or 2, characterized in that: The conductive filling surfaces are symmetrically arranged on both sides of the active recess.

4. The EBSD sample disassembly and assembly station according to claim 3, characterized in that: The conductive filling surface is an inclined surface, and the inclined surface is gradually arranged away from the sample in a direction away from the fixed bonding surface.

5. The EBSD sample disassembly and assembly station according to claim 1, characterized in that: It also includes a supporting body and a base, wherein the supporting body is arranged on a side of the sample disassembly body away from the sample; the base is provided with a mounting hole, and the mounting hole is used to mount the supporting body.

6. The EBSD sample disassembly and assembly station according to claim 5, characterized in that: The base is provided with an adapting groove, which is provided on a side of the mounting hole close to the sample, and is used for mounting the sample disassembly and assembly body.

7. The EBSD sample disassembly and assembly station according to claim 5, characterized in that: It also includes a locking piece, which is installed in the locking hole of the base, and is abutted against the support body by the locking piece to lock the support body, wherein the locking hole is connected to the installation hole.

8. A method for EBSD detection of a sample, applied to the EBSD sample disassembly and assembly station according to any one of claims 1 to 7, characterized in that: The steps include: Installation: The sample is bonded to the fixed bonding surface of the sample disassembly body by adhesive, and conductive adhesive is filled between the sample and the conductive filling surface of the sample disassembly body; Testing: performing EBSD testing on the sample mounted on the sample disassembly body; Disassembly: Use an action tool to act on the sample through the action recess of the sample disassembly body to separate the sample and the sample disassembly body.

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