Semiconductor cleaning apparatus and mixing device thereof

Abstract

The application discloses a semiconductor cleaning equipment and a mixing device thereof. The mixing device comprises a temporary storage container, a first liquid input pipeline, a mixing container, a pressure relief mechanism and a driving gas pipeline. The liquid output end of the first liquid input pipeline is communicated with the temporary storage container. The liquid outlet of the temporary storage container is communicated with the mixing container. The gas input end of the driving gas pipeline is communicated with the temporary storage container, so as to input the driving gas into the temporary storage container to drive the first liquid in the temporary storage container to flow to the mixing container. The pressure relief mechanism is connected to the temporary storage container and communicated with the inner cavity of the temporary storage container. When the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the pressure relief mechanism is in a gas relief state. The above scheme can solve the problem that the temporary storage container is easily damaged when the actual pressure in the temporary storage container is much higher than the working pressure.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor cleaning equipment, in particular to a semiconductor cleaning equipment and a mixing device thereof. BACKGROUND

[0002] The semiconductor cleaning equipment is used for cleaning a wafer. When the semiconductor cleaning equipment is used for cleaning the wafer, the concentration of cleaning liquid needs to be changed according to different process requirements.

[0003] In the related art, in order to obtain cleaning liquid with different concentrations, the cleaning liquid needs to be mixed in a mixing device. The cleaning liquid needs to enter a temporary storage container, and then gas is filled into the temporary storage container to push the cleaning liquid in the temporary storage container into a mixing container for mixing. In order to avoid corrosion of the cleaning liquid to the temporary storage container, the temporary storage container is usually made of resin. Since the flow power of the cleaning liquid comes from the gas filled into the buffer container, the working pressure in the temporary storage container is usually 2 to 3 bar, and the temporary storage container bears a high pressure. Since the temporary storage container is made of resin, if the pressure in the temporary storage container is higher than the working pressure, the temporary storage container is prone to damage. SUMMARY

[0004] The present application discloses a semiconductor cleaning equipment and a mixing device thereof to solve the problem that the temporary storage container is prone to damage when the actual pressure in the temporary storage container is higher than the working pressure.

[0005] To solve the above technical problems, the present application is implemented as follows:

[0006] In a first aspect, the present application discloses a mixing device of a semiconductor cleaning equipment, comprising a temporary storage container, a first liquid input pipeline, a mixing container, a pressure relief mechanism and a driving gas pipeline, wherein:

[0007] The liquid output end of the first liquid input pipeline is in communication with the temporary storage container, the liquid outlet of the temporary storage container is in communication with the mixing container, the gas input end of the driving gas pipeline is in communication with the temporary storage container to input driving gas into the temporary storage container to drive the first liquid in the temporary storage container to flow to the mixing container, the pressure relief mechanism is connected to the temporary storage container and in communication with the inner cavity of the temporary storage container, and the pressure relief mechanism is in a gas relief state when the actual pressure of the gas in the temporary storage container is greater than a first preset pressure value.

[0008] In a second aspect, the present application further discloses a semiconductor cleaning equipment comprising the mixing device of the first aspect.

[0009] The technical solution adopted by the present application can achieve the following technical effects:

[0010] The embodiment of the present application sets the driving gas pipeline, so that the first liquid in the temporary storage container can enter the mixing liquid container under the driving of the driving gas delivered by the driving gas pipeline, thereby ensuring that the first liquid can smoothly enter the mixing liquid container for mixing. By setting the pressure relief mechanism, when the actual pressure of the gas in the temporary storage container is greater than the preset pressure value during the process of driving the first liquid in the temporary storage container into the mixing liquid container, the pressure relief mechanism can be in a gas relief state, thereby avoiding damage to the temporary storage container caused by excessive actual pressure of the gas in the temporary storage container. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 Structure schematic view of the mixing liquid device disclosed by the embodiment of the present application;

[0012] Figure 2 Structure schematic view of the temporary storage container disclosed by the embodiment of the present application;

[0013] Figure 3 Structure schematic view of the pressure relief valve disclosed by the embodiment of the present application;

[0014] Figure 4 Structure schematic view of the pressure relief valve disclosed by the embodiment of the present application; Figure 2 Structure schematic view of the pressure relief valve disclosed by the embodiment of the present application;

[0015] BRIEF DESCRIPTION OF DRAWINGS

[0016] PRV01- pressure relief valve,

[0017] PRG03- first pressure relief valve, PRG01- second pressure relief valve,

[0018] PSW01- first pressure sensor,

[0019] AOV04- first on-off valve, AOV07- second on-off valve, AOV11- third on-off valve, AOV01- fourth on-off valve, AOV05- fifth on-off valve, AOV09- sixth on-off valve,

[0020] MNV01- first check valve,

[0021] CLFC01- first flow controller, CLFC02- second flow controller,

[0022] LLS01- first liquid level switch, LLS02- third liquid level switch, LLS03- third liquid level switch,

[0023] 110- valve body, 111- first inner cavity, 112- second inner cavity, 113- upper valve body, 114- lower valve body,

[0024] 121- diaphragm body, 122- threaded connecting piece,

[0025] 130 - valve flap,

[0026] 140 - medium inlet connection,

[0027] 150 - output connection,

[0028] 160 - first sealing ring,

[0029] 210 - upper pressure plate, 220 - lower pressure plate, 230 - cylinder, 240 - second sealing ring. DETAILED DESCRIPTION

[0030] In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions will be described below in detail with specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0031] The technical solutions disclosed by the embodiments of the present application will be described in detail below with reference to the drawings.

[0032] Please refer to Figures 1 to 4 The disclosed mixing device of the semiconductor cleaning equipment includes a temporary storage container, a first liquid input pipeline, a mixing container, a pressure relief mechanism and a driving gas pipeline.

[0033] The liquid output end of the first liquid input pipeline is in communication with the temporary storage container, and the liquid input end of the first liquid input pipeline can be in communication with a first liquid source part. The first liquid can enter the temporary storage container through the first liquid input pipeline.

[0034] The liquid outlet part of the temporary storage container is in communication with the mixing container, and the first liquid in the temporary storage container can enter the mixing container through the liquid outlet part of the temporary storage container, so that the first liquid is mixed with other liquids in the mixing container. The liquid outlet part of the temporary storage container can be in communication with the mixing container through a conveying pipeline.

[0035] The gas inlet end of the driving gas pipeline can be in communication with a gas source part, and the driving gas pipeline is used for inputting a driving gas for driving the first liquid in the temporary storage container to flow to the mixing container. The driving gas can be an inert gas, such as nitrogen, and of course, the driving gas can also be other gases.

[0036] The pressure relief mechanism is connected to the temporary storage container and communicates with the inner cavity of the temporary storage container. The pressure relief mechanism can include an electromagnetic valve and a pressure sensor. The electromagnetic valve can be mounted on the temporary storage container and communicate with the inner cavity of the temporary storage container. The pressure sensor can be connected to the electromagnetic valve and used to detect the actual pressure in the temporary storage container. The pressure relief mechanism can also be a balanced valve. The balanced valve is arranged in the temporary storage container and can communicate with the inner cavity of the temporary storage container. The balanced valve has an opening pressure and can be automatically opened and closed according to the actual pressure of the gas in the temporary storage container. Of course, the pressure relief mechanism can also have other structures, and the specific structure of the pressure relief mechanism is not limited herein.

[0037] When the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the pressure relief mechanism is in a gas relief state. Specifically, if the actual pressure of the gas in the temporary storage container is too high, it can cause the temporary storage container to leak or be damaged, etc. The first preset pressure value is a pressure value that the temporary storage container can withstand without causing leakage or damage, etc. The first preset pressure value needs to be set according to the structure, material, etc. of the temporary storage container. The gas relief state is to release the gas in the temporary storage container to reduce the gas pressure in the temporary storage container.

[0038] In the specific implementation process, the first liquid input pipeline first inputs the first liquid into the temporary storage container. After the liquid level of the first liquid in the temporary storage container reaches the requirement, the first liquid input pipeline is closed to stop inputting the first liquid into the temporary storage container. The driving gas pipeline drives the driving gas to be input into the temporary storage container, so that the driving gas drives the first liquid in the temporary storage container to enter the mixing liquid container from the liquid outlet of the temporary storage container for mixing. During the process of the first liquid entering the mixing liquid container from the liquid outlet of the temporary storage container for mixing, when the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the pressure relief mechanism is in a gas relief state to release the gas in the temporary storage container, thereby reducing the actual pressure of the gas in the temporary storage container.

[0039] The embodiment of the present application sets the driving gas pipeline, so that the first liquid in the temporary storage container can enter the mixing liquid container under the driving action of the driving gas delivered by the driving gas pipeline, thereby ensuring that the first liquid can smoothly enter the mixing liquid container for mixing. The pressure relief mechanism is set, so that when the actual pressure of the gas in the temporary storage container is greater than the preset pressure value during the process of the driving gas driving the first liquid in the temporary storage container to enter the mixing liquid container, the pressure relief mechanism can be in a gas relief state, thereby avoiding damage to the temporary storage container caused by the actual pressure of the gas in the temporary storage container being too high.

[0040] The first liquid input pipeline can be provided with a first check valve MNV01. When the first liquid is supplemented to the temporary storage container, the first check valve MNV01 is opened. When the supplement of the first liquid to the temporary storage container is stopped, the first check valve MNV01 is closed. The first check valve MNV01 can effectively prevent the backflow of the first liquid.

[0041] Specifically, the pressure relief mechanism can include a first pressure relief pipeline and a first switch valve AOV04. The first end of the first pressure relief pipeline is in communication with the temporary storage container. The second end of the first pressure relief pipeline is a first pressure relief end. The first switch valve AOV04 is arranged in the first pressure relief pipeline. When the actual pressure of the gas in the temporary storage container is greater than a first preset pressure value, the first switch valve AOV04 is in an open state.

[0042] The first switch valve AOV04 can be a balanced valve. The opening pressure value of the balanced valve can be the first preset pressure value. When the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the balanced valve can be opened, so that the gas in the temporary storage container is released to reduce the actual pressure of the gas in the temporary storage container. When the actual pressure of the gas in the temporary storage container is less than or equal to the first preset pressure value, the balanced valve is in a closed state. Of course, the liquid mixing device can also include a controller and a first pressure detection device. The first pressure detection device is used to detect the actual pressure in the temporary storage container. The first pressure detection device and the first switch valve AOV04 are connected with the controller. When the first pressure detection device detects that the actual pressure in the temporary storage container is greater than the first preset pressure value, the controller controls the first switch valve AOV04 to be opened. When the first pressure detection device detects that the actual pressure in the temporary storage container is less than or equal to the first preset pressure value, the controller controls the first switch valve AOV04 to be closed. At this time, the first switch valve AOV04 can be a pneumatic switch valve, an electric valve, etc.

[0043] The embodiments disclosed in the present application set the pressure relief mechanism to include the first pressure relief pipeline and the first switch valve AOV04. When the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the first switch valve AOV04 is opened, so that the release of the gas in the temporary storage container can be realized. In turn, the damage of the temporary storage container caused by the excessive actual pressure of the gas in the temporary storage container can be avoided.

[0044] In an alternative embodiment, the pressure relief mechanism can further comprise a second pressure relief pipeline and a pressure relief valve PRV01. The first end of the second pressure relief pipeline is in communication with the temporary storage container, and the second end of the second pressure relief pipeline is a second pressure relief end. The gas in the temporary storage container can be discharged through the second pressure relief pipeline. The pressure relief valve PRV01 is arranged in the pressure relief pipeline to control the opening and closing of the pressure relief pipeline. When the pressure relief valve PRV01 is opened, the gas in the temporary storage container can be discharged through the second pressure relief pipeline. In the case where the actual pressure is greater than the second preset pressure value, the pressure relief valve PRV01 is in an open state. Specifically, the first preset pressure value can be 1.2 times the normal working pressure of the temporary storage container, and the second preset pressure value can be 1.5 times the normal working pressure of the temporary storage container.

[0045] Specifically, the pressure relief valve PRV01 can be a balanced valve. The opening pressure value of the pressure relief valve PRV01 can be the second preset pressure value. When the actual pressure of the gas in the temporary storage container is greater than the second preset pressure value, the balanced valve can be opened, so that the gas in the temporary storage container is discharged through the second pressure relief pipeline to reduce the actual pressure of the gas in the temporary storage container. When the actual pressure of the gas in the temporary storage container is less than or equal to the second preset pressure value, the balanced valve is in a closed state. Of course, the pressure relief valve PRV01 can also be a pneumatic valve or an electric valve. The opening and closing of the pneumatic valve and the electric valve can be controlled by the controller.

[0046] In the implementation process, when the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the first switch valve AOV04 is opened to discharge the gas in the temporary storage container. If the actual pressure of the gas in the temporary storage container continues to rise to be greater than the second preset pressure value, the pressure relief valve PRV01 is opened, and the gas in the temporary storage container is discharged through the pressure relief valve PRV01.

[0047] The embodiments disclosed in the present application set the second pressure relief pipeline and the pressure relief valve PRV01 to be opened when the actual pressure of the gas in the temporary storage container is greater than the second preset pressure value, and the second preset pressure value is greater than the first preset pressure value. This allows the temporary storage container to achieve a higher level of gas discharge, and also allows the second pressure relief pipeline and the pressure relief valve PRV01 to further discharge the gas in the temporary storage container if the actual pressure of the gas in the temporary storage container continues to rise after the first switch valve AOV04 is opened, thereby achieving double protection.

[0048] As described above, the pressure relief mechanism includes a second pressure relief pipeline and a pressure relief valve PRV01. The first end of the second pressure relief pipeline is in communication with the temporary storage container, and the second end of the second pressure relief pipeline is a second pressure relief end. The pressure relief valve PRV01 is arranged in the pressure relief pipeline to control the opening and closing of the pressure relief pipeline. When the actual pressure of the gas in the temporary storage container is greater than the second preset pressure value, the pressure relief mechanism can be discharged through the pressure relief valve PRV01. Specifically, the pressure relief valve PRV01 can be a balance valve connected to the second pressure relief pipeline and activated by the gas in the temporary storage container. When the actual pressure is greater than the second preset pressure value, the balance valve is opened by the gas, and thus is in an open state. The second preset pressure value is greater than the first preset pressure value. The second pressure relief pipeline and the pressure relief valve PRV01 can further discharge the gas in the temporary storage container, thereby achieving double protection and achieving a higher level of gas discharge for the temporary storage container. Of course, the pressure relief valve PRV01 can also be a hand-operated valve, and can also be an electrically controlled valve or other types of valves.

[0049] Further, the mixing device further includes a starting pressure adjusting mechanism. The starting pressure adjusting mechanism includes a pressure regulating pipeline and a first pressure relief valve PRG03. The first end of the pressure regulating pipeline is in communication with the driving gas pipeline. Part of the driving gas in the driving gas pipeline can enter from the first end of the pressure regulating pipeline. The first pressure relief valve PRG03 is arranged in the pressure regulating pipeline. The second end of the pressure regulating pipeline is in communication with the pressure regulating inner cavity of the pressure relief valve PRV01. The driving gas entering the pressure regulating pipeline enters the pressure regulating inner cavity of the pressure relief valve PRV01 from the second end of the pressure regulating pipeline after passing through the first pressure relief valve PRG03. The first pressure relief valve PRG03 can control the output pressure of the output side, thereby controlling the pressure of the second end of the pressure regulating pipeline entering the pressure regulating inner cavity of the pressure relief valve PRV01, and thereby adjusting the starting pressure of the pressure relief valve PRV01. The opening of the pressure relief valve PRV01 is related to the pressure of the pressure regulating inner cavity of the pressure relief valve PRV01. That is, the first pressure relief valve PRG03 can adjust the size of the second preset pressure value.

[0050] The embodiments disclosed in the present application set the starting pressure adjusting mechanism, so that the starting pressure of the pressure relief valve PRV01 can be controlled through the pressure regulating pipeline and the first pressure relief valve PRG03, thereby adjusting the opening pressure of the pressure relief valve PRV01, so that the opening pressure of the pressure relief valve PRV01 can be adjusted according to the actual strength of the temporary storage container, thereby more favorably protecting the temporary storage container dynamically. Moreover, the starting pressure adjusting mechanism fully utilizes the driving gas in the driving gas pipeline to adjust the starting pressure, thereby making the structure more reasonable.

[0051] Optionally, a fourth on-off valve AOV01 can be arranged on the driving gas pipeline, a fifth on-off valve AOV05 can be arranged on the first liquid input pipeline, and a sixth on-off valve AOV09 can be arranged at the communication position of the temporary storage container and the mixing container.

[0052] The fourth switch valve AOV01 is used to control the opening and closing of the driving gas pipeline. When the driving gas needs to be input into the temporary storage container, the fourth switch valve AOV01 is in an open state. The fifth switch valve AOV05 is used to control the opening and closing of the first liquid input pipeline. When the first liquid needs to be supplemented into the temporary storage container, the first switch valve AOV04 and the fifth switch valve AOV05 are in an open state, and the fourth switch valve AOV01 and the sixth switch valve AOV09 are in a closed state. The sixth switch valve AOV09 is used to control the opening and closing between the temporary storage container and the mixing container.

[0053] When the first liquid is supplemented into the temporary storage container, the first switch valve AOV04 and the fifth switch valve AOV05 are opened, and the gas in the temporary storage container can be discharged from the first pressure relief pipeline along with the rising of the first liquid, avoiding the problem that the first liquid is difficult to inject due to the high pressure in the temporary storage container. After the first liquid is supplemented into the temporary storage container, the first switch valve AOV04 and the fifth switch valve AOV05 are in a closed state.

[0054] When the first liquid in the temporary storage container needs to be delivered to the mixing container, the fourth switch valve AOV01 and the sixth switch valve AOV09 are opened, and the first switch valve AOV04 and the fifth switch valve AOV05 are in a closed state. The driving gas can enter the temporary storage container through the driving gas pipeline to drive the first liquid in the temporary storage container to be delivered to the mixing container, so as to realize the mixing of the first liquid.

[0055] When the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the first switch valve AOV04 is opened to discharge the gas in the temporary storage container from the first pressure relief pipeline, so as to realize the pressure relief of the temporary storage container. When the actual pressure of the gas in the temporary storage container is less than or equal to the first preset pressure value, the first switch valve AOV04 is closed.

[0056] Specifically, the pressure relief valve PRV01 can include a valve body 110, a diaphragm and a valve flap 130. The valve body 110 can be provided with a valve cavity, and the diaphragm can be arranged in the valve cavity and separate the valve cavity into a first inner cavity 111 and a second inner cavity 112 which are isolated from each other.

[0057] The valve body can be provided with a valve body outlet, a pressure regulating medium inlet and a valve body inlet. The pressure regulating medium inlet can be in communication with the first inner cavity 111 and the second end of the pressure regulating pipeline respectively, so that the pressure of the first inner cavity 111 is maintained at the second preset pressure value. The first inner cavity 111 can be a pressure regulating inner cavity. The valve disc 130 can be arranged on the valve body inlet, and the valve disc 130 is connected with the diaphragm. The valve body inlet is in communication with the temporary storage container. When the actual pressures of the first inner cavity 111 and the inner cavity of the temporary storage container are equal, the diaphragm can be in an equilibrium state. When the pressure of the first inner cavity 111 is greater than the actual pressure of the inner cavity of the temporary storage container, the valve disc 130 will be driven to block the valve body inlet.

[0058] The pressure regulating medium inlet can be provided with a medium inlet connector 140, and the valve body outlet can be provided with an output connector 150.

[0059] The valve body outlet is in communication with the second inner cavity 112. The valve body outlet can be in communication with the second pressure relief end, and the valve body inlet can be in communication with the temporary storage container. When the actual pressure is greater than the second preset pressure value, that is, the pressure of the first inner cavity 111 is less than the actual pressure of the inner cavity of the temporary storage container, the valve disc 130 is separated from the valve body inlet under the action of the second pressure difference, and the valve body inlet can be in communication with the valve body outlet through the second inner cavity 112. The gas in the temporary storage container can be discharged in sequence through the valve body inlet, the second inner cavity 112, the valve body outlet and the second pressure relief end, thereby realizing the release of the gas in the temporary storage container.

[0060] The pressure relief valve PRV01 is arranged to include a valve body 110, a diaphragm and a valve disc 130, so that the diaphragm can separate the valve cavity into the first inner cavity 111 and the second inner cavity 112 which are isolated from each other, and the first inner cavity 111 is in communication with the pressure regulating pipeline, thereby facilitating the opening or blocking of the valve body inlet by the gas driving the valve disc 130.

[0061] The diaphragm can include a diaphragm body 121 and a threaded connector 122. The diaphragm body 121 can be connected to the inner wall of the valve cavity, and the diaphragm body 121 separates the valve cavity into the first inner cavity 111 and the second inner cavity 112 which are isolated from each other. The diaphragm body 121 can be provided with a through hole, the valve disc 130 can be provided with a threaded hole, the threaded connector 122 can pass through the through hole and be connected with the threaded hole, and the edge of the diaphragm body 121 surrounding the through hole is sealingly clamped between the valve disc 130 and the cap body of the threaded connector 122. The edge of the diaphragm body 121 surrounding the through hole can be provided with a first sealing ring 160 between the valve disc 130 and the cap body of the threaded connector 122, and the sealing can be further realized through the first sealing ring 160.

[0062] By setting the diaphragm to include the diaphragm body 121 and the threaded connecting piece 122, the diaphragm body 121 is provided with a through hole, the valve disc 130 is provided with a threaded hole, the threaded connecting piece passes through the through hole and is connected with the threaded hole to realize the connection of the diaphragm and the valve disc 130. Moreover, the threaded connection makes the connection of the diaphragm and the valve disc 130 more stable, and facilitates the disassembly and assembly of the diaphragm and the valve disc 130, so that the replacement of part of the components is easy to realize.

[0063] Of course, in some embodiments, the valve disc 130 can be connected to the diaphragm by bonding or welding. The bonding or welding does not need to open a hole in the diaphragm and does not need to open a threaded hole in the valve disc 130, thereby facilitating the reduction of process difficulty. The side of the valve disc 130 matched with the valve body inlet can be a tapered structure. When the valve disc 130 blocks the valve body inlet, the small end of the tapered structure of the valve disc 130 extends into the valve body inlet, and the large end of the tapered structure of the valve disc 130 is in sealing cooperation with the valve body inlet, so that the valve disc 130 can stably block the valve body inlet.

[0064] The valve body 110 can include an upper valve body 113 and a lower valve body 114. The upper valve body 113 and the lower valve body 114 are abutted to form a valve cavity, and the diaphragm can be clamped between the upper valve body 113 and the lower valve body 114. The structure of the upper valve body 113 and the lower valve body 114 can facilitate the disassembly of the valve body 110, thereby facilitating the maintenance of the valve body 110 and the disassembly and assembly of the diaphragm.

[0065] In an optional embodiment, the driving gas pipeline can be provided with a second pressure reducing valve PRG01. The second pressure reducing valve PRG01 can be used to adjust the maximum gas pressure in the temporary storage container. The gas outlet end of the second pressure reducing valve PRG01 is located on one side of the temporary storage container, and the second pressure reducing valve PRG01 can adjust the pressure of the gas outlet end to adjust the pressure in the temporary storage container.

[0066] By providing the second pressure reducing valve PRG01 on the driving gas pipeline, the pressure of the driving gas entering the temporary storage container can be controlled on the path of the driving gas entering the temporary storage container, so that the maximum pressure in the temporary storage container can be adjusted, and the pressure fluctuation of the driving gas entering the temporary storage container is relatively stable, thereby further preventing the actual pressure of the gas in the temporary storage container from being too large to damage the temporary storage container. The second pressure reducing valve PRG01 can be connected with a first pressure sensor PSW01. The first pressure sensor PSW01 is used to detect the pressure on the output side of the second pressure reducing valve PRG01. After the gas pressure of the driving gas pipeline to the temporary storage container is stable, the detected pressure on the output side of the second pressure reducing valve PRG01 is equivalent to the pressure in the temporary storage container.

[0067] After the temporary storage container is used for a period of time, the inner wall and the bottom wall of the temporary storage container are dirty, and the temporary storage container needs to be cleaned, or when different liquids need to be input into the temporary storage container, the temporary storage container also needs to be cleaned. In order to clean the temporary storage container, optionally, the liquid mixing device can further include a second liquid input pipeline and a cleaning pipeline. The liquid output end of the second liquid input pipeline can be in communication with the liquid mixing container. The liquid inlet end of the cleaning pipeline can be in communication with the second liquid input pipeline. The liquid outlet end of the cleaning pipeline can be in communication with the temporary storage container. The cleaning pipeline can be provided with a second on-off valve AOV07. The second liquid input pipeline can be provided with a third on-off valve AOV11. The third on-off valve AOV11 can be arranged between the liquid inlet end of the cleaning pipeline and the liquid mixing container.

[0068] In the specific implementation process, when the first liquid needs to be mixed in the liquid mixing container, the first liquid in the temporary storage container enters the liquid mixing container. The third on-off valve AOV11 on the second liquid input pipeline is opened to input the second liquid into the liquid mixing container. Finally, the mixing of the first liquid and the second liquid in the liquid mixing container is realized. When the temporary storage container is cleaned, the second on-off valve AOV07 needs to be opened. The second liquid enters the temporary storage container through the cleaning pipeline to clean the temporary storage container.

[0069] The first liquid of the temporary storage container needs to enter the liquid mixing container through the first flow controller CLFC01. The second liquid needs to enter the liquid mixing container through the second flow controller CLFC02 on the second liquid input pipeline. The mixing ratio of the first liquid and the second liquid can be controlled by controlling the first flow controller CLFC01 and the second flow controller CLFC02. The first flow controller CLFC01 and the second flow controller CLFC02 can adopt a controller with ultra-small flow, good stability and high precision. Specifically, the first flow controller CLFC01 can be composed of an electric needle valve, an ultrasonic flow meter and a PI controller. The second flow controller CLFC02 can be composed of an electric needle valve, an ultrasonic flow meter and a PI controller.

[0070] The embodiments disclosed in the application set the cleaning pipeline so that the liquid outlet end of the cleaning pipeline is in communication with the temporary storage container. When the temporary storage container needs to be cleaned, the second on-off valve AOV07 is controlled to be opened to make the second liquid enter the temporary storage container to clean the inner cavity of the temporary storage container, thereby effectively solving the problem of cleaning the temporary storage container. Moreover, the cleaning pipeline is in communication with the second liquid input pipeline, so that the cleaning of the temporary storage container and the liquid entering the liquid mixing container for mixing are all from the second liquid input pipeline, thereby making the structure more reasonable.

[0071] Specifically, the first liquid is a chemical liquid, such as HF (hydrogen fluoride) and the like. The second liquid is pure water, such as DIW (deionized water) and the like.

[0072] When the first liquid in the temporary storage container is depleted and the first liquid needs to be input into the temporary storage container, the first liquid needs to be stopped from being delivered to the mixing container, which will result in a decrease in the working efficiency of the mixing. In order to improve the working efficiency of the mixing, the temporary storage container can be two, and the two temporary storage containers are connected in parallel. When the liquid level of the first liquid in one of the temporary storage containers is low, the other temporary storage container can be switched to deliver the first liquid to the mixing container in time, and the temporary storage container that is not connected to the mixing container can be replenished with the first liquid at this time, so that the problem of affecting the working efficiency of the mixing when the temporary storage container is replenished with the first liquid can be effectively avoided.

[0073] Please refer to Figure 1 Specifically, when the temporary storage container is two, the two temporary storage containers can be a first temporary storage container and a second temporary storage container. When the first temporary storage container delivers the first liquid to the mixing container, the fourth switch valve AOV01 and the sixth switch valve AOV09 for controlling the first temporary storage container are opened. The fifth switch valve AOV05 and the first switch valve AOV04 for controlling the second temporary storage container are opened to replenish the second temporary storage container with the first liquid, and the corresponding fifth switch valve AOV05 and first switch valve AOV04 are closed after the replenishment is completed. When the liquid level of the first liquid in the first temporary storage container is insufficient, the fourth switch valve AOV01 and the sixth switch valve AOV09 for controlling the first temporary storage container can be closed, and the fifth switch valve AOV05 and the first switch valve AOV04 for controlling the first temporary storage container can be opened to replenish the first temporary storage container with the first liquid. At the same time, the fourth switch valve AOV01 and the sixth switch valve AOV09 for controlling the second temporary storage container are opened to make the second temporary storage container deliver the first liquid to the mixing container in time. Through the switching of the two temporary storage containers, the problem of affecting the working efficiency of the mixing when the temporary storage container is replenished with the first liquid can be avoided.

[0074] Optionally, the temporary storage container can be provided with a liquid level sensor. When the liquid level of the first liquid in the first temporary storage container triggers the liquid level sensor, the second temporary storage container can be connected to the mixing container in time, and when the second temporary storage container triggers the liquid level sensor, the first temporary storage container can be connected to the mixing container in time, so that the switching of the first temporary storage container and the second temporary storage container is more accurate.

[0075] Specifically, the liquid level sensor can include a first liquid level switch LLS01, a second liquid level switch LLS02 and a third liquid level switch LLS03. The first liquid level switch LLS01 is arranged above the temporary storage container, the third liquid level switch LLS03 is arranged below the temporary storage container, and the second liquid level switch LLS02 is arranged between the first liquid level switch LLS01 and the third liquid level switch LLS03. The first liquid level switch LLS01 triggers a full state of the temporary storage container. When the second liquid level switch LLS02 triggers, the temporary storage container needs to be switched to communicate with the mixed liquid container in time, and the first liquid is supplemented to the temporary storage container triggering the second liquid level switch LLS02. The third liquid level switch LLS03 triggers a possible failure of the temporary storage container, such as liquid leakage and other problems, which needs to be handled in time.

[0076] As shown in Figure 2 The temporary storage container can include an upper pressing plate 210, a lower pressing plate 220 and a barrel 230. The upper pressing plate 210 and the lower pressing plate 220 are respectively connected to two openings of the barrel 230, and the upper pressing plate 210, the lower pressing plate 220 and the barrel 230 surround an inner cavity of the temporary storage container. The connection of the upper pressing plate 210, the lower pressing plate 220 and the barrel 230 can be welding through a welding portion. Since the temporary storage container is made of resin material, welding can improve the strength of the temporary storage container, and thus can avoid cracking of the temporary storage container at the connection between the upper pressing plate 210 and the barrel 230 and the connection between the lower pressing plate 220 and the barrel 230 when the actual pressure in the temporary storage container is too large, thereby improving the sealing reliability of the temporary storage container. The connection between the upper pressing plate 210 and the barrel 230 and the connection between the lower pressing plate 220 and the barrel 230 are both provided with a second sealing ring 240. The upper pressing plate 210 and the barrel 230 are sealed at the connection through the second sealing ring 240, and the lower pressing plate 220 and the barrel 230 are sealed at the connection through the second sealing ring 240, thereby further improving the sealing reliability of the temporary storage container. The upper pressing plate 210 is connected with a first liquid input pipeline, and the lower pressing plate 220 is provided with a liquid outlet portion communicating with the mixed liquid container.

[0077] The application also discloses a semiconductor cleaning equipment, and the disclosed semiconductor cleaning equipment includes the mixed liquid device disclosed in the above embodiments.

[0078] The differences between the embodiments are mainly described in the above embodiments of the application. The different optimization features between the embodiments can be combined to form a more optimal embodiment as long as they are not contradictory. Considering the brevity of the writing, the details are not repeated here.

[0079] The embodiments of the present application are described above with reference to the accompanying drawings, but the present application is not limited to the above-described specific embodiments, and the above-described specific embodiments are merely illustrative, but not restrictive, and a person of ordinary skill in the art can make many forms under the inspiration of the present application without departing from the purpose of the present application and the scope protected by the claims, and all of them belong to the protection of the present application.

Claims

1. A mixing device for a semiconductor cleaning apparatus, characterized in that, It includes a temporary storage container, a first liquid inlet pipeline, a mixing container, a pressure relief mechanism, a driving gas pipeline, and a starting pressure regulating mechanism, wherein: The liquid output end of the first liquid input pipeline is connected to the temporary storage container, the liquid outlet of the temporary storage container is connected to the mixing container, and the gas supply end of the driving gas pipeline is connected to the temporary storage container to input driving gas into the temporary storage container to drive the first liquid in the temporary storage container to the mixing container. The pressure relief mechanism is connected to the temporary storage container and communicates with the inner cavity of the temporary storage container. When the actual pressure of the gas in the temporary storage container is greater than the first preset pressure value, the pressure relief mechanism is in the gas release state. The pressure relief mechanism includes a second pressure relief pipeline and a pressure relief valve (PRV01). The first end of the second pressure relief pipeline is connected to the temporary storage container, and the second end of the second pressure relief pipeline is the second pressure relief end. The pressure relief valve (PRV01) is located in the pressure relief pipeline and is used to control the opening and closing of the pressure relief pipeline. The starting pressure regulating mechanism includes a pressure regulating pipeline and a first pressure reducing valve (PRG03). The first end of the pressure regulating pipeline is connected to the driving gas pipeline. The first pressure reducing valve (PRG03) is located in the pressure regulating pipeline. The second end of the pressure regulating pipeline is connected to the pressure regulating cavity of the pressure relief valve (PRV01) for adjusting the starting pressure of the pressure relief valve (PRV01).

2. The mixing apparatus according to claim 1, characterized in that, The pressure relief mechanism includes a first pressure relief pipeline and a first switching valve (AOV04). The first end of the first pressure relief pipeline is connected to the temporary storage container, and the second end of the first pressure relief pipeline is the first pressure relief end. The first switching valve (AOV04) is located in the first pressure relief pipeline. When the actual pressure of the gas in the temporary storage container is greater than a first preset pressure value, the first switching valve (AOV04) is in the open state.

3. The mixing apparatus according to claim 2, characterized in that, When the actual pressure is greater than the second preset pressure value, the pressure relief valve (PRV01) is in the open state, wherein the second preset pressure value is greater than the first preset pressure value.

4. The mixing apparatus according to claim 3, characterized in that, The pressure relief valve (PRV01) includes a valve body (110), a diaphragm and a valve disc (130), wherein the valve body (110) is provided with a valve cavity, the diaphragm is disposed in the valve cavity and divides the valve cavity into a first inner cavity (111) and a second inner cavity (112) that are isolated from each other. The valve body (110) has a valve body outlet, a pressure regulating medium inlet and a valve body inlet. The pressure regulating medium inlet is connected to the first inner cavity (111) and the second end of the pressure regulating pipeline, respectively, so that the pressure of the first inner cavity (111) is maintained at the second preset pressure value. The first inner cavity (111) is the pressure regulating inner cavity. The valve disc (130) is located on the valve body inlet and is connected to the diaphragm. The valve body inlet is connected to the temporary storage container. The valve body outlet is connected to the second inner cavity (112). The valve body outlet is connected to the second pressure relief end. The valve body inlet is connected to the temporary storage container. When the actual pressure is greater than the second preset pressure value, the valve disc (130) separates from the valve body inlet, and the valve body inlet communicates with the valve body outlet through the second inner cavity (112).

5. The mixing apparatus according to claim 4, characterized in that, The diaphragm includes a diaphragm body (121) and a threaded connector (122). The diaphragm body (121) is connected to the inner wall of the valve cavity. The diaphragm body (121) has a through hole. The valve disc (130) has a threaded hole. The threaded connector (122) passes through the through hole and is connected to the threaded hole. The edge of the diaphragm body (121) surrounding the through hole is sealed and clamped between the valve disc (130) and the cap of the threaded connector (122).

6. The mixing apparatus according to claim 1, characterized in that, The driving gas pipeline is equipped with a second pressure reducing valve (PRG01), which is used to adjust the maximum gas pressure in the temporary storage container.

7. The mixing apparatus according to claim 1, characterized in that, The mixing device further includes a second liquid input line and a cleaning line. The liquid output end of the second liquid input line is connected to the mixing container. The liquid inlet end of the cleaning line is connected to the second liquid input line. The liquid outlet end of the cleaning line is connected to the temporary storage container. The cleaning line is equipped with a second switching valve (AOV07). The second liquid input line is equipped with a third switching valve (AOV11). The third switching valve (AOV11) is located between the liquid inlet end of the cleaning line and the mixing container.

8. The mixing apparatus according to claim 1, characterized in that, There are two temporary storage containers, which are connected in parallel.

9. A semiconductor cleaning device, characterized in that, Includes the mixing apparatus according to any one of claims 1 to 8.

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