Sample Vacuum Transfer Device for Glow Discharge Spectrometer and Its Usage Method

Abstract

The present invention discloses a sample vacuum transfer device applicable to a glow discharge spectrometer and a method for using the same. The sample vacuum transfer device includes a sample tray, a linear pushing mechanism, and a vacuum pumping mechanism. The sample tray is connected with a rotating shaft, and at least one sample groove is arranged on the sample tray. The linear pushing mechanism includes a bellows, a push rod, a push rod sleeve, a rear connecting seat, and a front connecting seat. The vacuum pumping mechanism includes a high-vacuum gate valve and a three-way joint. The rear end of the bellows is sealed, and the bellows, the high-vacuum gate valve, and the three-way joint are sequentially connected from left to right to form an outer sleeve, and the outer sleeve is arranged outside the rotating shaft. The sample vacuum transfer device applicable to a glow discharge spectrometer and the method for using the same disclosed by the present invention can not only be directly docked with the vacuum pump for preparing samples, but also be used in a glove box, and can realize the vacuum transfer of samples for the glow discharge spectrometer.

Description

Technical Field

[0001] The present invention relates to the technical field of spectral analysis, and particularly relates to a sample vacuum transfer device applicable to a glow discharge spectrometer and a using method thereof. Background Art

[0002] A glow discharge spectrometer (English name: Glow Discharge Spectrometer, abbreviation: GDS) can analyze the chemical element content on the surface of materials. Especially in the field of metal materials, the glow discharge spectrometer is an instrument for surface analysis based on the relationship between depth and content. In the measurement of the relationship between content and depth, the analysis depth can reach several hundred micrometers, and the depth resolution can be as low as several nanometers. The glow discharge spectrometer can realize the quality monitoring of the material surface coating process and the process monitoring of various surface treatment processes. By using the depth profile analysis technology, the glow discharge spectrometer can accurately measure the coating thickness and chemical composition. The glow discharge spectrometer has wide applications in fields such as aerospace, metal industry, semiconductor materials, electroplating industry, precision machinery industry, and surface technology.

[0003] However, for some special samples, such as air-sensitive samples, they must be transferred and tested under vacuum conditions. Currently, there is a lack of a device capable of vacuum transferring the samples of the glow discharge spectrometer. Summary of the Invention

[0004] The purpose of the present invention is to provide a sample vacuum transfer device applicable to a glow discharge spectrometer and a using method thereof, so as to solve the problem that the samples of the glow discharge spectrometer cannot be vacuum transferred currently.

[0005] The present invention provides a sample vacuum transfer device applicable to a glow discharge spectrometer, including: a sample tray, at least one sample slot is arranged on the sample tray, and the sample tray is connected with a rotating shaft; a linear pushing mechanism, including a bellows, a push rod, a push rod sleeve, a rear connecting seat, and a front connecting seat, the push rod is arranged in the push rod sleeve and exposes the front end, the rear end of the bellows is fixedly connected with the push rod sleeve through the rear connecting seat, and the front end of the bellows is fixedly connected with the front end of the push rod through the front connecting seat; a vacuum pumping mechanism, including a high-vacuum gate valve and a three-way joint, the rear end of the bellows is sealed, and the bellows, the high-vacuum gate valve, and the three-way joint are connected in sequence from left to right to form an outer sleeve of the vacuum pumping mechanism, and the outer sleeve is arranged outside the rotating shaft;

[0006] Wherein, each sample slot is used for setting a sample, the outer port of the three-way joint is used for docking the test port of the glow discharge spectrometer, and the middle port of the three-way joint is docked with the interface of a vacuum pump, so as to realize vacuum pumping of the outer sleeve and measuring the vacuum degree;

[0007] When pushing or pulling the push rod, the push rod extends forward or retracts backward within the push rod sleeve respectively. The front connecting seat drives the front end of the bellows to elongate forward or shorten backward, and the three-way joint moves correspondingly with the bellows to respectively hide and expose the sample tray.

[0008] Preferably, it further includes a sample rack, which includes a cooling water inlet pipe, a cooling water return pipe, a flange plate and a fixing block. The flange plate and the fixing block are connected by the cooling water inlet pipe and the cooling water return pipe to form the sample rack; a plurality of sample slots are provided on the outer side surface of the sample tray, and the sample tray is arranged on the outer side surface of the fixing block.

[0009] Preferably, the rear end of the bellows is sealed through the flange plate.

[0010] Preferably, sample slots are respectively arranged in the upper, lower, left and right areas of the outer side surface of the sample tray, with a total of four sample slots, and each sample slot is used to place a sample.

[0011] Preferably, it further includes a rotating mechanism, which includes a rotating head and a rotating shaft. The output shaft of the rotating head is connected to the power input end of the rotating shaft. The rotating shaft passes through the middle of the flange plate until the power output end of the rotating shaft penetrates into the sample tray. The cooling water inlet pipe and the cooling water return pipe are respectively attached to both sides of the rotating shaft and the output shaft of the rotating head.

[0012] Preferably, the vacuum pumping mechanism further includes a flange pipe. The left port of the valve plate of the high-vacuum gate valve is butt-jointed with the front end of the bellows through the flange pipe; the three ports of the three-way joint are respectively provided with flanges, and the inner port of the three-way joint is connected to the right port of the valve plate of the high-vacuum gate valve through a flange; the bellows, the flange pipe, the high-vacuum gate valve and the three-way joint are connected in sequence from left to right to form the outer sleeve pipe, and the outer sleeve pipe is arranged outside the rotating shaft and the output shaft of the rotating head.

[0013] Preferably, the linear pushing mechanism further includes a guide rod. The two ends of the guide rod are respectively penetrated through the rear connecting seat and the front connecting seat and are parallel to the push rod, so that the front connecting seat can move linearly back and forth along the guide rod.

[0014] The present invention also discloses a usage method of a sample vacuum transfer device applicable to a glow discharge spectrometer. By using the above-mentioned sample vacuum transfer device applicable to a glow discharge spectrometer, it includes the following steps:

[0015] Open the high-vacuum gate valve, pull the push rod backward. The push rod retracts backward within the push rod sleeve. The front connecting seat drives the front end of the bellows to shorten backward. The three-way joint moves backward along with the bellows, and the sample tray extends out from within the three-way joint and appears;

[0016] Install samples on the sample grooves of the sample tray respectively, and then set the sample tray with samples on the fixing block of the sample rack;

[0017] Push the push rod forward. The push rod extends forward within the push rod sleeve. The front connecting seat drives the front end of the bellows to extend forward. The three-way joint moves forward along with the bellows until the sample tray completely retracts into the three-way joint, and then close the high-vacuum gate valve;

[0018] Connect the outer port of the three-way joint to the test port of the glow discharge spectrometer, connect the middle port of the three-way joint to the interface of the vacuum pump, and turn on the vacuum pump to pump vacuum;

[0019] Open the high-vacuum gate valve, pull the push rod backward. The push rod retracts backward within the push rod sleeve. The front connecting seat drives the front end of the bellows to shorten backward. The three-way joint moves backward along with the bellows, and the sample tray extends out from within the three-way joint and appears, then connect the sample tray to the test port of the glow discharge spectrometer;

[0020] Connect the cooling water inlet pipe and the cooling water return pipe to the cooling water respectively, and start the cooling water circulation;

[0021] Turn on the glow discharge spectrometer and start testing one of the samples on the sample tray;

[0022] Drive the rotating shaft to rotate through the rotating head, and then rotate the sample tray to align the next sample of the sample tray with the measurement port of the spectrometer to complete the test of the second sample; sequentially complete the test of the third sample until all samples are tested;

[0023] After the glow discharge spectrometer completes the test of all samples, push the push rod forward. The push rod extends forward within the push rod sleeve. The front connecting seat drives the front end of the bellows to extend forward. The three-way joint moves forward along with the bellows until the sample tray completely retracts into the three-way joint, then close the high-vacuum gate valve, turn off the vacuum pump, and turn off the cooling water circulation;

[0024] Open the high-vacuum gate valve, pull the push rod backward. The push rod retracts backward within the push rod sleeve. The front connecting seat drives the front end of the bellows to shorten backward. The three-way joint moves backward along with the bellows, and the sample tray extends out from within the three-way joint and appears, then remove the sample tray;

[0025] Push the push rod forward. The push rod extends forward within the push rod sleeve. The front connecting seat drives the front end of the bellows to extend forward. The three-way joint moves forward along with the bellows until the sample tray is completely retracted into the three-way joint, making the sample tray lower than the high-vacuum gate valve, and then close the high-vacuum gate valve.

[0026] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0027] The present invention discloses a sample vacuum transfer device applicable to a glow discharge spectrometer and its usage method. Among them, the linear pushing mechanism can push the push rod to extend forward or retract backward within the push rod sleeve respectively, hiding and showing the sample tray respectively. Multiple sample slots are arranged on the sample tray, and each sample slot fixes a sample. The sample tray is connected with a rotating shaft, and multiple samples can be transferred at one time, improving the test efficiency of the samples; the middle port of the three-way joint is docked with the interface of the vacuum pump, and the outer port of the three-way joint is docked with the test port of the glow discharge spectrometer, and vacuum pumping can be realized through the vacuum pumping mechanism. The present invention discloses a sample vacuum transfer device applicable to a glow discharge spectrometer and its usage method, which can not only be directly docked with the vacuum pump for preparing samples, but also be used in a glove box, and can realize the vacuum transfer of samples for the glow discharge spectrometer. Description of the Drawings

[0028] Figure 1 It is a schematic structural diagram of the sample vacuum transfer device applicable to the glow discharge spectrometer provided in Embodiment 1 of the present invention;

[0029] Figure 2 It is a top view of the sample vacuum transfer device applicable to the glow discharge spectrometer provided in Embodiment 1 of the present invention;

[0030] Figure 3 It is Figure 2 a cross-sectional view taken along line A-A in

[0031] Figure 4 It is a schematic structural diagram of the sample rack provided in Embodiment 1 of the present invention;

[0032] Figure 5 It is a side view of the sample tray provided in Embodiment 1 of the present invention;

[0033] Figure 6 It is a schematic structural diagram of the sample provided in Embodiment 1 of the present invention;

[0034] Figure 7 It is a three-dimensional view of the linear pushing mechanism provided in Embodiment 1 of the present invention;

[0035] Figure 8 It is a schematic structural diagram of the high-vacuum gate valve provided in Embodiment 1 of the present invention.

[0036] Description of the reference numerals in the drawings: 1 - sample rack, 10 - sample tray, 100 - sample slot, 11 - cooling water inlet pipe, 12 - cooling water return pipe, 13 - flange, 14 - fixing block; 2 - rotating mechanism, 21 - rotating head, 22 - rotating shaft; 3 - linear pushing mechanism, 31 - bellows, 32 - push rod, 320 - handle, 33 - push rod sleeve, 34 - rear connecting seat, 35 - front connecting seat, 36 - guide rod; 4 - vacuum pumping mechanism, 41 - high vacuum gate valve, 42 - three-way joint, 43 - flange pipe. Specific embodiments

[0037] The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0038] It should be noted that the judgment of "front" and "rear" in this embodiment: the direction close to the test port of the glow discharge spectrometer is "front", and the direction away from the test port of the glow discharge spectrometer is "rear".

[0039] The present invention discloses a sample vacuum transfer device suitable for a glow discharge spectrometer. In order to solve the problem that the sample of the glow discharge spectrometer cannot be vacuum transferred at present, first, a sample rack, a vacuum pumping mechanism and a linear pushing mechanism are respectively provided. Among them, a sample tray is arranged on the sample rack, and there are a plurality of sample slots on the sample tray, and each sample slot fixes a sample; the bellows, the flange pipe, the high vacuum gate valve and the three-way joint are sequentially connected from left to right to form the outer sleeve of the linear pushing mechanism, which is sleeved outside the sample rack. The middle port and the outer port of the three-way joint are respectively docked with the interface of the vacuum pump and the test port of the glow discharge spectrometer, and can realize the vacuum pumping of the outer sleeve; the linear pushing mechanism can respectively hide and expose the sample tray, and finally completes the vacuum transfer of the sample of the glow discharge spectrometer.

[0040] Embodiment 1

[0041] Embodiment 1 provides a sample vacuum transfer device suitable for a glow discharge spectrometer, and its structure will be described in detail below with reference to the drawings.

[0042] Reference Figures 1 to 3 , the multi-sample vacuum transfer device of the glow discharge spectrometer includes a sample tray 10, a sample rack 1, a rotating mechanism 2, a linear pushing mechanism 3 and a vacuum pumping mechanism 4,

[0043] Reference Figure 4 , the sample rack 1 includes a cooling water inlet pipe 11, a cooling water return pipe 12, a flange 13 and a fixing block 14. The flange 13 and the fixing block 14 are connected by the cooling water inlet pipe 11 and the cooling water return pipe 12 to form the sample rack 1.

[0044] In order to transfer multiple samples at one time, the outer side of the sample tray 10 is provided with multiple sample slots 100 for fixing multiple samples. The sample tray 10 is arranged on the outer side of the fixing block 14 , and the fixing block 14 is connected to the rotating shaft 22 .

[0045] Specifically, refer to Figure 5 The upper, lower, left and right regions of the outer side of the sample tray 10 are respectively provided with a sample slot 100, a total of four sample slots 100, each sample slot 100 is used to set a sample, wherein the sample is as follows Figure 6 As shown, the inner side surface of the sample tray 10 is respectively connected to the water outlet end of the cooling water inlet pipe 11 and the water inlet end of the cooling water return pipe 12, and the water inlet end of the cooling water inlet pipe 11 and the water outlet end of the cooling water return pipe 12 pass through the flange 13 and expose the water inlet end of the cooling water inlet pipe 11 and the water outlet end of the cooling water return pipe 12.

[0046] In order to conveniently observe the sample on the sample slot 100 , the sample tray 10 needs to be able to rotate. Therefore, the sample vacuum transfer device suitable for the glow discharge spectrometer includes a rotating mechanism 2 so that the sample tray 10 can rotate along with the rotating shaft 22 .

[0047] Specifically, the rotating mechanism 2 includes a rotating head 21 and a rotating shaft 22. The output shaft of the rotating head 21 is connected to the power input end of the rotating shaft 22. The rotating shaft 22 passes through the middle of the flange 13 until the power output end of the rotating shaft 22 passes into the sample tray 10. The cooling water inlet pipe 11 and the cooling water return pipe 12 are respectively attached to both sides of the rotating shaft 22 and the output shaft of the rotating head 21.

[0048] Preferably, the output shaft of the rotary head 21 and one end of the rotary shaft 22 used for connecting with the output shaft of the rotary head 21 are both provided with magnetic materials, and the two are connected together by attracting each other through magnetic force.

[0049] The rotating head 21 drives the rotating shaft 22 to rotate, thereby achieving the purpose of rotating the sample plate 10. In order to facilitate observation of the rotation angle, the rotating head 21 corresponding to the position of the sample slot 100 is marked.

[0050] refer to Figure 7 The linear push mechanism 3 includes a bellows 31, a push rod 32, a push rod sleeve 33, a rear connecting seat 34, a front connecting seat 35 and a guide rod 36.

[0051] The bellows 31 is sleeved on the outer side of the rear end of the rotating shaft 22;

[0052] The push rod 32 is inserted into the push rod sleeve 33 and the front end is exposed. The rear end of the bellows 31 is fixedly connected to the push rod sleeve 33 via a rear connecting seat 34, and the front end of the bellows 31 is fixedly connected to the front end of the push rod 32 via a front connecting seat 35.

[0053] Both ends of the guide rod 36 are respectively inserted through the rear connecting seat 34 and the front connecting seat 35, and are parallel to the push rod 32, so that the front connecting seat 35 can move linearly back and forth along the guide rod 36.

[0054] When pushing or pulling the push rod 32, the push rod 32 respectively extends forward or retracts backward within the push rod sleeve 33. Further, the front connecting seat 35 drives the front end of the corrugated pipe 31 to elongate forward or shorten backward, and the three-way joint 42 moves accordingly with the corrugated pipe 31, respectively hiding and revealing the sample tray 10.

[0055] For the convenience of pushing and pulling, a handle 320 is provided at the outer end of the push rod 32.

[0056] Reference Figures 1 to 3 , the vacuum pumping mechanism 4 includes a high-vacuum gate valve 41, a three-way joint 42 and / or a flange pipe 43, and the flange 13 is hermetically arranged at the rear end of the corrugated pipe 31;

[0057] The left port of the valve plate 410 of the high-vacuum gate valve 41 is directly or indirectly docked with the front end of the corrugated pipe 31 through the flange pipe 43;

[0058] The three ports of the three-way joint 42 are respectively provided with flanges, and the inner port of the three-way joint 42 is connected to the right port of the valve plate 410 of the high-vacuum gate valve 41 through a flange;

[0059] The corrugated pipe 31, the flange pipe 43, the high-vacuum gate valve 41 and the three-way joint 42 are sequentially connected from left to right to form the outer sleeve of the vacuum pumping mechanism 4, and the outer sleeve is arranged outside the rotating shaft 22 and the output shaft of the rotating head 21.

[0060] The outer port of the three-way joint 42 is configured with a sealing ring for docking with the test port of the glow discharge spectrometer. On the other hand, when the sample tray 10 retracts into the three-way joint 42, the outer port of the three-way joint 42 can be closed by a flange end cover.

[0061] The middle port of the three-way joint 42 is used to dock with the interface of the vacuum pump, and can realize vacuum pumping and vacuum degree measurement of the outer sleeve. By pumping vacuum with a vacuum pump, the vacuum degree of the multi-sample vacuum transfer device can reach 10 -3 Pa, and the leak rate is less than 10 - 10 mbar L / s, which can almost meet the needs of all samples.

[0062] Specifically, the high-vacuum gate valve 41 is a prior art, which is divided into two types: manual and non-manual, and is suitable for connecting or cutting off the air flow in an ultra-high vacuum system. The high-vacuum gate valve 41 is internally provided with a valve plate 410, and there are left ports and right ports for two external connections at the left and right ends of the valve plate 410 respectively, such as Figure 8As shown in the figure, its working principle is as follows: The handle drives the steel ball holder to move through screw transmission, expands the valve plate 410 to close it, and then relies on the spring force to retract the valve plate 410, and exits after opening.

[0063] Specifically, the three-way joint 42 is used at the branch pipe of the main pipeline. It is a chemical pipe fitting with three openings, that is, one inlet and two outlets or two inlets and one outlet. It has a T-shaped and a Y-shaped, with equal-diameter pipe ports and also with different-diameter pipe ports. It is used at the junction of three identical or different pipelines, and its main function is to change the fluid direction.

[0064] Embodiment 2

[0065] Embodiment 2 provides a method for using a sample vacuum transfer device applicable to a glow discharge spectrometer. The sample vacuum transfer device applicable to a glow discharge spectrometer in Embodiment 1 is provided. The method includes the following steps:

[0066] Step S1: Open the high-vacuum gate valve 41, pull the push rod 32 backward. The push rod 32 contracts backward in the push rod sleeve 33. The front connecting seat 35 drives the front end of the bellows 31 to shorten backward. The three-way joint 42 moves backward with the bellows 31, and the sample tray 10 extends out of the three-way joint 42 and appears.

[0067] Step S2: Samples are respectively installed in the sample slots 100 of the sample tray 10, and then the sample tray 10 with the samples is set on the fixing block 14 of the sample rack 1.

[0068] Step S3: Push the push rod 32 forward. The push rod 32 extends forward in the push rod sleeve 33. The front connecting seat 35 drives the front end of the bellows 31 to extend forward. The three-way joint 42 moves forward with the bellows 31 until the sample tray 10 is completely retracted into the three-way joint 42, and then close the high-vacuum gate valve 41.

[0069] Step S4: Connect the outer port of the three-way joint 42 to the test port of the glow discharge spectrometer, connect the middle port of the three-way joint 42 to the interface of the vacuum pump, and turn on the vacuum pump to pump vacuum.

[0070] Step S5: Open the high-vacuum gate valve 41, pull the push rod 32 backward. The push rod 32 contracts backward in the push rod sleeve 33. The front connecting seat 35 drives the front end of the bellows 31 to shorten backward. The three-way joint 42 moves backward with the bellows 31, and the sample tray 10 extends out of the three-way joint 42 and appears, so that the sample tray 10 is connected to the test port of the glow discharge spectrometer.

[0071] Step S6: Connect the cooling water inlet pipe 11 and the cooling water return pipe 12 to the cooling water respectively, and start the cooling water circulation.

[0072] Step S7: Turn on the glow discharge spectrometer and start testing one of the samples on the sample disk 10;

[0073] Step S8: Drive the rotation shaft 22 to rotate through the rotating head 21, and then rotate the sample disk 10 to align the next sample on the sample disk 10 with the measurement port of the spectrometer to complete the test of the second sample; sequentially complete the test of the third sample until all samples are tested;

[0074] Step S9: After the glow discharge spectrometer finishes testing all samples, push the push rod 32 forward. The push rod 32 extends forward in the push rod sleeve 33, and the front connecting seat 35 drives the front end of the bellows 31 to extend forward. The three-way joint 42 moves forward with the bellows 31 until the sample disk 10 is completely retracted into the three-way joint 42. Then close the high-vacuum gate valve 41, turn off the vacuum pump, and turn off the cooling water circulation;

[0075] Step S10: Open the high-vacuum gate valve 41 and pull the push rod 32 backward. The push rod 32 contracts backward in the push rod sleeve 33, and the front connecting seat 35 drives the front end of the bellows 31 to shorten backward. The three-way joint 42 moves backward with the bellows 31, and the sample disk 10 extends out of the three-way joint 42 and appears. Then remove the sample disk 10;

[0076] Step S11: Push the push rod 32 forward. The push rod 32 extends forward in the push rod sleeve 33, and the front connecting seat 35 drives the front end of the bellows 31 to extend forward. The three-way joint 42 moves forward with the bellows 31 until the sample disk 10 is completely retracted into the three-way joint 42 to make the sample disk 10 lower than the high-vacuum gate valve 41, and then close the high-vacuum gate valve 41.

[0077] Among them, air-sensitive samples need to be manipulated and stored in a glove box. Multiple samples need to be installed in the vacuum transfer device at the same time, and the glow discharge spectrometer tests on multiple samples are carried out at one time.

[0078] Although the present invention has been described in detail above with general descriptions and specific embodiments, based on the present invention, some modifications or improvements can be made, which are obvious to those skilled in the art. Therefore, these modifications or improvements made without departing from the spirit of the present invention all fall within the scope of protection required by the present invention.

Claims

1. A sample vacuum transfer device applicable to a glow discharge spectrometer, characterized in that, Comprising: A sample tray (10) having at least one sample cell (100) provided thereon, and the sample tray (10) is connected to a rotating shaft (22); A linear pushing mechanism (3), including a bellows (31), a push rod (32), a push rod sleeve (33), a rear connecting seat (34), a front connecting seat (35) and a guide rod (36). The push rod (32) is disposed within the push rod sleeve (33) and exposes its front end. The rear end of the bellows (31) is fixedly connected to the push rod sleeve (33) through the rear connecting seat (34), and the front end of the bellows (31) is fixedly connected to the front end of the push rod (32) through the front connecting seat (35). Both ends of the guide rod (36) are respectively disposed through the rear connecting seat (34) and the front connecting seat (35), and are parallel to the push rod (32), so that the front connecting seat (35) can move linearly back and forth along the guide rod (36); A vacuum pumping mechanism (4), including a high-vacuum gate valve (41) and a three-way joint (42). The rear end of the bellows (31) is sealed. The bellows (31), the high-vacuum gate valve (41) and the three-way joint (42) are connected in sequence from left to right to form an outer sleeve of the vacuum pumping mechanism (4), and the outer sleeve is disposed outside the rotating shaft (22); A sample holder (1), the sample holder (1) includes a cooling water inlet pipe (11), a cooling water return pipe (12), a flange (13) and a fixing block (14). The flange (13) and the fixing block (14) are connected through the cooling water inlet pipe (11) and the cooling water return pipe (12) to form the sample holder (1). The outer side surface of the sample tray (10) is provided with a plurality of sample cells (100), and the sample tray (10) is disposed on the outer side surface of the fixing block (14); Wherein, each sample cell (100) is used for setting a sample, and the outer port of the three-way joint (42) is used for docking the test port of a glow discharge spectrometer, and the middle port of the three-way joint (42) is docked with the interface of a vacuum pump, capable of achieving vacuum pumping and vacuum degree measurement for the outer sleeve; When pushing or pulling the push rod (32), the push rod (32) respectively extends forward or retracts backward within the push rod sleeve (33), the front end of the bellows (31) is driven by the front connecting seat (35) to elongate forward or shorten backward, and the three-way joint (42) moves correspondingly with the bellows (31), respectively hiding and exposing the sample tray (10).

2. The sample vacuum transfer device according to claim 1, wherein The rear end of the bellows (31) is sealed through the flange (13).

3. The sample vacuum transfer device according to claim 1, wherein One sample cell (100) is respectively provided in the upper, lower, left and right regions of the outer side surface of the sample tray (10), a total of four sample cells (100), and each sample cell (100) is used for setting one sample.

4. The sample vacuum transfer device according to claim 3, wherein, It further includes a rotating mechanism (2), The rotating mechanism (2) includes a rotating head (21) and a rotating shaft (22). The output shaft of the rotating head (21) is connected to the power input end of the rotating shaft (22). The rotating shaft (22) passes through the middle of the flange plate (13) until the power output end of the rotating shaft (22) penetrates into the sample tray (10). The cooling water inlet pipe (11) and the cooling water return pipe (12) are respectively attached to both sides of the rotating shaft (22) and the output shaft of the rotating head (21).

5. The sample vacuum transfer device according to claim 4, characterized in that, The vacuum pumping mechanism (4) further includes a flange pipe (43). The left port of the valve plate (410) of the high-vacuum gate valve (41) is butt-connected to the front end of the bellows (31) through the flange pipe (43). The three ports of the three-way joint (42) are each provided with a flange. The inner port of the three-way joint (42) is flange-connected to the right port of the valve plate (410) of the high-vacuum gate valve (41). The bellows (31), the flange pipe (43), the high-vacuum gate valve (41), and the three-way joint (42) are connected in sequence from left to right to form the outer sleeve pipe, and the outer sleeve pipe is arranged outside the rotating shaft (22) and the output shaft of the rotating head (21).

6. A method for using a sample vacuum transfer device applicable to a glow discharge spectrometer as described in any one of claims 1 to 5, characterized in that, Including: Open the high-vacuum gate valve (41), pull the push rod (32) backward. The push rod (32) contracts backward in the push rod sleeve (33). The front connecting seat (35) drives the front end of the bellows (31) to shorten backward. The three-way joint (42) moves backward with the bellows (31), and the sample tray (10) extends out from the three-way joint (42) and appears. Samples are respectively installed in the sample grooves (100) of the sample tray (10), and then the sample tray (10) with the samples is set on the fixing block (14) of the sample rack (1). Push the push rod (32) forward. The push rod (32) extends forward in the push rod sleeve (33). The front connecting seat (35) drives the front end of the bellows (31) to extend forward. The three-way joint (42) moves forward with the bellows (31) until the sample tray (10) completely retracts into the three-way joint (42), and then close the high-vacuum gate valve (41). Connect the outer port of the three-way joint (42) to the test port of the glow discharge spectrometer, connect the middle port of the three-way joint (42) to the interface of the vacuum pump, and turn on the vacuum pump to pump vacuum. Open the high-vacuum gate valve (41), pull the push rod (32) backward. The push rod (32) contracts backward in the push rod sleeve (33). The front connecting seat (35) drives the front end of the bellows (31) to shorten backward. The three-way joint (42) moves backward with the bellows (31), and the sample tray (10) extends out from the three-way joint (42) and appears, so that the sample tray (10) is connected to the test port of the glow discharge spectrometer. Connect the cooling water inlet pipe (11) and the cooling water return pipe (12) to the cooling water respectively, and start the cooling water circulation. Turn on the glow discharge spectrometer and start testing one of the samples on the sample tray (10). Drive the rotation shaft (22) to rotate through the rotating head (21), and then rotate the sample tray (10) to align the next sample on the sample tray (10) with the measurement port of the spectrometer, completing the test of the second sample; sequentially complete the test of the third sample until all samples are tested. After the glow discharge spectrometer finishes testing all samples, push the push rod (32) forward. The push rod (32) extends forward within the push rod sleeve (33), and the front connecting seat (35) drives the front end of the bellows (31) to extend forward. The three-way joint (42) moves forward with the bellows (31) until the sample tray (10) is completely retracted into the three-way joint (42). Then close the high-vacuum gate valve (41), turn off the vacuum pump, and turn off the cooling water circulation. Open the high-vacuum gate valve (41), pull the push rod (32) backward. The push rod (32) contracts backward within the push rod sleeve (33), and the front connecting seat (35) drives the front end of the bellows (31) to shorten backward. The three-way joint (42) moves backward with the bellows (31), and the sample tray (10) extends out of the three-way joint (42) and appears. Then remove the sample tray (10). Push the push rod (32) forward. The push rod (32) extends forward within the push rod sleeve (33), and the front connecting seat (35) drives the front end of the bellows (31) to extend forward. The three-way joint (42) moves forward with the bellows (31) until the sample tray (10) is completely retracted into the three-way joint (42), making the sample tray (10) lower than the high-vacuum gate valve (41), and then close the high-vacuum gate valve (41).

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