Substrate transfer method and substrate transfer apparatus
By sensing and automatically correcting the reference value of the substrate transfer robot through the substrate position sensing unit, the problem of accurate substrate positioning in a vacuum environment is solved, and the precise positioning of the substrate in the center of the chamber base is achieved, thus improving the stability and accuracy of substrate transfer.
CN114930515BActive Publication Date: 2026-06-23JUSUNG ENG
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JUSUNG ENG
- Filing Date
- 2021-01-18
- Publication Date
- 2026-06-23
Smart Images
Figure CN114930515B_ABST
Abstract
The present invention relates to a substrate transfer method for controlling a substrate transfer robot by using information on a position of a substrate when loading or unloading the substrate in a substrate transfer apparatus including the substrate transfer robot, and a substrate transfer apparatus. According to the present invention, when an operation of setting a new reference value is required due to a process variation or a hardware variation after an initial reference value for loading or unloading a substrate is set, the reference value is automatically set, so that the substrate is allowed to be transferred to be positioned at the center of a susceptor without manually changing the reference value of the substrate transfer robot.
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