A cyclone device and a temperature control device

Abstract

The application provides a cyclone device and a temperature control device. The cyclone device comprises a primary cyclone air outlet assembly and a mixing plate. The mixing plate is arranged on the air outlet side of the primary cyclone air outlet assembly. The mixing plate comprises a first area and a second area. The first area is arranged close to the middle part of the primary cyclone air outlet assembly. The flow area of the first area is smaller than that of the second area. In the cyclone device and the temperature control device, the flow resistance of the middle part of the mixing plate downstream of the primary cyclone air outlet assembly is increased by reducing the flow area of the middle part of the mixing plate. The air flow passing through the primary cyclone air outlet assembly is uniformly distributed. The mixing effect of the primary cyclone air outlet assembly is fully utilized. The flow field distribution of the air flow is uniform. The target air outlet temperature precision and uniformity requirements are achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of temperature control, in particular to a cyclone device and a temperature control device. BACKGROUND

[0002] For the environment control of super-precision machining equipment represented by a photoetching machine, the equipment is placed outside a high-level clean room, and a separate temperature control device is needed for the micro-environment inside the equipment, such as immersion cooling and air cooling. Air cooling is widely used due to its simple layout and the convenience of using clean room chilled water heat exchange. However, due to the small specific heat capacity of air, it is easy to fluctuate and produce local non-uniformity in environmental micro-adjustment, so for super-precision temperature control equipment, each link inside needs to be well designed for stable control and uniform temperature flow field distribution.

[0003] For super-precision temperature control equipment, the incoming air is usually processed, cooled to below the target temperature by a cooling unit, and then adjusted by a heater to reach the target temperature. Since the incoming air is cooled and heated, this heat exchange link is easy to cause temperature non-uniformity of the flow field, so some mixing structures need to be designed to quickly disperse, stir and mix the air after cooling and heating, so that the temperature distribution of the whole plane is uniform.

[0004] The existing super-precision temperature control equipment adopts a cyclone air port at the rear end of the heater for mixing and stirring, but in actual application, the cyclone uniformity of the air passing through the cyclone air port is not high, and the air volume decreases after passing through the cyclone air port. SUMMARY

[0005] Therefore, the present application provides a cyclone device and a temperature control device that improve cyclone uniformity and reduce air volume loss.

[0006] In one aspect, the present application provides a cyclone device, comprising a primary cyclone air port assembly and a mixing plate, the mixing plate being arranged on the air outlet side of the primary cyclone air port assembly, comprising a first region and a second region, wherein the first region is arranged close to the middle part of the primary cyclone air port assembly, and the flow area of the first region is smaller than that of the second region.

[0007] In one embodiment, a plurality of openings are formed in the first region and the second region, the second region is located on at least one side of the first region and relatively far away from the middle part of the primary cyclone air port assembly, and the distribution density of the openings in the first region is smaller than that of the openings in the second region.

[0008] In one embodiment, the primary cyclone nozzle assembly comprises a cyclone nozzle base plate and a plurality of cyclone components arranged on the cyclone nozzle base plate; the plurality of cyclone components are evenly distributed on the cyclone nozzle base plate, or arranged on both sides of the cyclone nozzle base plate, or the cyclone components arranged at the middle part of the cyclone nozzle base plate have a smaller diameter than the cyclone components arranged at the opposite sides.

[0009] In one embodiment, two or more of the cyclone components are arranged in parallel or staggered on the cyclone nozzle base plate.

[0010] In one embodiment, the secondary cyclone nozzle assembly is arranged on the side of the mixing plate away from the primary cyclone nozzle assembly.

[0011] In one embodiment, the secondary cyclone nozzle assembly comprises a mounting plate and a cyclone fan arranged on the mounting plate, and the cyclone fan is arranged close to the geometric center of the mounting plate.

[0012] In another aspect, the application provides a temperature control device, comprising:

[0013] a box body provided with an air inlet and an air outlet, and a gas flow passage communicating the air inlet and the air outlet arranged in the box body; and

[0014] a cyclone device as described above arranged in the gas flow passage.

[0015] In one embodiment, the temperature control device further comprises:

[0016] a circulating power fan for driving gas to flow from the air inlet into the gas flow passage;

[0017] a fan air outlet uniform flow plate for providing flow resistance to the gas flowing therethrough to homogenize the gas flow rate;

[0018] a cooling coil for cooling the gas flowing therethrough; and

[0019] a heater for heating the gas flowing therethrough.

[0020] In one embodiment, the box body is provided with a partition plate to divide the space in the box body into a U-shaped gas flow passage; and the precision regulating heater is arranged in the gap on the partition plate.

[0021] In one embodiment, a flow stabilizing and uniformizing plate is further included, which is arranged in the gas flow passage and between the cyclone device and the air outlet, to reduce the speed fluctuation of the gas flowing therethrough; the flow stabilizing and uniformizing plate comprises one or more levels of screens, or the flow stabilizing and uniformizing plate comprises one or more levels of orifice plates.

[0022] The cyclone device and the temperature control device provided by the application have at least the following beneficial effects: in the cyclone device, the mixing flow plate is arranged at the air outlet side of the primary cyclone air outlet assembly, the flow area of the middle part of the mixing flow plate is smaller than the flow area of the two sides, the flow resistance of the middle part of the mixing flow plate downstream of the primary cyclone air outlet assembly is increased by reducing the flow area of the middle part of the mixing flow plate, so that the airflow passing through can be uniformly distributed to the primary cyclone air outlet assembly, the mixing effect of the primary cyclone air outlet assembly is fully utilized, the flow field distribution of the airflow is uniform, the target air outlet temperature precision and uniformity requirement is met, and at the same time, the flow area of the primary cyclone air outlet assembly is ensured and the resistance loss is reduced, which is beneficial to the guarantee of the air volume. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 is a structural schematic diagram of a temperature control device according to an embodiment of the application;

[0024] Figure 2 FIG. 2 is a structural schematic diagram of a primary cyclone air outlet assembly according to an embodiment of the application;

[0025] Figure 3 FIG. 3 is a structural schematic diagram of a primary cyclone air outlet assembly according to another embodiment of the application;

[0026] Figure 4 FIG. 4 is a structural schematic diagram of a primary cyclone air outlet assembly according to still another embodiment of the application;

[0027] Figure 5 FIG. 5 is a structural schematic diagram of a secondary cyclone air outlet assembly according to an embodiment of the application;

[0028] Figure 6 FIG. 6 is a structural schematic diagram of a mixing flow plate according to an embodiment of the application;

[0029] Figure 7 FIG. 7 is a structural schematic diagram of a mixing flow plate according to another embodiment of the application;

[0030] Figure 8 FIG. 8 is a structural schematic diagram of a mixing flow plate according to still another embodiment of the application;

[0031] Figure 9 FIG. 9 is a structural schematic diagram of a mixing flow plate according to yet another embodiment of the application.

[0032] The reference signs of the elements in the drawings are as follows:

[0033] The box 10 (wherein, the air inlet 11, the air outlet 12, the side plate 13, the partition plate 14); the circulating power fan 20; the fan air outlet flow uniform plate 30; the cooling coil 40; the primary heater 50; the precision regulating heater 60; the cyclone device 70 (wherein, the primary cyclone air outlet assembly 71, the secondary cyclone air outlet assembly 72, the mixed flow plate 73; the cyclone component 711, the cyclone air outlet bottom plate 712; the selected flow fan 721, the mounting plate 722; the first area 731, the second area 732, the opening 733); the stable flow uniform plate 80; the temperature control device 100. DETAILED DESCRIPTION

[0034] Before the detailed description of embodiments, it should be understood that the application is not limited to the detailed description or the arrangements of elements described hereinafter or in the drawings. The application can be implemented in other ways. Moreover, it should be understood that the words and phrases used herein are used only for descriptive purposes and should not be construed as limiting. The words and phrases used herein are intended to include the items listed thereafter, their equivalents, and other additional items. In particular, when describing "one certain element", the application does not limit the number of the element to one, but can include multiple elements.

[0035] At present, the node size of mainstream photolithography machines has reached below 20 nm, the overlay accuracy has reached 3 nm or even lower, and 12 nm chips have been successfully used in commercial production. When the photolithography machine is working, the non-uniformity or fluctuation and drift of the local environment in space will affect the final photolithography positioning accuracy, overlay accuracy, etc. Specifically, the deformation of key parts of the workpiece table due to the non-uniformity and fluctuation and drift of the temperature in space will cause movement errors; the measurement errors of the ultra-precision sensing and measuring device represented by the laser interferometer due to the non-uniformity and fluctuation and drift of the temperature, humidity, and pressure in space. As can be seen, the ultra-precision machining equipment represented by the photolithography machine not only has requirements for the external environment, but also has very strict requirements for the micro-environment inside itself to ensure the machining accuracy.

[0036] Through the research on the existing ultra-high precision temperature control equipment heater, the back-end cyclone air outlet adopts a multi-stage layout, and the last stage is usually a large-diameter cyclone air outlet arranged in the middle. This will cause the airflow to pass through the cyclone air outlet assembly of the upper stage directly from the middle cyclone air outlet to the next stage, so that the airflow of the cyclone air outlets on both sides will be reduced or even no airflow will flow through, weakening the uniformity of the cyclone air outlet. Moreover, since most of the air flows through the middle, the flow area is reduced, increasing the resistance loss of the cyclone layer, and reducing the air volume of the entire system.

[0037] In view of the problem that the existing structure of the cyclone tuyere weakens the uniform effect of the cyclone tuyere and increases the resistance loss, the application provides a cyclone device and a temperature control device, which are arranged beside an environment where a device to be temperature-controlled is located, and perform temperature regulation on the environment where the device to be temperature-controlled is located, so as to meet the temperature control requirement of the device to be temperature-controlled on the environment.

[0038] The temperature control device 100 provided by the application comprises a box body 10 and a cyclone device 70. The box body 10 is provided with an air inlet 11 and an air outlet 12, and a gas flow channel is arranged in the box body 10 and communicates with the air inlet 11 and the air outlet 12. The cyclone device 70 is arranged in the gas flow channel. The cyclone device 70 comprises a primary cyclone tuyere assembly 71 and a mixing plate 73. The mixing plate 73 is arranged on the air outlet side of the primary cyclone tuyere assembly 71. The mixing plate 73 comprises a first region 731 and a second region 732. The first region 731 is arranged close to the middle part of the primary cyclone tuyere assembly 71. The flow area of the first region 731 is smaller than that of the second region 732. Here, the mixing plate 73 is in the form of a plate and is arranged on the gas flow channel. The mixing plate 73 is arranged perpendicularly to the gas flow direction to form an air flow cross section. The first region 731 of the mixing plate 73 can be a region close to the geometric center of the mixing plate 73. The second region 732 is a region on both sides of the first region 731 or a peripheral region, which is relatively far away from the middle part of the primary cyclone tuyere assembly 71.

[0039] Please refer to Figure 1 The temperature control device 100 of an embodiment of the application can comprise a box body 10, a circulating power fan 20 arranged in the box body 10, a fan air outlet flow uniformizing plate 30, a cooling coil 40, a primary heater 50, a precision regulating heater 60, a cyclone device 70 and a flow stabilizing and uniformizing plate 80.

[0040] It can be understood that, in other embodiments, the temperature control device 100 can also omit the precision regulating heater 60, reduce the number of cyclone tuyeres of the cyclone device 70, and reduce the number of flow stabilizing and uniformizing plates 80. In another embodiment, the temperature control device 100 can also increase one or more of the number of heaters, the number of cyclone tuyeres of the cyclone device 70 or the number of flow stabilizing and uniformizing plates according to requirements.

[0041] The side of the box body 10 is surrounded by side plates 13 made of heat preservation materials. The air inlet 11 and the air outlet 12 are arranged on the top of the box body 10. The air inlet 11 receives gas in the environment of the device to be temperature-controlled into the box body 10. The air outlet 12 delivers the gas in the box body 10 into the device to be temperature-controlled. The box body 10 is provided with a partition plate 14 between the two parallel side plates 13, which separates the air inlet 11 and the air outlet 12 and forms a gas flow channel from the air inlet 11 to the air outlet 12. The gas flow channel defines the flow direction of the gas in the gas flow channel (for example, the arrow direction in the figure). Figure 1(As indicated by the middle arrow), the gas entering the housing 10 through the air inlet 11 flows along the gas flow direction in the gas flow channel to the air outlet 12. In the illustrated embodiment, the housing 10 is provided with two air inlets 11 and two air outlets 12, and the bottom of the partition plate 14 is provided with a notch to install the precision regulating heater 60 and to allow airflow. The gas flow channel is U-shaped.

[0042] The circulating power fan 20 is located in the gas flow channel near the air inlet 11. The gas entering through the air inlet 11 enters the circulating power fan 20. The circulating power fan 20 provides the power for gas circulation and the power for the gas flowing along the gas flow channel, continuously providing positive pressure to the housing 10 and reducing the risk of external gas (especially unclean gas) infiltration.

[0043] The fan outlet flow equalization plate 30 is disposed within the gas flow channel and located downstream of the circulating power fan 20 along the gas flow direction. The fan outlet flow equalization plate 30 provides resistance to the flow of gas to homogenize the gas flow velocity. The fan outlet flow equalization plate 30 can be a component with a certain opening ratio that generates resistance, thereby making the velocity of the airflow more uniform.

[0044] The cooling coil 40 is installed in the gas flow channel and is located downstream of the fan outlet air distribution plate 30 along the gas flow direction to cool the flowing gas. The cooling coil 40 uses chilled water flowing inside the coil to reduce the temperature of the airflow outside the coil to a certain set temperature.

[0045] The primary heater 50 is located downstream of the cooling coil 40 in the gas flow channel to provide initial heating to the gas flowing through it. The precision regulating heater 60 is located in the gas flow channel and between the primary heater 50 and the swirl device 70 to provide secondary heating to the gas flowing through it.

[0046] like Figure 1 As shown, a two-stage heater is installed within the gas flow channel. The primary heater 50 and the precision regulating heater 60 are a coarse-adjustment heater and a fine-adjustment heater, respectively. Multi-stage heating power control ensures that the overall average temperature of the gas meets the set requirements. The precision regulating heater 60 is installed at the notch between the bottom of the partition plate 14 and the base plate. The primary heater 50 and the precision regulating heater 60 can be perforated plate heaters, wire mesh heaters, or pipe mesh heaters, etc., air heaters. In a preferred embodiment, the primary heater 50 and the precision regulating heater 60 can be electric heating wire heaters.

[0047] The cyclone device 70 is arranged in the gas flow passage and downstream of the precision regulating heater 60 along the gas flow direction, so as to deflect and vortex the gas flowing therethrough. The cyclone device 70 comprises a primary cyclone air port assembly 71, a secondary cyclone air port assembly 72 and a mixing plate 73 arranged in the gas flow passage, with the mixing plate 73 being arranged between the primary cyclone air port assembly 71 and the secondary cyclone air port assembly 72. The high-speed rotation of the primary cyclone air port assembly 71, the mixing plate 73 and the secondary cyclone air port assembly 72 disperses the gas flow, so that the gas flow is sufficiently mixed and uniform. The gas flow is gradually improved in temperature uniformity by the multi-stage arrangement.

[0048] The steady flow uniformity plate 80 is arranged in the gas flow passage and between the cyclone device 70 and the air outlet 12, so as to reduce the speed fluctuation of the gas flowing therethrough, thereby ensuring the stability of the air outlet. In some embodiments, the steady flow uniformity plate 80 is one or more levels of screen meshes arranged in the gas flow passage; in other embodiments, the steady flow uniformity plate 80 is one or more levels of orifice plates arranged in the gas flow passage. In the illustrated embodiment, the steady flow uniformity plate 80 is arranged with three levels and is equally spaced between the cyclone device 70 and the air outlet 12.

[0049] In the temperature control device 100 described above, the partition plate 14 divides the space in the cabinet 10 into a first air chamber on the same side as the gas inlet 11 and a second air chamber on the same side as the air outlet 12, and the two air chambers are communicated through the gap (the precision regulating heater 60) at the bottom of the partition plate 14, so as to form a U-shaped gas flow passage as a whole. The gas drawn from the environment of the equipment to be temperature controlled enters the first air chamber in the interior of the cabinet 10 through the air inlet 11 on the cabinet 10, and then becomes a relatively uniform gas flow after passing through the circulating power fan 20 and the fan outlet flow uniformity plate 30. After passing through the cooling coil 40, the gas flow becomes a gas flow below the set temperature, and then is heated to the set temperature by the primary heater 50 and the precision regulating heater 60. The gas flow then enters the second air chamber, and the cyclone device 70 generates a rotating vortex structure to mix and blend the gas flow to achieve temperature uniformity. The speed of the gas flow is then made uniform by the steady flow uniformity plate 80, and finally the gas flow is sent into the equipment to be temperature controlled through the air outlet 12, thereby completing the entire temperature control process.

[0050] Please refer to Figure 2 which is a schematic view of an embodiment of the primary cyclone air port assembly 71, the primary cyclone air port assembly 71 and the mixing plate 73 shown in Figure 5 or Figure 6 complete the preliminary mixing of the gas flow, so that the temperature distribution of the flow field tends to be uniform. The primary cyclone air port assembly 71 adopts a plurality of cyclone air ports combined, which comprises a plurality of cyclone components 711 arranged on a cyclone air port bottom plate 712, with the cyclone components 711 being uniformly distributed on the cyclone air port bottom plate 712. More specifically, one cyclone component 711 is arranged in the middle of the cyclone air port bottom plate 712, and cyclone components 711 with equal diameters are distributed on both sides of the cyclone component 711 in the middle.

[0051] Please refer to Figure 3 , which is a schematic view of another embodiment of the primary cyclone tuyere assembly 71. In the primary cyclone tuyere assembly 71, no cyclone tuyere is arranged in the middle of the cyclone tuyere bottom plate 712, and cyclone components 711 are arranged on both sides, so that the airflow can pass through the entire plane, playing a uniform mixing role.

[0052] Please refer to Figure 4 , which is a schematic view of another embodiment of the primary cyclone tuyere assembly 71. In the primary cyclone tuyere assembly 71, relatively small cyclone components 711 are arranged in the middle of the cyclone tuyere bottom plate 712, and the cyclone components 711 are arranged on both sides, so that the airflow can pass through the entire plane, playing a uniform mixing role.

[0053] It should be pointed out that the cyclone components 711 used in the primary cyclone tuyere assembly 71 are not limited to Figures 2 to 4 two or three as shown in the figure, but can be a plurality of cyclone components 711 arranged in parallel array or staggered arrangement.

[0054] Please refer to Figure 5 , similarly, the secondary cyclone tuyere assembly 72 includes a mounting plate 722 and cyclone fans 721 arranged on the mounting plate 722, and the cyclone fans 721 are arranged on the mounting plate 722 close to the geometric center of the mounting plate 722.

[0055] Please refer to Figure 6 and Figure 7 , which are schematic views of two embodiments of the mixing plate 73. The mixing plate 73 is rectangular, the first area 731 is arranged close to the middle of the mixing plate 73, the second area 732 is located on both sides of the first area 731, and a plurality of openings 733 are formed on the mixing plate 73. The openings 733 are arranged in an array on the mixing plate 73, and the flow area of the first area 731 in the middle of the mixing plate 73 is smaller than the flow area of the second area 732 on both sides. Specifically, in the first area 731 in the middle of the mixing plate 73, the distribution density of the openings 733 is relatively sparse; in the second area 732 on both sides of the mixing plate 73, the distribution density of the openings 733 is relatively dense, so that the flow area of the first area 731 in the middle is smaller than the flow area of the second area 732 on both sides.

[0056] In the mixing plate 73, the openings 733 can be circular holes as shown in Figure 6 or square holes as shown in Figure 7 , or other shapes not shown, such as oval holes, prismatic holes, triangular holes, etc., as long as the flow area in the middle of the mixing plate 73 is reduced so that the airflow can uniformly flow from the entire primary cyclone tuyere assembly 71 to the next stage, ensuring the airflow mixing effect of this link. The mixing plate 73 can be a rectangular plate, or other shaped plates, which can be selected according to actual needs.

[0057] Please refer to Figure 8 and Figure 9 which are schematic diagrams of two other embodiments of the mixing plate 73. The mixing plate 73 can also be circular or elliptical, the first area 731 is arranged near the geometric center of the mixing plate 73, and the second area 732 is arranged around the periphery of the first area 731, and a plurality of openings 733 are formed in the mixing plate 73. The openings 733 are arranged in an array on the mixing plate 73, and the flow area of the first area 731 in the middle of the mixing plate 73 is smaller than the flow area of the second area 732 on the periphery. Specifically, in the first area 731 in the middle of the mixing plate 73, the distribution density of the openings 733 is relatively sparse; in the second area 732 on the periphery, the distribution density of the openings 733 is relatively dense, so that the flow area of the first area 731 in the middle is smaller than the flow area of the second area 732 on the periphery.

[0058] In the mixing plate 73, the openings 733 of the first area 731 and the openings 733 of the second area 732 can be the same aperture size as shown in Figure 8 , the apertures of the openings 733 of the first area 731 can be larger than the apertures of the openings 733 of the second area 732 as shown in Figure 9 , or the apertures of the openings of the first area can be smaller than the apertures of the openings of the second area, which is not shown, as long as the flow area in the middle of the mixing plate 73 is reduced to enable the airflow to flow uniformly from the entire primary cyclone air port assembly 71 to the lower stage, ensuring the airflow mixing function in this link.

[0059] In the operation of the temperature control device 100, the air enters the cyclone device 70 after being cooled and heated. The airflow is mixed and dispersed by the high-speed rotation of the primary cyclone air port assembly 71, the mixing plate 73, and the secondary cyclone air port assembly 72. By adjusting the flow area (opening area) of the first area 731 in the middle of the mixing plate 73 to reduce the flow area, the resistance in the middle is increased, so that the airflow from the precision adjustment heater 60 can be uniformly distributed to the primary cyclone air port assembly 71, fully utilizing the mixing function of the primary cyclone air port assembly 71. At the same time, the flow area of the primary cyclone air port assembly 71 is ensured, the resistance loss is reduced, and it is also beneficial to the guarantee of the air volume of the outlet air. Then, the airflow flows to the secondary cyclone air port assembly 72 for further rotation and mixing, and finally forms a stable flow through the action of the flow stabilizing and uniformizing plate 80, so that the airflow meeting the target control precision and uniformity is sent to the target point from the outlet 12.

[0060] In summary, the cyclone device and temperature control device provided by the application adopts the mode of reducing the flow area in the middle of the mixing plate downstream of the primary cyclone air port assembly, thereby adjusting the cooling and heating of the super-precision temperature control device to the target temperature, so that the entire airflow is fully mixed and uniform before entering the steady flow plate, so that the flow field distribution of the entire airflow is uniform before entering the steady flow plate, thereby achieving the target air outlet temperature precision and uniformity requirements.

[0061] The concepts described herein can be embodied in other forms without departing from the spirit and nature of the subject matter set forth herein. The specific embodiments disclosed are to be considered as illustrative only and not restrictive in nature. Therefore, the scope of the application is to be determined by the appended claims, rather than by the foregoing description. Any change that comes within the meaning and range of equivalency of the claims is to be embraced within their scope.

Claims

1. A cyclone apparatus characterised by: The cyclone device comprises a primary cyclone air outlet assembly, a secondary cyclone air outlet assembly and a mixing plate, the mixing plate is arranged on the air outlet side of the primary cyclone air outlet assembly, and the secondary cyclone air outlet assembly is arranged on the side of the mixing plate away from the primary cyclone air outlet assembly. The primary cyclone air outlet assembly comprises a cyclone air outlet bottom plate and a plurality of cyclone components arranged on the cyclone air outlet bottom plate; the cyclone components are arranged on both sides of the cyclone air outlet bottom plate, and no cyclone air outlet is arranged in the middle of the cyclone air outlet bottom plate or the cyclone components with smaller diameters are arranged in the middle of the cyclone air outlet bottom plate. The mixing plate comprises a first region and a second region, wherein the first region is arranged near the middle part of the primary cyclone air outlet assembly, and the flow area of the first region is smaller than that of the second region.

2. The cyclone apparatus of claim 1, wherein: A plurality of openings are arranged on the first region and the second region, the second region is located on at least one side of the first region and relatively far away from the middle part of the primary cyclone air outlet assembly, and the distribution density of the openings in the first region is smaller than that of the openings in the second region.

3. The cyclone apparatus of claim 1, wherein: Two or more than two cyclone components are arranged in parallel or staggered on the cyclone air outlet bottom plate.

4. The cyclone apparatus of claim 1, wherein: The secondary cyclone air outlet assembly comprises a mounting plate and a cyclone fan arranged on the mounting plate, and the cyclone fan is arranged near the geometric center of the mounting plate.

5. A temperature control device, characterized by, The cyclone device comprises: a box body provided with an air inlet and an air outlet, and a gas flow channel communicating the air inlet and the air outlet arranged in the box body; and the cyclone device according to any one of claims 1 to 4 is arranged in the gas flow channel.

6. The temperature control device of claim 5, wherein, Further comprising: a circulating power fan arranged in the box body and sequentially arranged upstream of the cyclone device in the gas flow channel, for driving gas to flow from the air inlet into the gas flow channel; a fan air outlet uniform flow plate for providing flow resistance to the flowing gas to uniformize the gas flow velocity; a cooling coil for cooling the flowing gas; and a heater for heating the flowing gas. A partition plate is arranged in the box body to divide the space in the box body into a U-shaped gas flow channel; and the precision regulating heater is arranged in the gap in the partition plate.

7. The temperature control device of claim 6, wherein: Further comprising a flow stabilizing and uniformizing plate arranged in the gas flow channel and located between the cyclone device and the air outlet to reduce the velocity fluctuation of the flowing gas; the flow stabilizing and uniformizing plate comprises one or more levels of screens, or the flow stabilizing and uniformizing plate comprises one or more levels of aperture plates.

8. The temperature control device of claim 6, wherein: ​

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