Auxiliary fixture for correcting target blank position and use method thereof

Abstract

The present invention relates to an auxiliary jig for correcting the position of a target blank and a method for using the same. The auxiliary jig comprises at least two intersecting support beams and a correction ruler connected to the support beams. By using the at least two intersecting support beams and the correction ruler connected to the support beams, the present invention achieves limited positioning of a backing plate in two directions, facilitating precise positioning and efficient adjustment, thereby ensuring that the corrected backing plate reaches a specified horizontal range.

Description

Technical Field

[0001] The present invention belongs to the technical field of target materials for liquid crystal panel sputtering, and relates to an auxiliary jig for correcting the relative position of a target blank on a backplane, and in particular to an auxiliary jig for correcting the relative position of a target blank on a backplane and a method for using the same. Background Art

[0002] The target material is sputter-coated and etched into metal wires to form scanning lines and data lines for panel driving, which are used to transmit electrons and ultimately drive each corresponding thin-film transistor on the display screen to turn on or off.

[0003] The target material consists of a copper backing plate and a target blank. The G6 target blank is generally 2300 x 1800 mm, covering an area of ​​approximately 4 square meters. The copper backing plate and target blank are bonded together with indium solder. During welding, a vacuum suction cup is used to hold the non-welding surface of the target, with the corresponding welding surface facing downward. The target is tilted to a certain angle, then moved onto the backing plate, positioned correctly, and slowly lowered to engage.

[0004] Because there is a solder layer between the target blank and the backing plate, the liquid solder has a certain lubricating effect, making it difficult to accurately align the relative position of the backing plate and the target blank after fastening. Therefore, the relative position between the two needs to be fine-tuned. The current operation method is to manually set the correction ruler limit in the corresponding direction, and then adjust the force impact in the other direction (i.e., the parallel adjustment direction), or to adjust the limit and force impact in the lateral direction (i.e., the vertical adjustment direction).

[0005] Because the relative position varies after each engagement, the adjustment method is not always fixed. Manual fine-tuning requires multiple people to coordinate, resulting in varying amounts of time. Manual force adjustment is difficult to quantify. Too much force can easily lead to over-adjustment, while too little can lead to under-adjustment. Consequently, adjustment procedures tend to be empirical and difficult to standardize.

[0006] CN 104338802A discloses a target material correction device, comprising: a frame having a suspension beam, a support platform disposed opposite the suspension beam, a support rod connecting the suspension beam and the support platform, a gap between the suspension beam and the support platform, and the support platform for placing the target material; a hydraulic cylinder or a pneumatic cylinder suspended from the suspension beam and movable along the suspension beam, the piston rod of the hydraulic cylinder or the pneumatic cylinder moving perpendicularly to the suspension beam, the piston rod for applying pressure to the target material surface; and a pressure station connected to the hydraulic cylinder or the pneumatic cylinder for controlling the movement of the piston rod. This device improves correction efficiency and saves operator effort.

[0007] CN 109304384A discloses a device and method for correcting welded T-shaped steel columns. The device consists of several correction units arranged in a straight line. Each correction unit includes a platform support, two L-shaped clamps, and a jack. The platform support is welded from two upright columns and a crossbeam. A vertical beam perpendicular to the horizontal beam is provided on the upper surface of the crossbeam. Two rectangular connecting blocks parallel to the horizontal beam are provided at both ends of the vertical beam, each with a plurality of threaded holes evenly distributed in the connecting blocks. The L-shaped clamps are integrally formed from a horizontal plate and a vertical plate. The horizontal plate is provided with threaded holes corresponding to the threaded holes in the connecting blocks. Threaded connectors pass through the threaded holes in the horizontal plate and the connecting blocks to securely connect the two L-shaped clamps to the two connecting blocks. The jack is positioned between the vertical beam and the welded H-shaped steel web to be corrected. The jack base presses against the vertical beam, while the jack travel end presses against the welded H-shaped steel web to be corrected. This invention has the advantages of simple structure, easy operation, low cost, and high efficiency.

[0008] The above technical solutions correct the structure of the target material, but CN 104338802A does not involve precise adjustment of the relative position between the backing plate and the target blank. The correction device provided by CN 109304384A is relatively complicated to modify based on welding.

[0009] Therefore, how to provide a simple and highly operable method to accurately adjust the relative position between the back plate and the target blank is a major problem in the field of target material technology for liquid crystal panel sputtering. Summary of the Invention

[0010] In view of the problems existing in the prior art, the present invention provides an auxiliary fixture for correcting the position of a target blank, a method of using the same, and a target material, which limits the position in two directions to achieve precise position fixation and efficient adjustment.

[0011] To achieve this object, the present invention adopts the following technical solutions:

[0012] In a first aspect, the present invention provides an auxiliary jig for correcting the position of a target blank, wherein the auxiliary jig includes at least two intersecting support beams and a correction ruler connected to the support beams.

[0013] The present invention provides an auxiliary jig for correcting the relative position of the target blank on the backing plate. Through at least two intersecting support beams and a correction ruler connected to the support beams, the backing plate can be limited in two directions, which is conducive to achieving precise position fixation and efficient adjustment, so that the corrected backing plate reaches the specified horizontal range.

[0014] The auxiliary jig for correcting the relative position of the target blank on the back plate provided by the present invention overcomes the prior art practice of manually limiting and adjusting the correction ruler in the corresponding direction, thereby improving the correction efficiency and saving the operator's physical strength.

[0015] As a preferred technical solution of the present invention, a slide rail is provided on the support beam, and the correction ruler is slidably connected to the slide rail.

[0016] Preferably, the support beam is connected to at least two correction rulers.

[0017] Preferably, the correction rulers connected to the same support beam are parallel to each other.

[0018] Preferably, the accuracy of the correction ruler is above 0.0001 mm, for example, it can be 0.0001 mm, 0.001 mm, 0.01 mm, 0.1 mm or 1 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0019] Preferably, the length of the correction ruler is 5 to 40 cm, for example, 5 cm, 10 cm, 20 cm, 30 cm or 40 cm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0020] Preferably, the angle between the intersecting support beams is 70 to 120°, for example, it can be 70°, 80°, 90°, 100°, 110° or 120°, but is not limited to the listed values. Other unlisted values ​​within the numerical range are also applicable, preferably 90°.

[0021] Preferably, the length of the support beam is greater than the length of the back plate.

[0022] In a second aspect, the present invention provides a method for using the auxiliary jig according to the first aspect, the method comprising the following steps:

[0023] (1) Fix the position of the auxiliary fixture;

[0024] (2) Adjust the distance between the correction rulers;

[0025] (3) Use a pneumatic hammer to impact and adjust the relative position of the target blank on the backing plate;

[0026] (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank on the backing plate.

[0027] During operation, the method provided by the present invention uses a pneumatic hammer to adjust the distance between the target blank, which is limited by the auxiliary fixture and the back plate, to appropriately relax the margin, and reserve a limit size space for the correction ruler. Then, the correction ruler is set to a certain spacing, and the position of the corresponding target blank is adjusted. The pneumatic hammer is used to quantify the force of a single impact, and multiple impact adjustments are performed, so that the position adjustment of the target blank is more efficient and convenient, and it is easy to form production line production.

[0028] Preferably, the distance between the position of the support beam in step (1) and the backboard is 30 to 40 cm, for example, it can be 30 cm, 32 cm, 34 cm, 36 cm, 38 cm or 40 cm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] Preferably, the spacing in step (2) is 0.8 to 1.5 m, for example, 0.8 m, 0.9 m, 1 m, 1.2 m, 1.4 m or 1.5 m, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0030] The distance between the correction rulers is the distance between the correction rulers connected on the same support beam.

[0031] Preferably, the impact force of the pneumatic hammer in step (3) is 7 to 11.2 N, for example, 7 N, 8 N, 9 N, 10 N or 11.2 N, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0032] Preferably, the impact cycle of the pneumatic hammer in step (3) is 1 to 60 times / minute, for example, 1 time / minute, 5 times / minute, 10 times / minute, 20 times / minute, 30 times / minute or 60 times / minute, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0033] Preferably, the number of repetitions in step (4) is 4 or more times, for example, 4, 5, 10, 20, 30 or 60 times, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0034] As a preferred technical solution of the method for using the auxiliary jig for correcting the relative position of the target blank on the backing plate according to the second aspect of the present invention, the method comprises the following steps:

[0035] (1) Fix the position of the auxiliary fixture, and the distance between the support beam and the backboard is 30 to 40 cm;

[0036] (2) Adjust the distance between the correction rulers. The distance between two parallel correction rulers should be 0.8 to 1.5 m.

[0037] (3) Using a pneumatic hammer with an impact force of 7 to 11.2 N and an impact cycle of 1 to 60 times / min to impact and adjust the relative position of the target blank on the backing plate;

[0038] (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank on the backing plate.

[0039] According to the above technical solution, the beneficial effects of the present invention are as follows:

[0040] (1) The present invention provides an auxiliary jig for correcting the relative position of the target blank on the backing plate. By means of at least two intersecting support beams and a correction ruler connected to the support beams, the backing plate can be limited in position in two directions, which is conducive to achieving precise position fixation and efficient adjustment, so that the corrected backing plate reaches the specified horizontal range.

[0041] (2) The auxiliary jig for correcting the relative position of the target blank on the backing plate provided by the present invention overcomes the prior art practice of manually limiting and adjusting the correction ruler in the corresponding direction, thereby improving the correction efficiency and saving the operator's physical strength.

[0042] (3) When operating the method provided by the present invention, the distance between the target blank limited by the auxiliary fixture and the back plate is adjusted to a suitable amount by a pneumatic hammer, and a limit size space is reserved for the correction ruler. Then, the correction ruler is set to a certain spacing, and the position of the corresponding target blank is adjusted. The pneumatic hammer is used to quantify the force of a single impact, and multiple impact adjustments are performed, so that the position adjustment of the target blank is more efficient and convenient, and it is easy to form production line production. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a structural schematic diagram of the auxiliary jig provided by the present invention for correcting the relative position of the target blank on the backing plate when in use.

[0044] in:

[0045] 1-Support beam, 2-Correction ruler, 3-Slide rail, 4-Target blank, 5-Pneumatic hammer. DETAILED DESCRIPTION

[0046] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific embodiments. However, the following examples are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention shall be subject to the claims.

[0047] Example 1

[0048] This embodiment provides an auxiliary fixture for correcting the relative position of the target blank on the backing plate, the structural diagram of which is shown in FIG. Figure 1 As shown, the auxiliary fixture includes two support beams 1 intersecting at right angles and a correction ruler 2 connected to the support beams. A slide rail 3 is provided on the support beam 1, and the correction ruler 2 is slidably connected to the slide rail 3.

[0049] Each support beam 1 is connected to two correction rulers 2 , and the correction rulers 2 connected to the same support beam 1 are parallel to each other. The accuracy of the correction ruler 2 is 0.0001 mm, and the length of the correction ruler is 20 cm.

[0050] The method for using the auxiliary fixture for correcting the relative position of the target blank on the backing plate comprises the following steps:

[0051] (1) Fix the position of the auxiliary fixture, and the distance between the support beam and the backboard is 35 cm;

[0052] (2) Adjust the distance between the two parallel correction rulers 2 to 1m;

[0053] (3) Use a pneumatic hammer 5 with an impact force of 10 N and an impact cycle of 30 times / min to impact and adjust the relative position of the target blank 4 on the backing plate;

[0054] (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank 4 on the backing plate.

[0055] The auxiliary jig provided in this embodiment for correcting the relative position of the target blank on the backing plate realizes limited positioning of the backing plate in two directions through two intersecting support beams and a correction ruler connected to the support beams, which is conducive to achieving precise position fixation and efficient adjustment, so that the corrected backing plate reaches the specified horizontal range.

[0056] During operation, the pneumatic hammer is used to adjust the distance between the target blank, which is limited by the auxiliary fixture and the back plate, to make appropriate relaxation margin adjustments, and reserve limit size space for the correction ruler. Then the correction ruler is set to the spacing, and the position of the corresponding target blank is adjusted. The pneumatic hammer is used to quantify the force of a single impact, and multiple impact adjustments are made, making the position adjustment of the target blank more efficient and convenient, and easy to form production line production.

[0057] Example 2

[0058] This embodiment provides an auxiliary jig for correcting the relative position of the target blank on the backing plate, the auxiliary jig includes two support beams intersecting at 70 degrees and a correction ruler connected to the support beams, a slide rail is provided on the support beam, and the correction ruler is slidably connected to the slide rail.

[0059] Each support beam is connected to two correction rulers, and the correction rulers connected to the same support beam are parallel to each other. The accuracy of the correction ruler is 0.0001mm, and the length of the correction ruler is 5cm.

[0060] The method for using the auxiliary fixture for correcting the relative position of the target blank on the backing plate comprises the following steps:

[0061] (1) Fix the position of the auxiliary fixture, and the distance between the support beam and the backboard is 30 cm;

[0062] (2) Adjust the distance between the correction rulers. The distance between two parallel correction rulers is 0.8m.

[0063] (3) Use a pneumatic hammer with an impact force of 7 N and an impact cycle of 1 time / min to adjust the relative position of the target blank on the backing plate;

[0064] (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank on the backing plate.

[0065] The auxiliary jig provided in this embodiment for correcting the relative position of the target blank on the backing plate realizes limited positioning of the backing plate in two directions through two intersecting support beams and a correction ruler connected to the support beams, which is conducive to achieving precise position fixation and efficient adjustment, so that the corrected backing plate reaches the specified horizontal range.

[0066] During operation, the pneumatic hammer is used to adjust the distance between the target blank, which is limited by the auxiliary fixture and the back plate, to make appropriate relaxation margin adjustments, and reserve limit size space for the correction ruler. Then the correction ruler is set to the spacing, and the position of the corresponding target blank is adjusted. The pneumatic hammer is used to quantify the force of a single impact, and multiple impact adjustments are made, making the position adjustment of the target blank more efficient and convenient, and easy to form production line production.

[0067] Example 3

[0068] This embodiment provides an auxiliary jig for correcting the relative position of the target blank on the backing plate. The auxiliary jig includes two support beams intersecting at 120 degrees and a correction ruler connected to the support beams. A slide rail is provided on the support beam, and the correction ruler is slidably connected to the slide rail.

[0069] Each support beam is connected to two correction rulers, and the correction rulers connected to the same support beam are parallel to each other. The accuracy of the correction ruler is 0.0001mm, and the length of the correction ruler is 40cm.

[0070] The method for using the auxiliary fixture for correcting the relative position of the target blank on the backing plate comprises the following steps:

[0071] (1) Fix the position of the auxiliary fixture, and the distance between the support beam and the backboard is 40 cm;

[0072] (2) Adjust the distance between the correction rulers. The distance between two parallel correction rulers is 1.5m.

[0073] (3) Use a pneumatic hammer with an impact force of 11.2 N and an impact cycle of 60 times / min to adjust the relative position of the target blank on the backing plate;

[0074] (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank on the backing plate.

[0075] The auxiliary jig provided in this embodiment for correcting the relative position of the target blank on the backing plate realizes limited positioning of the backing plate in two directions through two intersecting support beams and a correction ruler connected to the support beams, which is conducive to achieving precise position fixation and efficient adjustment, so that the corrected backing plate reaches the specified horizontal range.

[0076] During operation, the pneumatic hammer is used to adjust the distance between the target blank, which is limited by the auxiliary fixture and the back plate, to make appropriate relaxation margin adjustments, and reserve limit size space for the correction ruler. Then the correction ruler is set to the spacing, and the position of the corresponding target blank is adjusted. The pneumatic hammer is used to quantify the force of a single impact, and multiple impact adjustments are made, making the position adjustment of the target blank more efficient and convenient, and easy to form production line production.

[0077] Example 4

[0078] This embodiment provides an auxiliary jig for correcting the relative position of a target blank on a backing plate and a method for using the same. The only difference from Example 1 is that each support beam is connected to a correction ruler.

[0079] There is only one correction ruler on each support beam. When the pneumatic hammer performs multiple impacts and adjustments, the position of the target blank is easy to move, resulting in inaccurate correction position.

[0080] Example 5

[0081] This embodiment provides an auxiliary jig and a method of use for correcting the relative position of a target blank on a backing plate. The only difference from Example 1 is that the pneumatic hammer is replaced by a conventional percussion hammer in the method of use.

[0082] When a conventional percussion hammer is used for multiple impacts and position adjustments, the correction time using an auxiliary jig is normal and the correction efficiency is reduced.

[0083] Comparative Example 1

[0084] This comparative example provides an auxiliary jig for correcting the relative position of the target blank on the backing plate. The only difference from Example 1 is that the auxiliary jig includes a support beam and a correction ruler connected to the support beam.

[0085] The auxiliary fixture has only one supporting beam. When the pneumatic hammer performs multiple impacts and adjustments, the position of the target blank is easily moved, resulting in inaccurate correction position.

[0086] While the present invention is described through the above-described embodiments to illustrate the detailed structural features of the present invention, the present invention is not limited to these detailed structural features, nor does it necessarily rely on these detailed structural features for implementation. Those skilled in the art should understand that any improvements to the present invention, equivalent replacements for selected components, additions of auxiliary components, and selection of specific embodiments, etc., fall within the scope of protection and disclosure of the present invention.

Claims

1. A method for using an auxiliary fixture for correcting the position of a target blank, characterized in that: The method of use comprises the following steps: (1) Fix the position of the auxiliary fixture; (2) Adjust the spacing between the correction rulers; (3) Use a pneumatic hammer to impact and adjust the relative position of the target blank on the backing plate; (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank on the backing plate; The auxiliary jig includes at least two intersecting support beams and a correction ruler connected to the support beams; The support beam is connected to at least two correction rulers, and the correction rulers connected to the same support beam are parallel to each other; The angle between the intersecting support beams is 70-120°; The length of the support beam is greater than the length of the back plate; By means of at least two intersecting support beams and a correction ruler connected to the support beams, the back plate can be positioned in two directions. The distance between the target blank and the back plate, which is limited by the auxiliary fixture, is adjusted by a pneumatic hammer to a suitable relaxation margin.

2. The method for using the auxiliary fixture according to claim 1, characterized in that: A slide rail is provided on the support beam, and the correction ruler is slidably connected to the slide rail.

3. The method for using the auxiliary fixture according to claim 1, characterized in that: The accuracy of the correction ruler is above 0.0001 mm.

4. The method for using the auxiliary fixture according to claim 1, characterized in that: The length of the correction ruler is 5 to 40 cm.

5. The method for using the auxiliary fixture according to claim 1, characterized in that: The angle between the intersecting support beams is 90°.

6. The method for using the auxiliary fixture according to claim 1, characterized in that: The distance between the support beam in step (1) and the backboard is 30-40 cm.

7. The method for using the auxiliary fixture according to claim 1, characterized in that: The spacing in step (2) is 0.8~1.5m.

8. The method for using the auxiliary fixture according to claim 1, characterized in that: The impact force of the pneumatic hammer in step (3) is 7~11.2N.

9. The method for using the auxiliary fixture according to claim 1, characterized in that: The impact cycle of the pneumatic hammer in step (3) is 1 to 60 times per minute.

10. The method for using the auxiliary fixture according to claim 1, characterized in that: The number of repetitions in step (4) is 4 or more.

11. The method for using the auxiliary fixture according to claim 1, characterized in that: The method of use comprises the following steps: (1) Fix the position of the auxiliary fixture, and the distance between the support beam and the backboard is 30~40cm; (2) Adjust the distance between the correction rulers. The distance between two parallel correction rulers should be 0.8~1.5m. (3) Use a pneumatic hammer with an impact force of 7 to 11.2 N and an impact cycle of 1 to 60 times / min to adjust the relative position of the target blank on the backing plate; (4) Repeat steps (2) and (3) to complete the correction of the relative position of the target blank on the backing plate.

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