A humidity sensor with nano-gyro-shaped structure array and preparation method thereof

Abstract

The present invention discloses a humidity sensor of a nano-gyro-shaped structure array in the technical field of humidity sensor and a preparation method thereof, comprising: a nano-gyro-shaped structure array capable of inducing an F_P mode, and a disk array capable of inducing a disk SPP mode is arranged in the middle of the nano-gyro-shaped structure array, the F_P mode of the nano-gyro-shaped structure array and the disk SPP mode of the disk array are superimposed to form a Fano mode, and a water-absorbing material is also arranged in the nano-gyro-shaped structure array, and the water-absorbing material changes the resonance mode of the nano-gyro-shaped structure array through the change of its own water absorption in air with different humidity, thereby making the nano-gyro-shaped structure array reflect light of different colors under illumination. The present invention solves the defects of the existing sensor, such as short life, poor stability, low precision and poor repeatability.

Description

Technical Field

[0001] The invention relates to a humidity sensor of a nano-gyro-shaped structure array and a preparation method thereof, belonging to the technical field of humidity sensors. Background Art

[0002] Nanowires refer to materials whose structure has one dimension of the space at the macroscopic scale and the other two dimensions at the nanoscale. Therefore, they are also called one-dimensional nanostructures. Compared with other dimensions, one-dimensional nanomaterials have quantum confinement effects in two directions. It is precisely because of the existence of quantum confinement effects that one-dimensional nanowire materials exhibit unique optical, electrical, and magnetic properties. For example, the quantum confinement effect will give nanowires a unique electronic state density. Therefore, when the diameter of the nanowire is small enough, it will produce electrical and magnetic properties different from those of the bulk material. It is precisely because of these unique properties of nanowire materials that the research on nanowire materials has received widespread attention worldwide. Nanowires can be made by suspension method, deposition method or element synthesis method. Nanowires have the characteristics of strong mechanical properties, good toughness and weak conductivity.

[0003] At present, there are many varieties of humidity sensors, but in terms of the humidity sensing materials used, there are mainly electrolyte and polymer compound humidity sensing materials, semiconductor ceramic materials and elemental semiconductors. Electrolyte humidity sensors have the disadvantages of narrow measurement range, poor repeatability and short service life; polymer compound humidity sensors have the advantages of good humidity sensing performance and high sensitivity, but the performance deteriorates under high temperature and high humidity conditions, poor stability, poor corrosion resistance and anti-fouling ability; semiconductor ceramic material humidity sensors have the advantages of good humidity sensing performance, simple production, low cost, short response time, and heating and cleaning, but low accuracy, poor performance at high temperature, and difficult integration. In summary, the existing humidity sensors have the disadvantages of short life, poor stability, low accuracy, and poor repeatability. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a humidity sensor with a nano-gyro-shaped structure array and a preparation method thereof, so as to solve the defects of the existing sensors, such as short life, poor stability, low precision and poor repeatability.

[0005] To achieve the above object, the present invention is implemented by adopting the following technical solutions:

[0006] In the first aspect, the present invention provides a humidity sensor of a nano-gyro-shaped structure array, comprising a nano-gyro-shaped structure array capable of inducing an F_P mode, and a disk array capable of inducing a disk SPP mode is arranged in the middle of the nano-gyro-shaped structure array, the F_P mode of the nano-gyro-shaped structure array and the disk SPP mode of the disk array are superimposed to form a Fano mode, and a water-absorbing material is also arranged in the nano-gyro-shaped structure array, and the water-absorbing material changes the resonance mode of the nano-gyro-shaped structure array by changing its own water absorption in air with different humidity, thereby causing the nano-gyro-shaped structure array to reflect light of different colors under illumination.

[0007] Furthermore, the water absorbing material is filled in the nano-gyro-shaped structure array.

[0008] Furthermore, the water absorbing material is spin-coated on the nanowires in the nano-gyro-shaped structure array.

[0009] Furthermore, the diameter of the thin disks of the disk array of the nano-gyro-shaped structure array portion is 20nm-80nm.

[0010] Furthermore, the nano-gyro-shaped structure array is obtained by plating a layer of material in the nanowire array, transferring a layer of microsphere mask, and then selectively etching the plated material and removing the microspheres and alumina filling.

[0011] Furthermore, the nanowires in the nano-gyro-shaped structure array are prepared by electrochemical deposition.

[0012] In a second aspect, the present invention further provides a method for preparing a humidity sensor of a nano-gyro-shaped structure array, comprising:

[0013] Prepare multiple nanowires by electrochemical deposition to form a nanowire array;

[0014] A layer of material is plated in the nanowire array, and a layer of microsphere mask is transferred, and then the plated material is selectively etched and the microspheres and alumina filling are removed to obtain a nano-gyro-shaped structure array;

[0015] A disk array is arranged in the middle of the nano-gyro-shaped structure array, wherein the F_P mode of the nano-gyro-shaped structure array and the disk SPP mode of the disk array are superimposed to form a Fano mode;

[0016] A water-absorbing material is arranged in the nano-gyro-shaped structure array.

[0017] Furthermore, the water absorbing material is filled in the nano-gyro-shaped structure array.

[0018] Furthermore, the water absorbing material is spin-coated on the nanowires in the nano-gyro-shaped structure array.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] The humidity sensor of the nano-gyro-shaped structure array proposed in the present invention and the preparation method thereof are nano-gyro-shaped arrays obtained by selectively etching the materials plated in the nanowire array. The humidity sensor prepared based on the structure array has a Fano mode formed by superposition of the F_P mode and the disk SPP mode, which makes the humidity sensor more sensitive. The water vapor adsorbed in the nanowire array causes the expansion of the water-absorbing material, thereby causing resonance shift to reflect light of different colors, so as to achieve the purpose of judging the humidity in the air. Therefore, the present invention has good humidity sensing performance; because the reflection of light of different colors depends on the change of the resonance mode of the nanowire array, the present invention has better repeatability and higher accuracy; because the materials for producing nanowires are easy to obtain and the manufacturing method is relatively simple, the cost will be cheaper; the nanowire material has the characteristics of high hardness and good elasticity, so the service life of the present invention will be longer; the disk height, diameter, thickness, angle and material in the middle of the nanowire array are adjustable, and the method has better flexibility and wider applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of a nanowire array provided by an embodiment of the present invention;

[0022] Figure 2 is a schematic diagram of a nano-gyro array provided by an embodiment of the present invention;

[0023] Figure 3 It is a schematic diagram of filling a water-absorbing material in a nano-gyro-shaped array provided by an embodiment of the present invention;

[0024] Figure 4 is a schematic diagram of spin coating a layer of water-absorbing material on a nanowire provided by an embodiment of the present invention;

[0025] Figure 5 is a schematic diagram of reflecting light of different colors due to changes in the resonance mode of the nanowire array provided by an embodiment of the present invention;

[0026] Figure 6 It is a schematic diagram of judging the humidity in the air according to reflected light of different colors provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0027] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0028] Example:

[0029] like Figure 1-Figure 6 As shown, a humidity sensor of a nano-gyro-shaped structure array and a preparation method thereof, the method comprising:

[0030] A transition layer / gold / aluminum film is plated on a flat or smooth curved substrate, anodized and expanded to form a void array, electroplated to form a metal / semiconductor nanowire array, the upper surface is smoothed by etching or polishing, the alumina filling matrix is ​​selectively corroded, the filling height is reduced, a layer of material is continuously plated, a layer of microsphere mask is transferred, the plated material is selectively etched, the microspheres and alumina filling are removed, and a nano-gyro-shaped structure array can be obtained. A humidity sensor is prepared based on the nano-gyro-shaped structure array.

[0031] With respect to this method, the specific preparation steps of the present invention are as follows:

[0032] a) Nanowires were prepared by electrochemical deposition. A uniformly distributed, highly ordered porous alumina template with a pore size of 60 nm and a thickness of about 60 μm was prepared by secondary anodic oxidation in a 0.3 mol / L oxalic acid solution, with an aluminum sheet as an anode and a lead plate as a cathode, an oxidation voltage of 40 V, and a temperature of about 0°C. Before preparing the nanowire array by electrochemical deposition, a layer of platinum of about 200 nm was sputtered on one side of the anodic aluminum oxide (AAO) template by a magnetron sputtering instrument as a cathode for electrochemical deposition, and a high-purity graphite plate was used as an anode. The experimental electrolyte was a mixture of 1 g / L H 2 O 3 4 and 20 g / L H 3 BO 3 . At room temperature, the solution pH was fixed at 3, the deposition frequency was set to 25 Hz, and the nanowires were prepared under the condition of a deposition voltage of 3 V. The prepared nanowire array is as shown in FIG. Figure 1 shown.

[0033] b) Plating a layer of material in the nanowire array and transferring a layer of microsphere mask, selectively etching the plated material and removing the microspheres and alumina filling to obtain a nano-gyro array, the diameter of the thin disk array in the middle of the nanowire array is 20nm-80nm, the height of the disk in the middle is adjustable, the diameter is adjustable, the thickness is adjustable, the angle is adjustable, and the material is adjustable, such as Figure 2 shown.

[0034] c) Preparation of humidity sensor based on nano-gyro array.

[0035] d) The Fabry-Perot (F_P) mode induced by the nanowire array and the surface plasmon polariton (SPP) mode of the central disk array are superimposed to form the Fano resonance (Fano) mode. The sensitivity of the humidity sensor is enhanced through the two modes and their superposition state.

[0036] e) When the humidity in the air is high, water-absorbing materials are filled in the nanowire array, such as Figure 3As shown; when the humidity in the air is low, a layer of water-absorbing material is spin-coated on the nanowire, such as Figure 4 shown.

[0037] f) By absorbing water vapor in the air, the water-absorbing material changes, changing the resonant mode of the nanowire array, thereby reflecting light of different colors, such as Figure 5 shown.

[0038] g) The humidity in the air can be determined by reflecting different colors of light from the nanowire array, such as Figure 6 shown.

[0039] Matters not covered in the present invention are known technologies. The above embodiments are only for illustrating the technical concept and features of the present invention. The purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly. It cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A humidity sensor with a nano-gyro-shaped structure array, characterized in that: Including can cause F _ P The nano-gyro-shaped structure array has a pattern, and the middle of the nano-gyro-shaped structure array is provided with a disk SPP The disk array of the pattern, the nano-gyroscope-shaped structure array F _ P Pattern and disk array disks SPP Pattern superposition formation Fano The nano-gyro-shaped structure array is also provided with a water-absorbing material, and the water-absorbing material changes the resonance mode of the nano-gyro-shaped structure array by changing its own water absorption in air with different humidity, thereby making the nano-gyro-shaped structure array reflect light of different colors under illumination.

2. The humidity sensor of the nano-gyro-shaped structure array according to claim 1 is characterized in that: The water absorbing material is filled in the nano-gyro-shaped structure array.

3. The humidity sensor of the nano-gyro-shaped structure array according to claim 1 is characterized in that: The water absorbing material is spin-coated on the nanowires in the nano-gyro-shaped structure array.

4. The humidity sensor of the nano-gyro-shaped structure array according to claim 1 is characterized in that: The diameter of the thin disk of the disk array of the nano-gyro-shaped structure array part is 20 nm -80 nm .

5. The humidity sensor of the nano-gyro-shaped structure array according to claim 1, characterized in that: A plurality of nanowires are prepared by electrochemical deposition, a nanowire array is prepared by using a porous alumina template, a layer of material is plated in the nanowire array, and a layer of microsphere mask is transferred, and a nano-gyro-shaped array is obtained by selectively etching the plated material and removing the microspheres and alumina filling.

6. The humidity sensor of the nano-gyro-shaped structure array according to claim 1, characterized in that: The nanowires in the nano-gyro-shaped structure array are prepared by an electrochemical deposition method.

7. A method for preparing a humidity sensor of a nano-gyro-shaped structure array, characterized in that: include: Multiple nanowires were prepared by electrochemical deposition, and nanowire arrays were prepared using porous alumina templates; A layer of material is plated in the nanowire array, and a layer of microsphere mask is transferred, and a nano-gyro-shaped array is obtained by selectively etching the plated material and removing the microspheres and alumina filling; A disk array is arranged in the middle of the nano-gyro-shaped structure array, wherein the nano-gyro-shaped structure array F _ P Pattern and disk array disks SPP Pattern superposition formation Fano model; A water-absorbing material is arranged in the nano-gyro-shaped structure array.

8. The method for preparing a humidity sensor of a nano-gyro-shaped structure array according to claim 7, characterized in that: The water absorbing material is filled in the nano-gyro-shaped structure array.

9. The method for preparing a humidity sensor of a nano-gyro-shaped structure array according to claim 7, characterized in that: The water absorbing material is spin-coated on the nanowires in the nano-gyro-shaped structure array.

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