A vacuum plasma cleaning machine

Abstract

The present invention relates to a vacuum plasma cleaning machine, comprising a housing, a main coil installed in the housing, a quartz vacuum cavity, a radio frequency power generator, a secondary coil, a locking ring, a metal body inductor, a reciprocating electrical appliance, a vacuum pump, and a human-machine interactive controller; the main coil is wound on the quartz vacuum cavity, the quartz vacuum cavity is connected to the vacuum pump through an air pipe, the main coil is electrically connected to the radio frequency power generator, and the main coil is electrically connected to the secondary coil; the secondary coil cooperates with the metal body inductor to generate radio frequency high-frequency oscillations that affect the main coil to generate glow light or plasma motion trajectory, and the metal body inductor is installed at the bottom of the reciprocating electrical appliance. It avoids organic solvents from corroding workers; it can clean heterogeneous or honeycomb-shaped objects; the cleaning effect can be achieved within a few minutes, or as little as a few seconds, saving time; no harmful substances are emitted to avoid waste generation; it can clean oxides, metals, polymers and other materials.

Description

Technical Field

[0001] The invention belongs to the technical field of plasma cleaning agents, and in particular relates to a vacuum plasma cleaning machine. Background Art

[0002] Plasma is a state of matter. By artificially creating an electric field and altering the positive and negative pressures in the space where the field exists, high-speed active radicals, ions, electrons, atoms, photons, and the like can be produced, perceived as glow or plasma; these substances generally remain electrically neutral. A vacuum plasma cleaner uses radio frequency power to generate these free-state components within a vacuum chamber, which then contact and bombard the surface of the object being treated. It can be used for organic film removal, interface activation, fine grinding, and reducing interface damage. It achieves the necessary cleanliness, hydrophilicity, and wettability of orthopedic or dental implants and brackets, as well as surface removal of organic matter for cleaning and modification. Summary of the Invention

[0003] In view of this, an object of the present invention is to provide a vacuum plasma cleaning machine that avoids corrosion of workers by organic solvents, enables rapid cleaning, and saves time.

[0004] In order to achieve the above purpose, the technical solutions adopted are as follows:

[0005] A vacuum plasma cleaning machine comprises a housing, including: a main coil, a quartz vacuum chamber, a radio frequency power generator, a secondary coil, a lock ring, a metal body inductor, a reciprocating electrical appliance, a vacuum pump, and a human-machine interactive controller mounted in the housing;

[0006] The main coil is wound on a quartz vacuum cavity, which is connected to a vacuum pump through an air pipe. The main coil is electrically connected to a radio frequency power generator, and the main coil is electrically connected to a secondary coil. The radio frequency power generator, the reciprocating electrical appliance, and the vacuum pump are electrically connected to a human-computer interaction controller.

[0007] The secondary coil cooperates with the metal inductor to generate radio frequency high-frequency oscillation to affect the main coil to generate glow light or plasma movement trajectory. The metal inductor is installed at the bottom of the reciprocating electrical appliance, and the reciprocating electrical appliance drives the metal inductor to do reciprocating motion.

[0008] As a further improvement of the present invention: the secondary coil is arranged below the metal inductor, an insulating baffle is provided between the metal inductor and the secondary coil, one end of the secondary coil close to the insulating baffle is a locking ring integrally formed with the secondary coil, and an isolation plate is installed at the other end of the secondary coil, and a fan is installed on the isolation plate;

[0009] Furthermore, the ring diameter of the locking ring is >3 mm.

[0010] As a further improvement of the present invention: the secondary coil is passed through the metal inductor, the lower end of the secondary coil is a locking ring integrally formed therewith, an isolation plate is provided at one end of the secondary coil with the locking ring, and a fan is installed on the other side of the isolation plate.

[0011] As a further improvement of the present invention: the air pipe between the quartz vacuum chamber and the vacuum pump is connected to a first solenoid valve for controlling the entry and exit of the quartz vacuum chamber and a second solenoid valve for opening and closing the vacuum pump, and the first solenoid valve and the second solenoid valve are electrically connected to the human-computer interaction controller.

[0012] As a further improvement of the present invention: one end of the quartz vacuum chamber connected to the shell is sealed with a vacuum chamber cover, and the vacuum chamber cover is provided with a window.

[0013] As a further improvement of the present invention: the quartz vacuum chamber is connected to a voltage control installed on the housing, and the voltage control is electrically connected to a human-computer interaction controller.

[0014] As a further improvement of the present invention: the power frequency of the radio frequency power generator is 13.56 MHz to 2.45 GHz.

[0015] The beneficial effects of the present invention are:

[0016] The present invention prevents organic solvents from corroding workers; can clean heterogeneous or honeycomb-shaped objects; can achieve cleaning effects within a few minutes, or as little as a few seconds, saving time; does not emit harmful substances and avoids waste generation; can clean oxides, metals, polymers and other materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which constitute part of this application, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 It is a schematic diagram of the top view of the structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the front view structure of the present invention;

[0020] Figure 3 Schematic diagram of the assembly of the secondary coil and the metal inductor in the first embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the assembly of the secondary coil and the metal inductor in the second embodiment of the present invention;

[0022] Figure 5 Schematic diagram of the structure of the lock ring in the present invention. DETAILED DESCRIPTION

[0023] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0024] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0025] Example 1

[0026] Please refer to Figure 1 、 2 , 3, 5, a vacuum plasma cleaning machine, comprising a shell 1, including: a main coil 2 installed in the shell 1, a quartz vacuum cavity 3, a radio frequency power generator 4, a secondary coil 5, a lock ring 11, a metal body inductor 6, a reciprocating electrical appliance 7, a vacuum pump 8 and a human-computer interaction controller 9; wherein, the quartz vacuum cavity 3 generates a cavity for glow or plasma, adopts a quartz cavity or a metal cavity, the power supply frequency of the radio frequency power generator 4 is 13.56MHz~2.45GHz, the main coil 2 is used to generate radio frequency high-frequency oscillation to excite and generate glow or plasma, and the combination of the metal body inductor 6 and the secondary coil 5 utilizes the strength of the magnetic field of the secondary coil 5 and the electric field induction generated by the metal body to change the macroscopic pulsation of the glow or plasma generated by the main coil 2;

[0027] The main coil 2 is wound on a quartz vacuum chamber 3, which is connected to a vacuum pump 8 through an air pipe. The main coil 2 is electrically connected to a radio frequency power generator 4, and the main coil 2 is electrically connected to a secondary coil 5. The radio frequency power generator 4, the reciprocating electrical appliance 7, and the vacuum pump 8 are electrically connected to a human-computer interaction controller 9.

[0028] The secondary coil 5 is arranged below the metal inductor 6, and an insulating baffle 10 is provided between the metal inductor 6 and the secondary coil 5. One end of the secondary coil 5 close to the insulating baffle 10 is a locking ring 11 integrally formed with it. An isolation plate 12 is installed at the other end of the secondary coil 5, and a fan 13 is installed on the other side of the isolation plate 12. The fan 13 is used to cool the secondary coil 5. In addition, the ring diameter of the locking ring is >3mm.

[0029] The air pipe between the quartz vacuum chamber 3 and the vacuum pump 8 is connected to a first solenoid valve 14 for controlling the entry and exit of the quartz vacuum chamber 3 and a second solenoid valve 15 for opening and closing the vacuum pump 8. The first solenoid valve 14 cuts off or prevents the gas from entering or exiting the quartz vacuum chamber 3, which is equivalent to an electromagnetic three-way valve. The second solenoid valve 15 is an electromagnetic stop valve. The first solenoid valve 14 and the second solenoid valve 15 are electrically connected to the human-computer interaction controller 9; one end of the quartz vacuum chamber 3 connected to the shell 1 is sealed with a vacuum chamber cover 16, and a window 17 is provided on the vacuum chamber cover 16. The window 17 is used to observe the interior of the quartz vacuum chamber 3; the quartz vacuum chamber 3 is connected to a pressure control 18 installed on the shell 1, and the pressure control 18 is electrically connected to the human-computer interaction controller 9. The pressure control 18 is used to detect the pressure of the quartz vacuum chamber 3.

[0030] Example 2

[0031] Please refer to Figure 1 、 2 , 4, 5, a vacuum plasma cleaning machine, comprising a shell 1, including: a main coil 2 installed in the shell 1, a quartz vacuum cavity 3, a radio frequency power generator 4, a secondary coil 5, a metal body inductor 6, a reciprocating electrical appliance 7, a vacuum pump 8 and a human-computer interaction controller 9; wherein, the quartz vacuum cavity 3 generates a cavity for glow or plasma, adopts a quartz cavity or a metal cavity, the power frequency of the radio frequency power generator 4 is 13.56MHz~2.45GHz, the main coil 2 is used to generate radio frequency high-frequency oscillation to excite and generate glow or plasma, and the combination of the metal body inductor 6 and the secondary coil 5 utilizes the strength of the magnetic field of the secondary coil 5 and the electric field induction generated by the metal body to change the main coil 2 to generate the glow or plasma macroscopic pulsation;

[0032] The main coil 2 is wound on a quartz vacuum chamber 3, which is connected to a vacuum pump 8 through an air pipe. The main coil 2 is electrically connected to a radio frequency power generator 4, and the main coil 2 is electrically connected to a secondary coil 5. The radio frequency power generator 4, the reciprocating electrical appliance 7, and the vacuum pump 8 are electrically connected to a human-computer interaction controller 9.

[0033] The secondary coil 5 is sleeved on the metal inductor 6, and the metal inductor 6 is installed at the lower part of the reciprocating electrical appliance 7. The reciprocating electrical appliance 7 drives the metal inductor 6 to perform reciprocating motion; the tail end of the secondary coil 5 is a locking ring 11 integrally formed with it, and an isolation plate 12 is installed at the tail end of the secondary coil 5. A fan 13 is installed on the other side of the isolation plate 12. The fan 13 is used to cool the secondary coil 5. In addition, the ring diameter of the locking ring is >3mm.

[0034] The air pipe between the quartz vacuum chamber 3 and the vacuum pump 8 is connected to a first solenoid valve 14 for controlling the entry and exit of the quartz vacuum chamber 3 and a second solenoid valve 15 for opening and closing the vacuum pump 8. The first solenoid valve 14 cuts off or prevents the gas from entering or exiting the quartz vacuum chamber 3, which is equivalent to an electromagnetic three-way valve. The second solenoid valve 15 is an electromagnetic stop valve. The first solenoid valve 14 and the second solenoid valve 15 are electrically connected to the human-computer interaction controller 9; one end of the quartz vacuum chamber 3 connected to the shell 1 is sealed with a vacuum chamber cover 16, and a window 17 is provided on the vacuum chamber cover 16. The window 17 is used to observe the interior of the quartz vacuum chamber 3; the quartz vacuum chamber 3 is connected to a pressure control 18 installed on the shell 1, and the pressure control 18 is electrically connected to the human-computer interaction controller 9. The pressure control 18 is used to detect the pressure of the quartz vacuum chamber 3.

[0035] Working principle:

[0036] The program is automatically set by the human-machine interactive controller 9 / PLC combined with the pressure control 18 device. The cleaning time is set according to the verification results and can be set via the touch screen.

[0037] Steps:

[0038] Open the vacuum chamber lid 16 and place the parts to be cleaned onto the tray within the quartz vacuum chamber 3. Close the vacuum chamber lid 16. Set the cleaning time on the human-machine interface controller 9 / PLC. Start the vacuum pump 8, first solenoid valve 14, and second solenoid valve 15. When the negative pressure reaches the value set by the pressure control 18, the output switch primary coil 2 is energized and simultaneously generates a glow or plasma. The metal inductor 6 and the secondary coil 5, with a locking ring 11 integrally formed at the end, combine to form a combination. The magnetic field of the secondary coil 5 and locking ring 11, combined with the electric field generated by the metal inductor 6, alter the macroscopic pulsation of the glow or plasma generated by the primary coil 2, performing a pulsating flushing cleaning of the parts to be cleaned, such as implants and orthodontic brackets. After the set time is reached, the vacuum pump 8, first solenoid valve 14, and second solenoid valve 15 are sequentially deactivated, completing the equipment operation. Open the vacuum chamber lid 16 and remove the cleaned items.

[0039] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A vacuum plasma cleaning machine, comprising a housing, characterized in that: include: The main coil, quartz vacuum chamber, radio frequency power generator, auxiliary coil, lock ring, metal body sensor, reciprocating electrical appliance, vacuum pump and human-machine interactive controller are installed in the shell; The main coil is wound on a quartz vacuum cavity, which is connected to a vacuum pump through an air pipe. The main coil is electrically connected to a radio frequency power generator, and the main coil is electrically connected to a secondary coil. The radio frequency power generator, the reciprocating electrical appliance, and the vacuum pump are electrically connected to a human-computer interaction controller. The secondary coil cooperates with the metal inductor to generate radio frequency high-frequency oscillation to affect the main coil to generate glow light or plasma motion trajectory. The metal inductor is installed at the bottom of the reciprocating electrical appliance, and the reciprocating electrical appliance drives the metal inductor to do reciprocating motion. The secondary coil is arranged below the metal inductor, and an insulating baffle is arranged between the metal inductor and the secondary coil. One end of the secondary coil close to the insulating baffle is a locking ring integrally formed with it, and an isolation plate is installed at the other end of the secondary coil, and a fan is installed on the other side of the isolation plate.

2. A vacuum plasma cleaning machine, comprising a housing, characterized in that: include: The main coil, quartz vacuum chamber, radio frequency power generator, auxiliary coil, lock ring, metal body sensor, reciprocating electrical appliance, vacuum pump and human-machine interactive controller are installed in the shell; The main coil is wound on a quartz vacuum cavity, which is connected to a vacuum pump through an air pipe. The main coil is electrically connected to a radio frequency power generator, and the main coil is electrically connected to a secondary coil. The radio frequency power generator, the reciprocating electrical appliance, and the vacuum pump are electrically connected to a human-computer interaction controller. The secondary coil cooperates with the metal inductor to generate radio frequency high-frequency oscillation to affect the main coil to generate glow light or plasma motion trajectory. The metal inductor is installed at the bottom of the reciprocating electrical appliance, and the reciprocating electrical appliance drives the metal inductor to do reciprocating motion. The auxiliary coil is passed through the metal inductor, and the lower end of the auxiliary coil is a lock ring formed integrally with it. An isolation plate is provided at one end of the auxiliary coil provided with the lock ring, and a fan is installed on the isolation plate; Furthermore, the ring diameter of the locking ring is >3 mm.

3. A vacuum plasma cleaning machine according to any one of claims 1 or 2, characterized in that: The air pipe between the quartz vacuum chamber and the vacuum pump is connected to a first solenoid valve for controlling the entry and exit of the quartz vacuum chamber and a second solenoid valve for opening and closing the vacuum pump. The first solenoid valve and the second solenoid valve are electrically connected to the human-computer interaction controller.

4. The vacuum plasma cleaning machine according to claim 3, characterized in that: One end of the quartz vacuum cavity connected to the shell is sealed with a vacuum cavity cover, and a window is provided on the vacuum cavity cover.

5. The vacuum plasma cleaning machine according to claim 4, characterized in that: The quartz vacuum cavity is communicated with a pressure control device installed on the housing, and the pressure control device is electrically connected to a human-computer interaction controller.

6. A vacuum plasma cleaning machine according to claim 1 or 2, characterized in that: The power frequency of the radio frequency power generator is 13.56 MHz to 2.45 GHz.

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