Planar XY micro-motion device of coating thickness gauge

Abstract

The present invention provides a planar XY micro-motion device for a coating thickness gauge, comprising: a sample carrier, a slide seat, a slide middle seat and a slide base, wherein the slide middle seat is slidably connected to the slide base in the X direction, and the slide carrier is slidably connected to the slide middle seat in the Y direction; an X-axis transmission positioning seat is provided on one side of the slide base, and an X-axis screw nut seat is provided on one side of the slide middle seat. The sample carrier is mounted on the slide seat, which enables an X-ray fluorescence spectrometry coating detector to accurately locate the position of a small sample to be inspected, thereby improving detection efficiency. The planar XY micro-motion mechanical device in the present invention can be conveniently installed on a coating thickness gauge, and the position of the item to be inspected can be adjusted after closing the instrument protective cover, thereby ensuring the controllability of the position of the item to be inspected while protecting operational safety.

Description

Technical Field

[0001] The invention relates to the field of coating detection using an X-ray fluorescence spectrometer, and in particular to a planar XY micro-motion device of a coating thickness gauge. Background Art

[0002] Electroplating is an essential, fundamental process in the national economy. Improving the capabilities of electroplating companies requires prioritizing their hardware, and internal control and testing are essential. Electroplating is the process of depositing a metal or metal compound onto a substrate through electrochemical methods. The basic raw materials for electroplating are zinc, nickel, copper, chromium, and heavy metals such as gold and silver. Coating measurement has become a crucial process for finished product quality inspection in the metalworking industry, essential for achieving high-quality product standards. Currently, coating thickness measurement is widely used both domestically and internationally according to unified international standards. The selection of non-destructive testing methods and instruments for coatings has become increasingly important with advances in research into the physical properties of materials.

[0003] However, the planar XY micro-motion device of the prior art coating thickness gauge adopts a structure in which the control knobs of each axis are coaxial with each axis, or the control knobs are perpendicular to both axes at the same time, which is not conducive to arrangement on the X-ray fluorescence spectrometry coating detector. Summary of the Invention

[0004] The present invention provides a planar XY micro-motion device for a coating thickness gauge to solve at least one of the above technical problems.

[0005] To solve the above problems, as one aspect of the present invention, a planar XY micro-motion device for a coating thickness gauge is provided, comprising: a sample carrier, a slide seat, a slide middle seat, and a slide base, wherein the slide middle seat is slidably connected to the slide base in the X direction, and the slide seat is slidably connected to the slide middle seat in the Y direction;

[0006] An X-axis transmission positioning seat is provided on one side of the slide base, an X-axis screw nut seat is provided on one side of the slide middle seat, and the sample carrying platform is installed on the slide seat;

[0007] One end of the X-axis transmission screw is pivotally connected to one end of the X-axis transmission positioning seat, the other end of the X-axis transmission positioning seat is pivotally mounted with a Y-axis transmission spline shaft, the other end of the X-axis transmission screw is pivotally inserted into the Y-axis transmission spline shaft, the X-axis screw nut seat is mounted on the X-axis transmission screw, and the Y-axis transmission spline shaft is mounted with a Y-axis transmission bevel gear;

[0008] A Y-axis transmission positioning seat is provided on the other side of the slide middle seat, and a Y-axis screw nut seat is provided on one side of the slide seat;

[0009] A Y-axis transmission screw is pivotally mounted on the Y-axis transmission positioning seat, the Y-axis screw nut seat is mounted on the Y-axis transmission screw, and one end of the Y-axis transmission screw is provided with a Y-axis driven bevel gear for cooperating with the Y-axis transmission bevel gear;

[0010] The X-axis transmission screw is arranged perpendicular to the Y-axis transmission screw, one end of the X-axis transmission screw is provided with an X-axis rotation driving part, and the Y-axis transmission spline shaft is provided with a Y-axis rotation driving part.

[0011] Preferably, the slide middle seat is installed on the slide base through an X-direction cross ball linear guide, and the slide upper seat is installed on the slide middle seat through a Y-direction cross ball linear guide.

[0012] Preferably, two first angular contact ball bearings for connecting to the X-axis transmission screw are installed back to back in one bearing hole of the X-axis transmission locating seat, and two first deep groove ball bearings for connecting to the Y-axis transmission spline shaft are installed in another bearing hole of the X-axis transmission locating seat.

[0013] Preferably, an X-axis trapezoidal nut is provided at one end of the X-axis screw nut seat away from the Y-axis transmission bevel gear, and the X-axis trapezoidal nut is threadedly connected to the X-axis transmission screw and connected to the X-axis screw nut seat through a screw.

[0014] Preferably, a self-lubricating bearing is provided in the bearing hole of the X-axis screw nut seat, and the Y-axis transmission spline shaft is sequentially installed with a Y-axis transmission bevel gear, a wave washer, and a damping fixed-pitch transmission spline sleeve, and one end of the damping fixed-pitch transmission spline sleeve is inserted into the self-lubricating bearing.

[0015] Preferably, two second angular contact ball bearings for connecting to the Y-axis transmission screw are installed face to face on the Y-axis transmission positioning seat away from the X-axis transmission screw, and a second deep groove ball bearing for connecting to the Y-axis transmission screw is installed on the Y-axis transmission positioning seat close to the X-axis transmission screw.

[0016] Preferably, a Y-axis trapezoidal nut is provided at one end of the Y-axis screw nut seat away from the Y-axis driven bevel gear, and the Y-axis trapezoidal nut is threadedly connected to the Y-axis transmission screw and connected to the Y-axis screw nut seat through a screw.

[0017] Preferably, a preload spring and an anti-backlash nut are sequentially arranged inside the Y-axis screw nut seat.

[0018] Preferably, the sample carrier is fastened by aligning the mounting hole on the side of the slide seat with a cross countersunk screw, and a carrier film, a carrier ring, and a carrier film pressure ring are provided in the positioning hole of the sample carrier, wherein the carrier film is placed between the carrier ring and the carrier film pressure ring.

[0019] Preferably, an X-axis shield is installed on the X-axis transmission positioning seat, and a Y-axis shield is installed on the Y-axis transmission positioning seat.

[0020] The planar XY micro-motion mechanism of this invention enables X-ray fluorescence spectrometry coating detectors to precisely locate the position of small samples under inspection. Especially when multi-point testing is required, the XY micro-motion mechanism can be used to move the inspection area of ​​the object under inspection without repeatedly opening the cover, achieving precise positioning of multiple points at any position and improving inspection efficiency. The planar XY micro-motion mechanism of this invention can be conveniently installed on a coating thickness gauge. After closing the instrument's protective cover, the position of the object under inspection can be adjusted, ensuring controllable positioning of the object under inspection while protecting operational safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Schematically shows an exploded view of the planar XY micro-motion device of the present invention;

[0022] Figure 2 Schematically shows a front view of the planar XY micro-motion device of the present invention;

[0023] Figure 3 Schematically shows a top view of the planar XY micro-motion device of the present invention;

[0024] Figure 4 Schematically shows a bottom view of the planar XY micro-motion device of the present invention;

[0025] Figure 5 Schematically shows a cross-sectional view of the planar XY micro-motion device of the present invention;

[0026] Figure 6 The schematic diagram of the structure of the coating thickness gauge is shown schematically;

[0027] Figure 7 The internal structure diagram of the coating thickness gauge is schematically shown.

[0028] : 1. Loading ring; 2. Loading film; 3. Cross countersunk screw; 4. Loading film pressure ring; 5. Sample loading platform; 6. Slide seat; 7. Slide middle seat; 8a. X-direction cross ball linear guide; 8b. Y-direction cross ball linear guide; 9. Slide base; 10. X-axis transmission positioning seat; 11. Angular contact ball bearing preload nut; 12. Angular contact ball bearing pressure cover; 13. X-axis transmission screw; 14a. X-axis trapezoidal nut; 14b. Y-axis trapezoidal nut; 15. X-axis screw nut seat; 16. Flanged self-lubricating bearing; 17. Damping fixed-distance transmission spline sleeve; 18. Wave washer; 19. Y-axis transmission bevel gear; 20. Y-axis transmission spline shaft; 21. X-axis shield; 22. Y-axis Rotation drive unit; 23. X-axis rotation drive unit; 24. Y-axis driven bevel gear; 25. Y-axis protective cover; 26. Y-axis transmission positioning seat; 27. Y-axis screw nut seat; 28. Y-axis transmission screw; 29. ​​Slide fixing plate; 30. Hexagon socket cylindrical head screw; 31. Second angular contact ball bearing; 32. Preload spring; 33. Anti-backlash nut; 34a. First deep groove ball bearing; 34b. Second deep groove ball bearing; 35. Shaft retaining ring; 36. Deep groove ball bearing preload nut; 37. Deep groove ball bearing pressure cover; 38. Corrugated washer; 39. Hexagon socket countersunk screw; 40. First angular contact ball bearing; 41. Coating thickness gauge; 42. Instrument protective cover; 43. Instrument body; 44. Planar XY micro-motion mechanical device. DETAILED DESCRIPTION

[0029] The following is a detailed description of embodiments of the present invention, but the present invention can be implemented in many different ways as defined and covered by the claims.

[0030] As one aspect of the present invention, a planar XY micro-motion device for a coating thickness gauge is provided, comprising: a sample carrier 5, a slide upper base 6, a slide middle base 7, and a slide base 9. The slide middle base 7 is slidably connected to the slide base 9 in the X direction, and the slide upper base 6 is slidably connected to the slide middle base 7 in the Y direction. The planar XY micro-motion device 43 is mounted on the surface of a coating thickness gauge 41 by the slide base 9 and the slide mount 29 via hexagon socket head screws 27 and hexagon socket countersunk screws 39.

[0031] An X-axis transmission positioning seat 10 is provided on one side of the slide base 9, an X-axis screw nut seat 15 is provided on one side of the slide middle seat 7, and the sample carrier 5 is installed on the slide base 6;

[0032] One end of the X-axis transmission screw 13 is pivotally connected to one end of the X-axis transmission positioning seat 10, and the other end of the X-axis transmission positioning seat 10 is pivotally mounted with a Y-axis transmission spline shaft 20. The other end of the X-axis transmission screw 13 is pivotally inserted into the Y-axis transmission spline shaft 20. The X-axis screw nut seat 15 is mounted on the X-axis transmission screw 13, and the Y-axis transmission spline shaft 20 is mounted with a Y-axis transmission bevel gear 19.

[0033] A Y-axis transmission positioning seat 26 is provided on the other side of the slide middle seat 7, and a Y-axis screw nut seat 27 is provided on one side of the slide upper seat 6;

[0034] A Y-axis transmission screw 28 is pivotally mounted on the Y-axis transmission positioning seat 26, and the Y-axis screw nut seat 27 is mounted on the Y-axis transmission screw 28. One end of the Y-axis transmission screw 28 is provided with a Y-axis driven bevel gear 24 for cooperating with the Y-axis transmission bevel gear 19;

[0035] The X-axis transmission screw 13 is perpendicular to the Y-axis transmission screw 28 . An X-axis rotation driving unit 23 is provided at one end of the X-axis transmission screw 13 . A Y-axis rotation driving unit 22 is provided on the Y-axis transmission spline shaft 20 .

[0036] The X-axis rotation drive unit 23 and the Y-axis rotation drive unit 22 can use manual or electric knobs. The Y-axis rotation drive unit 22 is coaxial with the X-axis rotation drive unit 23, and the knob axis is coaxial with the X-axis and perpendicular to the Y-axis, or coaxial with the Y-axis and perpendicular to the X-axis. The knob does not move in any direction when rotated. Rotating the Y-axis rotation drive unit 22 can drive the slide seat 6 in the planar XY micro-motion mechanical device to move along the Y-axis.

[0037] Preferably, the slide middle seat 7 is installed on the slide base 9 through an X-direction cross ball linear guide 8a, and the slide upper seat 6 is installed on the slide middle seat 7 through a Y-direction cross ball linear guide 8b.

[0038] Preferably, two first angular contact ball bearings 40 for connecting to the X-axis transmission screw 13 are installed back-to-back in one bearing hole of the X-axis transmission positioning seat 10, and two first deep groove ball bearings 34a for connecting to the Y-axis transmission spline shaft 20 are installed in the other bearing hole of the X-axis transmission positioning seat 10. The X-axis transmission positioning seat 10 and the X-axis screw nut seat 15 are respectively fastened to the side of the slide base 9 and the side of the slide center seat 7 by screws and pins. The first angular contact ball bearings 40 are installed back-to-back at one end of the bearing hole of the X-axis transmission positioning seat 10, serving as the positioning end of the X-axis transmission screw 13, and two first deep groove ball bearings 34a are installed at the other end, serving as the support end of the Y-axis transmission spline shaft 20. One end of the X-axis transmission screw 13 is positioned and supported by the back-to-back first angular contact ball bearings 40, the angular contact ball bearing gland 11, and the angular contact ball bearing preload nut 12, allowing for smooth rotation.

[0039] Preferably, an X-axis trapezoidal nut 14a is provided at the end of the X-axis screw nut holder 15 away from the Y-axis bevel gear 19. This X-axis trapezoidal nut 14a is threadedly connected to the X-axis drive screw 13 and screwed to the X-axis screw nut holder 15. After the X-axis trapezoidal nut 14a is screwed into the X-axis drive screw 13, it is inserted into the X-axis screw nut holder 15 and tightened with screws. By rotating the X-axis rotation drive unit 23 mounted on the other end of the X-axis drive screw 13, the XY-axis slide can be controlled to move smoothly in the X-axis direction.

[0040] Preferably, a self-lubricating bearing 16 is provided in the bearing hole of the X-axis screw nut seat 15. A Y-axis transmission bevel gear 19, a wave washer 18, and a damping and spacing transmission spline sleeve 17 are sequentially mounted on the Y-axis transmission spline shaft 20. One end of the damping and spacing transmission spline sleeve 17 is inserted into the self-lubricating bearing 16. The damping and spacing transmission spline sleeve 17, the self-lubricating bearing 16, and the wave washer 18 ensure that when the X-axis rotation drive unit 23 disposed on the X-axis transmission screw 13 drives the slide center seat 7 along the X-axis, the Y-axis driven bevel gear 24 and the Y-axis transmission bevel gear 29 always maintain normal meshing. The wave washer 18 provides preload to the screw pair to eliminate screw pair clearance.

[0041] Among them, the damping and spacing spline sleeve 17 is installed in the self-lubricating bearing 26, and the Y-axis transmission bevel gear 19 is inserted into the Y-axis transmission spline shaft 20 positioned in the X-axis transmission positioning seat 10, and the end face is pre-loaded axially positioned with the damping and spacing spline sleeve 17 through the corrugated gasket 18. When the Y-axis rotation drive part 22 is rotated, the spline pair can provide torque, and when the X-axis rotation drive part 23 is rotated, the spline pair can slide smoothly.

[0042] Preferably, two second angular contact ball bearings 31 for connecting to the Y-axis drive screw 28 are mounted face-to-face on the Y-axis drive positioning seat 26 away from the X-axis drive screw 13. A second deep groove ball bearing 34b for connecting to the Y-axis drive screw 28 is mounted on the Y-axis drive positioning seat 26 near the X-axis drive screw 13. One end of the Y-axis drive spline shaft 20 is floatingly supported by two second deep groove ball bearings 34b, a wave washer 38, a deep groove ball bearing cover 37, and a deep groove ball bearing preload nut 36, allowing for flexible rotation. A self-lubricating bearing 16 is pressed into the bearing hole of the X-axis screw nut seat 15 to secure it. The Y-axis drive bevel gear 19, wave washer 18, and damping and spacing transmission spline sleeve 17 are sequentially installed onto the Y-axis drive spline shaft 20, and the other end of the damping and spacing transmission sleeve 17 is inserted into the self-lubricating bearing 16, allowing it to rotate stably and slide smoothly along the X-axis. One end of the Y-axis transmission locator 26 is mounted with a second angular contact ball bearing 31 facing each other, which serves as the positioning end for the Y-axis transmission screw 28. Another end is mounted with a second deep groove ball bearing 34b, which serves as the support end for the Y-axis transmission screw 28. One end of the Y-axis transmission screw 28 is positioned and supported by the second angular contact ball bearing 31 facing each other, the angular contact ball bearing gland 12, and the angular contact ball bearing preload nut 11.

[0043] Preferably, a Y-axis trapezoidal nut 14b is provided at the end of the Y-axis screw nut seat 27 away from the Y-axis driven bevel gear 24. The Y-axis trapezoidal nut 14b is threadedly connected to the Y-axis transmission screw 28 and is connected to the Y-axis screw nut seat 27 via a screw. Preferably, a preload spring 32 and an anti-backlash nut 33 are sequentially provided inside the Y-axis screw nut seat.

[0044] After the Y-axis trapezoidal nut 14b is screwed into the Y-axis transmission screw 28, it is inserted into the Y-axis screw nut seat 27 and tightened with screws, and then the preload spring 32 and the anti-backlash nut 33 are installed in sequence to the other side of the trapezoidal nut 11, adjusted to the appropriate position and the preload of the compression spring is controlled, and the Y-axis transmission screw 28 is rotated so that it engages normally with the anti-backlash nut 33. The other end of the Y-axis transmission screw 28 is inserted into the second deep groove ball bearing 34b installed on the Y-axis transmission positioning seat 26, and the shaft retaining ring 35 is clamped into place to limit the axial displacement of the second deep groove ball bearing 34b. The end is installed into the Y-axis driven bevel gear 24. Screwing the Y-axis rotation drive unit 22 installed on the Y-axis transmission spline shaft 20 can control the smooth movement of the XY-axis slide in the Y-axis direction.

[0045] Preferably, the sample carrier 5 is fastened to the mounting hole on the side of the slide base 6 by aligning the cross countersunk screw 3. The positioning hole of the sample carrier 5 is provided with a carrier film 2, a carrier ring 1, and a carrier film pressure ring 4, wherein the carrier film 2 is placed between the carrier ring 1 and the carrier film pressure ring 4. The preload spring 32 is provided in the screw assembly to eliminate the backlash of the screw assembly.

[0046] The sample carrier 5 is secured to the side mounting holes of the slide base 6 using M2.5x5 Phillips countersunk screws 3. The carrier film 2 is placed between the carrier ring 1 and the carrier film pressure ring 4. The carrier film 2 is tensioned and smoothly pressed into the carrier film pressure ring 4, securing it flatly within the carrier ring 1. The sample carrier 5 is then aligned with its positioning holes and placed into the carrier ring 1. The X-axis shield 21 and Y-axis shield 25 are respectively installed on the X-axis transmission positioning base 10 and the Y-axis transmission positioning base 26, and secured with M2.5x5 Phillips countersunk screws 3.

[0047] Preferably, an X-axis shield 21 is installed on the X-axis transmission positioning seat 10, and a Y-axis shield 25 is installed on the Y-axis transmission positioning seat.

[0048] In the present invention, the X-axis slide mechanism includes: a slide base and a slide middle seat, which are connected by an X-direction cross ball linear guide and can move along the X-axis direction. The X-axis transmission positioning seat arranged on the slide base is equipped with a screw transmission pair, which is supported and positioned by an angular contact ball shaft, a bearing cover and a bearing pre-tightening nut. It is connected to the X-axis screw nut seat fixed on the slide, and the X-axis rotation drive part fixed on the other end of the X-axis transmission screw is rotated to realize the movement of the X-axis slide along the X-axis direction.

[0049] The Y-axis slide mechanism includes: a slide middle seat and a slide seat, which are connected by a Y-direction cross ball linear guide and can move along the Y-axis direction. The Y-axis transmission positioning seat set on the slide middle seat is equipped with a screw transmission pair, which is supported and positioned by an angular contact ball shaft, a deep groove ball bearing, a bearing pressure cover and a bearing pre-tightening nut. It is connected to the Y-axis screw nut seat fixed on the slide seat. A Y-axis driven bevel gear is installed on one end of the X-axis transmission screw, which is connected to the X-axis transmission positioning seat through a deep groove ball bearing, a bearing pressure cover and a bearing The Y-axis transmission bevel gear on the Y-axis transmission spline shaft supported by the pre-tightening nut and the wave washer is meshed, and the inner hole of the Y-axis transmission bevel gear is processed into a spline sleeve and matched with the Y-axis transmission spline shaft to form a spline pair. The end face of the Y-axis transmission gear is axially limited by the damping fixed-pitch transmission spline sleeve and the wave washer, and one end of the damping fixed-pitch transmission spline sleeve is inserted into the flanged self-lubricating bearing arranged in the X-axis screw nut seat. The Y-axis rotation drive part rotatably fixed on the other end of the Y-axis transmission spline shaft can realize the movement of the Y-axis slide along the Y-axis direction.

[0050] When the coating thickness gauge 41 detects an item, the item to be inspected is placed in the carrying ring 1, the instrument protection cover 42 of the coating thickness gauge 41 is covered, the test program is started normally, the imaging position is observed, and the external X-axis rotation drive unit 23 and the Y-axis rotation drive unit 22 on the rotating plane XY micro-motion mechanical device 41 are used to accurately adjust the position of the item to improve the test accuracy.

[0051] In particular, when inspecting objects below the millimeter level, it is difficult to manually place the objects to be inspected in the exact position. However, the built-in planar XY micro-motion mechanical device 43 of the coating thickness gauge 41 of the present invention can achieve accurate positioning of any point; when multi-point testing is required, there is no need to repeatedly open the cover, and the planar XY micro-motion mechanical device 43 can be used to move the inspection area of ​​the object to be inspected, thereby achieving precise positioning of multiple points at any position, improving detection accuracy and efficiency, and ensuring safety during the test process.

[0052] In the above technical solution, the movement of the planar XY micro-motion mechanical device in the present invention is controlled by two coaxial manual or electric knobs, and the axis direction of the knob is coaxial with the X-axis and perpendicular to the Y-axis, or coaxial with the Y-axis and perpendicular to the X-axis. At the same time, the knob does not move in any direction when it is rotated.

[0053] The spline pair in the present invention cooperates with the bevel gear to ensure that the knob does not make any translational movement when the X-axis or Y-axis moves. The transmission mechanisms of the X-axis and Y-axis both use screw pairs, and the meshing clearance between the screw pair and the bevel gear pair is eliminated by the pre-load of the provided wave gasket and compression spring. In addition, a certain damping feeling can be provided when the knob is turned.

[0054] The planar XY micro-motion mechanism of the present invention enables an X-ray fluorescence spectrometer coating detector to precisely locate the position of small samples under inspection, improving detection efficiency. The planar XY micro-motion mechanism 43 of the present invention can be conveniently mounted on the coating thickness gauge 41. After closing the instrument protective cover 42, the position of the object to be inspected can be adjusted. The planar XY micro-motion mechanism 44 can precisely move the inspection area of ​​the object to be inspected to any position at multiple points, enabling multi-point testing without repeatedly opening the cover. This ensures controllable position of the object to be inspected while protecting operational safety.

[0055] The movement of the planar XY micro-motion mechanical device in the present invention is controlled by two coaxial manual or electric knobs, and the knob axis direction is coaxial with the X-axis and perpendicular to the Y-axis, or coaxial with the Y-axis and perpendicular to the X-axis. At the same time, the knob does not move in any direction when it is rotated; it can be easily integrated into an X-ray fluorescence spectrometer coating detector.

[0056] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations of the present invention are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A planar XY micro-motion device for a coating thickness gauge, characterized in that: include: A sample carrying platform (5), a slide seat (6), a slide middle seat (7) and a slide base (9), wherein the slide middle seat (7) is slidably connected to the slide base (9) in the X direction, and the slide seat (6) is slidably connected to the slide middle seat (7) in the Y direction; An X-axis transmission positioning seat (10) is provided on one side of the slide base (9), an X-axis screw nut seat (15) is provided on one side of the slide middle seat (7), and the sample carrier (5) is installed on the slide upper seat (6); One end of the X-axis transmission screw (13) is pivotally connected to one end of the X-axis transmission positioning seat (10), the other end of the X-axis transmission positioning seat (10) is pivotally mounted with a Y-axis transmission spline shaft (20), the other end of the X-axis transmission screw (13) is pivotally inserted into the Y-axis transmission spline shaft (20), the X-axis screw nut seat (15) is mounted on the X-axis transmission screw (13), and the Y-axis transmission spline shaft (20) is mounted with a Y-axis transmission bevel gear (19); A Y-axis transmission positioning seat (26) is provided on the other side of the slide middle seat (7), and a Y-axis screw nut seat (27) is provided on one side of the slide upper seat (6); A Y-axis transmission screw (28) is pivotally mounted on the Y-axis transmission positioning seat (26), the Y-axis screw nut seat (27) is mounted on the Y-axis transmission screw (28), and one end of the Y-axis transmission screw (28) is provided with a Y-axis driven bevel gear (24) for cooperating with the Y-axis transmission bevel gear (19); The X-axis transmission screw (13) and the Y-axis transmission screw (28) are arranged perpendicularly, one end of the X-axis transmission screw (13) is provided with an X-axis rotation driving part (23), and the Y-axis transmission spline shaft (20) is provided with a Y-axis rotation driving part (22).

2. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: The slide middle seat (7) is mounted on the slide base (9) via an X-direction cross ball linear guide rail (8a), and the slide upper seat (6) is mounted on the slide middle seat (7) via a Y-direction cross ball linear guide rail (8b).

3. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: Two first angular contact ball bearings (40) for connecting to the X-axis transmission screw (13) are installed back to back in one bearing hole of the X-axis transmission positioning seat (10), and two first deep groove ball bearings (34a) for connecting to the Y-axis transmission spline shaft (20) are installed in another bearing hole of the X-axis transmission positioning seat (10).

4. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: An X-axis trapezoidal nut (14a) is provided at one end of the X-axis screw nut seat (15) away from the Y-axis transmission bevel gear (19), and the X-axis trapezoidal nut (14a) is threadedly connected to the X-axis transmission screw (13) and connected to the X-axis screw nut seat (15) via a screw.

5. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: A self-lubricating bearing (16) is provided in the bearing hole of the X-axis screw nut seat (15); a Y-axis transmission bevel gear (19), a wave washer (18), and a damping fixed-pitch transmission spline sleeve (17) are sequentially installed on the Y-axis transmission spline shaft (20); one end of the damping fixed-pitch transmission spline sleeve (17) is inserted into the self-lubricating bearing (16).

6. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: Two second angular contact ball bearings (31) for connecting with the Y-axis transmission screw (28) are mounted face to face on the Y-axis transmission positioning seat (26) away from the X-axis transmission screw (13), and a second deep groove ball bearing (34b) for connecting with the Y-axis transmission screw (28) is mounted on the Y-axis transmission positioning seat (26) close to the X-axis transmission screw (13).

7. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: A Y-axis trapezoidal nut (14b) is provided at one end of the Y-axis screw nut seat (27) away from the Y-axis driven bevel gear (24), and the Y-axis trapezoidal nut (14b) is threadedly connected to the Y-axis transmission screw (28) and connected to the Y-axis screw nut seat (27) via a screw.

8. The planar XY micro-motion device of the coating thickness gauge according to claim 7, characterized in that: A preload spring (32) and an anti-backlash nut (33) are sequentially arranged inside the Y-axis screw nut seat.

9. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: The sample carrier (5) is fastened by aligning the mounting hole on the side of the slide seat (6) with a cross countersunk screw (3), and a carrier film (2), a carrier ring (1), and a carrier film pressure ring (4) are provided in the positioning hole of the sample carrier (5), wherein the carrier film (2) is placed between the carrier ring (1) and the carrier film pressure ring (4).

10. The planar XY micro-motion device of the coating thickness gauge according to claim 1, characterized in that: An X-axis shield (21) is installed on the X-axis transmission positioning seat (10), and a Y-axis shield (25) is installed on the Y-axis transmission positioning seat.

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