A compact capacitive Schottky probe device and method of using the same

Abstract

The invention relates to a compact capacitive Schottky probe device and a method for using the same. The device is characterized in that it comprises a vacuum pipe, an induction plate, an ultra-high vacuum feedthrough, front-end electronics, a rear-end signal processing unit and a real-time signal analyzer; vacuum pipe flanges are arranged at both ends of the vacuum pipe, four induction plates are arranged inside the vacuum pipe between the two vacuum pipe flanges, and the four induction plates constitute a capacitive Schottky probe; four ultra-high vacuum feedthroughs are arranged at intervals on the vacuum pipe corresponding to the positions of the four induction plates; the front-end electronics is used for amplifying beam induction signals derived from the ultra-high vacuum feedthroughs, the rear-end signal processing unit is used for performing difference and sum operations on the beam induction signals processed by the front-end electronics, and obtaining and selecting Schottky signals in horizontal, vertical and longitudinal directions; the real-time signal analyzer is used for measuring horizontal, vertical or longitudinal Schottky signals of particles to be measured. The device can be widely applied to the field of beam diagnosis.

Description

Technical Field

[0001] The invention relates to the field of beam current diagnosis of high-current ion accelerators or medical heavy ion beam (including proton beam) accelerators, and in particular to a compact capacitive Schottky probe device and a method for using the same. Background Art

[0002] The Schottky probe is a passive beam diagnostic detector that does not destroy the beam. In 1918, German physicist Walter Schottky first proposed the concept of Schottky noise. In 1972, physicists observed the Schottky signal of a proton beam for the first time from the ISR machine at the European Organization for Nuclear Research (CERN). Since then, Schottky noise diagnosis has been widely used in various accelerator beam measurement systems as an important non-intercepting beam diagnostic method. Schottky beam diagnostics are not only widely used in the measurement of parameters such as the operating point, cyclotron frequency and momentum distribution of heavy ion (proton) accelerators (including medical ion accelerators), but also in the measurement of nuclear mass and lifetime. Therefore, the Schottky probe is a powerful beam diagnostic tool.

[0003] In 2020, a transverse and longitudinal beam Schottky probe was developed on CSR (China Lanzhou Heavy Ion Accelerator Cooling Storage Ring), which is suitable for weak beam measurements. However, the probe has the disadvantages of being unable to take into account high-current ion accelerators (high-current beams can easily saturate the front-end electronics of the probe and even risk damage), and being unable to achieve measurements in the horizontal, vertical and longitudinal directions at the same time.

[0004] Therefore, there is a need for a Schottky probe device that takes into account both strong and weak beams and has a compact structure, and can simultaneously achieve the requirements of measurement in the horizontal, vertical and longitudinal directions, so as to solve the shortcomings of the existing technology. Summary of the invention

[0005] In view of the above problems, the object of the present invention is to provide a compact capacitive Schottky probe device and a method of using the same, which takes into account both strong and weak beams and can simultaneously achieve measurement requirements in three directions: horizontal, vertical and longitudinal.

[0006] To achieve the above-mentioned object, the present invention adopts the following technical solutions: on the one hand, a compact capacitive Schottky probe device is provided, including a vacuum pipe, a sensing plate, an ultra-high vacuum feedthrough, front-end electronics, a back-end signal processing unit and a real-time signal analyzer;

[0007] Both ends of the vacuum pipe are provided with vacuum pipe flanges, and four sensing plates are provided inside the vacuum pipe between the two vacuum pipe flanges, and the four sensing plates constitute a capacitive Schottky probe, and the sensing plates are used to sense beam sensing signals at corresponding positions in the vacuum pipe; corresponding to the positions of the four sensing plates, four ultra-high vacuum feedthroughs are provided at intervals on the vacuum pipe for leading the beam sensing signals out of the vacuum pipe;

[0008] The front-end electronics is used to transmit and amplify the beam induction signal derived from the ultra-high vacuum feedthrough;

[0009] The back-end signal processing unit is used to perform difference and sum operations on the beam sensing signals processed by the front-end electronics to obtain and select Schottky signals in horizontal, vertical and longitudinal directions;

[0010] The real-time signal analyzer is used to measure the horizontal, vertical or longitudinal Schottky signal of the particle to be measured according to the selected Schottky signal.

[0011] Furthermore, each of the induction plates is fixedly connected to the inner wall of the vacuum pipe via a corresponding plate bracket.

[0012] Furthermore, the bottom center of each of the sensing plates is fixedly connected to one end of the corresponding ultra-high vacuum feedthrough, and the other end of each of the ultra-high vacuum feedthroughs passes through the vacuum pipe and is arranged on the outer wall of the vacuum pipe.

[0013] Further, each of the front-end electronics includes a first single-pole double-throw switch, a second single-pole double-throw switch and an amplifier;

[0014] The input end of each of the first single-pole double-throw switches is respectively connected to the corresponding ultra-high vacuum feedthrough, the first output end of each of the first single-pole double-throw switches is connected to the first input end of the corresponding second single-pole double-throw switch, the second output end of each of the first single-pole double-throw switches is connected to the second input end of the corresponding second single-pole double-throw switch through the corresponding amplifier, and the output end of each of the second single-pole double-throw switches is connected to the back-end signal processing unit.

[0015] Furthermore, each of the front-end electronics is fixedly mounted on the vacuum pipe via a corresponding amplifier bracket.

[0016] Further, the back-end signal processing unit includes a first 180° microwave bridge, a second 180° microwave bridge, a third 180° microwave bridge, a first load, a second load and a single-pole four-throw switch;

[0017] The two input ends of the first 180° microwave bridge are respectively connected to the second single-pole double-throw switch output end of the front-end electronics located in the horizontal direction, the difference signal output end of the first 180° microwave bridge is connected to the first input end of the single-pole four-throw switch, and the sum signal output end of the first 180° microwave bridge is connected to the first input end of the third 180° microwave bridge;

[0018] The two input ends of the second 180° microwave bridge are respectively connected to the second single-pole double-throw switch output end of the front-end electronics located in the vertical direction, the difference signal output end of the second 180° microwave bridge is connected to the second input end of the single-pole four-throw switch, and the sum signal output end of the second 180° microwave bridge is connected to the second input end of the third 180° microwave bridge;

[0019] The difference signal output end of the third 180° microwave bridge is connected to the first load, and the sum signal output end of the third 180° microwave bridge is connected to the third input end of the single-pole four-throw switch; the second load is connected to the fourth input end of the single-pole four-throw switch; and the output end of the single-pole four-throw switch is connected to the real-time signal analyzer.

[0020] Further, each of the first single-pole double-throw switch, the second single-pole double-throw switch and the single-pole four-throw switch are mechanical switches.

[0021] In another aspect, a method for using a compact capacitive Schottky probe device is provided, comprising:

[0022] Each sensing electrode of the capacitive Schottky probe senses a beam sensing signal at a corresponding position in the vacuum pipe, and leads the beam sensing signal out of the vacuum pipe through an ultra-high vacuum feedthrough;

[0023] Determine a weak beam current measurement mode or a strong beam current measurement mode, and start or stop amplifying the beam current sensing signal by the front-end electronics according to the determined mode;

[0024] The back-end signal processing unit performs difference and sum operations on the beam sensing signals processed by the front-end electronics to obtain and select Schottky signals in the horizontal, vertical and longitudinal directions;

[0025] The real-time signal analyzer measures the horizontal, vertical or longitudinal Schottky signal of the particle to be tested according to the selected Schottky signal.

[0026] Further, the determining of the weak beam current measurement mode or the strong beam current measurement mode, and starting or stopping the amplification of the beam current sensing signal by the front-end electronics according to the determined mode, includes:

[0027] In the weak beam current measurement mode, the first single-pole double-throw switch and the second single-pole double-throw switch in each front-end electronics are switched to the amplifier end, and the amplifier in each front-end electronics is turned on;

[0028] In the strong beam current measurement mode, the first single-pole double-throw switch and the second single-pole double-throw switch in each front-end electronics are switched to the short cable end.

[0029] Furthermore, the back-end signal processing unit performs difference and sum operations on the beam sensing signal processed by the front-end electronics to obtain and select Schottky signals in the horizontal, vertical and longitudinal directions, including:

[0030] The beam induction signal is amplified by an amplifier in the front-end electronics or directly input into the back-end signal processing unit;

[0031] The first 180° microwave circuit performs difference and sum operations on the amplified beam induction signals output by two front-end electronics in the horizontal direction to obtain a Schottky difference signal and a Schottky sum signal in the horizontal direction;

[0032] The second 180° microwave bridge performs difference and sum operations on the amplified beam induction signals output by the two front-end electronics in the vertical direction, respectively, to obtain a Schottky difference signal and a Schottky sum signal in the vertical direction;

[0033] The third 180° microwave bridge performs difference and sum operations on the Schottky sum signals in the horizontal and vertical directions to obtain a longitudinal Schottky difference signal and a Schottky sum signal;

[0034] The single-pole four-throw switch selects the Schottky signals in the horizontal, vertical and longitudinal directions respectively.

[0035] The present invention adopts the above technical solution, which has the following advantages:

[0036] 1. The present invention has the advantages of both strong and weak beams and a compact structure. A set of probes can meet the measurement requirements in the horizontal, vertical and longitudinal directions, and has the advantages of good shielding performance.

[0037] 2. The present invention can select Schottky signals in horizontal, vertical and longitudinal directions for measurement by remotely controlling the single-pole four-throw switch of the back-end signal processing unit.

[0038] 3. The capacitive Schottky plate of the present invention can be installed and integrated into a diode iron or quadrupole iron pipe, saving the longitudinal space of the entire accelerator.

[0039] In summary, the present invention can be widely used in the field of beam diagnosis of high-current ion accelerators or medical heavy ion beam (including proton beam) accelerators. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Throughout the accompanying drawings, the same reference numerals are used to represent the same components. In the accompanying drawings:

[0041] Figure 1 is a schematic diagram of the three-dimensional structure of a Schottky probe provided by an embodiment of the present invention;

[0042] Figure 2 is a schematic diagram of the cross-sectional structure of a Schottky probe provided by an embodiment of the present invention;

[0043] Figure 3 is a schematic diagram of the longitudinal cross-sectional structure of a Schottky probe provided by one embodiment of the present invention;

[0044] Figure 4 It is a schematic diagram of the testing principle of Schottky horizontal, vertical and longitudinal signals in three directions provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0045] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0046] It should be understood that the terms used herein are only for the purpose of describing specific example embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms "one", "an" and "said" as used herein may also be meant to include plural forms. The terms "include", "comprise", "contain", and "have" are inclusive, and therefore specify the existence of stated features, steps, operations, elements and / or parts, but do not exclude the existence or addition of one or more other features, steps, operations, elements, parts, and / or combinations thereof. The method steps, processes, and operations described herein are not interpreted as necessarily requiring them to be performed in the specific order described or illustrated, unless the execution order is clearly indicated. It should also be understood that additional or alternative steps may be used.

[0047] Although the terms first, second, third, etc. can be used in the text to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms can only be used to distinguish an element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates, terms such as "first", "second" and other numerical terms do not imply order or sequence when used in the text. Therefore, the first element, component, region, layer or section discussed below can be referred to as the second element, component, region, layer or section without departing from the teaching of the example embodiments.

[0048] For ease of description, spatially relative terms may be used herein to describe the relationship of one element or feature relative to another element or feature as shown in the figures, such as "inside", "outside", "inner side", "outer side", "below", "above", etc. Such spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation depicted in the figures.

[0049] The compact capacitive Schottky probe device and the use method thereof provided by the embodiment of the present invention are provided with a capacitive Schottky probe composed of four sensing plates in a vacuum pipe, and the signals induced by each sensing plate are amplified by four front-end electronics and then input into a back-end signal processing unit for difference and sum operations, so as to obtain and select Schottky signals in horizontal, vertical and longitudinal directions, so that a real-time signal analyzer can measure the horizontal, vertical or longitudinal Schottky signals of the particles to be measured according to the selected Schottky signals. The compact structure can take into account both strong and weak beam currents and can simultaneously achieve the requirements of measurement in the three directions of horizontal, vertical and longitudinal directions.

[0050] It should be noted that the longitudinal direction mentioned in the present invention refers to the direction along the beam, and the direction perpendicular to the beam is the transverse direction, including the horizontal direction and the vertical direction; the weak beam mentioned in the present invention refers to the beam with a particle number less than or equal to 10 8 , strong beam means the number of particles is greater than 10 9 .

[0051] Example 1

[0052] like Figure 1 , Figure 2 and Figure 3 As shown, this embodiment provides a compact capacitive Schottky probe device, including a vacuum pipe 1, a vacuum pipe flange 2, a sensing plate 3, an ultra-high vacuum feedthrough 4, an insulating screw 5, a plate bracket 6, front-end electronics 7, an amplifier bracket 8, a back-end signal processing unit 9 and a real-time signal analyzer 10.

[0053] Vacuum pipe flanges 2 are provided at both ends of the vacuum pipe 1. Four sensing plates 3 are provided inside the vacuum pipe 1 between the two vacuum pipe flanges 2. The four sensing plates 3 are arranged in a rectangular shape inside the vacuum pipe 1 to form a capacitive Schottky probe. Each sensing plate 3 is fixedly connected to the inner wall of the vacuum pipe 1 through a corresponding plate bracket 6 via a number of insulating screws 5. The sensing plate 3 is used to sense beam sensing signals at corresponding positions inside the vacuum pipe 1. Four ultra-high vacuum feedthroughs 4 are provided on the vacuum pipe 1 at intervals corresponding to the positions of the four sensing plates 3. The ultra-high vacuum feedthroughs 4 are used to lead the beam sensing signals sensed by the corresponding sensing plates 3 from inside the vacuum pipe 1 to outside the vacuum pipe 1.

[0054] Each ultra-high vacuum feedthrough 4 is electrically connected to a corresponding front-end electronics 7, each front-end electronics 7 is fixedly arranged on the vacuum pipe 1 through a corresponding amplifier bracket 8, and the front-end electronics 7 is used to transmit and amplify the beam sensing signal. Each front-end electronics 7 is electrically connected to a back-end signal processing unit 9, and the back-end signal processing unit 9 is also electrically connected to a real-time signal analyzer 10. The back-end signal processing unit 9 is used to perform difference and sum operations on the amplified beam sensing signal to obtain and select Schottky signals in the horizontal, vertical and longitudinal directions, and the real-time signal analyzer 10 is used to measure the horizontal, vertical or longitudinal Schottky signal of the particle to be measured according to the selected Schottky signal.

[0055] In a preferred embodiment, both sides of the bottom of each sensing electrode 3 are fixedly connected to the inner wall of the vacuum pipe 1 through a plate bracket 6, the bottom center of each sensing electrode 3 is fixedly connected to one end of the corresponding ultra-high vacuum feedthrough 4, and the other end of each ultra-high vacuum feedthrough 4 passes through the vacuum pipe 1 and is set on the outer wall of the vacuum pipe 1.

[0056] In a preferred embodiment, the ultra-high vacuum feedthrough 4 has a vacuum degree greater than 10 -9 mbar feedthrough.

[0057] In a preferred embodiment, Figure 4 As shown, each front-end electronics 7 includes a first single-pole double-throw switch 7-1, a short cable 7-2, a second single-pole double-throw switch 7-3 and an amplifier 7-4.

[0058] The input end of each first single-pole double-throw switch 7-1 is connected to the corresponding ultra-high vacuum feedthrough 4, the first output end of each first single-pole double-throw switch 7-1 is connected to the first input end of the corresponding second single-pole double-throw switch 7-3 through the corresponding short cable 7-2, the second output end of each first single-pole double-throw switch 7-1 is connected to the second input end of the corresponding second single-pole double-throw switch 7-3 through the corresponding amplifier 7-4, the amplifier 7-4 is used to amplify the input beam sensing signal, and the output end of each second single-pole double-throw switch 7-3 is connected to the back-end signal processing unit 9.

[0059] Specifically, each amplifier 7 - 4 is a high-impedance low-noise amplifier 7 - 4 with an input impedance greater than 1 Mohm and an output impedance equal to 50 Ohm.

[0060] Specifically, the length of each short cable 7 - 2 is 10 to 20 cm, and the shielding effect is greater than 100 dB.

[0061] In a preferred embodiment, the back-end signal processing unit 9 includes a first 180° microwave bridge 9-1, a second 180° microwave bridge 9-2, a third 180° microwave bridge 9-3, a first load 9-4, a second load 9-5 and a single-pole four-throw switch 9-6.

[0062] The two input ends of the first 180° microwave bridge 9-1 are respectively connected to the output ends of the second single-pole double-throw switch 7-3 of the front-end electronics 7 located in the horizontal direction, the difference signal output end Δ of the first 180° microwave bridge 9-1 is connected to the first input end of the single-pole four-throw switch 9-6, and the sum signal output end Σ of the first 180° microwave bridge 9-1 is connected to the first input end of the third 180° microwave bridge 9-3. The first 180° microwave bridge 9-1 is used to perform difference and sum operations on the amplified beam induction signals output by the two front-end electronics 7 located in the horizontal direction, respectively, to obtain Schottky difference signals and Schottky sum signals in the horizontal direction. The two input ends of the second 180° microwave bridge 9-2 are respectively connected to the output ends of the second single-pole double-throw switch 7-3 of the front-end electronics 7 located in the vertical direction, the difference signal output end Δ of the second 180° microwave bridge 9-2 is connected to the second input end of the single-pole four-throw switch 9-6, and the sum signal output end Σ of the second 180° microwave bridge 9-2 is connected to the second input end of the third 180° microwave bridge 9-3. The second 180° microwave bridge 9-2 is used to perform difference and sum operations on the amplified beam induction signals output by the two front-end electronics 7 located in the vertical direction, so as to obtain Schottky difference signals and Schottky sum signals in the vertical direction. The difference signal output terminal Δ of the third 180° microwave bridge 9-3 is connected to the first load 9-4, and the sum signal output terminal Σ of the third 180° microwave bridge 9-3 is connected to the third input terminal of the single-pole four-throw switch 9-6. The third 180° microwave bridge 9-3 is used to perform difference and sum operations on the Schottky sum signal in the horizontal direction and the vertical direction to obtain the vertical Schottky difference signal and the Schottky sum signal. The second load is connected to the fourth input terminal of the single-pole four-throw switch 9-6, and the output terminal of the single-pole four-throw switch 9-6 is connected to the real-time signal analyzer 10. The first load 9-4 and the second load 9-5 are used to absorb the port incident signal to prevent the port incident signal from being reflected. The single-pole four-throw switch 9-6 is used to select the obtained horizontal, vertical and vertical Schottky signals, wherein the signals of the two induction plates 3 in the horizontal direction are subtracted to obtain the horizontal Schottky signal, the signals of the two induction plates 3 in the vertical direction are subtracted to obtain the vertical Schottky signal, and the signals of the four induction plates 3 are added to obtain the vertical Schottky signal.

[0063] Specifically, the first load 9 - 4 and the second load 9 - 5 are both 50 ohms.

[0064] In a preferred embodiment, each of the first single-pole double-throw switch 7-1, the second single-pole double-throw switch 7-3 and the single-pole four-throw switch is a mechanical switch, and the isolation degree is greater than 60 dB.

[0065] Example 2

[0066] This embodiment provides a method for using a compact capacitive Schottky probe device, comprising the following steps:

[0067] 1) Each sensing electrode 3 of the capacitive Schottky probe senses the beam sensing signal at the corresponding position in the vacuum pipe 1 , and leads the beam sensing signal out of the vacuum pipe 1 through the corresponding ultra-high vacuum feedthrough 4 .

[0068] 2) Determine the weak beam current measurement mode or the strong beam current measurement mode, and according to the determined mode, start or shut down the amplification of the beam current sensing signal by the front-end electronics 7, specifically:

[0069] 2.1) In the weak beam current measurement mode, the first single-pole double-throw switch 7-1 and the second single-pole double-throw switch 7-3 in each front-end electronics 7 are switched to the amplifier end, and the amplifier 7-4 in each front-end electronics 7 is turned on.

[0070] 2.2) In the strong beam current measurement mode, the first single-pole double-throw switch 7-1 and the second single-pole double-throw switch 7-3 in each front-end electronics 7 are switched to the short cable end.

[0071] 3) The front-end electronics 7 inputs the beam sensing signal to the back-end signal processing unit 9 for difference and sum operations, and obtains the Schottky signals in the horizontal, vertical and longitudinal directions and selects them, specifically:

[0072] 3.1) The beam induction signal is amplified by the amplifier 7-4 in the front-end electronics 7 or directly input into the back-end signal processing unit 9.

[0073] 3.2) The first 180° microwave bridge 9-1 performs difference and sum operations on the amplified beam induction signals output by the two front-end electronics 7 located in the horizontal direction, respectively, to obtain a Schottky difference signal and a Schottky sum signal in the horizontal direction.

[0074] 3.3) The second 180° microwave bridge 9-2 performs difference and sum operations on the amplified beam induction signals output by the two front-end electronics 7 located in the vertical direction, respectively, to obtain Schottky difference signals and Schottky sum signals in the vertical direction.

[0075] 3.4) The third 180° microwave bridge 9 - 3 performs difference and sum operations on the Schottky sum signals in the horizontal and vertical directions to obtain a Schottky difference signal and a Schottky sum signal in the longitudinal direction.

[0076] 3.5) The single-pole four-throw switch 9-6 selects the Schottky signals in the horizontal, vertical and longitudinal directions respectively.

[0077] 4) The real-time signal analyzer 10 measures the horizontal, vertical or longitudinal Schottky signal of the particle to be measured according to the selected Schottky signal, and realizes Schottky measurement in weak beam measurement mode and strong beam measurement mode.

[0078] The above embodiments are only used to illustrate the present invention, wherein the structure, connection mode and manufacturing process of each component may be changed. Any equivalent transformations and improvements based on the technical solution of the present invention should not be excluded from the protection scope of the present invention.

Claims

1. A compact capacitive Schottky probe device, characterized in that: Includes vacuum pipes, sensing plates, ultra-high vacuum feedthroughs, front-end electronics, back-end signal processing units and real-time signal analyzers; Both ends of the vacuum pipe are provided with vacuum pipe flanges, and the inner periphery of the vacuum pipe located between the two vacuum pipe flanges is provided with four sensing plates, two of which are arranged horizontally, and two of which are arranged vertically, and the four sensing plates constitute a capacitive Schottky probe, and the sensing plates are used to sense beam sensing signals at corresponding positions in the vacuum pipe; corresponding to the positions of the four sensing plates, four ultra-high vacuum feedthroughs are arranged at intervals on the vacuum pipe for leading the beam sensing signals out of the vacuum pipe; The front-end electronics is used to transmit and amplify the beam induction signal derived from the ultra-high vacuum feedthrough; The back-end signal processing unit is used to perform difference and sum operations on the beam sensing signals processed by the front-end electronics to obtain and select Schottky signals in horizontal, vertical and longitudinal directions; The real-time signal analyzer is used to measure the horizontal, vertical or longitudinal Schottky signal of the particle to be measured according to the selected Schottky signal; Each of said front-end electronics comprises a first single-pole double-throw switch, a second single-pole double-throw switch and an amplifier; The input end of each of the first single-pole double-throw switches is respectively connected to the corresponding ultra-high vacuum feedthrough, the first output end of each of the first single-pole double-throw switches is connected to the first input end of the corresponding second single-pole double-throw switch, the second output end of each of the first single-pole double-throw switches is connected to the second input end of the corresponding second single-pole double-throw switch through the corresponding amplifier, and the output end of each of the second single-pole double-throw switches is connected to the back-end signal processing unit; The back-end signal processing unit includes a first 180° microwave bridge, a second 180° microwave bridge, a third 180° microwave bridge, a first load, a second load and a single-pole four-throw switch; The two input ends of the first 180° microwave bridge are respectively connected to the second single-pole double-throw switch output end of the front-end electronics located in the horizontal direction, the difference signal output end of the first 180° microwave bridge is connected to the first input end of the single-pole four-throw switch, and the sum signal output end of the first 180° microwave bridge is connected to the first input end of the third 180° microwave bridge; The two input ends of the second 180° microwave bridge are respectively connected to the second single-pole double-throw switch output end of the front-end electronics located in the vertical direction, the difference signal output end of the second 180° microwave bridge is connected to the second input end of the single-pole four-throw switch, and the sum signal output end of the second 180° microwave bridge is connected to the second input end of the third 180° microwave bridge; The difference signal output end of the third 180° microwave bridge is connected to the first load, and the sum signal output end of the third 180° microwave bridge is connected to the third input end of the single-pole four-throw switch; the second load is connected to the fourth input end of the single-pole four-throw switch; and the output end of the single-pole four-throw switch is connected to the real-time signal analyzer.

2. A compact capacitive Schottky probe device as claimed in claim 1, characterized in that: Each of the induction plates is fixedly connected to the inner wall of the vacuum pipe through a corresponding plate bracket.

3. A compact capacitive Schottky probe device as claimed in claim 2, characterized in that: The bottom center of each of the induction plates is fixedly connected to one end of the corresponding ultra-high vacuum feedthrough, and the other end of each of the ultra-high vacuum feedthroughs passes through the vacuum pipe and is arranged on the outer wall of the vacuum pipe.

4. A compact capacitive Schottky probe device as claimed in claim 1, characterized in that: Each of the front-end electronics is fixedly mounted on the vacuum pipe via a corresponding amplifier bracket.

5. A compact capacitive Schottky probe device as claimed in claim 1, characterized in that: Each of the first single-pole double-throw switch, the second single-pole double-throw switch and the single-pole four-throw switch is a mechanical switch.

6. A method for using the compact capacitive Schottky probe device according to any one of claims 1 to 5, characterized in that: include: Each sensing electrode senses a beam sensing signal at a corresponding position in the vacuum pipe, and leads the beam sensing signal out of the vacuum pipe through an ultra-high vacuum feedthrough; Determine a weak beam current measurement mode or a strong beam current measurement mode, and start or stop amplifying the beam current sensing signal by the front-end electronics according to the determined mode; The back-end signal processing unit performs difference and sum operations on the beam sensing signals processed by the front-end electronics to obtain and select Schottky signals in the horizontal, vertical and longitudinal directions; The real-time signal analyzer measures the horizontal, vertical or longitudinal Schottky signal of the particle to be tested according to the selected Schottky signal.

7. A method for using a compact capacitive Schottky probe device as claimed in claim 6, characterized in that: The step of determining a weak beam current measurement mode or a strong beam current measurement mode, and starting or stopping the amplification of the beam current sensing signal by the front-end electronics according to the determined mode, includes: In the weak beam current measurement mode, the first single-pole double-throw switch and the second single-pole double-throw switch in each front-end electronics are switched to the amplifier end, and the amplifier in each front-end electronics is turned on; In the strong beam current measurement mode, the first single-pole double-throw switch and the second single-pole double-throw switch in each front-end electronics are switched to the short cable end.

8. The method for using a compact capacitive Schottky probe device according to claim 6, characterized in that: The back-end signal processing unit performs difference and sum operations on the beam sensing signal processed by the front-end electronics to obtain and select Schottky signals in horizontal, vertical and longitudinal directions, including: The beam induction signal is amplified by an amplifier in the front-end electronics or directly input into the back-end signal processing unit; The first 180° microwave circuit performs difference and sum operations on the amplified beam induction signals output by two front-end electronics in the horizontal direction to obtain a Schottky difference signal and a Schottky sum signal in the horizontal direction; The second 180° microwave bridge performs difference and sum operations on the amplified beam induction signals output by the two front-end electronics in the vertical direction, respectively, to obtain a Schottky difference signal and a Schottky sum signal in the vertical direction; The third 180° microwave bridge performs difference and sum operations on the Schottky sum signals in the horizontal and vertical directions to obtain a longitudinal Schottky difference signal and a Schottky sum signal; The single-pole four-throw switch selects the Schottky signals in the horizontal, vertical and longitudinal directions respectively.

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