Chip testing and sorting machine

Abstract

The application discloses a chip detection and sorting machine, which comprises a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of discharging tray conveying mechanisms, a tray overturning mechanical hand, a sorting mechanical hand, a first visual detection device, a second visual detection device and a third visual detection device; the first feeding tray conveying mechanism is used for feeding a tray full of chips; the second feeding tray conveying mechanism is used for feeding an empty tray; the discharging tray conveying mechanism is used for discharging the tray; the first visual detection device and the second visual detection device are used for sequentially taking photos and detecting the chips on the tray; the tray overturning mechanical hand is used for overturning and transferring the tray; and the sorting mechanical hand is used for taking photos and detecting the bottom surface of the chip and sorting and transferring the chip. The chip detection and sorting machine can automatically sort and discharge the chip after visually detecting the front and back surfaces of the chip, and automatically test, thereby reducing the labor intensity of workers and improving the production efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to a semiconductor detection sorting machine, in particular to a chip detection sorting machine capable of automatically sorting and discharging chips after detecting the front and back surfaces of the chips. BACKGROUND

[0002] Due to individual differences in the production process of semiconductors or chips, there are high and low performance, good and bad quality, and defects in appearance, so it is necessary to sort the chips in time during the production process to provide a reference for subsequent production. However, in the prior art, the testing and sorting of semiconductors or chips often requires manual assistance, for example, workers need to put chips into a detection machine, use the detection machine to detect, and then take out the chips after detection or put new chips into the detection machine for detection. Workers also need to manually classify the chips according to the test results. Therefore, the existing method has low automation, high labor intensity of workers, and low production efficiency, which is not conducive to mass production. SUMMARY

[0003] The purpose of the present application is to provide a chip detection sorting machine capable of automatically sorting and discharging chips after detecting the front and back surfaces of the chips, which can realize fully automated detection, reduce the labor intensity of workers, and improve production efficiency.

[0004] In order to achieve the above-mentioned purpose, the chip detection sorting machine provided by the present application comprises a first feeding tray conveying mechanism, a second feeding tray conveying mechanism, a plurality of discharging tray conveying mechanisms, a tray overturning manipulator, a sorting manipulator, a first visual detection device, a second visual detection device, and a third visual detection device. The first feeding tray conveying mechanism, the second feeding tray conveying mechanism, and the plurality of discharging tray conveying mechanisms are arranged side by side in sequence. The first feeding tray conveying mechanism is used for feeding a tray full of chips. The second feeding tray conveying mechanism is used for feeding an empty tray. The discharging tray conveying mechanism is used for discharging a tray full of sorted chips. The first visual detection device and the second visual detection device are arranged above the middle part of the first feeding tray conveying mechanism in the conveying direction to detect the back surface of the chips on the tray in sequence. The tray overturning manipulator is horizontally arranged above the end part of the first feeding tray conveying mechanism, the second feeding tray conveying mechanism, and the plurality of discharging tray conveying mechanisms to overturn the tray on the first feeding tray conveying mechanism and transfer it to the discharging tray conveying mechanism, or to transfer the empty tray on the second feeding tray conveying mechanism to the discharging tray conveying mechanism. The third visual detection device detects the front surface of the overturned chip. The sorting manipulator is horizontally arranged above the plurality of discharging tray conveying mechanisms. The sorting manipulator comprises a sorting arm and a fourth visual detection device to detect the front surface of the chip and sort and transfer the chip between the trays of the plurality of discharging tray conveying mechanisms.

[0005] Compared with the prior art, the application can detect the differences of each chip by setting the first tray feeding mechanism to feed the tray full of chips, setting the first visual detection device and the second visual detection device in the middle of the first tray feeding mechanism, and using the first visual detection device and the second visual detection device to visually detect the back of the chip on the tray. The second tray feeding mechanism and the plurality of tray feeding mechanisms are arranged side by side, the empty tray on the second tray feeding mechanism is used, the tray full of chips is flipped by the tray flipping manipulator and then transferred to the tray feeding mechanism, the third visual detection device and the fourth visual detection device are used to detect the front of the chip, the chip is classified by the sorting manipulator, and the chips of different categories are transferred to different tray feeding mechanisms. Therefore, the chip detection and sorting machine does not need manual detection and classification, the whole process is automatically completed from the tray feeding, detection, sorting and tray unloading, the automation degree is very high, the labor intensity is greatly reduced, and the production efficiency is improved.

[0006] Preferably, the tray flipping manipulator comprises a base frame, a horizontal moving mechanism, a moving support, two vertical moving mechanisms, a tray holding cylinder, a claw hand and a flipping jig. The horizontal moving mechanism is arranged on the base frame and connected with the moving support at the output end to drive the moving support to move horizontally. One of the vertical moving mechanisms is arranged on the moving support and connected with the tray holding cylinder at the output end to drive the tray holding cylinder to move vertically. The output end of the tray holding cylinder is connected with the claw hand to drive the claw hand to grab or release the tray. The other vertical moving mechanism is arranged on the moving support and connected with the flipping jig at the output end. The flipping jig can drive the tray to flip. By arranging the tray holding cylinder and the claw hand, the claw hand can be driven by the tray holding cylinder to quickly clamp the empty tray and place it on the flipping jig. Then the empty tray is flipped by the flipping jig, so that the empty tray is flipped by 180 degrees. Then the flipped empty tray is placed on the tray full of chips by the tray holding cylinder and the claw hand. Then the empty tray and the tray full of chips are flipped again, so that the chip is transferred from one tray to another tray and flipped. The automation degree is high, and the labor intensity is effectively reduced.

[0007] Specifically, the flipping fixture includes a substrate, a tray-separating cylinder, a lower plate, a lower plate cylinder, a clamping cylinder, and a rotating device. The substrate has a frame structure with a hollow center. The tray-separating cylinder is disposed on opposite sides of the upper surface of the substrate. The lower plates are respectively disposed on opposite sides of the lower bottom surface of the substrate. The lower plate cylinder is disposed between the lower plate and the substrate to drive the lower plate closer to or away from the center of the substrate. The clamping cylinder is disposed between the substrate and the lower plate to drive the lower plate closer to or away from the bottom surface of the substrate. By using the upper plate 472 to clamp the tray and then using the rotating device to flip it, the empty tray can be flipped in both directions. By setting the lower plate and the lower plate cylinder, two oppositely stacked trays can be supported on the flipping fixture. Thus, the tray-separating cylinder and the clamping cylinder can position and clamp the two oppositely stacked trays, thereby enabling the chip to be accurately transferred from one tray to another, achieving automatic flipping.

[0008] Specifically, the flipping fixture further includes an upper plate and an upper plate cylinder. The upper plate is respectively disposed on opposite sides of the upper surface of the substrate, and the upper plate cylinder is disposed between the upper plate and the substrate to drive the upper plate to move closer to or away from the center of the substrate.

[0009] Specifically, the lower plate is provided with a slider, and the base plate is provided with a slide rail, with the slider slidably engaging with the slide rail. The slider is provided with a guide post, and the lower plate is slidably disposed on the guide post. An elastic element is provided between the lower plate and the slider to provide an elastic force that causes the lower plate to move away from the slider. By providing a guide post on the slider and an elastic element between the lower plate and the slider, the lower plate can automatically move away from the base plate, and in conjunction with the clamping cylinder, the two material trays can be automatically pressed together or automatically released.

[0010] Specifically, the flipping fixture further includes a vibratory plate cylinder, which is disposed on the substrate to vibrate the material tray. The vibratory plate cylinder can vibrate the material tray during the process of flipping the chip from one tray to another, thereby preventing the chip from sticking to the tray and failing to flip, effectively improving the success rate of chip flipping.

[0011] Specifically, the output end of the clamping cylinder is connected to a pressure plate, which extends to the bottom surface of the two lower plates, so that the lower plates are pushed closer to the base plate during clamping. By setting the pressure plate, the two lower plates can be clamped simultaneously by one clamping cylinder, effectively reducing the number of clamping cylinders and simplifying the structure.

[0012] Preferably, the first visual inspection device includes a first support, a first lateral drive mechanism, a first platform, a first vertical drive mechanism, and a first camera. The first lateral drive mechanism is mounted on the first support and its output is connected to the first platform to drive the first platform to slide the first camera laterally. The first vertical drive mechanism is mounted on the first platform and its output is connected to the first camera to drive the first camera to move closer to or away from the tray. This allows the first camera to effectively inspect each chip on the tray, avoiding missed detections.

[0013] Preferably, the second visual inspection device includes a second support, a second lateral drive mechanism, a second platform, a second vertical drive mechanism, and a second camera. The second lateral drive mechanism is mounted on the second support and its output end is connected to the second platform to drive the second platform to slide the second camera laterally. The second vertical drive mechanism is mounted on the second platform and its output end is connected to the second camera to drive the second camera to move closer to or away from the tray. There are at least two second cameras. This allows the second cameras to effectively inspect each chip on the tray, avoiding missed detections.

[0014] Preferably, the first loading tray conveying mechanism, the second loading tray conveying mechanism, and the unloading tray conveying mechanism have the same structure. The first loading tray conveying mechanism includes a track groove, a tray stacking fixture, a tray separating mechanism, a tray clamping mechanism, a tray clamping drive mechanism, and a lifting mechanism. The tray clamping mechanism is slidably disposed in the track groove, and the tray clamping drive mechanism is disposed in the track groove and drives the tray clamping mechanism to move along the track groove. The tray stacking fixture is disposed above the input end of the track groove and can stack trays. The tray separating mechanism is disposed on the track groove and located at the bottom of the tray stacking fixture to separate the tray at the lowest layer. The lifting mechanism is disposed below the track groove and below the tray stacking fixture to drive the tray to transfer between the tray stacking fixture and the tray clamping mechanism. By setting the tray separating mechanism, the tray at the lowest layer in the tray stacking fixture can be separated from other trays, and then the lifting mechanism can be used to lower the tray onto the tray clamping mechanism. Furthermore, by setting a clamping drive mechanism in the track groove, the clamping mechanism can move along the track groove. Therefore, by using the clamping mechanism to hold the material tray, the material tray can achieve linear movement and output, thereby sequentially conveying the material tray to the vision inspection device and the material tray robot arm, realizing the purpose of automatic inspection, automatic material tray loading and automatic material tray transfer, with a high degree of automation. Attached Figure Description

[0015] Figure 1This is a perspective view of the chip detection and sorting machine of the present invention.

[0016] Figure 2 This is a top view of the chip detection and sorting machine of the present invention.

[0017] Figure 3 This is a perspective view of the first feeding tray conveying mechanism of the chip detection and sorting machine of the present invention.

[0018] Figure 4 This is a top view of the first feeding tray conveying mechanism of the chip detection and sorting machine of the present invention.

[0019] Figure 5 This is a side view of the first feeding tray conveying mechanism of the chip detection and sorting machine of the present invention.

[0020] Figure 6 This is a structural diagram of the clamping mechanism of the first feeding tray conveying mechanism of the present invention.

[0021] Figure 7 This is a structural diagram of the tray-splitting mechanism of the first feeding tray conveying mechanism of the present invention.

[0022] Figure 8 This is a three-dimensional view of the material tray flipping robot of the chip detection and sorting machine of the present invention.

[0023] Figure 9 This is a perspective view of the tray-holding cylinder and the turning fixture of the tray-turning robot of the chip detection and sorting machine of the present invention.

[0024] Figure 10 This is a perspective view of the flipping fixture of the material tray flipping robot of the chip detection and sorting machine of the present invention.

[0025] Figure 11 This is a front view of the flipping fixture of the material tray flipping robot of the chip detection and sorting machine of the present invention.

[0026] Figure 12 This is a side view of the flipping fixture of the material tray flipping robot of the chip detection and sorting machine of the present invention.

[0027] Figure 13 yes Figure 11 Enlarged view of part A in the middle.

[0028] Figure 14 This is a perspective view of the first vision inspection device and the second vision inspection device of the chip inspection and sorting machine of the present invention.

[0029] Figure 15 This is a top view of the first vision inspection device and the second vision inspection device of the chip inspection and sorting machine of the present invention.

[0030] Figure 16This is a perspective view of the third vision inspection device and sorting robot of the chip inspection and sorting machine of the present invention.

[0031] Figure 17 This is another perspective view of the third vision inspection device and sorting robot of the chip inspection and sorting machine of the present invention.

[0032] Figure 18 This is a structural diagram of the sorting arm of the sorting robot in the chip detection and sorting machine of the present invention. Detailed Implementation

[0033] To illustrate the technical content, structural features, and effects of the present invention in detail, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0034] like Figure 1 , Figure 2 and Figure 16 As shown, the chip inspection and sorting machine 100 of the present invention includes a first loading tray conveying mechanism 1, a second loading tray conveying mechanism 2, multiple unloading tray conveying mechanisms 3, a tray flipping robot 4, a sorting robot 5, a first vision inspection device 6, a second vision inspection device 7, and a third vision inspection device 52. The first loading tray conveying mechanism 1, the second loading tray conveying mechanism 2, and the multiple unloading tray conveying mechanisms 3 are arranged side by side in sequence. The first loading tray conveying mechanism 1 is used to load trays fully loaded with chips. The second loading tray conveying mechanism 2 is used to load empty trays. The unloading tray conveying mechanism 3 is used to unload trays fully loaded with sorted chips. The first vision inspection device 6 and the second vision inspection device 7 are arranged sequentially above the middle of the first loading tray conveying mechanism 1 along the conveying direction to take pictures of the reverse side of the chips on the tray in sequence. The tray flipping robot 4 spans across the first loading tray conveying mechanism 1, the second loading tray conveying mechanism 2, and the multiple unloading tray conveying mechanisms 3. Above the end of the first feeding tray conveyor 1, the tray is flipped and transferred to the unloading tray conveyor 3, or the empty tray of the second feeding tray conveyor 2 is transferred to the unloading tray conveyor 3; the third vision inspection device 52 takes a picture of the front of the flipped chip; the sorting robot 5 spans above the multiple unloading tray conveyors 3; the sorting robot 5 includes a sorting arm 51 and a fourth vision inspection device 53 to take a picture of the front of the chip and sort and transfer the chip between the trays of the multiple unloading tray conveyors 3.

[0035] Please see Figures 3 to 7The first feeding tray conveying mechanism 1 includes a track groove 11, a tray stacking clamp 12, a tray separating mechanism 13, a tray clamping mechanism 14, a tray driving mechanism 15, and a lifting mechanism 16. The tray clamping mechanism 14 is slidably disposed within the track groove 11. The tray driving mechanism 15 is disposed within the track groove 11 and drives the tray clamping mechanism 14 to move along the track groove 11. The tray driving mechanism 15 includes a servo motor 151 and a belt 152. The motor is disposed at the bottom outer surface of the track groove 11. The output end of the servo motor 151 is connected to a pulley. The belt 152 is wrapped between two pulleys, so that the belt 152 is disposed within the track groove 11 and driven by the servo motor 151. The belt 152 is disposed along the extending direction of the track groove 11. The tray stacking clamp 12 is disposed above the input end of the track groove 11 and can stack trays. Specifically, the tray stacking clamp 12 has four right-angled limiting posts 121. The limiting posts 121 are made of right-angled steel and are distributed at the four corners to form a square space identical to the shape of the trays. Trays can then be stacked sequentially within the space enclosed by the limiting posts 121. The tray separating mechanism 13 is disposed on the track groove 11 and located on both sides of the bottom of the tray stacking clamp 12 to separate the tray at the lowest layer. The tray separating mechanism 13 includes a tray separating cylinder 131 and a tray separating insert plate 132. The output end of the tray separating cylinder 131 is connected to the tray separating insert plate 132 to drive the tray separating insert plate 132 to extend or retract. The lifting mechanism 16 is disposed below the track groove 11 and below the tray stacking clamp 12 to drive the trays to move between the tray stacking clamp 12 and the clamping mechanism 14. By setting up the tray separating mechanism 13, the tray at the lowest layer in the tray stacking clamp 12 can be separated from other trays, and then the lifting mechanism 16 can be used to lower the tray onto the clamping mechanism 14. Furthermore, by setting up the clamping drive mechanism 15 in the track groove 11, the clamping mechanism 14 can move along the track groove 11. Therefore, by using the clamping mechanism 14 to hold the tray, the tray can achieve linear movement and output, thereby conveying the tray to the vision inspection device and the tray flipping robot 4, achieving automatic inspection, automatic tray loading, and automatic tray transfer, with a high degree of automation. The lifting mechanism 16 includes a lifting motor 161 and a lifting plate 162. The lifting motor 161 is located below the track groove 11 with its output end facing upwards, and the lifting plate 162 is connected to the output end of the lifting motor 161. The lifting motor 161 is a stepper screw motor with a built-in screw nut, which drives the tillage lifting plate 162 to rise and fall.

[0036] For example Figure 6As shown, the clamping mechanism 14 includes a base 141, a front clamping cylinder 142, and a rear clamping cylinder 143. The base 141 is connected to the output end of the clamping drive mechanism 15 and is slidably disposed within the track groove 11. The front clamping cylinder 142 is disposed at one end of the base 141, with its output end extending upward beyond the base 141. The rear clamping cylinder 143 is disposed at the other end of the base 141, with its output end extending laterally. The output end of the rear clamping cylinder 143 is also connected to a clamping block 1431, which extends upward beyond the base 141 to clamp the material tray together with the output end of the front clamping cylinder 142. By setting the front clamping cylinder 142 and the rear clamping cylinder 143, the material tray can be stably and fixedly positioned on the base 141, ensuring that the clamping mechanism 14 will not shift when moving the material tray, thus improving the accuracy of material tray conveying and positioning.

[0037] In addition, for example Figure 3 and Figure 4 As shown, a sensing device (not shown) is provided on the side of the track groove 11 facing the tray stacking fixture 12 to detect whether there is a tray in the tray stacking fixture 12. A sensing device (not shown) is also provided on the side of the track groove 11 facing the two vision inspection devices to detect whether there is a tray on the vision inspection devices. A height limit detection device 8, which is a height-limiting fiber optic cable, is provided on the track groove 11 to detect whether the height of the chip on the tray exceeds a set value. A sensing device is provided on the side of the track groove 11 away from the tray stacking fixture 12 to detect whether there is a tray at that end of the track groove 11.

[0038] Please see again Figures 3 to 5The first loading tray conveying mechanism 1, the second loading tray conveying mechanism 2, and the unloading tray conveying mechanism 3 have basically the same structure. The difference lies in that the first loading tray conveying mechanism 11 and the second loading tray conveying mechanism 2 first stack the trays on the tray stacking clamp 12, then separate the lower trays through the tray separating mechanism 13, then place the trays on the clamping mechanism 14 using the lifting mechanism 16, and finally drive the clamping mechanism 14 to move through the clamping drive mechanism 15 to realize the loading and output of the trays. The operation of the unloading tray conveying mechanism 3 is the reverse of the above. After receiving the pallet, the clamping mechanism 14 is driven by the clamping drive mechanism 15 to move the pallet to the bottom of the pallet stacking fixture 12. Then, the lifting mechanism 16 lifts the pallet to the bottom of the pallet stacking fixture 12, allowing it to stack with other pallets on the fixture. Finally, the pallet separating mechanism 13 supports the pallet, allowing the lifting mechanism 16 to move away, thus stacking all the pallets onto the pallet stacking fixture 12. In this embodiment, the first pallet conveying mechanism 1 has two sets of clamping mechanisms 14 and clamping drive mechanisms 15, respectively located on opposite sides of the track groove 11. This allows the clamping mechanisms 14 to convey the pallets in a staggered manner, improving conveying efficiency. In addition, the feeding tray conveying mechanism 1 also includes a buffer lifting mechanism 17 and a buffer support block 18. The buffer lifting mechanism 17 is located below the end of the track groove 11 away from the loading and unloading area. The buffer support block 18 is disposed on the end of the track groove 11 away from the tray stacking fixture 12. After being pushed upward by the tray, the buffer support block 18 can flip upward to avoid the tray. When the tray rises to the correct position, it can automatically flip downward to prevent the tray from falling. Therefore, when there are too many trays and the sorting cannot be completed, the buffer lifting mechanism 17 and the buffer support block 18 can receive these trays and stack them up.

[0039] like Figures 8 to 13As shown, the material tray flipping robot 4 includes a base frame 41, a horizontal moving mechanism 42, a moving support 43, two vertical moving mechanisms 44 and 48, a tray-holding cylinder 45, grippers 46, and a flipping fixture 47. The horizontal moving mechanism 42 is mounted on the base frame 41 and its output end is connected to the moving support 43 to drive the moving support 43 to move horizontally. One of the vertical moving mechanisms 44 is mounted on the moving support 43 and its output end is connected to the tray-holding cylinder 45 to drive the tray-holding cylinder 45 to move vertically. The output end of the tray-holding cylinder 45 is connected to the grippers 46 on opposite sides to drive the grippers 46 to grasp or release the material tray. The other vertical moving mechanism 48 is mounted on the moving support 43 and its output end is connected to the flipping fixture 47 to drive the flipping fixture 47 to rise and fall, and the flipping fixture 47 can drive the material tray to flip. By setting up the tray-holding cylinder 45 and the gripper 46, the tray-holding cylinder 45 drives the gripper 46 to quickly clamp the empty tray and place it on the flipping fixture 47. The flipping fixture 47 then flips the empty tray 180 degrees. After that, the tray-holding cylinder 45 and the gripper 46 place the flipped empty tray onto the tray containing chips. Then, the empty tray and the tray containing chips are flipped again simultaneously, so that the chips can be transferred from one tray to another and the front and back can be flipped, achieving the purpose of automatic flipping. The degree of automation is high and the labor intensity is effectively reduced.

[0040] Please see Figures 10 to 12The flipping fixture 47 includes a base plate 471, an upper plate 472, an upper plate cylinder 473, a tray-separating cylinder 474, a lower plate 475, a lower plate cylinder 476, a rotating device 478, and a clamping cylinder 479. The base plate 471 has a frame structure with a hollow center. The upper plates 472 are respectively disposed on opposite sides of the upper surface of the base plate 471. The upper plate cylinder 473 is disposed between the upper plate 472 and the base plate 471 to drive the upper plate 472 closer to or away from the center of the base plate 471. The tray-separating cylinder 474 is connected to the base plate 471. The tray-separating cylinders 474 are distributed on opposite sides of the upper surface of the base plate 471. The lower plates 475 are respectively disposed on opposite sides of the lower bottom surface of the base plate 471. The lower plate cylinder 476 is disposed between the lower plate 475 and the base plate 471 to drive the lower plate 475 closer to or away from the center of the base plate 471. The clamping cylinder 479 is disposed between the substrate 471 and the lower plate 475 to drive the lower plate 475 to move closer to or away from the bottom surface of the substrate 471. By using the upper plate 472 and the lower plate 475 to clamp the tray, and then using the rotating device 478 to flip it, the empty tray can be flipped between the front and back sides. By setting the lower plate 475 and the lower plate cylinder 476, the two oppositely stacked trays can be supported on the flipping fixture 47. The clamping cylinder 479 positions and clamps the two oppositely stacked trays, thereby enabling the chip to be accurately transferred from one tray to the other, realizing automatic flipping.

[0041] Please see again Figures 10 to 12 Specifically, the upper plate 475 has sliders at both ends on one side, the base plate 471 has a slide rail on the side facing the upper plate, the lower plate 475 has sliders 4751 at both ends on one side, and the base plate 471 has slide rails 4711 at both ends on the side facing the lower plate 475. The sliders 4751 and the slide rails 4711 are slidably engaged, so that the two lower plates 475 can move closer to or away from the center of the base plate 471. The sliders 4751 are provided with guide posts 4752, and the lower plates 475 are slidably disposed on the guide posts 4752. An elastic element 4753 is provided between the lower plates 475 and the sliders 4751 to provide an elastic force that moves the lower plates 475 away from the sliders 4751. The elastic element 4753 is a compression spring. By providing a guide post 4752 on the slider 4751 and an elastic element 4753 between the lower plate 475 and the slider 4751, the lower plate 475 can automatically move away from the base plate 471. In conjunction with the clamping cylinder 479, the two material trays can be automatically pressed against each other or automatically released.

[0042] The flipping fixture 47 also includes a vibratory plate cylinder (not shown in the figure). The vibratory plate cylinder is disposed on the substrate 471, and its output end extends toward the center of the substrate 471, thereby contacting the material tray to vibrate it. The vibratory plate cylinder can vibrate the material tray during the chip flipping process, thus preventing the chip from sticking to the tray and failing to flip, effectively improving the chip flipping success rate.

[0043] For example Figure 13 As shown, the output end of the clamping cylinder 479 is connected to a pressure plate 4791, which extends to the bottom surface of the two lower plates 475. During clamping, the pressure plate 4791 pushes the lower plates 475 closer to the base plate 471. By using the pressure plate 4791, both lower plates 475 can be clamped simultaneously using a single clamping cylinder 479, effectively reducing the number of clamping cylinders 479 and simplifying the structure.

[0044] Please see Figure 14 and Figure 15 The first visual inspection device 6 includes a first support 61, a first horizontal driving mechanism 62, a first platform 63, a first vertical driving mechanism 64, and a first camera 65. The first horizontal driving mechanism 62 is mounted on the first support 61, and its output end is connected to the first platform 63 to drive the first platform 63 to slide horizontally. The first vertical driving mechanism 64 is mounted on the first platform 63, and its output end is connected to the first camera 65 to drive the first camera 65 to move closer to or away from the tray. The first camera 65 is a 2D camera. This allows the first camera 65 to effectively inspect each chip on the tray, avoiding missed detections.

[0045] Please see again Figure 14 and Figure 15 The second visual inspection device 7 includes a second support 71, a second horizontal driving mechanism 72, a second platform 73, a second vertical driving mechanism 74, and a second camera 75. The second horizontal driving mechanism 72 is mounted on the second support 71, and its output end is connected to the second platform 73 to drive the second platform 73 to slide horizontally. The second vertical driving mechanism 74 is mounted on the second platform 73, and its output end is connected to the second camera 75 to drive the second camera 75 to move closer to or away from the tray. The second camera 75 is a 3D camera. There are at least two second cameras 75. This allows the second camera 75 to effectively inspect each chip on the tray, avoiding missed detections. The first visual inspection device 6 and the second visual inspection device 7 of this invention are arranged adjacent to each other; therefore, the first support 61 and the second support 71 can form an integral structure.

[0046] like Figures 16 to 18 As shown, the sorting arm 51 includes a third support 511, a third lateral drive mechanism 512, a third platform 513, a third vertical drive mechanism 514, a pitch-changing mechanism 515, a cylinder 516, and a suction nozzle 517. The third lateral drive mechanism 512 is mounted on the third support 511 and drives the third platform 513 to move laterally. The third vertical drive mechanism 514 is mounted on the third platform 513 and drives the pitch-changing mechanism 515 to move vertically. The pitch-changing mechanism 515 can drive the cylinder 516 and the suction nozzle 517 to adjust the distance between them and adjacent suction nozzles 517. The cylinder 516 is located at the output end of the pitch-changing mechanism 515 and its output end is connected to the suction nozzle 517. The fourth visual inspection device 53 is mounted on the third platform 513 to slide with the third platform 513 and can take pictures of the flipped chips for inspection. The fourth visual inspection device 53 is a 3D camera. The pitch-changing mechanism 515 includes a pitch-changing motor (not shown), a mounting frame, a drive plate, and a mounting frame body. The mounting frame is connected to the output end of the third vertical drive mechanism 514. The pitch-changing motor is mounted on the mounting frame, and its conveying end is connected to the drive plate. The drive plate is vertically slidably mounted on the mounting frame and has multiple outwardly radiating guide rails on its side. The mounting frame body is horizontally slidably mounted on the mounting frame, and one end is slidably engaged with the guide rails. The cylinder is mounted on the mounting frame body. The pitch-changing motor drives the drive plate to move vertically, causing the mounting frame bodies to move away from or closer together. Since the chip spacing on different types of trays may vary, the pitch-changing mechanism 515 can grip chips with different spacing, allowing the sorting robot 5 to adapt to various trays and improving ease of use. The third visual detection device 52 is disposed at the other end of the third support 511. The third visual detection device 52 is also provided with a fourth lateral driving mechanism 521, which is disposed on the third support 511 and can drive the third visual detection device 52 to move laterally. The third visual detection device 52 is a 2D camera.

[0047] Based on the above and in conjunction with the accompanying drawings, the working principle of the material tray flipping robot 4 is described below:

[0048] In the initial state, the vibrating plate cylinder, lower plate cylinder 476, and separating plate cylinder 474 retract, while the remaining cylinders extend; the upper plate 472 is on top. When it is necessary to flip the material tray, firstly, the vertical moving mechanism 44 drives the claw 46 to descend to the empty material tray position, the holding plate cylinder 45 drives the claw 46 to hold an empty material tray and then rise; at the same time, the upper plate cylinder 473 closes the upper plate 472; the separating plate cylinder 474 extends so that the material tray is on the upper layer. Then, the separating plate cylinder 474 drives the claw 46 to open, and the vertical moving mechanism 44 rises; at the same time, the claw 46 rises away. At this time, the empty material tray is clamped on the flipping fixture 47. Afterwards, the rotating device 478 drives the flipping fixture 47 to flip, so that the empty material tray is flipped 180°. Then, the vertical moving mechanism 44 drives the gripper 46 to descend, the gripper 46 grasps the flipped empty tray, and then the tray-separating cylinder 474 retracts, and the gripper 46 moves the empty tray back to its original position. Then, the vertical moving mechanism 44 rises, and the rotating device 478 resets. Afterwards, the gripper 46 descends again to grab the empty tray and place it on top of the flipping fixture 47. The horizontal moving mechanism 42 moves the flipping fixture 47 above the full-loaded tray. Then, the empty tray in the gripper 46 is placed above the full-loaded tray, stacking the two trays. Next, the gripper 46 descends and grabs two material trays, raising them upwards (the upper tray is empty, the lower tray is full). At this time, the lower plate cylinder 476 and the tray-separating cylinder 474 extend, causing the lower plate 475 to extend and support the lower tray, while the tray-separating cylinder 474 clamps the upper tray. Simultaneously, the pressing cylinder 479 drives the pressure plate 4791, causing the pressure plate 4791 to press against the lower plate 475, finally pressing the two material trays together. Afterwards, the gripper 46 releases and rises to allow for clearance, and the rotating device 478 rotates the fixture, causing the two material trays to rotate 180°. At this point, the full-loaded tray is on top and the empty tray is on the bottom. Simultaneously, the vibrating cylinder vibrates and strikes the tray, causing the chip to flip from the full-loaded tray above to the empty tray below (with the bottom of the chip facing down). Finally, the gripper 46 descends to hold the two trays, the clamping cylinder 479 releases, and then the lower plate 475 opens. The gripper 46 then drives the full-loaded tray to descend and be placed onto the unloading tray conveyor 3.

[0049] Referring to the above figures, the working principle of the chip detection and sorting machine 100 of the present invention is described below:

[0050] First, a fully loaded tray (chips bottom-up) is manually placed onto the tray stacking clamp 12 of the first tray conveying mechanism 1, and an empty tray is placed onto the second tray conveying mechanism 2. Then, the lifting mechanism 16 lifts and supports the tray, while the tray separating mechanism 13 retracts and disengages from the tray. Next, the lifting mechanism 16 moves downwards by the height of one tray. At this point, the tray separating cylinder 474 of the tray separating mechanism 13 extends, and the tray separating plate inserts between the lowest tray and the tray above it, separating the lowest tray from the tray above. Then, the lifting mechanism 16 lowers the lowest tray and places it on the base. Simultaneously, the front and rear clamping cylinders extend sequentially to clamp and position the tray. The clamping drive mechanism 15 then drives the clamping mechanism 14 to move along the track groove 11 to the other end. When the device moves sequentially below the first visual inspection device 6 and the second visual inspection device 7, the corresponding sensing device detects the chip, and the clamping drive mechanism 15 stops. At this time, the first visual inspection device 6 takes pictures of the chip on the tray, and the second visual inspection device 7 takes pictures of the chip on the tray, and records the results on the control system. Afterwards, the clamping drive mechanism 15 drives the clamping mechanism 14 to move again, and after passing the height limit detection of the height-limiting fiber, it reaches the other end of the track groove 11. The clamping mechanism 14 releases the tray, and then the buffer lifting mechanism 17 lifts the detected tray to the buffer support block 18 to receive the tray and stack the trays. At the same time, the second loading tray conveying mechanism 2 conveys the empty tray to its other end. At this time, the tray-turning robot 4 transfers the empty tray to one of the unloading tray conveying mechanisms 3, and flips the full tray on the first loading tray conveying mechanism 1 and transfers it to the other unloading tray conveying mechanisms 3 respectively, so that each of the unloading tray conveying mechanisms 3 has a tray full of chips, while the other unloading tray conveying mechanism 3 has an empty tray. Then, each of the unloading tray conveying mechanisms 3 conveys its respective tray to below the sorting robot 5. At this time, the third vision inspection device 52 and the fourth vision inspection device 53 sequentially inspect the chips, and then the sorting robot 5 sorts the chips. Specifically, the control system classifies the chips into at least two types based on the visual inspection results, such as qualified or unqualified, and controls the sorting robot 5 to place the first type of chips on the tray of one of the unloading tray conveying mechanisms 3, and the second type of chips on the tray of the other unloading tray conveying mechanism 3, thus allowing chips of the same type to be placed on the same tray. Once each tray is full, the corresponding unloading tray conveying mechanism 3 transports the tray to the unloading end and stacks it on the tray stacking fixture, waiting to be removed.When there is no tray on the unloading tray conveying mechanism 3, the tray flipping robot 4 transfers the full tray on the first loading tray conveying mechanism 1 to the unloading tray conveying mechanism 3; or transfers the empty tray on the second loading tray conveying mechanism 2 to the unloading tray conveying mechanism 3, so that sorting can be performed continuously.

[0051] Compared with existing technologies, this invention utilizes a first feeding tray conveyor mechanism 1 to feed a tray fully loaded with chips. A first visual inspection device 6 and a second visual inspection device 7 are then positioned in the middle of the first feeding tray conveyor mechanism 1 to visually inspect the reverse side of the chips on the tray, thereby detecting differences between individual chips. A second feeding tray conveyor mechanism 2 and multiple feeding tray conveyors are arranged side-by-side. Empty trays are fed using the second feeding tray conveyor mechanism 2, and a tray-turning robot 4 flips the trays full of chips and transfers them to the unloading tray conveyor mechanism 3. Finally, a third visual inspection device 52 and a fourth visual inspection device 53 inspect the front side of the chips, and a sorting robot 5 classifies the chips and transfers different categories of chips to different unloading tray conveyors 3. Therefore, the chip inspection and sorting machine 100 of this invention eliminates the need for manual inspection and sorting. The entire process, from feeding, inspection, sorting, and unloading, is fully automated, resulting in a high degree of automation, significantly reducing labor intensity and improving production efficiency.

[0052] The above-disclosed examples are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any equivalent variations made in accordance with the claims of the present invention shall still fall within the scope of the present invention.

Claims

1. A chip detection and sorting machine, characterized in that, include: The system comprises a first loading tray conveyor, a second loading tray conveyor, multiple unloading tray conveyors, a tray flipping robot, a sorting robot, a first vision inspection device, a second vision inspection device, and a third vision inspection device. The first loading tray conveyor, the second loading tray conveyor, and the multiple unloading tray conveyors are arranged side-by-side in sequence. The first loading tray conveyor is used to load trays fully loaded with chips. The second loading tray conveyor is used to load empty trays. The unloading tray conveyors are used to unload trays fully loaded with sorted chips. The first vision inspection device and the second vision inspection device are sequentially arranged above the center of the first loading tray conveyor along the conveying direction to inspect the chips on the trays. The reverse side is photographed and inspected sequentially; the tray-flipping robot spans over the ends of the first loading tray conveyor, the second loading tray conveyor, and the multiple unloading tray conveyors to flip the trays on the first loading tray conveyor and transfer them to the unloading tray conveyors, or to transfer empty trays from the second loading tray conveyor to the unloading tray conveyors; the third vision inspection device photographs and inspects the front side of the flipped chip; the sorting robot spans over the multiple unloading tray conveyors; the sorting robot includes a sorting arm and a fourth vision inspection device to photograph and inspect the front side of the chip and sort and transfer the chip between the trays of the multiple unloading tray conveyors; The first feeding tray conveying mechanism includes a track groove, a tray stacking fixture, a tray separating mechanism, a tray clamping mechanism, a tray clamping drive mechanism, a lifting mechanism, a buffer lifting mechanism, and a buffer support block. There are two sets of tray clamping mechanisms and tray driving mechanisms. The tray clamping mechanisms are slidably disposed on opposite sides within the track groove. The tray driving mechanisms are disposed on opposite sides within the track groove and drive the corresponding tray clamping mechanisms to move along the track groove, so that the two tray clamping mechanisms can convey trays in a staggered manner. The tray stacking fixture is disposed above the input end of the track groove and can stack trays. The tray separating mechanism is disposed on the track groove. It is located at the bottom of the tray stacking clamp to separate the tray at the lowest layer; the lifting mechanism is located below the track groove and below the tray stacking clamp to drive the tray to move between the tray stacking clamp and the clamping mechanism; the buffer lifting mechanism is located below the end of the track groove away from the loading and unloading area, and the buffer support block is located on the end of the track groove away from the tray stacking clamp. The buffer support block can flip upward to avoid the tray after being pushed upward by the tray, and can automatically flip downward to prevent the tray from falling after the tray rises to the correct position.

2. The chip inspection and sorting machine as described in claim 1, characterized in that: The material tray flipping robot includes a base frame, a horizontal moving mechanism, a moving support, two vertical moving mechanisms, a tray-holding cylinder, a gripper, and a flipping fixture. The horizontal moving mechanism is mounted on the base frame and its output end is connected to the moving support to drive the moving support to move horizontally. One of the vertical moving mechanisms is mounted on the moving support and its output end is connected to the tray-holding cylinder to drive the tray-holding cylinder to move vertically. The output end of the tray-holding cylinder is connected to the gripper to drive the gripper to grasp or release the material tray. The other vertical moving mechanism is mounted on the moving support and its output end is connected to the flipping fixture, which drives the material tray to flip.

3. The chip inspection and sorting machine as described in claim 2, characterized in that: The flipping fixture includes a base plate, a distributing cylinder, a lower plate, a lower plate cylinder, a clamping cylinder, and a rotating device. The base plate has a frame structure with a hollow center. The distributing cylinder is disposed on opposite sides of the upper surface of the base plate. The lower plate is disposed on opposite sides of the lower bottom surface of the base plate. The lower plate cylinder is disposed between the lower plate and the base plate to drive the lower plate closer to or away from the center of the base plate. The clamping cylinder is disposed between the base plate and the lower plate to drive the lower plate closer to or away from the bottom surface of the base plate.

4. The chip inspection and sorting machine as described in claim 3, characterized in that: The flipping fixture also includes an upper plate and an upper plate cylinder. The upper plate is respectively disposed on opposite sides of the upper surface of the substrate, and the upper plate cylinder is disposed between the upper plate and the substrate to drive the upper plate to move closer to or away from the center of the substrate.

5. The chip inspection and sorting machine as described in claim 3, characterized in that: The lower plate is provided with a slider, and the base plate is provided with a slide rail. The slider and the slide rail are slidably engaged. The slider is provided with a guide post, and the lower plate is slidably disposed on the guide post. An elastic element is provided between the lower plate and the slider to provide an elastic force that moves the lower plate away from the slider.

6. The chip inspection and sorting machine as described in claim 3, characterized in that: The flipping fixture also includes a vibrating plate cylinder, which is disposed on the base plate to vibrate the material tray.

7. The chip inspection and sorting machine as described in claim 6, characterized in that: The output end of the clamping cylinder is connected to a pressure plate, which extends to the bottom surface of the two lower plates so that the lower plates are pushed closer to the base plate during clamping.

8. The chip inspection and sorting machine as described in claim 1, characterized in that: The first visual inspection device includes a first bracket, a first horizontal drive mechanism, a first platform, a first vertical drive mechanism, and a first camera. The first horizontal drive mechanism is disposed on the first bracket and its output end is connected to the first platform to drive the first platform to move the first camera horizontally. The first vertical drive mechanism is disposed on the first platform and its output end is connected to the first camera to drive the first camera to move closer to or away from the tray.

9. The chip inspection and sorting machine as described in claim 1, characterized in that: The second visual inspection device includes a second bracket, a second horizontal drive mechanism, a second platform, a second vertical drive mechanism, and a second camera. The second horizontal drive mechanism is mounted on the second bracket and its output end is connected to the second platform to drive the second platform to slide the second camera horizontally. The second vertical drive mechanism is disposed on the second platform and its output end is connected to the second camera to drive the second camera to move closer to or away from the tray; the number of the second cameras is at least two.

10. The chip inspection and sorting machine as described in claim 1, characterized in that: The first feeding tray conveying mechanism, the second feeding tray conveying mechanism, and the unloading tray conveying mechanism have the same structure.

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