A multi-focus laser processing method and processing system based on vectorized path and light field control

Abstract

This invention provides a multi-focus laser processing method based on vectorized paths and light field control. The method first interprets and simulates SVG vector graphics encoding information, focusing on the tag information within the encoding. Vector paths are then simulated segment by segment from the coordinate information or function information represented by each tag. Finally, the multi-focus and vector paths are combined to generate multi-focus parallel vector paths by continuously switching the phase pattern on a spatial light modulator. This control method has great application prospects in the semiconductor industry, microfluidic devices, optical manipulation, laser cutting, and other fields.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a multi-focus laser processing method and processing system based on vectorized path and light field control. Background Art

[0002] In traditional laser direct writing technology, laser processing of complex structures is often performed through a single laser focus. Laser processing takes a long time and has low efficiency, which brings great inconvenience to the efficient processing of complex structures. In order to solve this problem, people have proposed a parallel laser processing method with multiple focuses to improve processing efficiency. At present, there are two main methods for obtaining multiple focuses: using fixed optical elements to achieve large-scale point arrays, and using spatial light modulators (SLM) to achieve controllable multi-focus arrays. The former is suitable for parallel processing of simple, identical structures, while SLM can realize flexible and controllable modulation of the focus shape, number and position in the multi-focus array by modulating the spatial distribution of the light field, which can significantly improve the efficiency and flexibility of laser processing and has broad application prospects in the field of laser processing.

[0003] Currently, there are numerous reports on multi-focus laser processing systems. For example, multi-focus parallel marking machines and multi-focus optical path systems for semiconductor laser processing have been reported. However, multi-focus parallel marking machines rely on galvanometer-based multi-focus processing, resulting in a fixed multi-focus spot shape and distribution. Simply moving the multi-focus through the galvanometer system does not allow for flexible processing. Semiconductor laser processing multi-focus optical path systems also have a limited number of multi-focus points that can be generated, making it difficult to effectively improve processing efficiency. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to address the deficiencies of the above-mentioned existing technologies and provide a multi-focus laser processing method and processing system based on vectorized paths and light field control. The system and method enable each focus to move flexibly and independently along its own path for orderly processing, greatly improving the processing efficiency and processing accuracy. The system and method have wide versatility and can be used in both macro laser processing and micro-nano processing.

[0005] To solve the above technical problems, the present invention adopts a technical solution: a multi-focus laser processing method based on vectorized path and light field control, characterized by comprising the following steps:

[0006] S1. Decoding the SVG vector coding information of the desired processing pattern by a computer, extracting the vector path of the desired processing pattern, and comparing the vector path with the SVG vector coding information until the shape outline is completely consistent;

[0007] S2. Determine the optical system parameters according to the processing task requirements, calculate the number K of multi-focus light spots, the light spot size and the light field modulation range based on the optical system parameters, and set the minimum light spot interval Δd;

[0008] S3. Discretize the pattern based on the minimum spot interval Δd and the actual size of the vector path pattern to be processed to obtain all laser focus coordinate information, and associate the path information of each laser focus movement with the path information in the SVG vector encoding information;

[0009] S4. Divide the vector path pattern into n processing zones based on the modulation range of the K focal spots, assign laser focus coordinate positions and path information to the K focal spots in each processing zone, and each processing zone has K paths;

[0010] S5. In each processing partition, a holographic phase image sequence and its loading order are generated;

[0011] S6. Modulate the laser by switching the phase pattern sequence of each processing partition on a pure phase spatial light modulator, thereby generating K focuses to perform multi-focus parallel processing on each processing partition.

[0012] Preferably, in said S1, the meaning of each tag in the SVG vector coding information of the required processing pattern is interpreted, one type of tag information is coordinate information, and the other type of tag information is function information of the curve.

[0013] Preferably, the discretization of the pattern in S3 specifically includes the following steps:

[0014] S301, the minimum interval Δd of the light spots ranges from d / 4 to d / 2, where d represents the diameter of the laser spot or the processed circular area;

[0015] S302. Based on Δd, each curve is discretized into coordinate points through a numerical interpolation method, and all coordinate points are sorted in order to generate a sequentially arranged array of horizontal coordinates X(l) and vertical coordinates Y(l), and their corresponding relationship array P(l), where l represents the lth coordinate point and P(l) represents the coordinate point to be processed next after the lth coordinate point is processed.

[0016] Preferably, the specific method of allocating the processing area and the processing path in S4 is:

[0017] S401, determining n processing partitions based on the total number of coordinate points to be processed and the distribution characteristics of the coordinate points;

[0018] S402, according to the position and area of the i-th processing partition, rename the coordinate point and its path generated in S3 in the i-th processing partition, and rename X(l), Y(l) and P(l) to X i (l), Y i (l) and P i (l), X i (l) = X(l) - X c (i) Y i (l) = Y(l) - Y c (i),X C (i) and Y C (i) represents the coordinate of the coordinate point in the i-th processing zone relative to the center of the processing zone;

[0019] S403, for the lth coordinate point and P i (l) Different distributions of coordinate points in the i-th processing area. Let the l-th coordinate point be the cutoff point of the i-th processing area, and let P i (l) The coordinate point is the initial point of another partition.

[0020] Preferably, the specific steps of generating the holographic phase image sequence and the loading order thereof in S5 are:

[0021] S501, dividing the rear aperture plane of the objective lens (9) into a strip-shaped areas according to the diameter D of the rear aperture plane, and further dividing each strip-shaped area into b smaller strip-shaped areas;

[0022] S502. Substitute the coordinates of the K foci into the phase expression

[0023]

[0024] Where λ is the laser wavelength, NA is the numerical aperture of the objective lens used, and n t is the refractive index of the objective lens, R is the maximum radius of the rear aperture plane of the objective lens, x0 and y0 are the orthogonal coordinates of the rear aperture plane of the objective lens, where X i (l) and Y i (l) is the relative displacement component in the x and y directions of the focal plane relative to the original focus of the objective lens;

[0025] By filling the holographic phase image that has been divided into two strips, a holographic phase image that can generate K focal points simultaneously can be obtained.

[0026] A processing system applied to the multi-focus laser processing method based on vectorized path and light field control, characterized in that it includes a laser, a beam shaping and modulation module, a dichroic mirror, an objective lens, a three-dimensional mobile platform, a sample stage, a camera and a computer, wherein the beam shaping and modulation module, the dichroic mirror and the objective lens are sequentially arranged in front of the laser emission port of the laser along the laser propagation direction, the laser emitted from the objective lens is directly facing the sample stage, the sample stage is arranged on the three-dimensional mobile platform, the three-dimensional mobile platform is connected to the computer via a mobile platform controller, the camera is arranged at a position where it can accurately capture the real-time processing status on the sample stage, and the camera only needs to be not arranged in the incident direction of the laser, and the camera is also connected to the computer;

[0027] The beam shaping and modulation module modulates and shapes the incident beam from the laser and adjusts the output power;

[0028] The dichroic mirror deflects and reflects the laser light from the beam shaping and modulation module to the objective lens;

[0029] The objective lens focuses the laser light onto a material placed on a sample stage;

[0030] The three-dimensional moving platform is used to adjust the position of the sample stage to process each processing area one by one;

[0031] The mobile platform controller is used to control the displacement of the three-dimensional mobile platform in three-dimensional directions;

[0032] The computer is used to control the entire processing system and obtain the real-time processing process monitored by the camera.

[0033] Preferably, the beam shaping and modulation module includes a laser energy control module, a laser beam expansion module, a laser spatial filtering module, an optical switch, a polarization modulation module and a pure phase spatial light modulator in sequence along the laser propagation direction;

[0034] The laser energy control module, laser beam expansion module, laser spatial filtering module and polarization modulation module are used to adjust the power, expand the beam, filter and change the polarization state of the laser;

[0035] The pure phase spatial light modulator modulates the light beam.

[0036] Preferably, when the light beam is incident on the pure phase spatial light modulator, the holographic phase image is loaded, and K multi-focal spots are generated at the focus of the objective lens. By continuous loading, multi-focal parallel processing of all processing positions in the processing area is completed, and the exposure time of the laser is controlled by controlling the time of loading the holographic phase image.

[0037] Compared with the prior art, the present invention has the following advantages:

[0038] The processing method of the present invention extracts processing path information by interpreting tag information within the SVG vector image encoding information, and performs regional processing based on the size of the required structure. A spatial light modulator generates multiple focal points, and all regions are processed sequentially and in parallel, achieving improved processing efficiency and flexibility. Furthermore, the allocation of processing paths facilitates tracking of the processing flow, enabling real-time monitoring of the processing progress and quality.

[0039] 2. The method and system proposed in the present invention can be well applied in the fields of semiconductor industry, bionic materials and structures, microfluidic devices, laser cutting, marking, 3D printing, etc.

[0040] 3. The processing method of the present invention discretizes the actual path based on a vector diagram and performs direct processing by optimizing the processing zones. Multiple light spots are directly moved within each processing zone, improving processing efficiency. By tracking the path, real-time monitoring of the processing process is achieved. A translation stage is used between processing zones to achieve large-scale processing. This results in high processing efficiency and precision.

[0041] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 Schematic diagram of the optical path of the system device of the present invention.

[0043] Figure 2 It is a flow chart of the processing method of the present invention.

[0044] Figure 3 This is an example diagram of a vector processing diagram in the present invention.

[0045] Figure 4 It is the vector processing path extracted in the present invention.

[0046] Figure 5 It is a multi-focus strip phase segmentation diagram generated in the present invention.

[0047] Description of reference numerals:

[0048] 1—Laser; 2—Laser energy control module; 3—Laser beam expansion module;

[0049] 4—Laser spatial filtering module; 5—Optical switch; 6—Polarization modulation module;

[0050] 7—Phase-only spatial light modulator; 8—Dichroic mirror; 9—Objective lens;

[0051] 10—Mobile platform controller; 11—Sample stage; 12—Camera;

[0052] 13—Computer. DETAILED DESCRIPTION

[0053] Example 1

[0054] like Figure 1 As shown, a processing system for the multi-focus laser processing method based on vectorized path and light field control includes a laser 1, a beam shaping and modulation module, a dichroic mirror 8, an objective lens 9, a three-dimensional mobile platform, a sample stage 11, a camera 12 and a computer 13. The beam shaping and modulation module, the dichroic mirror 8 and the objective lens 9 are sequentially arranged in front of the laser emission port of the laser 1 along the laser propagation direction. The laser emitted from the objective lens 9 is facing the sample stage 11. The sample stage 11 is arranged on a three-dimensional mobile platform. The three-dimensional mobile platform is connected to the computer 13 through a mobile platform controller 10. The camera 11 is arranged on a side opposite to the laser emission port of the dichroic mirror 8. In the direction of light emission, the camera 12 is also connected to the computer 13; the beam shaping and modulation module modulates and shapes the incident light beam from the laser 1 and adjusts the output power; the dichroic mirror 8 deflects and reflects the laser from the beam shaping and modulation module to the objective lens 9; the objective lens 9 focuses the laser onto the material placed on the sample stage 11; the three-dimensional mobile platform is used to adjust the position of the sample stage 11 to process each processing area one by one; the mobile platform controller 10 is used to control the displacement of the three-dimensional mobile platform in the three-dimensional direction; the computer 13 is used to control the entire processing system and obtain the real-time processing process monitored by the camera 12.

[0055] In this embodiment, the beam shaping and modulation module includes, in order along the laser propagation direction, a laser energy control module 2, a laser beam expansion module 3, a laser spatial filter module 4, an optical switch 5, a polarization modulation module 6, and a pure phase spatial light modulator 7. The laser energy control module 2, laser beam expansion module 3, laser spatial filter module 4, and polarization modulation module 6 are used to adjust the laser power, expand the beam, filter, and change the polarization state. The pure phase spatial light modulator 7 modulates the light beam.

[0056] In this embodiment, the beam shaping and modulation module includes, in order along the laser propagation direction, a first aperture stop, a first half-wave plate, a Glan prism, a first lens, a pinhole filter, an optical switch 5, a second aperture stop, a second lens, a second half-wave plate, and a pure phase-type liquid crystal spatial light modulator. The laser energy control module 2 corresponds to the first half-wave plate and the Glan prism. The laser beam expansion module 3 corresponds to the first aperture stop, the second aperture stop, the first lens, and the second lens. The laser spatial filtering module 4 corresponds to the pinhole filter. The polarization modulation module 6 corresponds to the second half-wave plate. A reflector is provided between the pure phase-type liquid crystal spatial light modulator and the dichroic mirror 8.

[0057] In this embodiment, the first half-wave plate is a half-wave plate manufactured by Soleibo, with a transmission range of 700-1000 nm. The second half-wave plate is a half-wave plate manufactured by Soleibo, with a transmission range of 650-1000 nm. Dichroic mirror 8 highly reflects light with wavelengths of 520-800 nm and transmits light in other wavelength ranges. Photoresist DETC is placed on sample stage 11. Objective lens 9 is a 100X oil-immersed objective lens with a NA of 1.25.

[0058] Example 2

[0059] A processing method of a multi-focus laser processing system based on vectorized path and light field control, such as Figure 2 At any time, including the following steps:

[0060] S1, such as Figure 3 and Figure 4 As shown, the SVG vector coding information of the carp pattern is interpreted by computer to extract the vector path of the required processing pattern, and the vector path is compared with the SVG vector coding information until the shape contour is completely consistent; according to the processing task requirements, the optical system parameters are determined, and the number of multi-focus spots K, spot size and light field modulation range are calculated based on the optical system parameters, and the minimum spot interval Δd is set. Different tags are interpreted when interpreting the coding information. <circle>The trajectory of the main solution simulation is Figure 3 The eyes of the carp, <ellipse>The main trajectory of the tag is the outline of the carp's body. <path>The main simulation trajectory is the remaining part. The trajectory of the fish head, fish scales and fish tail is depicted respectively, and then the computer interprets all the labels to simulate the following. Figure 4 The vector machining trajectory shown.

[0061] S3. Discretize the pattern based on the minimum spot interval Δd and the real size of the carp pattern, where the real size is the size of the processed structure, obtain all laser focus coordinate information, and associate the path information of each laser focus movement with the path information in the SVG vector encoding information;

[0062] S4. Divide the vector path pattern into n processing zones based on the modulation range of the K focal spots, assign laser focus coordinate positions and path information to the K focal spots in each processing zone, and each processing zone has K paths;

[0063] S5. In each processing partition, a holographic phase image sequence and its loading order are generated;

[0064] S6, Processing Preparation Stage: The laser entrance pupil power varies based on the number of modulated spots. For a single spot, the laser power is greater than 3 mW. The exposure time for a single phase image is 17 ms (or the phase image loading frequency is 60 Hz), and Δd is between 0.05 μm and 0.1 μm. A small amount of photoresist DETC is deposited onto a clean glass slide, which is then mounted on sample stage 11, above objective lens 9.

[0065] S6, Processing Stage: Laser 1 emits an 800nm wavelength femtosecond laser beam, which is incident on the beam shaping and modulation module for modulation and shaping. In the beam shaping and modulation module, the first aperture diaphragm, first lens, pinhole filter, second aperture diaphragm, and second lens sequentially collimate, expand, and filter the laser beam, modulating it into a linearly polarized beam with a fundamental transverse mode. The first half-wave plate and Glan prism are used to control the laser output energy and then incident on the second half-wave plate. The second half-wave plate aligns the linearly polarized beam with the operating direction of the liquid crystal panel of the phase-only liquid crystal spatial light modulator, and then it is incident on the phase-only liquid crystal spatial light modulator.

[0066] After the pure phase-type liquid crystal spatial light modulator modulates the light beam, it is incident on the reflector, reflected by the reflector to the dichroic mirror 8, and focused by the dichroic mirror 8 to the photoresist on the sample stage 11 under the action of the objective lens 9. Starting from the processing area i=1, the x-axis and y-axis of the three-dimensional mobile platform are moved to the processing area i. The z-axis of the three-dimensional mobile platform is used to find the appropriate focal plane. The optical switch 5 is turned on, and the phase map of the i-th processing area is loaded. The generated K light spots realize multi-focus parallel processing of the i-th processing area.

[0067] After processing the i-th area, turn off optical switch 5, effectively shutting off the laser. Processing continues on to the next area, i+1. Move the x- and y-axes of the 3D mobile platform to the i+1-th processing area. Use the z-axis of the 3D mobile platform to find a suitable focal plane. Turn on optical switch 5, load the phase map for the i+1-th processing area, and generate K light spots to achieve multi-focus parallel processing within the i+1-th processing area. After processing the i+1-th area, turn off optical switch 5. Repeat these steps until the last area is processed.

[0068] During processing, the computer 13 can monitor the entire processing process through the camera 12.

[0069] In this embodiment, the meaning of each tag in the SVG vector encoding information of the required processing pattern is interpreted in S1. One type of tag information is coordinate information, and the other type of tag information is function information of the curve.

[0070] In this embodiment, the discretization of the pattern in S3 specifically includes the following steps:

[0071] S301, the range of the minimum interval Δd of the laser spots is d / 4-d / 2, where d represents the diameter of the laser spot or the processed circular area, that is, the range of the minimum interval Δd is 0.05 μm-0.1 μm;

[0072] S302. Based on Δd, each curve is discretized into coordinate points by numerical interpolation method, and all coordinate points are sorted in order to generate a sequential array of horizontal coordinates X(l) and vertical coordinates Y(l), and their corresponding relationship array P(l), where l represents the lth coordinate point, 1≤l≤N total , N total is the total number of coordinate points to be processed. P(l) represents the coordinate point to be processed next after processing the lth coordinate point. For example, if P(3) = 8, then after processing the third coordinate point (X(3), Y(3)), the eighth coordinate point (X(8), Y(8)) will be processed.

[0073] In this embodiment, the specific method of allocating the processing area and the processing path in S4 is:

[0074] S401, determining n processing partitions based on the total number of coordinate points to be processed and the distribution characteristics of the coordinate points;

[0075] S402, according to the position and area of the i-th processing partition, rename the coordinate point and its path generated in S3 in the i-th processing partition, and rename X(l), Y(l) and P(l) to X i (l), Y i (l) and P i (l), X i (l) = X(l) - X c (i) Y i (l) = Y(l) - Y c (i),X C (i) and Y C (i) represents the coordinate of the coordinate point in the i-th processing zone relative to the center of the processing zone;

[0076] S403, for the lth coordinate point and P i (l) Different distributions of coordinate points in the i-th processing area. Let the l-th coordinate point be the cutoff point of the i-th processing area, and let P i (l) The coordinate point is the initial point of another partition.

[0077] In this embodiment, the specific steps of generating the holographic phase image sequence and the loading order thereof in S5 are as follows:

[0078] S501, such as Figure 5 As shown, the rear aperture plane of the objective lens 9 is divided into a strip-shaped areas by the diameter D of the rear aperture plane, and each strip-shaped area is further divided into b smaller strip-shaped areas; the number of a and b is determined by parameters such as the optical system parameters, the parameters of the pure phase spatial light modulator 7, the material to be processed, the laser power density requirement of each light spot, the processing accuracy requirement, and the modulation efficiency.

[0079] S502. Substitute the coordinates of the K foci into the phase expression

[0080]

[0081] Where λ is the laser wavelength, NA is the numerical aperture of the objective lens used, and n t is the refractive index of the objective lens, R is the maximum radius of the rear aperture plane of the objective lens, x0 and y0 are the orthogonal coordinates of the rear aperture plane of the objective lens, where X i (l) and Y i (l) is the relative displacement component in the x and y directions of the focal plane relative to the original focus of the objective lens;

[0082] By filling the holographic phase image that has been divided into two strips, a holographic phase image that can generate K focal points simultaneously can be obtained.

[0083] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any way. Any simple modification, change and equivalent variation made to the above embodiment based on the essence of the invention technology shall still fall within the scope of protection of the technical solution of the present invention.< / path> < / ellipse> < / circle>

Claims

1. A multi-focus laser processing method based on vectorized path and light field control, characterized in that: The following steps are involved: S1, interpreting the SVG vector coding information of the desired processing pattern through a computer (13), extracting the vector path of the desired processing pattern, and comparing the vector path with the SVG vector coding information until the shape contours are completely consistent; S2. Determine the optical system parameters according to the processing task requirements, calculate the number K of multi-focus spots, spot size and light field modulation range according to the optical system parameters, and set the minimum spot interval ; S3, based on the minimum interval of the spot Discretize the pattern based on the actual size of the vector path pattern to be processed, obtain all the laser focus coordinate information, and associate the path information of each laser focus movement with the path information in the SVG vector encoding information; S4. Divide the vector path pattern into n processing zones based on the modulation range of the K focal spots, assign laser focus coordinate positions and path information to the K focal spots in each processing zone, and each processing zone has K paths; S5. In each processing partition, a holographic phase image sequence and its loading order are generated; S6, modulating the laser by switching the phase image sequence of each processing partition on the pure phase spatial light modulator (7), thereby generating K focuses to perform multi-focus parallel processing on each processing partition; The discretization processing of the pattern in S3 specifically includes the following steps: S301, minimum interval of light spots The value range is d / 4-d / 2, where d represents the diameter of the laser spot or the processed circular area; S302, based on , through the numerical interpolation method, each curve is discretized into coordinate points, and all coordinate points are sorted in order to generate the horizontal coordinates arranged in order , vertical axis Arrays, and their corresponding relational arrays , Representative coordinate points, Represents the completion of the The coordinate point for the next processing after the coordinate point; The specific method of allocating processing partitions and processing paths in S4 is: S401, determining n processing partitions based on the total number of coordinate points to be processed and the distribution characteristics of the coordinate points; S402, according to the position and area of the i-th processing partition, rename the coordinate point and its path generated in S3 in the i-th processing partition, and 、 and Renamed to 、 and , 、 , and Represents the coordinates of the coordinate point in the i-th processing zone relative to the center of the processing zone; S403, for the Coordinate points and Different distribution of coordinate points in the i-th processing area, let the The coordinate point is the cutoff point of the i-th processing area, let The coordinate point is the initial point of another partition; The specific steps of generating the holographic phase image sequence and its loading order in S5 are as follows: S501, dividing the rear aperture plane of the objective lens (9) into a strip-shaped areas according to the diameter D of the rear aperture plane, and further dividing each strip-shaped area into b smaller strip-shaped areas; S502. Substitute the coordinates of the K foci into the phase expression ； Where λ is the laser wavelength, NA is the numerical aperture of the objective lens used, and n t is the refractive index of the objective lens, R is the maximum radius of the rear aperture plane of the objective lens, x0 and y0 are the orthogonal coordinates of the rear aperture plane of the objective lens, where X i (l) and Y i (l) is the relative displacement component in the x and y directions of the focal plane relative to the original focus of the objective lens; By filling the holographic phase image that has been divided into two strips, a holographic phase image that can generate K focal points simultaneously can be obtained.

2. The multi-focus laser processing method based on vectorized path and light field control according to claim 1, characterized in that: In the S1, the meaning of each tag in the SVG vector coding information of the required processing pattern is interpreted. One type of tag information is coordinate information, and the other type of tag information is function information of the curve.

3. A processing system for implementing the multi-focus laser processing method based on vectorized path and light field control as described in any one of claims 1-2, characterized in that: The invention comprises a laser (1), a beam shaping and modulation module, a dichroic mirror (8), an objective lens (9), a three-dimensional mobile platform, a sample stage (11), a camera (12) and a computer (13), wherein the beam shaping and modulation module, the dichroic mirror (8) and the objective lens (9) are sequentially arranged in front of the laser emission port of the laser (1) along the laser propagation direction, the laser light emitted from the objective lens (9) faces the sample stage (11), the sample stage (11) is arranged on the three-dimensional mobile platform, the three-dimensional mobile platform is connected to the computer (13) via a mobile platform controller (10), the camera (12) is arranged at a position where it can accurately capture the real-time processing status of the sample stage (11), and the camera (12) is connected to the computer (13); The beam shaping and modulation module modulates and shapes the incident beam from the laser (1) and adjusts the output power; The dichroic mirror (8) deflects and reflects the laser light from the beam shaping and modulation module to the objective lens (9); The objective lens (9) focuses the laser onto the material placed on the sample stage (11); The three-dimensional mobile platform is used to adjust the position of the sample stage (11) to process each processing area one by one; The mobile platform controller (10) is used to control the displacement of the three-dimensional mobile platform in three-dimensional directions; The computer (13) is used to control the entire processing system and obtain the real-time processing process monitored by the camera (12).

4. The processing system according to claim 3, characterized in that The beam shaping and modulation module comprises, in sequence along the laser propagation direction, a laser energy control module (2), a laser beam expansion module (3), a laser spatial filtering module (4), an optical switch (5), a polarization modulation module (6), and a pure phase spatial light modulator (7); The laser energy control module (2), the laser beam expansion module (3), the laser spatial filtering module (4) and the polarization modulation module (6) are used to adjust the power, expand the beam, filter and change the polarization state of the laser; The pure phase spatial light modulator (7) modulates the light beam.

5. The processing system according to claim 4, characterized in that When the light beam is incident on the pure phase spatial light modulator (7), the holographic phase image is loaded, and K multi-focal light spots are generated at the focus of the objective lens. By continuously loading, multi-focal parallel processing of all processing positions in the processing area is completed. By controlling the time of loading the holographic phase image, the exposure time of the laser is controlled.

Images