Substrate processing apparatus, teaching information generation method, teaching kit, and substrate clamp

Abstract

A substrate processing apparatus, teaching information generation method, teaching kit, and substrate holder are provided. In the substrate processing apparatus, in a state in which a substrate holder on which three photosensors arranged in a non-linear shape are provided on a lower surface is held by a hand positioned above the substrate holder, the substrate holder is rotated by a substrate rotation mechanism, thereby forming a circular circumferential rotation track of a mark provided in advance on the substrate holder. A teaching unit calculates a relative position of the hand with respect to the substrate holder in a plan view based on relative positions with respect to the rotation track obtained by the three photosensors, respectively, and generates horizontal teaching information indicating a relative positional relationship of the hand and the substrate holder in the plan view. Thus, it is possible to simplify a generation process of the teaching information.

Description

[0001] This application claims priority to Japanese Patent Application JP2021-049840, filed on March 24, 2021, and incorporates the entire disclosure of that application. Technical Field

[0002] This invention relates to a technique for generating teaching information in a substrate processing apparatus, which teaches the substrate handling position of a handling robot. Background Technology

[0003] Traditionally, in substrate processing apparatuses that process substrates, substrates stored in FOUPs (Flatbed Units) or similar containers are moved out by a transfer robot and transferred to a central robot, and then moved into a processing unit for various processing steps. In such substrate processing apparatuses, although a transport path for the substrates using a central robot or similar transport robot is pre-set, the transport robot must be actually moved to teach the substrates their specific transport positions relative to the processing unit, such as their entry and exit points. This teaching process is performed, for example, when the substrate processing apparatus is started up or before reuse after disassembly and maintenance.

[0004] For example, regarding the teaching process described in Japanese Patent Application Publication No. 2001-156153 (Document 1) and Japanese Patent Application Publication No. 2006-332543 (Document 2), a target fixture for teaching is held on the substrate holding part of the processing unit. A photosensitive sensor held by a transport robot is used to detect a protrusion (i.e., the detected part) protruding upwards from the center of the target fixture, thereby detecting the relative position between the substrate holding part and the transport robot. Furthermore, the transport robot is repeatedly moved until this relative position becomes a set value, thereby adjusting the relative position of the transport robot relative to the substrate holding part.

[0005] Furthermore, regarding the teaching process described in References 1 and 2, it is necessary to precisely adjust the relative position of the target gripper with respect to the substrate holding part before driving the handling robot, and to hold the target gripper in the substrate holding part. Therefore, adjusting the position of the target gripper requires a significant amount of time and labor. In addition, the position adjustment of the target gripper needs to be performed separately in each of the multiple processing units of the substrate processing apparatus, resulting in the aforementioned teaching process being extremely time-consuming and labor-intensive. Summary of the Invention

[0006] This invention relates to a substrate processing device and aims to simplify the generation and processing of teaching information.

[0007] A preferred embodiment of the substrate processing apparatus of the present invention includes: a processing unit that performs predetermined processing on a substrate; a transport robot that transports the substrate to the processing unit; and a teaching unit that teaches the transport robot in the processing unit the substrate transport position. The processing unit includes: a substrate holding unit that holds the substrate in a horizontal position; and a substrate rotating mechanism that rotates the substrate holding unit about a rotation axis pointing vertically. The transport robot has a hand that transfers the substrate between itself and the substrate holding unit. While holding a substrate clamp with three optical sensors arranged non-linearly on its lower surface using the hand located above the substrate holding unit, the substrate holding unit is rotated by the substrate rotating mechanism to form a circumferential rotation trajectory marked on the substrate holding unit beforehand. The teaching unit calculates the relative position of the hand with respect to the substrate holding unit from a top-view perspective based on the relative positions obtained by the three optical sensors relative to the rotation trajectory, and generates horizontal teaching information indicating an appropriate relative positional relationship between the hand and the substrate holding unit from a top-view perspective.

[0008] According to the present invention, the generation and processing of teaching information can be simplified.

[0009] Preferably, the substrate holding portion is a mechanical chuck that mechanically holds the outer periphery of the substrate using a plurality of circumferentially arranged pins. The mark is one or more of the plurality of pins.

[0010] Preferably, the substrate holding portion has a plurality of suction ports on its upper surface to hold and hold the substrate in a vacuum chuck. The mark is one or more of the plurality of suction ports.

[0011] Preferably, based on the relative position of the hand with respect to the substrate holder as calculated by the teaching unit in a top-view manner, the hand is moved such that the center of the substrate clamp overlaps with the rotation axis in a top-view manner. The substrate holder is rotated by the substrate rotation mechanism, thereby re-forming the marked rotation trajectory. After re-forming the rotation trajectory, the teaching unit calculates the relative position of the hand with respect to the substrate holder in a top-view manner again based on the relative positions with respect to the rotation trajectory obtained by the three optical sensors, and generates the horizontal teaching information.

[0012] Preferably, the transport robot also has another hand, which is located below the first hand and performs the transfer of the substrate between itself and the substrate holding part. The teaching unit generates another level teaching information about the other hand using the same method as the level teaching information about the first hand.

[0013] Preferably, a contact sensor is provided on the lower surface of the substrate clamp, which detects contact with the substrate holding portion. The handling robot brings the hand closer to the substrate holding portion in the vertical direction. Based on the output from the contact sensor, the teaching unit generates vertical teaching information indicating the appropriate relative positional relationship between the hand and the substrate holding portion in the vertical direction.

[0014] Preferably, the substrate holding portion is a mechanical chuck that mechanically holds the outer periphery of the substrate using a plurality of circumferentially arranged pins. The contact sensor includes a plurality of sensor elements arranged circumferentially on the outer periphery of the lower surface of the substrate clamp.

[0015] Preferably, the processing unit further includes a housing that houses the substrate holding portion and has an opening for inserting the substrate. When the hand is inserted into the opening of the housing, an image showing the relative position of the hand and the opening is acquired. Based on the image, the teaching unit generates insertion teaching information showing the appropriate relative positional relationship between the hand and the opening.

[0016] Preferably, the captured image is an image of the opening captured using a camera mounted on the hand or the substrate clamp.

[0017] Another preferred embodiment of the substrate processing apparatus of the present invention includes: a processing unit that performs predetermined processing on a substrate; a transport robot that transports the substrate to the processing unit; and a teaching unit that teaches the transport robot in the processing unit the substrate transport position. The processing unit includes: a substrate holding unit that holds the substrate in a horizontal position; and a substrate rotating mechanism that rotates the substrate holding unit about a rotation axis in the vertical direction. The transport robot has a hand that transfers the substrate between itself and the substrate holding unit. In the processing unit, a rotating unit other than the substrate holding unit also rotates about the rotation axis. While holding a substrate clamp with three optical sensors arranged in a non-linear configuration using the hand located above the substrate holding unit, the rotating unit is rotated to form a circumferential rotation trajectory marked on the rotating unit beforehand. The teaching unit calculates the relative position of the hand relative to the rotation axis from a top view based on the relative positions of the hand and the substrate holding part obtained by the three optical sensors respectively, and generates horizontal teaching information that represents the appropriate relative positional relationship between the hand and the substrate holding part from a top view.

[0018] The present invention also provides a method for generating teaching information, which generates teaching information on the substrate transport position of a transport robot in a teaching processing unit within a substrate processing apparatus. The substrate processing apparatus includes a processing unit that performs predetermined processing on a substrate, and a transport robot that transports the substrate to the processing unit. The processing unit includes: a substrate holding unit that holds the substrate in a horizontal position; and a substrate rotating mechanism that rotates the substrate holding unit about a rotation axis pointing vertically. The transport robot has a hand that transfers the substrate between itself and the substrate holding unit. A preferred embodiment of the present invention provides a teaching information generation method comprising: a) a step of holding a substrate clamp having three optical sensors arranged in a non-linear configuration on its lower surface using the hand; b) a step of rotating the substrate holding portion by means of the substrate rotation mechanism to form a circumferential rotation trajectory marked on the substrate holding portion in advance; and c) a step of calculating the relative position of the hand relative to the substrate holding portion from a top view based on the relative positions obtained by the three optical sensors of the substrate clamp located above the substrate holding portion relative to the rotation trajectory, and generating horizontal teaching information representing an appropriate relative positional relationship between the hand and the substrate holding portion from a top view.

[0019] The present invention also provides a teaching kit for use in a substrate processing apparatus when moving a substrate to a position of a transport robot in a transport robot teaching processing unit. The substrate processing apparatus includes a processing unit that performs predetermined processing on a substrate, and a transport robot that moves the substrate to the processing unit. The processing unit includes: a substrate holding unit that holds the substrate in a horizontal position; and a substrate rotating mechanism that rotates the substrate holding unit about a rotation axis in the vertical direction. The transport robot has a hand that transfers the substrate between itself and the substrate holding unit. A preferred embodiment of the teaching kit includes: a substrate clamp having three optical sensors arranged non-linearly on its lower surface; and a storage medium storing a program for generating horizontal teaching information indicating the appropriate relative positional relationship between the hand and the substrate holding unit in a top view. With the substrate clamp held by the hand located above the substrate holding unit, the substrate holding unit is rotated by the substrate rotating mechanism to form a circumferential rotation trajectory marked pre-set on the substrate holding unit. The computer executes the program to calculate the relative position of the hand with respect to the substrate holding part from a top view, based on the relative positions of the hands with respect to the rotation trajectory obtained by the three optical sensors, and generates the horizontal teaching information.

[0020] The present invention also provides a substrate clamp for use in a substrate processing apparatus for generating teaching information on the substrate handling position of a transport robot in a teaching processing unit. The substrate processing apparatus includes a processing unit that performs predetermined processing on a substrate, and a transport robot that transports the substrate to the processing unit. A preferred embodiment of the substrate clamp of the present invention includes: a generally circular clamp body; and three optical sensors arranged non-linearly on the lower surface of the clamp body. The processing unit includes: a substrate holding portion that holds the substrate in a horizontal position; and a substrate rotating mechanism that rotates the substrate holding portion about a rotation axis pointing vertically. The transport robot has a hand that transfers the substrate between itself and the substrate holding portion. The generation of the teaching information includes: a) a step of holding the substrate clamp with the hand; b) a step of rotating the substrate holding part by means of the substrate rotation mechanism to form a circumferential rotation trajectory marked on the substrate holding part in advance; and c) a step of calculating the relative position of the hand with respect to the substrate holding part in a top view based on the relative position of the three optical sensors of the substrate clamp located above the substrate holding part relative to the rotation trajectory, and generating horizontal teaching information representing the appropriate relative positional relationship between the hand and the substrate holding part in a top view.

[0021] Preferably, the substrate clamp further includes a contact sensor disposed on the lower surface of the clamp body and detecting contact with the substrate holding portion. The generation of the teaching information further includes: d) after step c), bringing the hand closer to the substrate holding portion in the vertical direction, and generating vertical teaching information representing the appropriate relative positional relationship between the hand and the substrate holding portion in the vertical direction based on the output from the contact sensor. The substrate holding portion is a mechanical chuck that mechanically holds the outer periphery of the substrate clamp using a plurality of circumferentially arranged pins. The contact sensor is configured on the outer periphery of the lower surface of the clamp body to avoid contact with the hand.

[0022] The above-mentioned objectives, as well as other objectives, features, methods, and advantages, can be understood through the following detailed description of the invention with reference to the accompanying drawings. Attached Figure Description

[0023] Figure 1 This is a top view of a substrate processing apparatus according to one embodiment.

[0024] Figure 2 This is a front view showing the interior of the substrate processing device.

[0025] Figure 3 It is a top view showing the area near the hand of the handling arm magnified.

[0026] Figure 4 This is a diagram representing an example of a processing unit.

[0027] Figure 5 This is a top view of the substrate holding section.

[0028] Figure 6 It is a diagram representing the structure of a computer.

[0029] Figure 7 It is a block diagram that represents the functions implemented by a computer.

[0030] Figure 8 This is a diagram illustrating the process of generating instructional information.

[0031] Figure 9 This is a bottom view of the substrate clamp.

[0032] Figure 10 This is a top view of the substrate holding section.

[0033] Figure 11 This is a diagram illustrating an example of how horizontal teaching information is acquired.

[0034] Figure 12 This is a diagram illustrating an example of how horizontal teaching information is acquired.

[0035] Figure 13 This is a bottom view of another substrate clamp.

[0036] Figure 14 This is a top view of another substrate holding section.

[0037] Figure 15 This is a top view of another substrate holding section.

[0038] In the picture:

[0039] 1—Substrate processing apparatus; 7—Substrate clamp; 8—Computer; 9—Substrate; 21—Processing unit; 22—Central robot; 31—Outer shell; 32, 32a—Substrate holding part; 33—Substrate rotation mechanism; 34—Cup part; 63—Teaching part; 70—(Substrate clamp) center; 71—(Substrate clamp) lower surface; 72—Photoelectric sensor; 74—Contact sensor; 75—Camera; 80—Storage medium; 89—Program; 226—Hand; 311—Opening; 323—Pin; 324—Rotation trajectory; 325—Suction port; 741—Sensor element; J1—Rotation axis; S11~S15—Steps. Detailed Implementation

[0040] Figure 1 This is a top view of a substrate processing apparatus 1 according to an embodiment of the present invention. Figure 2From Figure 1 A diagram of the substrate processing apparatus 1 for observing the II-II line. Furthermore, an orthogonal XYZ coordinate system with the Z-axis as the vertical direction (i.e., the up-down direction) and the XY plane as the horizontal plane is appropriately added to the following referenced figures. Additionally, in Figure 2 A portion of the (+X) side of the substrate processing apparatus 1 is omitted from the illustration.

[0041] The substrate processing apparatus 1 is an apparatus for continuously processing multiple semiconductor substrates 9 (hereinafter referred to as "substrate 9") that are generally in the shape of a circular plate. Liquid processing, such as supplying processing liquid to the substrate 9, is performed in the substrate processing apparatus 1.

[0042] The substrate processing apparatus 1 includes: multiple carrier stages 11, a transposition block 10, a processing block 20, a placement unit 40, and a computer 8. The transposition block 10 and the processing block 20 are also referred to as a transposition unit and a processing unit, respectively. Furthermore, the transposition block 10 is also referred to as an Equipment Front End Module (EFEM) unit, etc. Figure 1 In the example, from the (-X) side toward the (+X) side, there are a plurality of (e.g., three) vehicle platforms 11, a transposition block 10 and a processing block 20 arranged sequentially and adjacently.

[0043] Multiple carrier platforms 11 are arranged along the (-X) side wall of the transposition block 10 in the Y direction. Each carrier platform 11 serves as a mounting platform for a carrier 95. The carrier 95 is capable of accommodating multiple circular plate-shaped substrates 9. Openings are provided on the (-X) side wall of the transposition block 10 at positions corresponding to the carriers 95 on each carrier platform 11. Carrier gates are provided at these openings, and these gates are opened and closed when the substrates 9 are moved in and out of the carriers 95.

[0044] The carrier 95, which holds multiple unprocessed substrates 9, is moved from outside the substrate processing apparatus 1 into each carrier stage 11 and placed thereon using an OHT (Overhead Hoist Transport) or similar means. Furthermore, the processed substrates 9, having completed their processing in the processing block 20, are again placed in the carrier 95 on the carrier stage 11. The carrier 95 holding the processed substrates 9 is then moved outside the substrate processing apparatus 1 using an OHT or similar means. In other words, the carrier stage 11 functions as a substrate storage unit for accumulating both unprocessed and processed substrates 9.

[0045] The carrier 95 is, for example, a FOUP (Front Opening Unified Pod) that houses the substrate 9 in a sealed space. The carrier 95 is not limited to a FOUP; for example, it can also be an SMIF (Standard Mechanical Interface) pod or an OC (Open Box) that exposes the housed substrate 9 to the outside atmosphere. In addition, the number of carrier stages 11 can be one or more.

[0046] The transposition block 10 receives the unprocessed substrate 9 from the carrier 95 and transfers it to the processing block 20. Additionally, the transposition block 10 receives the processed substrate 9 removed from the processing block 20 and moves it into the carrier 95. A transposition robot 12 is disposed within the internal space 100 of the transposition block 10, which performs the moving of the substrate 9 into and out of the carrier 95.

[0047] The indexing robot 12 includes two transport arms 121a and 121b, an arm platform 122, and a movable stage 123. The two transport arms 121a and 121b are mounted on the arm platform 122. The movable stage 123 is screwed to a ball screw 124, which extends parallel to the arrangement direction of the plurality of carrier stages 11 (i.e., along the Y direction) and is configured to slide freely relative to two guide rails 125. When the ball screw 124 is rotated by a rotary motor (not shown), the indexing robot 12, including the movable stage 123, moves horizontally along the Y direction.

[0048] The arm platform 122 is mounted on the movable stage 123. The movable stage 123 has a motor (not shown) that rotates the arm platform 122 about a rotation axis in the vertical direction (i.e., the Z direction), and a motor (not shown) that moves the arm platform 122 in the vertical direction. The transport arms 121a and 121b are arranged vertically and separately on the arm platform 122.

[0049] Each of the transport arms 121a and 121b has a hand 126, which is roughly U-shaped when viewed from above, at its front end. The hand 126 includes, for example, a base extending in the width direction and two claw portions extending approximately parallel to the length direction perpendicular to the width direction from both ends of the base in the width direction. Each of the transport arms 121a and 121b uses the hand 126 to support the lower surface of a substrate 9. A movement limiting mechanism (not shown) is provided on the hand 126, which can precisely fix the relative position of the substrate 9 with respect to the hand 126. This movement limiting mechanism can be, for example, multiple protrusions that contact the side edge of the substrate 9 to mechanically limit its position, or multiple suction ports that suction the lower surface of the substrate 9.

[0050] The handling arms 121a and 121b are driven by a drive mechanism (not shown) built into the arm platform 122, which causes the multi-joint mechanism to flex and extend, thereby allowing them to move independently of each other in the horizontal direction (i.e., radially about the rotation axis of the arm platform 122). In other words, the hand 126 is positioned on the rotary robot 12 in a manner that allows for free forward and backward movement, free lifting and lowering, and free rotation. Furthermore, the rotary robot 12 can have one or more handling arms.

[0051] The indexing robot 12 moves the transport arms 121a and 121b, which hold the substrate 9 using the hand 126, to the carrier 95 and the placement unit 40 respectively on the carrier table 11, thereby transporting the substrate 9 between the carrier 95 and the placement unit 40. The aforementioned movement mechanism in the indexing robot 12 is not limited to the above example and can be other mechanisms. For example, as a mechanism for moving the transport arms 121a and 121b in the vertical direction, a belt feed mechanism using pulleys and a timing belt can also be used.

[0052] The processing block 20 includes: a transport path 23 for transporting the substrate 9, and a plurality of processing units 21 arranged around the transport path 23. Figure 1 In the example, the transport path 23 extends in the X direction from the center of the Y direction of the processing block 20. A central robot 22 is arranged in the internal space 230 of the transport path 23, which performs the transport of the substrate 9 to each processing unit 21.

[0053] The central robot 22 includes: two handling arms 221a and 221b, an arm platform 222, and a base 223. The two handling arms 221a and 221b are mounted on the arm platform 222. The base 223 is fixed to the frame of the processing block 20. Therefore, the base 223 of the central robot 22 does not move in the horizontal or vertical directions. Alternatively, the base 223 of the central robot 22 may be movable, for example, in the horizontal direction.

[0054] The arm platform 222 is mounted on the base 223. The base 223 houses a motor (not shown) that rotates the arm platform 222 about a vertical axis and a motor (not shown) that moves the arm platform 222 vertically. The transport arms 221a and 221b are vertically and separately mounted on the arm platform 222.

[0055] Hands 226, which are roughly U-shaped when viewed from above, are respectively provided at the front ends of the handling arms 221a and 221b. Figure 3 This is a top view showing an enlarged view of the vicinity of the hand 226 of the conveying arm 221a. The hand 226 of the conveying arm 221b also has the same... Figure 3 The same structure as shown. Figure 3The illustrated hand 226 includes a base 227 extending in the width direction and two claw portions 228 extending substantially parallel to the length direction perpendicular to the width direction from both ends of the base 227 in the width direction. A movement limiting mechanism (not shown) is provided on the hand 226, which can precisely fix the relative position of the substrate 9 with respect to the hand 226. This movement limiting mechanism can be, for example, a plurality of protrusions that contact the side edges of the substrate 9 to mechanically limit the position of the substrate 9, or a plurality of suction ports that adsorb onto the lower surface of the substrate 9.

[0056] Handling arms 221a and 221b each hold a substrate 9 via hand 226. Figure 3 In the diagram, the position indicated by the × mark is the center position of the hand 226, i.e., the hand center position 220. The hand center position 220 is a virtual point located between the two claws 228. Regarding the hand center position 220, the hand 226 is used to hold the substrate 9 in the designed position (i.e., in...). Figure 3 When viewed from above, the position indicated by the double-dotted line is the center of substrate 9.

[0057] The handling arms 221a and 221b are driven by a drive mechanism (not shown) built into the arm platform 222, which causes the multi-joint mechanism to flex and extend, thereby allowing them to move independently of each other in the horizontal direction (i.e., radially about the rotation axis of the arm platform 222). In other words, the hand 226 is positioned on the central robot 22 in a manner that allows for free forward and backward movement, free lifting and lowering, and free rotation. Furthermore, the central robot 22 can have one or more handling arms.

[0058] The central robot 22 is a transport robot that moves the transport arms 221a and 221b, which hold the substrate 9 using the hand 226, to the placement unit 40 and the multiple processing units 21 respectively, thereby transporting the substrate 9 between the placement unit 40 and the processing units 21. The moving mechanism in the central robot 22 is not limited to the example described above, and other mechanisms may also be used. For example, as a mechanism for moving the transport arms 221a and 221b in the vertical direction, a belt feed mechanism using pulleys and timing belts may also be employed.

[0059] Each processing unit 21 is a processing unit that performs a predetermined process on the substrate 9. Figure 1 and Figure 2 In the example shown, twelve processing units 21 are arranged in processing block 20. Specifically, when viewed from above, four groups of three processing units 21 stacked in the Z direction are arranged around the central robot 22. The number of processing units 21 arranged in processing block 20 can be varied in more than one range.

[0060] The placement unit 40 is disposed at the connection between the transposition block 10 and the processing block 20. As described above, the transposition robot 12 and the central robot 22 can reach the placement unit 40. The placement unit 40 is connected to a plurality of processing units 21 via a transport path 23 in which the central robot 22 is configured.

[0061] The transfer robot 12 places the unprocessed substrate 9, which is removed from the carrier 95, into the placement unit 40. The central robot 22 removes the unprocessed substrate 9 from the placement unit 40 and moves it into the processing unit 21. Additionally, the central robot 22 places the processed substrate 9, which is removed from the processing unit 21, into the placement unit 40. The transfer robot 12 removes the processed substrate 9 from the placement unit 40 and moves it into the carrier 95. In other words, the placement unit 40 holds: the unprocessed substrate 9 transferred from the transfer robot 12 to the central robot 22, and the processed substrate 9 transferred from the central robot 22 to the transfer robot 12.

[0062] Figure 4 This diagram illustrates an example of the processing unit 21. The processing unit 21 includes: a housing 31, a substrate holding portion 32, a substrate rotating mechanism 33, a cup portion 34, and a processing nozzle 35. The substrate holding portion 32, the substrate rotating mechanism 33, the cup portion 34, and the processing nozzle 35 are housed inside the housing 31. An opening 311 is provided on the side wall of the housing 31, which is used for utilizing the central robot 22 (see reference 22). Figure 1 and Figure 2 The substrate 9 is moved inside. The opening 311 can be opened and closed, and is open when the substrate 9 is moved in or out, and closed when the substrate 9 is processed. Liquid processing, such as cleaning, is performed on the substrate 9 in the processing unit 21.

[0063] exist Figure 4 In the example, the substrate holding part 32 is a mechanical chuck that holds the substrate 9 in a horizontal state. The substrate holding part 32 includes a base 321, a spindle 322, and a plurality of latches 323. The base 321 is a generally circular plate-shaped component centered on a rotation axis J1 pointing in the vertical direction. Furthermore, although in the following description, Figure 4 The vertical direction is consistent with the Z direction mentioned above, but it is not necessary to be consistent. The main spindle 322 is a generally cylindrical or generally cylindrical component centered on the rotation axis J1. The main spindle 322 extends downward from the lower surface of the base 321 and is connected to the substrate rotation mechanism 33.

[0064] Figure 5 This is a top view showing the substrate holding section 32. (Example) Figure 4 and Figure 5As shown, a plurality of (e.g., six) latches 323 are erected on the upper surface of the base 321. The plurality of latches 323 are arranged in a circumferential configuration on the outer periphery of the upper surface of the base 321. Specifically, the plurality of latches 323 are arranged on the same circumference centered on the rotation axis J1. The plurality of latches 323 are arranged at approximately equal angular intervals in the circumferential direction (hereinafter also referred to as "circumferential direction") centered on the rotation axis J1. The plurality of latches 323 are in direct contact with the outer periphery of the substrate 9, mechanically holding the outer periphery of the substrate 9. With the substrate 9 held by the plurality of latches 323, the upper surface of the base 321 is separated from the lower surface of the substrate 9 in a vertical direction.

[0065] The substrate rotation mechanism 33 rotates the substrate holding portion 32 around the rotation axis J1, thereby rotating the substrate 9 held by the substrate holding portion 32. The substrate rotation mechanism 33 is, for example, an electric motor connected to the main shaft 322 of the substrate holding portion 32. The substrate rotation mechanism 33 may also be a rotation mechanism other than an electric motor. The substrate rotation mechanism 33 is housed inside a cover 331 disposed below the substrate holding portion 32.

[0066] The processing nozzle 35 sprays processing liquid from above the substrate 9 onto the upper surface of the substrate 9. Figure 4 The diagram omitting the structure supporting the processing nozzle 35 above the substrate 9 is omitted. The cup portion 34 is a generally cylindrical component that surrounds the substrate holding portion 32 throughout its circumference. The cup portion 34 is a liquid cup that receives processing liquid or the like that splashed out from the rotating substrate 9. The cup portion 34 can move vertically using a cup lifting mechanism (not shown). When processing the substrate 9, the cup portion 34... Figure 4 As shown, it is positioned radially (hereinafter also referred to as "radial") centered on the rotation axis J1, opposite to the side edge of the substrate 9. Furthermore, when the substrate 9 is transferred between the hand 226 of the central robot 22 and the substrate holding portion 32, the cup portion 34... Figure 4 The indicated position has moved downwards. Furthermore, although in Figure 4 In the example shown, the cup portion 34 does not rotate, but it can also be configured to rotate around the rotation axis J1.

[0067] Figure 6This is a diagram showing the structure of computer 8. Computer 8 is a general-purpose computer equipped with processor 81, memory 82, input / output unit 83, and bus 84. Bus 84 is a signal circuit connecting processor 81, memory 82, and input / output unit 83. Memory 82 stores various types of information. For example, memory 82 reads and stores a program 89 pre-stored in storage medium 80 for generating teaching information. The generation of teaching information will be described later. Processor 81 uses memory 82 and other memory to perform various processes (e.g., numerical calculations) according to the program 89 and other memory stored in memory 82. Input / output unit 83 includes: a keyboard 85 and mouse 86 for accepting input from the operator, a display 87 for displaying output from processor 81, and a transmitter 88 for transmitting output from processor 81.

[0068] Figure 7 This is a block diagram illustrating the functions achieved by executing the aforementioned program 89 via computer 8. As the functions implemented by computer 8, the board processing device 1 includes a storage unit 61, a drive control unit 62, and a teaching unit 63. The storage unit 61 is primarily implemented via memory 82 and stores various information, such as output from the camera 75 (described later). The drive control unit 62 is primarily implemented via processor 81 and a transmission unit 88, and controls each structure by sending control signals to the central robot 22 and processing unit 21.

[0069] Regarding the transfer of substrate 9 to and from processing unit 21 using central robot 22, teaching unit 63 teaches central robot 22 the appropriate position (i.e., substrate transfer position) where substrate 9 needs to be transferred by central robot 22. Teaching unit 63 generates teaching information indicating the substrate transfer position of central robot 22 in processing unit 21.

[0070] The teaching information includes horizontal teaching information, which indicates the appropriate relative positional relationship between the hand 226 of the central robot 22 in the processing unit 21 and the substrate holding part 32 from a top view. Additionally, the teaching information includes vertical teaching information, which indicates the appropriate relative positional relationship between the hand 226 of the central robot 22 in the processing unit 21 and the substrate holding part 32 in the vertical direction. Furthermore, the teaching information includes loading teaching information, which indicates the appropriate relative positional relationship between the hand 226 of the central robot 22 and the opening 311 of the housing 31 of the processing unit 21.

[0071] The horizontal teaching information is used to position the hand 226 relative to the substrate holding part 32 in an appropriate relative position when the substrate 9 is transferred from the hand 226 of the central robot 22 to the substrate holding part 32 and when the hand 226 receives the substrate 9 from the substrate holding part 32. The vertical teaching information is used to position the hand 226 relative to the substrate holding part 32 in an appropriate relative position in the vertical direction when the hand 226 of the central robot 22 transfers the substrate 9 relative to the substrate holding part 32 and when the hand 226 receives the substrate 9 from the substrate holding part 32. The loading teaching information is used to position the hand 226 relative to the opening 311 of the housing 31 when the hand 226 of the central robot 22 is inserted into the opening 311 and when it leaves the opening 311 (i.e., a position where the substrate 9 held by the hand 226 will not collide with the housing 31, etc.). In other words, the loading teaching information is information used to prevent collisions of the substrate 9 when the substrate 9 is loaded into and out of the housing 31 by the hand 226 of the central robot 22.

[0072] Next, refer to Figure 8 The process for generating teaching information will be explained. This teaching information is generated automatically when the substrate 9 is not being processed using the substrate processing device 1 (e.g., at night). The generation of this teaching information is performed sequentially with respect to the multiple processing units 21 of the substrate processing device 1. Additionally, the generation of this teaching information is performed sequentially with respect to the multiple hands 226 of the central robot 22. The generation of teaching information for the hand 226 of the upper transport arm 221a of the central robot 22 will be described below. As will be described later, the teaching information for the hand 226 of the transport arm 221b is generated using the same steps.

[0073] Regarding the generation of this teaching information, firstly... Figure 9 The substrate clamp 7 shown is Figure 1 and Figure 2 The hand 226 of the central robot 22 shown is held (step S11). Specifically, this is achieved by the drive control unit 62 (see reference). Figure 7 The central robot 22 is controlled to drive the handling arm 221a, inserting the hand 226 into the shelf 700 arranged near the loading unit 40. One or more substrate clamps 7 are pre-stored within the shelf 700. The hand 226 holds one substrate clamp 7 and removes it from the shelf 700. Alternatively, an operator or the like can place the substrate clamp 7 onto the hand 226.

[0074] Figure 9This is a bottom view showing the lower surface 71 of the substrate clamp 7 (i.e., the lower surface held by the hand 226). The substrate clamp 7 is, for example, a generally circular plate-shaped component. The substrate clamp 7, for example, is a generally circular shape with a shape generally the same as that of the substrate 9 when viewed from above. The thickness of the substrate clamp 7 is preferably thinner than the height of the vertical gap (hereinafter also referred to as the "hand gap") between the hands 226 of the transport arm 221a and the transport arm 221b. As a result, when generating teaching information for the hand 226 of the lower transport arm 221b, the substrate clamp 7 can be easily held using the hand 226.

[0075] The substrate clamp 7 includes a clamp body 76 that is generally circular in shape, and three optical sensors 72 disposed on the lower surface 71 of the clamp body 76. The optical sensors 72 are sensors composed of an optical lens system and a light sensor. For example, photoelectric sensors, or cameras with CMOS sensors or CCD sensors, can be used as optical sensors 72. In this embodiment, a photoelectric sensor is used as the optical sensor 72. In the following description, the structure of the additional symbol 72 will also be referred to as "photoelectric sensor 72".

[0076] The three photoelectric sensors 72 are not arranged in a straight line, but rather at the three vertices of a triangle viewed from above. In other words, the three photoelectric sensors 72 are arranged in a non-linear configuration. The three photoelectric sensors 72 are configured such that the centroid of the virtual triangle 73 formed by the three photoelectric sensors 72 overlaps with the center 70 of the substrate clamp 7 when viewed from above. The triangle 73 formed by the three photoelectric sensors 72 can be any of an equilateral triangle, an isosceles triangle, or a right triangle, or it can be any other than an equilateral triangle, an isosceles triangle, or a right triangle. In this embodiment, the triangle 73 is an equilateral triangle. Furthermore, in the substrate clamp 7, four or more photoelectric sensors 72 can be provided on the lower surface 71. Among these four or more photoelectric sensors 72, at least three photoelectric sensors 72 are arranged in a non-linear configuration as described above.

[0077] exist Figure 9 The hand 226, which contacts the lower surface 71 of the substrate clamp 7 and holds the substrate clamp 7 from below, is shown in double-dotted lines. When the substrate clamp 7 is held by the hand 226, the relative position of the substrate clamp 7 with respect to the hand 226 is precisely fixed using the aforementioned movement limiting mechanism. When viewed from above, the center 70 of the substrate clamp 7 overlaps with the center position 220 of the hand 226 while the substrate clamp 7 is held by the hand 226. Furthermore, the three photoelectric sensors 72 are configured, when viewed from above, to avoid the two claw portions 228 of the hand 226 and not overlap with the hand 226. Each photoelectric sensor 72 is capable of detecting objects located below the hand 226.

[0078] Each photoelectric sensor 72 is a reflective photoelectric sensor (i.e., a photoreflector). As will be described later, in this embodiment, the object detected by the photoelectric sensor 72 is the latch 323 protruding upward from the base 321 of the substrate holding portion 32 (see reference). Figure 4 and Figure 5 The photoelectric sensor 72 is preferably a limited reflective type photoelectric sensor capable of detecting objects only within a predetermined distance range. Alternatively, the photoelectric sensor 72 may be a type of photoelectric sensor other than the limited reflective type.

[0079] As described later, after being moved into the processing unit 21, the substrate clamp 7 is transferred from the hand 226 to the substrate holding part 32 and held by the substrate holding part 32. A contact sensor 74 for detecting contact with the substrate holding part 32 is provided on the lower surface 71 of the substrate clamp 7. The contact sensor 74 is circumferentially arranged on the outer periphery of the lower surface 71 of the substrate 9. The contact sensor 74 is located radially outside the three photoelectric sensors 72 and surrounds the three photoelectric sensors 72. Figure 9 In the example, the contact sensor 74 includes a plurality of (e.g., sixteen) sensor elements 741. The plurality of sensor elements 741 are arranged circumferentially around the center 70 of the substrate clamp 7 on the outer periphery of the lower surface 71 of the substrate clamp 7. The plurality of sensor elements 741 are arranged at approximately equal angular intervals in the circumferential direction, for example. As sensor elements 741, for example, pressure sensors, piezoelectric sensors, or capacitive sensors can be used.

[0080] For example, the photoelectric sensor 72 and the contact sensor 74 can be powered by a thin battery built into the substrate clamp 7. Alternatively, the photoelectric sensor 72 and the contact sensor 74 can be powered by an external power source configured outside the substrate clamp 7, either wired or wirelessly. The outputs from the photoelectric sensor 72 and the contact sensor 74 are sent to the computer 8.

[0081] A camera 75 is mounted on the hand 226 holding the substrate clamp 7. The camera 75 can be mounted at a predetermined position on the hand 226 using clamps or the like, allowing it to be freely attached and detached, or it can be fixed at a predetermined position on the hand 226 so that it cannot be attached or detached. Figure 9 In the example, camera 75 is positioned on the upper surface of the base 227 of hand 226 and captures images from the front of hand 226 (i.e., in the direction in which claw 228 extends from base 227). Alternatively, camera 75 can also capture images of the substrate clamp 7 on hand 226 simultaneously. The images captured by camera 75 are sent to computer 8 and stored in storage unit 61. Camera 75 can be, for example, a CMOS sensor or a CCD sensor. Camera 75 can also be positioned on the upper surface of substrate clamp 7, for example.

[0082] After holding the substrate clamp 7 by hand 226 in step S11, the drive control unit 62 (see reference) is used. Figure 7 The central robot 22 is controlled to drive the handling arm 221a, with the hand 226 facing the opening 311 of a processing unit 21 (see reference). Figure 4 The hand 226 moves. When the hand 226 approaches the opening 311, the camera 75 takes pictures of the opening 311 and the area around the opening 311 of the outer casing 31, and sends the obtained pictures to the computer 8.

[0083] In computer 8, the teaching unit 63 determines the relative position of hand 226 with respect to opening 311 based on the captured image (i.e., the image of opening 311) and the fixed position of camera 75 on hand 226 stored in storage unit 61. That is, the captured image is an image representing the relative position of hand 226 and opening 311. In the teaching unit 63, based on the relative position of hand 226 with respect to opening 311, it is determined whether the predetermined substrate 9 held by hand 226 can be inserted into opening 311 without colliding with housing 31.

[0084] Furthermore, when the hand 226 is inserted into the opening 311, if it is determined that the substrate 9 will not collide with the outer casing 31, the current position of the hand 226 is obtained. On the other hand, if it is determined that there is a possibility of collision between the substrate 9 and the outer casing 31, the relative position of the hand 226 with respect to the opening 311 is adjusted in a way to avoid collision between the substrate 9 and the outer casing 31, and the adjusted position of the hand 226 is obtained. Then, before the hand 226 is inserted into the opening 311, the process is repeated: the hand 226 is brought closer to the opening 311, and the position of the hand 226 is adjusted as needed to obtain the position of the hand 226. Furthermore, based on the multiple positions of the obtained hand 226, the above-mentioned loading teaching information is generated (step S12). Specifically, the movement path of the hand 226 through these multiple positions is used as loading teaching information. This loading teaching information is stored in the computer 8 and used when the substrate processing apparatus 1 processes the substrate 9. As a result, when the substrate 9 is loaded into the processing unit 21, collision between the substrate 9 and the outer casing 31 can be prevented.

[0085] The loading teaching information generated in step S12 may include not only the movement path of the hand 226 as it passes through the opening 311, but also the movement path up to the deepest position inside the housing 31 (i.e., the position furthest from the opening 311 that the hand 226 can reach). At this time, after the hand 226 is inserted into the opening 311, the following process is repeated in roughly the same manner: movement of the hand 226, acquisition of an image showing the relative position of the hand 226 and the latch 323, and adjustment of the hand 226 position as needed. Loading teaching information is generated when the hand 226 reaches the deepest position. Therefore, when the substrate 9 is loaded into the processing unit 21, collision between the substrate 9 and the latch 323 can also be prevented.

[0086] Furthermore, the loading teaching information generated in step S12 is used to reverse the path of loading the substrate 9 when it is moved out of the housing 31, thereby preventing the substrate 9 from colliding with the latch 323 and the housing 31. In addition, the loading teaching information can be generated by repeating the process approximately the same as described above when the substrate 9 is being moved out: moving the hand 226, acquiring an image showing the relative position of the hand 226 to the latch 323 or the housing 31, and adjusting the position of the hand 226 as needed.

[0087] When the loading teaching information is generated, the drive control unit 62 controls the central robot 22, thereby moving the substrate clamp 7 held by the hand 226 horizontally to a position approximately vertically above the substrate holding part 32. At this time, the center 70 of the substrate clamp 7 is as follows: Figure 10 As shown, when viewed from above, it is positioned near the rotation axis J1 of the substrate holding section 32 (i.e., at a position that should overlap with the rotation axis J1 by design). Furthermore, the substrate holding section 32 does not hold the substrate 9 or other objects (e.g., a teaching target fixture, etc.).

[0088] Figure 10 This is a top view showing the substrate holding section 32. Figure 10 To make the diagram easier to understand, the offset between the center 70 of the substrate clamp 7 and the rotation axis J1 of the substrate holding portion 32 is depicted as larger than the actual offset. Additionally, in Figure 10 The following are shown together with double-dotted lines: the substrate clamp 7 located above the substrate holding part 32, three photoelectric sensors 72, and a virtual triangle 73 formed by the three photoelectric sensors 72. The center of gravity of triangle 73 is as described above; when viewed from above, the center 70 of the substrate clamp 7 and the center of the hand 220 (see reference) Figure 9 (overlapping.) Figure 10 In the example, the center 70 of the substrate clamp 7 is offset slightly to the left and downward from the rotation axis J1. However, the amount by which the center 70 of the substrate clamp 7 is offset from the rotation axis J1 is not clear at the current point in time. This will also be discussed in the following description. Figure 10 The position of the substrate clamp 7 shown is called the "initial position".

[0089] Next, a process is performed to ensure that the center 70 of the substrate clamp 7 is aligned with the rotation axis J1 with high precision when viewed from above. First, the substrate rotation mechanism 33 is driven under the control of the drive control unit 62, and the substrate holding part 32 rotates continuously around the rotation axis J1 at a predetermined rotation speed. This forms a virtual circular rotation trajectory 324 using pre-set markings, i.e., multiple locking pins 323, on the substrate holding part 32 (step S13). As described above, the multiple locking pins 323 are arranged on the same circumference centered on the rotation axis J1, and the rotation trajectory 324 is the trajectory formed by the rotation of these multiple locking pins 323. Furthermore, the rotation trajectory 324 can be, for example, the rotation trajectory of the upper pin portion of the locking pin 323 (i.e., the portion that directly contacts the outer edge of the substrate 9 during processing). When this pin portion can move radially, the rotation trajectory 324 can be, for example, the rotation trajectory of the pin portion in its outermost radial position. The rotation trajectory 324 can also be the rotation trajectory of the portion other than the pin portion of the locking pin 323. In addition, the distance between the rotating shaft J1 and the locking pin 323 (i.e. the radius of the rotation trajectory 324) is known in the design, but strictly speaking, it is considered to be ambiguous.

[0090] Furthermore, the mark forming the rotation trajectory 324 can be any structure pre-installed on the substrate holding portion 32, and is not limited to the locking pin 323. For example, the head of a screw present on the substrate holding portion 32 can also be used as a mark. This mark can be a single mark, or it can consist of multiple marks arranged on the same circumference centered on the rotation axis J1. Preferably, this mark is not a dedicated mark for generating teaching information, but rather a structure such as the locking pin 323 used in the substrate processing apparatus 1 for processing the substrate 9, etc. This simplifies the structure of the substrate holding portion 32 compared to the case where a dedicated mark is provided.

[0091] Next, while the substrate holding part 32 continues to rotate, the substrate clamp 7 and the hand 226 are moved horizontally above the substrate holding part 32. This horizontal movement is performed before one of the three photoelectric sensors 72 detects the rotating latch 323 (i.e., before the photoelectric sensor 72 overlaps with the rotation trajectory 324 when viewed from above). The position of the hand 226 is gradually changed to obtain a position where the photoelectric sensor 72 overlaps with the rotation trajectory 324 when viewed from above, and where the movement distance relative to the initial position of the substrate clamp 7 is minimal (hereinafter referred to as the "minimum movement position"). Additionally, the distance between the center 70 of the initial position of the substrate clamp 7 and the center 70 of the minimum movement position is also obtained (hereinafter also referred to as the "minimum movement distance"). Then, the minimum movement position and minimum movement distance of the substrate clamp 7 are obtained for the other two photoelectric sensors 72 using the same steps.

[0092] A straight line passing through the center 70 of the initial position of the substrate clamp 7 and the center 70 of the minimum moving position of the substrate clamp 7 obtained by each photoelectric sensor 72 passes through the center of the rotation trajectory 324, i.e., the rotation axis J1. Therefore, the top-view position of the center of the rotation trajectory 324, i.e., the rotation axis J1, can be calculated based on the minimum moving distance of the three photoelectric sensors 72 and the known relative positions of the three photoelectric sensors 72.

[0093] Specifically, firstly, as Figure 11 As shown, based on the top-view coordinates Se10 (i.e., X and Y coordinates, hereinafter simply referred to as "coordinates") of one photoelectric sensor 72 of the substrate clamp 7 in its initial position, and the minimum moving distance d1 with respect to that photoelectric sensor 72, the coordinates Se11 of that photoelectric sensor 72 when the substrate clamp 7 is in its minimum moving position with respect to that photoelectric sensor 72 are calculated (i.e., the coordinates of a point on the rotation trajectory 324). Similarly, with respect to the other two photoelectric sensors 72, based on the coordinates Se20 and Se30 of the photoelectric sensors 72 of the substrate clamp 7 in its initial position and the minimum moving distances d2 and d3, the coordinates Se21 and Se31 of the photoelectric sensors 72 when the substrate clamp 7 is in its minimum moving position are calculated (i.e., the coordinates of a point on the rotation trajectory 324).

[0094] Next, based on the calculated coordinates of three points Se11, Se21, and Se31 on the rotation trajectory 324, as follows: Figure 12 As shown, find the inscribed triangle T1 of the rotation trajectory 324. Then, calculate the coordinates of the intersection of the perpendicular bisectors of each side of the inscribed triangle T1 as the coordinates of the center of the rotation trajectory 324, i.e., the rotation axis J1. Furthermore, calculate the radius Rtp of the rotation trajectory 324 using the law of sines based on the lengths of the three sides of the inscribed triangle T1.

[0095] Next, by gradually changing the radius Rtp, based on the coordinates of the rotation axis J1, the radius Rtp of the rotation trajectory 324, and the minimum moving distances d1, d2, and d3, the coordinates Se10a, Se20a, and Se30a of the three photoelectric sensors 72 of the substrate clamp 7 at the initial position are calculated. Then, based on the calculated coordinates Se10a, Se20a, and Se30a, the lengths of each side of the triangle 73 formed by the three photoelectric sensors 72 are calculated. The radius Rt of the rotation trajectory 324 is then chosen as the radius of the triangle 73 whose calculated side lengths are closest to the actual (known) side lengths of the triangle 73 of the substrate clamp 7. Thus, the radius Rt of the rotation trajectory 324 can be determined with high accuracy. For example, the radius Rt of the rotation trajectory 324 can be determined in a way that minimizes the sum of the squares of the differences between the calculated and actual values ​​of the sides of the triangle 73. Then, based on the coordinates Se10a, Se20a, and Se30a of the three photoelectric sensors 72 obtained using the radius Rt of the rotation trajectory 324, the hand center position 220, which overlaps with the centroid position of triangle 73, is determined.

[0096] In the teaching unit 63, the position of the rotation axis J1, as determined as described above, is compared with the hand center position 220. When the position of the rotation axis J1 overlaps with the hand center position 220 in a top-view view, information indicating the current position of the hand 226 is generated. This information serves as horizontal teaching information indicating the appropriate relative positional relationship (i.e., the appropriate relative positional relationship in the horizontal direction) between the hand 226 and the substrate holding unit 32 in a top-view view. On the other hand, when the position of the rotation axis J1 does not overlap with the hand center position 220 and is offset in a top-view view, the horizontal position of the hand 226 is adjusted in a way that makes the rotation axis J1 overlap with the hand center position 220 in a top-view view. Information indicating the adjusted position of the hand 226 is generated as horizontal teaching information (step S14).

[0097] Furthermore, as long as the relative position of the hand 226 to the substrate holding part 32 in a top view is calculated based on the relative positions of the three photoelectric sensors 72 relative to the rotation trajectory 324 respectively in step S14, and horizontal teaching information is generated, the method for calculating the relative position is not limited to the above example, and various modifications can be made.

[0098] Alternatively, the calculation of the relative position between the hand 226 and the substrate holding part 32, and the aforementioned position adjustment of the hand 226, can be repeated in step S14, after which horizontal teaching information is generated. In other words, the calculation of the relative position between the hand 226 and the substrate holding part 32, and the aforementioned position adjustment of the hand 226, can also be repeated before generating horizontal teaching information. Specifically, after the aforementioned position adjustment of the hand 226 in the horizontal direction is completed, the substrate holding part 32 is rotated to re-form the rotation trajectory 324. Based on the re-formed relative positions with respect to the rotation trajectory 324 obtained by the three photoelectric sensors 72, the top-view relative position of the hand 226 with respect to the substrate holding part 32 is calculated. Furthermore, when the hand center position 220 overlaps with the position of the rotation axis J1, information indicating the current position of the hand 226 is generated as horizontal teaching information. In addition, when the hand center position 220 deviates from the rotation axis J1, the position of the hand 226 is adjusted in a manner that eliminates the deviation. The relative position of the hand 226 and the substrate holding part 32 is calculated, and the position adjustment of the hand 226 is repeated for a predetermined number of times. Then, information indicating the adjusted position of the hand 226 is generated as horizontal teaching information. As a result, the accuracy of the horizontal teaching information can be improved.

[0099] When generating horizontal teaching information, the central robot 22 is controlled by the drive control unit 62, thereby enabling... Figure 9 The substrate clamp 7 held by the hand 226 moves downward, approaching the substrate holding portion 32 in the vertical direction. At this time, the center 70 of the substrate clamp 7 overlaps with the rotation axis J1 of the substrate holding portion 32 when viewed from above. Furthermore, when the contact sensor 74 of the substrate clamp 7 detects that the substrate holding portion 32 is in contact with the lower surface 71 of the substrate clamp 7, the hand 226 stops moving after moving further downward by a predetermined distance. In the teaching unit 63, information indicating the vertical position of the stopped hand 226 is generated as vertical teaching information indicating the appropriate relative positional relationship between the hand 226 and the substrate holding portion 32 in the vertical direction (step S15). In other words, the teaching unit 63 generates vertical teaching information based on the output from the contact sensor 74.

[0100] Specifically, the contact detection between the substrate clamp 7 and the substrate holding part 32 in step S15 is performed by using a sensor element 741 other than the sensor element 741 that contacts the two claw parts 228 of the hand 226 to detect contact with the locking pin 323.

[0101] At this point, it is possible not only to detect contact with the latch 323, but also to confirm whether contact with the latch 323 is detected among all the multiple sensor elements 741 corresponding to the positions of the multiple latches 323, and to determine whether the substrate clamp 7 is properly held in the substrate holding portion 32. Alternatively, a pressure sensor or the like capable of measuring load can be used as the sensor element 741, and it can be confirmed whether the measured load is equal among the multiple sensor elements 741 that are in contact with the multiple latches 323, and to determine whether the substrate clamp 7 is properly held in the substrate holding portion 32. In all cases, the accuracy of the up and down teaching information can be improved.

[0102] In addition, multiple sensor elements 741 can also be used as follows Figure 13 As shown, the lower surface 71 of the substrate clamp 7 (i.e., the lower surface 71 of the clamp body 76) is arranged approximately in a circumferential shape around the center 70 of the substrate clamp 7, avoiding contact with the hand 226. Figure 13 In the example, multiple sensor elements 741 are arranged in four arcs to avoid contact with the two claws 228 of the hand 226. Specifically, the multiple sensor elements 741 are arranged around the outer periphery of the lower surface 71 of the clamp body 76, excluding the four contact points with the claws 228. When the substrate clamp 7 is held by the hand 226, the orientation of the substrate clamp 7 is determined in a way that prevents the sensor elements 741 from contacting the claws 228. Thus, the contact sensor 74 has multiple sensor elements 741 arranged around the outer periphery of the lower surface 71 of the clamp body 76 to avoid contact with the hand 226, so the contact sensor 74 does not detect contact with the hand 226, and therefore can detect contact between the contact sensor 74 and the latch 323 with high accuracy. As a result, the accuracy of up and down teaching information can be improved.

[0103] In the substrate processing apparatus 1, the aforementioned loading teaching information, horizontal teaching information, and vertical teaching information generated by the teaching unit 63 are stored in the storage unit 61 as teaching information related to the processing unit 21 and the transport arm 221a. This teaching information is used to teach the substrate transport position of the hand 226 relative to the processing unit 21 via the teaching unit 63 when the substrate 9 is loaded into and unloaded by the hand 226 of the transport arm 221a. This prevents collisions between the substrate 9 and the housing 31 and the locking pin 323 when the substrate 9 is loaded into and unloaded from the housing 31. Furthermore, when transferring the substrate 9 from the hand 226 to the substrate holding unit 32, the substrate 9 can be precisely positioned in the appropriate location.

[0104] In the substrate processing apparatus 1, the conveying arm 221a (see reference) is used. Figure 2The substrate clamp 7 is moved to another processing unit 21, and teaching information (i.e., loading teaching information, horizontal teaching information, and vertical teaching information) related to the other processing unit 21 and the hand 226 of the transport arm 221a is generated in the same steps as described above (steps S12 to S15). Furthermore, for each processing unit 21 in the processing block 20, when teaching information related to the hand 226 of the transport arm 221a is generated, the substrate clamp 7 is moved from the hand 226 of the transport arm 221a to the transport arm 221b (see reference 221b). Figure 2 The hands 226 of the transfer arms 221a and 221b move and hold the substrate clamp 7. As described above, the thickness of the substrate clamp 7 is thinner than the height of the gap (i.e., the hand gap) between the hands 226 of the transfer arms 221a and 221b, so the substrate clamp 7 can be easily held by the hands 226 of the transfer arm 221b, while avoiding interference between the substrate clamp 7 and the hands 226 of the transfer arm 221a, etc.

[0105] Subsequently, for each processing unit 21, teaching information related to the hand 226 of the transport arm 221b (i.e., loading teaching information, horizontal teaching information, and vertical teaching information) is generated in the same way as the teaching information generated for the hand 226 of the transport arm 221a. The transfer of the substrate clamp 7 from the transport arm 221a to the transport arm 221b is performed via the aforementioned shelf 700. Specifically, after the substrate clamp 7, which is held by the hand 226 of the transport arm 221a, is loaded into the shelf 700, and the transport arm 221a retracts from the shelf 700, the hand 226 of the transport arm 221b is inserted into the shelf 700 and the substrate clamp 7 is held. Furthermore, when there are three or more transport arms in the central robot 22, teaching information related to the hand 226 of each transport arm is generated for each processing unit 21 in the same manner.

[0106] As described above, the substrate processing apparatus 1 includes a processing unit (i.e., processing unit 21), a transport robot (i.e., central robot 22), and a teaching unit 63. The processing unit 21 performs predetermined processing on the substrate 9. The central robot 22 transports the substrate 9 to the processing unit 21. The processing unit 21 includes a substrate holding part 32 and a substrate rotating mechanism 33. The substrate holding part 32 holds the substrate 9 in a horizontal position. The substrate rotating mechanism 33 rotates the substrate holding part 32 about a rotation axis J1 pointing in the vertical direction. The central robot 22 includes a hand 226 that transfers the substrate 9 between itself and the substrate holding part 32.

[0107] In the substrate processing apparatus 1, a substrate clamp 7, in which three optical sensors (photoelectric sensors 72 in the above example) are arranged in a non-linear configuration on the lower surface 71, is held by a hand 226 located above the substrate holding section 32. The substrate holding section 32 is rotated by the substrate rotation mechanism 33, thereby forming a circumferential rotation trajectory 324 with a mark (a latch 323 in the above example) pre-set on the substrate holding section 32. The teaching unit 63 calculates the top-view relative position of the hand 226 relative to the substrate holding section 32 based on the relative positions of the three photoelectric sensors 72 with respect to the rotation trajectory 324, and generates horizontal teaching information indicating the appropriate relative positional relationship between the hand 226 and the substrate holding section 32 in the top view. The teaching unit 63 teaches the central robot 22 in the processing unit 21 the substrate transport position.

[0108] Therefore, compared to setting the target fixture for teaching on the substrate holding section 32, the process of generating teaching information can be simplified. As a result, the time required for this generation process can be shortened, and high-precision horizontal teaching information can be obtained. Therefore, when transferring the substrate 9 from the hand 226 to the substrate holding section 32, high-precision movement control of the hand 226 can be achieved.

[0109] As described above, the substrate holding portion 32 is a mechanical chuck that mechanically holds the outer periphery of the substrate 9 using a plurality of circumferentially arranged locking pins 323. The aforementioned marking is preferably one or more of the locking pins 323. In this way, the structure required to hold the substrate 9 in the substrate holding portion 32 can also be used as the marking, thereby simplifying the structure of the substrate holding portion 32 and obtaining high-precision horizontal teaching information.

[0110] As described above, it is preferable to move the hand 226 relative to the substrate holding portion 32 in a top-view manner, based on the relative position of the hand 226 with respect to the substrate holding portion 32 calculated by the teaching unit 63, such that the center 70 of the substrate clamp 7 overlaps with the rotation axis J1 in a top-view manner, and rotate the substrate holding portion 32 using the substrate rotation mechanism 33, thereby re-forming the aforementioned marked rotation trajectory 324. Furthermore, it is preferable that after the rotation trajectory 324 is re-formed, the teaching unit 63, based on the relative positions of the hand 226 relative to the substrate holding portion 32 obtained by the three photoelectric sensors 72 respectively, calculates again the relative position of the hand 226 relative to the substrate holding portion 32 in a top-view manner, generating horizontal teaching information. This improves the accuracy of the relative positional relationship between the hand 226 and the substrate holding portion 32 represented by the horizontal teaching information.

[0111] As described above, the central robot 22 also includes another hand 226 located below the aforementioned hand 226 and used to transfer the substrate 9 between itself and the substrate holding portion 32. The teaching unit 63 preferably generates another level teaching information related to this other hand 226 using the same method as the level teaching information for the aforementioned hand 226. Therefore, in the central robot 22 having multiple hands 226, compared to using level teaching information obtained by shifting the level teaching information of the uppermost hand 226 in the vertical direction as the level teaching information for the other hand 226, high-precision movement control of the hands 226 corresponding to the characteristics of each of the multiple hands 226 can be achieved.

[0112] As described above, it is preferable to provide a contact sensor 74 on the lower surface 71 of the substrate holder 7 to detect contact with the substrate holding portion 32. Furthermore, it is preferable that the central robot 22 brings the hand 226 closer to the substrate holding portion 32 in the vertical direction, and the teaching unit 63 generates vertical teaching information indicating the appropriate relative positional relationship between the hand 226 and the substrate holding portion 32 in the vertical direction based on the output from the contact sensor 74. This allows for easy generation of vertical teaching information using a simple structure. As a result, more precise movement control of the hand 226 can be achieved when transferring the substrate 9 from the hand 226 to the substrate holding portion 32.

[0113] As described above, it is more preferable that the substrate holding part 32 is a mechanical chuck that mechanically holds the outer periphery of the substrate 9 using a plurality of circumferentially arranged latches 323, and the contact sensor 74 has a plurality of sensor elements 741 arranged circumferentially on the outer periphery of the lower surface 71 of the substrate clamp 7. This allows for high-precision detection of the holding state of the plurality of latches 323 on the substrate clamp 7, improving the accuracy of the relative positional relationship between the hand 226 and the substrate holding part 32 indicated by the up-down teaching information.

[0114] As described above, the processing unit 21 also includes a housing 31 that houses the substrate holding portion 32 and has an opening 311 for loading the substrate 9. Preferably, when the hand 226 is inserted into the opening 311 of the housing 31, an image showing the relative position of the hand 226 and the opening 311 is captured, and the teaching unit 63 generates loading teaching information showing the appropriate relative positional relationship between the hand 226 and the opening 311 based on the captured image. This allows for easy generation of loading teaching information. As a result, high-precision movement control of the hand 226 can be achieved when loading and unloading the substrate 9 relative to the housing 31.

[0115] More preferably, the captured image is an image of the opening 311 captured by a camera 75 mounted on the hand 226 or the substrate clamp 7. Therefore, it is possible to generate loading teaching information related to multiple processing units 21 without using multiple cameras. That is, the structure required to generate loading teaching information can be simplified.

[0116] The aforementioned teaching information generation method generates teaching information about the substrate transport position of the central robot 22 in the teaching processing unit 21 within the substrate processing apparatus 1. The substrate processing apparatus 1 includes a processing unit (i.e., processing unit 21) that performs predetermined processing on the substrate 9, and a transport robot (i.e., central robot 22) that transports the substrate 9 to the processing unit 21. The processing unit 21 includes a substrate holding portion 32 that holds the substrate 9 in a horizontal state, and a substrate rotating mechanism 33 that rotates the substrate holding portion 32 around a rotation axis J1 pointing in the vertical direction. The central robot 22 includes a hand 226 that transfers the substrate 9 between itself and the substrate holding portion 32.

[0117] The teaching information generation method includes: a step (step S11) of holding a substrate clamp 7 on its lower surface 71 with three optical sensors (photoelectric sensors 72 in the above example) arranged in a non-linear configuration using a hand 226; a step (step S13) of rotating a substrate holding portion 32 using a substrate rotation mechanism 33 to form a circumferential rotation trajectory 324 with pre-set marks (pins 323 in the above example) on the substrate holding portion 32; and a step (step S14) of calculating the relative position of the hand 226 relative to the substrate holding portion 32 from a top view based on the relative positions of the three photoelectric sensors 72 located above the substrate holding portion 32 relative to the rotation trajectory 324, and generating horizontal teaching information representing the appropriate relative positional relationship between the hand 226 and the substrate holding portion 32 from a top view. Therefore, as described above, the teaching information generation process can be simplified. As a result, the time required for this generation process can be shortened, and high-precision horizontal teaching information can be obtained.

[0118] The aforementioned substrate clamp 7 does not necessarily need to be installed in the substrate processing apparatus 1 from the time the substrate processing apparatus 1 is started. For example, the substrate clamp 7, which has a generally circular clamp body 76 and three optical sensors 72 arranged non-linearly on the lower surface 71 of the clamp body 76, can be introduced into the substrate processing apparatus 1 that has already been used (i.e., the refurbishment equipment) and used for generating teaching information. In this case, the teaching information generation process can be simplified in the same way as described above. As a result, the time required for this generation process can be shortened, and high-precision horizontal teaching information can be obtained.

[0119] Furthermore, the aforementioned program 89 (i.e., the program for generating teaching information) does not necessarily need to be stored in the computer 8 from the start of the substrate processing device 1. For example, a teaching kit can be imported into the substrate processing device 1 already in use (i.e., a refurbishment device). This teaching kit includes: a storage medium 80 storing a program 89 that generates horizontal teaching information representing the appropriate relative positional relationship between the hand 226 and the substrate holding part 32 from a top view; and a substrate clamp 7 having three optical sensors (photoelectric sensors 72 in the above example) arranged in a non-linear configuration on its lower surface 71. In this case, the program 89 is executed by the computer 8, thereby calculating the relative position of the hand 226 relative to the substrate holding part 32 from a top view based on the relative positions obtained by the three photoelectric sensors 72 relative to the aforementioned rotation trajectory 324, and generating horizontal teaching information. As such, the teaching information generation process can be simplified in the same way as described above. As a result, the time required for this generation process can be shortened, and high-precision horizontal teaching information can be obtained.

[0120] In the substrate processing apparatus 1, the substrate holding part 32 of the processing unit 21 is not necessarily a mechanical chuck, and the mark used to generate horizontal teaching information is not necessarily a locking pin 323. For example, it could also be as follows: Figure 14 As shown, a vacuum chuck with multiple suction ports 325 on its upper surface, which adsorbs and holds the substrate 9, is provided as a substrate holding part 32a in the processing unit 21 (see reference). Figure 4 At this time, one or more of the suction ports 325 are designated as the aforementioned mark. This simplifies the structure of the substrate holding portion 32a in the same way as described above, and provides highly accurate horizontal teaching information. Furthermore, the mark used to generate the horizontal teaching information is, for example, the suction port 325 located radially outward from the rotation axis J1, or two or more suction ports 325 located radially outward and arranged on the same circumference.

[0121] In the substrate processing apparatus 1, it is also possible to... Figure 15 As shown, a plurality of support pins 326 for transferring the substrate 9 between the hand 226 and the substrate holding portion 32 are provided. Figure 15 In the example, three support pins 326 are arranged on the same circumference centered on the rotation axis J1. The multiple support pins 326 are inserted into holes 327 provided in the base 321 of the substrate holding portion 32, and can protrude upwards from the upper surface of the base 321. The multiple support pins 326 receive the substrate 9 from the hand 226 above the multiple locking pins 323 and move downwards, thereby transferring the substrate 9 to the multiple locking pins 323. Additionally, the multiple support pins 326 receive the substrate 9 from the multiple locking pins 323 and move upwards, transferring the substrate 9 to the hand 226 above the multiple locking pins 323.

[0122] The multiple support pins 326 may or may not rotate together with the base portion 321 or the multiple locking pins 323. When the multiple support pins 326 rotate, one or more of the multiple support pins 326 can be designated as the aforementioned support pin. Alternatively, when the multiple support pins 326 do not rotate, one or more of the holes 327 in the base 321 into which the multiple support pins 326 are inserted can be designated as the aforementioned hole. In all cases, the structure of the substrate holding portion 32 can be simplified in the same way as described above, and high-precision horizontal teaching information can be obtained. Furthermore, when the multiple support pins 326 are provided in the substrate holding portion 32, the contact sensor 74 is provided on the lower surface 71 of the substrate clamp 7 at a position corresponding to the multiple support pins 326.

[0123] In the substrate processing apparatus 1, the mark used to generate horizontal teaching information does not necessarily have to be provided on the substrate holding portion 32. For example, when a structure that rotates around the rotation axis J1 (hereinafter also referred to as the "rotating portion") is provided in the processing unit 21 other than the substrate holding portion 32, the aforementioned mark may also be provided on the rotating portion other than the substrate holding portion 32. In addition, the photoelectric sensor 72 provided on the substrate clamp 7 may also be disposed at a position other than the lower surface 71 of the substrate clamp 7, corresponding to the positional relationship between the rotating portion and the substrate clamp 7. The shape of the substrate clamp 7 in top view may also not be the same as the shape of the substrate 9.

[0124] At this time, the substrate processing apparatus 1 includes a processing unit (i.e., processing unit 21), a transport robot (i.e., central robot 22), and a teaching unit 63. The processing unit 21 performs predetermined processing on the substrate 9. The central robot 22 transports the substrate 9 to the processing unit 21. The teaching unit 63 teaches the central robot 22 the substrate transport position in the processing unit 21. The processing unit 21 includes a substrate holding unit 32 and a substrate rotating mechanism 33. The substrate holding unit 32 holds the substrate 9 in a horizontal state. The substrate rotating mechanism 33 rotates the substrate holding unit 32 around a rotation axis J1 in the vertical direction. The central robot 22 includes a hand 226 that transfers the substrate 9 between itself and the substrate holding unit 32. In the processing unit 21, the rotating unit other than the substrate holding unit 32 also rotates around the rotation axis J1.

[0125] In the substrate processing apparatus 1, the substrate clamp 7, on which three photoelectric sensors 72 are arranged in a non-linear configuration, is held by a hand 226 located above the substrate holding section 32. The rotating section is then rotated to form a circumferential rotation trajectory 324 pre-marked on the rotating section. The teaching unit 63 calculates the relative position of the hand 226 relative to the rotation axis J1 from a top-view perspective based on the relative positions of the three photoelectric sensors 72 with respect to the rotation trajectory 324, and generates horizontal teaching information indicating the appropriate relative positional relationship between the hand 226 and the substrate holding section 32 from a top-view perspective.

[0126] Therefore, the process of generating teaching information can be simplified in the same way as described above. As a result, the time required for this generation process can be shortened, and high-precision horizontal teaching information can be obtained. Furthermore, as the aforementioned rotating part, a cup part 34 configured to rotate around the rotation axis J1 can be cited as an example. In this case, the aforementioned marking may be a structure provided on the upper edge of the rotatable cup part 34, or it may be the entire upper edge.

[0127] Various modifications can be made to the aforementioned substrate processing apparatus 1, teaching information generation method, and teaching kit.

[0128] For example, the camera 75 used in generating teaching information does not necessarily have to be mounted on the hand 226 or the substrate clamp 7; it can also be fixed at an appropriate position in the processing block 20. In this case, if it is necessary to photograph the openings 311 of multiple processing units 21, two or more cameras 75 can also be installed.

[0129] The shape of the substrate clamp 7 from a top view can also be a shape other than approximately circular. The thickness of the substrate clamp 7 can also be greater than the height of the hand gap. In this case, as long as the hand 226 of the lower transport arm 221b can hold the substrate clamp 7, the teaching information obtained by the hand 226 of the upper transport arm 221a (i.e., the loading teaching information, the horizontal teaching information, and the vertical teaching information) can be offset in the vertical direction and used as the teaching information related to the hand 226 of the lower transport arm 221b.

[0130] As described above, the photoelectric sensor 72 can be replaced by other optical sensors such as a camera with a CMOS sensor or a CCD sensor in the substrate clamp 7. In this case, the generation process of teaching information can be simplified using the substrate clamp 7 in the same way as described above. When a camera with a CMOS sensor is used as the optical sensor, the detection of marks such as the pin 323 can be performed by pattern matching of the image acquired by the camera and the reference image of the pin 323. Furthermore, by using the photoelectric sensor 72 as the optical sensor, the structure of the substrate clamp 7 can be simplified, and the processing of information from the optical sensor in the generation of teaching information can be simplified.

[0131] In the substrate clamp 7, the contact sensor 74 used to generate up and down teaching information does not necessarily need to have multiple sensor elements 741. For example, a single contact sensor 74 can be provided on the outer periphery of the lower surface 71 of the substrate clamp 7, avoiding contact with the claw portion 228 of the hand 226, and this contact sensor 74 can be used to detect the contact between the substrate clamp 7 and a locking pin 323. In this case, the contact sensor 74 is not used to detect contact with the hand 226, thus enabling high-precision detection of the contact between the contact sensor 74 and the locking pin 323. As a result, the accuracy of the up and down teaching information can be improved.

[0132] As long as the teaching information generated by the teaching unit 63 includes at least horizontal teaching information, it may be unnecessary to include input teaching information and / or vertical teaching information. That is, input teaching information can also be generated using a method different from the generation method described above using the camera 75 and the teaching unit 63. In addition, vertical teaching information can also be generated using a method different from the generation method described above using the substrate clamp 7 and the teaching unit 63. In this case, the contact sensor 74 can also be omitted from the substrate clamp 7.

[0133] The aforementioned teaching kit may also include multiple substrate clamps 7.

[0134] In the substrate processing apparatus 1, the structure of the central robot 22 can be modified in various ways. Furthermore, the shape and structure of the hand 226 of the central robot 22 can also be modified in various ways. For example, the shape of the hand 226 in top view can be a roughly circumferential shape that contacts the outer periphery of the substrate 9 and the substrate clamp 7 approximately around its entire circumference. In addition, the structure of the transfer robot 12 can also be modified in various ways.

[0135] Processing units of various structures other than processing unit 21 can also be provided in the processing block 20 of the substrate processing apparatus 1. In addition, various processes on the substrate 9 can be performed in this processing unit.

[0136] The substrate processing apparatus 1 described above can be used not only for semiconductor substrates, but also for processing glass substrates used in flat panel displays such as liquid crystal displays or organic EL (electroluminescence) displays, or glass substrates used in other display devices. Furthermore, the substrate processing apparatus 1 can also be used for processing substrates for optical discs, magnetic disks, optical disc drives, photomasks, ceramic substrates, and solar cells.

[0137] The structures in the above-described embodiments and variations can be appropriately combined without contradicting each other.

[0138] The present invention has been described in detail above, but the above description is only illustrative. Therefore, various modifications can be implemented without departing from the scope of the present invention.

Claims

1. A substrate processing apparatus, characterized in that, have: The processing unit performs a predetermined process on the substrate; A transport robot that transports the substrate to the processing unit; and The teaching unit teaches the transport robot in the processing unit the position for transporting the substrate. The processing unit includes: A substrate holding portion that holds the substrate in a horizontal state; and A substrate rotation mechanism that rotates the substrate holding portion about a rotation axis pointing vertically. The transport robot is equipped with a hand that transfers the substrate between itself and the substrate holding portion. With the hand positioned above the substrate holding part holding the substrate clamp, which holds three optical sensors arranged in a non-linear pattern on its lower surface, the substrate holding part is rotated by the substrate rotation mechanism, thereby forming a circumferential rotation trajectory marked on the substrate holding part beforehand. The teaching unit calculates the relative position of the hand with respect to the base plate holder from a top-down view based on the relative positions of the hand and the base plate holder obtained by the three optical sensors respectively, and generates horizontal teaching information that represents the appropriate relative positional relationship between the hand and the base plate holder from a top-down view.

2. The substrate processing apparatus according to claim 1, characterized in that, The substrate holding part is a mechanical chuck that uses multiple pins arranged in a circumferential pattern to mechanically hold the outer periphery of the substrate. The mark is one or more of the plurality of pins.

3. The substrate processing apparatus according to claim 1, characterized in that, The substrate holding part has multiple suction ports on its upper surface to adsorb and hold the substrate using a vacuum chuck. The mark is one or more of the plurality of suction ports.

4. The substrate processing apparatus according to claim 1, characterized in that, Based on the relative position of the hand with respect to the substrate holding part as calculated by the teaching unit, the hand is moved such that the center of the substrate clamp overlaps with the rotation axis in a top view. The substrate holding part is rotated by the substrate rotation mechanism, thereby re-forming the rotation trajectory of the mark. After the teaching unit re-forms the rotation trajectory, it calculates the relative position of the hand with respect to the substrate holding part from a top view based on the relative positions of the hands with respect to the rotation trajectory obtained by the three optical sensors, and generates the horizontal teaching information.

5. The substrate processing apparatus according to claim 1, characterized in that, The transport robot also has another hand, which is located below the first hand and performs the transfer of the substrate between itself and the substrate holding part. The teaching unit generates another level teaching information about the other hand using the same method as the level teaching information about the other hand.

6. The substrate processing apparatus according to claim 1, characterized in that, A contact sensor is provided on the lower surface of the substrate clamp, and the contact sensor detects contact with the substrate holding portion. The handling robot brings the hand closer to the substrate holding portion in the vertical direction. The teaching unit generates up-down teaching information based on the output from the contact sensor, indicating the appropriate relative positional relationship between the hand and the substrate holding part in the up-down direction.

7. The substrate processing apparatus according to claim 6, characterized in that, The substrate holding part is a mechanical chuck that uses multiple pins arranged in a circumferential pattern to mechanically hold the outer periphery of the substrate. The contact sensor includes a plurality of sensor elements arranged in a circumferential manner on the outer periphery of the lower surface of the substrate clamp.

8. The substrate processing apparatus according to any one of claims 1 to 7, characterized in that, The processing unit also includes a housing that houses the substrate holding part and has an opening for moving the substrate in. When the hand is inserted into the opening of the housing, an image showing the relative position of the hand and the opening is captured. Based on the captured image, the teaching unit generates induction teaching information representing the appropriate relative positional relationship between the hand and the opening.

9. The substrate processing apparatus according to claim 8, characterized in that, The captured image is an image of the opening taken using a camera mounted on the hand or the substrate clamp.

10. A substrate processing apparatus, characterized in that, have: The processing unit performs a predetermined process on the substrate; A transport robot that transports the substrate to the processing unit; and The teaching unit teaches the transport robot in the processing unit the position for transporting the substrate. The processing unit includes: A substrate holding portion that holds the substrate in a horizontal state; and A substrate rotation mechanism that rotates the substrate holding portion about a rotation axis pointing vertically. The transport robot is equipped with a hand that transfers the substrate between itself and the substrate holding portion. In the processing unit, the rotating parts other than the substrate holding part also rotate about the rotation axis. While holding the substrate clamp with three optical sensors arranged in a non-linear configuration using the hand located above the substrate holding part, the rotating part is rotated to form a circumferential rotation trajectory marked on the rotating part beforehand. The teaching unit calculates the relative position of the hand relative to the rotation axis from a top view based on the relative positions of the hand and the substrate holding part obtained by the three optical sensors respectively, and generates horizontal teaching information that represents the appropriate relative positional relationship between the hand and the substrate holding part from a top view.

11. A method for generating teaching information, comprising generating teaching information of a substrate transport position of a transport robot in a teaching processing unit in a substrate processing apparatus, the substrate processing apparatus comprising a processing unit for performing predetermined processing on a substrate, and a transport robot for transporting the substrate to the processing unit. The teaching information generation method is characterized by the following: The processing unit includes: A substrate holding portion that holds the substrate in a horizontal state; and A substrate rotation mechanism that rotates the substrate holding portion about a rotation axis pointing vertically. The transport robot is equipped with a hand that transfers the substrate between itself and the substrate holding portion. The teaching information generation method includes: a) A process of holding a substrate with three optical sensors arranged in a non-linear configuration on its lower surface using the hand; b) A process of rotating the substrate holding portion by the substrate rotation mechanism to form a circumferential rotation trajectory marked on the substrate holding portion in advance; and c) A process of calculating the relative position of the hand with respect to the rotation trajectory based on the relative positions obtained by the three optical sensors of the substrate holder located above the substrate holder, and generating horizontal teaching information representing the appropriate relative positional relationship between the hand and the substrate holder in a top view.

12. A teaching kit for use in a substrate processing apparatus to move a substrate to a position of a transport robot in a transport robot teaching processing unit, the substrate processing apparatus comprising a processing unit for performing predetermined processing on a substrate, and a transport robot for moving the substrate to the processing unit. The teaching kit is characterized in that... The processing unit includes: A substrate holding portion that holds the substrate in a horizontal state; and A substrate rotation mechanism that rotates the substrate holding portion about a rotation axis pointing vertically. The transport robot is equipped with a hand that transfers the substrate between itself and the substrate holding portion. The teaching kit includes: A substrate clamp having three optical sensors arranged non-linearly on its lower surface; and A storage medium storing a program for generating horizontal teaching information that indicates the appropriate relative positional relationship between the hand and the substrate holder in a top view. With the substrate clamp held by the hand located above the substrate holding part, the substrate holding part is rotated by the substrate rotation mechanism, thereby forming a circumferential rotation trajectory marked on the substrate holding part in advance. The computer executes the program to calculate the relative position of the hand with respect to the substrate holding part from a top view, based on the relative positions of the hands with respect to the rotation trajectory obtained by the three optical sensors, and generates the horizontal teaching information.

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