Resonance multi-frequency recognition cross-medium bionic cantilever beam sensor, preparation method and system

Abstract

The present invention relates to a resonant multi-frequency identification cross-medium bionic cantilever beam sensor, preparation method and system, wherein the sensor comprises: a cantilever beam, a multi-frequency sensing layer and a wiring terminal; the multi-frequency sensing layer is arranged on the first and second opposite sides of the cantilever beam; the multi-frequency sensing layer is provided with a plurality of electrode channels for matching different vibration modes, each electrode channel comprises a plurality of electrodes distributed in an array; each electrode channel is electrically connected to the wiring terminal and transmits the collected detection signal to the wiring terminal; wherein one end of the cantilever beam is a free end and the other end is a fixed end connected to the wiring terminal. The present invention designs the sensor based on the perception mechanism of the sensory hairs at the tip of the water strider's foot to perceive the water ripple vibration signal. The present invention arranges each electrode position based on a plurality of pre-set resonance vibration modes, so that the present invention can more efficiently and accurately obtain and identify a plurality of vibration frequency signals in an environment such as cross-medium vibration perception.

Description

Technical Field

[0001] The present invention relates to the field of engineering bionics and sensor technology, and in particular to a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor, a preparation method and a system. Background Art

[0002] In recent years, sensors based on microcantilever structures have become a research hotspot in the field of microelectromechanical systems. Sensors containing microcantilever structures have the characteristics of light structure, sensitive sensing, high resolution, etc., and are widely used in acceleration detection, quality detection, biochemical component analysis, etc.

[0003] However, most cantilever beam sensors currently only detect deformation, and there are few reports on sensors that can identify and detect vibration frequencies. In the field of engineering application technology, real-time and timely detection of vibration frequencies can avoid safety accidents and implement preventive measures in advance, which is of great significance to engineering technology applications. Currently, there are several cantilever beam sensors that increase sensitivity by arranging bionic gaps at the root of the cantilever beam, but this type of sensor can only sense the vibration signal of the cantilever beam, but cannot identify multiple vibration frequencies. The known sensor system can only detect vibration signals and cannot identify specific frequencies, and the sensor array has the disadvantages of complex structure and high cost. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor, a preparation method and a system, which solve the technical problems that the existing sensor system cannot effectively identify multiple vibration frequencies and the sensor array has a complex structure and high cost.

[0006] (II) Technical solution

[0007] In order to achieve the above object, the main technical solutions adopted by the present invention include:

[0008] In a first aspect, an embodiment of the present invention provides a resonant multi-frequency identification cross-medium bionic cantilever beam sensor, comprising: a cantilever beam, a multi-frequency sensing layer, and a wiring terminal;

[0009] The multi-frequency sensing layer is disposed on the first side surface and the second side surface opposite to the cantilever beam;

[0010] The multi-frequency sensing layer is provided with a plurality of electrode channels for matching different vibration modes, and each of the electrode channels includes a plurality of electrodes distributed in an array;

[0011] Each of the electrode channels is electrically connected to the wiring terminal and transmits the collected detection signal to the wiring terminal;

[0012] Among them, one end of the cantilever beam is a free end, and the other end is a fixed end connected to the wiring terminal.

[0013] Optionally, the multi-frequency sensing layer comprises: a plurality of the electrode channels and a first piezoelectric film respectively disposed on the first side surface of the cantilever beam and a second piezoelectric film on the second side surface;

[0014] The plurality of electrode channels include a first electrode channel, a second electrode channel, a third electrode channel, a fourth electrode channel, a fifth electrode channel, a sixth electrode channel, a seventh electrode channel and an eighth electrode channel;

[0015] The first electrode channel, the second electrode channel and the third electrode channel are arranged at one end of the first piezoelectric film close to the free end of the cantilever beam; the fourth electrode channel and the fifth electrode channel are arranged at the middle position of the first piezoelectric film;

[0016] The sixth electrode channel is arranged at the middle position of the second piezoelectric film, and the seventh electrode channel and the eighth electrode channel are arranged at one end of the second piezoelectric film close to the free end of the cantilever beam;

[0017] Wherein, the middle positions on the first piezoelectric film and the second piezoelectric film are both located between one end close to the free end of the cantilever beam and one end close to the fixed end of the cantilever beam.

[0018] Optionally,

[0019] The first electrode channel is arranged between the second electrode channel and the third electrode channel, and the second electrode channel and the third electrode channel are arranged symmetrically with respect to the symmetry axis of the cantilever beam; and the fourth electrode channel and the fifth electrode channel are also arranged symmetrically with respect to the symmetry axis of the cantilever beam;

[0020] The seventh electrode channel is arranged at the end of one end of the second piezoelectric film close to the free end of the cantilever beam, and the eighth electrode channel is spaced apart from the seventh electrode channel by a preset distance.

[0021] Optionally, when the electrode channels disposed at different positions of the first piezoelectric film and / or the second piezoelectric film acquire corresponding piezoelectric signals, the following vibration mode matching is performed for the acquired piezoelectric signals:

[0022] The second electrode channel and the third electrode channel are used to match the first order vibration mode;

[0023] The second electrode channel, the third electrode channel, the fourth electrode channel and the fifth electrode channel are used to match the second order vibration mode;

[0024] The second electrode channel and the third electrode channel are used to match the third-order vibration mode;

[0025] The sixth electrode channel, the seventh electrode channel and the eighth electrode channel are used to match the fourth-order vibration mode;

[0026] The first electrode channel, the second electrode channel and the third electrode channel are used to match the fifth-order vibration mode;

[0027] Among them, the first-order vibration mode is inclined, which is manifested by a deformation reaching a preset value at the free end of the cantilever beam; the second-order vibration mode is arch-bridge-shaped, which is manifested by a deformation reaching a preset value at the middle position of the cantilever beam; the third-order vibration mode is inclined, which is manifested by a deformation reaching a preset value at the free end of the cantilever beam, and the vibration frequency of the first-order vibration mode is less than the vibration frequency of the third-order vibration mode, and the vibration frequency is the number of vibrations in one second; the fourth-order vibration mode is wavy, which is manifested by deformation reaching a preset value at both the free end and the middle position of the cantilever beam and between the middle position and the fixed end; the fifth-order vibration mode is twisted, which is manifested by a twisted deformation that meets preset conditions starting from the free end of the cantilever beam.

[0028] Optionally, each of the electrode channels includes a plurality of pairs of electrodes and positive leads and negative leads extending from the plurality of pairs of electrodes.

[0029] Optionally, the resonant multi-frequency recognition cross-medium bionic cantilever beam sensor further includes: a super-hydrophobic surface layer provided on the side of the multi-frequency sensing layer facing away from the cantilever beam.

[0030] In a second aspect, an embodiment of the present invention provides a method for preparing the resonant multi-frequency recognition cross-medium bionic cantilever beam sensor as described above, comprising:

[0031] The cantilever beam is prepared by using a material including one or more of PET and an alloy;

[0032] The first piezoelectric film and the second piezoelectric film are respectively attached to the first side surface and the second side surface of the cantilever beam by means of a silicone adhesive;

[0033] The resonance frequencies of each order of the cantilever beam are obtained through finite element simulation.

[0034] Based on the resonance frequencies of each order, determining the position of each electrode channel on the first piezoelectric film and the second piezoelectric film and the position and number of electrodes in each electrode channel;

[0035] A super-hydrophobic agent is sprayed on the side of the first piezoelectric film and the second piezoelectric film facing away from the cantilever beam to form a super-hydrophobic surface layer, and the super-hydrophobic surface layer is placed in an oven and baked at 55-65° C. for 8-12 minutes.

[0036] Optionally, the super-hydrophobic agent is prepared by ultrasonic vibration.

[0037] Optionally,

[0038] The electrodes are made of one or more of copper, silver, iron, tungsten, graphite, steel, copper-tungsten alloy, and silver-tungsten alloy, and the electrodes are interdigitated electrodes;

[0039] The super hydrophobic surface layer comprises silicon dioxide particles, epoxy resin and polydimethylsiloxane.

[0040] In a third aspect, an embodiment of the present invention provides a resonant multi-frequency identification system, comprising: a controller, an additional device, and the resonant multi-frequency identification cross-medium bionic cantilever beam sensor as described above;

[0041] The controller is in communication connection with the resonant multi-frequency identification cross-medium bionic cantilever beam sensor, and is used to analyze and obtain multiple vibration frequencies of the cantilever beam according to the acquired detection signal of each electrode channel and the corresponding vibration mode;

[0042] The additional device is connected to the energy supply output end of the resonant multi-frequency identification cross-medium bionic cantilever beam sensor, and is used to use or store the electrical energy output by the resonant multi-frequency identification cross-medium bionic cantilever beam sensor.

[0043] (III) Beneficial effects

[0044] The beneficial effects of the present invention are as follows: based on the perception mechanism of the water strider's foot tip sensing water ripple vibration signals with sensory hairs, the present invention uses 3D printing or etching to design a multi-frequency recognition structure based on the resonance principle. The present invention flexibly arranges a number of electrodes on the cantilever beam 1 based on a plurality of pre-set resonance vibration modes to form a plurality of electrode channels for matching different vibration modes, so that the present invention can more efficiently and accurately acquire and recognize a variety of vibration frequency signals in environments such as cross-medium vibration perception. In view of the multiple electrode channels creatively proposed by the present invention and the above-mentioned advanced manufacturing process, the resonant multi-frequency recognition cross-medium bionic cantilever beam sensor disclosed by the present invention has the advantages of high sensitivity, high detection accuracy, multi-frequency recognition, and easy mass production. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 A schematic diagram of the composition of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention;

[0046] Figure 2A schematic diagram of the sensory hair morphology of a water strider provided in an embodiment of the present invention;

[0047] Figure 3 A schematic diagram of a water entry detection state of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention;

[0048] Figure 4 A schematic diagram of an exploded view of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention;

[0049] Figure 5 A schematic diagram of an electrode channel provided on a first piezoelectric film of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention;

[0050] Figure 6 A schematic diagram of an electrode channel provided on a second piezoelectric film of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention;

[0051] Figure 7 A schematic diagram of vibration modes of a resonant multi-frequency identification cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention;

[0052] Figure 8 A schematic diagram of matching the first-order vibration mode of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor with a corresponding electrode channel provided by an embodiment of the present invention;

[0053] Fig. 9 A schematic diagram of the matching of the second-order vibration mode of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor and the corresponding electrode channel provided by an embodiment of the present invention;

[0054] Fig.10 A schematic diagram of matching the third-order vibration mode of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor with a corresponding electrode channel provided by an embodiment of the present invention;

[0055] Fig.11 A schematic diagram of matching the fourth-order vibration mode of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor with a corresponding electrode channel provided by an embodiment of the present invention;

[0056] Fig.12 A schematic diagram of matching the fifth-order vibration mode of a resonant multi-frequency identification cross-medium bionic cantilever beam sensor with a corresponding electrode channel provided by an embodiment of the present invention;

[0057] Fig.13 A schematic diagram of the preparation process of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention.

[0058] [Description of Reference Numerals]

[0059] 1: Cantilever beam;

[0060] 2: multi-frequency sensing layer; 21: first piezoelectric film; 21-1: first electrode channel; 21-2: second electrode channel; 21-3: third electrode channel; 21-4: fourth electrode channel; 21-5: fifth electrode channel; 22: second piezoelectric film; 22-1: sixth electrode channel; 22-2: seventh electrode channel; 22-3: eighth electrode channel; 23: first super-hydrophobic surface layer; 24: second super-hydrophobic surface layer;

[0061] 3: Terminal block;

[0062] 4: Binding posts. DETAILED DESCRIPTION

[0063] In order to better explain the present invention and facilitate understanding, the present invention is described in detail below through specific implementation modes in conjunction with the accompanying drawings.

[0064] Figure 1 A schematic diagram of the composition of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention is shown in FIG. Figure 1 As shown, the resonant multi-frequency identification cross-medium bionic cantilever beam sensor proposed in an embodiment of the present invention includes: a cantilever beam 1, a multi-frequency sensing layer 2 and a wiring terminal; the multi-frequency sensing layer 2 is arranged on the first and second opposite sides of the cantilever beam 1; the multi-frequency sensing layer 2 is provided with a plurality of electrode channels for matching different vibration modes, and each electrode channel includes a plurality of electrodes distributed in an array; each electrode channel is electrically connected to the wiring terminal and transmits the collected detection signal to the wiring terminal; wherein one end of the cantilever beam is a free end, and the other end of the cantilever beam is a fixed end connected to the wiring terminal.

[0065] The design principle of the resonant multi-frequency identification cross-medium bionic cantilever beam sensor of the present invention is obtained by referring to the water strider in nature. Water striders are known as aquatic insect hunters. At present, behavioral experiments have proved that water striders have obvious responses to vibration stimuli, such as Figure 2 The sensory hairs on the toes of water striders have been shown to have obvious physiological electrical responses to mechanical signals. Ablo Perez Goodwyn et al. used optical microscopy, transmission microscopy and scanning electron microscopy to photograph the morphology of the sensory hairs on the toes of water striders and recorded the neural activity of these organs in response to vibration stimulation. Under the microscope, it was observed that the sensory hairs on the toes of water striders were inserted into the water to receive vibration signals. Figure 3 As shown, the present invention is inspired by the water strider's sense of the water entry state, and proposes a high-performance cross-media flow sensor, which can realize the water entry detection function of the water strider, and also has the performance of multi-functional integration and omnidirectional perception.

[0066] Therefore, the present invention is based on the perception mechanism of the water strider's foot tip sensing water ripple vibration signals using 3D printing or etching to design a multi-frequency recognition structure based on the resonance principle. The present invention flexibly arranges a number of electrodes on the cantilever beam 1 based on a plurality of pre-set resonance vibration modes to form a plurality of electrode channels for matching different vibration modes, so that the present invention can more efficiently and accurately acquire and recognize a variety of vibration frequency signals in environments such as cross-medium vibration perception. In view of the multiple electrode channels creatively proposed by the present invention and the above-mentioned advanced manufacturing process, the resonant multi-frequency recognition cross-medium bionic cantilever beam sensor disclosed by the present invention has the advantages of high sensitivity, high detection accuracy, multi-frequency recognition, and easy mass production.

[0067] In order to better understand the above technical solution, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to enable a clearer and more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0068] Furthermore, the multi-frequency sensing layer 2 includes: a plurality of electrode channels and a first piezoelectric film 21 and a second piezoelectric film 22 respectively disposed on the first side surface of the cantilever beam 1 and the second side surface.

[0069] Figure 4 A schematic diagram of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention is shown in FIG. Figure 4 As shown, the plurality of electrode channels include a first electrode channel 21-1, a second electrode channel 21-2, a third electrode channel 21-3, a fourth electrode channel 21-4, a fifth electrode channel 21-5, a sixth electrode channel 22-1, a seventh electrode channel 22-2 and an eighth electrode channel 22-3.

[0070] Figure 5 A schematic diagram of an electrode channel provided on a first piezoelectric film of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention is shown in FIG. Figure 5 As shown, the first electrode channel 21 - 1 , the second electrode channel 21 - 2 and the third electrode channel 21 - 3 are arranged at one end of the first piezoelectric film 21 close to the free end of the cantilever beam 1 ; the fourth electrode channel 21 - 4 and the fifth electrode channel 21 - 5 are arranged in the middle position of the first piezoelectric film 21 .

[0071] Figure 6 A schematic diagram of an electrode channel provided on a second piezoelectric film of a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention is shown in FIG. Figure 6As shown, the seventh electrode channel 22-2 and the eighth electrode channel 22-3 are arranged at one end of the second piezoelectric film 22 close to the free end of the cantilever beam 1; the sixth electrode channel 22-1 is arranged at the middle position of the second piezoelectric film 22. The middle positions of the first piezoelectric film 21 and the second piezoelectric film 22 are both between one end close to the free end of the cantilever beam 1 and one end close to the fixed end of the cantilever beam 1.

[0072] Furthermore, the first electrode channel 21-1 is arranged between the second electrode channel 21-2 and the third electrode channel 21-3, and the second electrode channel 21-2 and the third electrode channel 21-3 are symmetrically arranged with respect to the symmetry axis of the cantilever beam 1; and the fourth electrode channel 21-4 and the fifth electrode channel 21-5 are also symmetrically arranged with respect to the symmetry axis of the cantilever beam 1; the seventh electrode channel 22-2 is arranged at the end of one end of the second piezoelectric film 22 close to the free end of the cantilever beam 1, and the eighth electrode channel 22-3 is spaced apart from the seventh electrode channel 22-2 by a preset distance.

[0073] Figure 7 A schematic diagram of vibration modes of a resonant multi-frequency identification cross-medium bionic cantilever beam sensor provided by an embodiment of the present invention is shown in FIG. Figure 7 As shown, when the electrode channels arranged at different positions of the first piezoelectric film 21 and / or the second piezoelectric film 22 obtain corresponding piezoelectric signals, the following vibration mode matching is performed for the obtained piezoelectric signals:

[0074] refer to Figure 8 The schematic diagram of the first-order vibration mode and the corresponding electrode channel matching is shown, and it can be seen that the second electrode channel 21-2 and the third electrode channel 21-3 are used to match the first-order vibration mode. The first-order vibration mode is inclined, and its deformation occurs at the free end of the cantilever beam 1, which is manifested as a deformation at the free end of the cantilever beam 1 reaching a preset value.

[0075] refer to Fig. 9 The schematic diagram of the second-order vibration mode and the corresponding electrode channel matching is shown, and it can be seen that the second electrode channel 21-2, the third electrode channel 21-3, the fourth electrode channel 21-4 and the fifth electrode channel 21-5 are used to match the second-order vibration mode. The second-order vibration mode is in the shape of an arch bridge, and its deformation occurs in the middle position of the cantilever beam 1, which is manifested as a deformation reaching a preset value in the middle position of the cantilever beam 1.

[0076] refer to Fig.10 The schematic diagram of the third-order vibration mode and the corresponding electrode channel matching is shown, and it can be seen that the second electrode channel 21-2 and the third electrode channel 21-3 are used to match the third-order vibration mode. The third-order vibration mode is inclined, and its deformation mainly occurs at the free end of the cantilever beam 1, which is manifested as a deformation reaching a preset value at the free end of the cantilever beam 1. The vibration frequency of the first-order vibration mode is less than the vibration frequency of the third-order vibration mode, and the vibration frequency is the number of vibrations in one second.

[0077] refer to Fig.11 The schematic diagram of the fourth-order vibration mode and the matching of the corresponding electrode channel is shown, and it can be seen that the sixth electrode channel 22-1, the seventh electrode channel 22-2 and the eighth electrode channel 22-3 are used to match the fourth-order vibration mode. The fourth-order vibration mode is wavy, and its deformation occurs in two places between the free end and the middle position of the cantilever beam 1 and between the middle position and the fixed end, which is manifested as a deformation reaching a preset value between the free end and the middle position of the cantilever beam 1 and between the middle position and the fixed end.

[0078] refer to Fig.12 The schematic diagram of the fifth-order vibration mode and the matching of the corresponding electrode channel is shown, and it can be seen that the first electrode channel 21-1, the second electrode channel 21-2 and the third electrode channel 21-3 are used to match the fifth-order vibration mode. The fifth-order vibration mode is twisted, which is manifested as a twisted deformation that meets the preset conditions starting from the free end of the cantilever beam. Specifically, the deformation occurs at the free end of the cantilever beam 1, and the free end is subjected to a torque, and the free end rotates in a certain direction. In the direction from the free end of the cantilever beam 1 to the fixed end, the rotation angle of the cantilever beam 1 gradually decreases, that is, it is manifested as a twisted deformation that meets the preset conditions starting from the free end of the cantilever beam 1.

[0079] Preferably, each order vibration mode is detected to occur at the same time, and the vibration frequency of each order vibration mode is, from small to large, the first order vibration mode, the second order vibration mode, the third order vibration mode, the fourth order vibration mode and the fifth order vibration mode; specifically, the vibration frequency of each order vibration mode is related to the properties of the material of the cantilever beam itself, such as its length, width, height and density.

[0080] The electrodes are distributed at the locations of large deformation of each order vibration model of the cantilever beam 1. The electrode distribution is not limited to this, and the electrode positions can be distributed according to various vibration modes of the cantilever beam 1. The electrode channels on the cantilever beam 1 can be determined according to the vibration frequency required, and the resonance frequency and the size of the cantilever beam 1 can be determined by simulation calculation to determine the number of electrode channels.

[0081] Preferably, the frequency equation of the cantilever beam 1 is:

[0082] cosβlchβl+1=0

[0083] The modal functions of cantilever beam 1 are:

[0084] φ i (x) = cosβ i x-chβ i x+ξ i (sinβ i x-shβ i x)

[0085]

[0086] The natural frequencies of cantilever beam 1 are:

[0087]

[0088] Wherein, i represents the order and is a positive integer.

[0089] Furthermore, each electrode channel includes a plurality of pairs of electrodes and positive electrode leads and negative electrode leads extending from the plurality of pairs of electrodes.

[0090] Furthermore, the resonant multi-frequency identification cross-medium bionic cantilever beam sensor also includes: a super-hydrophobic surface layer provided on the side of the multi-frequency sensing layer 2 facing away from the cantilever beam 1, specifically including: a first super-hydrophobic surface layer 23 close to the first side of the cantilever beam 1, and a second super-hydrophobic surface layer 24 close to the second side of the cantilever beam 1. The setting of the super-hydrophobic surface enables the detection device to have a waterproof function and adapt to work in a humid environment.

[0091] In addition, an embodiment of the present invention provides a method for preparing a resonant multi-frequency identification cross-medium bionic cantilever beam sensor. The present invention uses PET or alloy and other materials to prepare the cantilever beam substrate as an environmental information capture device; and the subsequent transducer unit, as a device for converting environmental mechanical quantity information into electrical signals, can be manufactured in a variety of ways, such as ion sputtering, 3D printing and painting.

[0092] like Fig.13 As shown, the preparation method specifically comprises:

[0093] S1. A cantilever beam 1 is prepared by using PET or alloy.

[0094] S2, attaching the first piezoelectric film 21 and the second piezoelectric film 22 to the first side surface and the second side surface of the cantilever beam 1 respectively by using a silicone adhesive.

[0095] S3. Obtain the resonance frequencies of each order of the cantilever beam 1 through finite element simulation calculation.

[0096] S4. Based on the resonance frequencies of each order, determine the position of each electrode channel on the first piezoelectric film 21 and the second piezoelectric film 22 and the position and number of electrodes in each electrode channel.

[0097] S5, spraying a super-hydrophobic reagent on the side of the first piezoelectric film 21 and the second piezoelectric film 22 away from the cantilever beam 1 to form a super-hydrophobic surface layer, and baking the super-hydrophobic surface layer in an oven at 55-65° C. for 8-12 minutes.

[0098] The size and material of the cantilever beam 1 are determined according to the working environment parameters.

[0099] Furthermore, the first piezoelectric film 21 and the second piezoelectric film 22 are respectively attached to the first side surface and the second side surface of the cantilever beam 1 by means of a silicone adhesive.

[0100] or,

[0101] The first piezoelectric film 21 and the second piezoelectric film 22 are both adhered to the first side surface and the second side surface of the cantilever beam 1 by using a silicone adhesive.

[0102] Among them, the super-hydrophobic agent is prepared by ultrasonic oscillation. The cantilever beam 1 is made of PET or alloy; the material of the cantilever beam 1 is mainly PET, alloy and other materials that can withstand deformation, and its resonant frequency is related to the geometric size and material properties. According to the working environment and application requirements, the size and material of the cantilever beam 1 are adjusted, and different resonant frequencies can be determined by simulation calculation, thereby realizing the identification of multiple resonant frequencies. The electrode is a cross-finger electrode, and the material of the electrode is selected from one or more of copper, silver, iron, tungsten, graphite, steel, copper-tungsten alloy, and silver-tungsten alloy. The super-hydrophobic surface layer includes silica particles, epoxy resin and polydimethylsiloxane.

[0103] In addition, an embodiment of the present invention also provides a resonant multi-frequency identification system, including: the above-mentioned resonant multi-frequency identification cross-media bionic cantilever beam sensor, controller and additional equipment; the controller is communicated with the resonant multi-frequency identification cross-media bionic cantilever beam sensor through a wiring terminal, and is used to analyze the vibration frequency of the cantilever beam based on the acquired detection signals of each electrode channel and each order vibration mode; the additional equipment is connected to the power supply output end of the resonant multi-frequency identification cross-media bionic cantilever beam sensor, and is used to use or store the electrical energy output by the resonant multi-frequency identification cross-media bionic cantilever beam sensor.

[0104] In summary, the present invention discloses a resonant multi-frequency identification cross-medium bionic cantilever beam sensor, method and system, the device mainly includes: a cantilever beam 1 (PET), an electrode, a piezoelectric film, a super-hydrophobic surface layer, a terminal block 3, and a terminal block 4. The first side and the second side opposite to the cantilever beam 1 are both provided with a super-hydrophobic surface layer; the piezoelectric film is arranged between the super-hydrophobic surface layer and the cantilever beam 1, and the piezoelectric film is provided with a plurality of electrode channels matching different vibration modes, and each electrode channel includes electrodes distributed in a plurality of arrays. The cantilever beam 1 is a supporting structure of the electrode channel, and the electrodes of the electrode channel are positioned according to the resonant amplitude of the cantilever beam 1 to achieve accurate perception of the large amplitude position, and the piezoelectric film and the electrode convert the mechanical deformation of the deformation position of the cantilever beam 1 into a voltage signal output, and the super-hydrophobic material sprayed on the surface of the cantilever beam 1 sensor is used to protect the sensor output stability, and the working ability is not affected by the water environment; the terminal block 3 mainly plays the role of fixing and connecting the cantilever beam 1, and the terminal block 4 is electrically connected to each electrode channel.

[0105] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0106] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0107] In the present invention, unless otherwise clearly specified and limited, when a first feature is “on” or “below” a second feature, it may be that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above”, “above” or “above” a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it may simply mean that the first feature is higher in level than the second feature. When a first feature is “below”, “below” or “below” a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it may simply mean that the first feature is lower in level than the second feature.

[0108] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0109] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may alter, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A resonant multi-frequency recognition cross-medium bionic cantilever beam sensor, characterized in that: include: Cantilever beam, multi-frequency sensing layer and wiring terminal; The multi-frequency sensing layer is disposed on the first side surface and the second side surface opposite to the cantilever beam; The multi-frequency sensing layer is provided with a plurality of electrode channels for matching different vibration modes, and each of the electrode channels includes a plurality of electrodes distributed in an array; The multi-frequency sensing layer comprises: a plurality of electrode channels and a first piezoelectric film disposed on a first side surface of the cantilever beam and a second piezoelectric film disposed on a second side surface thereof; The plurality of electrode channels include a first electrode channel, a second electrode channel, a third electrode channel, a fourth electrode channel, a fifth electrode channel, a sixth electrode channel, a seventh electrode channel and an eighth electrode channel; The first electrode channel, the second electrode channel and the third electrode channel are arranged at one end of the first piezoelectric film close to the free end of the cantilever beam; the fourth electrode channel and the fifth electrode channel are arranged at the middle position of the first piezoelectric film; The sixth electrode channel is arranged at the middle position of the second piezoelectric film, and the seventh electrode channel and the eighth electrode channel are arranged at one end of the second piezoelectric film close to the free end of the cantilever beam; Each of the electrode channels is electrically connected to the wiring terminal and transmits the collected detection signal to the wiring terminal; in, The middle positions of the first piezoelectric film and the second piezoelectric film are both between one end close to the free end of the cantilever beam and one end close to the fixed end of the cantilever beam; One end of the cantilever beam is a free end, and the other end is a fixed end connected to the wiring terminal.

2. The resonant multi-frequency recognition cross-medium bionic cantilever beam sensor according to claim 1, characterized in that: The first electrode channel is arranged between the second electrode channel and the third electrode channel, and the second electrode channel and the third electrode channel are arranged symmetrically with respect to the symmetry axis of the cantilever beam; and the fourth electrode channel and the fifth electrode channel are also arranged symmetrically with respect to the symmetry axis of the cantilever beam; The seventh electrode channel is disposed at the end of one end of the second piezoelectric film close to the free end of the cantilever beam, and the eighth electrode channel is spaced apart from the seventh electrode channel by a preset distance.

3. The resonant multi-frequency recognition cross-medium bionic cantilever beam sensor according to claim 1, characterized in that: When the electrode channels disposed at different positions of the first piezoelectric film and / or the second piezoelectric film acquire corresponding piezoelectric signals, the following vibration mode matching is performed for the acquired piezoelectric signals: The second electrode channel and the third electrode channel are used to match the first order vibration mode; The second electrode channel, the third electrode channel, the fourth electrode channel and the fifth electrode channel are used to match the second order vibration mode; The second electrode channel and the third electrode channel are used to match the third-order vibration mode; The sixth electrode channel, the seventh electrode channel and the eighth electrode channel are used to match the fourth-order vibration mode; The first electrode channel, the second electrode channel and the third electrode channel are used to match the fifth-order vibration mode; Among them, the first-order vibration mode is inclined, which is manifested by a deformation reaching a preset value at the free end of the cantilever beam; the second-order vibration mode is arch-bridge-shaped, which is manifested by a deformation reaching a preset value at the middle position of the cantilever beam; the third-order vibration mode is inclined, which is manifested by a deformation reaching a preset value at the free end of the cantilever beam, and the vibration frequency of the first-order vibration mode is less than the vibration frequency of the third-order vibration mode, and the vibration frequency is the number of vibrations in one second; the fourth-order vibration mode is wavy, which is manifested by deformation reaching a preset value at both the free end and the middle position of the cantilever beam and between the middle position and the fixed end; the fifth-order vibration mode is twisted, which is manifested by a twisted deformation that meets preset conditions starting from the free end of the cantilever beam.

4. A resonant multi-frequency identification cross-medium bionic cantilever beam sensor as claimed in any one of claims 1 to 3, characterized in that: Each of the electrode channels includes a plurality of pairs of electrodes and a positive electrode lead and a negative electrode lead extending from the plurality of pairs of electrodes.

5. A resonant multi-frequency identification cross-medium bionic cantilever beam sensor as claimed in any one of claims 1 to 3, characterized in that: The resonant multi-frequency recognition cross-medium bionic cantilever beam sensor further includes: a super-hydrophobic surface layer disposed on the side of the multi-frequency sensing layer facing away from the cantilever beam.

6. A method for preparing a resonant multi-frequency recognition cross-medium bionic cantilever beam sensor as claimed in any one of claims 1 to 5, characterized in that: include: The cantilever beam is prepared by using a material including one or more of PET and an alloy; The first piezoelectric film and the second piezoelectric film are respectively attached to the first side surface and the second side surface of the cantilever beam by means of a silicone adhesive; The resonance frequencies of each order of the cantilever beam are obtained through finite element simulation. Based on the resonance frequencies of each order, determining the position of each electrode channel on the first piezoelectric film and the second piezoelectric film and the position and number of electrodes in each electrode channel; A super-hydrophobic agent is sprayed on the side of the first piezoelectric film and the second piezoelectric film facing away from the cantilever beam to form a super-hydrophobic surface layer, and the super-hydrophobic surface layer is placed in an oven and baked at 55-65° C. for 8-12 minutes.

7. The method for preparing the resonant multi-frequency recognition cross-medium bionic cantilever beam sensor according to claim 6, characterized in that: The super hydrophobic agent is prepared by ultrasonic vibration.

8. The method for preparing the resonant multi-frequency recognition cross-medium bionic cantilever beam sensor according to claim 6 or 7, characterized in that: The electrodes are made of one or more of copper, silver, iron, tungsten, graphite, steel, copper-tungsten alloy, and silver-tungsten alloy, and the electrodes are interdigitated electrodes; The super hydrophobic surface layer comprises silicon dioxide particles, epoxy resin and polydimethylsiloxane.

9. A resonant multi-frequency identification system, characterized in that: include: A controller, additional equipment, and a resonant multi-frequency identification cross-medium bionic cantilever beam sensor as described in any one of claims 1 to 5; The controller is in communication connection with the resonant multi-frequency identification cross-medium bionic cantilever beam sensor, and is used to analyze and obtain multiple vibration frequencies of the cantilever beam according to the acquired detection signal of each electrode channel and the corresponding vibration mode; The additional device is connected to the energy supply output end of the resonant multi-frequency identification cross-medium bionic cantilever beam sensor, and is used to use or store the electrical energy output by the resonant multi-frequency identification cross-medium bionic cantilever beam sensor.

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