Self-powered MEMS ultrasonic sensor array system based on vibration energy collection and implementation method

Abstract

The invention discloses a self-powered MEMS ultrasonic sensor array system based on vibration energy collection and an implementation method, and relates to the technical field of sensor power supply, and the self-powered MEMS ultrasonic sensor array system comprises an energy collection unit, an ultrasonic emission unit, an imaging positioning unit and a self-powered unit. The energy acquisition unit converts environmental mechanical vibration energy into sustainable electric energy; the ultrasonic transmitting unit dynamically dispatches the sensor array to generate a directional beam; the imaging positioning unit processes the reflected signals to generate space coordinates, and array reconstruction is triggered when the quality is reduced; the self-powered unit distributes electric energy according to priorities, and standby energy storage is started when vibration disappears. The system thoroughly gets rid of dependence of an external power supply, can stably realize high-precision positioning in a vibration energy fluctuation scene by dynamically optimizing and balancing detection precision and power consumption and prolonging continuous working time without manual intervention, and is suitable for power supply limited scenes such as remote monitoring and mobile equipment; the problem that a traditional system depends on an external power supply and cannot be self-powered in a vibration environment is solved.

Description

Technical Field

[0001] This invention relates to the field of sensor power supply technology, and in particular to a self-powered MEMS ultrasonic sensor array system and its implementation method based on vibration energy harvesting. Background Technology

[0002] In recent years, traditional ultrasonic sensor systems, as a key technology in fields such as non-destructive testing and industrial automation, have long relied on external power sources, such as batteries or the power grid. These systems, by emitting ultrasonic beams and receiving their reflected signals, can accurately detect information such as the distance, shape, and position of target objects. However, this dependence on external power sources not only increases the operating costs and maintenance complexity of the system but also limits its application in remote areas, mobile devices, or scenarios where power is not readily available.

[0003] While traditional ultrasonic sensor systems play a vital role in many fields, their reliance on external power sources is becoming increasingly apparent. Particularly in vibration environments, such as machinery manufacturing, transportation, or geological exploration, traditional systems cannot directly utilize environmental vibration energy for self-powering, resulting in their inability to operate continuously without an external power source. This not only affects the system's stability and reliability but also limits its widespread application in environments with abundant vibration but difficult power supply. Therefore, developing a self-powered, energy-efficient ultrasonic sensor system that is adaptable to vibration environments has become a pressing issue in the current technological field. Summary of the Invention

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting. This invention completely solves the problem of traditional ultrasonic sensors relying on external power sources, achieving the goals of self-powering, high precision, long battery life, and adaptability to complex vibration environments, significantly reducing maintenance costs and expanding applicability in power-constrained scenarios.

[0005] The above-mentioned objectives of the present invention are achieved by the following technical means:

[0006] A self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting, comprising:

[0007] An energy harvesting unit is used to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy.

[0008] An ultrasonic transmitting unit is used to dynamically schedule the MEMS ultrasonic sensor array according to the power state of the sustainable power and the location of the detection target to generate a directional ultrasonic beam;

[0009] An imaging positioning unit, connected to the ultrasonic transmitting unit, is used to synchronously acquire the reflected signal of the directional ultrasonic beam and process it in real time to generate spatial coordinates; when the quality of the reflected signal degrades beyond a preset threshold, it feeds back the spatial coordinates to the ultrasonic transmitting unit to trigger array reconstruction.

[0010] The self-powered unit connects to the energy harvesting unit and dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself according to preset task priorities.

[0011] Preferably, it also includes an intelligent feedback link, through which the imaging positioning unit sends a power supply request to the self-powered unit.

[0012] Preferably, a backup energy storage module is also provided; the backup energy storage module is used to store the remaining sustainable power after providing stable power to the energy harvesting unit, ultrasonic transmitting unit, imaging positioning unit and itself when there is environmental mechanical vibration and the vibration energy exceeds a preset first threshold; when the environmental mechanical vibration disappears, it provides distributable power to the self-powered unit.

[0013] Furthermore, the energy harvesting unit is equipped with a piezoelectric composite vibration energy harvester, an AC-DC conversion circuit, and a hybrid energy storage module. The piezoelectric composite vibration energy harvester converts environmental mechanical vibration energy into initial electrical energy, and the AC-DC conversion circuit converts the initial electrical energy into stable DC power and stores it through the hybrid energy storage module to form sustainable electrical energy.

[0014] Furthermore, the piezoelectric composite vibration energy harvester uses PZT-5H lead zirconate titanate piezoelectric ceramic and flexible polymer to construct a cantilever beam-mass block structure to capture environmental mechanical vibration energy at frequencies of 10Hz-2kHz.

[0015] The AC-DC conversion circuit includes a bridge rectifier circuit, a boost converter, and a maximum power point tracking module. The bridge rectifier circuit converts AC power into pulsating DC power, the boost converter boosts the voltage to 3.3V, and the maximum power point tracking module optimizes the power conversion efficiency through perturbation observation.

[0016] The hybrid energy storage module includes a 3.3V / 1F supercapacitor and an ER14505 lithium thionyl chloride battery. The supercapacitor and the lithium thionyl chloride battery are connected in parallel. The supercapacitor is used to absorb high-frequency pulse power, and the lithium thionyl chloride battery is used for long-term stable energy storage.

[0017] Preferably, the task priority of the self-powered unit is: ultrasonic transmission unit > imaging positioning unit > energy harvesting unit > self-powered unit itself. When the continuous power is lower than a preset threshold, priority is given to ensuring the power allocation for ultrasonic transmission and imaging positioning.

[0018] Preferably, the dynamic scheduling of the ultrasonic transmitting unit includes: quantifying the power state through a weighted scoring formula, adjusting the number of activated MEMS ultrasonic sensors and the transmission pulse width according to the scoring results, calculating phase weight and amplitude weight based on the target position predicted by the Kalman filter algorithm, and generating a directional beam.

[0019] Preferably, the signal processing of the imaging positioning unit includes: acquiring reflected signals using a 16-channel synchronous ADC, calculating the time difference of the signal arriving at each channel using the phase difference method, and solving the spatial coordinates using a triangulation algorithm in combination with the array geometric layout.

[0020] This invention also discloses a method for implementing a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting.

[0021] Step 1: Construct an energy harvesting unit to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy;

[0022] Step 2: Construct an ultrasonic transmitting unit for dynamically scheduling the array to generate directional ultrasonic beams based on the power state and the location of the target;

[0023] Step 3: Construct an imaging and positioning unit for synchronously acquiring reflected signals from directional ultrasonic beams and processing them in real time to generate spatial coordinates;

[0024] Step 4: Construct a self-powered unit that dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself according to preset task priorities;

[0025] Step 5: Construct backup energy storage modules.

[0026] Furthermore, in step 1, the energy harvesting unit is connected to the self-powered unit through a built-in sensing interface. The sensing interface is used to transmit sustainable electrical energy to the self-powered unit in digital form, converting environmental mechanical vibration energy into electrical energy and storing it to obtain sustainable electrical energy.

[0027] In step 2, the ultrasonic transmitting unit and the imaging positioning unit are connected via a data bus. The data bus is used to transmit the directional ultrasonic beam to the imaging positioning unit. When the quality of the reflected signal of the directional ultrasonic beam decreases beyond a preset threshold, spatial coordinates are transmitted to the ultrasonic transmitting unit. The ultrasonic transmitting unit re-schedules the array to generate the directional ultrasonic beam based on the spatial coordinates. The array is dynamically scheduled to generate the directional ultrasonic beam based on the power status and the position of the target.

[0028] In step 3, the imaging positioning unit is connected to the self-powered unit through an intelligent feedback link. The intelligent feedback link is used to send power requests to the self-powered unit; the reflected signals of the directional ultrasonic beam are collected synchronously and processed in real time to generate spatial coordinates.

[0029] In step 4, the self-powered unit and the ultrasonic transmitting unit are connected by a bidirectional communication power transmission line. The bidirectional communication power transmission line is used to transmit the power status of the ultrasonic transmitting unit, the location of the detection target, and the amount and frequency of power supplied by the self-powered unit to the ultrasonic transmitting unit, and to provide real-time feedback to the self-powered unit on the power consumption of the ultrasonic transmitting unit; and to dynamically allocate sustainable power to the energy acquisition unit, the ultrasonic transmitting unit, the imaging positioning unit, and itself according to the preset task priority.

[0030] In step 5, the backup energy storage module is used to store the remaining sustainable power after providing stable power to the energy harvesting unit, ultrasonic transmission unit, imaging positioning unit and itself when environmental mechanical vibration exists and the vibration energy exceeds a preset first threshold. When environmental mechanical vibration disappears, it provides distributable power to the self-powered unit and continuously monitors the existence of environmental mechanical vibration.

[0031] The beneficial effects of adopting the above technical solution are as follows:

[0032] 1. By harvesting energy, storing energy dynamically, and coordinating various units, environmental vibration energy is converted into sustainable electrical energy. Combined with dynamic power distribution and array scheduling, it completely eliminates dependence on external power sources and achieves stable high-precision spatial positioning in scenarios with fluctuating vibration energy. It is suitable for scenarios with limited power supply, such as remote monitoring and mobile devices.

[0033] 2. An intelligent feedback link is added to form a closed-loop response of "perception-adjustment-recovery". In complex reflection environments, the power distribution of the imaging and positioning unit can be temporarily improved, the signal processing accuracy can be improved and the power consumption can be reduced, and the applicability in scenarios with strong environmental interference can be further expanded.

[0034] 3. Add a backup energy storage module to store excess electrical energy when there is sufficient vibration and release electrical energy when the vibration disappears, solving the problem that traditional systems cannot operate when there is no vibration. In conjunction with hybrid energy storage, it enhances self-powering capability and extends the range in extreme scenarios.

[0035] 4. The energy harvesting unit adopts a hybrid energy storage design, which improves the pulse load response speed by connecting a supercapacitor and a lithium thionyl chloride battery in parallel, and avoids battery decay due to instantaneous large current, so that the battery life in intermittent vibration scenarios is extended by at least 2 times compared with a single battery solution.

[0036] 5. Optimize the entire energy harvesting-conversion-storage chain, with wideband (10Hz-2kHz) harvesting covering most industrial vibration scenarios, efficient conversion ensuring stable power supply, expanding energy sources and improving the system's adaptability to complex vibration environments.

[0037] 6. The self-powered unit adopts a dynamic priority strategy, allocating power according to the order of "ultrasonic emission > imaging positioning > energy harvesting > itself". When the power is low, the core functions are guaranteed first, improving the power utilization rate and extending the battery life in weak vibration scenarios.

[0038] 7. The ultrasonic transmitting unit quantifies the power status through weighted scoring, dynamically adjusts the number of activated sensors and pulse width, and generates a directional beam by combining Kalman filtering to balance power consumption and accuracy, thereby improving detection distance and positioning stability.

[0039] 8. The imaging and positioning unit adopts a 16-channel synchronous ADC and phase difference method to improve the accuracy of time difference measurement. Combined with the triangulation positioning algorithm, it reduces positioning error, supports dynamic target tracking, and enhances positioning reliability in vibration and wave scenarios.

[0040] 9. A systematic approach to the “energy harvesting-transmission-positioning-power supply-backup” full-link implementation method was constructed, forming a closed loop from vibration energy to system operation for the first time, providing a feasible self-powered solution for power-constrained scenarios.

[0041] 10. Refine the implementation steps of each unit, enhance collaboration through sensing interfaces and bidirectional communication, improve energy conversion efficiency, system stability and endurance, and expand applicability in complex vibration environments. Attached Figure Description

[0042] Figure 1 This is a logic diagram of a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting;

[0043] Figure 2 This is a schematic diagram illustrating the working principle of a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting.

[0044] The unit includes an energy harvesting unit 100, an ultrasonic emission unit 200, an imaging and positioning unit 300, and a self-powered unit 400. Detailed Implementation

[0045] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0046] Example 1. Figure 1 , Figure 2 This paper presents a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting, comprising:

[0047] The energy harvesting unit 100 is used to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy.

[0048] The ultrasonic transmitting unit 200 is used to dynamically schedule the MEMS ultrasonic sensor array according to the power state of the sustainable power and the location of the detection target to generate a directional ultrasonic beam;

[0049] The imaging positioning unit 300 is connected to the ultrasonic transmitting unit 200 and is used to synchronously acquire the reflected signal of the directional ultrasonic beam and process it in real time to generate spatial coordinates; when the quality of the reflected signal decreases beyond a preset threshold, it feeds back the spatial coordinates to the ultrasonic transmitting unit to trigger array reconstruction.

[0050] The self-powered unit 400 is connected to the energy harvesting unit 100 and dynamically allocates sustainable power to the energy harvesting unit 100, the ultrasonic emission unit 200, the imaging positioning unit 300, and itself according to the preset task priority.

[0051] This embodiment completely eliminates the system's dependence on external power supply through vibration energy harvesting and dynamic energy storage mechanisms, solving the application limitations of traditional ultrasonic sensor systems in power-free scenarios. Combined with the power distribution of the self-powered unit and the coordinated optimization of the ultrasonic transmitting unit adjusting the array's operating mode based on power status, power consumption is effectively reduced while maintaining detection accuracy, significantly extending the system's continuous operating time without manual intervention. Simultaneously, the linkage between the system and the imaging positioning unit ensures stable high-precision spatial positioning even in scenarios with fluctuating vibration energy, making it particularly suitable for power-constrained scenarios such as remote monitoring and mobile devices. This fundamentally solves the core problem of traditional systems relying on external power and being unable to self-power in vibration environments.

[0052] Example 2. Based on Example 1, this example further optimizes the system's self-powered adaptability and positioning accuracy by adding an intelligent feedback link.

[0053] The system also includes an intelligent feedback link, through which the imaging and positioning unit sends a power supply request to the self-powered unit.

[0054] For example, the imaging positioning unit calculates the signal-to-noise ratio (SNR) of the reflected signal every 100ms. When the SNR is less than the threshold for three consecutive times, the imaging positioning unit sends a power request to the self-powered unit. The self-powered unit temporarily adjusts the power allocation ratio, increasing the allocation of the imaging positioning unit from 30% to 50% to enhance its signal processing capability. When the SNR returns to the threshold, the original allocation ratio is restored.

[0055] Based on Example 1, Example 2 further optimizes the system's self-powered adaptability and positioning accuracy by adding an intelligent feedback link, forming a progressive technical effect of "basic self-powered supply + dynamic feedback optimization".

[0056] Example 1, through vibration energy harvesting, dynamic energy storage, and priority power allocation, has enabled the system to become independent of external power sources and maintain stable high-precision positioning even in scenarios with fluctuating vibration energy, providing a basic solution for power-constrained scenarios. Example 2, with its newly added intelligent feedback link, gives the system a closed-loop response capability of "sensing-adjustment-recovery" on top of Example 1: when a complex reflection environment causes a persistently low signal-to-noise ratio (SNR) of the reflected signal, the imaging and positioning unit can proactively request a temporary increase in power allocation (e.g., from 30% to 50%) from the self-powered unit via the intelligent feedback link. This dynamic adjustment mechanism, while maintaining the core advantage of "low power consumption and high precision balance" in Example 1, further improves signal processing accuracy, resulting in a further reduction in positioning error compared to Example 1. Moreover, compared to continuous high power supply, the closed-loop feedback can restore the original allocation ratio after the SNR recovers, significantly extending the system's endurance in weak vibration scenarios.

[0057] Furthermore, this intelligent feedback link works in conjunction with the array dynamic scheduling in Example 1: when the quality of the reflected signal decreases, the imaging positioning unit triggers the array reconstruction of the ultrasonic transmitting unit (continuing the array optimization logic of Example 1), and adjusts the power distribution through feedback, so that the positioning accuracy of the system in low power scenarios is further improved compared with Example 1, further expanding its applicability in scenarios with limited power supply and strong environmental interference, such as remote monitoring and complex industrial environments. It is a deepening and upgrade of the self-powered and high-precision positioning technology effect of Example 1.

[0058] Example 3. Based on Example 1, by adding a backup energy storage module, the system's self-powering stability and environmental adaptability are further enhanced, forming a progressive technical effect of "basic self-powering + emergency energy storage guarantee". Specifically:

[0059] The system is also equipped with a backup energy storage module; the backup energy storage module is used to store the remaining sustainable power after providing stable power to the energy harvesting unit, ultrasonic transmission unit, imaging positioning unit and itself when there is environmental mechanical vibration and the vibration energy exceeds a preset first threshold; when the environmental mechanical vibration disappears, it provides distributable power to the self-powered unit.

[0060] For example, assume the backup energy storage module has a capacity of 5Wh, connected to the energy harvesting unit via a first energy transmission line, and connected to the self-powered unit via a second energy transmission line. When environmental mechanical vibration exists and the energy exceeds a first threshold (e.g., 2g), the energy harvesting unit will transfer the remaining sustainable electrical energy after allocation to the backup energy storage module for storage via the first energy transmission line; when the environmental mechanical vibration disappears, the backup energy storage module will supply power to the self-powered unit via the second energy transmission line. The system is assumed to operate continuously at a power consumption of ≤1mW for 48 hours.

[0061] Example 1, through vibration energy harvesting, dynamic energy storage, and priority power allocation, has achieved system independence from external power sources and stable operation under vibration energy fluctuation scenarios, providing a core solution for power-constrained scenarios. Example 3, with its newly added backup energy storage module, builds upon Example 1 by establishing a closed-loop mechanism of "surplus energy storage - emergency energy release": when environmental vibration is sufficient (e.g., vibration energy exceeding 2g), the module can store the remaining power after allocation by the energy harvesting unit; when the vibration disappears, it releases power to the self-powered unit through a dedicated line. This design compensates for the potential power shortage in vibration-free environments that might occur in Example 1.

[0062] Meanwhile, the backup energy storage module works synergistically with the hybrid energy storage module in Example 1: the hybrid energy storage module handles daily pulse loads and stable energy storage, while the backup energy storage module provides emergency power in extreme vibration-free scenarios. Together, they enhance the system's ability to completely operate independently of an external power source. Compared to Example 1, this example extends the system's runtime in intermittent vibration or long-term vibration-free scenarios, eliminates the need for manual power replacement, further reduces maintenance costs, and significantly expands its applicability in extreme power-constrained scenarios such as remote unattended monitoring and offline operation of mobile devices. It represents a key supplement and upgrade to the self-powered technology of Example 1.

[0063] Example 4. Based on any of Examples 1-3, this example further optimizes the system's energy storage and utilization efficiency through targeted design of the hybrid energy storage module in the energy harvesting unit, forming a progressive technical effect of "basic self-powered architecture + high-efficiency energy storage synergy." Specifically,

[0064] The energy harvesting unit is equipped with a piezoelectric composite vibration energy harvester, an AC-DC conversion circuit, and a hybrid energy storage module. The piezoelectric composite vibration energy harvester converts environmental mechanical vibration energy into initial electrical energy, and the AC-DC conversion circuit converts the initial electrical energy into stable DC power and stores it through the hybrid energy storage module to form sustainable electrical energy.

[0065] Example 1, through vibration energy harvesting, dynamic energy storage, and priority power allocation, has achieved system independence from external power sources and stable operation under vibration energy fluctuation scenarios, providing a core solution for power-constrained scenarios. Its key lies in the collaborative construction of a self-powered basic framework by various units. Example 4 focuses on the core components of the energy harvesting unit. Through the collaboration of a piezoelectric composite vibration energy harvester, an AC-DC conversion circuit, and a hybrid energy storage module, it achieves refined optimization of energy conversion and storage based on any of Examples 1-3. Simultaneously, in conjunction with the self-powered unit in any of Examples 1-3, it ensures a stable and sustainable power supply, providing a reliable energy foundation for key functions such as ultrasonic emission and imaging positioning, significantly expanding its applicability in scenarios with abundant vibration but difficult power acquisition, such as machinery manufacturing and transportation.

[0066] Example 5. Based on Example 4, this example integrates a piezoelectric composite vibration energy harvester, an AC-DC conversion circuit, and a hybrid energy storage module to construct a full-link optimization mechanism for "energy harvesting-conversion-storage." Building upon the "hybrid energy storage improving energy utilization efficiency" of Example 4, it further enhances the system's broad energy source range and conversion efficiency, resulting in a progressive technological effect. Specifically:

[0067] The piezoelectric composite vibration energy harvester uses a cantilever beam-mass block structure constructed with PZT-5H lead zirconate titanate piezoelectric ceramic and flexible polymer to capture environmental mechanical vibration energy at frequencies of 10Hz-2kHz.

[0068] Description: A piezoelectric composite vibration energy harvester is a device that converts environmental mechanical vibration energy into electrical energy. It combines PZT-5H lead zirconate titanate piezoelectric ceramic (a commonly used piezoelectric material) with a flexible polymer to construct a cantilever beam-mass block structure. PZT-5H is a commonly used model in the field of piezoelectric materials, the cantilever beam-mass block structure is a classic structural form for vibration energy harvesters, and the use of flexible polymers to optimize frequency response is also a standard technique in this field, which will not be described in detail here.

[0069] The AC-DC conversion circuit converts initial electrical energy into stable direct current and stores it through a hybrid energy storage module to form sustainable electrical energy.

[0070] The hybrid energy storage module includes a 3.3V / 1F supercapacitor and an ER14505 lithium thionyl chloride battery. The supercapacitor and the lithium thionyl chloride battery are connected in parallel. The supercapacitor is used to absorb high-frequency pulse power, and the lithium thionyl chloride battery is used for long-term stable energy storage.

[0071] Example 4 focuses on the synergistic mechanism of the hybrid energy storage module. Through the parallel design of a 3.3V / 1F supercapacitor and an ER14505 lithium thionyl chloride battery, it solves the balance problem between pulse load response and long-term stable energy storage, providing a reliable energy storage foundation for the system. Example 5, building upon this, further optimizes the energy harvesting and conversion process: the piezoelectric composite vibration energy harvester uses PZT-5H piezoelectric ceramics and flexible polymers to construct a cantilever beam-mass block structure, achieving a wide frequency response of 10Hz-2kHz. This expands the frequency range compared to a single PZT structure, covering most industrial scenarios from bridge vibration to mechanical operation, providing a wider range of energy input for the hybrid energy storage module. The AC-DC conversion circuit, through bridge rectification, 3.3V stable boost, and a maximum power point tracking module (adjusting the 10Ω-1kΩ equivalent load using the perturbation observation method), maintains efficient energy conversion even in weak vibration environments, ensuring stable and efficient power input to the hybrid energy storage module.

[0072] Explanation: The principle behind the maximum power point tracking module's optimization of energy conversion efficiency through perturbation and observation is as follows: The equivalent load resistance is adjusted in real time (e.g., within the range of 10Ω-1kΩ). By subtly altering the load through small "perturbations," changes in energy output are observed. If the output power increases, adjustments continue in that direction; if it decreases, adjustments are made in the opposite direction. This ensures the piezoelectric composite vibration energy harvester always operates at maximum power output, thereby optimizing energy conversion efficiency. This is a commonly used technique and will not be discussed in detail here.

[0073] This end-to-end optimization enables Example 5 to achieve a dual improvement over Example 4: on the one hand, wideband acquisition and efficient conversion expand the energy source, further extending the battery life of the hybrid energy storage module in intermittent vibration scenarios compared to Example 4; on the other hand, the stable 3.3V output and the synergy of hybrid energy storage allow the system to still provide stable power to units such as ultrasonic transmitters when vibration energy fluctuates, significantly expanding its applicability in complex vibration environments compared to the simple energy storage optimization of Example 4.

[0074] Example 6. This example, based on the self-powered basic framework constructed in any of Examples 1-3, further optimizes the system's refined power management capabilities by introducing a dynamic priority power supply strategy, forming a progressive technical effect of "basic self-powered supply + dynamic energy efficiency optimization." It represents a concrete implementation and upgrade of the "dynamic power allocation strategy" in Examples 1-3. Specifically,

[0075] The task priority of the self-powered unit is: ultrasonic transmission > imaging positioning > energy harvesting > self-powered unit itself. When the continuous power is lower than the preset threshold, priority is given to ensuring the power allocation for ultrasonic transmission and imaging positioning.

[0076] Example 1, through energy harvesting, dynamic energy storage, and coordination among units, has achieved system independence from external power sources and stable operation under vibration energy fluctuation scenarios. Its core value lies in constructing a basic link of "vibration energy → sustainable electrical energy → functional realization," solving the core problem of traditional systems relying on external power sources. Example 6 focuses on the power allocation logic of the self-powered unit. Based on any of Examples 1-3, it clarifies the task priority of "ultrasonic emission > imaging positioning > energy harvesting > self-powered unit itself," and maps the power state to three availability levels by real-time monitoring of supercapacitor voltage and lithium-ion battery capacity, dynamically adjusting the allocation quota.

[0077] This optimization enables Embodiment 6 to achieve a dual improvement over any of Embodiments 1-3: On the one hand, the priority mechanism ensures that core functions such as ultrasonic transmission are not interrupted under low power conditions, further enhancing the system's survivability compared to Embodiment 1; on the other hand, the dynamic strategy of on-demand allocation further improves power utilization, extending the battery life in weak vibration scenarios compared to Embodiment 1. Especially in power-constrained scenarios such as remote monitoring, it can more stably maintain high-precision positioning capabilities, which is a reinforcement and refinement of the goal of "extending the working time without human intervention" of any of Embodiments 1-3.

[0078] Example 7. This example, based on the self-powered system framework constructed in any of Examples 1-3, further achieves an "intelligent balance between power consumption and detection accuracy" through refined design of the dynamic scheduling mechanism of the ultrasonic transmitting unit, forming a progressive technical effect of "basic self-powered capability + dynamic transmission optimization." It represents a specific deepening and upgrade of the "ultrasonic transmitting unit adjusting the array operating mode according to the power state" approach in any of Examples 1-3. Specifically,

[0079] The dynamic scheduling of the ultrasonic transmitting unit includes: quantifying the power state through a weighted scoring formula, adjusting the number of activated MEMS ultrasonic sensors and the pulse width based on the scoring results, calculating phase weights and amplitude weights based on the target position predicted by the Kalman filter algorithm, and generating a directional beam.

[0080] Example 1 has achieved system independence from external power supply through energy harvesting, dynamic energy storage, and coordination among units. By prioritizing the self-powered units and scheduling the ultrasonic transmitting units, power consumption is reduced while ensuring detection accuracy, significantly extending the uninterrupted working time. Its core value lies in constructing a complete link for self-powered ultrasonic detection. Example 7 focuses on the dynamic scheduling logic of the ultrasonic transmitting units. Based on any of Examples 1-3, it introduces a dual mechanism of "weighted scoring quantification of power status + Kalman filter target prediction": by quantifying the power level from 0 to 1, the number of activated sensors (e.g., 80% activation when the score is ≥0.8, and 30% activation when the score is <0.3) and the transmission pulse width (50μs to 10μs) are dynamically adjusted. At the same time, the target position is predicted by Kalman filtering to calculate beamforming parameters and generate a directional beam.

[0081] Note: In this system, the ultrasonic transmitting unit quantifies the state of power (SOP) using a weighted scoring formula. For example, the SOP is quantified into an availability level of 0-1. A score ≥ 0.8 activates 80% of the sensors with a pulse width of 50 μs, while a score < 0.3 activates 30% of the sensors with a pulse width of 10 μs. For those skilled in the art, the weighted scoring formula is a conventional method for quantifying indicators. Combining the scoring range and corresponding scheduling strategy of the above embodiments, it is clear how the SOP is quantified using this formula; further details are omitted here.

[0082] This optimization enables Embodiment 7 to achieve three improvements over any of Embodiments 1-3: First, the directional beam signal-to-noise ratio is improved, and the detection range is further extended compared to Embodiment 1; second, dynamic scheduling precisely adjusts power consumption according to the power status, significantly reducing power consumption while maintaining positioning accuracy in low-power scenarios; and third, through the synergy of target prediction and beamforming, the positioning stability of the system under vibration energy fluctuations is further improved compared to any of Embodiments 1-3. This not only strengthens the ability of any of Embodiments 1-3 to "adapt to complex vibration environments," but also enables the system to achieve more efficient detection under limited power conditions in scenarios with limited power supply, such as remote monitoring and mobile devices, which is a key enhancement to the technical effects of any of Embodiments 1-3.

[0083] Example 8. This example, based on the self-powered ultrasonic sensor array system framework constructed in any of Examples 1-3, further enhances the system's positioning accuracy and dynamic response capability through refined design of the imaging positioning unit's signal processing mechanism, forming a progressive technical effect of "basic self-powered capability + high-precision positioning enhancement." It represents a specific upgrade to the "real-time signal processing of the imaging positioning unit and system linkage" function in any of Examples 1-3. Specifically,

[0084] A 16-channel synchronous ADC is used to acquire reflected signals. The time difference of the signal arriving at each channel is calculated by the phase difference method. The spatial coordinates are solved by the triangulation algorithm in combination with the array geometry.

[0085] Working principle: For example, the imaging positioning unit uses a 16-channel synchronous ADC to acquire the reflected signal of the directional ultrasonic beam, simultaneously recording the timestamp and amplitude value; the signal undergoes bandpass filtering, programmable gain amplification, and 16-bit oversampling digital encoding preprocessing; the time difference of the signal arriving at each channel is calculated using the phase difference method; combined with the geometric layout of the MEMS ultrasonic sensor array, such as an 8×8 rectangular array with a spacing of 2mm, the three-dimensional spatial coordinates (x, y, z) of the detected target are calculated based on the triangulation algorithm, resulting in small positioning error. When the quality of the reflected signal degrades beyond a preset threshold, the spatial coordinates are fed back to the ultrasonic transmitting unit to trigger array reconstruction.

[0086] Example 1 has achieved system independence from external power supply through energy harvesting, dynamic energy storage, and coordination among units. Furthermore, through the linkage between the imaging positioning unit and other units, it ensures stable and high-precision spatial positioning in scenarios with fluctuating vibration energy. Its core value lies in constructing a complete self-powered detection link, solving the problem of traditional systems relying on external power. Example 8 focuses on the signal processing details of the imaging positioning unit. Based on any of Examples 1-3, it introduces a triple optimization of "16-channel synchronous ADC acquisition + phase difference method + triangulation algorithm": It synchronously acquires reflected signals through 16 channels and records timestamps and amplitude values. Combined with preprocessing such as bandpass filtering and programmable gain amplification, the phase difference method is used to calculate the time difference of signal arrival at each channel. Finally, the three-dimensional spatial coordinates are calculated using a triangulation algorithm based on the array geometry (e.g., an 8×8 rectangular array).

[0087] This optimization significantly improves Embodiment 8 compared to any of Embodiments 1-3: First, it enhances the accuracy of time difference measurement, resulting in a substantial reduction in positioning error compared to the undefined single-channel scheme in Embodiment 1. Second, it supports dynamic target tracking with minimal tracking delay, strengthening the "stable positioning under vibration energy fluctuation scenarios" capability of any of Embodiments 1-3. This not only enables the system to achieve higher-precision spatial positioning in power-constrained scenarios such as remote monitoring and mobile devices, but also, through the mechanism of triggering array reconstruction when the reflected signal quality deteriorates, forms a closed loop with the ultrasonic transmission unit scheduling in any of Embodiments 1-3, further expanding the system's applicability in complex vibration environments. This is a key enhancement to the technical effects of any of Embodiments 1-3.

[0088] Example 9. Figure 1 , Figure 2The following steps are illustrated in any of the embodiments 1-8: A method for implementing a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting is shown.

[0089] Step 1: Construct an energy harvesting unit to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy;

[0090] Step 2: Construct an ultrasonic transmitting unit for dynamically scheduling the array to generate directional ultrasonic beams based on the power state and the location of the target;

[0091] Step 3: Construct an imaging and positioning unit for synchronously acquiring reflected signals from directional ultrasonic beams and processing them in real time to generate spatial coordinates;

[0092] Step 4: Construct a self-powered unit that dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself according to preset task priorities;

[0093] Step 5: Construct backup energy storage modules.

[0094] Example 9 establishes the basic framework of a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting by constructing complete implementation steps for energy harvesting, ultrasonic emission, imaging and positioning, self-powered unit, and backup energy storage module. Its core value lies in systematizing the entire process of "vibration energy harvesting - electrical energy conversion and storage - dynamic scheduling detection - priority power supply - emergency energy storage," realizing for the first time a closed loop from environmental vibration energy to continuous system operation, completely eliminating the dependence of traditional ultrasonic sensors on external power sources.

[0095] By constructing each functional unit step by step, this method ensures that the system can autonomously complete energy acquisition, distribution and detection tasks in a vibration environment. While ensuring basic detection accuracy, it significantly reduces the dependence on external power supply, providing a feasible self-powered solution for scenarios with limited power supply, such as remote monitoring and mobile devices. It solves the core problem that traditional systems are difficult to apply in complex vibration environments due to power limitations.

[0096] Example 10. Based on the basic framework of Example 9, this example further optimizes system performance through refined design and functional enhancement of each step, achieving a progressive technical effect of "basic self-powered + precise collaboration." Details are as follows:

[0097] Step 1: Construct an energy harvesting unit to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy.

[0098] The energy harvesting unit is connected to the self-powered unit via a built-in sensing interface, which is used to transmit sustainable electrical energy to the self-powered unit in digital form.

[0099] Converting environmental mechanical vibration energy into electrical energy and storing it yields sustainable electrical energy, including:

[0100] Step 1.1: In an environment where a MEMS ultrasonic sensor array is deployed, a piezoelectric composite vibration energy harvester is used to capture the mechanical vibration energy of the environment and convert it into initial electrical energy.

[0101] Based on the positive piezoelectric effect, a cantilever beam-mass block piezoelectric composite vibration energy harvester was constructed using lead zirconate titanate (PZT-5H) piezoelectric ceramics and flexible polymers. When environmental mechanical vibration energy with a vibration frequency of 10Hz-2kHz is applied to the piezoelectric composite vibration energy harvester, the piezoelectric material undergoes charge separation due to deformation, generating an alternating current signal. This achieves the direct conversion of environmental vibration into electrical energy, eliminating dependence on an external power source.

[0102] For example, in a bridge vibration monitoring scenario, low-frequency vibrations generated when vehicles pass by can be captured to provide initial power to subsequent circuits.

[0103] Step 1.2: Convert the AC power in the initial electrical energy into DC power through an AC-DC conversion circuit, and optimize the power conversion efficiency using the maximum power point tracking algorithm to obtain stable DC power.

[0104] A bridge rectifier circuit is used to convert the piezoelectric AC output into pulsating DC, and a Boost converter with a switching frequency of 1MHz is used to boost the voltage to 3.3V. Integrating a perturbation observation method and a maximum power point tracking algorithm, the equivalent load resistance is dynamically adjusted within the range of 10Ω-1kΩ, ensuring that the piezoelectric composite vibration energy harvester always operates at maximum power output. This converts unstable AC into high-quality DC and adapts it to subsequent voltage requirements.

[0105] For example, when the vibration intensity fluctuates from 0.5g to 2g, the maximum power point tracking algorithm can automatically adjust the operating point to ensure optimal power conversion efficiency.

[0106] Step 1.3: Storing stable direct current in a supercapacitor and a lithium thionyl chloride battery to obtain sustainable electrical energy.

[0107] A hybrid energy storage structure is employed, consisting of a 3.3V / 1F supercapacitor with ESR <50mΩ and an ER14505 type 3.6V / 2.6Ah lithium thionyl chloride battery connected in parallel. The supercapacitor absorbs high-frequency pulse power, while the lithium thionyl chloride battery provides long-term stable energy storage. A balanced charging strategy is implemented through the battery management system: when the supercapacitor voltage exceeds 3V, it is charged preferentially; when the remaining capacity of the lithium thionyl chloride battery is below 20%, trickle charging mode is activated to prevent over-discharge, thus balancing power density and energy density.

[0108] For example, when the ultrasonic transmitting unit requires a short-term high power of 10W peak, the supercapacitor can release energy instantly; during the period when environmental mechanical vibration disappears, the lithium-ion battery can maintain the system's basic power consumption of less than 1mW for a certain period of time.

[0109] Step 2: Construct an ultrasonic transmitting unit for dynamically scheduling the array to generate directional ultrasonic beams based on the power state and the location of the target.

[0110] The ultrasonic transmitting unit and the imaging positioning unit are connected via a data bus. The data bus is used to transmit the directional ultrasonic beam to the imaging positioning unit. When the quality of the reflected signal of the directional ultrasonic beam decreases beyond a preset threshold, spatial coordinates are transmitted to the ultrasonic transmitting unit.

[0111] The ultrasonic transmitting unit re-schedules the array to generate a directional ultrasonic beam based on the spatial coordinates.

[0112] The array is dynamically scheduled to generate directional ultrasonic beams based on the power status and the location of the target, including:

[0113] Step 2.1: Assess the availability level of sustainable power based on the current supercapacitor voltage and the remaining capacity of lithium thionyl chloride.

[0114] The supercapacitor voltage is mapped to the remaining capacity of the lithium-ion battery to determine the energy availability level. A weighted scoring formula is used to quantify the system's energy state, providing a basis for dynamic task scheduling decisions. This allows for real-time assessment of the energy state, laying the foundation for dynamic array adjustment and beamforming.

[0115] Step 2.2: Based on the availability level, adjust the number of MEMS ultrasonic sensors activated by the MEMS ultrasonic transducer and optimize the transmission pulse width to obtain the array working mode, including the number of activated channels and the transmission pulse width.

[0116] Based on the available power level, dynamic sparse array technology is used to adjust the number of activated MEMS ultrasonic transducers and the pulse width of the emitted signals, balancing the detection resolution and power consumption, and ensuring the stable operation of the system under different power conditions.

[0117] Step 2.3: Obtain the spatial coordinates of the target location using the Kalman filter algorithm.

[0118] A Kalman filter algorithm is used to establish a target kinematic model and recursively estimate the target position. Through the prediction and update stages, reflected signal noise is suppressed, improving the stability and positioning accuracy of dynamic target tracking and providing accurate spatial coordinates of the detected target position.

[0119] Step 2.4: Calculate the beamforming parameters required to focus the directional ultrasonic beam onto the spatial coordinates, including phase weight and amplitude weight.

[0120] Based on the phase conjugate method, the phase weight and amplitude weight required for beamforming are calculated, which realizes precise focusing and directional control of the ultrasonic beam and improves the detection signal-to-noise ratio.

[0121] Step 2.5: Dynamically adjust the driving signal of the MEMS ultrasonic sensor array according to the array working mode and beamforming parameters to generate a directional ultrasonic beam.

[0122] The theoretical beamforming parameters are converted into a physical ultrasonic field, supporting dynamic reconstruction and ensuring the precise pointing and focusing of the ultrasonic beam.

[0123] Step 3: Construct an imaging and positioning unit for synchronously acquiring reflected signals from directional ultrasonic beams and processing them in real time to generate spatial coordinates.

[0124] The imaging and positioning unit is connected to the self-powered unit via an intelligent feedback link, which is used to send power requests to the self-powered unit.

[0125] The system synchronously acquires the reflected signals of directional ultrasonic beams and processes them in real time to generate spatial coordinates, including:

[0126] Step 3.1: Based on the emission time of the directional ultrasonic beam, acquire the reflection signal of the directional ultrasonic beam and perform synchronous sampling to obtain initial reflection signal data containing time and amplitude information.

[0127] Through a time synchronization mechanism, the imaging and positioning unit is triggered the instant the ultrasonic transmitting unit emits the directional ultrasonic beam. A multi-channel synchronous sampling ADC is used to sample the reflected signal of the directional ultrasonic beam at equal intervals, and the timestamp and amplitude value of each sampling point are recorded. This ensures that the timing of ultrasonic emission and signal acquisition are strictly aligned, avoiding positioning errors caused by time offset.

[0128] Step 3.2: Based on the initial reflected signal data, perform filtering, signal amplification, and digital encoding operations to obtain the enhanced reflected signal.

[0129] The initial reflected signal is preprocessed as follows: First, environmental noise and out-of-band interference are suppressed by a digital filter bank; second, a programmable gain amplifier is used to compress the dynamic range and improve the signal-to-noise ratio of the weak reflected signal; finally, a 16-bit oversampling digital encoding is implemented by a ΔΣ modulator to reduce quantization noise and ensure the accuracy of subsequent phase difference calculation.

[0130] Step 3.3: Calculate the phase difference of the enhanced reflected signal reaching each active channel based on the geometric layout of the MEMS ultrasonic sensor array using the phase difference method.

[0131] Spatial geometric information is converted into phase difference parameters, providing input for triangulation.

[0132] Step 3.4: Based on the principle of triangulation, the phase difference is converted into spatial distance information, and the spatial coordinates of the target are calculated.

[0133] The spatial coordinates of the target are obtained by iterative solution.

[0134] Step 4: Construct a self-powered unit that dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself according to preset task priorities.

[0135] The self-powered unit and the ultrasonic transmitting unit are connected by a bidirectional communication power transmission line. The bidirectional communication power transmission line is used to transmit the power status of the ultrasonic transmitting unit, the location of the detected target, and the amount and frequency of power supplied by the self-powered unit to the ultrasonic transmitting unit, and to provide real-time feedback to the self-powered unit on the power consumption of the ultrasonic transmitting unit.

[0136] Based on preset task priorities, the system dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself, including:

[0137] Step 4.1: Monitor the supercapacitor voltage and the remaining capacity of the lithium thionyl chloride battery in real time, and assess the availability level of sustainable power.

[0138] Step 4.2: Allocate sustainable power according to the preset task priority of the availability level.

[0139] The availability levels are divided into Level 1, Level 2, and Level 3 power availability. The priority for Level 1 power availability is: Ultrasonic Transmitting Unit > Imaging and Positioning Unit > Energy Harvesting Unit > Self-Powered Unit. The power allocation for Level 2 power availability is: 35% for the Ultrasonic Transmitting Unit, 30% for the Imaging and Positioning Unit, 25% for the Energy Harvesting Unit, and 10% for the Self-Powered Unit. The priority for Level 2 power availability is: Ultrasonic Transmitting Unit > Imaging and Positioning Unit > Energy Harvesting Unit > Self-Powered Unit. The priority for Level 3 power availability is: Ultrasonic Transmitting Unit > Self-Powered Unit > Imaging and Positioning Unit > Energy Harvesting Unit. The power allocation for Level 3 power availability is: 25% for the Ultrasonic Transmitting Unit, 20% for the Self-Powered Unit, 20% for the Imaging and Positioning Unit, and 35% for the Energy Harvesting Unit.

[0140] Task priorities and the corresponding task priorities and power allocation quotas for available levels are set according to actual needs.

[0141] Step 4.3: Detect the current supercapacitor voltage and the remaining capacity of the lithium thionyl chloride battery, allocate power to the self-powered unit, monitor the power consumption of each unit in real time, dynamically adjust the task priority and redistribute sustainable power based on the deviation between the actual power consumption and the preset power consumption.

[0142] Step 5: Construct backup energy storage modules.

[0143] The backup energy storage module is used to store the remaining sustainable power after providing stable power to the energy harvesting unit, ultrasonic transmitting unit, imaging positioning unit, and itself when environmental mechanical vibration exists and the vibration energy exceeds a preset first threshold; when environmental mechanical vibration disappears, it provides distributable power to the self-powered unit, including:

[0144] Step 5.1: Continuously monitor the presence of environmental mechanical vibrations.

[0145] Step 5.1.1: Determine whether the vibration energy exceeds the first threshold based on the energy intensity of the environmental mechanical vibration;

[0146] If the vibration energy exceeds the first threshold, the remaining sustainable power after allocating sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself will be dynamically transmitted to the backup energy storage module for storage through the first energy transmission line according to the preset task priority.

[0147] Step 5.1.2: If the environmental mechanical vibration disappears:

[0148] The backup energy storage module transmits electrical energy to the self-powered unit through the second energy transmission line, and dynamically allocates sustainable electrical energy to the energy harvesting unit, ultrasonic transmission unit, imaging positioning unit and itself according to the preset task priority.

[0149] The backup energy storage module is connected to the energy harvesting unit via a first energy transmission line. The first energy transmission line is used to transmit the remaining sustainable power after providing stable power to the energy harvesting unit, the ultrasonic transmitting unit, the imaging positioning unit, and itself to the backup energy storage module for storage. The backup energy storage module is connected to the self-powered unit via a second energy transmission line. The second energy transmission line is used to transmit the power of the backup energy storage module to the self-powered unit when the environmental mechanical vibration disappears.

[0150] Compared to the basic process of Example 9, the optimization of Example 10 is reflected in three aspects: First, the energy harvesting unit realizes digital transmission of electrical energy through the sensing interface. Combined with the composite structure of PZT-5H piezoelectric ceramic and flexible polymer and the 10Hz-2kHz wideband response, the energy conversion efficiency is further improved compared to Example 9, and it is adapted to more vibration scenarios. Second, a data bus, bidirectional communication power transmission line and intelligent feedback link are added between each unit. For example, the ultrasonic transmitting unit and the imaging positioning unit adjust the array in linkage through the data bus, and the self-powered unit dynamically optimizes the allocation strategy according to the real-time power consumption, so that the stability of the system during vibration energy fluctuations is further improved compared to Example 9. Third, the backup energy storage module realizes precise control of "surplus storage-emergency release" through dual energy transmission lines. Combined with the synergy of the hybrid energy storage module, the system's endurance in a vibration-free environment is significantly extended compared to Example 9.

[0151] These optimizations enable the system to further upgrade from "removing dependence on external power supply" in Example 9 to "high-efficiency energy utilization, dynamic collaborative detection, and extreme scenario adaptation," significantly expanding its applicability in complex vibration environments and representing a key enhancement to the technical solution of Example 9.

[0152] In summary, this invention completely solves the problem of traditional ultrasonic sensors relying on external power sources by coordinating the entire chain of energy harvesting, conversion, storage, detection, power supply, backup, array optimization, and feedback. It achieves the goals of self-powered operation, high precision, long battery life, and adaptability to complex vibration environments, significantly reducing maintenance costs and expanding applicability in power-constrained scenarios.

[0153] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any equivalent variations made in accordance with the claims of the present invention are still within the scope of the present invention.

Claims

1. A self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting, characterized in that, include: An energy harvesting unit is used to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy. An ultrasonic transmitting unit is used to dynamically schedule the MEMS ultrasonic sensor array according to the power state of the sustainable power and the location of the detection target to generate a directional ultrasonic beam; An imaging positioning unit, connected to the ultrasonic transmitting unit, is used to synchronously acquire the reflected signal of the directional ultrasonic beam and process it in real time to generate spatial coordinates; when the quality of the reflected signal degrades beyond a preset threshold, it feeds back the spatial coordinates to the ultrasonic transmitting unit to trigger array reconstruction. The self-powered unit connects to the energy harvesting unit and dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself according to preset task priorities.

2. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to claim 1, characterized in that, It also includes an intelligent feedback link, through which the imaging and positioning unit sends a power supply request to the self-powered unit.

3. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to claim 1, characterized in that, It is also equipped with a backup energy storage module; the backup energy storage module is used to store the remaining sustainable power after providing stable power to the energy harvesting unit, ultrasonic transmission unit, imaging positioning unit and itself when there is environmental mechanical vibration and the vibration energy exceeds a preset first threshold; when the environmental mechanical vibration disappears, it provides distributable power to the self-powered unit.

4. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to any one of claims 1 to 3, characterized in that, The energy harvesting unit is equipped with a piezoelectric composite vibration energy harvester, an AC-DC conversion circuit, and a hybrid energy storage module. The piezoelectric composite vibration energy harvester converts environmental mechanical vibration energy into initial electrical energy, and the AC-DC conversion circuit converts the initial electrical energy into stable DC power and stores it through the hybrid energy storage module to form sustainable electrical energy.

5. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to claim 4, characterized in that, The piezoelectric composite vibration energy harvester uses a cantilever beam-mass block structure constructed with PZT-5H lead zirconate titanate piezoelectric ceramic and flexible polymer to capture environmental mechanical vibration energy at frequencies of 10Hz-2kHz. The AC-DC conversion circuit includes a bridge rectifier circuit, a boost converter, and a maximum power point tracking module. The bridge rectifier circuit converts AC power into pulsating DC power, the boost converter boosts the voltage to 3.3V, and the maximum power point tracking module optimizes the power conversion efficiency through a perturbation-observation method. The hybrid energy storage module includes a 3.3V / 1F supercapacitor and an ER14505 lithium thionyl chloride battery. The supercapacitor and the lithium thionyl chloride battery are connected in parallel. The supercapacitor is used to absorb high-frequency pulse power, and the lithium thionyl chloride battery is used for long-term stable energy storage.

6. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to any one of claims 1 to 3, characterized in that, The task priority of the self-powered unit is as follows: ultrasonic transmission unit > imaging positioning unit > energy harvesting unit > self-powered unit itself. When the continuous power is lower than the preset threshold, priority is given to ensuring the power allocation for ultrasonic transmission and imaging positioning.

7. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to any one of claims 1 to 3, characterized in that, The dynamic scheduling of the ultrasonic transmitting unit includes: quantifying the power state through a weighted scoring formula, adjusting the number of activated MEMS ultrasonic sensors and the pulse width based on the scoring results, calculating phase weights and amplitude weights based on the target position predicted by the Kalman filter algorithm, and generating a directional beam.

8. The self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to any one of claims 1 to 3, characterized in that, The signal processing of the imaging positioning unit includes: acquiring reflected signals using a 16-channel synchronous ADC, calculating the time difference of the signal arriving at each channel using the phase difference method, and solving the spatial coordinates using a triangulation algorithm in conjunction with the array geometric layout.

9. A method for implementing a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting as described in any one of claims 1 to 8, characterized in that, The steps include: Step 1: Construct an energy harvesting unit to convert environmental mechanical vibration energy into electrical energy and store it to obtain sustainable electrical energy; Step 2: Construct an ultrasonic transmitting unit for dynamically scheduling the array to generate directional ultrasonic beams based on the power state and the location of the target; Step 3: Construct an imaging and positioning unit for synchronously acquiring reflected signals from directional ultrasonic beams and processing them in real time to generate spatial coordinates; Step 4: Construct a self-powered unit that dynamically allocates sustainable power to the energy harvesting unit, ultrasonic emission unit, imaging positioning unit, and itself according to preset task priorities; Step 5: Construct backup energy storage modules.

10. The method for implementing a self-powered MEMS ultrasonic sensor array system based on vibration energy harvesting according to claim 9, characterized in that, In step 1, the energy harvesting unit is connected to the self-powered unit through a built-in sensing interface. The sensing interface is used to transmit sustainable electrical energy to the self-powered unit in digital form, converting environmental mechanical vibration energy into electrical energy and storing it to obtain sustainable electrical energy. In step 2, the ultrasonic transmitting unit and the imaging positioning unit are connected via a data bus. The data bus is used to transmit the directional ultrasonic beam to the imaging positioning unit. When the quality of the reflected signal of the directional ultrasonic beam decreases beyond a preset threshold, spatial coordinates are transmitted to the ultrasonic transmitting unit. The ultrasonic transmitting unit re-schedules the array to generate the directional ultrasonic beam based on the spatial coordinates. The array is dynamically scheduled to generate the directional ultrasonic beam based on the power status and the position of the target. In step 3, the imaging positioning unit is connected to the self-powered unit through an intelligent feedback link. The intelligent feedback link is used to send power requests to the self-powered unit; the reflected signals of the directional ultrasonic beam are collected synchronously and processed in real time to generate spatial coordinates. In step 4, the self-powered unit and the ultrasonic transmitting unit are connected by a bidirectional communication power transmission line. The bidirectional communication power transmission line is used to transmit the power status of the ultrasonic transmitting unit, the location of the detection target, and the amount and frequency of power supplied by the self-powered unit to the ultrasonic transmitting unit, and to provide real-time feedback to the self-powered unit on the power consumption of the ultrasonic transmitting unit; and to dynamically allocate sustainable power to the energy acquisition unit, the ultrasonic transmitting unit, the imaging positioning unit, and itself according to the preset task priority. In step 5, the backup energy storage module is used to store the remaining sustainable power after providing stable power to the energy harvesting unit, ultrasonic transmission unit, imaging positioning unit and itself when environmental mechanical vibration exists and the vibration energy exceeds a preset first threshold. When environmental mechanical vibration disappears, it provides distributable power to the self-powered unit and continuously monitors the existence of environmental mechanical vibration.

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