Substrate clamping device

Abstract

The present invention relates to a substrate clamping device, which includes: a fixing part, coupled to a conveying frame for conveying a substrate; a clamping part, coupled to the fixing part in a manner that can rotate about a first rotation axis, and rotates about the first rotation axis between a clamping position for fixing the substrate to the conveying frame and a release position spaced apart from the clamping position; a restricting part, coupled to the clamping part in a manner that can rotate about a second rotation axis spaced apart from the first rotation axis, and rotates about the second rotation axis between a rotation restricting position supported by the fixing part and a rotation allowing position spaced apart from the fixing part, wherein when the restricting part is in the rotation restricting position, it is supported by the fixing part, thereby preventing the clamping part from rotating from the clamping position to the release position about the first rotation axis, and when the restricting part is in the rotation allowing position, it is spaced apart from the fixing part, thereby allowing the clamping part to rotate from the clamping position to the release position about the first rotation axis.

Description

Technical Field

[0001] The present invention relates to a substrate clamping device for clamping a substrate. Background Art

[0002] Generally, display devices, solar cells, semiconductor elements, etc. are manufactured by performing various processing steps on a substrate. For example, display devices such as organic light emitting diodes (OLEDs), liquid crystal displays (LCDs), plasma display panels (PDPs), and electrophoretic displays (EPDs) are manufactured by performing processing steps such as evaporation processes, lithography processes, and etching processes on a substrate formed of silicon, glass, etc. Among these processing steps, there are processing steps performed in a state where the substrate is fixed to a transfer frame. At this time, a substrate clamping device is coupled to the transfer frame and is responsible for fixing the substrate to the transfer frame.

[0003] Figure 1 It is a side view conceptual diagram of an existing substrate clamping device.

[0004] Refer to Figure 1 , an existing substrate clamping device 10 includes: a fixing part 11, which is coupled to a transfer frame 20; and a clamping part 12, which is used for clamping a substrate 100.

[0005] The clamping part 12 is coupled to the fixing part 11 in such a way that it can rotate around an independent rotation axis 12a. The lower part of the clamping part 12 includes a first lower side member 121 protruding in a first direction and a second lower side member 122 protruding in a second direction opposite to the first direction.

[0006] When the first lower side member 121 is pushed by a pusher (not shown) and rises, as shown by the dashed line in Figure 1 , the clamping part 12 can rotate in a release direction with reference to the independent rotation axis 12a. In this state, an unloading process of separating the substrate 100 from the transfer frame 20 and a loading process of placing the substrate 100 onto the transfer frame 20 can be performed.

[0007] When the pressure of the pusher on the first lower side member 121 is released, as in Figure 1As shown by the solid line in the figure, the clamping part 12 can rotate in the clamping direction opposite to the releasing direction with the independent rotating shaft 12a as the reference. Therefore, the clamping part 12 can press and clamp the substrate 100, so as to fix the substrate 100 to the conveying frame 20. At this time, due to the magnetic force acting between the second lower member 122 and the fixing part 11, the clamping part 12 can rotate in the clamping direction to clamp the substrate 100 and maintain the state of clamping the substrate 100.

[0008] In this way, in the state where the clamping part 12 clamps and fixes the substrate 100 to the conveying frame 20, the conveying frame 20 moves between multiple process spaces. At this time, as the substrate 100 becomes larger and its weight increases, the pressure exerted by the substrate 100 on the clamping part 12 when the conveying frame 20 moves and stops also increases. Therefore, the existing substrate clamping device 10 has the following problems.

[0009] First, in the existing substrate clamping device 10, when the movement and stop of the conveying frame 20 cause the substrate 100 to press on the clamping part 12, the clamping part 12 is pushed by the substrate 100 and rotates in the releasing direction, resulting in the release of the fixation of the substrate 100. Therefore, the existing substrate clamping device 10 has a risk of damaging or even breaking the substrate 100 due to the release of the fixation of the substrate 100.

[0010] Second, in the existing substrate clamping device 10, after the clamping part 12 is pushed by the substrate 100 and rotates in the releasing direction, due to the magnetic force acting between the second lower member 122 and the fixing part 11, the clamping part 12 will rotate back in the clamping direction. At this time, since the first lower member 121 is not in a state of being pressurized by the pusher, the clamping part 12 will rotate rapidly in the clamping direction. Therefore, the clamping part 12 will generate a relatively large impact on the substrate 100. Therefore, the existing substrate clamping device 10 has a high risk of damaging or even breaking the substrate 100 due to the impact exerted by the clamping part 12 on the substrate 100.

[0011] Third, a solution has been proposed to increase the magnetic force acting between the second lower member 122 and the fixing part 11 to prevent the clamping part 12 from rotating in the releasing direction due to being pushed by the substrate 100. However, this solution will increase the pressure exerted by the clamping part 12 on the substrate 100 in order to clamp the substrate 100. Therefore, there is a risk of damaging or even breaking the substrate 100 due to the increased pressure. Summary of the Invention

[0012] Technical Problem

[0013] The present invention aims to solve the above problems, and its object is to provide a substrate clamping device that can reduce the risk of substrate damage or even breakage caused by arbitrary rotation of the clamping part.

[0014] Technical Solution

[0015] To solve the above technical problems, the present invention may include the following features.

[0016] The substrate clamping device of the present invention may include: a fixing part, which is coupled to a conveying frame for conveying a substrate; a clamping part, which is coupled to the fixing part in a manner that can rotate around a first rotation axis, so as to rotate around the first rotation axis between a clamping position for fixing the substrate to the conveying frame and a release position separated from the clamping position; and a restricting part, which is coupled to the clamping part in a manner that can rotate around a second rotation axis separated from the first rotation axis, so as to rotate around the second rotation axis between a rotation restricting position supported by the fixing part and a rotation allowing position separated from the fixing part. When the restricting part is located at the rotation restricting position, it is supported by the fixing part, thereby preventing the clamping part from rotating from the clamping position to the release position around the first rotation axis. When located at the rotation allowing position, it is separated from the fixing part, thereby allowing the clamping part to rotate from the clamping position to the release position around the first rotation axis.

[0017] Advantageous Effects

[0018] According to the present invention, the following effects can be achieved.

[0019] The present invention can use a double rotation axis to prevent the clamping part from rotating under the pressure applied by the substrate or the like. Therefore, the present invention can reduce the risk of substrate damage or even breakage caused by arbitrary rotation of the clamping part during the movement and stop of the conveying frame.

[0020] The present invention can use a double rotation axis to prevent the clamping part from rotating arbitrarily. Therefore, it can prevent the clamping part from impacting the substrate during the process of rotating back to the original position after arbitrary rotation. Therefore, the present invention can reduce the risk of substrate damage or even breakage, and can stably convey the substrate in a state fixed to the conveying frame. Description of the Drawings

[0021] Figure 1 is a side view conceptual diagram of an existing substrate clamping device.

[0022] Figure 2 and Figure 3 is a schematic side view of the substrate clamping device of the present invention.

[0023] Figure 4 is a schematic exploded perspective view of the substrate clamping device of the present invention.

[0024] Figures 5 to 8 is a conceptual side view for explaining a restricting portion that rotates between a rotation restricting position and a rotation allowing position.

[0025] Figures 9 to 12 is a conceptual side view for explaining an embodiment of a magnetic force portion.

[0026] Reference numerals

[0027] 1: Substrate clamping device 2: Fixed portion

[0028] 3: Clamping portion 4: Restricting portion

[0029] 5: Magnetic force portion 21: Fixed protrusion

[0030] 3a: First rotation axis 31: Clamping main body

[0031] 31a: Support surface 311: Clamping member

[0032] 32: Support plate 33: Support member

[0033] 4a: Second rotation axis 41: Restricting member

[0034] 42: Restricting protrusion 43: Protruding member

[0035] 44: Pressing member 45: Restricting magnet

[0036] 51: First magnet 52: Second magnet

[0037] 100: Substrate 200: Conveyor frame

[0038] 210: Through hole 300: Pusher Detailed description of the preferred embodiment

[0039] Hereinafter, an embodiment of the substrate clamping device of the present invention will be described in detail with reference to the accompanying drawings. In Figures 5 to 11 , in order to show the assembly relationship between the fixed portion and the restricting portion, the clamping main body is shown by a dotted line. In Figures 5 to 7 , in order to show the assembly relationship between the fixed protrusion and the restricting protrusion, the support plate is shown by a dotted line. In Figures 9 to 12 , in order to show the positional relationship of the magnetic force portion, hatching is marked on the magnetic force portion. In Figure 11 , in order to show the positional relationship of the restricting magnet, hatching is marked on the restricting magnet.

[0040] Refer to Figure 2 and Figure 3, the substrate clamping device 1 of the present invention is used to fix the substrate 100 to the conveying frame 200. The substrate 100 is used to manufacture display devices, solar cells, semiconductor components, etc. For example, the substrate 100 can be a glass substrate, a silicon substrate, etc. The conveying frame 200 is used to support the substrate 100. In a state where the substrate 100 is fixed to the conveying frame 200, a processing operation can be performed on the substrate 100. At this time, the substrate clamping device 1 of the present invention is coupled to the conveying frame 200 and can be responsible for fixing the substrate 100 to the conveying frame 200.

[0041] For this reason, the substrate clamping device 1 of the present invention may include a fixing portion 2, a clamping portion 3, and a restricting portion 4.

[0042] Refer to Figures 2 to 4 , the fixing portion 2 is coupled to the conveying frame 200. The fixing portion 2 is fixedly coupled to the conveying frame 200 so as to be able to provide a supporting force for the clamping portion 3, the restricting portion 4, the substrate 100, etc. The fixing portion 2 may protrude in a first direction (FD arrow direction) toward a through hole 210 formed in the conveying frame 200. The substrate 100 may be located on the through hole 210. Although not shown, a plurality of substrate clamping devices 1 of the present invention may be coupled to the conveying frame 200. The plurality of substrate clamping devices 1 of the present invention may be spaced apart from each other to clamp different portions of the substrate 100.

[0043] Refer to Figures 2 to 4 , the clamping portion 3 is used to clamp the substrate 100. The clamping portion 3 may be coupled to the fixing portion 2 in such a way that it can rotate about a first rotation axis 3a. The clamping portion 3 can rotate about the first rotation axis 3a between a clamping position and a release position. As Figure 3 shown, when the clamping portion 3 is in the release position, the clamping portion 3 cannot clamp the substrate 100. In this state, an unloading operation of separating the substrate 100 from the conveying frame 200 and a loading operation of placing the substrate 100 onto the conveying frame 200 can be performed. As Figure 2 shown, when the clamping portion 3 is in the clamping position, the clamping portion 3 can clamp the substrate 100. In a state where the substrate 100 is placed on the conveying frame 200, the clamping portion 3 is in the clamping position, so that the substrate 100 can be fixed to the conveying frame 200. At this time, the clamping portion 3 may contact a part of the side surface and a part of the upper surface of the substrate 100. The lower surface of the substrate 100 may be supported by a support (not shown) of the conveying frame 200.

[0044] The clamping part 3 can rotate around the first rotation axis 3a from the clamping position towards the release direction (the direction of the RD arrow), so as to be located at the release position. Figure 2 and Figure 3 In, the release direction (the direction of the RD arrow) is the counterclockwise direction centered on the first rotation axis 3a. The clamping part 3 can rotate around the first rotation axis 3a from the release position towards the clamping direction (the direction of the CD arrow), so as to be located at the clamping position. Figure 2 and Figure 3 In, the clamping direction (the direction of the CD arrow) is the clockwise direction centered on the first rotation axis 3a.

[0045] The clamping part 3 may include a clamping main body 31.

[0046] The clamping main body 31 is coupled to the fixing part 2. The clamping main body 31 is coupled to the fixing part 2 in a manner that can rotate around the first rotation axis 3a. The clamping main body 31 may constitute the overall appearance of the clamping part 3. The clamping main body 31 may be a non-magnet.

[0047] The clamping main body 31 is coupled to the fixing part 2 in a manner that a part protrudes towards the upper side direction (the direction of the UD arrow) of the fixing part 2 based on the first rotation axis 3a and a part protrudes towards the lower side direction (the direction of the DD arrow) of the fixing part 2 based on the first rotation axis 3a. A clamping component 311 may be coupled to the upper part of the clamping main body 31. The clamping component 311 is in direct contact with the substrate 100 to clamp the substrate 100. The clamping component 311 may protrude from the clamping main body 31 towards the first direction (the direction of the FD arrow). A part of the clamping component 311 may protrude from the clamping main body 31 towards the upper side direction (the direction of the UD arrow). The lower part of the clamping main body 31 may be coupled to the restricting part 4.

[0048] The clamping part 3 may include a support plate 32.

[0049] The support plate 32 is coupled to the clamping main body 31. The support plate 32 and the clamping main body 31 are coupled in a manner that can rotate together around the first rotation axis 3a. The support plate 32 may be coupled to the clamping main body 31 between the first rotation axis 3a and the restricting part 4. At this time, the support plate 32 is located in the lower side direction (the direction of the DD arrow) with respect to the first rotation axis 3a and in the upper side direction (the direction of the UD arrow) with respect to the restricting part 4.

[0050] The support plate 32 can protrude from the clamping body 31. The support plate 32 protrudes from the clamping body 31 so that when the clamping portion 3 is in the clamping position, the support plate 32 can be supported by the fixing portion 2. Since the support plate 32 is supported by the fixing portion 2, it cannot further rotate toward the fixing portion 2 with the first rotation axis 3a as the center. Therefore, the clamping portion 3 cannot further rotate toward the clamping direction (the direction of the CD arrow) with the first rotation axis 3a as the center. In this way, the support plate 32 can be supported by the fixing portion 2 to limit the rotatable angle of the clamping portion 3 with the first rotation axis 3a as the center toward the clamping direction (the direction of the CD arrow). Therefore, the support plate 32 can prevent the clamping portion 3 from rotating excessively toward the clamping direction (the direction of the CD arrow), thereby preventing damage or even breakage of the substrate 100.

[0051] The support plate 32 can protrude from the clamping body 31 toward the second direction (the direction of the SD arrow). The second direction (the direction of the SD arrow) is opposite to the first direction (the direction of the FD arrow). When the clamping portion 3 is in the clamping position, the support plate 32 is located on the lower side direction (the direction of the DD arrow) side with respect to the fixing portion 2, so that it can be supported by the fixing portion 2.

[0052] Refer to Figures 2 to 4 , the restricting portion 4 is coupled to the clamping portion 3. Since the restricting portion 4 is coupled to the clamping portion 3, when the clamping portion 3 rotates with the first rotation axis 3a as the center, the restricting portion 4 also rotates with the clamping portion 3 with the first rotation axis 3a as the center. The restricting portion 4 is coupled to the clamping portion 3 in such a way that it can rotate about the second rotation axis 4a. The second rotation axis 4a can be disposed at a position spaced apart from the first rotation axis 3a. Therefore, the restricting portion 4 rotates with the clamping portion 3 about the first rotation axis 3a and independently rotates with respect to the clamping portion 3 about the second rotation axis 4a. That is, the restricting portion 4 can rotate about the second rotation axis 4a without being affected by the clamping portion 3.

[0053] The restricting portion 4 can rotate between a rotation restricting position and a rotation allowing position about the second rotation axis 4a.

[0054] As Figure 5As shown, when the clamping part 3 is in the clamping position and the restricting part 4 is in the rotation restricting position, the restricting part 4 can be supported by the fixing part 2. At this time, the fixing part 2 supports the restricting part 4, so that the restricting part 4 can be prevented from rotating around the first rotation axis 3a along the releasing direction (the direction of the RD arrow). Therefore, the restricting part 4 is supported by the fixing part 2, so that the clamping part 3 can be prevented from rotating from the clamping position to the releasing position around the first rotation axis 3a. That is, the clamping part 3 can be prevented from rotating around the first rotation axis 3a toward the releasing direction (the direction of the RD arrow). Therefore, the substrate clamping device 1 of the present invention can achieve the following effects.

[0055] First, according to the substrate clamping device 1 of the present invention, when the clamping part 3 clamps the substrate 100 at the clamping position, the supporting force received by the restricting part 4 supported by the fixing part 2 can be used to firmly support the clamping part 3 at the clamping position, so as to prevent the clamping part 3 from rotating around the first rotation axis 3a toward the releasing direction (the direction of the RD arrow). Therefore, even if the movement and stop of the conveying frame 200 press the substrate 100 against the clamping part 3, since the clamping part 3 is prevented from being pushed by the substrate 100 and rotating toward the releasing direction (the direction of the RD arrow), the state of clamping the substrate 100 can be firmly maintained. Therefore, the substrate clamping device 1 of the present invention can reduce the risk of damage or even breakage of the substrate 100 caused by arbitrary rotation of the clamping part 3 during the movement and stop of the conveying frame 200.

[0056] Second, according to the substrate clamping device 1 of the present invention, the supporting force received by the restricting part 4 supported by the fixing part 2 can be used to prevent the clamping part 3 at the clamping position from rotating toward the releasing direction (the direction of the RD arrow). Therefore, it is possible to prevent the existing clamping part 12 (shown in Figure 1 ) from impacting the substrate 100 during the process of returning to the original position after being pushed by the substrate 100 and rotating. Therefore, the substrate clamping device 1 of the present invention can reduce the risk of damage or even breakage of the substrate 100, and can stably convey the substrate 100 in a state fixed to the conveying frame 200.

[0057] Thirdly, the substrate clamping device 1 of the present invention can use the supporting force received by the limiting part 4 supported by the fixing part 2 to prevent the clamping part 3 located at the clamping position from rotating towards the releasing direction (the direction of the RD arrow). Therefore, there is no need to increase magnetism or the like to hold the clamping part 3 at the clamping position. Additionally, in the state where the clamping part 3 is located at the clamping position, the limiting part 4 cannot rotate further towards the clamping direction (the direction of the RD arrow) with the first rotation axis 3a as the center because it is supported by the fixing part 2. Therefore, it is possible to prevent the clamping part 3 from rotating further towards the clamping direction (the direction of the RD arrow) with the first rotation axis 3a as the center from the clamping position. Thus, the substrate clamping device 1 of the present invention can prevent the clamping part 3 located at the clamping position from applying excessive pressure to the substrate 100, and can further reduce the risk of damage or even breakage of the substrate 100.

[0058] As Figure 6 shown, in the state where the clamping part 3 is located at the clamping position, when the limiting part 4 is located at the rotation allowing position, the limiting part 4 can be separated from the fixing part 2. At this time, the pusher 300 rises and presses the limiting part 4 located at the rotation restricting position. Therefore, the limiting part 4 can rotate towards the allowing direction (the direction of the AD arrow) with the second rotation axis 4a as the center, and thus be located at the rotation allowing position. When the limiting part 4 is located at the rotation allowing position and is separated from the fixing part 2, it is possible to allow the clamping part 3 to rotate from the clamping position to the releasing position with the first rotation axis 3a as the center. Therefore, when the pusher 300 rises further and presses the limiting part 4 located at the rotation allowing position further, the limiting part 4 and the clamping part 3 can rotate towards the releasing direction with the first rotation axis 3a as the center. At this time, the limiting part 4 is pressed by the pusher 300 to press the supporting surface 31a of the clamping body 31, and presses the clamping body 31 through the supporting surface 31a, so that the clamping part 3 can rotate along the releasing direction with the first rotation axis 3a as the center. Therefore, the clamping part 3 can use the pressure applied by the pusher 300 to the limiting part 4 to rotate along the releasing direction with the first rotation axis 3a as the center, and thus be located at the releasing position. The supporting surface 31a is the surface of the clamping body 31 facing the limiting part 4. A slot for inserting the limiting part 4 is formed in the lower part of the clamping body 31, and the supporting surface 31a can be arranged in the slot in a manner facing the limiting part 4.

[0059] In this way, the substrate clamping device 1 of the present invention can not only prevent the clamping portion 3 from rotating from the clamping position to the release position under the pressure applied by the substrate 100 or the like by using the double rotating shafts composed of the first rotating shaft 3a and the second rotating shaft 4a, but also enable the clamping portion 3 to smoothly rotate from the clamping position to the release position under the pressure applied by the pusher 300.

[0060] The restricting portion 4 may include a restricting member 41.

[0061] The restricting member 41 is coupled to the clamping body 31 in a manner capable of rotating about the second rotating shaft 4a. The second rotating shaft 4a may be located below the first rotating shaft 3a. Therefore, the restricting member 41 may be coupled to the clamping body 31 below the first rotating shaft 3a in a manner capable of rotating about the second rotating shaft 4a. At this time, the second rotating shaft 4a may be spaced apart from the first rotating shaft 3a in the downward direction (DD arrow direction) of the first rotating shaft 3a. The second rotating shaft 4a may be vertically below the first rotating shaft 3a.

[0062] The restricting member 41 can rotate between the rotation restricting position and the rotation allowing position about the second rotating shaft 4a. The restricting member 41 can rotate about the second rotating shaft 4a along the allowing direction (AD arrow direction) from the rotation restricting position to be located at the rotation allowing position. At this time, the restricting member 41 can be rotated along the allowing direction (AD arrow direction) by the pressure provided by the pusher 300. The restricting member 41 can rotate about the second rotating shaft 4a along the restricting direction (LD arrow direction) from the rotation allowing position to be located at the rotation restricting position. The restricting direction (LD arrow direction) and the allowing direction (AD arrow direction) are rotation directions opposite to each other about the second rotating shaft 4a.

[0063] The restricting portion 4 may include a restricting protrusion 42.

[0064] The limiting protrusion 42 protrudes from the limiting member 41. The limiting protrusion 42 is coupled to the limiting member 41 so as to protrude upward from the limiting member 41. At this time, the limiting protrusion 42 may protrude upward from the upper surface of the limiting member 41 in the upper side direction (UD arrow direction). When the limiting portion 4 includes the limiting protrusion 42, the fixing portion 2 may include a fixing protrusion 21. The fixing protrusion 21 may protrude downward toward the limiting portion 4. When the limiting portion 4 is in the rotation limiting position, the fixing protrusion 21 can support the limiting protrusion 42 to prevent the limiting member 41 from rotating about the first rotation axis 3a along the release direction (RD arrow direction). Thereby, the fixing protrusion 21 can prevent the clamping body 31 from rotating about the first rotation axis 3a along the release direction (RD arrow direction), so that the clamping portion 3 remains in the clamped position. The fixing protrusion 21 may protrude toward the limiting member 41 between the limiting protrusion 42 of the limiting portion 4 in the rotation limiting position and the first rotation axis 3a. At this time, when the limiting portion 4 is in the rotation limiting position, the limiting protrusion 42 may be located on the second direction (SD arrow direction) side with respect to the fixing protrusion 21. Therefore, the fixing protrusion 21 can support the limiting protrusion 42 to prevent the limiting protrusion 42 from moving toward the first direction (FD arrow direction), thereby preventing the limiting portion 4 from rotating about the first rotation axis 3a along the release direction (RD arrow direction). The fixing protrusion 21 may be coupled to the fixing portion 2 so as to protrude downward from the lower surface of the fixing portion 2 in the lower side direction (DD arrow direction). The fixing portion 2 and the fixing protrusion 21 may be formed integrally. On the other hand, the limiting protrusion 42 and the limiting member 41 may be formed integrally.

[0065] The limiting portion 4 may include a protruding member 43.

[0066] The protruding member 43 protrudes from the restricting member 41. The protruding member 43 can protrude from the restricting member 41 toward the first direction (the direction of the FD arrow). At this time, the portion of the restricting portion 4 on the first direction (the direction of the FD arrow) side with respect to the second rotation axis 4a can have an increased weight due to the protruding member 43. Therefore, the protruding member 43 can cause the restricting portion 4 to rotate about the second rotation axis 4a to the rotation restricting position by its own weight. Therefore, when the pusher 300 does not press the restricting portion 4, the restricting portion 4 can rotate about the second rotation axis 4a along the restricting direction (the direction of the LD arrow) by the own weight of the protruding member 43, and thus be located at the rotation restricting position. The pusher 300 can press the protruding member 43 to cause the restricting portion 4 to rotate along the allowing direction (the direction of the AD arrow), and can release the pressure on the protruding member 43 to cause the restricting portion 4 to rotate along the restricting direction (the direction of the LD arrow). A specific description thereof is as follows.

[0067] First, as Figure 5 shown, in a state where the restricting portion 4 is located at the rotation restricting position, as Figure 6 shown, when the pusher 300 moves upward (the direction of the UD arrow) and presses the protruding member 43 to move it upward (the direction of the UD arrow), the restricting portion 4 can rotate about the second rotation axis 4a along the allowing direction (the direction of the AD arrow). When the restricting portion 4 is located at the rotation restricting position, the restricting portion 4 can be disposed at a position spaced apart from the support surface 31a in the downward direction (the direction of the DD arrow). Therefore, when the restricting portion 4 rotates along the allowing direction (the direction of the AD arrow) from the rotation restricting position, the clamping body 31 may not rotate.

[0068] Then, when the restricting portion 4 rotates about the second rotation axis 4a toward the allowing direction (the direction of the AD arrow) and contacts the support surface 31a, the restricting portion 4 cannot rotate further about the second rotation axis 4a toward the allowing direction (the direction of the AD arrow) because it is supported by the support surface 31a.

[0069] Then, after the restricting portion 4 comes into contact with the support surface 31a, when the pusher 300 further presses the protruding member 43 to move it further in the upward direction (UD arrow direction), the restricting portion 4 can press the support surface 31a in the upward direction (UD arrow direction) and rotate together with the support surface 31a about the first rotation axis 3a along the release direction (RD arrow direction). At this time, since the support surface 31a is the surface of the clamping body 31, the restricting portion 4 can rotate together with the clamping body 31 about the first rotation axis 3a along the release direction (RD arrow direction). Therefore, the clamping portion 3 can be located at the release position.

[0070] Then, when the pusher 300 moves in the downward direction (DD arrow direction) and releases the pressure on the protruding member 43, the restricting portion 4 and the clamping portion 3 can rotate about the first rotation axis 3a in the clamping direction by the weight of the protruding member 43 and thus be located at the clamping position. When the clamping portion 3 is located at the clamping position, the support plate 32 is supported by the fixing portion 2, thereby preventing the clamping body 31 from further rotating in the clamping direction. After the clamping portion 3 is located at the clamping position, when the pusher 300 further moves in the downward direction (DD arrow direction), the restricting portion 4 can rotate about the second rotation axis 4a along the restricting direction (LD arrow direction) from the rotation-permitted position and thus be located at the rotation-restricted position.

[0071] Refer to Figure 8 , the restricting portion 4 may include a pressing member 44.

[0072] The pressing member 44 is configured to press the support surface 31a. When the restricting portion 4 is located at the rotation-restricted position, the pressing member 44 may be disposed at a position spaced apart from the support surface 31a. At this time, the pressing member 44 may be spaced apart from the support surface 31a in the downward direction (DD arrow direction). When the restricting portion 4 is located at the rotation-permitted position, the pressing member 44 may be in contact with the support surface 31a. At this time, when the protruding member 43 is pressed by the pusher 300 such that the restricting portion 4 rotates about the second rotation axis 4a along the permitted direction (AD arrow direction), the pressing member 44 may be in contact with the support surface 31a. After that, when the protruding member 43 is further pressed by the pusher 300, the pressing member 44 can press the support surface 31a, thereby causing the clamping body 31 to rotate about the first rotation axis 3a along the release direction (RD arrow direction).

[0073] The pressing member 44 can be coupled to the restricting member 41. The pressing member 44 can be coupled to the restricting member 41 in such a manner as to protrude from the restricting member 41 toward the support surface 31a. Thus, when the protruding member 43 is pressed by the pusher 300 so that the pressing member 44 contacts the support surface 31a, the pressing member 44 can separate the restricting member 41 from the support surface 31a. Accordingly, the substrate clamping device 1 of the present invention can use the pressing member 44 to prevent the restricting member 41 from directly contacting the support surface 31a, thereby preventing the restricting member 41 from being worn or even damaged due to friction or the like. The pressing member 44 can be detachably coupled to the restricting member 41. Thus, when the restricting portion 4 is worn or the like due to repeated contact with the support surface 31a, the substrate clamping device 1 of the present invention can only replace, repair, etc. the pressing member 44. The pressing member 44 can also be rotatably coupled to the restricting member 41. At this time, the surface of the pressing member 44 that contacts the support plate 32 can be a curved surface.

[0074] On the other hand, the substrate clamping device 1 of the present invention can prevent the support plate 32 from being worn or even damaged due to friction or the like due to repeated contact with the fixing portion 2. For this purpose, the substrate clamping device 1 of the present invention may include a support member 33 (shown in Figure 8 ).

[0075] The support member 33 is coupled to the support plate 32. When the clamping portion 3 is in the clamping position, the support member 33 can contact the fixing portion 2. Thus, the support member 33 can be supported by the fixing portion 2 to prevent the clamping portion 3 in the clamping position from further rotating along the clamping direction about the first rotation axis 3a.

[0076] The support member 33 can be coupled to the support plate 32 in a manner that protrudes from the support plate 32 toward the fixing portion 2. Accordingly, when the support member 33 contacts the fixing portion 2 with the clamping portion 3 in the clamping position, the support member 33 can space the support plate 32 apart from the fixing portion 2. Thus, the substrate clamping device 1 of the present invention can prevent the support plate 32 from directly contacting the fixing portion 2 by using the support member 33, thereby preventing the support plate 32 from being worn or even damaged due to friction or the like. The support member 33 is detachably coupled to the support plate 32. Thus, when the clamping portion 3 is worn or the like due to repeated contact with the fixing portion 2, the substrate clamping device 1 of the present invention can only replace, repair, etc. the support member 33. The support member 33 can also be rotatably coupled to the support plate 32. At this time, the surface of the support member 33 that contacts the fixing portion 2 can be a curved surface. A plurality of the support members 33 can be coupled to the support plate 32. At this time, the plurality of support members 33, 33' can be coupled to the support plate 32 in a spaced-apart manner. The plurality of support members 33, 33' can contact different portions of the fixing portion 2.

[0077] On the other hand, although the above has described that the restricting portion 4 presses the support surface 31a of the clamping body 31 to rotate the clamping portion 3 in the release direction, the restricting portion 4 can also press the support plate 32 to rotate the clamping portion 3 in the release direction. Refer to Figure 7 A specific description thereof is as follows.

[0078] When the restricting portion 4 is pressed by the pusher 300 and is in the rotation-permitted position, the restricting portion 4 can contact the support plate 32. Thereafter, when the pusher 300 further rises and further presses the restricting portion 4 in the rotation-permitted position, the restricting portion 4 and the clamping portion 3 rotate in the release direction about the first rotation axis 3a. At this time, the restricting portion 4 is pressed by the pusher 300 to press the support plate 32, and the clamping body 31 is pressed through the support plate 32, thereby enabling the clamping portion 3 to rotate in the release direction about the first rotation axis 3a. At this time, the restricting portion 4 can press the support plate 32 in the upper side direction (UD arrow direction) and rotate along the release direction (RD arrow direction) about the first rotation axis 3a together with the support plate 32. Accordingly, the clamping portion 3 can use the pressure applied by the pusher 300 to the restricting portion 4 to rotate in the release direction about the first rotation axis 3a and thus be in the release position.

[0079] When the restricting portion 4 includes the pressing member 44, the pressing member 44 can press the support plate 32. When the restricting portion 4 is in the rotation restricting position, the pressing member 44 can be disposed at a position spaced apart from the support plate 32. At this time, the pressing member 44 can be spaced apart from the support plate 32 in the downward direction (in the direction of arrow DD). When the restricting portion 4 is in the rotation allowing position, the pressing member 44 can contact the support plate 32. At this time, when the protruding member 43 is pressed by the pusher 300 so that the restricting portion 4 rotates along the allowing direction (in the direction of arrow AD) about the second rotation axis 4a, the pressing member 44 can contact the support plate 32. After that, when the protruding member 43 is further pressed by the pusher 300, the pressing member 44 can press the support plate 32, so that the support plate 32 and the clamping body 31 rotate along the releasing direction (in the direction of arrow RD) about the first rotation axis 3a. The pressing member 44 is coupled to the restricting member 41 so as to protrude from the restricting member 41 toward the support plate 32. Therefore, when the protruding member 43 presses the pusher 300 so that the pressing member 44 contacts the support plate 32, the pressing member 44 can space the restricting member 41 apart from the support plate 32. Therefore, the substrate clamping device 1 of the present invention can use the pressing member 44 to prevent the restricting member 41 from directly contacting the support plate 32, thereby preventing the restricting member 41 from being worn or even damaged due to friction or the like.

[0080] Referring to Figures 2 to 12 , the substrate clamping device 1 of the present invention may include a magnetic force portion 5.

[0081] The magnetic force portion 5 is used to rotate the clamping portion 3 toward the clamping position by magnetic force. The magnetic force portion 5 can rotate the clamping portion 3 toward the clamping position by using at least one of attraction and repulsion. When the restricting portion 4 includes the protruding member 43, the clamping portion 3 can rotate toward the clamping position by using the magnetic force of the magnetic force portion 5 and the self-weight of the protruding member 43 at the same time.

[0082] Among them, the substrate clamping device 1 of the present invention includes various embodiments of the magnetic force portion 5. Hereinafter, multiple embodiments of the magnetic force portion 5 will be described in detail with reference to the drawings.

[0083] Referring to Figure 9 , the magnetic force portion 5 may include a first magnet 51 coupled to the fixed portion 2.

[0084] The first magnet 51 can use magnetic force to pull the support plate 32 toward the fixing portion 2, so that the clamping portion 3 rotates toward the clamping position. At this time, an attracting force may act between the first magnet 51 and the support plate 32. The support plate 32 may be a magnet. The first magnet 51 may be located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. At this time, the first magnet 51 can pull the portion of the support plate 32 located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a toward the fixing portion 2. Therefore, the support plate 32 and the clamping main body 31 can rotate about the first rotation axis 3a toward the clamping direction. The first magnet 51 is coupled to the fixing portion 2 in such a manner as to be located inside the fixing portion 2. The first magnet 51 can also be coupled to the fixing portion 2 in such a manner as to be located outside the fixing portion 2. The fixing portion 2 may be a non-magnet.

[0085] Referring to Figure 10 , the magnetic force portion 5 may also include a first magnet 51 coupled to the support plate 32.

[0086] The first magnet 51 can move toward the fixing portion 2 by using magnetic force, so that the support plate 32 faces the fixing portion 2. Therefore, the first magnet 51 can cause the clamping portion 3 to rotate toward the clamping position. At this time, an attracting force may act between the first magnet 51 and the fixing portion 2. The fixing portion 2 may be a magnet. The first magnet 51 may be located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. At this time, the first magnet 51 can move toward the portion of the fixing portion 2 located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. Therefore, the support plate 32 can rotate about the first rotation axis 3a toward the clamping direction together with the clamping main body 31. The first magnet 51 is coupled to the support plate 32 in such a manner as to be located inside the support plate 32. The first magnet 51 can also be coupled to the support plate 32 in such a manner as to be located outside the support plate 32. The support plate 32 may be a non-magnet.

[0087] Referring to Figure 11 , the magnetic force portion 5 may also include a first magnet 51 and a second magnet 52.

[0088] The first magnet 51 may be coupled to the fixing portion 2. The first magnet 51 can use magnetic force to pull the second magnet 52 toward the fixing portion 2.

[0089] The second magnet 52 may be coupled to the support plate 32. The second magnet 52 can move toward the first magnet 51 by using magnetic force, so that the support plate 32 moves toward the fixing portion 2.

[0090] A gravitational force may act between the second magnet 52 and the first magnet 51. The gravitational force acting between the second magnet 52 and the first magnet 51 can cause the support plate 32 to move toward the fixing portion 2, thereby causing the clamping portion 3 to rotate toward the clamping position. The support plate 32 and the fixing portion 2 may be non-magnets respectively.

[0091] The second magnet 52 and the first magnet 51 may be located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. At this time, the second magnet 52 may be coupled to a portion of the support plate 32 that is located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. The second magnet 52 is coupled to the support plate 32 in such a manner as to be located inside or outside the support plate 32. The first magnet 51 may be coupled to a portion of the fixing portion 2 that is located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. The first magnet 51 is coupled to the fixing portion 2 in such a manner as to be located inside or outside the fixing portion 2.

[0092] Referring to Figure 12 , the magnetic force portion 5 may also include a first magnet 51 and a second magnet 52.

[0093] The first magnet 51 may be coupled to the fixing portion 2. The first magnet 51 can use magnetic force to push away the second magnet 52. The first magnet 51 may be coupled to the fixing portion 2 in a manner that protrudes upward (UD arrow direction) from the fixing portion 2. The first magnet 51 may be fixedly coupled to the fixing portion 2.

[0094] The second magnet 52 may be coupled to the clamping body 31. The second magnet 52 can use magnetic force to push away the first magnet 51. The second magnet 52 may be coupled to the clamping body 31 in a manner that faces the first magnet 51. The second magnet 52 is fixedly coupled to the clamping body 31 in such a manner as to rotate about the first rotation axis 3a together with the clamping body 31.

[0095] The second magnet 52 and the first magnet 5 may have a repulsive force therebetween. The repulsive force acting between the second magnet 52 and the first magnet 51 can cause the clamping body 31 to rotate toward the clamping position. This is because the fixing portion 2 combined with the first magnet 51 is fixed to the conveying frame 200, and the clamping body 31 combined with the second magnet 52 can rotate about the first rotation axis 3a. Therefore, the repulsive force acting between the second magnet 52 and the first magnet 51 acts in a direction to push the second magnet 52 away with respect to the first magnet 51 as a reference. The clamping body 31 and the fixing portion 2 may be non-magnets respectively.

[0096] The second magnet 52 and the first magnet 51 may be located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. At this time, the second magnet 52 is combined with the clamping body 31 in such a manner as to be located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. The first magnet 51 is combined with the fixing portion 2 in such a manner as to be located on the second direction (SD arrow direction) side with respect to the first rotation axis 3a. At this time, the first magnet 51 may be located on the second direction (SD arrow direction) side with respect to the second magnet 52. The second magnet 52 and the first magnet 51 may be located on the upper side direction (UD arrow direction) side with respect to the first rotation axis 3a.

[0097] Referring to Figures 9 to 12 , the substrate clamping device 1 of the present invention can use magnetic force to cause the restricting portion 4 to rotate toward the rotation restricting position.

[0098] As Figure 9 shown, the restricting portion 4 can rotate toward the rotation restricting position based on the first magnet 51 combined with the fixing portion 2. At this time, the restricting portion 4 may be a magnet. Therefore, due to the gravitational force acting between the first magnet 51 and the restricting portion 4, the restricting portion 4 can rotate toward the rotation restricting position.

[0099] As Figure 10 shown, the restricting portion 4 can also rotate toward the rotation restricting position based on the first magnet 51 combined with the support plate 32. At this time, the restricting portion 4 may be a magnet. Therefore, due to the gravitational force acting between the first magnet 51 and the restricting portion 4, the restricting portion 4 can rotate toward the rotation restricting position.

[0100] As Figure 11As shown, the restricting portion 4 can also rotate towards the rotation restricting position based on a second magnet 52 coupled to the support plate 32. At this time, the restricting portion 4 can be a magnet. Thus, under the gravitational force acting between the second magnet 52 and the restricting portion 4, the restricting portion 4 can rotate towards the rotation restricting position.

[0101] As Figures 9 to 11 shown, when the restricting portion 4 rotates towards the rotation restricting position based on the first magnet 51 or the second magnet 52, the entire restricting portion 4 can be a magnet, or only the portion of the restricting member 41 on the second direction (SD arrow direction) side with respect to the second rotation axis 4a can be a magnet. The restricting protrusion 42 can be a magnet. When the restricting protrusion 42 is a magnet, the restricting member 41 can be a magnet or a non-magnet.

[0102] As Figure 11 shown, the restricting portion 4 can include a restricting magnet 45. The restricting magnet 45 can use magnetic force to rotate the restricting member 41 towards the rotation restricting position. At this time, it can be that the support plate 32 is a magnet, and the restricting member 41 rotates towards the rotation restricting position under the gravitational force acting between the restricting magnet 45 and the support plate 32. It can also be that the fixing portion 2 is a magnet, and the restricting member 41 rotates towards the rotation restricting position under the gravitational force acting between the restricting magnet 45 and the fixing portion 2. It can also be that the restricting member 41 rotates towards the rotation restricting position under the gravitational force acting between the restricting magnet 45 and the second magnet 52 coupled to the support plate 32. It can also be that the restricting member 41 rotates towards the rotation restricting position under the gravitational force acting between the restricting magnet 45 and the first magnet 51. At this time, the first magnet 51 can be coupled to the fixing portion 2 in the manner as Figure 9 shown, or can be coupled to the support plate 32 in the manner as Figure 10 shown.

[0103] The restricting magnet 45 can be located inside the restricting portion 4. The restricting magnet 45 can also be located outside the restricting portion 4. The restricting magnet 45 can also be coupled to at least one of the restricting member 41 and the restricting protrusion 42. When the restricting magnet 45 is coupled to the restricting member 41, the restricting magnet 45 is coupled to the restricting member 41 in a manner that is on the second direction (SD arrow direction) side with respect to the second rotation axis 4a. When the restricting magnet 45 is provided, the restricting member 41 and the restricting protrusion 42 can be non-magnets respectively.

[0104] The present invention described above is not limited to the above embodiments and the accompanying drawings, and those skilled in the art will understand that various substitutions, modifications, and changes can be made without departing from the technical idea of the present invention.

Claims

1. A substrate clamping device, characterized in that, Comprising: A fixing part, which is coupled to a conveying frame for conveying a substrate; A clamping part, which is coupled to the fixing part in a manner capable of rotating about a first rotation axis, and rotates about the first rotation axis between a clamping position for fixing the substrate to the conveying frame and a release position spaced apart from the clamping position; And A restricting part, which is coupled to the clamping part in a manner capable of rotating about a second rotation axis spaced apart from the first rotation axis, and rotates about the second rotation axis between a rotation restricting position supported by the fixing part and a rotation allowing position spaced apart from the fixing part, When the restricting part is located at the rotation restricting position, it is supported by the fixing part to prevent the clamping part from rotating from the clamping position to the release position about the first rotation axis, and when the restricting part is located at the rotation allowing position, it is spaced apart from the fixing part to allow the clamping part to rotate from the clamping position to the release position about the first rotation axis, The clamping part includes a clamping main body, and the clamping main body is coupled to the fixing part in a manner capable of rotating about the first rotation axis, The restricting part includes a restricting member, and the restricting member is coupled to the clamping main body in a manner capable of rotating about the second rotation axis.

2. The substrate clamping device according to claim 1, wherein The clamping part includes a support plate, and the support plate is coupled to the clamping main body between the first rotation axis and the restricting part, The support plate protrudes from the clamping main body so as to be supported by the fixing part when the clamping part is located at the clamping position, and restricts the angle by which the clamping part can rotate along the clamping direction about the first rotation axis by being supported by the fixing part, wherein the clamping direction is the direction of rotation from the release position to the clamping position.

3. The substrate clamping device according to claim 2, wherein A support member is coupled to the support plate, and when the clamping part is located at the clamping position, the support member contacts the fixing part, The support member is coupled to the support plate so as to protrude from the support plate toward the fixing part when the clamping part is located at the clamping position, thereby spacing the support plate apart from the fixing part.

4. The substrate clamping device according to claim 1, wherein The restricting part includes a restricting protrusion protruding upward from the restricting member, The fixing part includes a fixing protrusion, and the fixing protrusion protrudes downward toward the restricting part, When the restricting part is located at the rotation restricting position, the fixing protrusion supports the restricting protrusion to prevent the clamping main body from rotating along the release direction about the first rotation axis, wherein the release direction is the direction of rotation from the clamping position to the release position.

5. The substrate clamping device according to claim 4, wherein The fixing protrusion protrudes toward the restricting member between the restricting protrusion of the restricting part located at the rotation restricting position and the first rotation axis.

6. The substrate clamping device according to claim 1, wherein the restricting portion includes a protruding member that causes the restricting portion to rotate about the second rotation axis toward the rotation restricting position by its own weight, wherein the protruding member protrudes from the restricting member.

7. The substrate clamping device according to claim 1, wherein the restricting portion is coupled to the clamping body below the first rotation axis so as to be rotatable about the second rotation axis, and after being pressed by a pusher and rotating along the allowable direction to contact the support surface of the clamping body, it is further pressed by the pusher and rotates about the first rotation axis together with the clamping body along the release direction, where the allowable direction is the direction of rotation from the rotation restricting position to the rotation allowable position, and the release direction is the direction of rotation from the clamping position to the release position.

8. The substrate clamping device according to claim 7, wherein the restricting portion includes: a protruding member that protrudes from the restricting member; and a pressing member coupled to the restricting member, which is located at a position spaced apart from the support surface at the rotation restricting position, and contacts and presses the support surface as the protruding member is pressed by the pusher.

9. The substrate clamping device according to claim 8, wherein the pressing member is coupled to the restricting member so as to protrude from the restricting member toward the support surface, and when it contacts the support surface as the protruding member is pressed by the pusher, it spaces the restricting member apart from the support surface.

10. The substrate clamping device according to claim 1, wherein the clamping portion includes a support plate, and the support plate is coupled to the clamping body between the first rotation axis and the restricting portion, the restricting portion is coupled to the clamping body below the first rotation axis so as to be rotatable about the second rotation axis, and after being pressed by a pusher and rotating toward the allowable direction to contact the support plate, it is further pressed by the pusher and rotates about the first rotation axis together with the clamping body along the release direction, where the allowable direction is the direction of rotation from the rotation restricting position to the rotation allowable position, and the release direction is the direction of rotation from the clamping position to the release position.

11. The substrate clamping device according to claim 1, wherein it includes a magnetic force portion that causes the clamping portion to rotate toward the clamping position by magnetic force, the magnetic force portion includes a first magnet coupled to the fixing portion, the clamping portion includes a support plate that protrudes from the clamping body and is supported by the fixing portion when the clamping portion is at the clamping position, the support plate is a magnet, and an attractive force acts between the first magnet and the support plate to cause the clamping portion to rotate toward the clamping position.

12. The substrate clamping device according to claim 1, wherein it includes a magnetic force portion that causes the clamping portion to rotate toward the clamping position by magnetic force, The clamping part includes a support plate which protrudes from the clamping body and is supported by the fixing part when the clamping part is in the clamping position. The magnetic force part includes a first magnet coupled to the support plate. The fixing part is a magnet. A gravitational force acts between the first magnet and the fixing part to cause the clamping part to rotate towards the clamping position.

13. The substrate clamping device according to claim 1, wherein it includes a magnetic force part which uses magnetic force to cause the clamping part to rotate towards the clamping position. The clamping part includes a support plate which protrudes from the clamping body and is supported by the fixing part when the clamping part is in the clamping position. The magnetic force part includes: a first magnet coupled to the fixing part; and a second magnet coupled to the support plate. A gravitational force acts between the first magnet and the second magnet to cause the clamping part to rotate towards the clamping position.

14. The substrate clamping device according to claim 1, wherein it includes a magnetic force part which uses magnetic force to cause the clamping part to rotate towards the clamping position. The magnetic force part includes: a first magnet coupled to the fixing part; and a second magnet coupled to the clamping body so as to face the first magnet. A repulsive force acts between the first magnet and the second magnet to cause the clamping part to rotate towards the clamping position.

15. The substrate clamping device according to any one of claims 11 to 13, wherein the restricting part is a magnet and rotates towards the rotation restricting position by magnetic force.

16. The substrate clamping device according to any one of claims 11 to 13, wherein the restricting part includes a restricting magnet which is coupled to the restricting member. The restricting magnet uses magnetic force to cause the restricting member to rotate towards the rotation restricting position.

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