3D Measurement Method, Device, Equipment and Computer Readable Storage Medium for Object Surfaces

Abstract

The present invention belongs to the technical field of optical measurement, and discloses a 3D measurement method, device, equipment and computer-readable storage medium for an object surface. The method includes: obtaining sampling parameter information, and determining current measurement parameters of the 3D measurement control device according to the sampling parameter information; measuring the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured; obtaining motion parameters of the moving stage; and determining 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters. By first obtaining the sampling information of the object to be measured, the relevant parameters of the spectral sensor are automatically set, and the object to be measured is measured with different measurement parameters, which avoids the situation that the spectral sensor cannot reach the ideal detection conditions when measuring special materials, improves the adaptability of 3D measurement, and is faster and more convenient than manual calibration.

Description

Technical Field

[0001] The present invention relates to the technical field of optical measurement, and particularly to a 3D measurement method, device, equipment and computer-readable storage medium for an object surface. Background Art

[0002] Currently, the main measurement system is mainly based on a spectral confocal sensor. Its optical composition is to disperse white light into spectra of different bands and arrange them axially to form a continuous spectrum. The axial spectral range corresponds to the measurement range. When a measurement plane appears within the axial spectral range, the spectrum of the measurement surface is in a focused state, and the rest are in a defocused state. The spectral signal corresponding to the band reflected from the object surface is filtered and processed by a spectrometer. The position information of the object surface is determined through the spectral signal obtained by the sensor. However, it generally uses fixed acquisition parameters, and when there are differences in different measured objects, the detection effect is not ideal.

[0003] The above content is only used to assist in understanding the technical solution of the present invention, and does not represent an admission that the above content is prior art. Summary of the Invention

[0004] The main purpose of the present invention is to provide a 3D measurement method, device, equipment and computer-readable storage medium for an object surface, aiming to solve the technical problem that the prior art cannot detect measured objects differentially.

[0005] To achieve the above purpose, the present invention provides a 3D measurement method for an object surface, and the method includes the following steps:

[0006] Obtain the sampling parameter information of the measured object, where the sampling parameter information includes the image information of the measured object and / or the optical data in the sampling environment where the measured object is located;

[0007] Determine the current measurement parameters of the 3D measurement control device according to the sampling parameter information;

[0008] Measure the surface of the measured object according to the current measurement parameters to obtain the spectral image data of the surface of the measured object;

[0009] Obtain the motion parameters of the moving stage;

[0010] Determine the 3D point cloud data of the surface of the measured object according to the spectral image data and the motion parameters.

[0011] Optionally, the determining the 3D point cloud data of the surface of the measured object according to the spectral image data and the motion parameters includes:

[0012] Generate the grayscale image data of the surface of the measured object according to the spectral image data;

[0013] Determine the reflected echo peak curve on the surface of the object to be measured based on the grayscale image data;

[0014] Determine the 3D point cloud data on the surface of the object to be measured based on the reflected echo peak curve and the motion parameters.

[0015] Optionally, the determining the current measurement parameters of the 3D measurement control device according to the sampling parameter information includes:

[0016] Determine the sampled image data on the surface of the object to be measured and the dark signal detected by the 3D measurement control device according to the sampling parameter information;

[0017] Perform fusion calibration on the 3D measurement control device according to the sampled image data to obtain calibration parameters;

[0018] Determine the denoising parameters of the 3D measurement control device according to the dark signal;

[0019] Determine the current measurement parameters according to the calibration parameters and the denoising parameters.

[0020] Optionally, the determining the denoising parameters according to the dark signal includes:

[0021] Obtain the resolution of the 3D measurement control device;

[0022] Determine the denoising parameters according to the resolution of the 3D measurement control device and the dark signal.

[0023] Optionally, before measuring the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured, it further includes:

[0024] When the object to be measured is on the moving stage, detect the spectral field of view information of the 3D measurement control device;

[0025] Determine the current position of the object to be measured according to the spectral field of view information;

[0026] When the surface of the object to be measured is not detected at the current position, control the moving stage to move until the surface of the object to be measured is detected.

[0027] Optionally, before measuring the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured, it further includes:

[0028] Obtain the material information of the object to be measured;

[0029] Set the exposure time of the 3D measurement control device according to the material information.

[0030] Performing measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured, including:

[0031] Performing measurement on the surface of the object to be measured according to the current measurement parameters and the exposure time to obtain spectral image data of the surface of the object to be measured.

[0032] Optionally, before performing measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured, further including:

[0033] Obtaining the range of the spectral confocal sensor;

[0034] Performing range peak calibration on the spectral confocal sensor according to the range to obtain a range calibration result;

[0035] When the range calibration result shows that the measured values are linearly distributed, performing the step of performing measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured.

[0036] In addition, to achieve the above object, the present invention further provides a 3D measurement device for the surface of an object, and the 3D measurement device for the surface of an object includes:

[0037] An acquisition module, configured to acquire sampling parameter information of the object to be measured, where the sampling parameter information includes image information of the object to be measured and / or optical data in the sampling environment where the object to be measured is located;

[0038] A processing module, configured to perform measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured;

[0039] Wherein, the processing module is further configured to perform measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured;

[0040] The acquisition module is further configured to acquire motion parameters of the moving stage;

[0041] The processing module is further configured to determine 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters.

[0042] In addition, to achieve the above object, the present invention further provides a 3D measurement device for an object surface, where the 3D measurement device for an object surface includes: a memory, a processor, and an object surface 3D measurement program stored on the memory and executable on the processor, and the object surface 3D measurement program is configured to implement the steps of the object surface 3D measurement method as described above.

[0043] In addition, to achieve the above object, the present invention further provides a computer-readable storage medium, where an object surface 3D measurement program is stored on the storage medium, and when the object surface 3D measurement program is executed by a processor, it implements the steps of the object surface 3D measurement method as described above.

[0044] The present invention obtains sampling parameter information of the object to be measured, where the sampling parameter information includes image information of the object to be measured and / or optical data in the sampling environment where the object to be measured is located; determines current measurement parameters of the 3D measurement control device according to the sampling parameter information; measures the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured; obtains motion parameters of the moving stage; and determines 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters. By first obtaining the sampling information of the object to be measured, the relevant parameters of the spectral sensor are automatically set, and the object to be measured is measured with different measurement parameters, avoiding the situation where the spectral sensor cannot reach the ideal detection conditions when measuring special materials, improving the adaptability of 3D measurement, and being faster and more convenient compared to manual calibration. Description of the Drawings

[0045] Figure 1 is a schematic structural diagram of a 3D measurement device for an object surface in a hardware operating environment related to the embodiment solution of the present invention;

[0046] Figure 2 is a schematic flowchart of the first embodiment of the object surface 3D measurement method of the present invention;

[0047] Figure 3 is a schematic diagram of the working principle of a spectral sensor in an embodiment of the object surface 3D measurement method of the present invention;

[0048] Figure 4 is a schematic diagram of a 3D point cloud model in an embodiment of the object surface 3D measurement method of the present invention;

[0049] Figure 5 is a schematic diagram of gray-scale image data in an embodiment of the object surface 3D measurement method of the present invention;

[0050] Figure 6 is a schematic diagram of a stable signal in an embodiment of the object surface 3D measurement method of the present invention;

[0051] Figure 7 Schematic diagram of overexposure signal for an embodiment of the 3D measurement method for the object surface of the present invention;

[0052] Figure 8 Schematic flow chart of the second embodiment of the 3D measurement method for the object surface of the present invention;

[0053] Figure 9 Block diagram of the structure of the first embodiment of the 3D measurement device for the object surface of the present invention.

[0054] The realization of the object of the present invention, functional features and advantages will be further described with reference to the embodiments and the accompanying drawings. Detailed implementation manners

[0055] It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0056] Refer to Figure 1 , Figure 1 Schematic diagram of the structure of the 3D measurement device for the object surface of the hardware operating environment involved in the embodiment solution of the present invention.

[0057] As Figure 1 shown, the 3D measurement device for the object surface may include: a processor 1001, such as a central processing unit (CPU), a communication bus 1002, a user interface 1003, a network interface 1004, and a memory 1005. Among them, the communication bus 1002 is used to realize the connection and communication between these components. The user interface 1003 may include a display screen (Display) and an input unit such as a keyboard (Keyboard). Optionally, the user interface 1003 may further include a standard wired interface and a wireless interface. The network interface 1004 may optionally include a standard wired interface and a wireless interface (such as a wireless-fidelity (Wi-Fi) interface). The memory 1005 may be a high-speed random access memory (Random Access Memory, RAM) or a stable non-volatile memory (Non-Volatile Memory, NVM), such as a disk memory. Optionally, the memory 1005 may also be a storage device independent of the aforementioned processor 1001.

[0058] Those skilled in the art can understand that Figure 1 the structure shown in

[0059] does not constitute a limitation on the 3D measurement device for the object surface, and may include more or fewer components than shown, or combine some components, or have different component arrangements. Figure 1As shown in the figure, the memory 1005, which is a computer-readable storage medium, may include an operating system, a network communication module, a user interface module, and an object surface 3D measurement program.

[0060] In Figure 1 In the object surface 3D measurement device shown in the figure, the network interface 1004 is mainly used for data communication with a network server; the user interface 1003 is mainly used for data interaction with a user; the processor 1001 and the memory 1005 in the object surface 3D measurement device of the present invention may be arranged in the object surface 3D measurement device. The object surface 3D measurement device calls the object surface 3D measurement program stored in the memory 1005 through the processor 1001 and executes the object surface 3D measurement method provided by the embodiments of the present invention.

[0061] Embodiments of the present invention provide an object surface 3D measurement method. Referring to Figure 2 , Figure 2 is a schematic flowchart of the first embodiment of an object surface 3D measurement method of the present invention.

[0062] In this embodiment, the object surface 3D measurement method includes the following steps:

[0063] Step S10: Obtain sampling parameter information of the object to be measured, where the sampling parameter information includes image information of the object to be measured and / or optical data in the sampling environment where the object to be measured is located.

[0064] It should be noted that the execution subject of this embodiment is a 3D measurement control device. The 3D measurement control device may be a spectral sensor and its control device. The control device may be a computer, an industrial control computer, or other devices with the same or similar functions as a computer. This embodiment does not limit this, and only the spectral sensor and the computer are used as examples for illustration.

[0065] It should be noted that this embodiment is applied to the process of detecting the undulation of an object surface and generating a 3D model. This solution adopts the coaxial confocal technology. As Figure 3 shown, based on the spectral confocal principle, an optical component (such as an optical probe) disperses white light into spectra of different bands and arranges them axially to form a continuous spectrum (such as Figure 3right spectral diagram), and the axial spectral range corresponds to the measurement range. When a measurement plane appears within the axial spectral range, the spectrum of the measurement surface is in a focused state, which is manifested as a peak appearing on the corresponding abscissa (wavelength) in the spectral diagram, and the rest are in a defocused state. The spectral signals reflected from the object surface in the corresponding wavelength band are filtered and processed by the spectrometer. Through the coupler acquisition, a one-to-one correspondence between the wavelength and the axial position is established, so as to find the corresponding axial position according to the wavelength position where the peak is located, and obtain the axial position information of the planar surface. Among them, the 3D measurement method of the object surface is applied to a 3D measurement control device, and the 3D measurement control device includes: a spectral confocal sensor and a moving stage, and the spectral confocal sensor is Figure 3 the measurement device shown in the figure, which includes a light source for providing optical signals, an optical fiber for transmitting optical signals, a coupler for receiving optical signals, and an optical probe for dispersing optical signals into spectra of different bands. The spectral confocal sensor is used to generate an axial focused spectrum, and the axial focused spectrum is the set of positions where the white light is refocused after dispersion, which is manifested in the figure as an axial line segment formed by the focused positions of light in different bands, and the line segment is located Figure 3 within the interval of the measurement position in the figure, and collect the image information of the surface of the object to be measured in the axial focused spectrum. The moving stage is used to control the movement of the object to be measured so that the surface of the object to be measured passes through the axial focused spectrum.

[0066] It can be understood that the sampling parameter information, including the image information of the object to be measured and / or the optical data in the sampling environment where the object to be measured is located, is the relevant parameter of the object to be measured. For example: the image information of the sampled object to be measured, the sampled background information, etc., the image data and other optical data that can be collected before the measurement starts, and the sampling parameter information can be directly obtained through the sensor.

[0067] Step S20: Determine the current measurement parameters of the 3D measurement control device according to the sampling parameter information.

[0068] It should be noted that in this embodiment, the spectral confocal sensor type in the spectral sensor is taken as an example for illustration. The measurement parameters may include: denoising parameters for eliminating optical background noise, internal parameter calibration parameters for eliminating lens distortion of the spectral confocal sensor, etc. According to the sampling parameter information, it can be determined whether the current settings of the spectral sensor are suitable for detecting the current object to be measured. Due to the different properties of the object to be measured, the different placement positions, and the different settings of the spectral sensor, the spectral sensor may not be in the best detection settings for the current object to be measured. Therefore, determining the current measurement parameters according to the sampling parameter information can adjust the spectral confocal sensor more reasonably according to the current measurement parameters.

[0069] In specific implementation, the current measurement parameters can be judged by the detection personnel according to the sampling parameter information and set by manual input. This method is relatively flexible and applicable to a very wide range of scenarios, almost covering all application scenarios. The current measurement parameters can also be classified according to the sampling parameter information to obtain the category, image features, optical features, or positional relationship, etc. of the object to be measured, and the classified information is respectively looked up in a table to determine each item in the corresponding current measurement parameters. The advantage of this method is high reliability and convenient and fast maintenance, but the disadvantage is that it can only adapt to the situation where one sampling parameter information category corresponds to one item of the current measurement parameter or one-to-many. When multiple sampling parameter information categories jointly determine the current measurement parameter or even more complex determination situations occur, it will no longer be applicable.

[0070] Step S30: Measure the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured.

[0071] It can be understood that the measurement process is to measure according to the current measurement parameters to obtain spectral image data. The spectral confocal sensor can obtain the echo signal reflected from the surface of the object to be measured from the spectral image data, analyze the echo signal to confirm the position of its peak on the spectrum, and then determine the distance from the object surface to the sensor according to the corresponding relationship between the peak position and the distance from the object surface to the sensor calibrated in advance. Therefore, the setting of the current measurement parameters determines the measurement effect.

[0072] It should be noted that when measuring the surface of a transparent object, the photosensitive component will receive two or more echo signals. According to the refractive index information of the object, calibration is carried out to calculate the distance information of multiple peak projections and generate the distance information of multiple measured surfaces. When measuring an opaque object, the photosensitive component maps the corresponding distance value according to the collected single-peak echo data and cooperates with the calibration database to generate the distance information of the measured surface. According to the distance information of each position on the object surface, a distance information set can be generated, and finally a 3D model of the object surface can be obtained.

[0073] Step S40: Obtain the motion parameters of the moving stage.

[0074] It should be noted that since the final is to perform 3D measurement of the object surface, only the height in the vertical direction of the measured point can be obtained according to the spectral image data. Therefore, it is also necessary to cooperate with the motion data of the moving stage to determine the horizontal coordinates of the measured point, and the final 3D measurement data can be obtained by combining the height and the horizontal coordinates.

[0075] Step S50: Determine the 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters.

[0076] It should be noted that the three-dimensional coordinates of each measured point can be determined based on the spectral image data and the motion parameters respectively. Specifically, the height value corresponding to each measured point can be determined according to the spectral image data, and then the horizontal coordinates of each measured point can be determined in combination with the motion parameters of the moving stage. By moving the measured object on the moving stage so that every part of the object surface passes through the measurement area of the spectral confocal sensor, it is ensured that the entire surface of the measured object can be measured. After obtaining the three-dimensional coordinates, the 3D point cloud data of the surface of the measured object can be established. If the measured object is a transparent object, 3D point cloud models of multiple layers of the measured object can be established. The effect diagram of the 3D point cloud model is as Figure 4 shown.

[0077] In this embodiment, the gray-scale image data of the surface of the measured object is generated according to the spectral image data; the reflected echo peak curve of the surface of the measured object is determined according to the gray-scale image data; and the 3D point cloud data of the surface of the measured object is determined according to the reflected echo peak curve and the motion parameters.

[0078] It should be noted that since the directly obtained spectral data has a large amount of data, such as hyperspectral data format, RGB data format or other image data formats, it is relatively complex to determine its reflected echo curve. Therefore, the spectral data can be first converted into gray-scale image data, such as Figure 5 the gray-scale image data shown, that is, the spectral image with gray-scale data. The reflected wave peak curve can be determined according to the gray-scale image data. The position or value where the wave peak appears can be determined according to the reflected wave peak curve. When measuring the surface of a transparent object, the photosensitive component will receive two or more echo signals. According to the refractive index information of the object, calibration is performed to calculate the distance information of multiple wave peak projections, and the distance information of multiple measured surfaces is generated. When measuring an opaque object, the photosensitive component maps the corresponding distance value according to the collected single-peak echo data and the calibration database, and generates the distance information of the measured surface. The number of surfaces of the measured object can be determined by the number of wave peaks appearing at the same horizontal position. For example, in a transparent object, there may be multiple intermediate layers in addition to the surface. Each wave peak corresponds to the spectral data reflected by a layer, and a set of 3D point cloud data corresponding to the number of layers can be generated. Then, the corresponding 3D point cloud data model is generated.

[0079] In this embodiment, when the measured object is located on the moving stage, the spectral field of view information of the 3D measurement control device is detected; the current position of the measured object is determined according to the spectral field of view information; when the object surface of the measured object is not detected at the current position, the moving stage is controlled to move until the object surface of the measured object is detected.

[0080] It is understandable that the moving stage is a device for controlling the movement of the object to be measured. When the object to be measured is fixed on the moving stage, the sensor can already detect the image, but it is very likely to be out of focus. Therefore, it is necessary to observe whether an axial focused spectrum is formed on the object to be measured within the spectral field of view through the line spectral confocal measurement software. If not, the distance between the object to be measured and the sensor needs to be adjusted until the line spectral confocal measurement software can detect the surface of the object to be measured. For example: as Figure 3 In the measurement range of λmin - λmax, within the shown area, the spectrum will form a confocal state, and the spectrometer collects the peak signal. On the contrary, if the object to be measured is not within the measurement range, no focused spot will be formed, and the spectrometer cannot collect the optical signal and cannot perform the measurement.

[0081] In this embodiment, obtain the material information of the object to be measured; set the exposure time of the 3D measurement control device according to the material information; measure the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured, including: measure the surface of the object to be measured according to the current measurement parameters and the exposure time to obtain the spectral image data of the surface of the object to be measured.

[0082] It should be noted that the material information can be identified by detecting the reflectivity of the object or other characteristics, or directly connecting to the material information management system in the laboratory or production site to obtain the material information of the object to be measured, and then query the preset material-exposure time corresponding relationship mapping table to determine the appropriate exposure time. This is because, according to the surface material and reflectivity of the surface of the object to be measured, the corresponding exposure time is set. The surface reflectivity is inversely proportional to the exposure time. The rougher and more complex the surface, the lower the reflectivity, and the higher the required exposure time. On the contrary, the smoother and flatter the surface, the higher the reflectivity, and the lower the required exposure time. The echo gray data value in the range of 40% - 80% is the reasonable measurement range. If the exposure time is too short, the photosensitive component receives insufficient gray signal and cannot accurately measure the surface topography data of the object to be measured. If the exposure time is too long, the photosensitive component receives too much gray data, and invalid gray data is also received, then the surface topography data of the object to be measured is also incorrect information. Ensuring sufficient gray data and not overexposing can ensure effective detection.

[0083] In this embodiment, obtain the range of the spectral confocal sensor; perform range peak calibration on the spectral confocal sensor according to the range to obtain a range calibration result; when the range calibration result shows that the measured values are linearly distributed, execute the step of measuring the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured.

[0084] It can be understood that the measurement range is the interval of full-spectrum focusing. For example: as Figure 3 shown, the interval where the scattered light from λmin - λmax wavelengths is focused. The focal point heights for different wavelengths are different. It is necessary to determine whether the heights corresponding to continuous wavelength sizes are continuous to ensure the accuracy of the measured height. The specific process of range calibration according to the measurement range is as follows: Use a line spectral confocal sensor to collect distance information within the full range, and establish a projective relationship between the spectral distribution of each frequency band within the full spectrum and the actual distance, thereby improving the measurement accuracy of the sensor. If the measured distance of the sensor after range calibration has a linear relationship with the actual distance, it is considered that the range calibration is successful. Among them, the linear relationship means detecting whether there is a sudden change in the change of the measured distance of the sensor and the actual distance. If it occurs, it proves that there is a problem with the sensor setting or the hardware of the instrument. At this time, it is necessary to repeat the calibration or repair the hardware until the measured distance of the sensor and the actual distance are linearly related.

[0085] In specific implementation, the implementation process of this embodiment can be, for example: first set a reasonable exposure time, adjust the gain and gamma index, convert the received image, and redistribute the brightness value according to the power function, which can maximize the elimination of weak signals and improve the signal-to-noise ratio. As Figure 7 transformed into Figure 6 the adjustment process, where Figure 6 is the grayscale image information collected by the photosensitive component in the case of overexposure. After setting a reasonable exposure time, a stable and normal grayscale image can be received ( Figure 6 ). At this time, the image data has been converted into a stable signal, reducing noise interference and being beneficial to the subsequent data processing. During actual measurement, the photosensitive component collects the spectral signal reflected from the surface of the measured object, and the optical signal is transmitted to the data processing end for processing. At the same time, the motion controller drives the measured object to move horizontally, the driver triggers a pulse signal, the moving stage performs longitudinal translation according to the line scan length of the spectral confocal line, and the lower computer and the upper computer work together to ensure that the number of driver pulse signals matches the set number, thereby completing the measurement area stitching work. The stitched complete measurement data is obtained through the backend data processor. Finally, the point cloud data is transmitted to the data processing end, and functions such as noise processing of the point cloud, feature line extraction, and point cloud data analysis are realized through the point cloud data post-processing software.

[0086] In this embodiment, sampling parameter information of the object to be measured is obtained, where the sampling parameter information includes image information of the object to be measured and / or optical data in the sampling environment where the object to be measured is located; the current measurement parameters of the 3D measurement control device are determined according to the sampling parameter information; the surface of the object to be measured is measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured; the motion parameters of the moving stage are obtained; and 3D point cloud data of the surface of the object to be measured is determined according to the spectral image data and the motion parameters. By first obtaining the sampling information of the object to be measured, the relevant parameters of the spectral sensor are automatically set, and the object to be measured is measured with differential measurement parameters, avoiding the situation where the spectral sensor cannot reach the ideal detection conditions when measuring special materials, improving the adaptability of 3D measurement, and being faster and more convenient compared to manual calibration.

[0087] Reference Figure 8 , Figure 8 is a schematic flowchart of the second embodiment of a 3D measurement method for the surface of an object according to the present invention.

[0088] Based on the above first embodiment, in step S20 of the 3D measurement method for the surface of an object in this embodiment, it further includes:

[0089] Step S21: Determine the sampled image data of the surface of the object to be measured and the dark signal detected by the 3D measurement control device according to the sampling parameter information.

[0090] It should be noted that this embodiment proposes a preferred scheme for determining the current measurement parameters according to the sampling parameter information, which is more intelligent and reliable than manual input and more flexible than the look-up table method. The sampling parameter information is the relevant parameters of the object to be measured. For example, the image information of the sampled object to be measured, the sampling background information, etc., that is, the image data and optical data that can be collected before measurement can be directly obtained through the sensor. Therefore, the image information can be directly extracted from the sampling parameter information as the sampled image data.

[0091] It can be understood that during sampling, the sampling parameter information includes the optical signal obtained by surface reflection and there is also the dark signal existing in the space itself. The dark signal is the gray value that may exist in the current environment itself, thus affecting the finally obtained spectral signal, and different temperatures, humidities, and air environments may cause changes in the dark signal. Therefore, it is necessary to determine the dark signal according to the sampling parameter information.

[0092] Step S22: Perform fusion calibration on the 3D measurement control device according to the sampled image data to obtain calibration parameters.

[0093] It should be understood that fusion calibration can be performed based on the sampled image data to obtain calibration parameters, and the calibration parameters are the parameters used for setting the internal parameters of the sensor. The calibration parameters are mainly used to correct the optical lens distortion of the 3D measurement control device, simulate and correct the optical lens distortion using spectral signal differences, collect the gray-scale data of the echo signals of the entire image plane, correct the gray-scale data at each position within the image plane, eliminate optical distortion, and ensure the consistency of each optical signal arranged by the light-emitting units. If the optical distortion correction is successful, the measurement accuracy can be improved and the performance of the line spectral confocal sensor can be enhanced. If the optical correction fails, it will affect the measurement accuracy of the sensor and cause the edge of the line spectral confocal sensor to be unmeasurable.

[0094] Step S23: Determine the denoising parameters of the 3D measurement control device according to the dark signal.

[0095] Specifically, the denoising parameters are the parameters used to eliminate the optical background noise, generally the negative of the dark signal, that is, the dark signal within the full spectral range is collected according to the resolution of the photosensitive device, and the dark signal is subtracted from the output signal collected by the photosensitive component. The measurement signal can maximize the elimination of the influence of the optical background noise on the measurement, improve the optical signal-to-noise ratio, improve the resolution of the sensor, and repeat the measurement accuracy, thereby enhancing the final imaging quality of the line spectral confocal.

[0096] In this embodiment, the resolution of the 3D measurement control device is obtained; the denoising parameters are determined according to the resolution of the 3D measurement control device and the dark signal.

[0097] It can be understood that there may be a need to detect with different resolutions during use, and the size of the resolution is also one of the conditions that cause changes in the dark signal. Different resolutions may result in different pixel numbers and gray values of each pixel. Therefore, it is necessary to obtain the resolution of the current photosensitive device, determine the dark signal of each pixel within the full spectral range according to the resolution of the photosensitive device. Therefore, adding the resolution for reference in the determination of the denoising parameters can effectively improve the denoising effect of the 3D measurement control device.

[0098] Step S24: Determine the current measurement parameters according to the calibration parameters and the denoising parameters.

[0099] It should be noted that the current measurement parameters can be determined according to the calibration parameters and the denoising parameters, which can help in setting the spectral confocal sensor to remove image distortion, ensure the consistency of each optical signal arranged by the light-emitting units, improve the imaging level, and further improve the accuracy of the final measurement.

[0100] In this embodiment, the sampling image data of the surface of the object to be measured and the dark signal detected by the 3D measurement control device are determined according to the sampling parameter information; the 3D measurement control device is fusion-calibrated according to the sampling image data to obtain calibration parameters; the denoising parameters of the 3D measurement control device are determined according to the dark signal; and the current measurement parameters are determined according to the calibration parameters and the denoising parameters. In the above manner, the calibration parameters and the dark signal are determined during sampling, and then the spectral confocal sensor is calibrated or adjusted, improving the accuracy of 3D measurement.

[0101] In addition, an embodiment of the present invention further provides a computer-readable storage medium, on which an object surface 3D measurement program is stored. When the object surface 3D measurement program is executed by a processor, the steps of the object surface 3D measurement method as described above are implemented.

[0102] Referring to Figure 9 , Figure 9 is a structural block diagram of the first embodiment of the object surface 3D measurement device of the present invention.

[0103] As Figure 9 shown, the object surface 3D measurement device proposed by the embodiment of the present invention includes:

[0104] An acquisition module 10, configured to acquire the sampling parameter information of the object to be measured, where the sampling parameter information includes the image information of the object to be measured and / or the optical data in the sampling environment where the object to be measured is located.

[0105] A processing module 20, configured to measure the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured.

[0106] Wherein, the processing module 20 is further configured to measure the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured.

[0107] The acquisition module 10 is further configured to acquire the motion parameters of the moving stage.

[0108] The processing module 20 is further configured to determine the 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters.

[0109] It should be understood that the above is only for illustration and does not constitute any limitation to the technical solution of the present invention. In specific applications, those skilled in the art can set according to needs, and the present invention does not limit this.

[0110] In this embodiment, the acquisition module 10 acquires the sampling parameter information of the object to be measured, where the sampling parameter information includes the image information of the object to be measured and / or the optical data in the sampling environment where the object to be measured is located; the processing module 20 determines the current measurement parameters of the 3D measurement control device according to the sampling parameter information; the processing module 20 measures the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured; the acquisition module 10 acquires the motion parameters of the moving stage; the processing module 20 determines the 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters. By first obtaining the sampling information of the object to be measured, the relevant parameters of the spectral sensor are automatically set, and the object to be measured is measured with different measurement parameters, avoiding the situation where the spectral sensor cannot reach the ideal detection conditions when measuring special materials, improving the adaptability of 3D measurement, and being faster and more convenient compared to manual calibration.

[0111] In this embodiment, the processing module 20 is further configured to acquire the sampling parameter information of the object to be measured, where the sampling parameter information includes the image information of the object to be measured and / or the optical data in the sampling environment where the object to be measured is located;

[0112] Determine the current measurement parameters of the 3D measurement control device according to the sampling parameter information;

[0113] Measure the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured;

[0114] Acquire the motion parameters of the moving stage;

[0115] Determine the 3D point cloud data of the surface of the object to be measured according to the spectral image data and the motion parameters.

[0116] In this embodiment, the processing module 20 is further configured to generate the grayscale image data of the surface of the object to be measured according to the spectral image data;

[0117] Determine the reflected echo peak curve of the surface of the object to be measured according to the grayscale image data;

[0118] Determine the 3D point cloud data of the surface of the object to be measured according to the reflected echo peak curve and the motion parameters.

[0119] In this embodiment, the processing module 20 is further configured to determine the sampling image data of the surface of the object to be measured and the dark signal detected by the 3D measurement control device according to the sampling parameter information;

[0120] Perform fusion calibration on the 3D measurement control device according to the sampling image data to obtain calibration parameters;

[0121] Determine the denoising parameters of the 3D measurement control device according to the dark signal;

[0122] Determine the current measurement parameters according to the calibration parameters and the denoising parameters.

[0123] In this embodiment, the processing module 20 is further configured to obtain the resolution of the 3D measurement control device;

[0124] Determine the denoising parameters according to the resolution of the 3D measurement control device and the dark signal.

[0125] In this embodiment, the processing module 20 is further configured to detect the spectral field of view information of the 3D measurement control device when the object to be measured is located on the moving stage;

[0126] Determine the current position of the object to be measured according to the spectral field of view information;

[0127] When the object surface of the object to be measured is not detected at the current position, control the moving stage to move until the object surface of the object to be measured is detected.

[0128] In this embodiment, the processing module 20 is further configured to obtain the material information of the object to be measured;

[0129] Set the exposure time of the 3D measurement control device according to the material information;

[0130] The measurement of the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured includes:

[0131] Measure the surface of the object to be measured according to the current measurement parameters and the exposure time to obtain the spectral image data of the surface of the object to be measured.

[0132] In this embodiment, the processing module 20 is further configured to obtain the range of the spectral confocal sensor;

[0133] Perform range peak calibration on the spectral confocal sensor according to the range to obtain a range calibration result;

[0134] When the range calibration result shows that the measured values are linearly distributed, perform the step of measuring the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured.

[0135] It should be noted that the workflow described above is only illustrative and does not limit the scope of protection of the present invention. In actual applications, those skilled in the art can select some or all of them according to actual needs to achieve the purpose of the solution of this embodiment, and no limitation is made here.

[0136] In addition, for the technical details not described in detail in this embodiment, reference can be made to the 3D measurement method of the object surface provided in any embodiment of the present invention, and details will not be repeated here.

[0137] In addition, it should be noted that in this article, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or system. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of another identical element in the process, method, article or system including that element.

[0138] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0139] Through the description of the above embodiments, those skilled in the art can clearly understand that the above embodiment methods can be implemented by means of software plus a necessary general hardware platform. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art can be embodied in the form of a software product. The computer software product is stored in a storage medium (such as a read-only memory (ROM) / RAM, magnetic disk, optical disk), and includes several instructions for causing a terminal device (which can be a mobile phone, a computer, a server, or a network device, etc.) to execute the methods described in various embodiments of the present invention.

[0140] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present invention.

Claims

1. A 3D measurement method for the surface of an object, characterized in that, The 3D measurement method for the surface of an object is applied to a 3D measurement control device, which includes a spectral confocal sensor and a moving stage. The spectral confocal sensor is used to generate an axial focused spectrum and collect image information of the surface of the object to be measured in the axial focused spectrum. The moving stage is used to control the movement of the object to be measured so that the surface of the object to be measured passes through the axial focused spectrum. The 3D measurement method for the surface of the object includes: Obtain the sampling parameter information of the object to be measured, where the sampling parameter information includes the image information of the object to be measured and / or the optical data in the sampling environment where the object to be measured is located; Determine the current measurement parameters of the 3D measurement control device according to the sampling parameter information. Among them, the current measurement parameters include denoising parameters for eliminating optical background noise and calibration parameters for eliminating lens distortion of the spectral confocal sensor; measure the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured; Obtain the movement parameters of the moving stage; Determine the 3D point cloud data of the surface of the object to be measured according to the spectral image data and the movement parameters; The determining the current measurement parameters of the 3D measurement control device according to the sampling parameter information includes: Determine the sampling image data of the surface of the object to be measured and the dark signal detected by the 3D measurement control device according to the sampling parameter information; Perform fusion calibration on the 3D measurement control device according to the sampling image data to obtain calibration parameters; Determine the denoising parameters of the 3D measurement control device according to the dark signal; Determine the current measurement parameters according to the calibration parameters and the denoising parameters.

2. The method according to claim 1, characterized in that, The determining the 3D point cloud data of the surface of the object to be measured according to the spectral image data and the movement parameters includes: Generate the grayscale image data of the surface of the object to be measured according to the spectral image data; Determine the reflected echo peak curve of the surface of the object to be measured according to the grayscale image data; Determine the 3D point cloud data of the surface of the object to be measured according to the reflected echo peak curve and the movement parameters.

3. The method according to claim 1, wherein The determining the denoising parameters according to the dark signal includes: Obtain the resolution of the 3D measurement control device; Determine the denoising parameters according to the resolution of the 3D measurement control device and the dark signal.

4. The method according to any one of claims 1 to 3, characterized in that, Before measuring the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured, it further includes: when the object to be measured is located on the moving stage, detect the spectral field of view information of the 3D measurement control device; Determine the current position of the object to be measured according to the spectral field of view information; When the surface of the object to be measured is not detected at the current position, control the moving stage to move until the surface of the object to be measured is detected.

5. The method according to any one of claims 1 to 3, characterized in that, Before measuring the surface of the object to be measured according to the current measurement parameters to obtain the spectral image data of the surface of the object to be measured, it further includes: Obtain the material information of the object to be measured; Set the exposure time of the 3D measurement control device according to the material information; Performing measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured, including: Performing measurement on the surface of the object to be measured according to the current measurement parameters and the exposure time to obtain spectral image data of the surface of the object to be measured.

6. The method according to any one of claims 1 to 3, characterized in that, Before performing measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured, it further includes: Obtaining the range of the spectral confocal sensor; Performing range peak calibration on the spectral confocal sensor according to the range to obtain a range calibration result; When the range calibration result shows that the measured values are linearly distributed, performing the step of performing measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured.

7. A 3D measurement device for the surface of an object, characterized in that, The 3D measurement device for the object surface includes: a spectral confocal sensor and a moving stage. The spectral confocal sensor is used to generate an axial focusing spectrum and collect image information of the surface of the object to be measured in the axial focusing spectrum. The moving stage is used to control the movement of the object to be measured so that the surface of the object to be measured passes through the axial focusing spectrum. The 3D measurement device for the object surface further includes: An acquisition module, configured to acquire sampling parameter information of the object to be measured, where the sampling parameter information includes image information of the object to be measured and / or optical data in the sampling environment where the object to be measured is located; A processing module, configured to determine the current measurement parameters of the 3D measurement device according to the sampling parameter information, where the current measurement parameters include a denoising parameter for eliminating optical background noise and a calibration parameter for eliminating lens distortion of the spectral confocal sensor; Wherein, the processing module is further configured to perform measurement on the surface of the object to be measured according to the current measurement parameters to obtain spectral image data of the surface of the object to be measured; The acquisition module is further configured to acquire movement parameters of the moving stage; The processing module is further configured to determine 3D point cloud data of the surface of the object to be measured according to the spectral image data and the movement parameters; The processing module is further configured to determine sampling image data of the surface of the object to be measured and dark signals detected by the 3D measurement device according to the sampling parameter information; Performing fusion calibration on the 3D measurement device according to the sampling image data to obtain calibration parameters; Determining a denoising parameter of the 3D measurement device according to the dark signals; Determining the current measurement parameters according to the calibration parameters and the denoising parameters.

8. A 3D measurement device for an object surface, characterized in that, The device includes: a memory, a processor, and an object surface 3D measurement program stored on the memory and executable on the processor. The object surface 3D measurement program is configured to implement the steps of the object surface 3D measurement method according to any one of claims 1 to 6.

9. A computer-readable storage medium, characterized in that, An object surface 3D measurement program is stored on the computer-readable storage medium. When the object surface 3D measurement program is executed by a processor, it implements the steps of the object surface 3D measurement method according to any one of claims 1 to 6.

Images