A method, apparatus, electronic device, and storage medium for testing the performance of a motion axis.

By using a laser tracker and coordinate system establishment method, the problem of standardizing the test benchmark for motion axis performance parameters was solved, and accurate performance measurement was achieved.

CN115235748BActive Publication Date: 2026-01-30BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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Patent Information

Application Number
CN202210865019.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-07-21
Publication Date
2026-01-30
Estimated Expiration
2042-07-21

AI Technical Summary

Technical Problem

In existing technologies, it is difficult to achieve a unified benchmark for testing the performance parameters of motion axes in complex, large-scale precision equipment, as it requires disassembling parts and the measurement results are inaccurate.

Method used

A laser tracker is used to measure the coordinates of the center point of the target ball on the sliding platform in a spatial rectangular coordinate system. By establishing multiple coordinate systems, the performance parameters of the motion axis, such as yaw angle, pitch angle, roll angle, orthogonality, and repeatability, are calculated.

Benefits of technology

It enables convenient and accurate acquisition of motion axis performance parameters, simplifies the testing process, and improves measurement accuracy.

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Patent Text Reader

Abstract

This application provides a method, apparatus, electronic device, and storage medium for testing the performance of a motion axis. The motion axis carries a sliding platform capable of moving along the axis, and a target ball is fixed on the sliding platform. The method includes: establishing a first spatial rectangular coordinate system; using a laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system; and determining the performance parameters of the motion axis based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system. This application enables more convenient and accurate acquisition of various performance parameters of the motion axis.
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Description

Technical Field

[0001] This application relates to the field of measurement technology, and more specifically, to a method, apparatus, electronic device, and storage medium for testing the performance of a motion axis. Background Technology

[0002] In the existing technology, for complex and large precision equipment, it is difficult to achieve a unified benchmark for testing the performance parameters of motion axes during the integration process. Different performance parameters require different tools, and some performance parameters even need to be tested by disassembling some parts, which is not only very inconvenient, but also leads to inaccurate measurement results. Summary of the Invention

[0003] In view of this, the purpose of this application is to provide a method, apparatus, electronic device and storage medium for testing the performance of motion axes, which can more conveniently and accurately obtain various performance parameters of motion axes.

[0004] In a first aspect, embodiments of this application provide a performance testing method for a motion axis, wherein a sliding platform capable of moving along the motion axis is mounted on the motion axis, and a target ball is fixed on the sliding platform; the method includes:

[0005] Establish a first spatial rectangular coordinate system;

[0006] Using a laser tracker, the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured;

[0007] The performance parameters of the motion axis are determined based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0008] In one possible implementation, when the performance parameters are motion attitude parameters, straightness, or orthogonality, the motion attitude parameters include: yaw angle, pitch angle, and roll angle. Using a laser tracker, the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured, including:

[0009] When the sliding platform is at different positions on the motion axis, the laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0010] In one possible implementation, the distance between any two adjacent target positions is less than or equal to the smallest of the target distances. The target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker. The number of target positions is greater than or equal to a preset number. The target positions include the positions of the two ends of the sliding platform on the motion axis. The target distance includes the distance between any two adjacent preset workstation scales on the motion axis.

[0011] In one possible implementation, the target balls fixed to the sliding platform include three balls, the center points of which are distributed in a right-angled triangle on the sliding platform, and one of the right-angled sides of the triangle is parallel to the direction of movement of the sliding platform along the motion axis; establishing a first spatial rectangular coordinate system includes:

[0012] A first spatial rectangular coordinate system is established with the right-angled vertex of the current right triangle as the origin, one of the right-angled sides of the current right triangle as the X-axis, and the other right-angled side of the current right triangle as the Y-axis.

[0013] In one possible implementation, when the performance parameter is the motion posture parameter, the performance parameter of the motion axis is determined based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0014] For each target position, a second spatial rectangular coordinate system is established with the coordinates of the center point of the target ball at that target position in the first spatial rectangular coordinate system as the origin, one of the right-angled sides of the right triangle at that target position as the X-axis, and the other right-angled side of the right triangle at that target position as the Y-axis. The target ball is the target ball whose center point is located at the right-angled vertex of the right triangle, and the target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker.

[0015] Choose one of the entire second spatial rectangular coordinate systems as the reference second spatial rectangular coordinate system, and use the rest as reference second spatial rectangular coordinate systems;

[0016] For each of the aforementioned reference second spatial rectangular coordinate systems, a first rotation angle of the reference second spatial rectangular coordinate system relative to the X-axis of the reference second spatial rectangular coordinate system is calculated, and the first rotation angle is used as the roll angle; a second rotation angle of the reference second spatial rectangular coordinate system relative to the Y-axis of the reference second spatial rectangular coordinate system is calculated, and the second rotation angle is used as the pitch angle; and a third rotation angle of the reference second spatial rectangular coordinate system relative to the Z-axis of the reference second spatial rectangular coordinate system is calculated, and the third rotation angle is used as the yaw angle.

[0017] In one possible implementation, when the performance parameter is repeatability accuracy, a laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0018] a. Move the sliding platform to a first random position on the motion axis, wherein the first random position is any position between one end of the motion axis and the position to be detected on the motion axis, and the position to be detected is a pre-marked position on the motion axis that requires repeated positioning accuracy detection;

[0019] b. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system;

[0020] c. Move the sliding platform to a second random position on the motion axis, wherein the second random position is any position between the other end of the motion axis and the position to be detected on the motion axis;

[0021] d. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system;

[0022] e. Repeat steps a to d a preset number of times.

[0023] In one possible implementation, when the performance parameter is the orthogonality, the motion axis includes: a first motion axis and a second motion axis, the first motion axis and the second motion axis intersecting; when the sliding platform is at different positions on the motion axis, the laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0024] When the sliding platform is at different positions on the first motion axis, the laser tracker is used to measure the first coordinate of the center point of the target ball in the first spatial rectangular coordinate system; and when the sliding platform is at different positions on the second motion axis, the laser tracker is used to measure the second coordinate of the center point of the target ball in the first spatial rectangular coordinate system.

[0025] Based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, the performance parameters of the motion axis are determined, including:

[0026] Fit the first coordinates to obtain a first straight line, and fit the second coordinates to obtain a second straight line;

[0027] Calculate the angle between the first line and the second line, and use the angle as the orthogonality.

[0028] Secondly, embodiments of this application also provide a performance testing device for a motion axis, wherein a sliding platform capable of moving along the motion axis is mounted on the motion axis, and a target ball is fixed on the sliding platform. The device includes:

[0029] The coordinate system establishment module is used to establish a first spatial rectangular coordinate system;

[0030] A coordinate measurement module is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system using a laser tracker.

[0031] The calculation module is used to determine the performance parameters of the motion axis based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0032] In one possible implementation, when the performance parameters are motion attitude parameters, straightness, or orthogonality, the motion attitude parameters include: yaw angle, pitch angle, and roll angle. The coordinate measurement module is further used for:

[0033] When the sliding platform is at different positions on the motion axis, the laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0034] In one possible implementation, the distance between any two adjacent target positions is less than or equal to the smallest of the target distances. The target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker. The number of target positions is greater than or equal to a preset number. The target positions include the positions of the two ends of the sliding platform on the motion axis. The target distance includes the distance between any two adjacent preset workstation scales on the motion axis.

[0035] In one possible implementation, the target balls fixed to the sliding platform include three balls, the center points of which are distributed in a right-angled triangle on the sliding platform, and one of the right-angled sides of the triangle is parallel to the direction of movement of the sliding platform along the motion axis; the coordinate system establishment module is specifically used for:

[0036] A first spatial rectangular coordinate system is established with the right-angled vertex of the current right triangle as the origin, one of the right-angled sides of the current right triangle as the X-axis, and the other right-angled side of the current right triangle as the Y-axis.

[0037] In one possible implementation, when the performance parameter is the motion posture parameter, the calculation module is further configured to:

[0038] For each target position, a second spatial rectangular coordinate system is established with the coordinates of the center point of the target ball at that target position in the first spatial rectangular coordinate system as the origin, one of the right-angled sides of the right triangle at that target position as the X-axis, and the other right-angled side of the right triangle at that target position as the Y-axis. The target ball is the target ball whose center point is located at the right-angled vertex of the right triangle, and the target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker.

[0039] Choose one of the entire second spatial rectangular coordinate systems as the reference second spatial rectangular coordinate system, and use the rest as reference second spatial rectangular coordinate systems;

[0040] For each of the aforementioned reference second spatial rectangular coordinate systems, a first rotation angle of the reference second spatial rectangular coordinate system relative to the X-axis of the reference second spatial rectangular coordinate system is calculated, and the first rotation angle is used as the roll angle; a second rotation angle of the reference second spatial rectangular coordinate system relative to the Y-axis of the reference second spatial rectangular coordinate system is calculated, and the second rotation angle is used as the pitch angle; and a third rotation angle of the reference second spatial rectangular coordinate system relative to the Z-axis of the reference second spatial rectangular coordinate system is calculated, and the third rotation angle is used as the yaw angle.

[0041] In one possible implementation, when the performance parameter is repeatability accuracy, the coordinate measurement module is further configured to:

[0042] a. Move the sliding platform to a first random position on the motion axis, wherein the first random position is any position between one end of the motion axis and the position to be detected on the motion axis, and the position to be detected is a pre-marked position on the motion axis that requires repeated positioning accuracy detection;

[0043] b. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system;

[0044] c. Move the sliding platform to a second random position on the motion axis, wherein the second random position is any position between the other end of the motion axis and the position to be detected on the motion axis;

[0045] d. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system;

[0046] e. Repeat steps a to d a preset number of times.

[0047] In one possible implementation, when the performance parameter is the orthogonality, the motion axis includes: a first motion axis and a second motion axis, the first motion axis and the second motion axis intersecting; the coordinate measurement module, when the sliding platform is at different positions on the motion axis, uses the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, specifically for:

[0048] When the sliding platform is at different positions on the first motion axis, the laser tracker is used to measure the first coordinates of the center point of the target ball in the first spatial rectangular coordinate system; and when the sliding platform is at different positions on the second motion axis, the laser tracker is used to measure the second coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0049] The computing module is also used for:

[0050] Fit the first coordinates to obtain a first straight line, and fit the second coordinates to obtain a second straight line;

[0051] Calculate the angle between the first line and the second line, and use the angle as the orthogonality.

[0052] Thirdly, embodiments of this application also provide an electronic device, including: a processor, a storage medium, and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the storage medium via the bus, and the processor executes the machine-readable instructions to perform the steps of the motion axis performance testing method described in any of the first aspects.

[0053] Fourthly, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the motion axis performance testing method as described in any of the first aspects.

[0054] The embodiments of this application provide a method, apparatus, electronic device, and storage medium for testing the performance of a motion axis, which can more conveniently and accurately obtain various performance parameters of the motion axis. Attached Figure Description

[0055] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0056] Figure 1 A flowchart of a performance testing method for a motion axis provided in an embodiment of this application is shown;

[0057] Figure 2 A schematic diagram illustrating a method for measuring straightness according to an embodiment of this application is shown;

[0058] Figure 3A flowchart of another motion axis performance testing method provided in an embodiment of this application is shown;

[0059] Figure 4 A flowchart of another motion axis performance testing method provided in an embodiment of this application is shown;

[0060] Figure 5 This paper shows a schematic diagram of the structure of a performance testing device for a motion axis provided in an embodiment of this application;

[0061] Figure 6 A schematic diagram of the structure of an electronic device provided in an embodiment of this application is shown. Detailed Implementation

[0062] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the accompanying drawings in this application are for illustrative and descriptive purposes only and are not intended to limit the scope of protection of this application. Furthermore, it should be understood that the schematic drawings are not drawn to scale. The flowcharts used in this application illustrate operations implemented according to some embodiments of this application. It should be understood that the operations in the flowcharts may not be implemented in sequence, and steps without logical contextual relationships may be reversed or implemented simultaneously. In addition, those skilled in the art, guided by the content of this application, may add one or more other operations to the flowcharts, or remove one or more operations from the flowcharts.

[0063] Furthermore, the described embodiments are merely some, not all, of the embodiments of this application. The components of the embodiments of this application described and illustrated herein can typically be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0064] It should be noted that the term "comprising" will be used in the embodiments of this application to indicate the presence of the features declared thereafter, but does not exclude the addition of other features.

[0065] To facilitate understanding of this embodiment, a detailed description will be provided of a performance testing method, apparatus, electronic device, and storage medium for a motion axis provided in this application embodiment.

[0066] Reference Figure 1The diagram shows a flowchart of a performance testing method for a motion axis according to an embodiment of this application. The motion axis carries a sliding platform capable of moving along the motion axis, and a target ball is fixed on the sliding platform. The method includes:

[0067] S101. Establish the first spatial rectangular coordinate system.

[0068] S102. Using a laser tracker, measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0069] S103. Determine the performance parameters of the motion axis based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0070] For example, performance parameters may include at least: straightness, orthogonality, motion attitude parameters (including: roll, pitch, yaw), repeatability, etc.

[0071] Preferably, after step S103, the performance parameters can be processed using the extreme value method or the Raida criterion.

[0072] In one possible implementation, when the performance parameters are motion attitude parameters, straightness, or orthogonality, the motion attitude parameters include: yaw angle, pitch angle, and roll angle. Using a laser tracker, the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured, including:

[0073] When the sliding platform is at different positions on the motion axis, the laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0074] For example, when the sliding platform is at either end or in the middle of the motion axis, a laser tracking device can be used to measure the coordinates of the center point of the target ball in a first spatial rectangular coordinate system.

[0075] In one possible implementation, the distance between any two adjacent target positions is less than or equal to the smallest of the target distances. The target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker. The number of target positions is greater than or equal to a preset number. The target positions include the positions of the two ends of the sliding platform on the motion axis. The target distance includes the distance between any two adjacent preset workstation scales on the motion axis.

[0076] For example, the preset number can be 10, 20, or 30, etc.

[0077] For example, there are 4 preset workstation scales. The distance between the first and second preset workstation scales (which are adjacent to each other) is 10cm, the distance between the second and third preset workstation scales (which are adjacent to each other) is 12cm, and the distance between the third and fourth preset workstation scales (which are adjacent to each other) is 14cm. Then, the distance between any two adjacent target positions should be less than or equal to 10cm.

[0078] In one possible implementation, the target balls fixed to the sliding platform include three balls, the center points of which are distributed in a right-angled triangle on the sliding platform, and one of the right-angled sides of the triangle is parallel to the direction of movement of the sliding platform along the motion axis; establishing a first spatial rectangular coordinate system includes:

[0079] A first spatial rectangular coordinate system is established with the right-angled vertex of the current right triangle as the origin, one of the right-angled sides of the current right triangle as the X-axis, and the other right-angled side of the current right triangle as the Y-axis.

[0080] To facilitate subsequent calculations of performance parameters, the above steps are used to establish a first spatial rectangular coordinate system.

[0081] Specifically, when the performance parameter is straightness (including left-right straightness and up-down straightness), any one of the target balls can be designated as the target ball. When the sliding platform is at A different positions on the motion axis, a laser tracker is used to measure A coordinates of the center point of the target ball in the first spatial rectangular coordinate system, where A is a preset integer value (for example, it can be 30).

[0082] The coordinates obtained in the i-th iteration are (x... i y i , z i ), where i is an integer from 1 to A.

[0083] Therefore, we can use the formula Δy i =y i -y1, calculates the straightness of the left and right sides (i.e., Δy). i ), and, according to the formula Δz i =z i -z1, calculates the vertical straightness (i.e., Δz). i ).

[0084] Reference Figure 2 The diagram shown is a schematic representation of a method for measuring straightness according to an embodiment of this application.

[0085] Reference Figure 3The diagram shows a flowchart of another motion axis performance testing method provided in this application embodiment. In one possible implementation, when the performance parameter is the motion posture parameter, the performance parameter of the motion axis is determined based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0086] S301. For each target position, a second spatial rectangular coordinate system is established with the coordinates of the center point of the target ball at that target position in the first spatial rectangular coordinate system as the origin, one right-angled side of the right triangle at that target position as the X-axis, and the other right-angled side of the right triangle at that target position as the Y-axis. The target ball is the target ball whose center point is located at the right-angled vertex of the right triangle, and the target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker.

[0087] For example, if there are 3 target locations, then there will be 3 second-space Cartesian coordinate systems.

[0088] S302. Select one of the second spatial rectangular coordinate systems as the reference second spatial rectangular coordinate system, and use the rest as reference second spatial rectangular coordinate systems.

[0089] S303. For each of the reference second spatial rectangular coordinate systems, calculate a first rotation angle of the reference second spatial rectangular coordinate system relative to the X-axis of the reference second spatial rectangular coordinate system, and use the first rotation angle as the roll angle; calculate a second rotation angle of the reference second spatial rectangular coordinate system relative to the Y-axis of the reference second spatial rectangular coordinate system, and use the second rotation angle as the pitch angle; calculate a third rotation angle of the reference second spatial rectangular coordinate system relative to the Z-axis of the reference second spatial rectangular coordinate system, and use the third rotation angle as the yaw angle.

[0090] Roll angle is denoted as roll; pitch angle is denoted as pitch; yaw angle is denoted as yaw.

[0091] Reference Figure 4 The diagram shows a flowchart of another motion axis performance testing method provided in an embodiment of this application. In one possible implementation, when the performance parameter is repeatability accuracy, a laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0092] S401. Move the sliding platform to a first random position on the motion axis, wherein the first random position is any position between one end of the motion axis and the position to be detected on the motion axis, and the position to be detected is a pre-calibrated position on the motion axis that requires repeated positioning accuracy detection.

[0093] For example, the first random position can be one end of the motion axis.

[0094] S402. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0095] The sliding platform is moved from the first random position to the position to be detected on the motion axis, and the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker.

[0096] S403. Move the sliding platform to a second random position on the motion axis, wherein the second random position is any position between the other end of the motion axis and the position to be detected on the motion axis.

[0097] For example, the second random position could be the other end of the motion axis.

[0098] S404. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0099] The sliding platform is moved from the second random position to the position to be detected, and the coordinates of the center point of the current target ball in the first spatial rectangular coordinate system are measured using a laser tracker.

[0100] S405. Repeat steps S401 to S404 a preset number of times.

[0101] For example, the preset number of times can be 10, 20, or 30 times, etc.

[0102] Therefore, correspondingly, when the performance parameter is the repeatability accuracy, the performance parameter of the motion axis is determined based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0103] The performance parameters of the motion axis are determined based on the X-axis coordinate in each of the aforementioned coordinates.

[0104] Specifically, the coordinates of the center point of the target ball obtained in the i-th iteration in the first spatial rectangular coordinate system are (x... i y i , zi ), where i is an integer from 1 to B, and B is the preset number of times.

[0105] Therefore, we can use the formula Δx i =x i -x1, calculate the repeatability accuracy (i.e., Δx) i ).

[0106] In one possible implementation, when the performance parameter is the orthogonality, the motion axis includes: a first motion axis and a second motion axis, the first motion axis and the second motion axis intersecting; when the sliding platform is at different positions on the motion axis, the laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including:

[0107] When the sliding platform is at different positions on the first motion axis, the laser tracker is used to measure the first coordinates of the center point of the target ball in the first spatial rectangular coordinate system; and when the sliding platform is at different positions on the second motion axis, the laser tracker is used to measure the second coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0108] Based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, the performance parameters of the motion axis are determined, including:

[0109] Fit the first coordinates to obtain a first straight line, and fit the second coordinates to obtain a second straight line;

[0110] Calculate the angle between the first line and the second line, and use the angle as the orthogonality.

[0111] The present application provides a method for testing the performance of a motion axis, which can more conveniently and accurately obtain various performance parameters of the motion axis.

[0112] Reference Figure 5 The diagram shown is a structural schematic of a performance testing device for a motion axis according to an embodiment of this application. The motion axis carries a sliding platform capable of moving along the motion axis, and a target ball is fixed on the sliding platform. The device includes:

[0113] Coordinate system establishment module 501 is used to establish a first spatial rectangular coordinate system;

[0114] The coordinate measurement module 502 is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system using a laser tracker.

[0115] The calculation module 503 is used to determine the performance parameters of the motion axis based on the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0116] In one possible implementation, when the performance parameters are motion attitude parameters, straightness, or orthogonality, the motion attitude parameters include: yaw angle, pitch angle, and roll angle. The coordinate measurement module 502 is further used for:

[0117] When the sliding platform is at different positions on the motion axis, the laser tracker is used to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0118] In one possible implementation, the distance between any two adjacent target positions is less than or equal to the smallest of the target distances. The target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker. The number of target positions is greater than or equal to a preset number. The target positions include the positions of the two ends of the sliding platform on the motion axis. The target distance includes the distance between any two adjacent preset workstation scales on the motion axis.

[0119] In one possible implementation, the target balls fixed to the sliding platform include three balls, the center points of which are distributed in a right-angled triangle on the sliding platform, and one of the right-angled sides of the triangle is parallel to the direction of movement of the sliding platform along the motion axis; the coordinate system establishment module 501 is specifically used for:

[0120] A first spatial rectangular coordinate system is established with the right-angled vertex of the current right triangle as the origin, one of the right-angled sides of the current right triangle as the X-axis, and the other right-angled side of the current right triangle as the Y-axis.

[0121] In one possible implementation, when the performance parameter is the motion posture parameter, the calculation module 503 is further configured to:

[0122] For each target position, a second spatial rectangular coordinate system is established with the coordinates of the center point of the target ball at that target position in the first spatial rectangular coordinate system as the origin, one of the right-angled sides of the right triangle at that target position as the X-axis, and the other right-angled side of the right triangle at that target position as the Y-axis. The target ball is the target ball whose center point is located at the right-angled vertex of the right triangle, and the target position is the position of the sliding platform on the motion axis when the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker.

[0123] Choose one of the entire second spatial rectangular coordinate systems as the reference second spatial rectangular coordinate system, and use the rest as reference second spatial rectangular coordinate systems;

[0124] For each of the aforementioned reference second spatial rectangular coordinate systems, a first rotation angle of the reference second spatial rectangular coordinate system relative to the X-axis of the reference second spatial rectangular coordinate system is calculated, and the first rotation angle is used as the roll angle; a second rotation angle of the reference second spatial rectangular coordinate system relative to the Y-axis of the reference second spatial rectangular coordinate system is calculated, and the second rotation angle is used as the pitch angle; and a third rotation angle of the reference second spatial rectangular coordinate system relative to the Z-axis of the reference second spatial rectangular coordinate system is calculated, and the third rotation angle is used as the yaw angle.

[0125] In one possible implementation, when the performance parameter is repeatability accuracy, the coordinate measurement module 502 is further configured to:

[0126] a. Move the sliding platform to a first random position on the motion axis, wherein the first random position is any position between one end of the motion axis and the position to be detected on the motion axis, and the position to be detected is a pre-marked position on the motion axis that requires repeated positioning accuracy detection;

[0127] b. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system;

[0128] c. Move the sliding platform to a second random position on the motion axis, wherein the second random position is any position between the other end of the motion axis and the position to be detected on the motion axis;

[0129] d. Move the sliding platform to the position to be detected on the motion axis, and use the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system;

[0130] e. Repeat steps a to d a preset number of times.

[0131] In one possible implementation, when the performance parameter is the orthogonality, the motion axis includes: a first motion axis and a second motion axis, the first motion axis and the second motion axis intersecting; the coordinate measurement module 502, when the sliding platform is at different positions on the motion axis, uses the laser tracker to measure the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, specifically for:

[0132] When the sliding platform is at different positions on the first motion axis, the laser tracker is used to measure the first coordinates of the center point of the target ball in the first spatial rectangular coordinate system; and when the sliding platform is at different positions on the second motion axis, the laser tracker is used to measure the second coordinates of the center point of the target ball in the first spatial rectangular coordinate system.

[0133] The computing module 503 is also used for:

[0134] Fit the first coordinates to obtain a first straight line, and fit the second coordinates to obtain a second straight line;

[0135] Calculate the angle between the first line and the second line, and use the angle as the orthogonality.

[0136] The present application provides a performance testing device for motion axes, which can more conveniently and accurately obtain various performance parameters of motion axes.

[0137] Reference Figure 6 As shown in the embodiment of this application, an electronic device 600 includes a processor 601, a memory 602, and a bus. The memory 602 stores machine-readable instructions executable by the processor 601. When the electronic device is running, the processor 601 communicates with the memory 602 via the bus, and the processor 601 executes the machine-readable instructions to perform the steps of the motion axis performance testing method described above.

[0138] Specifically, the memory 602 and processor 601 mentioned above can be general-purpose memory and processor, without any specific limitations. When the processor 601 runs the computer program stored in the memory 602, it can execute the above-mentioned method for testing the performance of the motion axis.

[0139] Corresponding to the above-described method for testing the performance of motion axes, this application also provides a computer-readable storage medium storing a computer program, which, when run by a processor, executes the steps of the above-described method for testing the performance of motion axes.

[0140] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems and devices described above can be referred to the corresponding processes in the method embodiments, and will not be repeated here. In the several embodiments provided in this application, it should be understood that the disclosed systems, methods, and procedures can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of modules is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple modules or components may be combined or integrated into another system, or some features may be ignored or not executed. Another point is that the displayed or discussed mutual coupling or direct coupling or communication connection may be through some communication interfaces; the indirect coupling or communication connection of devices or modules may be electrical, mechanical, or other forms.

[0141] The modules described as separate components may or may not be physically separate. The components shown as modules may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0142] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0143] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, ROM, RAM, magnetic disks, or optical disks.

[0144] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method of testing the performance of a motion axis, characterized by, The motion shaft is loaded with a sliding platform capable of moving along the motion shaft, and a target ball is fixed on the sliding platform, and the method comprises: establishing a first space rectangular coordinate system; measuring the coordinates of the center point of the target ball in the first space rectangular coordinate system using a laser tracker; determining the performance parameters of the motion shaft according to the coordinates of the center point of the target ball in the first space rectangular coordinate system; when the performance parameters are motion attitude parameters or straightness or orthogonality, the motion attitude parameters comprise a yaw angle, a pitch angle and a roll angle; measuring the coordinates of the center point of the target ball in the first space rectangular coordinate system using a laser tracker comprises: measuring the coordinates of the center point of the target ball in the first space rectangular coordinate system using the laser tracker when the sliding platform is at different positions on the motion shaft; the target ball fixed on the sliding platform comprises three, the center points of the three target balls are distributed in a right-angled triangle on the sliding platform, and one of the right-angled sides of the right-angled triangle is parallel to the moving direction of the sliding platform along the motion shaft; when the performance parameters are the motion attitude parameters, determining the performance parameters of the motion shaft according to the coordinates of the center point of the target ball in the first space rectangular coordinate system comprises: for each target position, taking the coordinates of the center point of the target target ball in the first space rectangular coordinate system as the origin, taking one of the right-angled sides of the right-angled triangle at the target position as the X axis, and taking the other right-angled side of the right-angled triangle at the target position as the Y axis, a second space rectangular coordinate system corresponding to the target position is established, wherein the target target ball is the target ball whose center point is located at the right-angled vertex of the right-angled triangle, and the target position is the position of the sliding platform on the motion shaft when the coordinates of the center point of the target ball in the first space rectangular coordinate system are measured using the laser tracker; any one of all the second space rectangular coordinate systems is selected as a reference second space rectangular coordinate system, and the rest are reference second space rectangular coordinate systems; for each reference second space rectangular coordinate system, a first rotation angle of the reference second space rectangular coordinate system relative to the X axis of the reference second space rectangular coordinate system is calculated, and the first rotation angle is taken as the roll angle, a second rotation angle of the reference second space rectangular coordinate system relative to the Y axis of the reference second space rectangular coordinate system is calculated, and the second rotation angle is taken as the pitch angle, and a third rotation angle of the reference second space rectangular coordinate system relative to the Z axis of the reference second space rectangular coordinate system is calculated, and the third rotation angle is taken as the yaw angle.

2. The method of claim 1, wherein The distance between every two adjacent target positions is less than or equal to the minimum target distance, the target positions are positions of the sliding platform on the motion axis when measuring the coordinates of the center point of the target ball in the first spatial rectangular coordinate system using a laser tracker, the number of the target positions is greater than or equal to a preset number, and the target positions include positions of two ends of the motion axis and distances between every two adjacent preset station scales on the motion axis.

3. The method of claim 1, wherein The first spatial rectangular coordinate system is established, including: Taking a right-angle vertex of the current right-angled triangle as an origin, taking one of right-angle sides of the current right-angled triangle as an X axis, and taking another right-angle side of the current right-angled triangle as a Y axis, the first spatial rectangular coordinate system is established.

4. The method of claim 1, wherein When the performance parameter is a repeated positioning accuracy, the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using a laser tracker, including: a. Moving the sliding platform to a first random position on the motion axis, wherein the first random position is any position between one end of the motion axis and a to-be-detected position on the motion axis, and the to-be-detected position is a position on the motion axis that needs to be detected in repeated positioning accuracy; b. Moving the sliding platform to the to-be-detected position on the motion axis, and measuring the coordinates of the center point of the target ball in the first spatial rectangular coordinate system using the laser tracker; c. Moving the sliding platform to a second random position on the motion axis, wherein the second random position is any position between the other end of the motion axis and the to-be-detected position on the motion axis; d. Moving the sliding platform to the to-be-detected position on the motion axis, and measuring the coordinates of the center point of the target ball in the first spatial rectangular coordinate system using the laser tracker; e. Repeating steps a to d a preset number of times.

5. The method of claim 1, wherein When the performance parameter is the orthogonality, the motion axis includes a first motion axis and a second motion axis, and the first motion axis and the second motion axis intersect; the coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using the laser tracker when the sliding platform is at different positions on the motion axis, including: The first coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using the laser tracker when the sliding platform is at different positions on the first motion axis, and the second coordinates of the center point of the target ball in the first spatial rectangular coordinate system are measured using the laser tracker when the sliding platform is at different positions on the second motion axis; The performance parameter of the motion axis is determined according to the coordinates of the center point of the target ball in the first spatial rectangular coordinate system, including: The first coordinates are fitted to obtain a first straight line, and the second coordinates are fitted to obtain a second straight line; An angle between the first straight line and the second straight line is calculated, and the angle is taken as the orthogonality.

6. A performance testing device for a moving shaft, characterized by The motion shaft is loaded with a sliding platform capable of moving along the motion shaft, and a target ball is fixed on the sliding platform, and the device comprises: A coordinate system establishing module is configured to establish a first space rectangular coordinate system; A coordinate measuring module is configured to measure coordinates of a center point of the target ball in the first space rectangular coordinate system using a laser tracker; A calculating module is configured to determine a performance parameter of the motion shaft according to the coordinates of the center point of the target ball in the first space rectangular coordinate system; When the performance parameter is a motion attitude parameter or straightness or orthogonality, the motion attitude parameter comprises a yaw angle, a pitch angle and a roll angle; and the coordinate measuring module is further configured to: measure the coordinates of the center point of the target ball in the first space rectangular coordinate system using the laser tracker when the sliding platform is at different positions on the motion shaft; The target ball fixed on the sliding platform comprises three target balls, and the center points of the three target balls are distributed in a right-angled triangle on the sliding platform, and one of the right-angled sides of the right-angled triangle is parallel to the moving direction of the sliding platform along the motion shaft; When the performance parameter is the motion attitude parameter, the calculating module is further configured to: for each target position, establish a second space rectangular coordinate system corresponding to the target position, taking the coordinates of a center point of a target target ball in the first space rectangular coordinate system at the target position as an origin, taking one of the right-angled sides of the right-angled triangle at the target position as an X axis, and taking the other right-angled side of the right-angled triangle at the target position as a Y axis, wherein the target target ball is a target ball whose center point is located at a right-angled vertex of the right-angled triangle, and the target position is a position of the sliding platform on the motion shaft when the coordinates of the center point of the target ball in the first space rectangular coordinate system are measured using the laser tracker; select any one of all the second space rectangular coordinate systems as a reference second space rectangular coordinate system, and the rest as reference second space rectangular coordinate systems; for each reference second space rectangular coordinate system, calculate a first rotation angle of an X axis of the reference second space rectangular coordinate system relative to the reference second space rectangular coordinate system as the roll angle, a second rotation angle of a Y axis of the reference second space rectangular coordinate system relative to the reference second space rectangular coordinate system as the pitch angle, and a third rotation angle of a Z axis of the reference second space rectangular coordinate system relative to the reference second space rectangular coordinate system as the yaw angle.

7. An electronic device, comprising: comprise: a processor, a storage medium and a bus, the storage medium stores machine readable instructions executable by the processor, when the electronic device is running, the processor and the storage medium communicate through the bus, and the processor executes the machine readable instructions to perform the steps of the performance test method of the motion shaft as claimed in any one of claims 1 to 5.

8. A computer-readable storage medium, characterized in that, The computer readable storage medium stores a computer program, and the computer program performs the steps of the performance test method of the motion shaft according to any one of claims 1 to 5 when executed by the processor.

Citation Information

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