A multi-stage adjustable constant temperature and humidity chamber for testing silicon-based thin films

Abstract

The present application discloses a constant temperature and humidity chamber for testing silicon-based thin films with multi-stage adjustment, which belongs to the field of temperature and humidity control technology. It mainly includes a test box and a control device installed on one side of the test box; the control device includes a temperature control tube fixedly installed on one side of the test box, a humidity control tube and a rotating wheel located inside the temperature control tube, the temperature control tube is used to allow external air to enter the test box after passing through the rotating wheel, a heating device is provided in the humidity control tube, which is used to allow the air in the test box to pass through the rotating wheel after heating and be discharged, and a driving device for driving the rotating wheel to rotate is installed in the temperature control tube. The present application's constant temperature and humidity chamber for testing silicon-based thin films with multi-stage adjustment can achieve the effect of ensuring the stability of the test box environment.

Description

Technical Field

[0001] The present application relates to the technical field of temperature and humidity control, and in particular to a multi-stage adjustable constant temperature and humidity chamber for testing silicon-based thin films. Background Art

[0002] When testing silicon-based thin films, it is necessary to simulate environments with different temperatures and humidities. The existing simulation method mainly controls the temperature and humidity in a closed room or test box. The simulation results in the room are more accurate, but the cost is higher and the working environment will be unfavorable for long-term work of the staff. Although the simulation in the test box is lower in cost and has less impact on the working environment, the simulation results are easily distorted.

[0003] Therefore, it is necessary to provide a multi-level adjustable constant temperature and humidity chamber for silicon-based thin film testing to solve the above problems. Summary of the invention

[0004] The inventors found through research that when simulating in a closed test box, due to the small space, if the silicon-based film changes, it is easy to cause the air in the test box to change, resulting in an inaccurate simulation environment. Therefore, in order to ensure accurate testing in the test box, it is necessary to constantly ventilate the test box and keep the environment stable at all times.

[0005] Based on the above problems existing in the prior art, the purpose of the embodiments of the present application is to provide a multi-level adjustable constant temperature and humidity chamber for silicon-based thin film testing, so as to achieve the effect of ensuring the stability of the test chamber environment.

[0006] The technical solution adopted by the present application to solve its technical problem is: a multi-stage adjustable constant temperature and humidity chamber for testing silicon-based thin films, comprising a test chamber and a control device installed on one side of the test chamber;

[0007] The control device includes a temperature control tube fixedly installed on one side of the test box, a humidity control tube and a rotating wheel located inside the temperature control tube. The temperature control tube is used to allow external air to pass through the rotating wheel and enter the test box. A heating device is provided in the humidity control tube to allow the air in the test box to be heated and then discharged through the rotating wheel. A driving device for driving the rotating wheel to rotate is installed in the temperature control tube.

[0008] The beneficial effects of the present application are as follows: the present application provides a multi-stage adjustable constant temperature and humidity chamber for testing silicon-based thin films, which adopts an industrial dehumidification wheel to allow the air in the test chamber to be heated and then pass through the wheel, taking away moisture while heating the wheel. When the wheel rotates and enters the temperature control tube, it heats the passing outside air and removes moisture, so that the outside air can continuously ventilate the test chamber while controlling the temperature and humidity, thereby ensuring the stability of the simulated environment.

[0009] In addition to the above-described objects, features and advantages, the present invention has other objects, features and advantages. The present invention will be further described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The accompanying drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0011] In the attached picture:

[0012] Figure 1 It is an overall schematic diagram of a multi-stage adjustable constant temperature and humidity chamber for testing silicon-based thin films in this application;

[0013] Figure 2 for Figure 1 Figure 1 is a schematic diagram of a rear view of the test box;

[0014] Figure 3 for Figure 2 A schematic cross-sectional view of the middle temperature control tube;

[0015] Figure 4 for Figure 3 Schematic diagram of the exploded view of the middle temperature control tube;

[0016] Figure 5 for Figure 2 A partial cross-sectional schematic diagram of a middle air intake pipe;

[0017] Among them, the reference numerals in the figure are:

[0018] 1. Test box; 11. Air inlet; 12. Air outlet; 13. Temperature and humidity detector;

[0019] 2. Control device; 21. Temperature control tube; 211. Air inlet pipe; 2111. Slider slot; 2112. Slider; 2113. Telescopic rod; 2114. Connecting slot; 212. Exhaust pipe; 213. Rotor slot; 22. Humidity control tube; 221. Heating tube; 2211. Motor housing; 2212. Motor; 2213. Nozzle; 222. Dehumidification tube; 2221. Fan plate; 2222. Output pipe; 23. Rotor; 24. Control panel; 25. Air pump. DETAILED DESCRIPTION

[0020] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0021] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0022] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchanged where appropriate, so as to describe the embodiments of the present invention described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0023] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0024] like Figure 1-5 As shown, the present application provides a multi-stage adjustable constant temperature and humidity chamber for silicon-based thin film testing, including a test chamber 1 and a control device 2 installed on one side of the test chamber 1.

[0025] The control device 2 includes a temperature control tube 21 fixedly installed on one side of the test box 1 , a humidity control tube 22 and a rotating wheel 23 located inside the temperature control tube 21 , and a control panel 24 located on one side of the test box 1 .

[0026] The rotor 23 is filled with a hygroscopic material, such as a molecular sieve desiccant, and has holes for airflow to pass through.

[0027] The temperature control tube 21 includes an air inlet pipe 211 and an exhaust pipe 212 connected front and back, a runner groove 213 is formed between the air inlet pipe 211 and the exhaust pipe 212, and the runner 23 is located inside the runner groove 213. One end of the air inlet pipe 211 is connected to the external air, and one end of the exhaust pipe 212 is connected to the inside of the test box 1.

[0028] A slider groove 2111 is provided inside one end of the air intake pipe 211 close to the wheel groove 213, a slider 2112 is slidably connected inside the slider groove 2111, a telescopic rod 2113 is provided between the slider 2112 and one end of the slider groove 2111, a connecting groove 2114 is formed on the side of the slider groove 2111 facing the inner wall of the air intake pipe 211, and the telescopic rod 2113 is electrically connected to the control panel 24.

[0029] The humidity control pipe 22 includes a heating pipe 221 fixedly installed inside the exhaust pipe 212 and a dehumidification pipe 222 fixedly installed inside the intake pipe 211. The heating pipe 221 and the dehumidification pipe 222 are both fan-shaped, and the pipe openings on one side of the heating pipe 221 and the dehumidification pipe 222 are opposite to each other and are both fitted with both sides of the rotating wheel 23. The connecting groove 2114 is located inside the dehumidification pipe 222.

[0030] A motor housing 2211 is fixedly installed at the bottom of the heating tube 221, and a motor 2212 is fixedly installed in the motor housing 2211. The output shaft of the motor 2212 extends through the motor housing 2211 and is fixedly connected to the center of the rotating wheel 23. The motor 2212 is electrically connected to the control panel 24. A nozzle 2213 is provided at the top of the heating tube 221. The nozzle 2213 pipeline is connected to a water tank, and a water pump is provided in the pipeline. The water pump is electrically connected to the control panel 24.

[0031] At least two fan-shaped plates 2221 are installed at one end of the dehumidification pipe 222 close to the wheel 23. The fan-shaped plates 2221 are slidably connected to each other and can be unfolded in a fan shape. The bottom of the fan-shaped plate 2221 is rotatably connected to the bottom end of the dehumidification pipe 222. The fan-shaped plate 2221 at one end away from the wheel 23 is fixedly connected to the front end of the dehumidification pipe 222. The top of the fan-shaped plate 2221 at the other end passes through the connecting groove 2114 and is fixedly connected to the slider 2112. An output pipe 2222 is provided at one end of the dehumidification pipe 222 away from the wheel 23, and the output pipe 2222 extends to the outside of the air inlet pipe 211.

[0032] An air pump 25 is fixedly installed on one side of the test box 1 , the air outlet of the air pump 25 is connected to one end of the heating pipe 221 by a pipeline, and a heating plate is arranged in the pipeline, and the air pump 25 and the heating plate are both electrically connected to the control panel 24 .

[0033] At least one air inlet 11 and at least one air outlet 12 are provided inside the test box 1. The air inlet 11 is connected to one end of the exhaust pipe 212, and the air outlet 12 is connected to the suction end of the air pump 25. A temperature and humidity detector 13 is also installed in the test box 1, and the temperature and humidity detector 13 is electrically connected to the control panel 24.

[0034] In this embodiment, when testing the silicon-based film, the silicon-based film is placed inside the test box 1, and the required temperature and humidity range are set through the control panel 24. The control panel 24 first drives the air pump 25 to operate, and the air pump 25 sucks out the air in the test box 1 through the air outlet 12. The test box 1 tends to become a negative pressure state. Therefore, the external air is sucked through the air inlet 11 and the temperature control tube 21. The external air must pass through the rotor 23 on the way through the temperature control tube 21. Since the rotor 23 is made of hygroscopic material, it can absorb moisture in the air, thereby reducing the humidity when the external humidity is high.

[0035] When the air pump 25 is running, the control panel 24 starts the heating plate and the motor 2212. The heating plate heats the airflow sucked by the air pump 25 to become high-temperature gas on the way to the humidity control tube 22. The high-temperature gas needs to flow out of the humidity control tube 22, so it will first blow from the heating tube 221 to the rotating wheel 23. Since the motor 2212 drives the rotating wheel 23 to rotate, the various parts of the rotating wheel 23 will enter the humidity control tube 22 after absorbing moisture in the temperature control tube 21. The high-temperature gas is used to heat the rotating wheel 23, and the high-temperature gas will rotate the rotating wheel 23. The moisture absorbed by the wheel 23 evaporates and enters the dehumidification pipe 222 and is discharged together with the moisture. At the same time, part of the rotor 23 located in the humidity control pipe 22 is heated. After the heated rotor 23 is dried up, it will enter the temperature control pipe 21 again, allowing the air flowing through the temperature control pipe 21 to cool the rotor 23. The rotor 23 can continue to absorb moisture in the air and transfer heat to the air flowing through the temperature control pipe 21, thereby increasing the air temperature and finally increasing the temperature in the test box 1, thereby achieving the effect of controlling the temperature during silicon-based film testing.

[0036] When the humidity in the test box 1 is insufficient, the control panel 24 controls the telescopic rod 2113 to extend, and the telescopic rod 2113 then drives the fan-shaped plate 2221 to expand into the dehumidification pipe 222 through the slider 2112. Figure 5 As shown. By controlling the length of the extension of the telescopic rod 2113 and the unfolded area of ​​the fan-shaped plate 2221, the rotating wheel 23 in the humidity control tube 22 will evaporate some of the water first. After being blocked by the fan-shaped plate 2221, since one side is blocked and ventilation is impossible, the remaining water will be retained, but it can still be heated. The excess water will not be absorbed by the rotating wheel 23 after it returns to the temperature control tube 21, so the air entering the test box 1 retains more humidity, thereby increasing the humidity during the silicon-based film test.

[0037] If the humidity requirement is still not met, the control panel 24 absorbs water through the water pump and sprays it out at the nozzle 2213. The sprayed water is blown to the rotating wheel 23 by the airflow and absorbed by the rotating wheel 23. The excess water is not absorbed and will be carried away by the airflow and discharged from the dehumidification pipe 222, thereby preventing water from directly flowing into the test box 1. Since the rotating wheel 23 itself has more water at this time, the water evaporates quickly when it is transferred from the high-temperature humidity control pipe 22 to the low-temperature temperature control pipe 21. The humidity in the test box 1 is increased to achieve the effect of controlling the humidity during the silicon-based film test.

[0038] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0039] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0040] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0041] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-level adjustable constant temperature and humidity chamber for testing silicon-based thin films, characterized in that: It includes a test box and a control device installed on one side of the test box; The control device includes a temperature control tube fixedly mounted on one side of the test box, a humidity control tube and a rotating wheel located inside the temperature control tube, the temperature control tube is used to allow external air to enter the test box after passing through the rotating wheel, a heating device is arranged inside the humidity control tube, and is used to allow the air in the test box to be discharged after being heated through the rotating wheel, and a driving device for driving the rotating wheel to rotate is installed inside the temperature control tube; The temperature control pipe includes an air intake pipe and an exhaust pipe connected front and back, a runner groove is formed between the air intake pipe and the exhaust pipe, the runner is located inside the runner groove, one end of the air intake pipe is connected to the outside air, and one end of the exhaust pipe is connected to the inside of the test box; The humidity control pipe includes a heating pipe fixedly installed inside the exhaust pipe and a dehumidification pipe fixedly installed inside the intake pipe, the heating pipe and the dehumidification pipe are both fan-shaped, the pipe openings of one side of the heating pipe and the dehumidification pipe are opposite, and both are in contact with the two sides of the rotating wheel; The top of the heating pipe is provided with a nozzle, the nozzle pipe is connected to a water tank, and a water pump is provided in the pipe; At least two fan-shaped plates are installed at one end of the dehumidification pipe close to the rotating wheel, and the fan-shaped plates are slidably connected to each other and can be unfolded in a fan shape. The bottom of the fan-shaped plate is rotatably connected to the bottom end of the dehumidification pipe, and the fan-shaped plate at one end away from the rotating wheel is fixedly connected to the front end of the dehumidification pipe; A slider groove is provided inside one end of the air intake pipe close to the wheel groove, a slider is slidably connected inside the slider groove, a telescopic rod is provided between the slider and one end of the slider groove, a connecting groove is formed on the side of the slider groove facing the inner wall of the air intake pipe, and the top end of the fan-shaped plate close to one end of the wheel passes through the connecting groove and is fixedly connected to the slider.

2. A multi-level adjustable constant temperature and humidity chamber for testing silicon-based thin films according to claim 1, characterized in that: An output pipe is arranged at one end of the dehumidification pipe away from the rotating wheel, and the output pipe extends to the outside of the air inlet pipe.

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