Ion extraction system, ion extraction optics, and ion extraction method
By using movable ion extraction optics in plasma-assisted processing and adjusting the slit distance and angle, the problem of uneven ion angular distribution under low power conditions was solved, resulting in more efficient ion beam current and processing uniformity.
CN115244644BActive Publication Date: 2026-05-29APPLIED MATERIALS INC
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2021-02-11
- Publication Date
- 2026-05-29
Smart Images
Figure CN115244644B_ABST
Abstract
Ion extraction systems, ion extraction optics, and ion extraction methods are disclosed. In one aspect, an ion extraction optic can include an extraction plate including a first opening and a second opening, and a first beam stop extending over the first opening, and a second beam stop extending over the second opening. Each of the first beam stop and the second beam stop can include an inner slit defined by a first distance between an inner edge and the extraction plate, and an outer slit defined by a second distance between an outer edge and the extraction plate, where the first beam stop and the second beam stop are movable to change at least one of the first distance and the second distance. As a result, extraction by the inner slit and the outer slit of ion beamlets characterized by a similar average angle can be achieved.
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