Mask transmission device and mask transmission system

Abstract

The present application relates to the technical field of semiconductor production equipment, and more specifically, to a mask transmission device and a mask transmission system, wherein the motor is installed on the robot arm, the motor includes a main body and a transmission rod installed on the main body, the mask fork is connected to the transmission rod of the motor, the main body is connected to the robot arm through the first elastic member, the first trigger member is installed on the main body, the first sensor is installed on the robot arm, so that the main body can overcome the elastic force of the first elastic member and pivot relative to the robot arm in the first direction, and at the same time, the first trigger member triggers the first sensor, the first sensor and the motor are both connected to the control unit in communication; the first direction is the circumference of the transmission rod. The purpose of the present application is to provide a mask transmission device and a mask transmission system for at least one technical problem described in the background technology.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor production equipment, and in particular, to a mask transmission device and a mask transmission system. Background Art

[0002] As the core module of large-scale semiconductor process equipment, the transmission performance and functional indicators of the mask transmission system directly affect the efficiency, production capacity and product quality of the process equipment. The mask transmission system has a compact structure, and ensuring the safety of the mask is the core indicator of mask transmission. In the process of the robot taking and placing the mask, due to the limitations of space size and working conditions, accidents are inevitable. In order to ensure the safety of the mask and prevent the mask from being damaged due to accidental collision during the process of the robot taking and placing the mask, it is necessary to set a mask anti-collision mechanism for the robot. Summary of the invention

[0003] The purpose of the present application is to provide a mask transmission device and a mask transmission system in view of at least one technical problem described in the background technology.

[0004] In order to achieve the above objectives, this application adopts the following technical solutions:

[0005] One aspect of the present application provides a mask transmission device, including a robotic arm, a motor, a mask fork, a first elastic member, a first trigger member, a first sensor and a control unit; the motor is installed on the robotic arm, the motor includes a main body and a transmission rod installed on the main body, the mask fork is connected to the transmission rod of the motor, the main body is connected to the robotic arm through the first elastic member, the first trigger member is installed on the main body, and the first sensor is installed on the robotic arm, so that the main body can overcome the elastic force of the first elastic member and pivot relative to the robotic arm in a first direction, and at the same time, the first trigger member triggers the first sensor, and the first sensor and the motor are both communicatively connected to the control unit; the first direction is the circumferential direction of the transmission rod.

[0006] Optionally, it includes two first trigger members and two first sensors, the two first trigger members are arranged in the first direction, and the two first sensors are arranged in the first direction, and the two first trigger members are located between the two first sensors in the first direction; and / or the two first sensors are located between the two first trigger members in the first direction.

[0007] The beneficial effect of this technical solution is that, when the main body of the motor is pivoting, when a first trigger member is close to a first sensor, another first trigger member must be away from another first sensor. When a first trigger member triggers a first sensor, the control unit can know the direction of the pivoting of the active part, and then know which side of the mask fork has been hit.

[0008] Optionally, two first elastic members are included, the two first elastic members are arranged in the first direction, and the first elastic members are tension springs, so that the direction of the pulling force exerted on the main body by one of the first elastic members is opposite to the direction of the pulling force exerted on the main body by another first elastic member.

[0009] The beneficial effect of this technical solution is that it enables the main body to obtain appropriate pulling force when pivoting to both sides, so that the main body can return to its original position after a collision.

[0010] Optionally, it further includes a motor connecting flange, the main body is fixedly connected to the motor connecting flange, and the first elastic member and the first trigger member are both installed on the motor connecting flange.

[0011] The beneficial effect of this technical solution is that the motor is usually a general product purchased on the market, and it is generally difficult to add a first trigger member and a first elastic member to the motor. However, by adding a motor connecting flange, it is more convenient to specially provide the first trigger member and the first elastic member on the motor connecting flange.

[0012] Optionally, it also includes a bearing, a bearing rod, a bearing rod nut and a coupling, the bearing rod including a first connecting end and a second connecting end, the first connecting end passes through the robotic arm in the second direction, the second connecting end is fixedly connected to the transmission rod through the coupling, and the second connecting end is connected to the mask fork; the bearing and the bearing rod nut are both located on the side of the robotic arm facing the motor, the bearing and the bearing rod nut are sequentially mounted on the bearing rod, a step is formed on the bearing rod, the bearing rod nut is threadedly connected to the bearing rod to clamp the above-mentioned bearing and the robotic arm between the bearing rod nut and the step, and the second direction is the axial direction of the transmission rod.

[0013] The beneficial effect of this technical solution is that the bearing rod nut is threadedly connected to the bearing rod to clamp the bearing and the robotic arm between the bearing rod nut and the step, thereby limiting the alignment position between the motor and the robotic arm in the second direction.

[0014] Optionally, it includes a mask fork assembly, which includes a mask fork connecting flange, a second elastic member, a second sensor and the mask fork, the mask fork is mounted on the mask fork connecting flange via the second elastic member, so that the mask fork can overcome the elastic force of the second elastic member and move in the second direction, the mask fork connecting flange is fixedly connected to the transmission rod, the second sensor is mounted on the mask fork connecting flange, and a gap is left between the second sensor and the mask fork in the second direction, the second sensor is a proximity sensor, the second sensor is communicatively connected to the control unit, and the second direction is the axial direction of the transmission rod.

[0015] The beneficial effect of this technical solution is that when the mask fork deviates from its position in the second direction due to external collision, the mask fork will trigger the second sensor, and the control unit will obtain the signal of the second sensor, control the motor to stop power output, and prevent the mask fork from continuing to rotate and colliding with the outside world again, thereby protecting the mask on the mask fork. The elastic force of the second elastic member acting on the mask fork can gradually restore the mask fork to its initial position in the process of the second elastic member restoring its initial shape after the collision, so that it can be reused in the next collision.

[0016] Optionally, the mask fork assembly further includes a guide pin, the second elastic member is sleeved on the guide pin, the guide pin is fixed to the mask fork, and in the second direction the guide pin is slidably engaged with a through hole on the mask fork connecting flange.

[0017] The beneficial effect of this technical solution is that the movement of the mask fork relative to the fork connecting flange can be guided by the guide pin, thereby making the movement more stable.

[0018] Optionally, the mask fork assembly also includes a fork limiting flange and two second sensors, the fork limiting flange is parallel to and opposite to the fork connecting flange, the fork limiting flange, the mask fork and the fork connecting flange are arranged in sequence in the second direction, the guide pin is fixed to the mask fork, one end of the guide pin is slidingly matched with the through hole on the fork connecting flange in the second direction, the other end of the guide pin is slidingly matched with the through hole on the fork limiting flange, the second elastic member is arranged between the fork connecting flange and the mask fork, the second elastic member is also arranged between the fork limiting flange and the mask fork, the second sensor is installed on the fork limiting flange, and a gap is left between the second sensor and the mask fork.

[0019] The beneficial effect of this technical solution is that, after the mask fork collides with the outside world, whether it moves upward or downward, it can trigger the corresponding second sensor, and the direction of the collision suffered by the mask fork can be known through the communication connection between the control unit and the corresponding second sensor. Regardless of whether the collision causes the mask fork to move upward or downward, there is a corresponding second elastic member to restore the mask fork to its original position for repeated use.

[0020] Optionally, the mask fork assembly also includes two locking adjustment nuts and a limit pin fixed to the mask fork, one of the locking adjustment nuts is located on the side of the mask fork connecting flange away from the mask fork, and the other locking adjustment nut is located on the side of the mask fork limiting flange away from the mask fork, and both ends of the limit pin in the second direction are threaded ends, one threaded end passes through the mask fork connecting flange and is threadedly connected to a locking adjustment nut, and the other threaded end passes through the mask fork limiting flange and is threadedly connected to a locking adjustment nut, and the limit pin is slidably fitted with the mask fork connecting flange and the mask fork limiting flange.

[0021] The beneficial effect of this technical solution is that: in this way, the limit pin can move in the second direction together with the mask fork, and the position of the lock nut on the limit pin can be adjusted by two locking means to limit the degree of compression of the fork limit flange and the fork connecting flange on the second elastic member.

[0022] Another aspect of the present application provides a mask transfer system, including the mask transfer device provided in the embodiments of the present application.

[0023] The technical solution provided by this application can achieve the following beneficial effects:

[0024] The mask transmission device and mask transmission system provided in the embodiment of the present application, when placing the mask, the mask is placed in the mask fork, and the mask insert first forms a protection around the mask; when the mask fork needs to be rotated, the transmission rod of the motor installed on the mechanical arm drives the mask fork to pivot relative to the mechanical arm. In this process, the driving force of the motor on the mask fork is difficult to cause the first elastic member to produce substantial elastic deformation, the main body of the motor remains in an inconvenient position, and the first trigger member does not trigger the first sensor; during the rotation of the mask fork, if it collides with an external object, the transmission rod of the motor is difficult to drive the first elastic member to rotate relative to the mechanical arm at the moment of collision. The mask fork continues to rotate, causing the driving force output by the motor to drive the main body to rotate relative to the mechanical arm. At this time, the main body overcomes the elastic force of the first elastic member and rotates. The first elastic member undergoes elastic deformation, and the first trigger member triggers the first sensor. After the control unit obtains the first sensor signal, it controls the motor to stop outputting power and stop driving the mask fork to continue rotating to prevent the collision from further intensifying. After the motor stops outputting power, the first elastic member gradually returns to its initial state and returns the first trigger member to the position for triggering the first sensor, so that the first elastic member, the first trigger member and the first sensor can be reused in the next collision. In this way, when the mask fork rotates after obtaining the mask, if it encounters a collision with an external object, the mask transmission device will turn off the motor in time to prevent the collision from further intensifying, thereby protecting the mask. After a collision, the first elastic member, the first trigger member and the first sensor can be reused without the need to perform disassembly and assembly operations again, saving time and effort.

[0025] The additional technical features and advantages of the present application will be more clearly explained in the following description, or can be understood through the specific practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the specific implementation methods of the present application, the following is a brief introduction to the drawings required for the description of the specific implementation methods. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 A partial three-dimensional structural schematic diagram of an implementation manner of a mask transfer device provided in an embodiment of the present application;

[0028] Figure 2 A partial top view structural schematic diagram of an implementation manner of a mask transfer device provided in an embodiment of the present application;

[0029] Figure 3 A partial cross-sectional structural schematic diagram of an implementation manner of a mask transfer device provided in an embodiment of the present application.

[0030] Reference numerals:

[0031] 01-first elastic member; 02-motor;

[0032] 03-motor connection flange; 04-mask fork;

[0033] 05-fork connecting flange; 06-mechanical arm;

[0034] 07-first trigger; 08-first sensor;

[0035] 09-coupling; 10-bearing rod nut;

[0036] 11-bearing; 12-bearing rod;

[0037] 13-second sensor; 14-limiting flange;

[0038] 15-second elastic member; 16-locking and adjusting lock nut;

[0039] 17-limit pin; 18-guide pin;

[0040] 19-main body; 20-transmission rod. DETAILED DESCRIPTION

[0041] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0042] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0043] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0044] like Figures 1 to 3 As shown, one aspect of the present application provides a mask transmission device, including a robotic arm 06, a motor 02, a mask fork 04, a first elastic member 01, a first trigger member 07, a first sensor 08 and a control unit; the motor 02 is installed on the robotic arm 06, the motor 02 includes a main body 19 and a transmission rod 20 installed on the main body 19, the mask fork 04 is connected to the transmission rod 20 of the motor 02, the main body 19 is connected to the robotic arm 06 through the first elastic member 01, the first trigger member 07 is installed on the main body 19, and the first sensor 08 is installed on the robotic arm 06, so that the main body 19 can overcome the elastic force of the first elastic member 01 and pivot relative to the robotic arm 06 in a first direction, and at the same time, the first trigger member 07 triggers the first sensor 08, and the first sensor 08 and the motor 02 are both communicatively connected to the control unit; the first direction is the circumferential direction of the transmission rod 20.

[0045] In the embodiment of the present application, the first sensor 08 is preferably a photoelectric sensor.

[0046] The mask transmission device provided in the embodiment of the present application, when placing the mask, the mask is placed in the mask fork 04, and the mask insert first forms a protection around the mask; when the mask fork 04 needs to be rotated, the transmission rod 20 of the motor 02 installed on the mechanical arm 06 drives the mask fork 04 to pivot relative to the mechanical arm 06. During this process, the driving force of the motor 02 on the mask fork 04 is difficult to cause the first elastic member 01 to produce substantial elastic deformation, the main body 19 of the motor 02 remains in an inconvenient position, and the first trigger member 07 does not trigger the first sensor 08; during the rotation of the mask fork 04, if it collides with an external object, the transmission rod 20 of the motor 02 is difficult to drive the mask insert at the moment of collision. Continue to rotate, causing the driving force output by the motor 02 to drive the main body 19 to rotate relative to the robot arm 06. At this time, the main body 19 overcomes the elastic force of the first elastic member 01 and rotates. The first elastic member 01 undergoes elastic deformation, and the first trigger member 07 triggers the first sensor 08. After the control unit obtains the signal from the first sensor 08, it controls the motor 02 to stop outputting power and stop driving the mask fork 04 to continue rotating, thereby preventing the collision from further aggravating. After the motor 02 stops outputting power, the first elastic member 01 gradually returns to its initial state, and the first trigger member 07 returns to the position for triggering the first sensor 08, so that the first elastic member 01, the first trigger member 07 and the first sensor 08 can be reused in the next collision. In this way, when the mask fork 04 obtains the mask and rotates, if it encounters a collision with an external object, the mask transmission device will shut down the motor 02 in time to prevent the collision from further aggravating, thereby protecting the mask. After a collision, the first elastic member 01, the first trigger member 07 and the first sensor 08 can be reused without the need for re-disassembly and assembly operations, thus saving time and effort.

[0047] Optionally, the mask transmission device provided in the embodiment of the present application includes two first trigger members 07 and two first sensors 08, the two first trigger members 07 are arranged in the first direction, and the two first sensors 08 are arranged in the first direction, and the two first trigger members 07 are located between the two first sensors 08 in the first direction; and / or, the two first sensors 08 are located between the two first trigger members 07 in the first direction. In this way, when the main body 19 of the motor 02 is pivoting, when one first trigger member 07 is close to one first sensor 08, the other first trigger member 07 must be away from the other first sensor 08. When one first trigger member 07 triggers one first sensor 08, the control unit can know the direction of the active part pivoting, and then know which side of the mask fork 04 has been hit.

[0048] Optionally, the mask transfer device provided in the embodiment of the present application includes two first elastic members 01, the two first elastic members 01 are arranged in the first direction, and the first elastic member 01 is a tension spring, so that the direction of the pulling force of one first elastic member 01 on the main body 19 is opposite to the direction of the pulling force of another first elastic member 01 on the main body 19. This enables the main body 19 to obtain appropriate pulling force when pivoting to both sides, so that the main body 19 can return to its original position after a collision.

[0049] Optionally, the mask transmission device provided in the embodiment of the present application further includes a motor connection flange 03, the main body 19 is fixedly connected to the motor connection flange 03, and the first elastic member 01 and the first trigger member 07 are both installed on the motor connection flange 03. The motor 02 is usually a general product purchased on the market, and it is generally difficult to add the first trigger member 07 and the first elastic member 01 to the motor 02. By adding the motor connection flange 03, it is more convenient to install the first trigger member 07 and the first elastic member 01 on the motor connection flange 03.

[0050] Optionally, the mask transmission device provided in the embodiment of the present application further includes a bearing 11, a bearing rod 12, a bearing rod nut 10 and a coupling 09, the bearing rod 12 includes a first connecting end and a second connecting end, the first connecting end passes through the robotic arm 06 in the second direction, the second connecting end is fixedly connected to the transmission rod 20 through the coupling 09, and the second connecting end is connected to the mask fork 04; the bearing 11 and the bearing rod nut 10 are both located on the side of the robotic arm 06 facing the motor 02, the bearing 11 and the bearing rod nut 10 are sequentially mounted on the bearing rod 12, a step is formed on the bearing rod 12, the bearing rod nut 10 is threadedly connected to the bearing rod 12 to clamp the above-mentioned bearing 11 and the robotic arm 06 between the bearing rod nut 10 and the step, and the second direction is the axial direction of the transmission rod 20. The bearing rod nut 10 is threadedly connected to the bearing rod 12 to clamp the bearing 11 and the robot arm 06 between the bearing rod nut 10 and the step, thereby limiting the relative position between the motor 02 and the robot arm 06 in the second direction.

[0051] Optionally, the mask transmission device provided in the embodiment of the present application includes a mask fork assembly, wherein the mask fork assembly includes a mask fork connecting flange 05, a second elastic member 15, a second sensor 13 and the mask fork 04, the mask fork 04 is installed on the mask fork connecting flange 05 through the second elastic member 15, so that the mask fork 04 can overcome the elastic force of the second elastic member 15 and move in the second direction, the mask fork connecting flange 05 is fixedly connected to the transmission rod 20, the second sensor 13 is installed on the mask fork connecting flange 05, and a gap is left between the second sensor 13 and the mask fork 04 in the second direction, the second sensor 13 is a proximity sensor, the second sensor 13 is communicatively connected to the control unit, and the second direction is the axial direction of the transmission rod 20. In this way, when the mask fork 04 deviates from the position in the second direction due to the collision of the outside world, the mask fork 04 will trigger the second sensor 13, and the control unit obtains the signal of the second sensor 13, controls the motor 02 to stop the power output, and prevents the mask fork 04 from continuing to rotate and colliding with the outside world again, thereby protecting the mask on the mask fork 04. The elastic force of the second elastic member 15 acting on the mask fork 04 can gradually restore the mask fork 04 to its initial position in the process of restoring the initial shape of the second elastic member 15 after the collision, so that it can be reused in the next collision. In the embodiment of the present application, the mask fork 04 is indirectly connected to the transmission rod 20 through the mask fork connecting flange 05. Preferably, the mask fork connecting flange 05 and the transmission rod 20 are connected through the bearing rod 12, and the second connecting end of the bearing rod 12 is fixed to the mask fork connecting flange 05 by a screw.

[0052] Optionally, the mask fork assembly further includes a guide pin 18, the second elastic member 15 is sleeved on the guide pin 18, the guide pin 18 is fixed to the mask fork 04, and in the second direction the guide pin 18 is slidably matched with a through hole on the mask fork connecting flange 05. The guide pin 18 can guide the movement of the mask fork 04 relative to the mask fork connecting flange 05, thereby making the movement more stable.

[0053] Optionally, the mask fork assembly also includes a fork limiting flange 14 and two second sensors 13. The fork limiting flange 14 is parallel to and opposite to the fork connecting flange 05. In the second direction, the fork limiting flange 14, the mask fork 04 and the fork connecting flange 05 are arranged in sequence. The guide pin 18 is fixed to the mask fork 04. In the second direction, one end of the guide pin 18 slides with the through hole on the fork connecting flange 05, and the other end of the guide pin 18 slides with the through hole on the fork limiting flange 14. The second elastic member 15 is arranged between the fork connecting flange 05 and the mask fork 04, and the second elastic member 15 is also arranged between the fork limiting flange 14 and the mask fork 04. The second sensor 13 is installed on the fork limiting flange 14, and a gap is left between the second sensor 13 and the mask fork 04. In this way, after the mask fork 04 collides with the outside world, whether it moves upward or downward, the corresponding second sensor 13 can be triggered, and the direction of the collision of the mask fork 04 can be known through the communication connection between the control unit and the corresponding second sensor 13. Regardless of whether the collision causes the mask fork 04 to move upward or downward, the corresponding second elastic member 15 restores the mask fork 04 to its initial position for repeated use. In the embodiment of the present application, the guide pin 18 is preferably interference-fitted with the mask fork 04.

[0054] Optionally, the mask fork assembly also includes two locking adjustment nuts 16 and a limit pin 17 fixed to the mask fork 04, one of the locking adjustment nuts 16 is located on the side of the mask fork connecting flange 05 away from the mask fork 04, and the other locking adjustment nut 16 is located on the side of the mask fork limiting flange 14 away from the mask fork 04, and both ends of the limit pin 17 in the second direction are threaded ends, one threaded end passes through the mask fork connecting flange 05 and is threadedly connected to one of the locking adjustment nuts 16, and the other threaded end passes through the mask fork limiting flange 14 and is threadedly connected to one of the locking adjustment nuts 16, and the limit pin 17 is slidably fitted with the mask fork connecting flange 05 and the mask fork limiting flange 14. In this way, the limit pin 17 can move in the second direction together with the mask fork 04, and the position of the lock nut 16 on the limit pin 17 can be adjusted by two locking to limit the degree of compression of the mask fork limit flange 14 and the mask fork connecting flange 05 on the second elastic member 15. In the embodiment of the present application, the second elastic member 15 is a compression spring.

[0055] Another aspect of the present application provides a mask transfer system, including the mask transfer device provided in the embodiment of the present application.

[0056] The mask transmission system provided in the embodiment of the present application adopts the mask transmission device provided in the embodiment of the present application. When placing the mask, the mask is placed in the mask fork 04, and the mask insert first forms a protection around the mask; when the mask fork 04 needs to be rotated, the transmission rod 20 of the motor 02 installed on the mechanical arm 06 drives the mask fork 04 to pivot relative to the mechanical arm 06. During this process, the driving force of the motor 02 on the mask fork 04 is difficult to cause the first elastic member 01 to produce substantial elastic deformation, the main body 19 of the motor 02 remains in an inconvenient position, and the first trigger member 07 does not trigger the first sensor 08; during the rotation of the mask fork 04, if it collides with an external object, the transmission rod 20 of the motor 02 at the moment of collision 20 is difficult to drive the mask fork 04 to continue to rotate, so the driving force output by the motor 02 is changed to drive the main body 19 to rotate relative to the robot arm 06. At this time, the main body 19 overcomes the elastic force of the first elastic member 01 and rotates. The first elastic member 01 undergoes elastic deformation, and the first trigger member 07 triggers the first sensor 08. After the control unit obtains the signal from the first sensor 08, it controls the motor 02 to stop outputting power and stop driving the mask fork 04 to continue rotating, so as to prevent the collision from further aggravating. After the motor 02 stops outputting power, the first elastic member 01 gradually returns to its initial state, and makes the first trigger member 07 return to the position for triggering the first sensor 08, so that the first elastic member 01, the first trigger member 07 and the first sensor 08 can be reused in the next collision. In this way, when the mask fork 04 obtains the mask and rotates, if it encounters a collision with an external object, the mask transmission device will shut down the motor 02 in time to prevent the collision from further aggravating, thereby protecting the mask. After a collision, the first elastic member 01, the first trigger member 07 and the first sensor 08 can be reused without the need for re-disassembly and assembly operations, thus saving time and effort.

[0057] In order to better illustrate the mask transmission device and mask transmission system provided by the present application, the present application also provides an application example of the mask transmission device and mask transmission system. In the application example, the limit pin 17 can also be called a vertical limit pin, the second elastic member 15 can also be called a compression spring, the first elastic member 01 can also be called a tension spring, and the first trigger member 07 can also be called a sensor trigger sheet. The application example is as follows:

[0058] As the core module of large-scale semiconductor process equipment, the transmission performance and functional indicators of the mask transmission system directly affect the efficiency, production capacity and product quality of the process equipment. The mask transmission system has a compact structure, and ensuring the safety of the mask is the core indicator of mask transmission. In the process of the robot taking and placing the mask, due to the limitations of space size and working conditions, accidents are inevitable. In order to ensure the safety of the mask and structure and prevent accidents such as collisions during the process of the robot taking and placing the mask, the robot's anti-collision mechanism is particularly important.

[0059] Disadvantages of existing technology:

[0060] 1. Unable to self-recover. The conventional robot anti-collision mechanism is installed between the plate fork and the robot. The plate fork guide block is guided into the guide groove by spring tension. When a collision occurs, the plate fork guide block is separated from the guide groove to avoid damage to the mask and structure. However, it is more complicated to restore the structure after the collision. It is necessary to dismantle the protective structure and maintain the inner and outer plate libraries before the mask guide block can be manually reinstalled into the guide groove. The entire maintenance process is time-consuming, labor-intensive, and cumbersome, and other hidden dangers may occur during the maintenance process.

[0061] 2. Low repeatability. When the robot fork anti-collision is triggered, it is difficult to ensure the consistency of the fork with the original state after the recovery state. The repeatability depends on the error between the guide mechanism and the spring. When the error is large, it will directly affect the repeat positioning accuracy.

[0062] 3. Low safety. Conventional anti-collision mechanisms have a significantly better anti-collision protection effect in the rotation direction than in the vertical direction. When the robot fork collides vertically, a large force is required to trigger the anti-collision mechanism, which is less effective in protecting the safety of the mask and structure.

[0063] This application example designs a method and system for protecting the manipulator from vertical and rotational collisions. The system fully guarantees the manipulator's anti-collision safety during abnormal operation through two sets of anti-collision mechanisms in the vertical and rotational directions.

[0064] The vertical anti-collision system ensures the vertical anti-collision safety of the manipulator fork through a guide mechanism and six sets of compression spring pre-tightening mechanisms. At the same time, an interlocking proximity sensor is set to ensure that the manipulator immediately triggers signal feedback when a vertical collision occurs.

[0065] The rotation anti-collision system tightens the rotation motor through two sets of tension springs to provide pre-tightening force to the motor rotation direction, ensuring the normal torque output of the rotation motor during operation. At the same time, two sets of interlocking photoelectric sensors are set to ensure that the manipulator immediately triggers signal feedback when a collision occurs in the rotation direction. After an abnormal collision occurs during operation, the direction of the abnormal collision can be roughly determined based on the position of the trigger sensor, and the feedback information resolution is high.

[0066] Compared with conventional anti-collision mechanisms, this system can effectively improve the safety and stability of the mask transmission process. At the same time, after an abnormal operation and collision, the preload force provided by this system can ensure that the robot fork recovers to its original state and the positioning repeatability after recovery, providing strong protection for abnormal reset of the equipment.

[0067] Mask fork: The carrier that carries the mask is connected between the fork connection flange and the fork limit flange through the guide pin. The six sets of compression springs installed on both sides of the guide pin provide preload force to ensure that the mask fork has the degree of freedom under the vertical guide action. Two sets of locking adjustment lock nuts are installed on both sides of the vertical limit pin to provide vertical limit for the mask fork.

[0068] Fork connecting flange: Serves as the carrier for connecting the mask fork and the bearing rod, and cooperates with the guide pin with a small gap to provide a guiding function, provide a limit for the compression spring, and provide a limit for the locking adjustment nut.

[0069] Fork limit flange: It cooperates with the guide pin with a small gap to provide a guiding function, provide a limit for the compression spring, and provide a limit for the locking adjustment nut.

[0070] Guide pin: It is installed and fixed in the corresponding pin hole of the mask fork with transition fit to provide guidance for the vertical displacement of the fork.

[0071] Vertical limit pin: Fixed on the mask fork by bolt connection, and both ends are threadedly connected with the locking adjustment nut.

[0072] Locking and adjustment lock nut: fixed at both ends of the vertical limit pin through threaded connection, it limits the vertical gap between the plate fork connecting flange, the plate fork limit flange and the mask plate fork respectively. By adjusting the vertical displacement of the locking and adjustment lock nut, the above gap size can be adjusted, thereby adjusting the size of the compression spring preload.

[0073] Compression spring: provides vertical pre-tightening force between the mask fork connecting flange and the fork limiting flange.

[0074] Bearing rod: The bearing is installed with the robot arm, and the bearing rod is locked with a nut thread connection, which has rotational freedom. The upper end is fixed to the motor through a coupling, and the lower end is fixed to the fork connection flange through screws.

[0075] Robotic arm: The actuator of the robot, install one end of two sets of tension springs. Install two sets of proximity sensors.

[0076] Bearing: The outer side is installed in conjunction with the mechanical arm, and the inner side is installed in conjunction with the bearing rod and is vertically pre-tightened and fixed by the 11 bearing rod lock nut.

[0077] Bearing rod lock nut: It is threadedly connected to the bearing rod and is fixed vertically to the bearing rod by pre-loading the inner ring of the bearing.

[0078] Motor: The driving component for the rotation of the manipulator, providing power for the rotation of the mask fork. It is installed and fixed on the motor connecting flange through bolts, and the motor shaft end is connected and fixed to the bearing rod through a coupling.

[0079] Coupling: It is a carrier that connects and fixes the bearing rod to the motor shaft end.

[0080] Motor connection flange: connected and fixed to the motor by bolts. The side end is connected to the tension spring. It is connected and fixed to the sensor trigger sheet.

[0081] Tension spring: Both ends are installed between the motor connection flange and the robot arm. The spring tension preload provides the motor with a rotational driving force and provides rotational freedom for its motor shaft. When a collision occurs, the mask fork overcomes the preload of the tension spring and moves axially. After the collision, the preload can ensure that it recovers to its original state.

[0082] Proximity sensor: Two groups are installed and fixed at the corresponding positions on the fork connection flange and the fork limit flange. The distance between the trigger end of the two groups of proximity sensors and the mask fork is calibrated to the critical value. When the mask fork is displaced vertically, one of the proximity sensors will be triggered immediately. The direction of the collision can be roughly determined based on the position information of the trigger sensor. The signal is fed back to the manipulator control unit, and the manipulator movement can be terminated in time to ensure the safety of the mask and structure.

[0083] Sensor trigger sheet: Two groups are fixed on the motor connection flange, serving as the trigger medium of the photoelectric sensor. The sensor trigger sheet and the above sensor are calibrated to the trigger critical value. When the mask fork rotates and displaces, one group of proximity sensors will be immediately triggered, and the direction of the collision can be roughly determined based on the position information of the trigger sensor. The signal is fed back to the manipulator control unit, and the manipulator movement can be terminated in time to ensure the safety of the mask and structure.

[0084] Photoelectric sensor: Installed and fixed on the robotic arm to provide signal feedback for the rotational displacement of the mask fork.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A mask transfer device, characterized in that: It includes a mechanical arm, a motor, a mask fork, a first elastic member, a first trigger member, a first sensor and a control unit; The motor is installed on the mechanical arm, the motor includes a main body and a transmission rod installed on the main body, the mask fork is connected to the transmission rod of the motor, the main body is connected to the mechanical arm through the first elastic member, the first trigger member is installed on the main body, and the first sensor is installed on the mechanical arm, so that the main body can overcome the elastic force of the first elastic member and pivot relative to the mechanical arm in the first direction, and at the same time, the first trigger member triggers the first sensor, and the first sensor and the motor are both connected to the control unit in communication; the first direction is the circumference of the transmission rod; The mask transmission device also includes a bearing, a bearing rod, a bearing rod nut and a coupling, the bearing rod including a first connecting end and a second connecting end, the first connecting end passes through the robotic arm in the second direction, the second connecting end is fixedly connected to the transmission rod through the coupling, and the second connecting end is connected to the mask fork; the bearing and the bearing rod nut are both located on the side of the robotic arm facing the motor, the bearing and the bearing rod nut are sequentially mounted on the bearing rod, a step is formed on the bearing rod, the bearing rod nut is threadedly connected to the bearing rod to clamp the above-mentioned bearing and the robotic arm between the bearing rod nut and the step, and the second direction is the axial direction of the transmission rod.

2. The mask transfer device according to claim 1, characterized in that: The method comprises two first trigger members and two first sensors, wherein the two first trigger members are arranged in the first direction, and the two first sensors are arranged in the first direction, and the two first trigger members are located between the two first sensors in the first direction; and / or the two first sensors are located between the two first trigger members in the first direction.

3. The mask transfer device according to claim 2, characterized in that: It includes two first elastic members, which are arranged in the first direction, and are tension springs, so that the direction of the pulling force exerted on the main body by one of the first elastic members is opposite to the direction of the pulling force exerted on the main body by another first elastic member.

4. The mask transfer device according to claim 1, characterized in that: It also includes a motor connecting flange, the main body is fixedly connected to the motor connecting flange, and the first elastic member and the first trigger member are both installed on the motor connecting flange.

5. The mask transfer device according to any one of claims 1 to 4, characterized in that: It includes a mask fork assembly, which includes a fork connecting flange, a second elastic member, a second sensor and the mask fork. The mask fork is installed on the fork connecting flange through the second elastic member so that the mask fork can overcome the elastic force of the second elastic member and move in the second direction. The fork connecting flange is fixedly connected to the transmission rod. The second sensor is installed on the fork connecting flange, and a gap is left between the second sensor and the mask fork in the second direction. The second sensor is a proximity sensor, which is communicatively connected to the control unit. The second direction is the axial direction of the transmission rod.

6. The mask transfer device according to claim 5, characterized in that: The mask fork assembly also includes a guide pin, the second elastic member is sleeved on the guide pin, the guide pin is fixed to the mask fork, and in the second direction the guide pin is slidably matched with a through hole on the mask fork connecting flange.

7. The mask transfer device according to claim 6, characterized in that: The mask fork assembly also includes a fork limiting flange and two second sensors. The fork limiting flange is parallel to and opposite to the fork connecting flange. In the second direction, the fork limiting flange, the mask fork and the fork connecting flange are arranged in sequence. The guide pin is fixed to the mask fork. In the second direction, one end of the guide pin slides with the through hole on the fork connecting flange, and the other end of the guide pin slides with the through hole on the fork limiting flange. The second elastic member is arranged between the fork connecting flange and the mask fork, and the second elastic member is also arranged between the fork limiting flange and the mask fork. The second sensor is installed on the fork limiting flange, and a gap is left between the second sensor and the mask fork.

8. The mask transfer device according to claim 7, characterized in that: The mask fork assembly also includes two locking adjustment nuts and a limit pin fixed to the mask fork, one of the locking adjustment nuts is located on the side of the mask fork connecting flange away from the mask fork, and the other locking adjustment nut is located on the side of the mask fork limiting flange away from the mask fork, and both ends of the limit pin in the second direction are threaded ends, one of the threaded ends passes through the mask fork connecting flange and is threadedly connected to a locking adjustment nut, and the other threaded end passes through the mask fork limiting flange and is threadedly connected to a locking adjustment nut, and the limit pin is slidably fitted with the mask fork connecting flange and the mask fork limiting flange.

9. A mask transfer system, characterized in that: Comprising the mask transfer device as described in any one of claims 1-8.

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