A coplanarity detection device and a detection method

Abstract

The present application discloses a coplanarity detection device and a detection method. The coplanarity detection method includes: fixedly arranging a product to be detected at a preset fixed position on a preset bearing surface; selecting a first reference point on a first surface of the detection product facing away from the bearing surface, and obtaining a second reference point with the shortest distance from the first surface to the bearing surface and a third reference point with the longest distance; establishing a reference plane based on the first reference point, the second reference point, and the third reference point; wherein the first reference point, the second reference point, and the third reference point are all located on the reference plane; and determining the coplanarity of the first surface by using the difference between the maximum distance and the minimum distance between the first surface and the reference plane. Through the above solution, the coplanarity of the product to be detected can be quickly and accurately detected.

Description

Technical Field

[0001] This application belongs to the technical field of coplanarity detection devices, and particularly relates to a coplanarity detection device and a detection method. Background Art

[0002] In the field of printed circuit board production and processing technology, the coplanarity of a printed circuit board is used as a common detection parameter for the quality detection of the printed circuit board. Among them, it is usually necessary to use a specific coplanarity test device to detect the coplanarity of the printed circuit board. However, the existing coplanarity test devices are costly; and directly detecting the coplanarity of the printed circuit board manually using a measuring microscope will result in a problem of low accuracy of the detection result. Summary of the Invention

[0003] This application provides a coplanarity detection device and a detection method to solve the technical problem that directly detecting the coplanarity of a printed circuit board manually using a measuring microscope will result in a low accuracy of the detection result.

[0004] To solve the above technical problem, a technical solution adopted by this application is: to provide a coplanarity detection method, the coplanarity detection method including:

[0005] Fix the product to be detected at a preset fixed position on a preset bearing surface;

[0006] Select a point on the first surface of the detection product facing away from the bearing surface as a first reference point, and obtain a second reference point with the shortest distance from the first surface to the bearing surface, and a third reference point with the longest distance;

[0007] Establish a reference plane based on the first reference point, the second reference point, and the third reference point; wherein, the first reference point, the second reference point, and the third reference point are all located on the reference plane;

[0008] Determine the coplanarity of the first surface using the difference between the maximum distance and the minimum distance between the first surface and the reference plane.

[0009] Optionally, the selecting a point on the first surface of the detection product facing away from the bearing surface as a first reference point includes:

[0010] Select a point in the edge area of the first surface as the first reference point;

[0011] Establish a three-dimensional coordinate system with the first reference point as the coordinate origin, and the plane formed by the horizontal direction and the vertical direction of the three-dimensional coordinate system is parallel to the bearing surface.

[0012] Optionally, obtaining the second reference point with the shortest distance from the first surface to the bearing surface and the third reference point with the longest distance includes:

[0013] Using a detection device to respectively identify the second reference point with the shortest distance from the first surface to the bearing surface and the third reference point with the longest distance;

[0014] Respectively obtaining the coordinate parameters of the second reference point and the third reference point in the three-dimensional coordinate system;

[0015] Based on the first reference point, the second reference point, and the third reference point, establishing a reference plane in the three-dimensional coordinates, including;

[0016] Establishing a plane equation of the reference plane according to the coordinate parameters of the first reference point, the second reference point, and the third reference point in the three-dimensional coordinates;

[0017] Using the difference between the maximum distance and the minimum distance between the first surface and the reference plane to determine the coplanarity of the first surface, including:

[0018] Using the coordinate parameters of the points on the first surface and the plane equation of the reference plane to determine the maximum distance and the minimum distance between the first surface and the reference plane;

[0019] Determining the coplanarity of the first surface through the difference between the maximum distance and the minimum distance.

[0020] Optionally, using the coordinate parameters of the points on the first surface and the plane equation of the reference plane to determine the maximum distance and the minimum distance between the first surface and the reference plane, including:

[0021] Using a detection device to select multiple detection points on the first surface;

[0022] Obtaining the distance value between each detection point and the reference plane;

[0023] Determining the maximum distance and the minimum distance between the first surface and the reference plane according to the distance value between each detection point and the reference plane.

[0024] Optionally, obtaining the distance between each detection point and the reference plane and determining the maximum distance and the minimum distance, including:

[0025] Determining the distance value between each detection point and the reference plane according to the coordinate parameters of each detection point and the plane equation of the reference plane;

[0026] The largest of the spacing values is determined as the maximum spacing, and the smallest of the spacing values is determined as the minimum spacing.

[0027] Optionally, determining the maximum distance and the minimum distance between the first surface and the reference plane according to the distance value between each detection point and the reference plane includes:

[0028] Establishing a parameter table according to the coordinate parameters of each of the detection points and the distance value between each of the detection points and the reference plane;

[0029] Select the maximum and minimum values of each spacing value through the parameter table;

[0030] The largest of the spacing values is determined as the maximum spacing, and the smallest of the spacing values is determined as the minimum spacing. The maximum spacing and the minimum spacing are selected from the parameter table.

[0031] Optionally, the plurality of detection points are arranged in an array, and the plurality of detection points are evenly distributed on the first surface.

[0032] Optionally, the coplanarity detection method further includes:

[0033] Respectively fixing other products of the same model as the product to be tested at the preset fixed positions;

[0034] The coplanarity of the product to be inspected is obtained by selecting the difference between the maximum distance and the minimum distance between the surface of the other product facing away from the carrying surface and the reference plane.

[0035] The beneficial effect of the present application is: in the scheme of the present application, by obtaining the first reference point, the second reference point and the third reference point on the first surface of the product to be inspected, and then establishing a reference plane through the three points, the coplanarity of the first surface can be determined by the difference between the maximum spacing and the minimum spacing between the points on the first surface and the reference plane. The coplanarity detection method provided in this embodiment does not require the use of a specific flatness detector, and the coplanarity of the product to be inspected can be quickly and accurately detected only by a commonly used measuring microscope. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0037] Figure 1It is a schematic flowchart of an embodiment of a coplanarity detection method provided by this application;

[0038] Figure 2 It is a schematic structural diagram of an embodiment of a coplanarity detection device provided by this application;

[0039] Figure 3 Is Figure 2 A schematic diagram of the coplanarity detection device establishing a reference plane for the product to be tested. Detailed implementation manners

[0040] Next, the technical solutions in the embodiments of this application will be clearly and completely described with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0041] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of this application, the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the drawings). If the specific posture changes, the directional indications will also change accordingly.

[0042] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of this application, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions appears to be contradictory or unable to be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by this application.

[0043] Please refer to Figure 1 . Figure 1 It is a schematic flowchart of an embodiment of a coplanarity detection method provided by this application.

[0044] The coplanarity detection method specifically includes the following steps:

[0045] S110: Fix the product to be detected at a preset fixed position on a preset bearing surface.

[0046] In this step, a common measuring device can be used to detect the coplanarity of the product to be detected. Among them, the measuring device can specifically be a measuring microscope, such as a two-and-a-half-dimensional measuring instrument, a three-dimensional measuring instrument, etc.

[0047] The product to be detected is usually a printed circuit board component, and usually needs to be fixed at a preset fixed position on a preset bearing surface first.

[0048] S120: Select a point on the first surface of the detected product facing away from the bearing surface as the first reference point, and obtain the second reference point with the closest distance from the first surface to the bearing surface, and the third reference point with the farthest distance.

[0049] After the product to be detected is fixed on the preset bearing surface, a surface of the product to be detected can be selected, so as to detect the coplanarity of this surface.

[0050] Among them, for the convenience of detection, the surface on the side of the product to be detected away from the bearing surface can be defined as the first surface, and the coplanarity of the product to be detected can be determined by detecting the coplanarity of this first surface.

[0051] In this step, after the product to be detected is fixed on the preset bearing surface, three reference points on the first surface can be selected through a measuring microscope.

[0052] Specifically, a point on the edge of the first surface can be identified as the first reference point through a measuring microscope. Then, a plurality of points inside the first surface are scanned and identified through the measuring microscope, so as to identify the second reference point on the first surface with the closest distance to the bearing surface and the third reference point on the first surface with the farthest distance from the bearing surface.

[0053] Among them, optionally, when the product to be detected is a board component with a regular shape such as a printed circuit board, the first reference point can be a point at a certain corner of the first surface of the product to be detected. For example, when the product to be detected is a board component such as a printed circuit board in a rectangular shape, the first surface can be rectangular, and the first reference point can correspondingly be the vertex of any one of the four corners of the rectangle (the vertex is the intersection of the length side and the width side of the rectangle).

[0054] S130: Establish a reference plane based on the coordinates of the first reference point, the second reference point, and the third reference point; among them, the first reference point, the second reference point, and the third reference point are all located on the reference plane.

[0055] After the first reference point, the second reference point, and the third reference point are obtained, a reference plane can be established based on the first reference point, the second reference point, and the third reference point. Among them, the first reference point, the second reference point, and the third reference point are all located on the reference plane.

[0056] In this step, the plane equation of the reference plane can be established by determining the coordinate parameters of the first reference point, the second reference point, and the third reference point.

[0057] Optionally, a three-dimensional coordinate system can be established with the horizontal axis parallel to the bearing surface, the vertical axis parallel to the bearing surface, and the vertical axis perpendicular to the bearing surface. Among them, the coordinates of the first reference point, the second reference point, and the third reference point in this three-dimensional coordinate system can be detected by a measuring microscope.

[0058] Based on the coordinate parameters of the first reference point, the second reference point, and the third reference point in this three-dimensional coordinate system, the plane equation of the reference plane can be calculated.

[0059] Alternatively, for the convenience of calculation, a three-dimensional coordinate system can also be established with the first reference point as the coordinate origin. The plane formed by the horizontal direction (horizontal axis) and the vertical direction (vertical axis) of this three-dimensional coordinate system is parallel to the bearing surface, and the vertical axis of this three-dimensional coordinate system is perpendicular to the bearing surface. In this coordinate system, according to the coordinates (0, 0, 0) of the first reference point, the coordinates (x1, y1, z1) of the second reference point, and the coordinates (x2, y2, z2) of the second reference point, the plane equation AX + BY + Z + D = 0 of the reference plane can be calculated.

[0060] Among them, since the reference plane passes through the first reference point (0, 0, 0), the plane equation of the reference plane can be simplified to AX + BY + Z = 0. Furthermore, the constant values A and B can be calculated according to the equations Ax1 + By1 + z1 = 0 and Ax2 + By2 + z2 = 0, so that the plane equation of the reference plane can be determined.

[0061] S140: Determine the coplanarity of the first surface by using the difference between the maximum distance and the minimum distance between the first surface and the reference plane.

[0062] After obtaining the reference plane, the coplanarity of the first surface can be further determined by the difference between the maximum distance and the minimum distance between the first surface and the reference plane.

[0063] Therefore, in the solution of the present application, by obtaining the first reference point, the second reference point, and the third reference point on the first surface of the product to be detected, and then establishing a reference plane through these three points, the coplanarity of the first surface can be determined by the difference between the maximum distance and the minimum distance from the points on the first surface to the reference plane. The coplanarity detection method provided in this embodiment does not require a specific flatness detector, and the coplanarity of the product to be detected can be quickly and accurately detected only by a common measuring microscope.

[0064] As described in the previous embodiments, it is necessary to respectively identify the second reference point with the closest distance from the first surface to the bearing surface and the third reference point with the farthest distance by using a measuring microscope.

[0065] In this embodiment, a measuring microscope can be used to scan the first surface along a preset trajectory, so as to directly identify and locate the second reference point with the closest distance from the first surface to the bearing surface and the third reference point with the farthest distance.

[0066] Further, after the plane equation of the reference plane is established, a measuring microscope can also be used to obtain the coordinates of multiple detection points on the first surface, and through the coordinate parameters of each detection point and the plane equation of the reference plane, the distance value from each detection point to the reference plane can be calculated.

[0067] Specifically, based on the difference between the maximum value H and the minimum value L of the distance values from multiple detection points to the reference plane, the maximum distance and the minimum distance between the first surface and the reference plane can be determined. Among them, the maximum distance between the first surface and the reference plane is equal to the maximum value H, and the minimum distance between the first surface and the reference plane is equal to the minimum value L. The coplanarity of the first surface can be expressed as H - L.

[0068] Among them, optionally, in this embodiment, for a board-shaped product to be detected such as a printed circuit board, the surface changes are usually continuous. Therefore, multiple detection points can be selected at equal intervals on the first surface of the product to be detected, and the multiple detection points can be multiple detection points at specific positions on the first surface.

[0069] Specifically, in this embodiment, multiple detection points arranged at equal intervals and in an array can be first set on the first surface. The measuring microscope scans and identifies each detection point in turn according to the preset trajectory, so as to confirm the coordinate parameters of each detection point in the three-dimensional coordinate system. Then, through the coordinate parameters of each detection point and the plane equation of the reference plane obtained above, the distance value between each detection point and the reference plane can be directly and quickly confirmed by using the calculation formula for the distance from a point to a plane.

[0070] Among them, optionally, after obtaining the coordinate parameters of each detection point in the three-dimensional coordinate system and confirming the distance value between each detection point and the reference plane, a corresponding parameter table can be established.

[0071] In this parameter table, the coordinate parameters of each detection point on the product to be detected in the three-dimensional coordinate system are stored, and it includes the distance value between each detection point and the reference plane. Among them, the coordinate parameters of each detection point in the three-dimensional coordinate system are set in one-to-one correspondence with the distance value between the detection point and the reference plane.

[0072] Optionally, the maximum and minimum values among the spacing values can be selected through this parameter table; the largest among the individual spacing values is determined as the maximum spacing, and the smallest among the individual spacing values is determined as the minimum spacing. The maximum spacing and the minimum spacing are selected from the parameter table. Further, by subtracting the minimum value among the spacing values from the maximum value among the spacing values, the coplanarity of the first surface can be determined.

[0073] Among them, the parameter table can be an Excel table. By editing the formula in this Excel table, the maximum and minimum values among multiple spacing values can be directly identified, and the difference between the maximum and minimum values can be directly obtained, that is, the coplanarity of the first surface can be obtained.

[0074] In the above embodiments, the product to be tested is not tested. When there are multiple products to be tested in the same batch, the coplanarity of each other product to be tested can be further detected by the above method.

[0075] After the coplanarity detection described in steps S110 to S140 is completed, the product to be tested can be removed from the preset fixed position on the bearing surface, and then other products to be tested can be fixedly arranged at this preset fixed position. Among them, the fixed orientation, fixed position, etc. of other products to be tested are all set to be the same as those of the previous product to be tested.

[0076] Since the design values such as the shape and size of other products to be tested in the same batch are the same, the change trends of the first surfaces of multiple products to be tested in the same batch are close. Therefore, for other products to be tested, the coplanarity detection can be carried out by using the reference average as described above.

[0077] Specifically, for other products to be tested, the coordinate parameters of multiple detection points on the first surface of each other product to be tested can be obtained by using a measuring microscope in the same manner as above, and based on the coordinate parameters of each detection point and the plane equation of the reference plane, the spacing value of each detection point to the reference plane can be calculated. Further, based on the difference between the maximum value H and the minimum value L of the spacing values between the multiple detection points and the reference plane, the maximum spacing and the minimum spacing between the first surface and the reference plane can be determined. Among them, the maximum spacing between the first surface and the reference plane is equal to the maximum value H, and the minimum spacing between the first surface and the reference plane is equal to the minimum value L. That is, the coplanarity of the first surface can be expressed as H - L.

[0078] That is, for multiple products to be tested in the same batch, only when it is necessary to perform coplanarity detection on the first product to be tested, the plane equation of the reference plane is established by obtaining the first reference point, the second reference point and the third reference point on the first surface of the first product to be tested. For other subsequent products to be tested, the distance value from the detection point on each other product to be tested to the reference plane can be determined based on the plane equation of the reference plane corresponding to the first product to be tested and the coordinates of the detection points on each other product to be tested, and the coplanarity of each other product to be tested can be determined quickly and directly. Improve the detection efficiency of the coplanarity of multiple products to be tested in the same batch.

[0079] Likewise, for each product to be tested, a parameter table as described above may be established.

[0080] Furthermore, based on the same inventive concept, the present application also provides a coplanarity detection device. Figure 2 and Figure 3 , Figure 2 is a structural schematic diagram of an embodiment of a coplanarity detection device provided by the present application, Figure 3 yes Figure 2 The coplanarity detection device shown is a schematic diagram of establishing a participating plane for the product to be tested.

[0081] The coplanarity detection device 20 comprises: a detection device 210 and a carrying platform 220. The detection device 210 is disposed toward a carrying surface 221 of the carrying platform 220 to detect the product to be detected carried on the carrying surface 221.

[0082] A preset fixed position is provided on the carrying surface 221 for carrying and fixing the product to be tested.

[0083] The detection device 210 is used to detect the first surface 10 of the product to be detected which is away from the carrying surface; wherein, the detection device 210 is used to select a point on the first surface 10 as the first reference point 101, and obtain the second reference point 102 which is closest to the carrying surface 221, and the third reference point 103 which is farthest away, and establish a reference plane 104 according to the coordinates of the first reference point 101, the second reference point 102 and the third reference point 103; and then obtain the coplanarity of the first surface 10 according to the difference between the maximum spacing and the minimum spacing between the first surface 10 and the reference plane 104.

[0084] The method for obtaining the first reference point 101 , the second reference point 102 , and the third reference point 103 and the method for establishing the reference plane 104 may be specifically referred to above and will not be elaborated herein.

[0085] Similarly, in this embodiment, the plane equation of the reference plane 104 can be obtained by calculating the coordinate parameters of the first reference point 101, the second reference point 102, and the third reference point 103. By obtaining the coordinate parameters of multiple detection points on the first surface 10, and then obtaining the distance value from each detection point to the reference plane 104 according to the coordinate parameters of each detection point and the plane equation of the reference plane 104, the maximum value and the minimum value in the distance values are selected, and the coplanarity of the first surface 10 is obtained according to the difference between the maximum value and the minimum value.

[0086] Optionally, the multiple detection points may be evenly distributed within the first surface 10 and arranged in an array on the first surface 10.

[0087] Correspondingly, the detection device 210 further includes a sensing mechanism and a driving mechanism; the sensing mechanism is arranged facing the bearing surface 221 for detecting the first surface 10 of the product to be detected; the driving mechanism is used to drive the sensing mechanism to move along a preset trajectory so that the sensing mechanism detects multiple detection points on the first surface 10.

[0088] In summary, it is easy for those skilled in the art to understand that the beneficial effect of this application is: in the solution of this application, by obtaining the first reference point, the second reference point, and the third reference point on the first surface of the product to be detected, and then establishing a reference plane through these three points, and through the difference between the maximum distance and the minimum distance from the points on the first surface to the reference plane, the coplanarity of the first surface can be determined. The coplanarity detection method provided in this embodiment does not require a specific flatness detector, and only a common measuring microscope can quickly and accurately detect the coplanarity of the product to be detected.

[0089] The above are only the embodiments of this application, and do not limit the patent scope of this application accordingly. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of this application, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of this application.

Claims

1. A coplanarity detection method, characterized in that, The coplanarity detection method includes: Fixing the product to be detected at a preset fixed position on a preset bearing surface; Selecting a point on the first surface of the detected product facing away from the bearing surface as the first reference point, and obtaining the second reference point with the closest distance from the first surface to the bearing surface and the third reference point with the farthest distance, specifically including: Selecting a point in the edge area of the first surface as the first reference point; using a detection device to respectively identify the second reference point with the closest distance from the first surface to the bearing surface and the third reference point with the farthest distance; Establishing a reference plane based on the first reference point, the second reference point, and the third reference point; wherein, the first reference point, the second reference point, and the third reference point are all located on the reference plane, specifically including: Establishing a three-dimensional coordinate system with the first reference point as the coordinate origin, and the plane formed by the horizontal direction and the vertical direction of the three-dimensional coordinate system is parallel to the bearing surface; respectively obtaining the coordinate parameters of the second reference point and the third reference point in the three-dimensional coordinate system; establishing the plane equation of the reference plane according to the coordinate parameters of the first reference point, the second reference point, and the third reference point in the three-dimensional coordinate; Determining the coplanarity of the first surface by using the difference between the maximum distance and the minimum distance between the first surface and the reference plane, specifically including: Determining the maximum distance and the minimum distance between the first surface and the reference plane by using the coordinate parameters of the points on the first surface and the plane equation of the reference plane; determining the coplanarity of the first surface by the difference between the maximum distance and the minimum distance.

2. The coplanarity detection method according to claim 1, wherein The determination of the maximum distance and the minimum distance between the first surface and the reference plane by using the coordinate parameters of the points on the first surface and the plane equation of the reference plane includes: Selecting a plurality of detection points on the first surface by using a detection device; Obtaining the distance value between each detection point and the reference plane; Determining the maximum distance and the minimum distance between the first surface and the reference plane according to the distance value between each detection point and the reference plane.

3. The coplanarity detection method according to claim 2, wherein The obtaining of the distance between each detection point and the reference plane and the determination of the maximum distance and the minimum distance include: Determining the distance value between each detection point and the reference plane according to the coordinate parameters of each detection point and the plane equation of the reference plane; Determining the maximum value among the respective distance values as the maximum distance, and determining the minimum value among the respective distance values as the minimum distance.

4. The coplanarity detection method according to claim 2, characterized in that, The determination of the maximum distance and the minimum distance between the first surface and the reference plane according to the distance value between each detection point and the reference plane includes: Establishing a parameter table according to the coordinate parameters of each detection point and the distance values between each detection point and the reference plane; Selecting the maximum value and the minimum value among the respective distance values through the parameter table; Determine the largest among the respective spacing values as the maximum spacing, and determine the smallest among the respective spacing values as the minimum spacing. Select the maximum spacing and the minimum spacing from the parameter table.

5. The coplanarity detection method according to claim 3, wherein A plurality of the detection points are arranged in an array, and the plurality of the detection points are evenly distributed on the first surface.

6. The coplanarity detection method according to claim 1, wherein The coplanarity detection method further includes: Fixing other products of the same model as the product to be detected at the preset fixing positions respectively; Obtaining the coplanarity of the product to be detected by calculating the difference between the maximum spacing and the minimum spacing between the surface of the other product facing away from the bearing surface and the reference plane.

7. A coplanarity detection device, characterized in that The coplanarity detection device includes: A bearing platform, including a bearing surface, where the bearing surface is provided with preset fixing positions for bearing and fixing the product to be detected; A detection device, arranged facing the bearing platform, where the detection device is used to detect the first surface of the product to be detected facing away from the bearing surface. Among them, the detection device is used to select a point on the first surface as the first reference point, and obtain a second reference point with the closest distance from the first surface to the bearing surface, and a third reference point with the farthest distance, and establish a reference plane according to the coordinates of the first reference point, the second reference point, and the third reference point. Furthermore, obtain the coplanarity of the first surface by calculating the difference between the maximum spacing and the minimum spacing between the first surface and the reference plane. Specifically, the detection device is used to select a point in the edge area of the first surface as the first reference point; use the detection device to respectively identify the second reference point with the closest distance from the first surface to the bearing surface and the third reference point with the farthest distance; establish a three-dimensional coordinate system with the first reference point as the coordinate origin, and the plane formed by the horizontal direction and the vertical direction of the three-dimensional coordinate system is parallel to the bearing surface; respectively obtain the coordinate parameters of the second reference point and the third reference point in the three-dimensional coordinate system; establish the plane equation of the reference plane according to the coordinate parameters of the first reference point, the second reference point, and the third reference point in the three-dimensional coordinate; use the coordinate parameters of the points on the first surface and the plane equation of the reference plane to determine the maximum spacing and the minimum spacing between the first surface and the reference plane; determine the coplanarity of the first surface through the difference between the maximum spacing and the minimum spacing.

8. The coplanarity detection device according to claim 7, characterized in that, The detection device further includes a sensing mechanism and a driving mechanism; The sensing mechanism is arranged facing the bearing surface for detecting the first surface of the product to be detected facing away from the bearing surface; The driving mechanism is used to drive the sensing mechanism to move along a preset trajectory so that the sensing mechanism detects a plurality of detection points on the first surface.

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