Scanning device and distance measuring device

Abstract

A scanning device includes a first irradiation section, a second irradiation section, a scanning section, a waveguide section, and a detection section. The first irradiation section irradiates a first electromagnetic wave for scanning an object. The second irradiation section irradiates a second electromagnetic wave. The scanning section deflects and outputs the first electromagnetic wave irradiated by the first irradiation section and the second electromagnetic wave irradiated by the second irradiation section. The waveguide section guides at least a part of the second electromagnetic wave output by the scanning section to a direction different from the first electromagnetic wave. The detection section detects the second electromagnetic wave guided to the direction different from the first electromagnetic wave by the waveguide section.

Description

[0001] Cross-reference of related applications

[0002] This application claims priority to Japanese Patent Application No. 2020-49980, filed on March 19, 2020, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This invention relates to scanning devices and ranging devices. Background Technology

[0004] In recent years, devices for obtaining information related to surrounding objects from the detection results of electromagnetic waves have been continuously developed. For example, devices that use lidar to determine the position of objects in images captured by infrared cameras are known (e.g., Patent Document 1). In addition, as scanning devices for scanning electromagnetic waves, there are devices that deflect electromagnetic waves irradiated from the irradiation unit by reflecting them with a mirror (e.g., Patent Document 2).

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2011-220732

[0008] Patent Document 2: Japanese Patent Application Publication No. 2015-132762 Summary of the Invention

[0009] One embodiment of the scanning apparatus includes:

[0010] The first irradiation unit irradiates the first electromagnetic wave used to scan the object;

[0011] The second irradiation unit irradiates the second electromagnetic wave;

[0012] The scanning unit deflects and outputs the first electromagnetic wave irradiated by the first irradiation unit and the second electromagnetic wave irradiated by the second irradiation unit.

[0013] The waveguide section guides at least a portion of the second electromagnetic wave output by the scanning section to a direction different from the first electromagnetic wave; and

[0014] The detection unit detects a second electromagnetic wave that has been guided by the waveguide unit to a direction different from the first electromagnetic wave.

[0015] In addition, one embodiment of the ranging device includes one embodiment of the scanning device.

[0016] In addition, one embodiment of the scanning device includes:

[0017] The scanning section deflects the incoming electromagnetic waves;

[0018] The waveguide separates the electromagnetic wave, which is deflected by the scanning section, into a first electromagnetic wave and a second electromagnetic wave; and

[0019] The detection unit detects the second electromagnetic wave separated by the waveguide unit.

[0020] The detection unit is positioned outside the irradiation range of the first electromagnetic wave, which is separated by the waveguide unit, in the electromagnetic waves deflected by the scanning unit.

[0021] As described above, the means by which the present invention solves the problem have been illustrated using a scanning device and a ranging device. The present invention can be implemented in forms including these, and also in substantially the same methods, procedures, and storage media containing such procedures; it should be understood that the scope of the present invention includes these. Attached Figure Description

[0022] Figure 1 This is a diagram showing a schematic configuration of a scanning device according to one embodiment.

[0023] Figure 2 Observing from another direction Figure 1 A schematic diagram of the scanning device shown.

[0024] Figure 3 Observing from another direction Figure 1 A schematic diagram of the scanning device shown.

[0025] Figure 4 This is a diagram showing a substrate with a detection unit configured according to one embodiment.

[0026] Figure 5 This is a diagram showing a schematic configuration of a comparative example for illustrating the effect of a scanning device according to one embodiment. Detailed Implementation

[0027] In scanning devices that scan electromagnetic waves, for example, a mirror that deflects electromagnetic waves is rotated using an electromechanical conversion element based on micromechanical technology. In such devices, a sensor, such as a photodiode, is sometimes used to detect the deflection of the electromagnetic waves by the rotating mirror in order to detect the swing angle (swing angle). This sensor needs to be positioned to detect the electromagnetic waves deflected by the mirror. Therefore, in scanning devices that scan using electromagnetic waves, the range of electromagnetic waves irradiated (the scannable range) is limited by the placement of the sensor used to detect the swing angle of the mirror. The object of the present invention is to provide a scanning device and a ranging device that can ensure or expand the range of electromagnetic waves irradiated. According to one embodiment, a scanning device and a ranging device that can ensure or expand the range of electromagnetic waves irradiated can be provided. Hereinafter, a scanning device according to one embodiment will be described with reference to the accompanying drawings.

[0028] Figures 1 to 3 This is a diagram showing a schematic configuration of a scanning device according to one embodiment. Figure 1 This is a perspective view showing the schematic configuration of a scanning device according to one embodiment. Figure 2 It shows from and Figure 1 Observing from different directions Figure 1 A schematic diagram (top view) of the scanning device shown. Figure 3 From and Figure 1 and Figure 2 Observing from different directions Figure 1 and Figure 2 A schematic diagram of the scanning device shown (right view).

[0029] exist Figures 1 to 3 In the coordinate axes shown, the positive direction of the X-axis can be parallel to... Figure 2 The right direction corresponds to the x-axis, and the negative x-axis direction can be related to the x-axis. Figure 2 The left direction corresponds to this. Figures 1 to 3 In the coordinate axes shown, the positive direction of the Y-axis can be parallel to... Figure 1 The inward direction (the direction of travel of the electromagnetic wave reflected by the mirror) corresponds to the direction of travel of the electromagnetic wave, and the negative Y-axis direction can be related to... Figure 1 The outward direction corresponds to the middle. Figures 1 to 3 In the coordinate axes shown, the positive direction of the Z-axis can be parallel to... Figure 3 The upward direction corresponds to the Z-axis, and the negative Z-axis direction can be related to the upward direction. Figure 3 The downward direction corresponds to the middle.

[0030] like Figures 1 to 3As shown, a scanning apparatus 1 according to one embodiment may include a substrate 10, a first detection unit 21, a second detection unit 22, a first irradiation unit 31, a second irradiation unit 32, a synthesis unit 40, a scanning unit 50, a waveguide unit 60, and an emission unit 70. The scanning apparatus 1 according to one embodiment may include all of the above-mentioned functional units, or may include functions other than those described above, or may exclude only a portion of the above-mentioned functional units.

[0031] exist Figures 1 to 3 In this description, the aforementioned functional units are sufficiently separated from each other for ease of explanation. When actually constructing a scanning device 1 according to one embodiment, each functional unit constituting the scanning device 1 can be more... Figures 1 to 3 The states shown are more dense. For example, the scanning device 1 can be configured with each functional unit in a small configuration suitable for a size of a few centimeters square.

[0032] exist Figures 1 to 3 In the diagram, the arrows protruding from each functional block represent beams of electromagnetic waves. Additionally, Figures 1 to 3 The functional blocks shown can be appropriately connected, via wired or wireless means, to various functional units that control and / or drive the functional blocks. Figures 1 to 3 In this text, the various functional parts controlling and / or driving each functional block are omitted for ease of explanation. Furthermore, Figures 1 to 3 The functional blocks shown can be appropriately connected to the functional units that supply power to the functional blocks. Figures 1 to 3 The functional parts that supply power to each functional block are omitted for ease of explanation. Figures 1 to 3 The functional blocks shown can be appropriately fixed and / or positioned as follows: Figures 1 to 3 The locations shown are as follows. Figures 1 to 3 Various components for fixing and / or positioning each functional block are omitted for ease of explanation.

[0033] As further explained below, the scanning device 1 of one embodiment can irradiate electromagnetic waves and deflect the irradiated electromagnetic waves before outputting them. At least a portion of the electromagnetic waves deflected by the scanning device 1 can be reflected by a specified object (such as a physical object). The electromagnetic waves reflected by the specified object (reflected waves) can be detected, for example, by an electromagnetic wave detection device. An information acquisition system (e.g., a ranging device) of one embodiment can be configured by including the scanning device 1 of one embodiment and the electromagnetic wave detection device as described above. That is, the ranging device of one embodiment can include the scanning device 1 of one embodiment and can measure the distance to the object. The information acquisition system of one embodiment can employ, for example, LIDAR (Light Detection and Ranging, Laser Imaging Detection and Ranging) technology used in "light detection and ranging" or "laser image detection and ranging". According to the information acquisition system of one embodiment, for example, the distance to an object located at a relatively far distance and / or the properties of the object can be analyzed by measuring the scattered light emitted by a laser irradiated in a pulse shape.

[0034] like Figure 1 and Figure 2 As shown, in the scanning device 1, the substrate 10 can be a substrate in which the X-axis direction is set as the length direction and the Y-axis direction is set as the width direction. Additionally, as... Figure 3 As shown, substrate 10 can be a substrate with thickness in the Z-axis direction. For example... Figures 1 to 3 As shown, the substrate 10 can be fixed parallel to the XY plane in the scanning device 1. Figure 3 As shown, the substrate 10 has a first surface 10A and a second surface 10B. The first surface 10A of the substrate 10 can be a surface of the substrate 10 facing the negative Z-axis direction, that is, a downward-facing surface of the substrate 10. The second surface 10B of the substrate 10 can be a surface of the substrate 10 facing the positive Z-axis direction, that is, an upward-facing surface of the substrate 10. In this way, the substrate 10 can have a second surface 10B, which is opposite to the first surface 10A.

[0035] In one embodiment, the substrate 10 may be, for example, a plate-shaped substrate made of an insulator. Conductor wiring may be arranged on the surface or inside the plate-shaped component made of insulator on the substrate 10. That is, the substrate 10 may be a printed wiring board (PWB) in a state before electronic components are mounted. On the other hand, the substrate 10 may be a printed circuit board (PCB) in which electronic components are soldered onto the printed wiring board and operate as an electronic circuit.

[0036] The substrate 10 can be any substrate defined in JIS C 5603 or IEC 60194. For example, the substrate 10 can be printed circuits, printed wiring, printed circuit boards, printed circuit assemblies, printed wiring boards, or printed boards, etc.

[0037] Hereinafter, it will be assumed that the substrate 10 is a rigid substrate. However, the substrate 10 is not limited to a rigid substrate, and may be, for example, a flex-rigid substrate or a flexible substrate (FPC: Flexible Printed Circuit).

[0038] like Figures 1 to 3 As shown, the substrate 10 may have a passage portion 12. The passage portion 12 of the substrate 10 will be described later.

[0039] like Figure 3 As shown, the first detection unit 21 and the second detection unit 22 can be disposed on the first surface 10A of the substrate 10, that is, the downward-facing surface of the substrate 10. Figure 3 To show the right side of the scanning device 1, only the second detection unit 22 is shown; the first detection unit 21 is not shown. Figure 1 and Figure 2 Since the first detection unit 21 and the second detection unit 22 are located in positions that cannot be seen, the first detection unit 21 and the second detection unit 22 are shown with dashed lines.

[0040] The first detection unit 21 and the second detection unit 22 can detect specified electromagnetic waves. In one embodiment, the first detection unit 21 can detect, for example, visible light incident on itself. In one embodiment, the second detection unit 22 can detect, for example, visible light incident on itself. Figures 1 to 3 In this configuration, the detection surfaces of the first detection unit 21 and the second detection unit 22 for detecting electromagnetic waves can be surfaces facing the negative Z-axis direction, i.e., the downward-facing surfaces of the first detection unit 21 and the second detection unit 22. For example... Figure 1 and Figure 3 As shown, the first detection unit 21 can detect, for example, visible light VL (hereinafter referred to as electromagnetic wave VL) incident into the first detection unit 21. Similarly, the second detection unit 22 can detect, for example, visible light VL incident into the second detection unit 22.

[0041] The first detection unit 21 and the second detection unit 22 can be, for example, photodiodes (PDs) that function as semiconductor diodes for photodetectors. As described later, the first detection unit 21 and the second detection unit 22 can respectively detect electromagnetic waves scanned (deflected) by the scanning unit 50. In this way, the first detection unit 21 and the second detection unit 22 for detecting electromagnetic waves can be provided on the first surface 10A of the substrate 10. The placement of the first detection unit 21 and the second detection unit 22 on the first surface 10A of the substrate 10 will be explained later.

[0042] exist Figures 1 to 3 In the substrate 10 shown, a first detection unit 21 and a second detection unit 22 are provided as two detection units. Hereinafter, when there is no distinction between the first detection unit 21 and the second detection unit 22, they will sometimes be directly referred to as "detection unit 20". In one embodiment, the number of detection units provided on the substrate 10 is not limited to two. For example, in the scanning apparatus 1 of one embodiment, the substrate 10 may include only one detection unit 20, such as either the first detection unit 21 or the second detection unit 22. Alternatively, in the scanning apparatus 1 of one embodiment, the substrate 10 may include three or more detection units 20, such as either the first detection unit 21 or the second detection unit 22. As described above, the detection unit 20 may include a photodiode that detects visible light VL irradiated by the second irradiation unit 32.

[0043] The first irradiation unit 31 can irradiate a predetermined first electromagnetic wave. In one embodiment, the first irradiation unit 31 can irradiate, for example, infrared light, as an electromagnetic wave used to scan a predetermined object. Figure 1 and Figure 2 As shown, the direction in which the first irradiation unit 31 irradiates the first electromagnetic wave can be, for example, the positive X-axis direction, i.e. Figure 2 The right direction in the middle. For example... Figure 1 and Figure 2 As shown, the first irradiation unit 31 can irradiate infrared rays IR (hereinafter referred to as electromagnetic waves IR) in the positive X-axis direction toward, for example, the synthesis unit 40. Therefore, the first irradiation unit 31 can be positioned or fixed so that the infrared rays IR irradiated by the first irradiation unit 31 enter the synthesis unit 40.

[0044] The first irradiation unit 31 can be a semiconductor laser that functions as a laser that emits light by recombination of semiconductors, such as a laser diode (LD) or a diode laser. In this case, the first irradiation unit 31 can include a laser diode that irradiates infrared light as a first electromagnetic wave. The first irradiation unit 31 can irradiate, for example, pulsed electromagnetic waves. Furthermore, the first irradiation unit 31 can be configured in the scanning device 1, for example, as an array of multiple laser diodes.

[0045] The second irradiation unit 32 can irradiate a predetermined second electromagnetic wave. In one embodiment, the second irradiation unit 32 can irradiate, for example, visible light, as an electromagnetic wave used to detect the irradiation direction (i.e., the swing angle of the reflector) of the scanning electromagnetic wave. Figures 1 to 3 As shown, the direction in which the second irradiation unit 32 irradiates the second electromagnetic wave can be, for example, the positive Y-axis direction, i.e. Figure 1 The inward direction within. For example... Figures 1 to 3 As shown, the second irradiation unit 32 can, for example, irradiate visible light VL towards the combining unit 40 in the positive Y-axis direction. Therefore, the second irradiation unit 32 can be positioned and / or fixed so that the visible light VL irradiated by the second irradiation unit 32 enters the combining unit 40. In addition, the visible light VL can be, for example, red to improve visibility.

[0046] The second irradiation unit 32 can be a semiconductor laser that functions as a laser that emits light using the recombination of semiconductors, such as a laser diode (LD) or a diode laser. Alternatively, the second irradiation unit 32 can be a light-emitting diode (LED) that irradiates visible light. Thus, the second irradiation unit 32 can include a laser diode that irradiates visible light as a second electromagnetic wave. The second irradiation unit 32 can irradiate, for example, ordinary light.

[0047] The combining unit 40 outputs two electromagnetic waves incident from different directions in a predetermined direction. Specifically, the combining unit 40 can combine two electromagnetic waves by aligning the optical axes of the first electromagnetic wave incident from the first irradiation unit 31 and the second electromagnetic wave incident from the second irradiation unit 32. Furthermore, the combining unit 40 can output the combined electromagnetic wave to the scanning unit 50. Figure 1 and Figure 2 As shown, the combining unit 40 can combine infrared light IR input from the first irradiation unit 31 and visible light VL input from the second irradiation unit 32, and output the combined electromagnetic waves IR and VL to the scanning unit 50. Therefore, the combining unit 40 can be positioned and / or fixed in such a way that infrared light IR irradiated from the first irradiation unit 31 is incident on it. Furthermore, the combining unit 40 can be positioned and / or fixed in such a way that visible light VL irradiated from the second irradiation unit 32 is incident on it. In this way, the combining unit 40 can be positioned such that the first electromagnetic wave (infrared light IR) irradiated by the first irradiation unit 31 and the second electromagnetic wave (visible light VL) irradiated by the second irradiation unit 32 are incident on it. Further, the combining unit 40 can be positioned and / or fixed in such a way that the combined electromagnetic waves IR and VL are incident on the scanning unit 50.

[0048] The combining unit 40 may include, for example, a prism or a cold mirror. The combining unit 40 can be configured in any way, as long as it can ensure that the first electromagnetic wave irradiated from the first irradiation unit 31 and the second electromagnetic wave irradiated from the second irradiation unit 32 travel in the same direction and are output in a predetermined direction. In this way, the combining unit 40 can have the function of aligning the travel direction of the first electromagnetic wave (infrared IR) with the travel direction of the second electromagnetic wave (visible light VL).

[0049] exist Figures 1 to 3 In this process, the combining unit 40 can combine the first electromagnetic wave irradiated by the first irradiation unit 31 and the second electromagnetic wave irradiated by the second irradiation unit 32 into a coaxial electromagnetic wave, and output it as a coaxial electromagnetic wave in a predetermined direction. The combining unit 40 is not necessarily required to combine the first electromagnetic wave irradiated by the first irradiation unit 31 and the second electromagnetic wave irradiated by the second irradiation unit 32 into a coaxial electromagnetic wave. However, it is preferable that the first electromagnetic wave and the second electromagnetic wave travel in the same direction. Figures 1 to 3 In this process, such as the first electromagnetic wave and the second electromagnetic wave irradiated from the first irradiation unit 31 and the second irradiation unit 32, the combining unit 40 combines the electromagnetic waves irradiated from mutually orthogonal directions. Furthermore, in Figures 1 to 3 In this process, the combining unit 40 allows the first electromagnetic wave irradiated from the first irradiation unit 31 to pass through, and reflects the second electromagnetic wave irradiated from the second irradiation unit 32 in the direction in which the first electromagnetic wave passes through. Thus, in the combining unit 40, the first and second electromagnetic waves have the same direction of travel and are combined. The combining unit 40 can output the combined electromagnetic wave in the same direction as the first electromagnetic wave irradiated from the first irradiation unit 31, i.e., the positive X-axis direction. It should be noted that the combining unit 40 does not necessarily require the two electromagnetic waves to have the same direction of travel; it is sufficient that it outputs the first electromagnetic wave irradiated from the first irradiation unit 31 to the scanning unit 50 and the second electromagnetic wave irradiated from the second irradiation unit 32 to the scanning unit 50.

[0050] The scanning unit 50 deflects and outputs electromagnetic waves input from the synthesis unit 40. The scanning unit 50 may include, for example, a mirror that deflects the incident electromagnetic waves. The mirror of the scanning unit 50 may include, for example, a MEMS (Micro Electromechanical Systems) mirror, a polygon mirror, and a current mirror. Hereinafter, the case where the mirror of the scanning unit 50 includes a MEMS mirror will be described.

[0051] like Figures 1 to 3 As shown, the scanning unit 50 has a rotation axis parallel to the Z-axis, and the scanning unit 50 rotates about this rotation axis in the left-right direction. Here, the rotation is not necessarily a circumferential motion; for example, it may partially include a swaying motion (e.g., less than one revolution). Figure 1 and Figure 2As shown, the scanning unit 50 can rotate in the direction indicated by arrow S.

[0052] like Figure 1 and Figure 2 As shown, the scanning unit 50 can rotate as indicated by arrow S, causing the electromagnetic waves IR and VL input from the synthesis unit 40 to deflect, for example, the waveguide unit 60. Figures 1 to 3 As shown, the trajectories of the electromagnetic waves IR and VL, deflected by the scanning unit 50, can be contained within a plane parallel to the XY plane. Figure 1 and Figure 2 As shown, the scanning unit 50 can be positioned to allow electromagnetic waves IR and VL irradiated from the combining unit 40 to enter. Furthermore, the scanning unit 50 can be positioned to allow electromagnetic waves IR and VL, which are deflected by the scanning unit 50, to enter the waveguide unit 60.

[0053] In this way, the scanning unit 50 can vary and output the first electromagnetic wave (infrared IR) irradiated by the first irradiation unit 31 and the second electromagnetic wave (visible light VL) irradiated by the second irradiation unit 32. In addition, the scanning unit 50 can scan the first electromagnetic wave (infrared IR) and the second electromagnetic wave (visible light VL) output from the synthesis unit 40.

[0054] The waveguide 60 can reflect visible light from the incident electromagnetic waves while allowing infrared light to pass through. That is, the waveguide 60 allows the first electromagnetic wave (infrared IR) irradiated by the first irradiation unit 31 to pass through, and reflects the second electromagnetic wave (visible light VL) irradiated by the second irradiation unit 32. The waveguide 60 may include, for example, a cold light mirror. In this way, the waveguide 60 allows the infrared IR irradiated by the first irradiation unit 31 to pass through, and reflects the visible light VL irradiated by the second irradiation unit 32. The waveguide 60 can be configured arbitrarily, as long as it allows the first electromagnetic wave irradiated by the first irradiation unit 31 to pass through and reflects the second electromagnetic wave irradiated by the second irradiation unit 32.

[0055] like Figures 1 to 3 As shown, the waveguide 60 allows infrared radiation IR (or at least a portion of infrared radiation IR) from the electromagnetic waves IR and VL incident from the scanning section 50 to pass through. Additionally, as... Figures 1 to 3 As shown, the waveguide 60 reflects the visible light VL (or at least a portion of the visible light VL) in the electromagnetic waves IR and VL incident from the scanning unit 50.

[0056] like Figure 1 and Figure 3As shown, the waveguide 60 can be configured with a predetermined angle θ tilted from a plane parallel to the XY plane. By tilting at this angle θ, the waveguide 60 can reflect the visible light VL (or at least a portion of the electromagnetic wave VL) from the electromagnetic waves IR and VL incident from the scanning unit 50 towards the positive Z-axis. In this way, the waveguide 60 can direct at least a portion of the second electromagnetic wave (visible light VL) deflected by the scanning unit 50 in a direction different from the first electromagnetic wave (infrared IR).

[0057] like Figures 1 to 3 As shown, the waveguide 60 can be positioned and / or fixed such that electromagnetic waves IR and VL, scanned (deflected) by the scanning unit 50, are incident upon it. Furthermore, the waveguide 60 can be positioned and / or fixed such that the second electromagnetic wave (visible light VL) reflected by the waveguide 60 is directed toward the substrate 10. As described above, a first detection unit 21 and a second detection unit 22 are disposed on the first surface 10A of the substrate 10. Therefore, by positioning the waveguide 60 in an appropriate position, the electromagnetic wave VL scanned by the scanning unit 50 can be directed toward at least one of the first detection unit 21 and the second detection unit 22. In this way, the detection unit 20 can detect the second electromagnetic wave VL directed by the waveguide 60 in a direction different from the first electromagnetic wave (infrared IR).

[0058] The emission unit 70 can emit at least a portion of the first electromagnetic wave (infrared IR) scanned by the scanning unit 50 from the scanning device 1. More specifically, the emission unit 70 can emit the first electromagnetic wave (infrared IR) from the first electromagnetic wave (infrared IR) and the second electromagnetic wave (visible light VL) scanned by the scanning unit 50 that has passed through the waveguide unit 60.

[0059] The emission section 70 can be made of, for example, glass or acrylic to allow all of the first electromagnetic wave (infrared IR) to pass through. Alternatively, the emission section 70 can allow at least a portion of the first electromagnetic wave (infrared IR) to pass through only the portion that emits it. In this case, the portion of the emission section 70 other than the portion that emits the first electromagnetic wave (infrared IR) may not allow at least a portion of the first electromagnetic wave to pass through. In this way, the emission section 70 can emit the first electromagnetic wave (infrared IR) output from the scanning section 50. In this case, the waveguide section 60 can be positioned along the path of the first electromagnetic wave (infrared IR) output from the scanning section 50 until it is emitted from the emission section 70.

[0060] As described above, in the scanning device 1, the infrared IR rays irradiated from the first irradiation unit 31 are deflected by the scanning unit 50. The infrared IR rays deflected by the scanning unit 50 are emitted from the scanning device 1 through the waveguide unit 60 and the emission unit 70, and can scan objects located in the surrounding area.

[0061] Furthermore, in the scanning device 1, the visible light VL irradiated from the second irradiation unit 32 and the infrared light IR irradiated from the first irradiation unit 31 are deflected together by the scanning unit 50. After being deflected by the scanning unit 50, the visible light VL irradiated from the second irradiation unit 32 is reflected in the positive Z-axis direction by the waveguide unit 60. Depending on the deflection direction of the visible light VL generated by the rotating scanning unit 50, the visible light VL reflected by the waveguide unit 60 can be detected by the first detection unit 21 and / or the second detection unit 22. Therefore, the scanning device 1 can detect the irradiation direction of the infrared light IR by detecting the rotation angle (swing angle) of the scanning unit 50.

[0062] In this way, the scanning device 1 can direct the visible light VL from the electromagnetic waves IR and VL scanned by the scanning unit 50 into the first detection unit 21 and / or the second detection unit 22. The scanning device 1 can store an angle detection table, which associates the rotation angle of the reflector when the visible light VL reflected by the rotating mirror is detected by the first detection unit 21 or the second detection unit 22 with the rotation angle of the reflector corresponding to the elapsed time from that state. Therefore, the scanning device 1 can detect the rotation angle of the scanning unit 50 (reflector) based on the elapsed time from the light-receiving time of each of the first and second detection units 21 and 22. Thus, the scanning device 1 can detect the irradiation direction of the infrared IR. It should be noted that, in order to perform the processing of detecting the rotation angle of the scanning unit 50, the scanning device 1 may include a control unit (CPU) (not shown). This control unit can detect the state of the scanning unit 50 based on the second electromagnetic wave detected by the first detection unit 21 and / or the second detection unit 22. In this way, the scanning device 1 may include a control unit that detects the state of the scanning unit 50 based on a second electromagnetic wave detected by the first detection unit 21 and / or the second detection unit 22.

[0063] Furthermore, the scanning device 1 can detect the visible light VL, which is used to determine the swing angle of the infrared IR used for scanning, in a direction different from the irradiation direction of the infrared IR. That is, in the scanning device 1, there is no visible light VL detection unit within the irradiation range of the infrared IR. Therefore, for the scanning device 1, not only can the scanning range based on infrared IR be set larger, but the size of the device can also be miniaturized.

[0064] On the other hand, such as Figures 1 to 3As shown, in the case where the scanning device 1 is configured as described above, it is necessary to place the first detection unit 21 and the second detection unit 22 on the downward-facing first surface 10A of the substrate 10 to detect visible light VL. In this case, it is assumed that the first detection unit 21 and the second detection unit 22 are located on the substrate 10 at a position that cannot be seen from above. As described above, in the scanning device 1, it is necessary to place the first detection unit 21 and the second detection unit 22 at the position where the visible light VL scanned by the MEMS mirror of the scanning unit 50 is incident. That is, in the scanning device 1, it is necessary to accurately position the first detection unit 21 and the second detection unit 22 at a position where visible light VL can be detected. It is assumed that, due to the structure of the scanning device 1, unless the positions of the first detection unit 21 and the second detection unit 22 are adjusted during assembly due to component dimensional tolerances and / or assembly tolerances, accurate positioning cannot be ensured. In addition, it is considered that even if the positions of the first detection unit 21 and the second detection unit 22 are adjusted during the assembly of the scanning device 1, the positions of the first detection unit 21 and the second detection unit 22 cannot be visually confirmed. In this situation, it is difficult to adjust the position of the visible light VL incident on the first detection unit 21 and the second detection unit 22 by visual inspection.

[0065] Therefore, the scanning device 1 of one embodiment employs a substrate 10 that allows for accurate and easy position adjustment even when the first detection unit 21 and the second detection unit 22 cannot be visually viewed during assembly or other processes. Hereinafter, the substrate 10 of one embodiment will be further described.

[0066] Figure 4 (A) and Figure 4 (B) is a diagram showing a substrate 10 according to one embodiment. Figure 4 (A) and Figure 4 (B) is shown Figures 1 to 3 A diagram of the substrate 10 of the scanning device 1 shown. Figure 4 (A) shows the second surface 10B side of the substrate 10. Figure 4 (B) shows the first surface 10A side of the substrate 10.

[0067] and Figure 1 and Figure 2 Similarly, Figure 4 (A) is a view of the substrate 10 from a viewpoint facing the negative Z-axis, i.e., from a top-down viewpoint. Figure 4 In (A), since the first detection unit 21 and the second detection unit 22 are located in a position that cannot be seen (back side), the first detection unit 21 and the second detection unit 22 are shown with dashed lines.

[0068] Figure 4 (B) is a view of the substrate 10 from a viewpoint facing the positive Z-axis, i.e., from a bottom-up viewpoint. Figure 4In (B), since the first detection unit 21 and the second detection unit 22 are located in a visible position (surface side), the first detection unit 21 and the second detection unit 22 are shown in solid lines.

[0069] like Figure 4 (A) and Figure 4 As shown in (B), the substrate 10 may have a through portion 12. In one embodiment of the substrate 10, the through portion 12 may be, for example, a slit formed in the substrate 10. That is, in this case, the through portion 12 may be formed through the substrate 10. Alternatively, the through portion 12 may be formed on the substrate 10 through the first surface 10A and the second surface 10B. Furthermore, when the through portion 12 is formed through the substrate 10, a transparent resin plate or film may be provided in the through portion 12, thereby facilitating visual confirmation of the visible light (VL) passing through it.

[0070] like Figure 4 As shown in (B), the through part 12 can be positioned on the straight line α passing through the first detection part 21 and the second detection part 22 in the first surface 10A. Figure 4 In (B), the line α, which is an imaginary line, is shown by a dashed line. Additionally, in this case, as... Figure 4 As shown in (A), the passage portion 12 can be provided on the second surface 10B at a position corresponding to the position on the imaginary line, i.e., the straight line α. In this way, although the first detection portion 21 and the second detection portion 22 are not provided on the second surface 10B of the substrate 10, the passage portion 12 can be provided at a position corresponding to the position on the imaginary line, i.e., the straight line α.

[0071] like Figures 1 to 3 As shown, when the passage portion 12 is a slit formed on the substrate 10, if the visible light VL reflected by the waveguide portion 60 is guided by the passage portion 12, at least a portion of the visible light VL passes through the passage portion 12. Therefore, since the visible light VL, which is deflected along with the infrared IR when it is deflected by the scanning portion 50, is reflected in the positive Z-axis direction by the waveguide portion 60, it can pass through the passage portion 12. In this way, the passage portion 12 allows at least a portion of the visible light irradiating the first surface 10A to pass through to the second surface 10B.

[0072] According to one embodiment, when visible light VL, deflected by the scanning unit 50, is passing through the passage portion 12, it can be assumed that the visible light VL also illuminates the first detection unit 21 and the second detection unit 22 located on the extension line of the passage portion 12. Therefore, when positioning the substrate 10, if the operator assembling the scanning device 1 (which may be a robot or other machinery) can visually confirm that the visible light VL is passing through the passage portion 12, it can be determined that the arrangement of the first detection unit 21 and the second detection unit 22 is appropriate. That is, if the operator assembling the scanning device 1 can visually confirm the visible light VL from the passage portion 12, it can be determined that the position of the substrate 10, where the first detection unit 21 and the second detection unit 22 are arranged, is appropriate.

[0073] On the other hand, if, during the positioning of the substrate 10, the operator assembling the scanning device 1 cannot visually confirm that part or all of the visible light VL, deflected by the scanning unit 50, passes through the passage portion 12, it can be determined that the arrangement of the first detection unit 21 and the second detection unit 22 is inappropriate (i.e., the first detection unit 21 and the second detection unit 22 are not capable of detecting the visible light VL). In other words, if the operator assembling the scanning device 1 cannot visually confirm the visible light VL from the passage portion 12, it can be determined that the position of the substrate 10, where the first detection unit 21 and the second detection unit 22 are arranged, is inappropriate. In this case, the operator assembling the scanning device 1 can correct the position by moving the substrate 10, where the first detection unit 21 and the second detection unit 22 are arranged, so that the visible light VL can be visually confirmed from the passage portion 12. Thus, according to one embodiment, the substrate 10 allows for accurate determination of the positions of the first detection unit 21 and the second detection unit 22 for detecting electromagnetic waves within the scanning device 1.

[0074] As described above, the presence of visible light VL passing through the passage 12 functions as a clue to determine whether the visible light VL, which is used to detect the direction of electromagnetic wave illumination for scanning (i.e., the swing angle of the reflector), is correctly illuminating the first detection unit 21 and the second detection unit 22. Therefore, for example, if Figure 4 If the width of the passage portion 12 shown in (B) (width in the direction perpendicular to line α) is greater than the width of the first detection portion 21 and the second detection portion 22 (width in the direction perpendicular to line α), problems may sometimes arise. That is, for example, it may happen that even if visible light VL passes through the passage portion 12, it may not necessarily illuminate the first detection portion 21 and the second detection portion 22. In this case, it is also assumed that the presence of this visible light VL cannot function as the aforementioned clue. Therefore, for example, as... Figure 4 As shown in (B), the width of the through part 12 (the width in the direction perpendicular to the line α) can be smaller than the width of the first detection part 21 and the second detection part 22 (the width in the direction perpendicular to the line α).

[0075] In this way, the width of the passage portion 12 in the direction perpendicular to the line α can be configured to be smaller than the width of the first detection portion 21 and the second detection portion 22 in the direction perpendicular to the line α.

[0076] The passage portion 12 of the substrate 10 can be implemented in various ways. In general, the passage portion 12 of the substrate 10 can adopt any structure, as long as it can be visually confirmed that visible light VL passes through the passage portion 12.

[0077] like Figure 1 and Figure 3 As shown, in the scanning device 1, the position where the second electromagnetic wave (visible light VL) is guided by the waveguide 60 is different from the irradiation range (i.e., the path of the first electromagnetic wave from the scanning unit 50) of the first electromagnetic wave (infrared IR) output by the scanning unit 50. Therefore, as described above, the detection unit 20 can detect the second electromagnetic wave VL guided by the waveguide 60 to a direction different from the irradiation direction of the first electromagnetic wave (infrared IR). In this case, the detection unit 20 can be located outside the irradiation range of the first electromagnetic wave (infrared IR) output by the scanning unit 50 (for example, at the first surface 10A of the substrate 10).

[0078] In this way, the scanning device 1 can detect visible light VL, which is used to control the swing angle of the scanning unit 50, in a direction different from the irradiation direction of the scanning infrared IR. That is, in the scanning device 1, a detection unit for visible light VL is not arranged within the irradiation range of the infrared IR. Therefore, the scanning device 1 can set the irradiation range of the infrared IR to a larger extent. Therefore, the scanning device 1 according to one embodiment can ensure or expand the range of irradiated electromagnetic waves.

[0079] Figure 5 This is a diagram showing a comparative example illustrating the effect of scanning device 1 in one embodiment. Figure 5 The main difference between the scanning device 100 shown and the scanning device 1 of one embodiment is the presence or absence of the waveguide 60 and the configuration of the detection unit 20 that accompanies its presence or absence. Figure 5 The scanning device 100 shown does not have a waveguide 60. Therefore, in the scanning device 100, infrared light IR and visible light VL irradiated from the combining unit 40 to the scanning unit 50 are scanned in the same direction by the scanning unit 50. In this case, as... Figure 5 As shown, the first detection unit 21 and / or the second detection unit 22, which detects the visible light VL output by the scanning unit 50, must be set within the range of infrared IR scanned by the scanning unit 50. Therefore, Figure 5 The irradiation range Φ2 of the scanning device 100 shown is less than Figure 1 The range shown is Φ1. That is, the scanning range of the scanning device 100 is smaller than the scanning range of the scanning device 1.

[0080] on the other hand, Figure 1 The scanning device 1 shown is capable of detecting visible light VL, used to control the swing angle of the scanning unit 50, in a direction different from the irradiation direction of the scanning infrared IR. Therefore, the scanning range of the scanning device 1 in one embodiment can also be larger than, for example... Figure 1 The range Φ1 is shown. In this way, the scanning device 1 according to one embodiment can ensure or expand the range of the irradiated electromagnetic waves.

[0081] In the embodiments described above, the case where the substrate 10 includes two detection units, a first detection unit 21 and a second detection unit 22, has been described. On the other hand, in order to detect visible light VL used to detect the irradiation direction of electromagnetic waves or the swing angle of a reflector, the substrate 10 may, for example, include only one detection unit 20, such as the first detection unit 21 and the second detection unit 22.

[0082] In this case, the scanning unit 50 can, for example, deflect the incident electromagnetic wave. Additionally, the waveguide unit 60 may include, for example, a semi-transparent reflector. In this case, the waveguide unit 60 can separate the electromagnetic wave deflected by the scanning unit 50 into a first electromagnetic wave (infrared IR) and a second electromagnetic wave (visible light VL). Furthermore, a detection unit 20 can detect the second electromagnetic wave (visible light VL) separated by the waveguide unit 60. Here, the detection unit 20 can be positioned outside the irradiation range of the first electromagnetic wave (infrared IR) separated by the waveguide unit 60 within the electromagnetic wave deflected by the scanning unit 50.

[0083] exist Figures 1 to 3 In the illustrated embodiment, it is assumed that the substrate 10 is disposed above the waveguide 60. This allows the substrate 10 to be positioned above the surface containing the trajectory of the electromagnetic wave scanned by the scanning unit 50 (i.e., a plane parallel to the XY plane). In this case, the waveguide 60 can be configured to guide the electromagnetic wave scanned by the scanning unit 50 upwards toward the first detection unit 21 and / or the second detection unit 22.

[0084] On the other hand, in other embodiments, the substrate 10 may be disposed below the waveguide portion 60. In this case, it can be reversed in the Z-axis direction. Figures 1 to 3 The configuration is shown. In this way, the substrate 10 can be positioned below the surface containing the trajectory of the electromagnetic waves scanned by the scanning unit 50 (i.e., a plane parallel to the XY plane). In this case, the waveguide unit 60 can be configured to guide the electromagnetic waves scanned by the scanning unit 50 downward toward the first detection unit 21 and / or the second detection unit 22.

[0085] exist Figures 1 to 3In the illustrated embodiment, it is assumed that the synthesis unit 40 performs synthesis by aligning the optical axes of the first electromagnetic wave irradiated from the first irradiation unit 31 and the second electromagnetic wave irradiated from the second irradiation unit 32. However, in other embodiments, it is not necessary to synthesize the first electromagnetic wave irradiated from the first irradiation unit 31 and the second electromagnetic wave irradiated from the second irradiation unit 32; it is sufficient that the two electromagnetic waves travel in the same direction. For example, the first electromagnetic wave irradiated from the first irradiation unit 31 and the second electromagnetic wave irradiated from the second irradiation unit 32 output from the synthesis unit 40 can propagate parallel to each other to the scanning unit 50.

[0086] The above embodiments have been described as representative examples. It will be self-evident to those skilled in the art that various modifications and substitutions can be made within the intent and scope of this invention. Therefore, it should not be construed as limiting this invention to the above embodiments, and various variations and modifications can be made without departing from the scope of the claims. For example, multiple constituent modules described in the structural diagrams of the embodiments can be combined into one, or a constituent module can be divided.

[0087] Explanation of reference numerals in the attached figures

[0088] 1: Scanning device

[0089] 10: Substrate

[0090] 12: Through the department

[0091] 21: First Testing Department

[0092] 22: Second Inspection Department

[0093] 31: First Irradiation Section

[0094] 32: Second Irradiation Section

[0095] 40: Synthesis Department

[0096] 50: Scanning section

[0097] 60: Waveguide section

[0098] 70: Ejection section

Claims

1. A scanning device, wherein, include: The first irradiation unit irradiates the first electromagnetic wave used to scan the object; The second irradiation unit irradiates the second electromagnetic wave; The scanning unit deflects and outputs the first electromagnetic wave irradiated by the first irradiation unit and the second electromagnetic wave irradiated by the second irradiation unit. The waveguide section guides at least a portion of the second electromagnetic wave output by the scanning section to a direction different from the first electromagnetic wave; The detection unit detects a second electromagnetic wave that has been guided by the waveguide unit to a direction different from the first electromagnetic wave. as well as The control unit detects the rotation angle of the scanning unit based on the detection of the second electromagnetic wave performed by the detection unit. The control unit detects the rotation angle based on the elapsed time from the point of light reception by the detection unit.

2. The scanning device according to claim 1, wherein, The second electromagnetic wave is used to detect the irradiation direction of the first electromagnetic wave.

3. The scanning device according to claim 1 or 2, wherein, The detection unit is positioned outside the irradiation range of the first electromagnetic wave output by the scanning unit.

4. The scanning device according to claim 1 or 2, wherein, include: The combining unit aligns the travel direction of the first electromagnetic wave with that of the second electromagnetic wave. The scanning unit scans the first electromagnetic wave and the second electromagnetic wave output from the synthesis unit.

5. The scanning device according to claim 4, wherein, The synthesis unit is positioned such that a first electromagnetic wave irradiated by the first irradiation unit and a second electromagnetic wave irradiated by the second irradiation unit are injected.

6. The scanning apparatus according to claim 1 or 2, wherein, include: The emission section emits the first electromagnetic wave output from the scanning section. The waveguide is positioned on the path of the first electromagnetic wave output by the scanning unit until it is emitted by the emission unit.

7. The scanning apparatus according to claim 1 or 2, wherein, The waveguide allows the first electromagnetic wave irradiated by the first irradiation part to pass through and reflects the second electromagnetic wave irradiated by the second irradiation part.

8. The scanning apparatus according to claim 1 or 2, wherein, The first irradiation unit includes a laser diode that irradiates infrared light, which is the first electromagnetic wave.

9. The scanning apparatus according to claim 1 or 2, wherein, The second irradiation unit includes a laser diode that irradiates visible light, which is the second electromagnetic wave.

10. The scanning apparatus according to claim 1 or 2, wherein, The detection unit includes a photodiode that detects visible light irradiated by the second irradiation unit.

11. A distance measuring device for measuring the distance to an object, wherein, Includes the scanning device described in any one of claims 1 to 10.

12. A scanning device, include: The scanning section deflects the incoming electromagnetic waves; The waveguide separates the electromagnetic wave, which is deflected by the scanning section, into a first electromagnetic wave and a second electromagnetic wave. The detection unit detects the second electromagnetic wave separated by the waveguide unit; as well as The control unit detects the rotation angle of the scanning unit based on the detection of the second electromagnetic wave performed by the detection unit. in, The detection unit is positioned outside the irradiation range of the first electromagnetic wave, which is separated by the waveguide unit, within the electromagnetic waves deflected by the scanning unit. The control unit detects the rotation angle based on the elapsed time from the point of light reception by the detection unit.

13. The scanning apparatus according to claim 12, wherein, The second electromagnetic wave is used to detect the irradiation direction of the first electromagnetic wave.

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