Posture changing device and film forming device

Abstract

The present application provides a posture changing device and a film forming device, which prevent dust from adhering to a substrate. The posture changing device is a device that changes a posture of a substrate carrier, and includes a rotation mechanism that rotates the substrate carrier, the rotation mechanism including: a plurality of rollers arranged so as to sandwich the substrate carrier; and a dust collection cover provided to at least one of the plurality of rollers and individually surrounding the roller. The dust collection cover includes a restriction wall portion that restricts movement of dust from a bottom side to a top side of the dust collection cover when the substrate carrier rotates based on the rotation mechanism.

Description

Technical Field

[0001] This invention relates to a posture changing device for a substrate carrier and a film forming device. Background Technology

[0002] In the manufacture of organic EL displays, organic materials, metal materials, and other vapor-deposited substances are deposited onto a substrate. Since the substrate needs to be flipped up and down depending on the processing, a device for changing the orientation of the substrate is provided between processing devices (Patent Document 1, etc.).

[0003] [Existing Technical Documents]

[0004] [Patent Documents]

[0005] [Patent Document 1] Korean Patent Publication No. 10-2015-0100999 Summary of the Invention

[0006] [The problem the invention aims to solve]

[0007] In a system that transports a substrate mounted on a substrate carrier, the substrate is rotated up and down together with the substrate carrier. When the orientation of the substrate carrier changes, it is undesirable for dust (particles) to be dispersed and adhere to the substrate.

[0008] This invention provides a technique for preventing dust from adhering to a substrate.

[0009] [Solutions for solving the problem]

[0010] According to the present invention, a posture changing device is provided, the posture changing device causing a substrate carrier to change posture, characterized in that,

[0011] The posture changing device includes a rotation mechanism for rotating the substrate carrier.

[0012] The rotating mechanism includes:

[0013] Multiple rollers, the multiple rollers being arranged to clamp the substrate carrier; and

[0014] A dust collection hood is disposed on at least one of the plurality of rollers, thereby individually surrounding each roller.

[0015] The dust collection hood includes:

[0016] The top, whereby the circumferential surface of the roller is exposed;

[0017] The bottom, which is formed facing the circumferential surface of the roller; and

[0018] A limiting wall portion, which is separately configured from the bottom, restricts the movement of dust from the bottom side to the top side when the rotating mechanism rotates the substrate carrier.

[0019] Furthermore, according to the present invention, a posture changing device is provided, the posture changing device causing a substrate carrier to change posture, characterized in that it comprises:

[0020] A rotating mechanism that rotates the substrate carrier;

[0021] Multiple conveyor rollers convey the substrate carrier;

[0022] A moving mechanism that moves the plurality of conveying rollers between a conveying position and a retraction position, wherein the retraction position is a position that avoids interference between the plurality of conveying rollers and the rotating mechanism or the substrate carrier when the rotating mechanism rotates.

[0023] Furthermore, according to the present invention, a film-forming apparatus is provided, characterized in that it comprises:

[0024] The aforementioned posture changing device; and

[0025] A vapor deposition apparatus for depositing vapor deposition material onto a substrate held on a substrate carrier.

[0026] [Invention Effects]

[0027] According to the present invention, a technique for preventing dust from adhering to a substrate can be provided. Attached Figure Description

[0028] Figure 1 This is a layout diagram of a film-forming apparatus according to one embodiment of the present invention.

[0029] Figure 2 This is an explanatory diagram of the vapor deposition apparatus.

[0030] Figure 3 This is an explanatory diagram of the posture changing device.

[0031] Figure 4 This is an explanatory diagram of the posture changing device.

[0032] Figure 5 (A) and Figure 5 (B) is a diagram illustrating the action of the posture change device.

[0033] Figure 6 (A) and Figure 6 (B) is a diagram illustrating the action of the posture change device.

[0034] Figure 7 (A) and Figure 7(B) is a diagram illustrating the action of the posture change device.

[0035] Figure 8 This is an exploded 3D view of the dust collection hood.

[0036] Figure 9 (A) Figure 9 (C) is an explanatory diagram showing the posture changes of the dust collection hood while the unit is rotating.

[0037] Figure 10 This is an explanatory diagram showing the posture changes of the dust collection hood according to another embodiment.

[0038] Figure 11 (A) is an overall diagram of the organic EL display device. Figure 11 (B) is a diagram representing the cross-sectional structure of a pixel.

[0039] [Explanation of Labels in the Attached Image]

[0040] 1 Film forming apparatus, 6 Holding unit, 63 Holding roller, 7 Dust collection hood, 71 Top, 70 Bottom, 78 Intermediate plate, 111 Posture changing device, 100 Substrate carrier Detailed Implementation

[0041] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. It should be noted that the following embodiments do not limit the invention as described in the claims. Although multiple features are described in the embodiments, not all of these features are essential to the invention, and the multiple features can be combined arbitrarily. Furthermore, in the accompanying drawings, the same or identical structures are labeled with the same reference numerals, and repeated descriptions are omitted.

[0042] <First Implementation Method>

[0043] <Overview of Film-Forming Devices>

[0044] Figure 1 This is a layout diagram of a film-forming apparatus 1 according to an embodiment of the present invention. It should be noted that in each figure, arrow Z represents the vertical direction (direction of gravity), and arrows X and Y represent mutually orthogonal horizontal directions. The film-forming apparatus 1 is an apparatus for depositing a vapor-deposited material onto a substrate G, using a mask M to form a thin film of the vapor-deposited material with a predetermined pattern. In particular, the film-forming apparatus 1 of this embodiment is a tandem-type film-forming apparatus capable of simultaneously conveying the substrate G and performing a film-forming method of depositing a vapor-deposited material onto the substrate G using a vapor deposition apparatus.

[0045] The substrate G used for film deposition in the film deposition apparatus 1 can be made of materials such as glass, resin, or metal, with a preferred structure being glass on which a resin layer such as polyimide is formed. The deposition material can be organic or inorganic (metal, metal oxide, etc.). The film deposition apparatus 1 is suitable for manufacturing electronic devices and optical components such as display devices (flat panel displays, etc.), thin-film solar cells, and organic photoelectric conversion elements (organic thin-film camera elements), and is particularly suitable for manufacturing organic EL panels.

[0046] The film forming apparatus 1 is an apparatus that uses a substrate carrier 100 to transport a substrate G and a mask M. The substrate carrier 1 includes, for example, a mechanism for holding the substrate G and a mechanism for holding the mask M. The mechanism for holding the substrate G is, for example, an electrostatic chuck, and the mechanism for holding the mask M is, for example, a magnetic chuck. The mask M is held on the substrate carrier 1 in an overlapping manner with the substrate G, and the substrate G is held between the substrate carrier 100 and the mask M. The substrate carrier 100, the substrate G, and the mask M are plate-shaped and are transported in a horizontal orientation.

[0047] The substrate carrier 100 is cyclically conveyed (counterclockwise in the illustrated example) in the film formation path 1A and the return path 1B. In this embodiment, the conveying mechanism is a roller conveyor. A substrate feeding chamber 110 is provided in the film formation path 1A. The substrate G, which is to be formed, is fed into the substrate feeding chamber 110 from outside the film formation apparatus 1, overlapping and being held on top of the substrate carrier 100 fed into the substrate feeding chamber 110 from the direction switching device 125 in the return path 1B. The substrate carrier 100 holding the substrate G is conveyed to the posture changing device 111, and its posture is changed by the posture changing device 111. In this embodiment, the substrate carrier 100 is rotated 180 degrees from the posture in which the substrate G is held on top of the substrate carrier 100 to the posture in which the substrate G is held below the substrate carrier 100.

[0048] After being flipped, the substrate carrier 100 is conveyed to the alignment chamber 112. In the alignment chamber 112, the mask M, conveyed from the return path 1B, is aligned with the substrate G held on the substrate carrier 100, and the mask M is held on the substrate carrier 100. The substrate carrier 100 (100GM), holding the substrate G and mask M, is accelerated to a predetermined conveying speed by the acceleration chamber 113 and conveyed to the vapor deposition apparatus 114. Here, a vapor deposition material is deposited onto the substrate G. Then, the substrate carrier 100 (100GM), holding the deposited substrate G and mask M, is decelerated by the deceleration chamber 115, and the mask M is separated from the substrate carrier 100 in the separation chamber 116. The separated mask M is conveyed to the mask assembly chamber 121 on the return path 1B.

[0049] After the mask M is separated, the substrate carrier 100 is repositioned in the posture changing device 117. In this embodiment, the substrate carrier 100 is rotated 180 degrees from a position where the substrate G is held below the substrate carrier 100 to a position where the substrate G is held above the substrate carrier 100. Then, the substrate carrier 100 is conveyed to the substrate separation chamber 118, where the substrate G is separated from the substrate carrier 100. The separated substrate G is discharged from the film forming apparatus 1.

[0050] After separating the substrate G, the substrate carrier 100 is conveyed to the direction switching device 119 of the return path 1B. The substrate carrier 100 changes its orientation in the posture changing device 120. The substrate carrier 100 is flipped 180 degrees in an up-and-down flipping manner. The substrate carrier 100 is conveyed to the mask assembly chamber 121, holding the mask M on the substrate carrier 100. The substrate carrier 100 (100M) holding the mask M is conveyed by the conveying device 122 to the mask separation chamber 123, separating the mask M from the substrate carrier 100. The separated mask M is conveyed to the alignment chamber 112.

[0051] After the mask M is separated, the substrate carrier 100 is repositioned in the posture changing device 120. The substrate carrier 100 is flipped 180 degrees in an up-and-down manner. Then, the substrate carrier 100 is conveyed into the substrate feeding chamber 110 via the orientation switching device 125. The film formation process is performed sequentially by repeating the above process.

[0052] <Evaporation Equipment>

[0053] Figure 2 This is an explanatory diagram of the vapor deposition apparatus 114. The vapor deposition apparatus 114 includes: a transfer chamber 2 forming a transfer chamber 2a for transferring a substrate carrier 100 holding a substrate G and a mask M; and a plurality of source chambers 3. The plurality of source chambers 3 are arranged along the X direction, and the transfer chamber 2a is located above these source chambers 3.

[0054] The transfer chamber 2a is maintained under vacuum during use, with an inlet 2b at one end in the X direction and an outlet 2b at the other end. A substrate carrier 100, holding the substrate G and the mask M, is fed into the transfer chamber 2a through the inlet 2b and, after processing, is discharged to the outside through the outlet 2c. Gate valves (not shown) are provided at both the inlet 2b and the outlet 2c.

[0055] A plurality of conveyor rollers 2d are arranged along the X direction in the conveying chamber 2a. Two rows of these conveyor rollers 2d are arranged separately along the Y direction. Each conveyor roller 2d rotates about a rotation axis in the Y direction. The substrate carrier 100 places its two ends in the Y direction on the rows of two conveyor rollers 2d, and is conveyed in a horizontal posture along the X direction by the rotation of the conveyor rollers 2d.

[0056] Each source chamber 3a has an internal space maintained as a vacuum during use. The source chamber 3a is box-shaped with an opening at the top, and the transfer chamber 2a communicates with the internal space of the source chamber 3a through the opening. Each source chamber 3a is equipped with a vapor deposition source 3a that releases vapor deposition material upwards. In this embodiment, the vapor deposition source 3a is a so-called line source, extending along the Y direction. The vapor deposition source 3a includes a crucible containing the raw material for vapor deposition and a heater for heating the crucible, heating the raw material to release its vapor, i.e., the vapor deposition material, into the transfer chamber 2a.

[0057] The vapor deposition apparatus 114 conveys a substrate carrier 100 holding a substrate G and a mask M within a transfer chamber 2, while simultaneously depositing a vapor deposition material onto the substrate G using a vapor deposition source 3a. In this embodiment, multiple source chambers 3 are arranged along the conveying direction of the substrate carrier 100. By releasing different types of vapor deposition materials from the three source chambers 3, different vapor deposition materials can be continuously deposited onto the substrate G. It should be noted that the number of source chambers 3 is not limited to three; it can be one, two, or four or more.

[0058] <Posture Change Device>

[0059] Reference Figure 3 and Figure 4 The posture changing device 111 will be described. Figure 3 This is a diagram showing the internal structure of the posture changing device 111 viewed along the Y direction. Figure 4 This is a view taken along the X-direction. The posture changing device 111 includes: a chamber 4 having an internal space that is maintained as a vacuum during use; a plurality of transfer units 5 disposed within the chamber 4; a holding unit 6 disposed within the chamber 4; a rotating unit 8 for rotating the holding unit 6 from outside the chamber 4; and a moving unit 9 for moving each transfer unit 5 along the Y-direction from outside the chamber 4. It should be noted that, for simplicity, the holding unit 6 and the rotating unit 8 are shown separately, but the holding unit 6 and the rotating unit 8 can be integrally formed into a mechanism for rotating the substrate carrier 100.

[0060] The chamber 4 has an inlet 4a at one end in the X direction and an outlet 4b at the other end. The substrate carrier 100, which holds the substrate G and the mask M, is fed into the chamber 4 through the inlet 4a and discharged to the outside through the outlet 4b after a change in posture. Gate valves 4c and 4d are provided at the inlet 2b and the outlet 2c to open and close them.

[0061] Multiple conveying units 5 are arranged separately along the X and Y directions. Each conveying unit 5 includes multiple conveying rollers 5a arranged along the X direction and a drive source such as a motor that rotates the conveying rollers 5a. Each conveying roller 5a is supported in a cantilevered state and rotates about a rotation axis in the Y direction. The substrate carrier 100 places its two ends in the Y direction on a column of two columns of conveying rollers 5a separated along the Y direction, and is conveyed horizontally along the X direction by the rotation of the conveying rollers 5a.

[0062] Each transmission unit 5 is connected to the moving unit 9. Figure 4 The conveying position, indicated by the double-dotted line, and the retraction position, indicated by the solid line, move parallel to each other along the Y-direction (the direction of the roller axis of the conveyor roller 5a). The conveying position is located at the center side of the posture changing device 111 in the Y-direction, and the retraction position is located at the outer side in the Y-direction. Each conveying unit 5 conveys the substrate carrier 100 at the conveying position. The retraction position is the position to avoid interference between the rotating holding unit 6, the rotating unit 8, and the conveying unit 5.

[0063] The moving unit 9 includes a drive mechanism 90 and a working shaft 91. The drive mechanism 90 includes an actuator such as an electric cylinder that moves the working shaft 91 forward and backward in the Y direction, and is disposed outside the chamber 4. The working shaft 91 extends into and out of the chamber 4 through an opening (not shown) formed in the side wall of the chamber 4. The sealing structure 92 has a cylindrical structure such as a bellows, which seals the opening formed in the side wall of the chamber 4 and the working shaft 91 to maintain the airtightness of the chamber 4.

[0064] The retaining unit 6 has a pair of base members 60 separated along the Y direction. Each base member 60 is a plate-like member along the XZ plane. The pair of base members 60 are connected by a plurality of beam members 60a, which rotate integrally about the rotation center line 81a.

[0065] The holding unit 6 includes a plurality of holding rollers 63 that hold the substrate carrier 100 in a manner that clamps it. The plurality of holding rollers 63 constitute four rows of rollers arranged along the X direction. The four rows of rollers are divided into two rows of rollers separated along the Y direction, and the two rows of rollers are vertically separated.

[0066] Each roller row is freely rotatable around its Y-axis and supported by roller support members 61 or 62. Two roller support members 61 are provided. Figure 3 and Figure 4 In this example, it is located on the upper side. The two roller support members 61 are separated along the Y direction, and the retaining roller 63, supported by the roller support members 61, is cantilevered and supported on the inner side of the roller support members 61. Two roller support members 62 are also provided. Figure 3 and Figure 4In the example, it is located on the lower side. The two roller support members 62 are separated along the Y direction, and the retaining roller 63 supported on the roller support member 62 is supported on the inner side of the roller support member 62 in a cantilever state.

[0067] Roller support members 61 and 62 are flexibly supported on the base member 60 via multiple guide units 65 that move (lift) freely in the Z direction. The guide unit 65 is, for example, a telescopic guide mechanism, having a cylinder fixed to the base member 60 and a rod flexibly supported on the cylinder in the Z direction; the roller support members 61 and 62 are fixed to the rod. Lifting units 64 are respectively provided between the base member 60 and the roller support members 61 and 62. In this embodiment, the lifting unit 64 is an actuator that extends and retracts in the Z direction, such as an electric cylinder. By extending and retracting the lifting unit 64, the roller support members 61 and 62 can be raised and lowered relative to the base member 60.

[0068] Furthermore, the substrate carrier 100 is supported by a plurality of retaining rollers 63 supported on the roller support member 61 and a plurality of retaining rollers 63 supported on the roller support member 62, in a manner that clamps the end of the substrate carrier 100 in the Y direction. Figure 3 and Figure 4 In the example, a plurality of retaining rollers 63 supported on the roller support member 61 are located on one side (upper side) of the substrate carrier 100, and a plurality of retaining rollers 63 supported on the roller support member 62 are located on the other side (lower side) of the substrate carrier 100. The substrate carrier 100 can be clamped and supported from both sides by these retaining rollers 63.

[0069] It is undesirable for dust (particles) to be stirred up and adhere to the substrate G due to the rotation of the retaining rollers 63. In this embodiment, each retaining roller 63 is individually surrounded by a dust collection hood 7. Details of the dust collection hood 7 will be described later.

[0070] Each base component 60 is also provided with limiting members 66A and 66B. Figure 3 and Figure 4 In this example, limiter 66A is located on the feed inlet 4a side, and limiter 66B is located on the feed inlet 4b side. Limiters 66A and 66B each include: a roller 69; a rocker arm 68 supporting the roller 69 for free rotation; and an actuator 67, such as a motor, for rotating the rocker arm 68. The actuator 67 is fixed to the base member 60, and the roller 69 is freely rotatable on the rocker arm 68 about a rotation axis in the Y direction. Through the rotation of the rocker arm 68, the working position of the roller 69 on the conveying path of the substrate carrier 100 is adjusted. Figure 3 and Figure 4The illustrated retraction position is between the two positions. In the working position, the substrate carrier 100 is restricted from displacement along its substrate surface direction by abutting the end face of the substrate carrier 100 against the peripheral surface of the roller 69. Moreover, when the roller 69 is moved from the retraction position to the working position, the substrate carrier 100 can be moved to the holding position by pressing the end face of the substrate carrier 100 with the peripheral surface of the roller 69.

[0071] Thus, in this embodiment, the holding unit 6 separates the two sets of mechanisms (base member 60, roller support members 61 and 62, multiple rollers 63, multiple lifting units 64, multiple guide units 65, and limiting members 66A and 66B) along the Y direction. Furthermore, the holding unit 6 is configured to be able to rotate about the rotation center line 81a in the Y direction via the rotation unit 8.

[0072] The rotating unit 8 includes a driving unit 80A and a driven unit 80B. Each unit 80A and 80B has a rotating shaft 81 coaxially arranged on the rotation center line 81a. Each rotating shaft 81 extends through an opening (not shown) formed in the side wall of the chamber 4 to the inside and outside of the chamber 4. One rotating shaft 81 is fixed to one of the two base members 60, and the other rotating shaft 81 is fixed to the other base member 60. The sealing structure 82 has a cylindrical structure such as a bellows, which seals the opening formed in the side wall of the chamber 4 and the rotating shaft 81 to maintain the airtightness of the chamber 4.

[0073] Unit 80A includes an electric motor that serves as a drive source for rotating the rotating shaft 81, and a speed reducer that reduces the rotation of the electric motor and then transmits the speed reduction to the rotating shaft 81. Unit 80B includes a bearing that supports the rotating shaft 81 so that it can rotate freely.

[0074] Reference Figure 5 (A) Figure 7 (B) describes the operation of the posture change device 111. Figure 5 (A) shows the stage in which the substrate carrier 100, holding the substrate G, is fed into the posture changing device 111. The substrate G is held on the upper side of the substrate carrier 100. Each conveying unit 5 is in the conveying position, and the substrate carrier 100 is conveyed on the conveying roller 5a. Each holding roller 63 is separated from the substrate carrier 100. The roller 69 of the limiting member 66B is in the working position.

[0075] Figure 5(B) shows the state after the substrate carrier 100 has been fed in. Gate valves 4c and 4d lock the feed inlet 4a and feed outlet 4b, respectively. The lower lifting unit 64 raises the roller support member 62. As a result, the substrate carrier 100 comes into contact with the plurality of holding rollers 63 supported on the roller support member 62 and is lifted upward from the conveying unit 5. Furthermore, the substrate carrier 100 is held from below by the plurality of holding rollers 63 supported on the roller support member 62 and from above by the plurality of holding rollers 63 supported on the roller support member 61.

[0076] like Figure 6 As shown in (A), the limiting member 66A is driven, and the roller 69 of the limiting member 66A moves to the working position. The roller 69 abuts against the end face of the substrate carrier 100, pressing the substrate carrier 100 along the X direction. The substrate carrier 100 moves along the X direction... Figure 6 The right side of (A) moves to a position abutting against the roller 69 of the limiting member 66B. As the substrate carrier 100 moves, the holding roller 63 rotates along with the substrate carrier 100. The substrate carrier 100 is held and its displacement is limited in its normal direction (Z direction in this stage) by the plurality of holding rollers 63, and its displacement is limited in its planar direction (X direction in this stage) by the rollers 69 of the limiting members 66A and 66B. Next, driven by the moving unit 9, each conveying unit 5 moves to the retracted position. Thus, as... Figure 4 As shown, each transmission unit 5 moves to a position outside the base component 60 that does not interfere with the holding unit 6.

[0077] Driven by the rotating unit 8, such as Figure 6 As shown in (B), the retaining unit 6 rotates. The substrate carrier 100 is restricted from displacement in its normal direction and surface direction by the retaining unit 6, and therefore will not fall. Figure 7 (A) shows the state after the rotation is complete. Holding unit 6 rotated 180 degrees, from... Figure 6 The state of (A) is flipped along the Z and X directions. Since the roller support unit 62 is located on the upper side and the roller support unit 61 is located on the lower side, the positions (upper or lower) of the plurality of holding rollers 63 supported on the roller support unit 61 and the plurality of holding rollers 63 supported on the roller support unit 62 relative to the substrate carrier 100 alternate before and after rotation. Moreover, the limiting member 66B is located on the feed inlet 4a side and the limiting member 66A is located on the feed outlet 4b side, and the positions of the limiting member 66A and the limiting member 66B also alternate before and after rotation. The substrate carrier 100 is also flipped along the Z and X directions, and the substrate G is held on the lower side of the substrate carrier 100. Driven by the moving unit 9, each conveying unit 5 moves from the retracted position to the conveying position.

[0078] Then, the lower lifting unit 64 lowers the roller support member 61. As a result, the substrate carrier 100 is placed on the conveying unit 5, and each holding roller 63 separates from the substrate carrier 100. The roller 69 of the limiting member 66A moves from the working position to the retracted position. Gate valves 4c and 4d open the feed inlet 4a and the feed outlet 4b. Figure 7 (B) shows the stage of delivering the substrate carrier 100. The substrate carrier 100 is delivered along the X direction by the drive of the transfer unit 5. During delivery, the substrate carrier 100, which holds the substrate G on the upper side, changes (flips) to a position where the substrate G is held on the lower side, and the substrate carrier 100 is delivered in this state.

[0079] Then, when the roller 69 of the limiting member 66B returns to the retracted position and the roller 69 of the limiting member 66A moves to the working position, the state of the posture changing device 111 is changed by simply holding the unit 6 up and down and back and forth. Figure 5 The state is essentially the same as stage (A), making it possible to feed the next substrate carrier 100. The subsequent operation of the posture change device 111 is consistent with the reference state. Figure 5 (A) Figure 7 The actions described in (B) are essentially the same, and the posture changes of the substrate carrier 100 that is sequentially fed in can be repeatedly performed.

[0080] <Dust Collection Cover>

[0081] Regarding the structure of dust collection hood 7, refer to... Figure 8 Please provide an explanation. Figure 8 This is an exploded 3D view of dust collection hood 7. Figure 8 The position of the dust collection hood 7 is equivalent to that in Figure 5 The posture of each dust collection hood 7 supported on the roller support member 62 under the posture of the holding unit 6 in (A) diagram is equivalent to the posture of the dust collection hood 7 supported on the roller support member 61 being flipped.

[0082] The dust collection hood 7 is a box-shaped component that captures dust generated by the rotation of the retaining roller 63 and prevents it from scattering to the outside. In this embodiment, the dust collection hood includes a main body 7A and a detachable part 7B that can be attached to and detached from the main body 7A. The dust collection hood 7 is supported on the roller support member 61 or 62 by fixing the main body 7A to the roller support member 61 or 62.

[0083] The dust collection hood 7 includes: a bottom 70 and a top 71 that are vertically aligned in the Z direction; a left side 72 and a right side 72 in the X direction; and a front side 73 in the Y direction. It should be noted that in this embodiment, the rear portion of the dust collection hood 7, which is the rear side in the front-rear direction, is formed by roller support members 61 or 62. However, the dust collection hood 7 may also have an inherent rear portion.

[0084] The top 71 is formed by the left and right top walls 71a, 71a of the main body 7A. The left and right top walls 71a, 71a are eaves-shaped and inclined in opposite directions, with a gap 71b formed between the left and right top walls 71a. A portion of the peripheral surface 63a of the retaining roller 63 is exposed to the outside through the gap 71b, and the exposed portion of the peripheral surface 63a abuts against the substrate carrier 100. In this embodiment, the top 71 has left and right top walls 71a, 71a, which are configured to partially cover the peripheral surface 63a of the retaining roller 63, but the top 71 can also be entirely open. However, according to this embodiment, the dust capture performance and anti-scattering performance can be improved. Moreover, in this embodiment, the left and right top walls 71a are inclined, but they can also be horizontal. However, according to this embodiment, the exposure of the peripheral surface 63a of the retaining roller 63 can be reduced, and the dust capture performance and anti-scattering performance can be improved.

[0085] The bottom 70 and the left and right sides 72 are walls formed by the main body 7A. The bottom 70 is a horizontal plate, and the left and right sides 72 are vertical plates erected from the bottom 70. The bottom 70 and the left and right sides 72 are located around the periphery 63a of the retaining roller 63 and face the periphery 63a. A permanent magnet 74 is disposed on the bottom 70 to attract dust containing strong magnetic materials such as iron powder, thereby improving its capture performance.

[0086] The front part 73 is a wall formed by the separating part 7B, and is in the shape of a vertical plate. The separating part 7B has left and right ears 76 that overlap with the left and right sides 72, and mounting grooves 76a are provided in the ears 76. Fixed knobs 77 are provided in the left and right sides 72 and are installed in the sides 72 by a threaded structure. If the middle part of the fixed knob 77 is inserted into the mounting groove 76a, the separating part 7B is assembled to the main body 7A, and the fixed knob 77 is fastened to the side 72, then the ears 76 are clamped between the fixed knob 77 and the side 72, and the separating part 7B is fixed to the main body 7A. When the separating part 7B is assembled to the main body 7A in this way, the opening on the front side of the main body 7A is locked by the front part 73, and the front part 73 faces the end face 63b of the roller 63.

[0087] The separating section 7B has a tray 75 connected to the front section 73. Dust falls and is collected in the tray 75. The tray 75 is made of a strong magnetic material such as iron, and when the separating section 7B is assembled to the main body 7A, the tray 75 rests on the magnet 74. Dust particles such as iron powder on the tray 75 are easily retained on the tray 75 by the magnetic force of the magnet 74. If the separating section 7B is removed from the main body 7A, the tray 75 is also removed from the bottom 70 at the same time, so the tray 75 can be easily cleaned.

[0088] Intermediate plates 78 are provided on the left and right sides 72, separating from the bottom 70 along the Z direction. The left intermediate plate 78 on the left side 72 protrudes towards the right side 72, and the right intermediate plate 78 on the right side 72 protrudes towards the left side 72. An opening 79 is formed between the left and right intermediate plates 78 in the X direction, allowing dust to fall from the holding roller 63 onto the tray 75 and be captured. The intermediate plates 78 have the same width as the side 72 in the Y direction, dividing the internal space of the dust collection hood 7 into a bottom 70 side and a top 71 side. When the holding unit 6 rotates and flips up and down, it functions as a limiting wall to restrict the movement of dust accumulated on the bottom 70 side towards the top 71 side.

[0089] The intermediate plate 78 of this embodiment has: a fixing portion 78a as the end of the side portion 72; and an inclined portion 78b as the end of the opposite side. The fixing portion 78a is fixed to the side portion 72 and extends horizontally from the side portion 72. The inclined portion 78b is the portion that extends obliquely from the fixing portion 78a. Thus, the intermediate plate 78 has a shape in which the end of the opposite side of the side portion 72 is bent toward the bottom 70. This shape has the effect of making it easy for dust to fall from the holding roller 63 onto the tray 7, and on the other hand, making it difficult for dust to return from the tray 7 to the top 71 when the holding unit 6 rotates and flips up and down.

[0090] It should be noted that in this embodiment, the intermediate plate 78 is bent by the flat plate-shaped fixing part 78a and the flat plate-shaped inclined part 78b, but it can also be bent into an arc shape. Furthermore, in this embodiment, the intermediate plate 78 is fixed to the side part 72, but it can also be fixed to the front part 73.

[0091] Reference Figure 9 (A) Figure 9 (C) indicates the shape of the dust collection hood 7 when the unit 6 is rotating. Figure 9 (A) shows the dust collection hood 7 in a position where the top 71 is on top and the bottom 70 is on the bottom. Figure 9 The posture of dust collection hood 7 in (A) is equivalent to that in Figure 5 The position of each dust collection hood 7 supported by the roller support member 62 in the holding unit 6 shown in Figure (A) is shown. The roller 63 abuts against the lower surface of the substrate carrier 100. When dust is generated due to the rotation of the roller 63, the dust passes through the opening 79 due to gravity and falls onto the tray 75 to be captured, and the dust 200 is loaded on the tray 75.

[0092] Figure 9 (B) shows from Figure 9From state (A), the dust collection hood 7 maintains its position when the holding unit 6 has rotated 90 degrees. Because of the rotation of the holding unit 6, the dust collection hood 7 also rotates. In cases where the amount of dust 200 captured by the tray 75 is large, such as... Figure 9 As shown in (B), the dust moves towards the end (lower side) of the tray 75 due to gravity, and some of the dust is exposed from the tray 75, sometimes overflowing onto the side 72 which becomes the lower side.

[0093] Figure 9 (C) shows from Figure 9 Starting from state (B), the posture of the dust collection hood 7 is shown when the holding unit 6 has rotated another 90 degrees. The posture of the dust collection hood 7 is shown when the holding unit 6 has been flipped along the Z and X directions. The dust collection hood 7 is in a posture with the top 71 down and the bottom 70 up. Figure 9 The posture of the dust collection hood 7 in (C) is equivalent to that in Figure 7 The image (A) shows the orientation of the holding unit 6, with each dust collection hood 7 supported by the roller support member 62. The roller 63 abuts against the lower surface of the substrate carrier 100. Dust captured by the tray 75... Figure 9 Dust that overflows onto the side 72 in the (B) position tends to move toward the top 71 due to gravity, but is blocked by the intermediate plate 78. This prevents dust 200 from flying out of the gap 71b to the outside of the dust collection cover 7 and adhering to the substrate G held on the substrate carrier 100.

[0094] <Other methods of dust collection hoods>

[0095] Figure 10 (A) Figure 10 (C) shows another structural example of the dust collection hood 7. The illustrated example is similar to... Figures 8-9 Compared to the dust collection hood 7 illustrated in (C), only the structure of the middle plate 78 is different, and it has a middle plate 78'. The middle plate 78' has a fixed part 78a' fixed to the side part 72 and a movable part 78b' whose angle is variable relative to the fixed part 78a'.

[0096] Fixed part 78a' is equivalent to Figure 8 The fixed part 78 and the movable part 78b' are equivalent to the inclined part 78b, but the inclined part 78b is integrally formed with the fixed part 78a and the angle remains unchanged. In contrast, the movable part 78b' is connected to the fixed part 78a' via a hinge 78c and its angle is variable. The hinge 78c connects the movable part 78b' to the fixed part 78a' rotatably about the rotation center in the Y direction, and the angle range (rotation range) of the movable part 78b' is structurally limited by a tab. In this embodiment, the hinge 78c is used to make the angle of the movable part 78b' variable, but the structure can also be made variable by an elastic body.

[0097] Figure 10 (A) is equivalent to Figure 9 The state shown in (A) illustrates the position of the dust collection hood 7 with its top 71 facing upwards and its bottom 70 facing downwards. The movable part 78b' is tilted at the same angle as the inclined part 78b relative to the horizontal direction. When dust is generated due to the rotation of the roller 63, the dust falls onto the tray 75 due to gravity and is captured, and the dust 200 is loaded onto the tray 75.

[0098] Figure 10 (B) is equivalent to Figure 9 The state of (B) shows the state from Figure 10 The state of (A) maintains the posture of the dust collection hood 7 when the unit 6 has rotated 90 degrees. At this time, the movable part 78b' of the upper intermediate plate 78' rotates relative to the fixed part 78a' due to its own weight, and both the fixed part 78a' and the movable part 78b' become vertical. As a result, the opening 79 is half-closed. The lower intermediate plate 78' remains unchanged.

[0099] Figure 10 (C) is equivalent to Figure 9 The state of (C) shows the state from Figure 10 The (B) state maintains the posture of the dust collection hood 7 when unit 6 has rotated another 90 degrees. The dust collection hood 7 is now in a position where the top 71 is down and the bottom 70 is up. At this time, in Figure 10 In stage (B), the movable part 78b' of the lower middle plate 78' also rotates relative to the fixed part 78a' due to its own weight, and both the fixed part 78a' and the movable part 78b' become horizontal. As a result, the opening 79 is closed approximately at the front. Dust trapped in the tray 75... Figure 9 Dust overflowing onto the side 72 in the (B) position tends to move towards the top 71 due to gravity, but the opening 79 is closed, and this can be reliably prevented by the intermediate plate 78'. Thus, it is possible to prevent dust 200 from flying out of the gap 71b to the outside of the dust collection cover 7 and adhering to the substrate G held by the substrate carrier 100.

[0100] Other methods of using rollers

[0101] In the above description, an example of a holding unit 6 having multiple holding rollers 63 was illustrated. Unlike the holding rollers 63, the rotating unit 8 may have multiple rollers arranged to clamp the substrate carrier 100. These rollers may be, for example, idle rollers. In a certain state, the idle roller located below the substrate carrier 100 is at the same height as the transfer roller 5a. The idle roller itself is not driven and is primarily configured to distribute the load from the substrate carrier 100 onto the transfer roller 5a. Since the idle roller is not connected to a drive mechanism, even if it is configured to rotate together with the rotating unit 8, the complexity and size of the device can be avoided. Therefore, by arranging the idle roller to clamp the substrate carrier, the device can be simplified. It should be noted that the idle roller may not hold the substrate carrier 100 when the substrate carrier 100 rotates.

[0102] The dust collection hood 7 described above can also be provided on the idle roller. Furthermore, it can be configured such that the dust collection hood 7 is provided only on the idle roller and no hood is provided on the holding roller 63. For example, a case where no roller is used at the front end of the holding section of the holding unit 6 can be cited.

[0103] <Electronic Components>

[0104] Next, an example of an electronic device will be described. The following example illustrates the structure of an organic EL display device as an example of an electronic device.

[0105] First, let me explain the manufactured organic EL display device. Figure 11 (A) is an overall view of the organic EL display device 500. Figure 11 (B) is a diagram representing the cross-sectional structure of a pixel.

[0106] like Figure 11 As shown in (A), in the display area 51 of the organic EL display device 500, a plurality of pixels 52, each having a plurality of light-emitting elements, are arranged in a matrix. Each light-emitting element has a structure having an organic layer sandwiched between a pair of electrodes, as detailed below.

[0107] It should be noted that the term "pixel" here refers to the smallest unit capable of displaying the desired color in the display area 51. In the case of a color organic EL display device, pixel 52 is constructed by a combination of multiple sub-pixels that exhibit different light emission characteristics, namely, a first light-emitting element 52R, a second light-emitting element 52G, and a third light-emitting element 52B. Pixel 52 is typically constructed by a combination of sub-pixels of three types: red (R) light-emitting elements, green (G) light-emitting elements, and blue (B) light-emitting elements, but is not limited to this. Pixel 52 may contain at least one type of sub-pixel, preferably two or more types, and more preferably three or more types. For example, the sub-pixels constituting pixel 52 may be a combination of four types of sub-pixels: red (R) light-emitting elements, green (G) light-emitting elements, blue (B) light-emitting elements, and yellow (Y) light-emitting elements.

[0108] Figure 11 (B) is Figure 11 A partial cross-sectional view at line AB of (A). Pixel 52 has multiple sub-pixels composed of organic EL elements. The organic EL elements have a first electrode (anode) 54, a hole transport layer 55, any one of a red layer 56R, a green layer 56G, or a blue layer 56B, an electron transport layer 57, and a second electrode (cathode) 58 on a substrate 53. The hole transport layer 55, red layer 56R, green layer 56G, blue layer 56B, and electron transport layer 57 are equivalent to organic layers. The red layer 56R, green layer 56G, and blue layer 56B are respectively formed into patterns corresponding to light-emitting elements (sometimes referred to as organic EL elements) that emit red, green, and blue light, respectively.

[0109] Furthermore, the first electrode 54 is formed separately for each light-emitting element. The hole transport layer 55, electron transport layer 57, and second electrode 58 can be formed shared by multiple light-emitting elements 52R, 52G, and 52B, or they can be formed separately for each light-emitting element. That is, as... Figure 11 As shown in (B), the hole transport layer 55 can be formed as a shared layer covering multiple sub-pixel regions, and the red layer 56R, green layer 56G, and blue layer 56B can be formed separately on it according to each sub-pixel region. Furthermore, the electron transport layer 57 and the second electrode 58 can be formed as a shared layer covering multiple sub-pixel regions on it.

[0110] It should be noted that an insulating layer 59 is provided between the first electrodes 54 to prevent short circuits between them. Furthermore, since the organic EL layer deteriorates due to moisture or oxygen, a protective layer 600 is provided to protect the organic EL element from moisture or oxygen.

[0111] exist Figure 11In (B), the hole transport layer 55 and the electron transport layer 57 are represented by a single layer, but depending on the structure of the organic EL display element, they may also be formed by multiple layers having a hole blocking layer or an electron blocking layer. Furthermore, a hole injection layer may be formed between the first electrode 54 and the hole transport layer 55, and this hole injection layer has a band structure that allows for smooth injection of holes from the first electrode 54 into the hole transport layer 55. Similarly, an electron injection layer may be formed between the second electrode 58 and the electron transport layer 57.

[0112] The red layer 56R, green layer 56G, and blue layer 56B can each be formed from a single light-emitting layer, or they can be formed by stacking multiple layers. For example, the red layer 56R can be composed of two layers, with the red light-emitting layer forming the upper layer and a hole transport layer or an electron blocking layer forming the lower layer. Alternatively, the red light-emitting layer can form the lower layer, and an electron transport layer or a hole blocking layer can form the upper layer. By setting layers on the lower or upper sides of the light-emitting layers in this way, the light emission position in the light-emitting layers can be adjusted, and the light path length can be adjusted, thereby improving the color purity of the light-emitting element.

[0113] It should be noted that although an example of red layer 56R is shown here, the same structure can also be used in green layer 56G and blue layer 56B. Furthermore, the number of layers can be set to two or more. In addition, layers of different materials can be stacked, as with light-emitting layers and electron-blocking layers, or layers of the same material can be stacked, for example, by stacking two or more light-emitting layers.

[0114] In the manufacture of such electronic devices, the above-described film-forming apparatus 1 can be used, and the manufacturing method may include: a transfer step of transferring a substrate G; and a vapor deposition step of depositing at least one of the layers of the transferred substrate G by vapor deposition apparatus 114.

[0115] The invention is not limited to the embodiments described above, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, the claims are appended to disclose the scope of the invention.

Claims

1. A posture changing device, wherein the posture changing device causes a change in the posture of a substrate carrier, characterized in that, The posture changing device includes a rotation mechanism for rotating the substrate carrier. The rotating mechanism includes: Multiple rollers, the multiple rollers being arranged to clamp the substrate carrier; and A dust collection hood is disposed on at least one of the plurality of rollers, thereby individually surrounding each roller. The dust collection hood includes: The top, whereby the circumferential surface of the roller is exposed; The bottom, which is formed facing the circumferential surface of the roller; and A limiting wall portion, which is separately configured from the bottom, restricts the movement of dust from the bottom side to the top side when the rotating mechanism rotates the substrate carrier.

2. A posture changing device, wherein the posture changing device causes a change in the posture of a substrate carrier, characterized in that, The posture changing device includes a rotation mechanism for rotating the substrate carrier. The rotating mechanism includes: Multiple rollers, the multiple rollers being arranged to clamp the substrate carrier; and A dust collection hood is disposed on at least one of the plurality of rollers, thereby individually surrounding each roller. The dust collection hood includes: The bottom is formed facing the circumferential surface of the roller; The left and right sides are arranged vertically from the bottom in a manner facing the circumferential surface of the roller. A left-side intermediate plate, the left-side intermediate plate being formed in such a way that it protrudes from the left-side side to the right-side side; and The right-side middle plate is formed in such a way that it protrudes from the right-side side to the left-side side.

3. The posture changing device according to claim 2, characterized in that, The right end of the middle plate on the left side bends toward the bottom. The left end of the middle plate on the right side is bent toward the bottom.

4. The posture changing device according to claim 2, characterized in that, The left-side middle plate includes a first fixed part fixed to the left-side side and a first movable part whose angle is variable relative to the first fixed part. The middle plate on the right side includes a second fixed part fixed to the side of the right side and a second movable part whose angle is variable relative to the second fixed part.

5. The posture changing device according to claim 4, characterized in that, When the dust collection hood is positioned with its bottom facing downwards, the first movable part and the second movable part shift to form an opening between the middle plate on the left and the middle plate on the right. When the dust collection hood is positioned with the bottom facing upwards, the first movable part and the second movable part are displaced to close the opening.

6. The posture changing device according to any one of claims 1 to 5, characterized in that, A magnet is disposed at the bottom.

7. The posture changing device according to any one of claims 1 to 5, characterized in that, A removable tray is configured on the bottom.

8. The posture changing device according to any one of claims 1 to 5, characterized in that, The posture changing device includes: Multiple conveyor rollers, the multiple conveyor rollers conveying the substrate carrier; and A moving mechanism that moves the plurality of conveying rollers between a conveying position and a retraction position, wherein the retraction position is a position that avoids interference between the plurality of conveying rollers and the rotating mechanism or the substrate carrier when the rotating mechanism rotates.

9. The posture changing device according to any one of claims 1 to 5, characterized in that, The plurality of rollers includes: A plurality of first rollers, the plurality of first rollers being located on one side of the substrate carrier; and A plurality of second rollers are located on the other side of the substrate carrier. The plurality of first rollers and the plurality of second rollers alternate positions based on the rotation of the rotating mechanism.

10. A posture changing device, wherein the posture changing device causes a change in the posture of a substrate carrier, characterized in that, have: A rotating mechanism that rotates the substrate carrier; Multiple conveyor rollers convey the substrate carrier; and A moving mechanism that causes the plurality of conveying rollers to move parallel to each other along the roller axis direction between a conveying position and a retraction position, wherein the retraction position is a position that avoids interference between the plurality of conveying rollers and the rotating mechanism or the substrate carrier when the rotating mechanism rotates.

11. A film-forming apparatus, characterized in that, have: The posture changing device according to claim 1 or 10; and A vapor deposition apparatus for depositing vapor deposition material onto a substrate held on a substrate carrier.

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