Shaping apparatus and shaping method

Abstract

A shaping device includes a light beam shaping system (500) having a light beam irradiation section (520) including a condensing optical system (82) that emits a light beam, and a material processing section (530) that supplies a shaping material to be irradiated with the light beam from the light beam irradiation section (520), and a control device that controls a moving system of a workpiece and the light beam shaping system (500) in accordance with 3D data of a three-dimensional shaped object formed on an object surface, so that the object surface (TAS) on the workpiece (W) (or a stage (12)) is relatively moved with the light beam from the light beam irradiation section (520), and a shaping material is supplied from the material processing section (530) to apply shaping to a target portion (TA) on the object surface. Also, an intensity distribution of the light beam within a predetermined plane (MP) on an emission plane side of the condensing optical system can be changed. Therefore, a three-dimensional shaped object with high processing precision can be formed on the object surface.

Description

[0001] This application is a divisional application. The original application, application number 202010004929.7, was filed on November 14, 2014, and is entitled "Shaping Device and Shaping Method". The original application is also a divisional application; the corresponding parent application, application number 201480083369.1, was filed on November 14, 2014, and is also entitled "Shaping Device and Shaping Method". Technical Field

[0002] This invention relates to a shaping apparatus and method, and more specifically, to a shaping apparatus and method for forming three-dimensional objects on an object surface. The shaping apparatus and method of this invention are well-suited for the formation of three-dimensional objects based on rapid prototyping (sometimes referred to as 3D printing, additive manufacturing, or direct digital manufacturing). Background Technology

[0003] The technology of directly generating 3D shapes from CAD data is called rapid prototyping (sometimes also called 3D printing, additive manufacturing, or direct digital manufacturing, but hereinafter referred to as rapid prototyping). It helps to produce prototypes primarily for shape confirmation in a very short lead time. Prototyping devices that create three-dimensional objects using rapid prototyping, such as 3D printers, can be broadly categorized by the materials used: resin and metal. Metal 3D prototypes, unlike resin prototypes, are specifically designed for use as actual parts. That is, they are not prototypes for shape confirmation, but rather function as part of an actual mechanical structure (whether it is a mass-produced product or a prototype). Existing metal 3D printers (hereinafter referred to as M3DP (Metal 3D Printer)) are best known for two types: PBF (Powder-Bed Fusion) and DED (Directed Energy Deposition).

[0004] PBF (Pulsed Metal Fabrication) deposits a thin layer of sintered metal powder on a substrate holding the workpiece. A high-energy laser beam is then scanned at this area using a current microscope or similar instrument, causing the portion in contact with the beam to melt and solidify. After one layer is applied, the substrate is lowered by another layer, and sintered metal powder is applied again, repeating this process layer by layer to create the desired three-dimensional shape.

[0005] Due to its shaping principle, PBF has several inherent problems: (1) insufficient manufacturing precision of parts, (2) poor surface roughness of finished products, (3) slow processing speed, and (4) troublesome and time-consuming processing of sintered metal powder.

[0006] DED employs a method of adhering molten metal material to the workpiece. For example, powdered metal is sprayed near the focal point of a laser beam focused by a condenser lens. The powdered metal then melts into a liquid state due to laser irradiation. If a workpiece is located near this focal point, the liquefied metal adheres to the workpiece, cools, and solidifies again. This focal point is the so-called "pen tip," which can continuously draw "lines of thickness" on the surface of the workpiece. By appropriately moving one of the workpiece and the processing head (laser, powder spraying head, etc.) relative to the other based on CAD data, the desired shape can be shaped (see, for example, Patent Document 1).

[0007] This shows that in DED, since the amount of powder material sprayed from the processing head is only as needed, there is no waste and no need to process the large amount of remaining powder.

[0008] As mentioned above, although DED has made efforts to improve upon PBF in areas such as the processing of powdered metals as raw materials, there are still many areas that need improvement.

[0009] Against this backdrop, there is a strong expectation that the ease of use of the working machinery used to create three-dimensional objects will be improved, and ultimately the economic rationality of manufacturing will be enhanced.

[0010] Existing technical documents

[0011] [Patent Document 1] U.S. Patent Application Publication No. 2003 / 02606820 Summary of the Invention

[0012] The means to solve the problem

[0013] According to a first aspect of the present invention, a shaping apparatus is provided for forming a three-dimensional object on an object surface, comprising: a moving system for moving the object surface; a beam shaping system having a beam irradiation section including a focusing optical system that emits a beam, and a material processing section for supplying shaping material irradiated by the beam from the beam irradiation section; and a control device for controlling the moving system and the beam shaping system based on 3D data of the three-dimensional object formed on the object surface, so as to apply shaping to a target portion on the object surface by moving the object surface relative to the beam from the beam irradiation section while supplying the shaping material from the material processing section; and the ability to change the intensity distribution of the beam in a predetermined surface on the emitting surface side of the focusing optical system.

[0014] The object surface here refers to the surface of the target part of the shape, or the predetermined surface can be an imaginary surface that should be aligned with the object surface during the shaping process. For example, the predetermined surface can be a surface perpendicular to the optical axis of the focusing optical system. It can also be the rear focal plane of the focusing optical system or a surface near it.

[0015] This allows for the formation of highly precise three-dimensional shapes onto the object's surface.

[0016] According to a second aspect of the present invention, a shaping method is provided for forming a three-dimensional shape on an object surface, comprising: applying a shaping to a target portion on the object surface by supplying shaping material irradiated by the aforementioned beam while moving a beam from a beam irradiation section including a focusing optical system relative to the object surface; controlling the movement of the object surface and at least one of the emission state of the aforementioned beam from the aforementioned beam irradiation section and the supply state of the aforementioned shaping material based on 3D data of the three-dimensional shape formed on the object surface; and being able to change the intensity distribution of the aforementioned beam within a predetermined surface on the emission surface side of the aforementioned focusing optical system.

[0017] This allows for the formation of highly precise three-dimensional shapes onto the object's surface. Attached Figure Description

[0018] The following figures are intended only to illustrate and explain the invention and do not limit the scope of the invention. Wherein:

[0019] Figure 1 It is a block diagram showing the overall structure of a shaping device in an embodiment.

[0020] Figure 2 It is a diagram that roughly shows the composition of the mobile system together with the measurement system.

[0021] Figure 3 It is a 3D view showing the moving system carrying the workpiece.

[0022] Figure 4 This diagram shows the beam shaping system together with the stage on which the workpiece is mounted.

[0023] Figure 5 This diagram shows an example of a light source system that constitutes part of the beam illumination section of a beam shaping system.

[0024] Figure 6 It is a diagram showing the state in which a parallel beam of light from a light source illuminates a mirror array, and the incident angle of the reflected beams from each of the multiple mirror elements on the focusing optical system is controlled independently.

[0025] Figure 7 This diagram shows the material processing unit of the beam shaping system together with the focusing optical system.

[0026] Figure 8 It is a diagram showing multiple supply ports formed in the nozzle of the material handling section and the opening and closing components for each of the multiple supply ports.

[0027] Figure 9 (A) is to Figure 4 The image shown is enlarged within circle A. Figure 9 (B) is the display Figure 9 (A) shows the relationship between a text area and the scanning direction.

[0028] Figure 10 This is an example of a beam of light illuminating an area formed on a shaped surface.

[0029] Figure 11 It is a block diagram showing the input-output relationship of a control device centered on the control system of the shaping device.

[0030] Figure 12 (A) and (B) are diagrams used to illustrate an effect of a shaping device in one embodiment compared with the prior art.

[0031] Figure 13 This diagram illustrates an example of using three beams of light, each formed in one of three one-line regions, to perform additional processing on a workpiece.

[0032] Figure 14 It is a display Figure 13 The diagram shows the relationship between the configuration of the three one-character regions and the scanning direction.

[0033] Figure 15 (A) and (B) are illustrations of an example of increasing the coating thickness by slightly thickening the width of a text area.

[0034] Symbol Explanation

[0035] 12. Platform;

[0036] 62. Optical fiber guiding fiber;

[0037] 64. Binocular Optics System;

[0038] 66. Condensing lens system;

[0039] 70. Laser unit;

[0040] 78. Beam profile intensity conversion optical system;

[0041] 80. Mirror array;

[0042] 81. Reflector element;

[0043] 82. Concentrating optical system;

[0044] 83. Rotary encoder;

[0045] 85. Restricting components;

[0046] 89. Detection system;

[0047] 91. Supply outlet;

[0048] 100. Shaping devices;

[0049] 200. Mobile systems;

[0050] 500. Beam Shaping System;

[0051] 520. Beam irradiation part;

[0052] 530. Materials Processing Department;

[0053] 540. Sprinkler head;

[0054] 600. Control device;

[0055] BS, base;

[0056] PD, shaping materials;

[0057] LS, a text area;

[0058] LS1, the first text area;

[0059] LS2, the second text area;

[0060] LS3, the third text area;

[0061] MP, shaping surface;

[0062] TA, target area;

[0063] TAS, Object Plane;

[0064] W, workpiece;

[0065] WP, molten pool. Detailed Implementation

[0066] To provide a clearer understanding of the technical solution, objectives, and effects of the present invention, specific embodiments of the present invention will now be described in conjunction with the accompanying drawings.

[0067] The following is based on Figures 1-15 Explanation of the first implementation form. Figure 1 The overall structure of the shaping device 100 is shown in a block diagram, representing an implementation form.

[0068] The forming device 100 is a DED-type M3DP. While the forming device 100 can be used to create three-dimensional objects on the stage 12 (described later) through rapid prototyping, it can also be used for additional three-dimensional machining of workpieces (e.g., existing parts). In this embodiment, the description focuses on the latter application of additional machining to workpieces. In actual manufacturing environments, parts made using different methods, materials, or machinery are typically repeatedly machined to achieve the desired part; the requirements for additional three-dimensional machining are potentially similar.

[0069] The shaping device 100 includes a moving system 200, a measuring system 400, and a beam shaping system 500, as well as a control device 600 that includes these systems and controls the entire shaping device 100. The measuring system 400 and the beam shaping system 500 are separately configured in a predetermined direction. For convenience, in the following description, the measuring system 400 and the beam shaping system 500 are positioned in the X-axis direction (refer to...) Figure 2 Separate configuration.

[0070] Figure 2 The configuration of the mobile system 200 and the measurement system 400 are shown in a general outline. Meanwhile, Figure 3 Therefore, the perspective view shows the moving system 200 carrying the workpiece W. The following will... Figure 2 The left-right direction within the plane of the paper is defined as the Y-axis, the direction orthogonal to the plane of the paper is defined as the X-axis, the direction orthogonal to both the X-axis and Y-axis is defined as the Z-axis, and the rotation (tilt) directions around the X-axis, Y-axis, and Z-axis are defined as θx, θy, and θz, respectively, for explanation.

[0071] The moving system 200 modifies the object surface of the shape (here, the surface of the target part TA on the workpiece W) TAS (refer to an example). Figure 4 and Figure 9 The position and orientation of (A) are described. Specifically, the position of the object surface in six degrees of freedom is changed by driving the workpiece having the object surface and the stage carrying the workpiece (described later) in six directions of freedom (X-axis, Y-axis, Z-axis, θx, θy, and θz). In this specification, the positions in the three degrees of freedom directions of θx, θy, and θz for the stage, workpiece, or object surface are appropriately referred to as "orientation," and correspondingly, the positions in the remaining three degrees of freedom directions (X-axis, Y-axis, and Z-axis) are appropriately referred to as "position."

[0072] The motion system 200, as an example of a drive mechanism for changing the position and orientation of the stage, has a Stewart platform-type 6-DOF parallel linkage mechanism. Furthermore, the motion system 200 is not limited to being able to drive the stage in 6-DOF directions.

[0073] The moving system 200 (however, excluding the stator of the planar motor described later), such as Figure 2 As shown, it is mounted on a base BS on the ground F in a manner that is approximately parallel to the XY plane. The mobile system 200, as... Figure 3 The diagram shows a hexagonal slider 10 forming a base platform, a platform 12 forming an end effector, six telescopic rods (connectors) 141-146 connecting the slider 10 and the platform 12, and telescopic mechanisms 161-166 respectively provided on the rods 141-146 to extend and retract them. Figure 3 Not shown in the image, please refer to the diagram. Figure 11 The moving system 200 is a structure that allows for the independent adjustment of the lengths of rods 141-146 via telescopic mechanisms 161-166, enabling the movement of the platform 12 in three-dimensional space with six degrees of freedom. Because the moving system 200 utilizes a Stewart platform-type six-degree-of-freedom parallel linkage mechanism as the drive mechanism for the platform 12, it features high precision, high rigidity, large support force, and ease of inverse kinematics calculation.

[0074] In this embodiment of the shaping apparatus 100, during additional processing of a workpiece, the position and orientation of the workpiece (stage 12) are controlled relative to the beam shaping system 500, and more specifically, relative to the beam from the beam irradiation unit (described later), in order to shape the workpiece into a desired form. In principle, conversely, the beam from the beam irradiation unit can also be movable, and both the beam and the workpiece (stage) can be movable. As will be described later, because the beam shaping system 500 has a complex configuration, the method of moving the workpiece is relatively simple.

[0075] The platform 12 is constructed from a plate member shaped like a cut-off vertices of an equilateral triangle. A workpiece W, to be further processed, is mounted on the platform 12. The platform 12 is equipped with a clamping mechanism 13 for securing the workpiece W. Figure 3 Not shown in the image, please refer to the diagram. Figure 11 As the clamping mechanism 13, a mechanical clamp or a vacuum clamp, for example, is used. Furthermore, the stage 12 is not limited to... Figure 3 The shape shown can also be any shape such as a rectangular plate or a disc.

[0076] In this situation, if by Figure 3It is clear that the two ends of each of rods 141 to 146 are connected to the slide 10 and the platform 12 respectively via the universal joint 18. Furthermore, rods 141 and 142 are connected near one vertex of the triangle formed by the platform 12, and are configured to form an approximate triangle via the slide 10 and these rods 141 and 142. Similarly, rods 143 and 144, and rods 145 and 146 are connected near the remaining vertices of the triangle formed by the platform 12, and are configured to form approximate triangles via the slide 10 and these rods 143, 144 and 145, 146 respectively.

[0077] Each of these rods 141 to 146, as in Figure 3 As shown in the example of rod 141, it has a first axis member 20 and a second axis member 22 that can move relative to each other in their respective axial directions. One end (lower end) of the first axis member 20 is mounted to the slide 10 via a universal joint 18, and the other end (upper end) of the second axis member 22 is mounted to the platform 12 via a universal joint.

[0078] A stepped cylindrical hollow portion is formed inside the first shaft member 20, and a telescopic cylinder, for example, is housed at the lower end of this hollow portion. This cylinder is connected to an air compressor circuit and an air pressure source (neither shown). The internal pressure of the cylinder is controlled by controlling the compressed air supplied from the air pressure source via the air compressor circuit, thereby causing the piston of the cylinder to reciprocate in the axial direction. In the cylinder, the return step utilizes the gravity acting on the piston when assembled with the parallel linkage mechanism.

[0079] Meanwhile, on the upper side of the hollow portion of the first shaft member 20, an armature unit (not shown) composed of a plurality of armature coils arranged in the axial direction is disposed.

[0080] On the other hand, one end (lower end) of the second shaft member 22 is inserted into the hollow portion of the first shaft member 20. At one end of this second shaft member 22, a small diameter portion smaller than other parts is formed, and a cylindrical movable yoke composed of magnetic components is provided around this small diameter portion. A hollow cylindrical magnet body, composed of multiple permanent magnets of the same size, is provided on the outer periphery of the movable yoke. In this case, a hollow cylindrical magnet unit is formed by the movable yoke and the magnet body. In this embodiment, an electromagnetic linear motor, i.e., a shaft motor, is formed by the armature unit and the magnet unit. The shaft motor constructed in this way supplies a sinusoidal drive current with a predetermined period and amplitude to each coil of the stator, i.e., the armature unit, and the Lorentz force (driving force) generated by the electromagnetic interaction between the magnet unit and the armature unit drives the second shaft member 22 relative to the first shaft member 20 in the axial direction by the Lorentz force (driving force) generated by the electromagnetic interaction between the magnet unit and the armature unit.

[0081] That is, in this embodiment, the first shaft member 20 and the second shaft member 22 are driven relative to each other in the axial direction by the aforementioned cylinder and shaft motor, thereby forming the aforementioned telescopic mechanisms 161-166 (refer to) that respectively extend and retract the rods 141-146. Figure 11 ).

[0082] Furthermore, the mover of the shaft motor, i.e. the magnet unit, is supported in a non-contact manner relative to the stator, i.e. the armature unit, via an air cushion provided on the inner circumferential surface of the first shaft member 20.

[0083] Furthermore, in Figure 3 Although the illustrations are omitted, absolute linear encoders 241-246 are respectively provided on rods 141-146 to detect the axial position of the second shaft member 22 with the first shaft member 20 as a reference. The outputs of these linear encoders 241-246 are supplied to the control device 600 (see reference). Figure 11 The axial position of the second shaft member 22 detected by the linear encoders 241 to 246 corresponds to the length of each of the rods 141 to 146.

[0084] Based on the output of linear encoders 241-246, telescopic mechanisms 161-166 are controlled by control device 600 (see reference). Figure 11 The configuration of the parallel link mechanism, which is the same as that of the mobile system 200 in this embodiment, is detailed in, for example, U.S. Patent No. 6,940,582. The control device 600 controls the position and posture of the platform 12 via the telescopic mechanisms 161 to 166 using the same method disclosed in the aforementioned U.S. Patent No. 6,940,582, through inverse kinematic calculations.

[0085] In the moving system 200, the telescopic mechanisms 161-166, respectively installed on rods 141-146, are a type of axis motor consisting of cylinders and electromagnetic linear motors arranged in series (or parallel). Therefore, the control device 600 can coarsely drive the stage 12 by controlling the air pressure of the cylinders and finely move it by controlling the axis motors. As a result, the position (i.e., position and attitude) of the stage 12 in six degrees of freedom can be controlled accurately in a short time.

[0086] Furthermore, each of the rods 141 to 146 has an air cushion that supports the mover, i.e. the magnet unit, of the shaft motor in a non-contact manner relative to the stator, i.e. the armature unit. This avoids friction, which is a non-linear component, when controlling the extension and retraction of the rods via the telescopic mechanism. As a result, the position and orientation of the platform 12 can be controlled with higher precision.

[0087] Furthermore, in this embodiment, since the electromagnetic linear motor constituting the telescopic mechanism 161-166 uses a shaft motor, and the shaft motor uses a magnet unit with a cylindrical magnet on the mover side, magnetic flux (magnetic field) can be generated in all directions in the radial direction of the magnet. This omnidirectional magnetic flux helps to generate Lorentz force (driving force) due to electromagnetic interaction. Compared with, for example, a general linear motor, it can generate a significantly larger thrust, and it is easier to miniaturize compared with hydraulic cylinders.

[0088] Therefore, by using a movement system 200 in which each rod contains a shaft motor, it is possible to simultaneously achieve miniaturization and weight reduction as well as increased output, making it very suitable for use in a shaping device 100.

[0089] Furthermore, the control device 600 can dampen low-frequency vibrations by controlling the air pressure of the cylinders that constitute the telescopic mechanism and insulate high-frequency vibrations by controlling the current of the shaft motor.

[0090] The mobile system 200 further includes a planar motor 26 (see reference). Figure 11 A mover of a planar motor 26, composed of magnet units (or coil units), is provided on the bottom surface of the slider 10. Correspondingly, a stator of the planar motor 26, composed of coil units (or magnet units), is housed inside the base BS. Multiple air bearings (air hydrostatic bearings) are provided on the bottom surface of the slider 10 to surround the mover. Through these air bearings, the slider 10 is suspended and supported on the top surface (guide surface) of the highly flat base BS with predetermined gaps (spacing or clearance). The slider 10 is driven in the XY plane in a non-contact manner relative to the top surface of the base BS by the electromagnetic force (Lorentz force) generated by the electromagnetic interaction between the stator and mover of the planar motor 26. In this embodiment, the moving system 200 is as follows... Figure 1 As shown, it can be used in the measurement system 400, the beam shaping system 500, and the workpiece conveying system 300 (in Figure 1 Not shown in the image, please refer to the diagram. Figure 11 The positions of the platforms 12 allow for free movement between them. Furthermore, the moving system 200 may also have multiple platforms 12, each carrying a workpiece W. For example, while processing a workpiece held on one of the multiple platforms using the beam shaping system 500, measurement of a workpiece held on another platform using the measuring system 400 is possible. In this case, as long as the measuring system 400, the beam shaping system 500, and the workpiece transport system 300 (in...) are all in operation... Figure 1 Not shown in the image, please refer to the diagram. Figure 11The positions of the platforms should be arranged such that each platform can move freely. Alternatively, when using a platform that holds the workpiece during measurement with a dedicated measurement system 400 and a platform that holds the workpiece during processing with a dedicated beam shaping system 500, and the workpiece can be moved into and out of these two platforms by a workpiece conveying system, each slider 10 can be fixed to the base BS. Even when multiple platforms 12 are provided, each platform 12 can move in 6 degrees of freedom, and its position in the 6 degrees of freedom can be controlled.

[0091] Furthermore, the planar motor 26 is not limited to an air-bearing type; a magnetic levitation type planar motor can also be used. In the latter case, it is not necessary to install an air bearing on the slide 10. Moreover, either a moving magnet type or a moving coil type can be used as the planar motor 26.

[0092] The control device 600 can freely drive the slider 10 on the base BS in the X and Y two-dimensional directions by controlling at least one of the magnitude and direction of the current supplied to each coil of the coil unit constituting the planar motor 26.

[0093] In this embodiment, the moving system 200 includes a position measuring system 28 (refer to) for measuring the position information of the slider 10 in the X-axis and Y-axis directions. Figure 11 A two-dimensional absolute encoder can be used as the position measurement system 28. Specifically, a two-dimensional scale with a strip of absolute code covering the entire length of the X-axis is provided on the top of the base BS. Correspondingly, a light source such as a light-emitting element and an X-reader and a Y-reader are provided on the bottom surface of the slider 10. The X-reader and Y-reader are composed of an array of one-dimensional light-receiving elements arranged in the X-axis direction and an array of one-dimensional light-receiving elements arranged in the Y-axis direction, respectively receiving reflected light from the two-dimensional scale illuminated by the light beam emitted from the light source. As a two-dimensional scale, for example, a plurality of square reflective parts (markers) are arranged in two dimensions in two orthogonal directions (X-axis direction and Y-axis direction) at a certain period on a non-reflective substrate (0% reflectivity), and the reflectivity of the reflective parts has a step according to a predetermined rule. As a two-dimensional absolute encoder, the same configuration as that disclosed in U.S. Patent Application Publication No. 2014 / 0070073 can also be adopted. Using an absolute two-dimensional encoder with the same configuration as that disclosed in U.S. Patent Application Publication No. 2014 / 0070073, high-precision two-dimensional position information measurement can be performed, comparable to that of conventional incremental encoders. Because it is an absolute encoder, unlike incremental encoders, origin detection is not required. The measurement information from the position measurement system 28 is sent to the control device 600.

[0094] In this embodiment, as described later, the position information (shape information in this embodiment) of at least a portion of the object surface (e.g., the top surface) on the workpiece W mounted on the stage 12 is measured in three-dimensional space by the measurement system 400. Following this measurement, additional processing (shaping) is performed on the workpiece W. Therefore, when the shape information of at least a portion of the object surface on the workpiece W has been measured, the control device 600 establishes a correspondence between its measurement results and the measurement results of the linear encoders 241-246 installed on rods 141-146 and the position measurement system 28. This allows the control device 600 to associate the position and orientation of the object surface on the workpiece W mounted on the stage 12 with the reference coordinate system of the shaping device 100 (hereinafter referred to as the stage coordinate system). Consequently, through open-loop control of the stage 12's position in the six degrees of freedom directions based on the measurement results of the linear encoders 241-246 and the position measurement system 28, the position of the object surface TAS on the workpiece W relative to the target value in the six degrees of freedom directions can be controlled. In this embodiment, since absolute encoders are used as linear encoders 241-246 and position measurement system 28, it is not necessary to find the origin, thus resetting is easy. Furthermore, the position information in the aforementioned three-dimensional space to be measured by the measurement system 400, which is the position of the object surface on the workpiece W relative to the target value in the six-degree-of-freedom direction caused by open-loop control of the stage 12, is sufficient regardless of its shape, as long as it is at least three points of three-dimensional position information corresponding to the shape of the object surface.

[0095] Furthermore, while the above embodiment describes the use of a planar motor 26 as the drive device for driving the slider 10 in the XY plane, a linear motor can also be used instead of the planar motor 26. In this case, a position measurement system can be constructed that replaces the aforementioned two-dimensional absolute encoder and instead uses an absolute linear encoder to measure the position information of the slider 10. Moreover, the position measurement system for measuring the position information of the slider 10 is not limited to an encoder; an interferometer system can also be used.

[0096] Furthermore, while the above embodiments illustrate a case where a 6-DOF parallel linkage mechanism of a Stewart platform type, which drives the slide in the XY plane and forms a base platform via the slide, is used to construct the mechanism for driving the stage, it is not limited to this. Other types of parallel linkage mechanisms or mechanisms other than parallel linkage mechanisms can also be used to construct the mechanism for driving the stage. For example, a slide that moves in the XY plane and a Z-tilt drive mechanism that drives the stage 12 in the Z-axis direction and the tilt direction relative to the XY plane can also be used. As an example of such a Z-tilt drive mechanism, a mechanism can be given in which the stage 12 is supported from below at each vertex of a triangle via other joints such as universal joints, and has three actuators (voice coil motors, etc.) that can drive each support point independently in the Z-axis direction. However, the configuration of the stage of the driving motion system 200 is not limited to these. Any configuration capable of driving the stage (movable member) holding the workpiece in at least 5 degrees of freedom directions—3 degrees of freedom in the XY plane, the Z-axis direction, and the tilt direction relative to the XY plane—is acceptable. It may also omit the slider that moves in the XY plane. For example, a motion system can be constructed using the stage and the robot that drives it. Regardless of the configuration, as long as a combination of absolute linear encoders or a combination of such linear encoders and absolute rotary encoders is used to construct the measuring system for measuring the stage position, resetting can be easily achieved.

[0097] Alternatively, the moving system 200 can be replaced by a system capable of driving the stage 12 in at least five degrees of freedom directions: three in the XY plane, the Z-axis, and the tilt direction (θx or θy) relative to the XY plane. In this case, the stage 12 itself can be suspended and supported (non-contact supported) above a support member such as the base BS through a predetermined gap (spacing or gap) by air levitation or magnetic levitation. With this configuration, the stage moves non-contactly relative to the support member, which is extremely advantageous in terms of positioning accuracy and greatly contributes to improving the shaping accuracy.

[0098] The measurement system 400 measures the three-dimensional position information, such as shape, of the workpiece to establish a relationship between the position and orientation of the workpiece mounted on the stage 12 and the stage coordinate system. The measurement system 400, as... Figure 2 The three-dimensional measuring machine 401 shown is equipped with a laser non-contact type. The three-dimensional measuring machine 401 includes a frame 30 mounted on a base BS, a reading head 32 mounted on the frame 30, a Z-axis guide 34 mounted on the reading head 32, a rotation mechanism 36 located at the lower end of the Z-axis guide 34, and a sensor unit 38 connected to the lower end of the rotation mechanism 36.

[0099] The frame 30 is composed of a horizontal member 40 extending in the Y-axis direction and a pair of column members 42 supporting the horizontal member 40 from below at both ends in the Y-axis direction.

[0100] The reading head 32 is mounted on the horizontal member 40 of the frame 30.

[0101] Z-axis guide 34, mounted on read head 32, is movable in the Z-axis direction, via Z-drive mechanism 44 (in... Figure 2 Not shown in the image, please refer to the diagram. Figure 11 The Z-axis guide 34 is driven in the Z-axis direction. The Z-axis position (or displacement from the reference position) of the Z-axis guide 34 is controlled by the Z encoder 46 (in...). Figure 2 Not shown in the image, please refer to the diagram. Figure 11 )Measurement.

[0102] The rotation mechanism 36 drives the sensor unit 38 to rotate continuously (or in predetermined angular steps) relative to the read head 32 (Z-axis guide 34) about a rotation center axis parallel to the Z-axis within a predetermined angular range (e.g., 90 degrees (π / 2) or 180 degrees (π)). In this embodiment, the rotation center axis of the sensor unit 38 of the rotation mechanism 36 coincides with the center axis of the linear light irradiated from the irradiation section constituting the sensor unit 38 (described later). The rotation angle (or the θz direction position of the sensor unit) of the sensor unit 38 based on the rotation mechanism 36 from the reference position is determined by a rotation angle sensor 48, such as a rotary encoder (in... Figure 2 Not shown in the image, please refer to the diagram. Figure 11 (The measurement is being performed.)

[0103] Sensor 38 is used to detect the object placed on stage 12. Figure 2 The device is mainly composed of an irradiation unit 50 that irradiates the workpiece (W) with linear light for optical cutting, and a detection unit 52 that detects the optically cut surface (line) that appears on the surface of the workpiece due to the irradiated linear light. Furthermore, a processing unit 54 is connected to the sensor unit 38 to calculate the shape of the workpiece based on the image data detected by the detection unit 52. The processing unit 54 is included in the control device 600, which is used to coordinate and control the various components of the shaping device 100 in this embodiment (see reference). Figure 11 ).

[0104] The illumination unit 50, composed of a cylindrical lens (not shown) and a slit plate with a fine strip-shaped notch, is a component that receives illumination light from a light source and generates a fan-shaped linear beam 50a. LEDs, laser light sources, or SLDs (superluminescent diodes) can be used as the light source. When using LEDs, the light source can be formed inexpensively. Furthermore, when using laser light sources, because they are point light sources, they can produce linear beams with few aberrations, excellent wavelength stability, and a small half-width. Since a filter with a small half-width can be used to cut off stray light, the influence of interference can be reduced. Furthermore, when using SLDs, in addition to the characteristics of laser light sources, because their interference is lower than that of laser light, the generation of spots on the surface of the object being inspected can be suppressed. The detection unit 52 is a component that captures the linear beam 50a projected onto the surface of the object being inspected (workpiece W) from a direction different from the light illumination direction of the illumination unit 50. Furthermore, the detection unit 52 is composed of an imaging lens or CCD (not shown), and as described later, it moves the stage 12 to scan the object under test (workpiece W) at predetermined intervals using the linear light 50a. In addition, the positions of the irradiation unit 50 and the detection unit 52 are determined such that the incident direction of the linear light 50a on the surface of the object under test (workpiece W) onto the detection unit 52 forms a predetermined angle θ with the light irradiation direction of the irradiation unit 50. In this embodiment, the predetermined angle θ is set to, for example, 45 degrees.

[0105] The image data of the object to be inspected (workpiece W) captured by the detection unit 52 is sent to the processing unit 54, where predetermined image processing is performed to calculate the height of the surface of the object to be inspected (workpiece W) in order to determine the three-dimensional shape (surface shape) of the object to be inspected (workpiece W). In the image of the object to be inspected (workpiece W), the processing unit 54, based on the position information of the light cut surface (line) of the light beam 50a corresponding to the unevenness and deformation of the object to be inspected (workpiece W), uses the principle of triangulation to calculate the height of the surface of the object to be inspected (workpiece W) from the reference plane for each pixel in the length direction of the light cut surface (line) (line beam 91a), and performs the processing to determine the three-dimensional shape of the object to be inspected (workpiece W).

[0106] In this embodiment, the control device 600 moves the stage 12 in a direction approximately perpendicular to the longitudinal direction of the linear beam 50a projected onto the workpiece W, thereby causing the linear beam 50a to scan the surface of the workpiece W. The control device 600 detects the rotation angle of the sensor unit 38 using a rotation angle sensor 48, and moves the stage 12 in a direction approximately perpendicular to the longitudinal direction of the linear beam 50a based on the detection result. Thus, in this embodiment, since the stage 12 is moved when measuring the shape of the workpiece W, etc., as a prerequisite, the position and orientation (position in the 6 degrees of freedom) of the stage 12 are always set to a predetermined reference state when the workpiece W is held and moved below the sensor unit 38 of the measurement system 400. In the reference state, for example, when rods 141 to 146 are all at lengths (or minimum lengths) equivalent to the neutral point within the telescopic stroke range, the position of platform 12 in each direction of the Z-axis, θx, θy, and θz is (Z,θx,θy,θz) = (Z0,0,0,0). Furthermore, in this reference state, the position (X,Y) of platform 12 in the XY plane coincides with the X,Y position of slider 10 measured by position measurement system 28.

[0107] Subsequently, although the aforementioned measurements of the object under inspection (workpiece W) begin, the position of the stage 12 in the six degrees of freedom directions, including during these measurements, is managed in the stage coordinate system by the control device 600. That is, the control device 600 controls the planar motor 26 based on the measurement information from the position measurement system 28, and controls the telescopic mechanisms 161 to 166 based on the measurement values ​​from the linear encoders 241 to 246, thereby controlling the position of the stage 12 in the six degrees of freedom directions.

[0108] Furthermore, in cases where the optical cut-off method is used, such as in the three-dimensional measuring machine 401 of this embodiment, it is preferable to arrange the linear light 50a illuminating the workpiece (workpiece W) from the irradiation section 50 of the sensor section 38 in a direction orthogonal to the relative movement direction of the sensor section 38 and the stage 12 (workpiece W). For example, Figure 2 In this case, when the relative movement direction between the sensor unit 38 and the object being measured (workpiece W) is set to the Y-axis direction, it is preferable to arrange the line beam 50a along the X-axis direction. Using this method, relative movement with respect to the object being measured (workpiece W) can be effectively utilized during measurement, utilizing the entire area of ​​the line beam 50a, and the shape of the object being measured (workpiece W) can be measured in the optimal manner. A rotation mechanism 36 is provided so that the direction of the line beam 50a is always orthogonal to the aforementioned relative movement direction.

[0109] The aforementioned three-dimensional measuring machine 401 is constructed in the same manner as the shape measuring device disclosed in, for example, U.S. Patent Application Publication No. 2012 / 0105867. However, unlike the device described in U.S. Patent Application Publication No. 2012 / 0105867, where the scanning of the object to be detected by the linear light is performed by the movement of the sensor unit, in this embodiment, the scanning is performed by the movement of the stage 12. Furthermore, in this embodiment, either the Z-axis guide 34 or the stage 12 can be driven when the linear light scans the object to be detected in a direction parallel to the Z-axis.

[0110] In the measurement method of the 3D measuring machine 401 of this embodiment, a linear projection pattern composed of a single line of light is projected onto the surface of the object to be inspected using an optical cut-off method. Each time the linear projection pattern scans the entire surface of the object to be inspected, the linear projection pattern projected onto the object is photographed from an angle different from the projection direction. Then, from the photographed image of the object's surface, the height of the object's surface from the reference plane is calculated for each pixel along the length direction of the linear projection pattern using triangulation principles, thereby determining the 3D shape of the object's surface.

[0111] Furthermore, the three-dimensional measuring machine constituting the measuring system 400 can also use a device with the same configuration as the optical probe disclosed in, for example, U.S. Patent No. 7,009,717. This optical probe is composed of two or more optical groups, including two or more field-of-view directions and two or more projection directions. Each optical group contains one or more field-of-view directions and one or more projection directions, and at least one field-of-view direction and at least one projection direction differ between optical groups. Data obtained according to the field-of-view direction is generated only through patterns projected according to the projection directions of the same optical group.

[0112] The measurement system 400 may replace the aforementioned three-dimensional measuring machine 401, or, in addition to the aforementioned three-dimensional measuring machine, further include a mark detection system 56 that optically detects alignment marks (see reference). Figure 11 The mark detection system 56 can detect, for example, alignment marks formed on the workpiece. The control device 600 calculates the position and orientation of the workpiece (or stage 12) by accurately detecting the center positions (three-dimensional coordinates) of at least three alignment marks using the mark detection system 56. This mark detection system 56 can be configured to include, for example, a stereo camera. Alternatively, the mark detection system 56 can optically detect at least three alignment marks pre-formed on the stage 12.

[0113] In this embodiment, the control device 600 uses the 3D measuring machine 401 to scan the surface (object surface) of the workpiece W in the manner described above to obtain its surface shape data. Then, the control device 600 uses this surface shape data to perform minimum planarization processing to establish a relationship between the 3D position and orientation of the object surface on the workpiece and the stage coordinate system. Here, since the 6-DOF position of the stage 12 is managed by the control device 600 in the stage coordinate system, including the aforementioned measurement of the object being inspected (workpiece W), after the 3D position and orientation of the workpiece are established in relation to the stage coordinate system, the control of the 6-DOF position (i.e., position and orientation) of the workpiece W, including additional 3D modeling processing, can be performed through open-loop control of the stage 12 according to the stage coordinate system.

[0114] Figure 4 Display beam shaping system 500 and stage 12 carrying workpiece W. For example Figure 4 As shown, the beam shaping system 500 includes a beam irradiation unit 520 that emits a beam including a light source system 510, a material processing unit 530 that supplies powdered shaping material, and a water spray head 540 (in... Figure 4 Not shown in the image, please refer to the diagram. Figure 11 Furthermore, the beam shaping system 500 may also be without the sprinkler head 540.

[0115] Light source system 510, such as Figure 5 The device shown includes a light source unit 60, an optical guiding fiber 62 connected to the light source unit 60, a double compound eye optical system 64 disposed on the emitting side of the optical guiding fiber 62, and a condenser lens system 66.

[0116] The light source unit 60 includes a housing 68 and multiple laser units 70 housed inside the housing 68 and arranged in a matrix parallel to each other. As the laser units 70, various lasers that perform pulse oscillation or continuous wave oscillation can be used, such as carbon dioxide gas lasers, Nd:YAG lasers, fiber lasers, or GaN-based semiconductor lasers.

[0117] The optical guiding fiber 62 is an optical fiber bundle composed of a plurality of randomly bundled fiber optic lines. It has a plurality of input ports 62a, each independently connected to the output end of a plurality of laser units 70, and an output section 62b having a greater number of output ports than input ports 62a. The optical guiding fiber 62 receives and distributes a plurality of laser beams (hereinafter appropriately referred to as "beams") emitted from each of the plurality of laser units 70 through the input ports 62a to the plurality of output ports, so that at least a portion of each laser beam is emitted from a common output port. In this way, the optical guiding fiber 62 mixes and emits the beams emitted from each of the plurality of laser units 70. Therefore, compared with the use of a single laser unit, the total output and the number of laser units 70 can be increased accordingly. However, in cases where sufficient output can be obtained with a single laser unit, multiple laser units may not be used.

[0118] Here, the exit portion 62b has a cross-sectional shape similar to the overall shape of the entrance end of the first compound eye lens system, which constitutes the entrance end of the double compound eye optical system 64, as described below, and exit points are provided in a substantially equal arrangement within this cross-section. Therefore, the optical guiding fiber 62 also serves to shape the beam mixed in the above manner into a shaping optical system similar to the overall shape of the entrance end of the first compound eye lens system.

[0119] The double compound eye optical system 64 is used to ensure that the cross-sectional illuminance distribution (cross-sectional intensity distribution) of the beam (illumination light) is the same. It is composed of a first compound eye lens system 72, a lens system 74, and a second compound eye lens system 76 arranged sequentially on the beam path (optical path) of the laser beam behind the optical guiding fiber 62. In addition, an aperture is provided around the second compound eye lens system 76.

[0120] In this configuration, the incident surfaces of the first compound eye lens system 72 and the second compound eye lens system 76 are optically conjugate. Furthermore, the exit-side focal surface of the first compound eye lens system 72 (forming a surface light source as described later), the exit-side focal surface of the second compound eye lens system 76 (forming a surface light source as described later), and the pupil surface (incident pupil) PP of the condensing optical system 82 (described later) are optically conjugate. Additionally, in this embodiment, the pupil surface (incident pupil) PP of the condensing optical system 82 coincides with the front focal surface (see, for example...). Figure 4 , Figure 6 , Figure 7 wait).

[0121] The mixed light beam, guided by the optical fiber 62, enters the first compound eye lens system 72 of the double compound eye optical system 64. As a result, a surface light source, i.e., a secondary light source composed of multiple light source images (point light sources), is formed at the exit focal plane of the first compound eye lens system 72. The laser light from each of these multiple point light sources enters the second compound eye lens system 76 via the lens system 74. As a result, a surface light source (tertiary light source) is formed at the exit focal plane of the second compound eye lens system 76, where multiple tiny light source images are distributed in a region of a predetermined shape.

[0122] The focusing lens system 66 emits the laser light emitted from the above three light sources as a beam with uniform illuminance distribution.

[0123] Furthermore, by optimizing the area of ​​the incident end of the second compound eye lens system 76 and the focal distance of the condenser lens system 66, the beam emitted from the condenser lens system 66 can be considered as a parallel beam.

[0124] The light source system 510 of this embodiment has an illumination homogenization optical system having an optical guiding fiber 62, a double compound eye optical system 64, and a condenser lens system 66. Using this illumination homogenization optical system, the light beams emitted from multiple laser units 70 are mixed to generate a parallel light beam with a homogenized profile illumination distribution.

[0125] Furthermore, the illumination homogenization optical system is not limited to the above-described configuration. For example, rod integrators, collimating lens systems, etc., can also be used to construct the illumination homogenization optical system.

[0126] The light source unit 60 of the light source system 510 is connected to the control device 600. Through the control device 600, the on / off systems of the multiple laser units 70 constituting the light source unit 60 are controlled independently. As a result, the amount of light (laser output) of the laser beam irradiated from the beam irradiation unit 520 onto the workpiece W (the object surface) is adjusted.

[0127] Furthermore, the shaping device 100 may not include a light source unit 60, or a light source unit 60 and an illumination uniformity optical system. For example, a parallel beam of light with the desired light intensity (energy) and desired illumination uniformity may be supplied to the shaping device 100 from an external device.

[0128] Beam irradiation section 520 Figure 4As shown, in addition to the light source system 510, there is also a beam profile intensity conversion optical system 78 arranged sequentially on the optical path of the parallel beam from the light source system 510 (condenser lens system 66), a mirror array 80 (a type of spatial light modulator), and a focusing optical system 82 that focuses the light from the mirror array 80. Here, a spatial light modulator is a general term for elements that spatially modulate the amplitude (intensity), phase, or polarization state of light traveling in a predetermined direction.

[0129] The beam profile intensity conversion optical system 78 converts the intensity distribution of the profile of a parallel beam from the light source system 510 (condenser lens system 66). In this embodiment, the beam profile intensity conversion optical system 78 converts the parallel beam from the light source system 510 into a donut-shaped (ring-shaped) parallel beam with approximately zero intensity in the region including the center of its profile. In this embodiment, the beam profile intensity conversion optical system 78 is constructed, for example, by sequentially arranging a convex conical mirror and a concave conical mirror in the optical path of the parallel beam from the light source system 510. The convex conical mirror has a conical reflecting surface on its light source system 510 side, and the concave conical mirror is composed of an annular member whose inner diameter is larger than the outer diameter of the convex conical mirror, and has a reflecting surface on its inner circumference facing the reflecting surface of the convex conical mirror. In this case, if viewed through any cross-section passing through the center of the concave conical mirror, the reflecting surfaces of the convex conical mirror and the concave conical mirror are parallel. Therefore, the parallel beam from the light source system 510 is reflected radially by the reflecting surface of the convex conical mirror, and this reflected beam is reflected by the reflecting surface of the concave conical mirror, thus being converted into a ring-shaped parallel beam.

[0130] In this embodiment, the parallel beam transmitted via the beam profile intensity conversion optical system 78, as described below, illuminates the workpiece via the mirror array 80 and the focusing optical system 82. By converting the profile intensity distribution of the parallel beam from the light source system 510 using the beam profile intensity conversion optical system 78, the intensity distribution of the beam entering the pupil surface (incident pupil) PP of the focusing optical system 82 from the mirror array 80 can be changed. Furthermore, by converting the profile intensity distribution of the parallel beam from the light source system 510 using the beam profile intensity conversion optical system 78, the intensity distribution of the beam emitted from the focusing optical system 82 at the exit surface of the focusing optical system 82 can also be substantially changed.

[0131] Furthermore, the beam profile intensity conversion optical system 78 is not limited to a combination of a convex conical mirror and a concave conical mirror; it can also be constructed using, for example, a combination of a diffractive optical element, a telephoto lens, and a rotating conical prism system disclosed in U.S. Patent Application Publication No. 2008 / 0030852. The beam profile intensity conversion optical system 78 can be any optical system that converts the intensity distribution of the beam profile, and various configurations are possible. Depending on the configuration of the beam profile intensity conversion optical system 78, the intensity of a parallel beam from the light source system 510 can be reduced to approximately zero in the region containing its profile center (optical axis of the focusing optical system 82) and lower in intensity in regions outside of it.

[0132] In this embodiment, the mirror array 80 includes a base member 80A having a surface (hereinafter referred to as a reference surface) that forms a 45-degree (π / 4) angle with respect to the XY and XZ planes, respectively. It also includes M (=P×Q) mirror elements 81 arranged in a matrix, for example, P columns and Q rows, on the reference surface of the base member 80A. p,q (p = 1 to P, q = 1 to Q), and includes 81 elements that drive each mirror element independently. p,q The drive unit 87 of M actuators (not shown) Figure 4 Not shown in the image, please refer to the diagram. Figure 11 The mirror array 80 is configured by adjusting a plurality of mirror elements 81. p,q The inclination relative to the reference plane allows for the formation of a larger reflecting surface that is substantially parallel to the reference plane.

[0133] Each mirror element 81 of the mirror array 80 p,q For example, it can be configured to rotate around each of the reflector elements 81 p,q Rotating a diagonally parallel axis allows the tilt angle of its reflecting surface relative to a reference plane to be set to any angle within a predetermined range. The reflecting surface angle of each mirror element is determined by a sensor, such as a rotary encoder 83, that detects the rotation angle of the rotating axis. p,q (exist Figure 4 Not shown in the image, please refer to the diagram. Figure 11 To measure.

[0134] The drive unit 87, for example, includes an electromagnet or voice coil motor as an actuator, and each reflector element 81 p,q Driven by an actuator, it responds with a very high speed.

[0135] Among the multiple mirror elements constituting the mirror array 80, the mirror element 81 is illuminated by the annular parallel beam from the light source system 510. p,q Each of them emits a reflected beam (parallel beam) in the direction corresponding to the tilt angle of its reflecting surface, and enters the focusing optical system 82 (see reference).Figure 6 Furthermore, although the reasons for using the mirror array 80 and for directing the annular parallel beam into the mirror array 80 will be described later in this embodiment, it is not necessary to make it annular. The cross-sectional shape (cross-sectional intensity distribution) of the parallel beam entering the mirror array 80 may be different from the annular shape, and the beam cross-sectional intensity conversion optical system 78 may not be provided.

[0136] The focusing optical system 82 is an optical system with a high numerical aperture (NA) of, for example, 0.5 or more, preferably 0.6 or more, and low aberration. Because the focusing optical system 82 has a large aperture, low aberration, and high NA, it can focus multiple parallel beams from the mirror array 80 onto the rear focal plane. While details will be described later, the beam irradiation section 520 can focus the beam emitted from the focusing optical system 82 into, for example, a point shape or a slit shape. Furthermore, the focusing optical system 82 is constructed using one or more large-aperture lenses (in... Figure 4 (e.g., a representative illustration of a large-aperture lens) thus increases the area of ​​incident light, thereby capturing more light energy than when using a focusing optical system with a smaller numerical aperture (NA). Therefore, the focusing optical system 82 of this embodiment produces an extremely sharp beam with high energy density, which directly relates to improving the processing accuracy of additional shaping processes.

[0137] In this embodiment, it will be explained that the stage 12 is moved in a scanning direction parallel to the XY plane as described below. Figure 4 In the case of shaping (processing), for example, in the Y-axis direction, the laser beam is scanned relative to the workpiece W with the object surface TAS having a shape on its upper end in the scanning direction (SCAN direction) while shaping (processing). Furthermore, during shaping, the stage 12 can also be moved in at least one of the X-axis, Z-axis, θx, θy, and θz directions while moving in the Y-axis direction. Moreover, as described later, the energy of the laser beam melts the powdered shaping material (metallic material) supplied through the material processing unit 530. Therefore, as mentioned earlier, as the total energy captured by the focusing optical system 82 increases, the energy of the beam emitted from the focusing optical system 82 increases, and the amount of metal that can be melted per unit time increases. Correspondingly increasing the supply of shaping material and the speed of the stage 12 increases the shaping processing capacity of the laser beam shaping system 500.

[0138] However, even with a significant increase in the total laser output using the methods described above, it is practically impossible to fully utilize the laser power because the scanning motion of the stage 12 cannot be infinitely sped up. To address this issue, the shaping device 100 of this embodiment, as described below, illuminates the area of ​​a slit-shaped beam (hereinafter referred to as the "slit area") instead of the area illuminated by the dot beam. Figure 9 The symbol LS of (B) is formed on the given surface (hereinafter referred to as the shaping surface) MP of the object surface TAS that should be aligned with the shape (see example). Figure 4 and Figure 9 On (A), the beam (hereinafter referred to as the text beam) that forms the text area LS can be relative to the workpiece W in a direction perpendicular to its length direction while performing shaping (processing). Therefore, an area much wider than that of a workpiece scanned with a point beam (SCAN) can be processed in one go (for example, an area several to tens of times larger). Furthermore, as will be described later, in this embodiment, although the shaping surface MP is the rear focal surface of the focusing optical system 82 (see, for example...), Figure 4 and Figure 9 (A)), but the shaping surface can also be a surface near the rear focal surface. Furthermore, in this embodiment, although the shaping surface MP is perpendicular to the optical axis AX on the emission side of the focusing optical system 82, it can also be non-perpendicular.

[0139] As a method for setting or changing the intensity distribution of a light beam on the shaping surface MP (e.g., the method for forming a text area as described above), a method can be used, for example, to control the incident angle distribution of multiple parallel light beams incident into the focusing optical system 82. As in the focusing optical system 82 of this embodiment, a lens system that focuses parallel light to a point uses a parallel light beam LB in the pupil surface (incident pupil) PP (refer to, for example...). Figure 4 , Figure 6The incident angle of the beam into the pupil plane (focusing surface) determines the focusing position of the beam at the rear focal plane. This incident angle is determined by: a. the angle α (0 ≦ α < 90 degrees (π / 2)) formed by the parallel beam entering the pupil plane PP of the focusing optical system 82 relative to an axis parallel to the optical axis AX of the focusing optical system 82; and b. the angle β (0 ≦ β < 360 degrees (2π)) relative to the reference axis (e.g., the X-axis (X ≧ 0)) on the two-dimensional orthogonal coordinate system (X,Y) of the parallel beam entering the pupil plane PP when a point on the optical axis AX is taken as the origin and an orthogonal coordinate system (X,Y) is established on the pupil plane PP. For example, the incident angle is perpendicular to the pupil plane PP of the focusing optical system 82 (and...). A beam of light incident (with its optical axis parallel to the light source) is focused onto the optical axis AX. A beam of light slightly tilted relative to the focusing optical system 82 (relative to the optical axis AX) is focused onto a position slightly offset from the optical axis AX. Utilizing this relationship, when a parallel beam of light from the light source system 510 is reflected and incident onto the focusing optical system 82, by assigning an appropriate distribution to the incident angles (incident directions) of multiple parallel beams LB incident onto the pupil surface PP of the focusing optical system 82, the intensity distribution of the beams within the shaping surface MP can be arbitrarily changed. For example, at least one of the positions, numbers, sizes, and shapes of the irradiated areas within the shaping surface MP can be altered. Thus, for example, a single-character area, a three-line area, a missing single-character area, etc. (see reference...) Figure 10 It is also easy to form a point-shaped irradiation area. In addition, although angles α and β are used here to describe the incident angle (incident direction), various ways of representing the incident angle (incident direction) can be considered. The incident angle (incident direction) of the parallel beam entering the pupil plane PP is not limited to the control of angles α and β as parameters.

[0140] Furthermore, since the focusing optical system 82 of this embodiment has a configuration in which its pupil surface (incident pupil) PP is aligned with the front focal surface, although the focusing position of the multiple parallel beams LB using the mirror array 80 can be correctly and easily controlled by changing the incident angle of the multiple parallel beams LB, the focusing optical system 82 may also have a configuration in which the pupil surface (incident pupil) and the front focal surface are not aligned.

[0141] Furthermore, as long as the shape and size of the irradiation area formed on the shaping surface are not variable, the position of the irradiation area can be changed by using a solid reflector of the desired shape, which can control the incident angle of a parallel beam entering the pupil surface of the focusing optical system 82.

[0142] However, in cases where additional processing (shaping) is performed on a workpiece, the area of ​​the object surface where the shaping target is set is not necessarily a flat surface. That is, it is not limited to situations where relative scanning with a single beam of light is possible. For workpieces near the contour edges or at the boundaries between solid and hollow areas, where the boundaries are slanted, narrowed, or have rounded corners, relative scanning with a single beam of light is difficult to apply. For example, a wide brush bristle is difficult to cover such an area, therefore a correspondingly narrow brush bristle or fine pencil is required; that is, the brush bristles and fine pencil must be freely distinguished and used in real time and continuously. Similarly, near the contour edges of a workpiece or at the boundaries between solid and hollow areas, there is a need to change the width of the scanning direction (relative movement direction) of the beam irradiation area, or to change the size (e.g., the length of a single beam of light), the number of beams, or the position (the position of the beam's irradiation point).

[0143] Therefore, in this embodiment, a mirror array 80 is used, and the control device 600 controls each mirror element 81 with a very high response. p,q The operation controls the incident angles of multiple parallel beams LB incident on the pupil surface PP of the focusing optical system 82. This sets or changes the intensity distribution of the beams on the shaping surface MP. In this case, the control device 600 can change at least one of the intensity distributions of the beams on the shaping surface MP, such as the shape, size, or number of the irradiated area, during the relative movement of the beams and the target surface TAS (the surface on which the shaping target area TA is set, which in this embodiment is the surface on the workpiece W). In this case, the control device 600 can change the intensity distribution of the beams on the shaping surface MP continuously or intermittently. For example, the width of the relative movement direction of a text area can be changed continuously or intermittently during the relative movement of the beams and the target surface TAS. The control device 600 can also change the intensity distribution of the beams on the shaping surface MP according to the relative position of the beams and the target surface TAS. The control device 600 can also change the intensity distribution of the beams on the shaping surface MP according to the required shaping accuracy and production capacity.

[0144] Furthermore, in this embodiment, the control device 600 uses the aforementioned rotary encoder 83. p,q The state of each mirror element (here, the tilt angle of the reflecting surface) is detected, thereby monitoring the state of each mirror element in real time, and thus correctly controlling the tilt angle of the reflecting surface of each mirror element of the mirror array 80.

[0145] Materials Processing Department 530 Figure 7The device shown includes: a nozzle unit 84 having a nozzle component (hereinafter referred to as a nozzle) 84a disposed below the emission surface of the focusing optical system 82, a material supply device 86 connected to the nozzle unit 84 via a pipe 90a, and a plurality of powder cartridges 88A, 88B respectively connected to the material supply device 86 via pipes. Figure 7 The display shows the view from the -Y direction. Figure 4 The portion below the focusing optical system 82.

[0146] The nozzle unit 84 includes a nozzle 84a extending below the focusing optical system 82 in the X-axis direction and having at least one supply port for supplying powder for shaping material, and a pair of support members 84b and 84c supporting both ends of the nozzle 84a in the longitudinal direction, with each upper end connected to the housing of the focusing optical system 82. One of the support members 84b is connected to one end (lower end) of the material supply device 86 via a pipe 90a, and a supply path connecting the pipe 90a and the nozzle 84a is formed internally. In this embodiment, the nozzle 84a is positioned directly below the optical axis of the focusing optical system 82, and a plurality of supply ports (described later) are provided on its lower surface. Furthermore, the nozzle 84a does not necessarily have to be positioned on the optical axis of the focusing optical system 82; it can also be positioned slightly offset to one side from the optical axis in the Y-axis direction.

[0147] At the other end (upper end) of the material supply device 86, pipes 90b and 90c are connected as supply paths to the material supply device 86. Powder cartridges 88A and 88B are connected to the material supply device 86 via pipes 90b and 90c, respectively. One powder cartridge 88A contains powder of a first shaping material (e.g., titanium). The other powder cartridge 88B contains powder of a second shaping material (e.g., stainless steel).

[0148] Furthermore, in this embodiment, although the shaping device 100 has two powder boxes for supplying two types of shaping materials to the material supply device 86, the powder box provided by the shaping device 100 may also be one.

[0149] While the powder supply from powder cartridges 88A and 88B to the material supply device 86 can also enable each of the powder cartridges 88A and 88B to forcibly supply powder to the material supply device 86, in this embodiment, the material supply device 86 has the function of switching between piping 90b and 90c, and also has the function of drawing powder from either of the powder cartridges 88A and 88B using vacuum. The material supply device 86 is connected to the control device 600 (see reference). Figure 11During shaping, the control device 600 switches between piping 90b and 90c using the material supply device 86. Powder from a first shaping material (e.g., titanium) from powder cartridge 88A and powder from a second shaping material (e.g., stainless steel) from powder cartridge 88B are selectively supplied to the material supply device 86. From the material supply device 86, powder from either shaping material is supplied to the nozzle 84a via piping 90a. Alternatively, by changing the configuration of the material supply device 86, it is possible to simultaneously supply the first shaping material from powder cartridge 88A and the second shaping material from powder cartridge 88B to the material supply device 86 when necessary, and supply a mixture of the two shaping materials to the nozzle 84a via piping 90a. Furthermore, a nozzle that can be connected to powder cartridge 88A and another nozzle that can be connected to powder cartridge 88B can be positioned below the focusing optical system 82, allowing powder to be supplied from either nozzle or from both nozzles during shaping.

[0150] Furthermore, the control device 600 can adjust the amount of shaping material supplied per unit time from powder cartridges 88A and 88B to nozzle 84a via material supply device 86. For example, by adjusting the amount of powder supplied from at least one of powder cartridges 88A and 88B to material supply device 86, the amount of shaping material supplied per unit time to nozzle 84a via material supply device 86 can be adjusted. For example, by adjusting the vacuum level used for powder supply from powder cartridges 88A and 88B to material supply device 86, the amount of shaping material supplied to nozzle 84a per unit time can be adjusted. Alternatively, a valve can be provided to adjust the amount of powder supplied from material supply device 86 to pipe 90a to adjust the amount of shaping material supplied to nozzle 84a per unit time.

[0151] Here, Figure 7 Although not illustrated, it is actually located below (on the bottom surface) of nozzle 84a. Figure 8 As shown, multiple, for example, N, supply ports 91 are formed at equal intervals along the X-axis direction. i (i = 1 to N), each supply port 91 i 93 can be opened and closed i They open and close independently. Furthermore, Figure 8 For ease of illustration, port 91 is provided. i As an example, there are 12 supply ports, and two different illustrations are provided to illustrate the relationship between the supply ports and the opening / closing mechanism. However, in reality, more than 12 supply ports are formed, and the separation between adjacent supply ports is narrower. Nevertheless, the number of supply ports is not important as long as they are configured to cover approximately the entire length of the nozzle 84a. For example, the supply port may also be a slit-like opening covering approximately the entire length of the nozzle 84a.

[0152] Opening and closing components 93 i , such as in Figure 8 For the k-th opening and closing component 93 k The arrows represent the ability to slide in the +Y and -Y directions to supply port 91. i Opening and closing. Opening and closing components 93 i It is not limited to sliding drive; it can also be a configuration that can rotate in an inclined direction with one end as the center.

[0153] 93 opening and closing components i The control device 600 is driven and controlled via an actuator (not shown). The control device 600 uses each opening and closing member 93 to adjust (or change) the intensity distribution of the light beam on the shaped surface, such as the shape, size, and arrangement of the irradiation area of ​​the light beam formed on the shaped surface. i Opening and closing control of multiple, e.g., N, supply ports 91 i Each of them. Therefore, the supply operation of the shaping material by the material processing unit 530 is controlled. In this case, the control device 600 selects multiple supply ports 91. i At least one supply port, the opening / closing member 93 of the selected at least one supply port is closed only. i It is open and controlled, for example, driven in the Y direction. Therefore, in this embodiment, it is possible to supply from only a plurality of, for example, N, supply ports 91 i A portion of the supply is for shaping materials.

[0154] Furthermore, the control device 600 can also control the amount of shaping material supplied to the nozzle 84a per unit time via the aforementioned material supply device 86, and uses the arbitrary opening and closing member 93. i At least one of the opening and closing controls is used to adjust the opening and closing mechanism 93. i Opening and closing supply port 91 i The amount of shaping material supplied per unit time. The control device 600 determines the amount of material supplied from any supply port 91 based on the intensity distribution of the light beam on the shaping surface, such as the shape, size, and arrangement of the irradiation area of ​​the light beam formed on the shaping surface (or changes thereto). i The amount of shaping material supplied per unit time. The control device 600, for example, determines the amount of material supplied from each supply port 91 based on the scanning direction width of the aforementioned text area. i The supply per unit of time.

[0155] In addition, it can also be configured to allow passage through each opening and closing component 93 i Adjustments to each supply point 91 i The opening degree. In this case, the control device 600 can also adjust each opening and closing member 93 according to, for example, the scanning direction width of a text area as described above. iThe opening degree of each supply port.

[0156] Furthermore, at least one supply port for the powder used to supply the shaping material can also be movable. For example, a slit-shaped supply port extending in the X-axis direction can be formed below the nozzle 84a, and the nozzle 84a can be moved relative to a pair of support members 84b, 84c in at least one of the X-axis and Y-axis directions, for example. The control device 600 moves the nozzle 84a with the supply port formed below according to changes in the intensity distribution of the light beam on the shaping surface, i.e., changes in the shape, size, and position of the irradiation area of ​​the light beam. Additionally, the nozzle 84a can also be movable in the Z-axis direction.

[0157] Alternatively, the nozzle 84a may be composed of a main body and at least two movable members that are movable relative to the main body in at least one of the X-axis and Y-axis directions, and have a supply port formed on their bottom surface. The control device 600 may then move at least a portion of the movable members according to changes in the intensity distribution of the light beam on the shaped surface. In this case, at least a portion of the movable members may also be movable in the Z-axis direction.

[0158] Furthermore, one of the multiple supply ports may be configured to move relative to another. Alternatively, for example, the Y-axis position of one supply port may differ from that of another supply port. Or, the Z-axis position of one supply port may differ from that of another supply port.

[0159] Furthermore, the movement of at least one supply port can be coordinated not only with the setting or alteration of the intensity distribution of the beam, but also for other purposes.

[0160] As mentioned above, multiple supply ports 91 are provided at nozzle 84a. i It is orthogonal to the optical axis of the focusing optical system 82 and covers the entire length of the nozzle 84a in the X-axis direction, arranged at equal intervals and adjacent to the supply port 91. i There are only slight gaps between them. Therefore, if... Figure 9 As shown by the black arrow in (A), as long as multiple supply ports 91 of nozzle 84a are available. iEach of the powdered shaping material PDs is supplied downwards along the Z-axis direction, which is parallel to the optical axis AX of the focusing optical system 82. This supplies the shaping material PD to the aforementioned text area LS (the area irradiated by the text beam) directly below the optical axis AX of the focusing optical system 82. In this case, the supply of the shaping material PD from the nozzle 84a can be achieved by utilizing the weight of the shaping material PD or by applying a slight ejection pressure. Therefore, complex mechanisms such as airflow generation mechanisms for guiding the supply of the shaping material are not required, as is the case when the shaping material is supplied from an inclined direction to the object being shaped. Furthermore, if the shaping material can be supplied to the workpiece perpendicularly at a very close distance, as in this embodiment, it is extremely advantageous in ensuring the machining accuracy of the shaping process.

[0161] In addition, a gas supply port may be provided at the nozzle 84a. The gas supplied from this gas supply port may be flowed to guide the supply of shaping material, or for other purposes such as to facilitate the flow of gas that aids in shaping.

[0162] In this embodiment, since the annular parallel beam irradiates the mirror array 80, the reflected beam from the mirror array 80 enters a portion of the area near the periphery of the focusing optical system 82 (the area with a larger NA), and is focused onto the shaping surface MP of the focusing optical system 82 (which is consistent with the rear focal plane of the focusing optical system 82 in this embodiment) via the peripheral region of the terminal lens located at the exit end of the focusing optical system 82, i.e., at the exit end of the beam irradiation section 520, which is a distance away from the optical axis. (Refer to...) Figure 4 That is, a beam of light, for example a letter, is formed only by light passing through the periphery of the same focusing optical system 82. Therefore, compared to the case where light from each optical system is focused into the same area to form a beam point (laser point), a higher quality beam point can be formed. Furthermore, in this embodiment, the beam illumination to the nozzle 84a located below the center of the emission surface (lower end surface) of the focusing optical system 82 can be restricted. Therefore, in this embodiment, all reflected beams from the mirror array 80 can be used for beam point formation, and it is not necessary to provide a light-shielding member or the like to restrict the beam illumination to the nozzle 84a on the incident surface side of the focusing optical system 82 corresponding to the nozzle 84a. For the above reasons, the mirror array 80 is illuminated by a ring-shaped parallel beam.

[0163] Furthermore, the optical component located at the emission end of the condensing optical system 82 forms an optical surface at least in the region away from the optical axis of its emission side surface, as long as the light beam can be focused onto the shaping surface (rear focal surface) via this optical surface. Therefore, in this optical component, at least one of the emission surface and the incident surface in the region containing the optical axis can be a plane perpendicular to the optical axis of the condensing optical system 82, or an aperture can be formed in the region containing the optical axis. The optical component located at the emission end of the condensing optical system 82 can also be constituted by a donut-shaped condensing lens with an opening in the central region containing the optical axis.

[0164] Furthermore, in order to limit the light beam entering the nozzle 84a from the focusing optical system 82, for example, Figure 7 A limiting member 85, shown as a two-point chain, is provided on the incident surface side (e.g., the pupil surface PP) of the focusing optical system 82. The limiting member 85 restricts the incident light beam from the focusing optical system 82 onto the nozzle 84a. Although a light-shielding member can be used as the limiting member 85, a light-reducing filter or the like can also be used. In this case, the parallel light beam incident on the focusing optical system 82 can be a parallel light beam with a circular cross-section or a parallel light beam with a ring shape. If it is the latter, since the light beam will not irradiate the limiting member 85, the reflected light beam from the mirror array 80 can be used to form the beam point.

[0165] Furthermore, although it is not necessary to completely block the light beam that enters the nozzle 84a from the condensing optical system 82, in order to prevent the light beam from the condensing optical system 82 from entering the nozzle 84a, the light beam may be emitted only from the peripheral region (e.g., two arc regions) of the exit surface of the terminal lens of the condensing optical system 82 that is separated from the optical axis on both sides in the Y-axis direction.

[0166] Sprinkler head 540 (reference) Figure 11 This is used for so-called quenching. The spray head 540 has a supply port for supplying coolant (cooling water) to spray the coolant onto the object being cooled. The spray head 540 is connected to the control device 600 (see reference). Figure 11 During quenching, the control device 600 controls the light source unit 60 to adjust the thermal energy of the light beam from the light beam irradiation unit 520 to a value suitable for quenching. Then, after irradiating the workpiece surface with the light beam to raise it to a high temperature, the control device 600 sprays coolant onto the high-temperature area via the spray head 540 to rapidly cool it, thereby performing quenching. In this case, the quenching step can also be performed simultaneously with additional machining of the workpiece through three-dimensional shaping. Furthermore, when the quenching step is performed simultaneously with additional machining, a metal with good hardenability is preferably used as the shaping material.

[0167] In this embodiment, during additional processing of the workpiece, such as... Figure 4 and Figure 4 The enlarged display inside circle AFigure 9 As shown in (A), the light beam passing through the periphery of the focusing optical system 82 and through the +Y and -Y sides of the nozzle 84a (in front of and behind the scanning direction of the workpiece W (stage 12)) is in the optical path (in Figure 9 (A) is shown for convenience as beams LB11, LB12) focused directly below nozzle 84a, in the X-axis direction ( Figure 9 (A) The orthogonal direction of the paper surface) is used as the length direction to form a text region LS on the shape surface (refer to) Figure 9 (B)) A beam of light for forming the text region LS is supplied through multiple supply ports 91 of nozzle 84a. i Powdered shaping material PD is supplied along the Z-axis (along the XZ plane containing the optical axis AX) parallel to the optical axis AX of the focusing optical system 82. This forms a linear molten pool WP extending in the X-axis direction directly below the nozzle 84a. Furthermore, this molten pool WP is formed while the stage 12 is scanned in the scanning direction (…). Figure 9 (A) is in the +Y direction), and the process is carried out on one side. Thus, a weld bead (molten metal after solidification) BE with a predetermined width covering the length (X-axis direction) of a text beam (molten pool WP) can be formed. Furthermore, Figure 9 The light beams LB11 and LB12 shown in (A) can also be the individual mirror elements 81 of the mirror array 80. p，q Different parallel beams reflected and incident at different incident angles into the pupil surface PP of the focusing optical system 82 can also be part of the same parallel beam, such as a sectioned annular parallel beam.

[0168] When multiple parallel beams are incident on the pupil surface PP of the focusing optical system 82, for example, without reducing the number of parallel beams LB incident on the focusing optical system 82, but by adjusting the incident angle of the multiple parallel beams LB incident on the focusing optical system 82 in a manner that gradually narrows the width of a single beam in the X-axis direction or the Y-axis direction, or both, the focusing density (energy density) of the beam increases. Therefore, by correspondingly increasing the powder (shaping material) supply per unit time and increasing the scanning speed of the target surface TAS, the layer thickness of the formed solder bead BE can be kept constant and the production capacity can be maintained at a high level. However, this adjustment method is not limited to this one, and other adjustment methods can also be used to keep the layer thickness of the formed solder bead BE constant. For example, the laser output (energy of the laser beam) of at least one of the multiple laser units 70 can be adjusted according to the width of a single beam in the X-axis direction or the Y-axis direction, or both, and the number of parallel beams LB incident on the focusing optical system 82 from the mirror array 80 can also be changed. In this case, although the production capacity is slightly reduced compared to the above adjustment methods, the adjustment is simpler.

[0169] Figure 11 The diagram shows the input and output relationships of a control device 600 centered on the control system of the shaping device 100. The control device 600 includes a workstation (or microcomputer), etc., and coordinates the control of all components of the shaping device 100.

[0170] The basic function of the forming device 100 of this embodiment, configured as described above, is to attach a desired shape to an existing part (workpiece) through three-dimensional forming. The workpiece is fed into the forming device 100 and, after being correctly attached with the desired shape, is removed from the forming device 100. At this time, the actual shape data of the attached shape is sent from the device to an external device, such as a host device. A series of actions performed by the forming device 100 are roughly as follows.

[0171] When the platform 12 is in the predetermined loading / unloading position, the workpiece W is mounted on the platform 12 by the workpiece conveying system 300. At this time, the platform 12 is in the aforementioned reference state (Z,θx,θy,θz)=(Z0,0,0,0), and its XY position is consistent with the X,Y position of the slider 10 measured by the position measuring system 28.

[0172] Next, the stage 12 carrying the workpiece W is moved below the measuring system 400 by the control device 600. The movement of the stage 12 is achieved by the control device 600 controlling the planar motor 26 according to the measurement information of the position measuring system 28, so that the slider 10 is driven on the base BS in the X-axis direction (and Y-axis direction). During this movement, the stage 12 is maintained in the aforementioned reference state.

[0173] Using the control device 600 and the measurement system 400, the position information (shape information in this embodiment) of at least a portion of the object surface TAS on the workpiece W, which is on the stage 12 in a reference state, is measured in three-dimensional space. After this measurement, the position of the object surface TAS on the workpiece W in six degrees of freedom directions can be managed by open-loop control in the stage coordinate system (reference coordinate system) based on the measurement results.

[0174] Next, the stage 12, which carries the workpiece W with at least a portion of the shape information of the object surface TAS that has been measured, is moved below the beam shaping system 500 by the control device 600.

[0175] Next, additional machining is performed on the workpiece on the stage 12 to create a three-dimensional shape corresponding to the 3D data. This additional machining is performed in the following manner.

[0176] That is, the control device 600 takes the 3D CAD data of the shape to be added through additional processing (the shape after removing the shape of the workpiece as the object to be added processing from the shape of the object produced after additional processing) as data for 3D modeling, converts it into, for example, STL (Stereo Lithography) data, and then generates data for each layer sliced ​​in the Z-axis direction from the 3D STL data. Next, based on the data of each layer, in order to perform additional processing on each layer of the workpiece, the control device 600 controls the movement system 200 and the beam modeling system 500 to repeatedly perform the following actions for each layer: while scanning the stage 12 in the scanning direction, forming the aforementioned text area and forming a linear (slit-like) molten pool caused by supplying modeling material from the nozzle 84a to the text beam. Here, the control of the position and posture of the object surface on the workpiece during additional processing is performed taking into account the shape information of the object surface measured previously.

[0177] Here, in the above description, the object surface (e.g., the one above) of the workpiece W as the target area TA for additional processing is assumed to be a plane that is perpendicular to the optical axis of the focusing optical system 82 (parallel to the XY plane) by adjusting the tilt of the stage 12, and the shaping is performed in conjunction with the scanning motion of the stage 12. However, the object surface of the workpiece as the target area for additional processing is not limited to a plane that can be used with a single beam of light. However, the shaping device 100 of this embodiment has a movement system 200 that can set the position of the stage 12 carrying the workpiece in six degrees of freedom to any position. Therefore, in this situation, the control device 600 controls the movement system 200 and the beam irradiation section 520 of the beam shaping system 500 based on the three-dimensional shape of the workpiece measured by the measurement system 400. While adjusting the X-axis width of the beam irradiation area on the shaping surface MP to a degree that aligns with the flatness of the object surface (e.g., the top) on the workpiece W on the shaping surface MP, allowing for additional processing within the beam irradiation area on the shaping surface MP, the control device 600 controls the opening and closing members 93 of the nozzle 84a. i Conduct supply port 91 i The opening and closing operation supplies shaping material from the necessary supply port to the beam illuminating the irradiation area. Thus, even if the surface of the workpiece (object surface) is not flat, shaping can be applied to the necessary parts.

[0178] Furthermore, when performing bead-based shaping, additional processing (bead formation) can be performed using a beam with a small width in the X-axis direction of the irradiation area on the shaping surface. After forming a large-area plane, a line beam with an increased width in the X-axis direction of the irradiation area on the shaping surface can be used to perform additional processing (bead formation) on that plane. For example, when shaping an object surface with uneven surfaces, additional processing (bead formation) can be performed by filling recesses with a beam with a small width in the X-axis direction of the irradiation area on the shaping surface. After forming a plane, a line beam with an increased width in the X-axis direction of the irradiation area on the shaping surface MP can be used to perform additional processing (bead formation) on that plane. In this case, of course, the shaping material powder is supplied from one or more supply ports selected according to the size (width) of the irradiation area of ​​the beam on the shaping surface MP.

[0179] After the additional processing of workpiece W is completed, the platform 12 carrying the additionally processed workpiece W is moved to the aforementioned loading / unloading position by the control device 600.

[0180] Next, the workpiece unloading is instructed to the workpiece conveying system 300 by the control device 600. Based on this instruction, the additionally processed workpiece W is removed from the platform 12 and transported to the outside of the forming device 100 via the workpiece conveying system 300. Then, the platform 12 of the moving system 200 is set to a reference state by the control device 600. Thus, the moving system 200 is ready to receive the next workpiece at the loading / unloading position.

[0181] As detailed above, according to the forming apparatus 100 of this embodiment and the forming method performed by the forming apparatus 100, the intensity distribution of the light beam within the forming surface MP can be continuously changed not only before the start of forming via the relative movement of the light beam and the target surface TAS, but also during the relative movement of the light beam and the target surface TAS, as needed. Furthermore, it can be changed according to the relative position of the target surface TAS and the light beam, and thus according to the required forming accuracy and throughput. Therefore, the forming apparatus 100, for example, can form objects on the target surface TAS of the workpiece W with high processing accuracy and high throughput through rapid prototyping.

[0182] Furthermore, the shaping apparatus 100 and the shaping method performed by the shaping apparatus 100, when performing additional processing (shaping) on ​​a relatively wide area on a flat object surface TAS, employ a single beam of light to supply powdered shaping material PD from nozzle 84a to form a linear molten pool WP directly below nozzle 84a, while the stage 12 is scanned in the scanning direction (in the scanning direction). Figure 4 This method involves forming a molten pool (WP) along the +Y direction. According to this method, conventional 3D printers, without using... Figure 12The shape shown in (B) cannot be generated by a point beam of light going back and forth dozens of times; it can be like... Figure 12 As shown in (A), the shape can be generated by several round trips of the stage 12 relative to the linear beam. According to this embodiment, compared with the so-called one-stroke shaping using conventional point beams, the shape can be formed on the object surface of the workpiece in a much shorter time. That is, this also improves production capacity.

[0183] Furthermore, according to the shaping apparatus 100 of this embodiment and the shaping method performed by the shaping apparatus 100, since the intensity distribution of the light beam of the focusing optical system 82 in the shaping surface is changed by changing the tilt angle of the reflecting surface of each reflecting mirror element of the reflecting mirror array 80, at least one of the position, number, size, and shape of the irradiation area of ​​the light beam in the shaping surface can be easily changed as a change in intensity distribution. Therefore, for example, by setting the irradiation area as a point, a slit (line), etc., three-dimensional shaping can be applied to the object surface on the workpiece using the aforementioned method, thereby forming a high-precision three-dimensional shaped object.

[0184] Furthermore, the forming apparatus 100 of this embodiment has multiple powder cartridges 88A and 88B, for example, two, each containing powder of a first forming material (e.g., titanium) and powder of a second forming material (e.g., stainless steel). During additional processing (forming), the powder supply path of the nozzle unit 84, i.e., pipes 90b and 90c, using the material supply device 86, is switched by the control device 600. Thus, powder of the first forming material (e.g., titanium) from powder cartridge 88A and powder of the second forming material (e.g., stainless steel) from powder cartridge 88B are selectively supplied to the nozzle unit 84. Therefore, by simply switching the corresponding part of the powder material supplied by the control device 600, a joint shape of dissimilar materials can be easily generated. Moreover, the switching can be performed approximately instantaneously. Furthermore, an "alloy" can be produced on-site by mixing dissimilar materials, and its composition can be changed or gradients can be created depending on the situation.

[0185] Furthermore, the above embodiment describes a case where a single linear beam (a text beam) is formed by the beam shaping system 500 to illuminate a region, and the workpiece W is scanned relative to this text beam in a scanning direction (e.g., the Y-axis direction). However, as previously described, the beam shaping system 500 can freely change the intensity distribution of the beams on the shaping surface MP by imparting an appropriate distribution to the incident angles of the multiple parallel beams LB incident on the focusing optical system 82. Therefore, the shaping device 100 can change at least one of the position, number, size, and shape of the illuminating region of the beams on the shaping surface MP, and can also form, as previously described, for example, a text region, a three-line region, a missing text region, etc. (see reference). Figure 10() is used as the area to be illuminated by the beam.

[0186] Figure 13 This illustrates, for example, a scenario where workpiece W is subjected to additional processing using three beams of light, each illuminating one of the three text-shaped regions constituting the aforementioned three rows of regions. For example... Figure 13 As shown, the light beams LB11 and LB12, passing near the periphery of the focusing optical system 82 and through the optical paths in front of and behind the workpiece W (stage 12) relative to the nozzle 84a in the scanning direction, are focused directly below the nozzle 84a (multiple supply ports) to become beams in the X-axis direction. Figure 13 A slit-shaped (line-shaped) first text region LS1, with its length direction (orthogonal to the paper surface) as the longitudinal direction, is formed on the shaping surface. At this time, the object surface TAS of the workpiece W, where the target part TA is set, is aligned with the shaping surface MP. Furthermore, by focusing the light beams LB21 and LB22 near the periphery of the focusing optical system 82 and through the optical path behind the scanning direction relative to the nozzle 84a, a second text region LS2 is formed at a predetermined distance behind the first text region LS1 in the scanning direction, parallel to the first text region LS1 and extending in the X-axis direction with the same length as the first text region LS1. Furthermore, by focusing the light beams LB31 and LB32 near the periphery of the focusing optical system 82 and through the optical path in front of the scanning direction relative to the nozzle 84a, a third text region LS3 is formed at a predetermined distance in front of the first text region LS1 in the scanning direction, parallel to the first text region LS1 and extending in the X-axis direction with the same length as the first text region LS1. Figure 14 Display in the XY plane Figure 13 The relationship between the three text regions LS1, LS2, and LS3 and the scanning direction is shown.

[0187] also, Figure 13 The LB11, LB12, LB21, LB22, LB31, and LB12 shown are schematic representations. The optical path and number of beams of at least one beam incident on each text area can be set and changed, for example, by controlling the reflector array 80.

[0188] Here, as previously described, powdered shaping material PD is supplied from nozzle 84a through a beam of light (hereinafter referred to as the first beam of light) for the first beam of light located in the scanning direction of stage 12, forming three beams of light LS1, LS2, and LS3, to form a linear molten pool WP directly below the multiple supply ports of nozzle 84a, while the workpiece W (stage 12) is scanned in the scanning direction (in the scanning direction). Figure 13 The formation of this molten pool WP occurs simultaneously (with the +Y direction in the middle).

[0189] A laser beam (hereinafter referred to as the second laser beam) forms a second laser beam LS2 located behind the first laser beam LS1 in the scanning direction (behind the travel direction) of the stage 12. For example, it has the function of preheating the surface of the workpiece W (the target part of the object surface) before applying the shaping (heating it to a suitable temperature). Without this preheating, the large temperature difference between the high-temperature metal melted by the laser beam and the low-temperature workpiece (object surface) causes the molten metal to cool rapidly and solidify instantly into a hard, dry block. This is a major factor that deteriorates the surface accuracy and surface roughness of the machined surface (the surface of the shaping part). In contrast, by preheating the surface of the workpiece W (object surface) with the second laser beam to reduce the temperature difference between the molten metal and the workpiece W (object surface), the solidification rate of the molten metal on the workpiece W (object surface) is slowed down, and the molten metal expands on the surface of the workpiece W (object surface) due to surface tension, allowing sufficient time leeway. The result is excellent surface accuracy and surface roughness.

[0190] A laser beam (hereinafter referred to as the third laser beam) forms a third laser beam LS3, located in front of the first laser beam LS1 in the scanning direction (in front of the travel direction) of the stage 12. This beam, for example, functions to laser-grind shaping materials (metallic materials) that are adhered to the surface of the workpiece W (the target area of ​​the object surface) and solidified, i.e., the surface of the laser-grinded weld bead BE. Although surface grinding using a laser beam is a well-known general technique, surface precision and surface roughness that are usually impossible to achieve through a single additional processing (shaping) can be achieved immediately through grinding with the third laser beam.

[0191] Especially in Figure 13 The additional processing of workpiece W shown can perform the aforementioned preheating of the workpiece W surface, formation of the molten pool and weld beads, and laser polishing of the weld bead surface during a single scan of the workpiece W (stage 12) in the scanning direction. Furthermore, Figure 13 The second text beam is not limited to preheating and can be used for other purposes. Similarly, the third text beam can be used for purposes other than laser grinding. For example, corresponding to the configuration of the first, second, and third text regions LS1, LS2, and LS3, three nozzles can be set up, and three straight molten pools of predetermined widths can be simultaneously formed on the shaped surface of the workpiece W by the first, second, and third text beams.

[0192] In addition, in relation to Figure 15Conversely, when the scanning direction of the workpiece W (stage 12) is set in the -Y direction, the third text beam has the function of heating the surface temperature of the workpiece W to a suitable temperature before applying the shaping, while the second text beam has the function of laser grinding the surface of the metal material that is temporarily solidified on the surface of the workpiece W.

[0193] Furthermore, while the above description illustrates that, apart from the irradiation area (first text region) of the first text beam used to form a molten pool on the workpiece, the irradiation area (second text region) of the second text beam used for preheating the surface of the workpiece W, and the irradiation area (third text region) of the third text beam used for laser polishing of the formed solder bead surface are formed separately on the shaping surface, for example, the first text region and the second text region may at least partially overlap. Moreover, at least one of the second text region LS2 and the third text region LS3 may have a different shape and size than the first text region. Furthermore, at least one of the second text region and the third text region does not necessarily have to be used; therefore, at least one of the second text region and the third text region does not necessarily have to be formed on the shaping surface.

[0194] Up to this point, a method has been described that maximizes the controllability of the molten pool (coating layer) thickness by making the text area as fine and sharp as possible and utilizing the sharp drop in energy density of the light beam illuminating the text area when defocused. However, in this case, the coating layer becomes very thin, and when applying a layer of the same thickness, it is necessary to separate it into more layers for additional processing (shaping) (recoating must be done several times), which is not advantageous from a production point of view.

[0195] Therefore, considering the balance between the required shaping accuracy and production capacity, the case where the coating thickness needs to be increased can also be taken into account. In this case, the control device 600 changes the intensity distribution of the light beam within the shaping surface according to the required shaping accuracy and production capacity. Specifically, it only needs to control each mirror element 81 of the mirror array 80. p，q The tilt angle can be adjusted by slightly widening the text area. For example... Figure 15 The text region LS shown in (B) changes into a text region LS'. In this way, the change in energy density during defocusing becomes more gradual, and as... Figure 11 As shown in (A), the thickness h of the high-energy region in the vertical direction increases, thereby increasing the layer thickness that can be generated in a single scan, thus improving productivity.

[0196] As described above, the shaping device 100 of this embodiment has a major feature compared to conventional metal 3D printers: it offers numerous conveniences and solutions tailored to the requirements of the actual processing site.

[0197] Furthermore, while the above embodiment describes the use of a mirror array 80 as a spatial light modulator, this method can be substituted by using a large-area digital micromirror device (DMD) composed of a plurality of digital micromirror devices (DMDs) fabricated using MEMS technology arranged in a matrix. In this case, it is difficult to measure the state (e.g., tilt angle) of each mirror element using an encoder or similar device. In this case, a detection system can be used to illuminate the surface of the large-area DMD with detection light and receive the reflected light from the plurality of mirror elements constituting the DMD, detecting the state of each mirror element based on its intensity distribution. In this case, the detection system can also detect the state of each of the plurality of mirror elements based on image information obtained by capturing images formed by the DMDs using imaging means.

[0198] Furthermore, the forming device 100 described above may also include a rotary encoder 83. p,q Use together Figure 11 The detection system 89 is shown in the image with imaginary lines. This detection system 89 can receive signals from a plurality of mirror elements 81 constituting the mirror array 80, for example, via a beam splitter disposed between the mirror array 80 and the focusing optical system 82. p,q The reflected light is then analyzed, and the intensity distribution of each reflector element is used to detect it. p,q A system for detecting the state of [something]. As a detection system, a system with the same configuration as, for example, disclosed in U.S. Patent No. 8,456,624 can be used.

[0199] Furthermore, in the above embodiments, the use of each reflector element 81 is illustrated. p,q The reflective array 80 can be a type where the tilt angle of the reflecting surface relative to the reference plane can be changed, but it is not limited to this. A reflective array can also be constructed in which each reflective element can be tilted relative to the reference plane and can be displaced in a direction orthogonal to the reference plane. Furthermore, each reflective element may not necessarily be tilted relative to the reference plane. As mentioned above, a reflective array that can be displaced in a direction orthogonal to the reference plane is disclosed, for example, in U.S. Patent No. 8,456,624. In addition, a reflective array in which each reflective element can rotate about two mutually orthogonal axes parallel to the reference plane (i.e., the tilt angle in the two orthogonal directions can be changed) can also be used. A reflective array that can change the tilt angle in the two orthogonal directions, as mentioned above, is disclosed, for example, in U.S. Patent No. 6,737,662. In these cases, the detection system disclosed in U.S. Patent No. 8,456,624 can also be used to detect the state of each reflective element.

[0200] Alternatively, detection light can be irradiated onto the surface of the mirror array 80 and received from the plurality of mirror elements 81 constituting the mirror array 80. p,q A system for detecting reflected light. Alternatively, as a detection system, sensors that independently detect the tilt angle and spacing of each mirror element relative to a reference plane (base) may be placed on the mirror array (optical element).

[0201] Furthermore, while the above embodiments describe how the intensity distribution of the beams on the shaping surface is changed by independently controlling the incident angles of multiple parallel beams incident on the pupil surface of the focusing optical system 82, it is not possible to control (change) all incident angles of the multiple parallel beams incident on the pupil surface of the focusing optical system 82. Therefore, when using a mirror array to control the incident angles of the parallel beams incident on the focusing optical system 82 in the same way as the above embodiments, all mirror elements may not be able to change the state of the reflecting surface (at least one of the position and tilt angle of the reflecting surface). Also, while the above embodiments describe using a mirror array 80 to control the incident angles of the multiple parallel beams incident on the focusing optical system 82, i.e., to change the intensity distribution of the beams on the shaping surface, a spatial light modulator (non-light-emitting image display element) as described below may be used instead of the mirror array. As a transmissive spatial light modulator, in addition to transmissive liquid crystal display (LCD), electrochromic displays (ECDs) can also be cited. Furthermore, besides the micromirror array mentioned above, other examples of reflective spatial light modulators include reflective liquid crystal display elements, electrophoretic displays (EPDs), electronic paper (or electronic ink), and grating light valves. While the above embodiments describe the use of a mirror array (a type of spatial light modulator) to modify the intensity distribution of the light beam on the shaped surface, spatial light modulators can also be used for other purposes.

[0202] Furthermore, as mentioned above, while a large aperture is preferred for the focusing optical system 82, a focusing optical system with a numerical aperture NA of less than 0.5 can also be used.

[0203] Furthermore, in the above embodiment, in order to manage the intensity distribution of the light beam, the shaping device 100 may also include a sensor with a light-receiving part that can be arranged in or near the condensing optical system 82. For example, it is preferable to mount a CCD image sensor on the stage 12, and use the CCD image sensor to correct the intensity distribution of the light beam (the intensity distribution in the illumination area of ​​the shaping surface) at an appropriate frequency. At this time, although the measurement can be performed when the light-receiving part of the sensor (e.g., the stage 12) is stopped, the light-receiving part of the sensor (e.g., the stage 12) can be moved while scanning and measuring the light beam received from the condensing optical system 82. By moving the light-receiving part of the sensor while performing the measurement, for example, the influence of the limited number of pixels such as the CCD image sensor and the mirror array can be eliminated, and the correct measurement result can be obtained. In this way, by measuring the intensity distribution of the light beam with a sensor that receives the light beam from the condensing optical system 82, the intensity distribution management of the light beam, which also takes into account the variation factors such as the thermal aberration of the condensing optical system 82, can be performed. Furthermore, by controlling the mirror array 80 and the like based on the results, the intensity distribution of the light beam at the focal plane behind the focusing optical system 82 can be set to the desired state with good accuracy.

[0204] Furthermore, while the above embodiments illustrate the use of titanium and stainless steel powders as shaping materials, powders of other metals such as iron powder, as well as powders other than metals such as nylon, polypropylene, and ABS powders, can also be used. Moreover, the shaping apparatus 100 of the above embodiments can also be used as shaping materials other than powders, such as welding wires for fusion welding. However, in this case, a wire feeding device is provided instead of a powder supply system such as a powder cartridge and nozzle unit.

[0205] Furthermore, in the above embodiment, it is described that multiple supply ports 91 from nozzle 84a are used. i The powdered shaping material PD is supplied along the Z-axis direction, which is parallel to the optical axis AX of the focusing optical system 82. However, it is not limited to this; the shaping material (powder) can also be supplied from a direction inclined relative to the optical axis AX. Furthermore, the shaping material (powder) can also be supplied from a direction inclined relative to the vertical direction.

[0206] Furthermore, in the shaping apparatus 100 of the above embodiment, the nozzle 84a of the material processing unit 530 may also have a supply port for the aforementioned shaping material and a recovery port (suction port) for recovering unmelted powdered shaping material.

[0207] So far, while an example of adding shape to an existing workpiece has been described, the application of the shaping apparatus 100 in this embodiment is not limited to this. It can also generate three-dimensional shapes from a blank surface on the stage 12, similar to a general 3D printer. In this case, it is simply applying additional processing to a so-called "blank" workpiece. When shaping a three-dimensional object on this stage 12, the control device 600, through the mark detection system 56 (see reference 400) of the measurement system 400... ​ The system uses optical methods to detect at least three alignment marks pre-formed on the stage 12, thereby determining the position information of the object surface set on the stage 12 in the 6-DOF direction. Based on this result, the system controls the position and orientation of the object surface on the stage 12 relative to the beam (irradiation area) while performing 3D modeling.

[0208] Furthermore, in the above embodiment, as an example, the control device 600 controls the various components of the movement system 200, the measurement system 400, and the beam shaping system 500. However, this is not the only possibility; the control device for the shaping system can also be composed of multiple hardware components, each including a microprocessor or other processing device. In this case, the movement system 200, the measurement system 400, and the beam shaping system 500 can each have a processing device, or it can be a combination of a first processing device that controls two of the movement system 200, the transport system 300, the measurement system 400, and the beam shaping system 500, and a second processing device that controls the remaining system. In either case, each processing device is part of the functions of the control device 600. Alternatively, the control device for the shaping system can also be composed of multiple microprocessors or other processing devices and a host computer that centrally manages these processing devices.

[0209] At least a portion of the constituent elements of each of the above embodiments can be suitably combined with at least other portions of the constituent elements of each of the above embodiments. Alternatively, some of the constituent elements of each of the above embodiments may be omitted. Furthermore, to the extent permitted by law, all publicly available publications and U.S. patent disclosures related to exposure devices cited in the above embodiments are incorporated into this document.

[0210] Industrial availability

[0211] As explained above, the shaping device and shaping method of the present invention are suitable for the formation of three-dimensional objects.

[0212] The above description is merely an illustrative embodiment of the present invention and is not intended to limit the scope of the invention. Any equivalent changes and modifications made by those skilled in the art without departing from the concept and principles of the present invention should fall within the scope of protection of the present invention.

Claims

1. A shaping device, which is a DED (Dual-Edge Design) device, used for shaping three-dimensional objects, comprising: A beam shaping system includes: a beam irradiation unit capable of irradiating multiple beams; a material processing unit for supplying shaping material to an area irradiated by the multiple beams from the beam irradiation unit; and a moving device for moving the multiple beams relative to an object surface irradiated by the multiple beams. The beam irradiation section includes at least a plurality of reflectors that reflect the plurality of beams; The tilt angle of the reflective surfaces of the plurality of reflectors is changed during the relative movement to change the illumination position of the first light beam reflected by the first reflector among the plurality of reflectors, and the illumination position of the second light beam reflected by the second reflector among the plurality of reflectors, which is different from the first reflector.

2. The shaping device as described in claim 1, wherein, The plurality of light beams are moved during the relative movement by moving the reflecting surfaces of the plurality of mirrors.

3. The shaping device as described in claim 2, wherein, The beam irradiation section includes a focusing optical system that emits the plurality of beams; The incident angle of the multiple light beams incident on the focusing optical system can be changed by moving the reflective surfaces of the multiple mirrors.

4. The shaping device as described in claim 3, wherein, The incident angles of the multiple light beams relative to the pupil surface of the focusing optical system are different from each other.

5. The shaping device as described in any one of claims 1 to 4, wherein, The illumination position of the multiple beams can be changed by altering the tilt angle of the reflective surfaces of the multiple mirrors.

6. The shaping device as described in any one of claims 1 to 4, wherein, The intensity distribution of the multiple light beams can be changed by altering the tilt angle of the multiple reflectors.

7. The shaping device as described in any one of claims 1 to 4, wherein, Solder beads are formed on the object surface by the relative movement; The width of the solder beads formed on the object surface can be changed by controlling the tilt angle of the reflective surfaces of the plurality of mirrors.

8. A shaping device for shaping three-dimensional objects, comprising: A beam shaping system includes: a beam irradiation unit for irradiating a beam; a material processing unit for supplying shaping material to an area irradiated by the beam from the beam irradiation unit; and a moving device for moving the beam relative to an object surface irradiated by the beam. The beam irradiation section includes a focusing optical system that emits the beam, and the beam irradiation section changes the incident angle of at least one of the beams incident on the focusing optical system during the relative movement; The beam irradiation section includes a reflector, and the incident angle of the beam incident on the focusing optical system is changed by moving the reflector.

9. The shaping device as claimed in claim 8, wherein, The beam irradiation unit changes the position of being irradiated by the multiple beams by changing the incident angle of each beam.

10. A shaping device for shaping three-dimensional objects, comprising: A beam shaping system includes: a beam irradiation unit for irradiating a beam; a material processing unit for supplying shaping material to an area irradiated by the beam from the beam irradiation unit; and a moving device for moving the beam relative to an object surface irradiated by the beam. The beam irradiation section includes a focusing optical system that emits the beam, and the beam irradiation section changes the incident angle of at least one of the beams incident on the focusing optical system during the relative movement; The beam irradiation section includes multiple reflectors, and the incident angle of the beam incident on the focusing optical system is changed by moving the multiple reflectors.

11. The shaping device as claimed in claim 10, wherein, The beam irradiation unit changes the incident angle of multiple beams by moving the multiple reflectors; The position illuminated by the multiple beams can be changed by altering the incident angle of the multiple beams.

12. A shaping device, which is a DED (Dual Effect Design) method, for forming three-dimensional shapes, comprising: The movement system allows the object's surface to be moved. A beam shaping system includes: a beam irradiation unit for irradiating a beam; and a material processing unit for supplying shaping material to an area irradiated by the beam from the beam irradiation unit; and Control device, controlling the beam shaping system; The moving system has a movable component that holds the workpiece having the object surface; The beam irradiation section includes a focusing optical system that emits a beam; The control device can change the intensity distribution of the light beam within a predetermined surface on the emission surface side of the focusing optical system, and control the movable member holding the workpiece to tilt relative to the surface perpendicular to the optical axis on the emission surface side of the focusing optical system during the relative movement of the light beam from the light beam irradiation part along the object surface. The beam irradiation section has multiple reflectors; Each of the plurality of mirrors has a reflective surface; The change in intensity distribution includes a change in at least one of the position of the reflecting surface of the plurality of mirrors and the tilt angle.

13. The shaping device as claimed in claim 12, wherein, The control device can change the intensity distribution of the light beam during the period when the light beam moves relative to the object surface.

14. The shaping device as claimed in claim 12, wherein, The control device controls the movement system and the beam shaping system by supplying shaping material from the material processing unit to a target area on the object surface while moving the object surface relative to the beam from the beam irradiation unit along the object surface.

15. The shaping device as claimed in claim 12, wherein, The change in the posture of the movable member includes control of the rotation of the movable member of the workpiece about an axis parallel to the optical axis.

16. The shaping device as claimed in claim 12, wherein, The mobile system has a parallel connection mechanism for moving the movable component.

17. The shaping device according to any one of claims 12 to 16, wherein, The change in intensity distribution includes a change in the position of the area of ​​illumination of the light beam within the predetermined surface.

18. The shaping device as claimed in any one of claims 12 to 16, wherein, The change in intensity distribution includes a change in the number of areas of illumination by the beam within the given surface.

19. The shaping device according to any one of claims 12 to 16, wherein, The change in intensity distribution includes a change in the size of the area illuminated by the light beam within the given surface.

20. The shaping device according to any one of claims 12 to 16, wherein, The change in intensity distribution includes a change in the shape of the area of ​​illumination of the light beam within the given surface.

21. The shaping device according to any one of claims 12 to 16, wherein, The change in intensity distribution is achieved by means of the beam irradiation section.

22. The shaping device as claimed in claim 13, wherein, The intensity distribution within the predetermined surface can be continuously changed during the relative movement of the beam and the object surface.

23. The shaping device as claimed in claim 13, wherein, The change in intensity distribution includes a change in any one of, or both of, the width of the area of ​​the beam irradiated within the given surface, in the direction of relative movement and in the direction perpendicular to the direction of relative movement.

24. The shaping device as claimed in claim 23, wherein, The width is changed gradually.

25. The shaping device as claimed in claim 24, wherein, As the intensity distribution within the predetermined surface, the irradiation area of ​​the light beam within the predetermined surface can be formed into a slit shape.

26. The shaping device as claimed in any one of claims 12 to 16, wherein, The relative movement speed between the object surface and the light beam from the beam irradiation unit is determined based on the intensity distribution on the predetermined surface.

27. A modeling method, which is a DED (Design for Elaboration) method, for modeling three-dimensional objects, comprising: The action of using a beam irradiation unit to irradiate multiple beams; The action of supplying shaping material to the area irradiated by the plurality of beams from the beam irradiation section; and The action of moving the plurality of light beams relative to the object surface being irradiated by the plurality of light beams; The beam irradiation section includes at least a plurality of reflectors that reflect the plurality of beams; The action of illuminating the plurality of light beams includes, during the relative movement, changing the tilt angle of the reflective surfaces of the plurality of reflectors to change the illumination position of the first light beam reflected by the first reflector among the plurality of reflectors, and the illumination position of the second light beam reflected by the second reflector among the plurality of reflectors, which is different from the first reflector.

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