Heavy-duty high-precision vacuum sample stage

Abstract

The present invention provides a heavy-load high-precision vacuum sample stage, including a sample scanning system, a sample linear drive mechanism and a differential rotation mechanism; the sample scanning system is used to fix the sample to be tested, and can realize the movement and rotation of the sample to be tested in the Y and Z directions; the sample linear drive mechanism is connected to the sample scanning system, and can realize the movement of the sample scanning system in the X direction; the differential rotation mechanism is connected to the sample scanning system through the sample linear drive mechanism, and can realize the rotation of the sample scanning system with the X direction as the axis. The heavy-load high-precision vacuum sample stage of the present invention can improve the scanning speed and the accuracy of reflectivity measurement. Under the premise of reliable vacuum and high vacuum degree, it is of great significance to accurately measure the actual optical constants of the sample.

Description

Technical Field

[0001] The invention relates to ultra-high vacuum technology, and in particular to a heavy-load high-precision vacuum sample table. Background Art

[0002] When designing and using an optical system, in order to achieve a relatively good design and use requirement, calculations are used for estimation or actual measurement. However, the numerical results of optical elements obtained by calculation are quite different from the optical constants of the optical elements actually measured. Therefore, it is of great significance to design a heavy-load high-precision vacuum sample stage to perform actual measurement of the optical constants of optical elements.

[0003] The reflectivity metering device realizes the movement of the sample and the detector scanning by transmitting the reflectivity from the atmosphere into the main vacuum chamber. At present, with the widespread application of various reflectivity optical elements, the requirements for the reflectivity measurement accuracy are getting higher and higher. Therefore, for the reflectivity metering device, the most important thing is to improve its measurement accuracy. In addition to the measurement accuracy, the ease of operation of the device cannot be ignored. Therefore, a simple heavy-load high-precision vacuum sample stage that can realize multi-dimensional movement is urgently needed. Summary of the invention

[0004] The purpose of the present invention is to solve the problem that the reflectivity measurement process of the traditional reflectivity measurement device is cumbersome and the equipment operation is not convenient, and to propose a heavy-load high-precision vacuum sample stage, which can improve the scanning speed and the accuracy of reflectivity measurement. Under the premise of reliable vacuum and high vacuum degree, it is of great significance to accurately measure the actual optical constants of the sample.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a heavy-load high-precision vacuum sample stage, including a sample scanning system, a sample linear drive mechanism and a differential rotation mechanism; the sample scanning system is used to fix the sample to be tested, and can realize the movement and rotation of the sample to be tested in the Y and Z directions; the sample linear drive mechanism is connected to the sample scanning system, and can realize the movement of the sample scanning system in the X direction; the differential rotation mechanism is connected to the sample scanning system through the sample linear drive mechanism, and can realize the rotation of the sample scanning system with the X direction as the axis.

[0006] Further, the sample scanning system includes: a mirror frame fixing frame, a first goniometer, a second goniometer, a first sliding plate, a second sliding plate, a first fixed base plate, a second fixed base plate, a first motor, a second motor, a third motor, a fourth motor, a first screw structure and a second screw structure; the first screw structure includes a first ball screw and a first nut that are matched and arranged, and the second screw structure includes a second ball screw and a second nut that are matched and arranged; the sample to be tested is fixed on a heavy-load high-precision vacuum sample table by a mirror frame fixing frame, and the mirror frame fixing frame, the first goniometer, the second goniometer, the first sliding plate, the first screw structure, the first fixed base plate, the second sliding plate, the second screw structure and the second fixed base plate are connected in sequence;

[0007] The first motor can drive the first goniometer to rotate, and the third motor can drive the second goniometer to rotate; the second motor is connected to the first ball screw through a coupling, the first nut is connected to the first sliding plate, and the bearing seat of the first screw structure is connected to the first fixed base plate; the second motor drives the coupling to rotate, drives the first ball screw to rotate, so that the first nut matched with the first ball screw moves in the Z direction, and the sample to be tested fixed on the mirror frame fixing frame moves in the Z direction; the side of the first fixed base plate away from the first screw structure is connected to the second sliding plate, the fourth motor is connected to the second ball screw through a coupling, the second nut is connected to the second sliding plate, and the bearing seat of the second screw structure is connected to the second fixed base plate; the fourth motor drives the coupling to rotate, drives the second ball screw to rotate, so that the second nut matched with the second ball screw moves in the Y direction, and the sample to be tested fixed on the mirror frame fixing frame moves in the Y direction.

[0008] Furthermore, the first motor can drive the first goniometer to rotate around the Z axis, and the third motor can drive the second goniometer to rotate around the Y axis.

[0009] Furthermore, the rotation range of the first goniometer is ±15°, and the rotation range of the second goniometer is ±15°.

[0010] Furthermore, the sample linear drive mechanism includes: a first mirror frame drive shaft, a third nut, a third ball screw, a seventh motor, a fixed seat and a first detector shaft, the first detector shaft is sleeved on the outside of the first mirror frame drive shaft, and the first mirror frame drive shaft is connected to the second fixed base plate of the sample scanning system through the fixed seat; the third ball screw is arranged along the X direction, and the third ball screw rotates under the drive of the seventh motor in the vacuum chamber, thereby causing the third nut on the third ball screw to move in the X direction; the first mirror frame drive shaft is sleeved on the outside of the third nut and fixed thereto, so that the movement of the third nut drives the first mirror frame drive shaft to move in the same direction, thereby driving the sample scanning system to move in the X direction.

[0011] Further, the differential rotation mechanism includes a mirror frame rotation flange, a detector rotation flange, a second mirror frame drive shaft, a second detector shaft, a sample shaft, a fifth motor, a sixth motor, a third goniometer, and a fourth goniometer;

[0012] The third goniometer is connected to the second mirror frame drive shaft through the mirror frame rotating flange, the fifth motor drives the third goniometer to rotate, drives the mirror frame rotating flange to rotate, and then drives the second mirror frame drive shaft to rotate; the second mirror frame drive shaft is connected to the sample shaft through the sample shaft adapter plate, and then drives the sample shaft to rotate; a gap is provided on the sample shaft, and a protrusion that penetrates into the gap is provided on the first mirror frame drive shaft, and the rotation of the sample shaft will drive the first mirror frame drive shaft to rotate, and finally drive the entire sample scanning system to rotate; the fourth goniometer is connected to the second detector shaft through the detector rotating flange; the sixth motor drives the fourth goniometer to rotate, drives the detector rotating flange to rotate (inconsistent with the direction of rotation caused by the mirror frame rotating flange), and then drives the second detector shaft to rotate, the second detector is connected to the first detector shaft in the sample linear drive mechanism through the detector adapter plate, and finally drives the first detector shaft to rotate.

[0013] Furthermore, the rotation speeds of the second detector axis and the sample axis are inconsistent.

[0014] Furthermore, the fifth motor drives the third goniometer to rotate around the X-axis; and the sixth motor drives the fourth goniometer to rotate around the X-axis.

[0015] Furthermore, in order to ensure the ultra-high vacuum sealing requirements of the heavy-load high-precision vacuum sample stage and prevent the entry of atmosphere into the mirror frame drive shaft when it rotates, which would have a certain impact on the vacuum environment, a molecular pump conical tube is used for exhaust gas pumping, and the molecular pump conical tube is connected to the exhaust pipeline of the mirror frame drive shaft.

[0016] Furthermore, in order to prevent the shaft from having poor sealing when rotating, six sealing gaskets are added in the gap between the second mirror holder rotating shaft and the second detector rotating shaft.

[0017] Compared with the prior art, the heavy-load high-precision vacuum sample stage of the present invention has the following advantages:

[0018] 1) Horizontal installation can be achieved under the action of the mirror frame fixing frame;

[0019] 2) Through simulation calculation, the load-bearing capacity of the sample to be tested installed on the front mirror frame fixing frame of the sample stage can reach 30 kg;

[0020] 3) Because the goniometer and lead screw mechanism in the sample scanning mechanism are used, the sample to be tested can be moved and rotated in the Y direction and the Z direction respectively under the drive of the motor; and because the motor in the sample linear drive mechanism drives the sample scanning system to move in the X direction through the lead screw mechanism; and because the goniometer, the mirror frame rotating flange and the detector rotating flange of the differential rotation mechanism are used, the sample scanning system can be rotated with the X direction as the axis under the drive of the motor; so multi-dimensional high-precision driving can be achieved;

[0021] 4) Compared with the existing reflectivity measuring devices, the present invention can be used in ultra-high vacuum. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic structural diagram of the heavy-load high-precision vacuum sample stage of the present invention.

[0023] Figure 2 It is a partial cross-sectional view of the heavy-load high-precision vacuum sample stage of the present invention.

[0024] Figure 3 Schematic diagram of the sample scanning system Figure 1 .

[0025] Figure 4 for Figure 3 AA section view.

[0026] Figure 5 Schematic diagram of the sample scanning system Figure 2 .

[0027] Figure 6 for Figure 5 BB cross-sectional view.

[0028] Figure 7 A stereogram of the sample scanning system.

[0029] In the figure: 1, mirror frame fixing frame; 21, first goniometer; 22, second goniometer; 23, third goniometer; 24, fourth goniometer; 31, first fixed bottom plate; 32, second fixed bottom plate; 4, sealing gasket; 5, fixing seat; 61, first mirror frame driving shaft; 62, second mirror frame driving shaft; 71, first detector shaft; 72, second detector shaft; 8, molecular pump tapered tube; 9, mirror frame rotating flange; 10, detector rotating flange; 111 , the first motor; 112, the second motor; 113, the third motor; 114, the fourth motor; 115, the fifth motor; 116, the sixth motor; 117, the seventh motor; 121, the first sliding plate; 122, the second sliding plate; 131, the first nut; 132, the second nut; 133, the third nut; 141, the first ball screw; 142, the second ball screw; 143, the third ball screw; 15, the sample shaft; 16, the blind flange. DETAILED DESCRIPTION

[0030] The present invention is further described below in conjunction with embodiments:

[0031] Example 1

[0032] The present embodiment discloses a heavy-load high-precision vacuum sample stage, comprising a sample scanning system, a sample linear drive mechanism and a differential rotation mechanism; the sample scanning system is used to fix the sample to be tested, and can realize the movement and rotation of the sample to be tested in the Y and Z directions; the sample linear drive mechanism is connected to the sample scanning system, and can realize the movement of the sample scanning system in the X direction; the differential rotation mechanism is connected to the sample scanning system through the sample linear drive mechanism, and can realize the rotation of the sample scanning system with the X direction as the axis.

[0033] Specifically, the structure of the heavy-load high-precision vacuum sample stage is as follows: Figure 1-7 As shown, the sample scanning system includes: a mirror frame fixing frame 1, a first goniometer 21, a second goniometer 22, a first sliding plate 121, a second sliding plate 122, a first fixed base plate 31, a second fixed base plate 32, a first motor 111, a second motor 112, a third motor 113, a fourth motor 114, a first screw structure and a second screw structure; the first screw structure includes a first ball screw 141 and a first nut 131 that are arranged in a matched manner, and the second screw structure includes a second ball screw 142 and a second nut 132 that are arranged in a matched manner; the sample to be tested is fixed on a heavy-load high-precision vacuum sample table by the mirror frame fixing frame 1, and the mirror frame fixing frame 1, the first goniometer 21, the second goniometer 22, the first sliding plate 121, the first screw structure, the first fixed base plate 31, the second sliding plate 122, the second screw structure and the second fixed base plate 32 are connected in sequence;

[0034] The first motor 111 can drive the first goniometer 21 to rotate around the Z axis, and the third motor 113 can drive the second goniometer 22 to rotate around the Y axis; the rotation range of the first goniometer 21 is ±15°, and the rotation range of the second goniometer 22 is ±15°.

[0035] The second motor 112 is connected to the first ball screw 141 through a coupling, the first nut 131 is connected to the first sliding plate 121, and the bearing seat of the first screw structure is connected to the first fixed base plate 31; the second motor 112 drives the coupling to rotate, drives the first ball screw 141 to rotate, so that the first nut 131 matched with the first ball screw 141 moves in the Z direction, so that the sample to be tested fixed on the frame fixing frame 1 moves in the Z direction; the side of the first fixed base plate 31 away from the first screw structure is connected to the second sliding plate 122, the fourth motor 114 is connected to the second ball screw 142 through a coupling, the second nut 132 is connected to the second sliding plate 122, and the bearing seat of the second screw structure is connected to the second fixed base plate 32; the fourth motor 114 drives the coupling to rotate, drives the second ball screw 142 to rotate, so that the second nut 132 matched with the second ball screw 142 moves in the Y direction, so that the sample to be tested fixed on the frame fixing frame 1 moves in the Y direction.

[0036] The sample linear drive mechanism includes: a first mirror frame drive shaft 61, a third nut 133, a third ball screw 143, a seventh motor 117, a fixing seat 5 and a first detector shaft 71, wherein the first detector shaft 71 is sleeved on the outside of the first mirror frame drive shaft 61, and the first mirror frame drive shaft 61 is connected to the second fixed bottom plate 32 of the sample scanning system through the fixing seat 5; the third ball screw 143 is arranged along the X direction, and the third ball screw 143 rotates under the drive of the seventh motor 117 in the vacuum chamber, thereby causing the third nut 133 on the third ball screw 143 to move in the X direction; the first mirror frame drive shaft 61 is sleeved on the outside of the third nut 133 and fixed thereto, so that the movement of the third nut 133 drives the first mirror frame drive shaft 61 to move in the same direction, thereby driving the sample scanning system to move in the X direction.

[0037] The differential rotation mechanism includes a mirror frame rotating flange 9, a detector rotating flange, a second mirror frame driving shaft 62, a second detector shaft 72, a sample shaft 15, a fifth motor 115, a sixth motor 116, a third goniometer 23, and a fourth goniometer 24;

[0038] The third goniometer 23 is connected to the second mirror frame drive shaft 62 via the mirror frame rotating flange 9, and the fifth motor 115 drives the third goniometer 23 to rotate around the X-axis, driving the mirror frame rotating flange 9 to rotate, and then driving the second mirror frame drive shaft 62 to rotate; the second mirror frame drive shaft 62 is connected to the sample shaft 15 via the sample shaft adapter plate, and then drives the sample shaft 15 to rotate; a gap is provided on the sample shaft 15, and a protrusion that penetrates into the gap is provided on the first mirror frame drive shaft 61, and the rotation of the sample shaft 15 will drive the first mirror frame drive shaft 61 rotates, and finally drives the entire sample scanning system to rotate; the fourth goniometer 24 is connected to the second detector shaft 72 through the detector rotating flange 10; the sixth motor 116 drives the fourth goniometer 24 to rotate around the X-axis, drives the detector rotating flange 10 to rotate (inconsistent with the direction of rotation caused by the mirror frame rotating flange 9), and then drives the second detector shaft 72 to rotate, the second detector shaft 72 is connected to the first detector shaft 71 in the sample linear drive mechanism through the detector adapter plate, and finally drives the first detector shaft 71 to rotate.

[0039] The rotation speeds of the second detector axis 72 and the sample axis 15 are inconsistent.

[0040] In order to ensure the ultra-high vacuum sealing requirements of the heavy-load high-precision vacuum sample stage and prevent the entry of atmosphere into the mirror frame drive shaft when it rotates, which would have a certain impact on the vacuum environment, a molecular pump conical tube 8 is used for exhaust gas pumping. The molecular pump conical tube 8 is connected to the exhaust pipeline of the mirror frame drive shaft (the first mirror frame drive shaft 61 and the second mirror frame drive shaft 62).

[0041] In order to prevent the shaft from being poorly sealed when rotating, three sealing gaskets 4 are added to the second mirror frame rotating shaft 62 and the second detector rotating shaft 72. There are two flange interfaces between the three sealing rings, one of which is equipped with a blind flange 16 and the other is connected to the molecular pump tapered tube 8 to connect the molecular pump. If both flange interfaces are equipped with molecular pumps, two-stage differential pumping can be achieved, and the more differential pumping, the less impact on the vacuum degree of the chamber.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A heavy-load high-precision vacuum sample stage, characterized in that: It includes a sample scanning system, a sample linear drive mechanism and a differential rotation mechanism; the sample scanning system is used to fix the sample to be tested, and can realize the movement and rotation of the sample to be tested in the Y and Z directions; the sample linear drive mechanism is connected to the sample scanning system, and can realize the movement of the sample scanning system in the X direction; the differential rotation mechanism is connected to the sample scanning system through the sample linear drive mechanism, and can realize the rotation of the sample scanning system with the X direction as the axis; The sample scanning system comprises: a mirror frame fixing frame (1), a first goniometer (21), a second goniometer (22), a first sliding plate (121), a second sliding plate (122), a first fixed base plate (31), a second fixed base plate (32), a first motor (111), a second motor (112), a third motor (113), a fourth motor (114), a first lead screw structure and a second lead screw structure; the first lead screw structure comprises a first ball screw (141) and a first nut (131) which are arranged in a coordinated manner, and the second lead screw structure comprises a second ball screw (142) and a second nut (132) which are arranged in a coordinated manner; the sample to be tested is fixed on a heavy-load high-precision vacuum sample table by the mirror frame fixing frame (1), and the mirror frame fixing frame (1), the first goniometer (21), the second goniometer (22), the first sliding plate (121), the first lead screw structure, the first fixed base plate (31), the second sliding plate (122), the second lead screw structure and the second fixed base plate (32) are connected in sequence; The first motor (111) can drive the first goniometer (21) to rotate, and the third motor (113) can drive the second goniometer (22) to rotate; the second motor (112) is connected to the first ball screw (141) via a coupling, the first nut (131) is connected to the first sliding plate (121), and the bearing seat of the first screw structure is connected to the first fixed base plate (31); the second motor (112) drives the coupling to rotate, drives the first ball screw (141) to rotate, so that the first nut (131) matched with the first ball screw (141) moves in the Z direction, so that the object to be measured fixed on the mirror frame fixing frame (1) The sample moves in the Z direction; the first fixed base plate (31) is connected to the second sliding plate (122) at a side away from the first screw structure; the fourth motor (114) is connected to the second ball screw (142) via a coupling; the second nut (132) is connected to the second sliding plate (122); the bearing seat of the second screw structure is connected to the second fixed base plate (32); the fourth motor (114) drives the coupling to rotate, drives the second ball screw (142) to rotate, so that the second nut (132) matched with the second ball screw (142) moves in the Y direction, so that the sample to be tested fixed on the mirror frame fixing frame (1) moves in the Y direction.

2. The heavy-load high-precision vacuum sample stage according to claim 1, characterized in that: The first motor (111) can drive the first goniometer (21) to rotate around the Z axis, and the third motor (113) can drive the second goniometer (22) to rotate around the Y axis.

3. The heavy-load high-precision vacuum sample stage according to claim 2, characterized in that: The first goniometer (21) has a rotation range of ±15°, and the second goniometer (22) has a rotation range of ±15°.

4. The heavy-load high-precision vacuum sample stage according to claim 1, characterized in that: The sample linear drive mechanism comprises: a first mirror frame drive shaft (61), a third nut (133), a third ball screw (143), a seventh motor (117), a fixing seat (5) and a first detector shaft (71), wherein the first detector shaft (71) is sleeved on the outside of the first mirror frame drive shaft (61), and the first mirror frame drive shaft (61) is connected to a second fixed base plate (32) of the sample scanning system through the fixing seat (5); the third ball screw (143) is arranged along the X direction, and the third ball screw (143) rotates under the drive of the seventh motor (117) in the vacuum chamber, thereby causing the third nut (133) on the third ball screw (143) to move in the X direction; the first mirror frame drive shaft (61) is sleeved on the outside of the third nut (133) and fixed thereto, so that the movement of the third nut (133) drives the first mirror frame drive shaft (61) to move in the same direction, thereby driving the sample scanning system to move in the X direction.

5. The heavy-load high-precision vacuum sample stage according to claim 4, characterized in that: The differential rotation mechanism comprises a mirror frame rotating flange (9), a detector rotating flange, a second mirror frame driving shaft (62), a second detector shaft (72), a sample shaft (15), a fifth motor (116), a sixth motor (115), a third goniometer (24), and a fourth goniometer (23); The third goniometer (24) is connected to the second mirror frame drive shaft (62) via the mirror frame rotating flange (9); the fifth motor (116) drives the third goniometer (24) to rotate, thereby driving the mirror frame rotating flange (9) to rotate, and further driving the second mirror frame drive shaft (62) to rotate; the second mirror frame drive shaft (62) is connected to the sample shaft (15) via the sample shaft adapter plate, thereby driving the sample shaft (15) to rotate; a gap is provided on the sample shaft (15), a protrusion that penetrates into the gap is provided on the first mirror frame drive shaft (61), and the sample shaft (15) is provided with a protrusion that penetrates into the gap. The rotation drives the first mirror frame drive shaft (61) to rotate, and finally drives the entire sample scanning system to rotate; the fourth goniometer (23) is connected to the second detector shaft (72) via the detector rotating flange (10); the sixth motor (115) drives the fourth goniometer (23) to rotate, drives the detector rotating flange (10) to rotate, and then drives the second detector shaft (72) to rotate; the second detector shaft (72) is connected to the first detector shaft (71) in the sample linear drive mechanism via the detector adapter plate, and finally drives the first detector shaft (71) to rotate.

6. The heavy-load high-precision vacuum sample stage according to claim 5, characterized in that: The rotation speeds of the second detector axis (72) and the sample axis (15) are inconsistent.

7. The heavy-load high-precision vacuum sample stage according to claim 5, characterized in that: The fifth motor (116) drives the third goniometer (24) to rotate around the X-axis; and the sixth motor (115) drives the fourth goniometer (23) to rotate around the X-axis.

8. The heavy-load high-precision vacuum sample stage according to claim 5, characterized in that: A molecular pump conical tube (8) is included for pumping gas, and the molecular pump conical tube (8) is connected to an exhaust pipeline of the mirror frame drive shaft.

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