A method, apparatus, electronic device, and medium for determining sample deformation information.

Abstract

This application provides a method, apparatus, electronic device, and medium for determining sample deformation information, relating to the field of photothermal detection technology. The method includes: after the sample surface of the sample to be tested is excited by pump light and a probe light detects any point on the excited sample surface, acquiring the difference signal between the signal light and the reference light determined by the detection device and converted into electrical signals; processing the difference signal using a preset algorithm to determine the change in reflectivity of an SPR element (Surface Plasmon Resonance Optical Element); determining the change in reflection angle corresponding to the change in reflectivity of the SPR element based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample to be tested; and determining the deformation information of the corresponding point on the sample surface of the sample to be tested based on the change in reflection angle. This method utilizes an SPR element to achieve direct conversion between the reflectivity measurement of the sample to be tested and surface deformation information, ensuring the accuracy of deformation information measurement.

Description

Technical Field

[0001] This application relates to the field of photothermal detection technology, and more specifically, to a method, apparatus, electronic device, and medium for determining sample deformation information. Background Technology

[0002] In recent decades, ultrafast lasers have been widely used in materials science. For example, ultrafast laser-based pump-probe techniques can characterize ultrafast physical processes involving energetic particles. In reflective pump-probe techniques, one ultrafast laser beam is used as the pump light to excite the sample, while another ultrafast laser beam with a time delay is used as the probe light to detect the sample. By collecting the reflectivity of the probe light at different time delays and combining it with physical theoretical models, this technique can indirectly analyze the dynamic processes of charge carriers and phonons in the sample.

[0003] In existing technologies, dynamic information of a sample after pumping is obtained by measuring changes in its reflectivity, transmittance, or scattering. However, changes in reflectivity, transmittance, or scattering alone cannot accurately determine the material properties of the sample. Summary of the Invention

[0004] The purpose of this application is to provide a method, apparatus, electronic device and medium for determining sample deformation information, so as to solve the above-mentioned problems existing in the prior art, and to obtain the deformation information of the sample to be tested, thereby accurately judging the material properties of the sample to be tested.

[0005] Firstly, a method for determining sample deformation information is provided, the method including:

[0006] After the sample surface of the sample to be tested is excited by pump light and the probe light detects any point on the excited sample surface, the difference signal between the signal light and the reference light determined by the detection device and converted into electrical signals is obtained; wherein, the reference light is the beam formed by the beam of reflected light after the probe light is reflected by the sample to be tested and then split; the signal light is the beam of reflected light that enters the SPR element in the detection device after being split.

[0007] The difference signal is processed using a preset algorithm to determine the change in reflectivity of the SPR element; wherein, the change in reflectivity of the SPR element is the change in reflectivity of the SPR element after the sample surface of the sample is excited by pump light and deformed.

[0008] Based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample under test, the change in reflection angle corresponding to the change in reflectivity of the SPR element is determined; wherein, the change in reflection angle is the change in the reflection angle of the probe light on the sample surface of the sample under test.

[0009] Based on the change in reflection angle, the deformation information of corresponding points on the sample surface of the sample to be tested is determined.

[0010] In one possible implementation, the detection device includes: a laser, a first beam splitter, a chopper, a first reflector, an electrically driven rotary displacement stage, a first focusing lens, and a sample stage arranged sequentially; wherein a D-type reflector is provided on the electrically driven rotary displacement stage;

[0011] In the detection device, a delay stage, a second reflector, and a beam splitter are sequentially arranged between the first beam splitter and the first focusing lens; a second beam splitter and a neutral density attenuator are sequentially arranged behind the beam splitter, and a second focusing lens and an SPR element are sequentially arranged to the side of the second beam splitter; a balanced photodetector is arranged below the neutral density attenuator and the SPR element; an oscilloscope and a lock-in amplifier are respectively connected to the balanced photodetector; wherein, a third reflector and a fourth reflector are arranged on the delay stage; the output channels of the balanced photodetector include a first channel, a second channel, and a third channel.

[0012] In one possible implementation, the laser output from the laser is split into pump light and probe light after entering the first beam splitter.

[0013] In one possible implementation, the method further includes: obtaining the reflectivity of the sample under test when it is not excited by the pump light and the initial intensity of the probe light;

[0014] The difference signal is processed using a preset algorithm to determine the change in reflectivity of the SPR element, including:

[0015] A preset algorithm is used to process the difference signal, the reflectivity of the sample under test when it is not excited by the pump light, and the initial intensity of the probe light to determine the change in reflectivity of the SPR element.

[0016] In one possible implementation, the preset algorithm is:

[0017] f = I0 * R * dB(τ, ω)

[0018] Where f is the difference signal; R is the reflectivity of the sample under test when it is not excited by the pump light; I0 ​​is the initial intensity of the probe light; and dB(τ,ω) is the change in reflectivity of the SPR element.

[0019] In one possible implementation, determining the deformation information of corresponding points on the surface of the sample to be tested based on the change in reflection angle includes:

[0020] A deformation algorithm is used to process the change in reflection angle to determine the surface displacement of corresponding points on the sample surface of the sample to be tested.

[0021] The deformation algorithm is as follows:

[0022]

[0023] Where Δh is the surface displacement of the corresponding point on the x-axis; x is the coordinate of the corresponding point on the x-axis; and Δθ is the change in the reflection angle.

[0024] Secondly, a device for determining sample deformation information is provided, the device may include:

[0025] The acquisition unit is used to acquire the difference signal between the signal light and the reference light determined by the detection device after the sample surface of the sample to be tested is excited by the pump light and the probe light detects any point on the excited sample surface; wherein, the reference light is the beam formed by the beam splitting of the reflected light after the probe light is reflected by the sample to be tested; the signal light is the beam of the reflected light entering the SPR element in the detection device after the beam split.

[0026] The processing unit is used to process the difference signal using a preset algorithm to determine the change in reflectivity of the SPR element; wherein the change in reflectivity of the SPR element is the change in reflectivity of the SPR element after the sample surface of the sample under test is excited by pump light and deformed.

[0027] Furthermore, based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample under test, the change in reflection angle corresponding to the change in reflectivity of the SPR element is determined; wherein, the change in reflection angle is the change in the reflection angle of the probe light on the sample surface of the sample under test.

[0028] Furthermore, based on the change in reflection angle, the deformation information of corresponding points on the sample surface of the sample to be tested is determined.

[0029] Thirdly, an electronic device is provided, which includes a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus;

[0030] Memory, used to store computer programs;

[0031] When a processor executes a program stored in memory, it implements any of the steps described in the first aspect above.

[0032] Fourthly, a computer-readable storage medium is provided, wherein a computer program is stored therein, and when executed by a processor, the computer program implements the steps of any of the methods described in the first aspect above.

[0033] This application provides a method for determining sample deformation information. The method includes: after the sample surface of the sample to be tested is excited by pump light and a probe light detects any point on the excited sample surface, acquiring the difference signal between the signal light and the reference light determined by the detection device after conversion into electrical signals; processing the difference signal using a preset algorithm to determine the change in reflectivity of the SPR element; determining the change in reflection angle corresponding to the change in reflectivity of the SPR element based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample to be tested; and determining the deformation information of the corresponding point on the sample surface of the sample to be tested based on the change in reflection angle. This method can utilize an SPR element (optical element) with surface plasmon resonance effect to achieve direct conversion between the reflectivity measurement of the sample to be tested and surface deformation information. This process has fewer operation steps, high spatial accuracy, and can improve the measurement efficiency of deformation information while ensuring the accuracy of deformation information measurement. Attached Figure Description

[0034] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 A system architecture diagram for a method for determining sample deformation information provided in this application embodiment;

[0036] Figure 2 A flowchart illustrating a method for determining sample deformation information provided in an embodiment of this application;

[0037] Figure 3 This is a schematic diagram of the detection device provided in the embodiments of this application;

[0038] Figure 4 A schematic diagram of the SPR element provided in the embodiments of this application;

[0039] Figure 5 This is a schematic diagram illustrating the modulation effect of surface deformation of the sample surface on the probe light provided in the embodiments of this application.

[0040] Figure 6 A schematic diagram illustrating the relationship between the reflectivity of the SPR element and the reflection angle of the probe light on the sample under test, as provided in the embodiments of this application.

[0041] Figure 7 This is a schematic diagram showing the comparison before and after deformation of the sample under test when the probe light is incident on it orally, as provided in an embodiment of this application.

[0042] Figure 8 This is a schematic diagram of the structure of a device for determining sample deformation information provided in an embodiment of this application;

[0043] Figure 9 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0045] The method for determining sample deformation information provided in this application embodiment can be applied to... Figure 1 In the system architecture shown, such as Figure 1 As shown, the system may include a server and a detection device. The server can be a physical server, a server cluster consisting of multiple physical servers, or a distributed system. It can also be a cloud server providing basic cloud computing services such as cloud services, cloud databases, cloud computing, cloud functions, cloud storage, network services, cloud communication, middleware services, domain name services, security services, content delivery networks (CDNs), and big data and artificial intelligence platforms. The detection device and the server can be directly or indirectly connected via wired or wireless communication methods; this application does not impose any limitations on this connection.

[0046] The detection device emits pump light and probe light. The pump light first illuminates the sample under test, causing it to enter a non-equilibrium state (e.g., exciting electrons, changing lattice temperature, etc.). Subsequently, after a time delay, the probe light illuminates any point on the sample under test. The detection device measures the difference signal between the signal light and the reference light after they are converted into electrical signals, and sends this difference signal to the server. The reference light is the beam formed by splitting the reflected light from the sample under test, and the signal light is the beam of reflected light that enters the SPR element in the detection device after being split.

[0047] A server is used to receive the difference signal in order to execute a method for determining sample deformation information provided in this application.

[0048] In recent decades, ultrafast lasers have been widely used in materials science. For example, ultrafast laser-based pump-probe techniques can characterize ultrafast physical processes involving energetic particles. In reflective pump-probe techniques, one ultrafast laser beam is used as the pump light to excite the sample, while another ultrafast laser beam with a time delay is used as the probe light to detect the sample. By collecting the reflectivity of the probe light at different time delays and combining it with physical theoretical models, this technique can indirectly analyze the dynamic processes of charge carriers and phonons in the sample.

[0049] In existing technologies, the dynamic information of a sample after pumping is obtained by measuring changes in its reflectivity, transmittance, or scattering. However, changes in reflectivity, transmittance, or scattering cannot intuitively show the deformation information of the sample, thus making it impossible to accurately determine the material properties of the sample.

[0050] Therefore, this application provides a method for determining sample deformation information, which solves the above-mentioned problems existing in the prior art, and can obtain the deformation information of the sample to be tested, thereby accurately judging the material properties of the sample to be tested.

[0051] The preferred embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit this application. Furthermore, the embodiments and features in the embodiments of this application can be combined with each other without conflict.

[0052] Figure 2 This is a flowchart illustrating a method for determining sample deformation information provided in an embodiment of this application. Figure 2 As shown, the method may include:

[0053] Step S210: After the sample surface of the sample to be tested is excited by pump light and the probe light detects any point on the excited sample surface, the difference signal between the signal light and the reference light determined by the detection device after being converted into electrical signals is obtained.

[0054] Combination Figure 3 As shown, the structure of the detection device may specifically include: a laser 1, a first beam splitter 2, a chopper 10, a first reflector 11, an electric rotary displacement stage 6, a first focusing lens 8, and a sample stage 9 arranged in sequence; wherein, a D-type reflector 7 is provided on the electric rotary displacement stage 6.

[0055] The detection device further includes: a delay stage 3, a second reflector 4, and a beam splitter 5 arranged sequentially between the first beam splitter 2 and the first focusing lens 8; a second beam splitter 12 and a neutral density attenuator 18 arranged sequentially behind the beam splitter 5; a second focusing lens 13 and an SPR element 14 arranged sequentially to the side of the second beam splitter 12; a balanced photodetector 15 arranged below the neutral density attenuator 18 and the SPR element 14; an oscilloscope (and computer) 16 and a lock-in amplifier 17 connected to the balanced photodetector 15 respectively; wherein, a third reflector 3-1 and a fourth reflector 3-2 are arranged on the delay stage 3; the output channels of the balanced photodetector 15 include a first channel, a second channel, and a third channel, and the input channels of the balanced photodetector 15 include a first input channel and a second input channel.

[0056] The laser output from laser 1 is split into two beams after entering beam splitter 2. One beam is used as pump light to excite the sample to be tested, and the other beam is used as probe light to detect the sample to be tested.

[0057] Pump light path: After passing through the chopper 10, the pump light is reflected by the first reflecting mirror 11 and the D-type reflecting mirror 7, and then reaches the first focusing lens 8 and is focused on the sample to be tested in the sample stage 9.

[0058] Incident path of the probe light: The probe light is reflected by the third reflecting mirror 3-1 and the fourth reflecting mirror 3-2 on the delay stage 3. The optical path of the probe light is adjusted by adjusting the position of the delay stage 3, so that a time delay is generated between the probe light and the pump light. The probe light then passes through the second reflecting mirror 4 and the beam splitter 5, and reaches the first focusing lens 8 and is focused on the sample to be tested in the sample stage 9.

[0059] Probe light reflection path: After the probe light is focused on the sample to be tested, it is reflected. The reflected light passes through the first focusing lens 8 and the beam splitter 5. At the beam splitter 5, the reflected light forms corresponding reflected beams and transmitted beams (the transmitted beam is at...). Figure 3 (Not shown in the image). The reflected beam formed by the beam splitter 5 generates two beams after passing through the second beam splitter 12: one beam serves as a reference beam and continues to propagate forward, passing through the neutral density attenuator 18 and entering the first input channel 15-1 of the balanced photodetector 15; the other beam, reflected by the second beam splitter 12, serves as a signal beam, passes through the focusing lens 13, and enters the SPR element 14. After being reflected by the SPR element 14, the signal beam enters the second input channel 15-2 of the balanced photodetector 15.

[0060] Furthermore, the specific structure of the SPR element 14 is as follows: Figure 4As shown in (a), the element consists of a metal layer and a prism. When a p-polarized electromagnetic wave is incident from the dielectric to the interface between the dielectric and the metal layer, free electrons in the metal layer accumulate at the interface, generating surface polarization charges. The spatial distribution of these surface charge densities produces oscillations in the form of compression-sparse waves along the metal surface, thus generating a special electromagnetic wave called a surface plasmon resonance (SPR) wave. When the wave vector component of the incident electromagnetic wave along the interface direction is the same as the wave vector of the SPR wave, SPR resonance can be excited. At this time, the energy of the incident electromagnetic wave is absorbed by the SPR wave, resulting in attenuated total internal reflection. The incident angle spectrum of the surface plasmon resonance optical element (SPR element) has been determined in the prior art as follows: Figure 4 As shown in (b), when the incident angle of the light wave increases and approaches the resonance angle (lowest point), the reflectivity changes drastically due to the strong absorption of the light wave. Here, there is an ambient medium below the metal layer; n0 is the refractive index of the prism; n1 is the refractive index of the metal; n2 is the refractive index of the ambient medium; and d1 is the thickness of the metal layer.

[0061] Furthermore, Figure 5 This diagram illustrates the angular modulation of the probe light's propagation direction on the SPR element when the sample surface deforms. When the sample is not excited, the probe light is reflected at a certain angle by the sample surface and then reflected by the SPR element into the detector. After the sample is excited by the pump light, surface deformation occurs, causing a deflection of Δθ at the probe light's reflection angle. The light is then reflected by the SPR element into the detector, where the intensity of the probe light is modulated by the change in reflectivity ΔB of the SPR element. The term "detector" is a general term for various photoelectric sensors; the oblique incidence of the probe light in this diagram is merely for the purpose of illustrating the angle change.

[0062] Step S210 may specifically include:

[0063] The server controls the electrically operated rotary stage 6, causing the D-shaped reflector 7 fixed on it to rotate by a set angle. Since the pump light is reflected by the surface of the D-shaped reflector 7, the focusing position of the pump light on the sample under test will change when the D-shaped reflector 7 rotates by a certain angle.

[0064] The probe light passes through the opposite side of the D-type reflector 7 and is incident on the sample to be tested. In order to ensure that data can be collected in the same area for each measurement, so that the experimental results are comparable and accurate, the absolute position of the probe light incident does not change. This can be understood as the specific position of the probe light illuminating the sample surface of the sample to be tested remaining constant.

[0065] Based on the path of the probe light reflection, the three output channels of the balanced photodetector 15 can output the electrical signal corresponding to the signal light, the electrical signal corresponding to the reference light, and the signal difference between the signal light and the reference light converted into electrical signals, respectively.

[0066] In this experiment, the real-time intensity of the signal light and the reference light was acquired and analyzed by an oscilloscope and a computer, respectively. The signal difference between the signal light and the reference light was input to the lock-in amplifier 17. The modulation frequency of the chopper 10 was used as the reference signal frequency of the lock-in amplifier 17. After processing by the lock-in amplifier, the input signal was denoised to determine the difference signal. The tiny signal of the reflectivity change of the SPR element 14 was amplified, extracted, output, and stored in the computer.

[0067] Step S220: Using a preset algorithm, process the difference signal to determine the change in reflectivity of the SPR element.

[0068] The change in reflectivity of the SPR element is the change in reflectivity of the SPR element after the sample surface is deformed following excitation by pump light.

[0069] Combination Figure 3 As shown, since the pump light has a certain frequency after being modulated by the chopper 10 and focused on the sample under test, it generates periodic excitation. The signal reflected by the probe light also carries the periodic information of the modulation frequency of the chopper 10. The probe light reflected, carrying the periodic information and the surface deformation information of the sample under test, becomes parallel light after passing through the first focusing lens 8 again. However, it may be parallel to the incident path of the probe light on the top view shown in the above detection device diagram. After the parallel-shifted probe light passes through the second beam splitter 12, the resulting reflected light will pass parallel to the focusing lens 13 at different positions. Therefore, the probe light will be emitted at different angles and hit the SPR element 14 at different incident angles, resulting in changes in the reflectivity of the SPR element.

[0070] Before step S220, the process of determining the preset algorithm is as follows:

[0071] Step S221: The change in reflectivity of the sample under test and the change in reflectivity of the SPR element caused by surface deformation constitute transient reflectivity. More precisely, it is the instantaneous change in the reflective properties of the sample surface measured by probe light, or it can be understood as the phenomenon that the reflectivity of the sample under test changes with time within an extremely short time scale (usually from picoseconds to nanoseconds) after it is excited by pump light.

[0072] At time t, the sample under test is not excited. At this time, the reflectivity of the sample is R, the reflectivity of the SPR element is B, and the initial intensity of the probe light is I0. At time t+τ, the sample under test is excited. The change in reflectivity of the sample under test is dR(τ,ω), and the change in reflectivity of the SPR element is dB(τ,ω); where ω is the modulation frequency of the chopper. The reference light passes through a neutral density attenuator, and its transmittance is T. ND .

[0073] The voltage signal N1 corresponding to the reference light received by the first input channel can be expressed as:

[0074] N1=I0*[R+dR(τ,ω)]*T ND

[0075] The voltage signal N2 corresponding to the signal light received by the second input channel can be expressed as:

[0076] N2=I0*[R+dR(τ,ω)]*[B+dB(τ,ω)]

[0077] Step S222: Calculate the difference signal f;

[0078] Specifically, the difference between N2 and N1 output from the third channel is:

[0079] I0*[R+dR(τ,ω)]*[B+dB(τ,ω)]-I0*[R+dR(τ,ω)]*T ND

[0080] Since the lock-in amplifier can extract the difference signal f at the modulation frequency ω, it can be specifically expressed as: f=I0*R*dB(τ,ω)+I0*dR(τ,ω)*B+I0*dR(τ,ω)*dB(τ,ω)-I0*dR(τ,ω)

[0081] *T ND

[0082] Furthermore, it can be expressed as:

[0083] f=I0*R*dB(τ,ω)+I0*dR(τ,ω)*(BT ND )+I0*dR(τ,ω)*dB(τ,ω)

[0084] Ignoring second-order minor quantities, we simplify to:

[0085] f=I0*R*dB(τ,ω)+I0*dR(τ,ω)*(BT ND )

[0086] Step S223: Using a neutral density attenuator, the reflectivity B of the sample before excitation is equal to the transmittance T of the neutral density attenuator. ND If they are equal, a preset algorithm can be obtained:

[0087] f = I0 * R * dB(τ, ω)

[0088] It should be noted that since the determination process of dR(τ,ω) is relatively complex, this method is used to remove dR(τ,ω) to simplify the parameters involved and thus improve the overall computational efficiency.

[0089] In another embodiment, the preset algorithm for determining the change in reflectivity of the SPR element may also be:

[0090] |f1-f2|=2*I0*R*dB(τ,ω)

[0091] Here, f1 and f2 are signals of two points symmetrical about the center of the focused spot of the pump light.

[0092] The process of determining the preset algorithm is as follows:

[0093] The signals at the two points are related as follows: dR1(τ,ω)=dR2(τ,ω); dB1(τ,ω)=-dB2(τ,ω). Here, dR1(τ,ω) represents the change in reflectance of the sample corresponding to signal f1; dR2(τ,ω) represents the change in reflectance of the sample corresponding to signal f2; dB1(τ,ω) represents the change in reflectance of the SPR element corresponding to signal f1; and dB2(τ,ω) represents the change in reflectance of the SPR element corresponding to signal f2.

[0094] Therefore, according to f=I0*R*dB(τ,ω)+I0*dR(τ,ω)*(BT) ND From this, we can obtain: |f1-f2|=2*I0*R*dB(τ,ω).

[0095] In summary, the change in reflectivity of the SPR element can be determined by calculating the difference signal extracted by the lock-in amplifier, the reflectivity of the sample under test when it is not excited by the pump light, and the initial intensity of the probe light through the configured preset algorithm.

[0096] Step S230: Based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample to be tested, determine the change in reflection angle corresponding to the change in reflectivity of the SPR element.

[0097] The change in reflection angle is the change in the angle of reflection of the probe light on the sample surface of the sample to be tested.

[0098] The analysis process based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample under test is as follows:

[0099] Figure 6 This demonstrates the variation curve B(θ) of the reflectivity of the probe light after it is reflected at different angles by the test sample, while keeping the incident propagation direction of the probe light constant. This variation curve can be obtained by recording the intensity of the probe light after reflection by the SPR element at different initial angles of the test sample. This variation curve can be understood as the correspondence between the reflectivity of the SPR element and the reflection angle of the probe light on the test sample, that is, the correspondence between the reflectivity of the SPR element and the reflection angle of the probe light on the test sample.

[0100] Because the intensity distribution of the pump light is about the center of its focused spot (x=x) pump ,y=y pump The sample surface is symmetrical, and after surface deformation, the surface displacement of the excitation region is Δh(x,y,τ). The center position of the focused probe spot is x=x probe y = y probe Its reflection angle on the sample is a function θ(x) of position and time. probe ,y probe Taking the Gaussian pump light intensity distribution as an example, when the center position of the focused spot of the probe light satisfies y probe =y pump At this time, the modulation relationship between surface deformation and the reflectivity of the SPR element is a function dependent on the detection position. For example... Figure 6 As shown, based on the symmetry between the pump light spot and the surface deformation, when x pump =x probe When x is zero, the reflection angle of the probe light on the sample is θ0; when x is zero, the reflection angle of the probe light on the sample is θ0. pump <x probe When x ∈ [a], the reflectivity of the SPR element increases as the angle of reflection of the probe light on the sample decreases; when .... probe <x pump At that time, the reflectivity of the SPR element decreases as the angle of reflection of the probe light on the sample increases.

[0101] Step S230 may specifically include: the change in reflectivity of the SPR element, dB(τ,ω), determined in step S220, that is... Figure 6 The difference between the ordinate Bspr+ / Bspr- and Bsp0;

[0102] In other words, through Figure 6 The relationship between the reflectivity of the SPR element and the reflection angle of the probe light on the sample under test can be used to determine the change in reflection angle corresponding to the change in reflectivity of the SPR element.

[0103] Step S240: Determine the deformation information of the corresponding points on the sample surface of the sample to be tested based on the change in reflection angle.

[0104] Specifically, in combination Figure 7 As shown, before the surface of the sample under test is deformed, when the probe light is incident on a certain point of the sample under test, the reflection angle of the probe light before the surface of the sample under test is 0°.

[0105] After the sample surface of the sample to be tested undergoes deformation, while ensuring that the incident propagation direction of the probe light remains unchanged, the corresponding reflected light returns according to the corresponding reflection angle. The reflection angle at this time is the amount of reflection angle change determined in step S230, denoted as Δθ.

[0106] The process of determining the deformation information at corresponding points on the surface of the sample to be tested based on the change in reflection angle can first be expressed as:

[0107]

[0108] Wherein, the reflection angle after surface deformation of the sample surface is Δθ, and the surface deformation of the sample can be described as the displacement Δh of each position in the excitation region toward the outward direction of the sample surface, and x is the coordinate of the corresponding point on the x-axis.

[0109] Then, by detecting the reflection angle Δθ corresponding to the deformation at different positions in the x-direction, and integrating the above tan(Δθ), the surface displacement Δh(x) at any position (point) in the x-direction can be determined, which means the deformation information of the corresponding point on the sample surface of the sample to be tested is determined. Its expression is:

[0110]

[0111] This application provides a method for determining sample deformation information. The method includes: after the sample surface of the sample to be tested is excited by pump light and a probe light detects any point on the excited sample surface, acquiring the difference signal between the signal light and the reference light determined by the detection device after conversion into electrical signals; processing the difference signal using a preset algorithm to determine the change in reflectivity of the SPR element; determining the change in reflection angle corresponding to the change in reflectivity of the SPR element based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample to be tested; and determining the deformation information of the corresponding point on the sample surface of the sample to be tested based on the change in reflection angle. This method can utilize an SPR element (optical element) with surface plasmon resonance effect to achieve direct conversion between the reflectivity measurement of the sample to be tested and surface deformation information. This process has fewer operation steps, high spatial accuracy, and can improve the measurement efficiency of deformation information while ensuring the accuracy of deformation information measurement.

[0112] Corresponding to the above method, embodiments of this application also provide a device for determining sample deformation information, such as... Figure 8 As shown, the device includes:

[0113] The acquisition unit 810 is used to acquire the difference signal between the signal light and the reference light determined by the detection device after they are converted into electrical signals, after the sample surface of the sample to be tested is excited by the pump light and the probe light detects any point on the excited sample surface; wherein, the reference light is the beam formed by splitting the reflected light after the probe light is reflected by the sample to be tested; the signal light is the beam of the reflected light that enters the SPR element in the detection device after being split.

[0114] The processing unit 820 is used to process the difference signal using a preset algorithm to determine the change in reflectivity of the SPR element; wherein the change in reflectivity of the SPR element is the change in reflectivity of the SPR element after the sample surface of the sample under test is excited by pump light and deformed.

[0115] Furthermore, based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample under test, the change in reflection angle corresponding to the change in reflectivity of the SPR element is determined; wherein, the change in reflection angle is the change in the reflection angle of the probe light on the sample surface of the sample under test.

[0116] Furthermore, based on the change in reflection angle, the deformation information of corresponding points on the sample surface of the sample to be tested is determined.

[0117] The functions of each functional unit of the sample deformation information determination device provided in the above embodiments of this application can be implemented through the above method steps. Therefore, the specific working process and beneficial effects of each unit in the sample deformation information determination device provided in the embodiments of this application will not be repeated here.

[0118] This application also provides an electronic device, such as... Figure 9 As shown, it includes a processor 910, a communication interface 920, a memory 930, and a communication bus 940, wherein the processor 910, the communication interface 920, and the memory 930 communicate with each other through the communication bus 940.

[0119] Memory 930 is used to store computer programs;

[0120] When the processor 910 executes the program stored in the memory 930, it performs the following steps:

[0121] After the sample surface of the sample to be tested is excited by pump light and the probe light detects any point on the excited sample surface, the difference signal between the signal light and the reference light determined by the detection device and converted into electrical signals is obtained; wherein, the reference light is the beam formed by the beam of reflected light after the probe light is reflected by the sample to be tested and then split; the signal light is the beam of reflected light that enters the SPR element in the detection device after being split.

[0122] The difference signal is processed using a preset algorithm to determine the change in reflectivity of the SPR element; wherein, the change in reflectivity of the SPR element is the change in reflectivity of the SPR element after the sample surface of the sample is excited by pump light and deformed.

[0123] Based on the correspondence between the reflectivity of the configured SPR element and the reflection angle of the probe light on the sample under test, the change in reflection angle corresponding to the change in reflectivity of the SPR element is determined; wherein, the change in reflection angle is the change in the reflection angle of the probe light on the sample surface of the sample under test.

[0124] Based on the change in reflection angle, the deformation information of corresponding points on the sample surface of the sample to be tested is determined.

[0125] The communication bus mentioned above can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. This communication bus can be divided into address bus, data bus, control bus, etc. For ease of illustration, only one thick line is used to represent it in the diagram, but this does not mean that there is only one bus or one type of bus.

[0126] The communication interface is used for communication between the aforementioned electronic devices and other devices.

[0127] The memory may include random access memory (RAM) or non-volatile memory (NVM), such as at least one disk storage device. Optionally, the memory may also be at least one storage device located remotely from the aforementioned processor.

[0128] The processors mentioned above can be general-purpose processors, including central processing units (CPUs), network processors (NPs), etc.; they can also be digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0129] The implementation methods and beneficial effects of the various components of the electronic device in the above embodiments for solving the problem can be found in [reference needed]. Figure 2 The steps in the illustrated embodiments are used to implement the electronic device. Therefore, the specific working process and beneficial effects of the electronic device provided in this application will not be repeated here.

[0130] In another embodiment provided in this application, a computer-readable storage medium is also provided, which stores instructions that, when executed on a computer, cause the computer to perform a method for determining sample deformation information as described in any of the above embodiments.

[0131] In another embodiment provided in this application, a computer program product containing instructions is also provided, which, when run on a computer, causes the computer to execute a method for determining sample deformation information as described in any of the above embodiments.

[0132] Those skilled in the art will understand that the embodiments in this application can be provided as methods, systems, or computer program products. Therefore, the embodiments in this application can take the form of entirely hardware embodiments, entirely software embodiments, or embodiments combining software and hardware aspects. Furthermore, the embodiments in this application can take the form of computer program products implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0133] This application describes embodiments of methods, apparatus (systems), and computer program products according to embodiments of this application with reference to flowchart illustrations and / or block diagrams. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0134] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0135] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0136] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this application do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected," "coupled," or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0137] Although preferred embodiments have been described in this application, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the embodiments in this application are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments in this application.

[0138] Obviously, those skilled in the art can make various modifications and variations to the embodiments of this application without departing from the spirit and scope of the embodiments of this application. Therefore, if these modifications and variations to the embodiments of this application fall within the scope of the embodiments of this application and their equivalents, then these modifications and variations are also intended to be included in the embodiments of this application.

Claims

1. A method of determining sample deformation information, characterized by, The method comprises: After a sample surface of a to-be-tested sample is excited by pump light and any point on the sample surface after excitation is detected by probe light, a difference signal between an electrical signal converted by a detection device from signal light and reference light is obtained; the reference light is reflected light formed by the probe light reflected by the to-be-tested sample after being split; the signal light is light entering an SPR element in the detection device after the reflected light is split; the reference light and the signal light are both formed by the probe light reflected by the to-be-tested sample after being split by a beam splitter, and the reference light after being split enters a balanced photodetector after the intensity of the reference light is adjusted by a neutral density attenuation sheet; A preset algorithm is used to process the difference signal to determine a reflectivity change of the SPR element; the reflectivity change of the SPR element is a change in reflectivity of the SPR element after the sample surface of the to-be-tested sample is deformed after being excited by the pump light; the preset algorithm is used to eliminate interference of a reflectivity change of the to-be-tested sample itself on the reflectivity change of the SPR element by making the reflectivity of the SPR element when the to-be-tested sample is not excited equal to the transmittance of the neutral density attenuation sheet; Based on a correspondence between the reflectivity of the configured SPR element and a reflection angle of the probe light on the to-be-tested sample, a reflection angle change corresponding to the reflectivity change of the SPR element is determined; the reflection angle change is a change in the reflection angle of the probe light on the sample surface of the to-be-tested sample; According to the reflection angle change, deformation information of a corresponding point on the sample surface of the to-be-tested sample is determined. The detection device comprises, in sequence, a laser, a first beam splitter, a chopper, a first reflector, an electrically-driven rotary displacement stage, a first focusing lens, and a sample stage; the electrically-driven rotary displacement stage is provided with a D-shaped reflector. The first beam splitter in the detection device is provided, in sequence, with a delay stage, a second reflector, and a beam splitter; the beam splitter is provided, in sequence, with a second beam splitter and a neutral density attenuation sheet behind the beam splitter; the second beam splitter is provided, in sequence, with a second focusing lens and an SPR element on the side of the second beam splitter; a balanced photodetector is provided below the neutral density attenuation sheet and the SPR element; an oscilloscope and a lock-in amplifier are connected to the balanced photodetector; the delay stage is provided with a third reflector and a fourth reflector; and the output channel of the balanced photodetector comprises a first channel, a second channel, and a third channel.

2. The method of claim 1, wherein, The laser output by the laser enters the first beam splitter and is split into pump light and probe light.

3. The method of claim 1, wherein, The method further comprises: obtaining a reflectivity of the to-be-tested sample when the to-be-tested sample is not excited by pump light and an initial intensity of the probe light; The preset algorithm is used to process the difference signal, the reflectivity of the to-be-tested sample when the to-be-tested sample is not excited by pump light, and the initial intensity of the probe light to determine the reflectivity change of the SPR element. The preset algorithm is:

4. The method of claim 3, wherein, According to the reflection angle change, deformation information of a corresponding point on the sample surface of the to-be-tested sample is determined. wherein, is a difference signal; R is the reflectivity of the sample to be measured when it is not excited by the pump light; is the initial intensity of the probe light; is the change in reflectivity of the SPR element.

5. The method of claim 1, wherein, ​ The deformation algorithm is used to process the reflection angle change amount, and surface displacement of a corresponding point on the sample surface of the sample to be measured is determined. The deformation algorithm is: Wherein, Ah is the surface displacement of the corresponding point on the x-axis; x is the coordinate of the corresponding point on the x-axis, is the change in the reflection angle.

6. An apparatus for determining sample deformation information, characterized by The device comprises: The acquisition unit is configured to acquire a difference signal between an electrical signal converted from a signal light and a reference light after the signal light and the reference light are determined by a detection device, after a sample surface of a sample to be measured is excited by pump light and after any point on the sample surface excited by the pump light is detected by probe light; the reference light is a reflected light formed by the probe light reflected by the sample to be measured and then split by a beam splitter; the signal light is a light beam formed by the reflected light entering an SPR element in the detection device after being split by the beam splitter; the reference light and the signal light are both formed by the probe light reflected by the sample to be measured and then split by a beam splitter, and the reference light after being split enters a balanced photodetector after its intensity is adjusted by a neutral density attenuation sheet; The processing unit is configured to process the difference signal by using a preset algorithm, and determine a reflectivity change amount of the SPR element; the reflectivity change amount of the SPR element is a change amount of reflectivity of the SPR element after the sample to be measured is excited by the pump light and the sample surface of the sample to be measured is deformed; the preset algorithm is configured to equalize the reflectivity of the SPR element when the sample to be measured is not excited and the transmittance of the neutral density attenuation sheet, so as to eliminate the interference of the reflectivity change of the sample to be measured on the acquisition of the reflectivity change amount of the SPR element; and based on a correspondence between the reflectivity of the SPR element and the reflection angle of the probe light on the sample to be measured, the reflectivity change amount of the SPR element is determined, and a reflection angle change amount corresponding to the reflectivity change amount of the SPR element is determined; the reflection angle change amount is a change amount of the reflection angle of the probe light on the sample surface of the sample to be measured; and deformation information of a corresponding point on the sample surface of the sample to be measured is determined according to the reflection angle change amount. The detection device comprises, in sequence, a laser, a first beam splitter, a chopper, a first reflector, an electrically-driven rotary displacement stage, a first focusing lens, and a sample stage; the electrically-driven rotary displacement stage is provided with a D-shaped reflector. The first beam splitter in the detection device is provided, in sequence, with a delay stage, a second reflector, and a beam splitter; the beam splitter is provided, in sequence, with a second beam splitter and a neutral density attenuation sheet behind the beam splitter; the second beam splitter is provided, in sequence, with a second focusing lens and an SPR element on the side of the second beam splitter; the neutral density attenuation sheet and the SPR element are provided with a balanced photodetector below the neutral density attenuation sheet and the SPR element; an oscilloscope and a lock-in amplifier are connected to the balanced photodetector, respectively; the delay stage is provided with a third reflector and a fourth reflector; the output channel of the balanced photodetector comprises a first channel, a second channel, and a third channel.

7. An electronic device, comprising: The electronic device comprises a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory complete communication with each other through the communication bus; The memory is configured to store a computer program; The processor is configured to execute the program stored on the memory, and implement the method steps of any one of claims 1-5.

8. A computer-readable storage medium, characterized in that, The computer readable storage medium stores a computer program, and the computer program is executed by the processor to implement the method steps in any one of claims 1-5.

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