Precision measuring instrument based on frame mirror structure and orthogonal laser measurement reference

Abstract

The present invention relates to a precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference, belonging to the technical field of precision measurement equipment. It includes a main base and vertical support columns, and shaft seats are arranged at the tops of the two vertical support columns; a sample fixing base is arranged on the upper side of the main base, and a moving mechanism is arranged on the main base; a transverse laser mirror, a longitudinal laser mirror and a vertical laser mirror are arranged on the upper end surface of the sample fixing base; a hanging frame is installed on the lower end surface of the vertical shaft, and a transverse laser interferometer, a longitudinal laser interferometer and a vertical laser interferometer are arranged at the lower end of the hanging frame. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and geometric tolerances of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to precision measuring instruments, and mainly relates to a measuring instrument for evaluating the dimensional and geometric errors of micro-devices with machining precision in the micro-nano scale. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Against this background, micro / nano technologies aiming at micro-machining, nano-structures and systems have emerged, and various micro / nano-scale micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, micro-steps, etc.

[0003] When facing the measurement scenarios of micro-nano devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measurement size of traditional coordinate measuring machines cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nano and picometer scales have a small measurement range and short probes, and cannot meet the three-dimensional measurement requirements of micro-nano scale devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measuring device that can measure the dimensional and geometric errors of three-dimensional devices and has a resolution in the micro-nano scale to reliably evaluate the shape-complex micro-nano scale micro-devices.

[0004] The invention patent "Small Micro-Nano Scale Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro-nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component and a probe to design a small micro-nano scale coordinate measuring machine. This micro-nano coordinate measuring machine has a relatively low cost, but cannot measure the dimensional and geometric errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ultra-precision geometric error measuring instrument, which can not only adapt to and meet the micro-nano scale precision measurement of the dimensional and geometric errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed and high efficiency.

[0006] To achieve the above-mentioned invention purposes, a technical solution provided by the present invention is as follows: A precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference, including a main seat, on the upper side of the main seat, vertical support columns are arranged at intervals, and shaft seats are arranged at the tops of the two vertical support columns;

[0007] A transverse and longitudinal movement mechanism is provided above the main seat and between two vertical support columns. The mirror module is fixedly connected to the left end of the longitudinal movement block in the transverse and longitudinal movement mechanism. The longitudinal movement block is reciprocally sleeved on the longitudinal guide rail in a longitudinal direction, and the longitudinal guide rail is reciprocally installed in the transverse guide rail in a transverse direction.

[0008] A vertical shaft is slidably arranged on the shaft seat in the vertical direction. A vertical shaft nano-motor for controlling the vertical movement of the vertical shaft is arranged on the shaft seat. Fixing grooves are respectively opened at one ends of the vertical shaft close to the probe assembly on both vertical sides of the vertical shaft. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove. A probe assembly is arranged on the lower end surface of the vertical shaft.

[0009] The mirror module is composed of a vertical laser mirror, a transverse laser mirror, a longitudinal laser mirror, a sample fixing surface, a rotating shaft, and a fixing column. The vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror are orthogonally installed on the upper end surface of the sample fixing surface by the fixing column. The rotating shaft is assembled on the upper end surface of the sample fixing surface, and an angle measuring mechanism for detecting the rotation angle of the rotating shaft is arranged inside the sample fixing surface.

[0010] The probe assembly is composed of a vertical laser interferometer, a transverse laser interferometer, a longitudinal laser interferometer, a probe, and a hanging frame. The vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer are fixedly installed on the hanging frame. The ranging light rays generated by the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer orthogonally converge at the probe tip. The light rays generated by the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer are respectively perpendicular to the vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror.

[0011] The probe is installed on the hanging frame and is located inside the relative space of the vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror.

[0012] The shaft seat is provided with a through vertical connection hole in the vertical direction, and an installation groove is opened on the inner wall of the vertical connection hole. The vertical shaft nano-motor is installed in the installation groove, and the output shaft of the vertical shaft nano-motor moves in a straight line and can drive the vertical shaft to slide in the vertical direction.

[0013] Preferably, the probe can be in contact with the sample placed on the sample fixing surface for measurement.

[0014] Preferably, the vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror are made of microcrystalline glass.

[0015] Preferably, the laser light rays emitted by the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer include multiple laser beams.

[0016] Preferably, the transverse and longitudinal movement mechanism controls the mirror module to move transversely and longitudinally, and the vertical-axis nano motor controls the vertical axis to move the probe in the vertical direction;

[0017] The longitudinal laser interferometer obtains a transverse-axis displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ;

[0018] The transverse laser interferometer obtains a longitudinal-axis displacement of y″ and a rotation angle of r x ;

[0019] The vertical laser interferometer obtains a vertical-axis displacement of z″;

[0020] Calculate the compensated transverse-axis displacement x′, longitudinal-axis displacement y′, and vertical-axis displacement z′ of the measured sample according to the supplementary formula;

[0021] The supplementary formula is:

[0022]

[0023] Preferably, the transverse and longitudinal movement mechanism controls the mirror module to move transversely and longitudinally, and the vertical-axis nano motor controls the vertical axis to move the probe in the vertical direction, obtaining the coordinates (a i , b i , c i ) of the i-th position point to be detected, where i = 1,..., N;

[0024] The rotating shaft drives the sample to be measured to rotate by an angle Rotation angle After that, the transverse and longitudinal movement mechanism controls the mirror module to move transversely and longitudinally, and the vertical-axis nano motor controls the vertical axis to move the probe, obtaining the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers;

[0025] Convert the surface coordinates (a2 j , b2 j , c2 j ) to the coordinate system of the sample to be measured through the conversion formula, obtaining the coordinates (a j , b j , c j ); where the conversion formula is:

[0026]

[0027] Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinate sets of the workpiece to be measured (a i , b i , c i ), i = 1, ..., N + K.

[0028] The present invention provides a precision measuring instrument based on a frame - type mirror structure and an orthogonal laser measurement reference. By setting a transverse and longitudinal movement mechanism and a vertical axis, the probe and the workpiece to be measured are respectively driven to move relatively in the transverse, longitudinal, and vertical directions; the vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror are orthogonally arranged in space; a hanging frame is installed at the lower end of the vertical axis, the probe head is installed at the lower end of the hanging frame, the transverse laser interferometer and the longitudinal laser interferometer are installed on the hanging frame, and the laser rays generated by the transverse laser interferometer, the longitudinal laser interferometer, and the vertical laser interferometer are respectively perpendicular to the transverse laser mirror, the longitudinal laser mirror, and the vertical laser mirror, and the ranging laser beams in the laser rays converge at the center of the probe ball of the probe head. Thus, a precision measuring instrument based on a frame - type mirror structure and an orthogonal laser measurement reference is formed.

[0029] The structural design of the present invention conforms to the Abbe principle, with small measurement errors. At the same time, laser interferometers are used to measure displacement and angle, achieving sub - nanometer - level measurement accuracy in the transverse, longitudinal, and vertical directions, and compensating for displacement errors in real - time through angles. Its accuracy is much higher than that of traditional dimensional and geometric error measurement instruments, and it has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, high speed, and good repeatability.

[0030] Specifically, the technical innovation and good effects of the present invention are as follows:

[0031] 1) The structural design of the present invention conforms to the Abbe principle in the transverse, longitudinal, and vertical directions. By structural design, the first - order measurement error is eliminated, achieving high measurement accuracy.

[0032] 2) The present invention proposes a very multi - axis laser monitoring probe and a six - degree - of - freedom motion structure of the workpiece to be measured, which can accurately measure the relative displacement and deflection angle between the probe and the workpiece in the three - axis directions, realize real - time compensation of measurement errors, and ensure the high measurement accuracy of the measuring instrument.

[0033] 3) The probe assembly and the mirror module proposed by the present invention are easy to transplant and can be installed in existing low - precision geometric error measurement instruments, enabling low - precision geometric error measurement instruments to also have the ability to measure micro - nano - level micro - devices with high precision.

[0034] 4) In the present invention, the laser measurement reference and the probe are relatively stationary during the measurement process, dynamically conforming to the Abbe principle, effectively eliminating the measurement error caused by the Abbe error in the dynamic measurement of the instrument, effectively reducing the measurement uncertainty of the instrument, and improving the measurement repeatability of the instrument.

[0035] The structure of the present invention is unique and reasonable, and its precision is much higher than that of traditional dimensional and geometric error measurement instruments. It can achieve both high measurement precision and large measurement range within a relatively small volume. Brief Description of the Drawings

[0036] Figure 1 It is a schematic structural diagram of a precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference according to the present invention;

[0037] Figure 2 It is a schematic structural diagram of a mirror module of a precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference according to the present invention;

[0038] Figure 3 It is a schematic structural diagram of a probe assembly of a precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference according to the present invention;

[0039] Figure 4 It is a schematic diagram highlighting the vertical driving mechanism of a precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference according to the present invention;

[0040] Explanation of the part numbers in the figure:

[0041] 100, main base; 200, vertical support column; 300, shaft seat; 400, horizontal and longitudinal movement mechanism; 410, longitudinal moving block; 420, longitudinal guide rail; 430, horizontal guide rail; 500, mirror module; 510, vertical laser mirror; 520, horizontal laser mirror; 530, longitudinal laser mirror; 540, sample fixing surface; 550, rotation axis; 560, fixing column; 600, probe assembly; 610, vertical laser interferometer; 620, horizontal laser interferometer; 630, longitudinal laser interferometer; 640, probe; 650, hanging bracket; 700, vertical movement mechanism; 710, vertical shaft; 720, vertical shaft nano motor; 730, buffer cylinder; 740, cylinder fixing block; 750, vertical connection hole; 760, installation groove; 770, fixing groove; Detailed Embodiment

[0042] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0043] Embodiment

[0044] The present invention provides a precision measuring instrument based on a frame-type mirror structure and an orthogonal laser measurement reference. Refer to Figures 1-4 , which includes a main base 100. Vertical support columns 200 are spaced apart on the upper side of the main base 100, and a shaft seat 300 is provided at the top of the two vertical support columns 200;

[0045] A transverse and longitudinal movement mechanism 400 is provided on the upper side of the main base 100 and between the two vertical support columns 200. The mirror module 500 is fixedly connected to the left end of the longitudinal movement block 410 in the transverse and longitudinal movement mechanism 400. The longitudinal movement block 410 is sleeved on the longitudinal guide rail 420 and can move longitudinally back and forth. The longitudinal guide rail 420 is installed in the transverse guide rail 430 and can move transversely back and forth;

[0046] A vertical shaft 710 is slidably provided on the shaft seat 300 in the vertical direction; a vertical shaft nano-motor 720 for controlling the vertical movement of the vertical shaft 710 is provided on the shaft seat 300; fixing grooves 770 are respectively opened at one ends of the vertical shaft 710 on both vertical sides close to the probe assembly 600. The buffer cylinder 730 is fixedly installed on the inner wall of the vertical connection hole 750 by a cylinder fixing block 740, and the telescopic end of the buffer cylinder 730 is connected to the inner wall of the fixing groove 770; a probe assembly 600 is provided on the lower end surface of the vertical shaft 710;

[0047] The mirror module 500 is composed of a vertical laser mirror 510, a transverse laser mirror 520, a longitudinal laser mirror 530, a sample fixing surface 540, a rotating shaft 550, and a fixing column 560. The vertical laser mirror 510, the transverse laser mirror 520, and the longitudinal laser mirror 530 are orthogonally installed on the upper end surface of the sample fixing surface 540 by the fixing column 560; the rotating shaft 550 is fitted on the upper end surface of the sample fixing surface 540, and an angle measuring mechanism for detecting the rotation angle of the rotating shaft 550 is provided inside the sample fixing surface 540;

[0048] The probe assembly 600 is composed of a vertical laser interferometer 610, a transverse laser interferometer 620, a longitudinal laser interferometer 630, a probe 640 and a suspension bracket 650. The vertical laser interferometer 610, the transverse laser interferometer 620 and the longitudinal laser interferometer 630 are fixedly installed on the suspension bracket 650. The ranging light rays generated by the vertical laser interferometer 610, the transverse laser interferometer 620 and the longitudinal laser interferometer 630 orthogonally converge at the probe head of the probe 640. The light rays generated by the vertical laser interferometer 610, the transverse laser interferometer 620 and the longitudinal laser interferometer 630 are respectively perpendicular to the vertical laser mirror 510, the transverse laser mirror 520 and the longitudinal laser mirror 530.

[0049] The probe 640 is installed on the suspension bracket 650 and is located inside the relative space of the vertical laser mirror 510, the transverse laser mirror 520 and the longitudinal laser mirror 530.

[0050] The shaft seat 300 is provided with a through vertical connection hole 750 in the vertical direction, and an installation groove 760 is provided on the inner wall of the vertical connection hole 750. The vertical shaft nano motor 720 is installed in the installation groove 760. The output shaft of the vertical shaft nano motor 720 moves in a straight line and can drive the vertical shaft 710 to slide in the vertical direction.

[0051] Further, the probe 640 can be in contact with and measure a sample placed on the sample fixing surface 540.

[0052] Further, the vertical laser mirror 510, the transverse laser mirror 520 and the longitudinal laser mirror 530 are made of microcrystalline glass.

[0053] Further, the laser light rays emitted by the vertical laser interferometer 610, the transverse laser interferometer 620 and the longitudinal laser interferometer 630 include multiple laser beams.

[0054] Among them, the vertical shaft nano motor 720 mentioned above is a prior art. It can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other driving motors that can achieve linear movement, which is not limited here.

[0055] Among them, the transverse and longitudinal movement mechanism 400 mentioned above is a prior art. It can be the two-dimensional displacement stage in the paper "Research on the Control of H-Type Motion Platform Driven by Double Linear Motors", or other two-dimensional displacement platforms that can achieve transverse and longitudinal movement, which is not limited here.

[0056] When the workpiece to be measured mounted on the rotating shaft 550 moves horizontally or longitudinally, or when the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angle value r generated by the mirror module around the longitudinal Y axis. y, the rotation angle refers to the angular value r generated by the mirror module rotating around the transverse X-axis x , the yaw angle refers to the angular value r generated by the mirror module rotating around the vertical Z-axis z , during the measurement of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacements caused by the pitch angle, yaw angle, and rotation angle.

[0057] The compensation process is as follows. The transverse and longitudinal moving mechanism 400 controls the mirror module 500 to move transversely and longitudinally, and the vertical-axis nano motor 720 controls the vertical axis 710 to move the probe 640 in the vertical direction; the longitudinal laser interferometer (630) obtains the transverse-axis displacement as x″ and the yaw angle as r y , and obtains the pitch angle as r z ; the transverse laser interferometer (620) obtains the longitudinal-axis displacement as y″ and the rotation angle r z ; the vertical laser interferometer (610) obtains the vertical-axis displacement as z″;

[0058] Calculate the compensated transverse-axis displacement x′, longitudinal-axis displacement y′, and vertical-axis displacement z′ of the measured sample according to the compensation formula;

[0059] The compensation formula is:

[0060]

[0061] When measuring the workpiece to be measured, in the instrument coordinate system, the transverse and longitudinal moving mechanism 400 controls the mirror module 500 to move transversely and longitudinally, and the vertical-axis nano motor 720 controls the vertical axis 710 to move the probe 640 in the vertical direction; when the probe 640 contacts the workpiece to be measured, after the feedback of the probe 640 reaches the set threshold, this contact position is the position point to be detected.

[0062] In the coordinate system of the workpiece to be measured, when the probe 640 and the workpiece to be measured move relative to each other, the compensated transverse-axis displacement x′, longitudinal-axis displacement y′, and vertical-axis displacement z′ can be obtained. Continuously move the probe 640 to contact the workpiece to be measured. When the probe 640 contacts the workpiece to be measured, this contact position is set as the i-th position point to be detected. According to the axial displacements in the transverse, longitudinal, and vertical directions, in the instrument coordinate system, the coordinate values (a i , b i , c i ) of the i-th group of position points to be detected can be obtained, where i = 1,..., N.

[0063] If the rotary shaft 550 is used for cooperation in measurement, the rotary shaft 550 drives the workpiece to be measured to rotate by an angle After that, move the probe 640 again to measure the component under test. According to the axial displacements in the horizontal, vertical, and upright directions, the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are measured in the instrument coordinate system, where j = N + 1, …, N + K, and N and K are integers.

[0064] Since the rotary shaft 550 drives the component under test to rotate, when the probe 640 contacts the component under test before rotation, this contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, where i = 1, …, N; after rotation, when the probe 640 contacts the component under test, this contact position is set as the j-th position point to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained. The coordinate system where j = N + 1, …, N + K also changes. It is necessary to process the new set of coordinate values (a2 j , b2 j , c2 j ), where j = N + 1, …, N + K, through the conversion formula, and map the two to the same coordinate system, that is, convert them to the coordinate system of the component under test. The processed coordinate values are (a j , b j , c j ). Among them, the conversion formula is:

[0065]

[0066] Combining the coordinates (a j , b j , c j ) of several position points to be detected and the coordinate values (a i , b i , c i ) of several position points to be detected, a set of surface coordinate sets (a i , b i , c i ) of the component under test are finally obtained, where i = 1, …, N + K. A set of surface coordinates of the component under test above includes the coordinates of several position points to be detected.

[0067] According to this set of surface coordinate sets (a i , b i , c i ) of the component under test measured, where i = 1, …, N + K, the size and form and position errors of the component under test can be quickly evaluated.

[0068] If the rotary shaft 550 is not used, the displacements of each axis, i.e., x′, y′, and z′, can be measured according to the horizontal laser interferometer 620, the vertical laser interferometer 630, and the vertical laser interferometer 610. After a qualified contact is determined by the probe, based on the displacements of each axis x′, y′, and z′, through error compensation and data processing, a measurement point coordinate (x, y, z) on the surface of the workpiece to be measured can be obtained. By measuring several measurement points on the surface of the workpiece to be measured, high-precision measurement of the geometric tolerance of the workpiece to be measured with a complex shape can be achieved.

[0069] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0070] In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0071] The above-described embodiments only represent the implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation of the scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A precision measuring instrument based on a frame type mirror structure and an orthogonal laser measurement reference, characterized in that: It includes a main frame (100), and vertical support columns (200) are arranged at intervals on the upper side of the main frame (100). A shaft seat (300) is arranged at the top of the two vertical support columns (200); A transverse and longitudinal movement mechanism (400) is arranged on the upper side of the main frame (100) and between the two vertical support columns (200). The mirror module (500) is fixedly connected to the left end of the longitudinal movement block (410) in the transverse and longitudinal movement mechanism (400). The longitudinal movement block (410) is sleeved on the longitudinal guide rail (420) and can move longitudinally back and forth. The longitudinal guide rail (420) is installed in the transverse guide rail (430) and can move horizontally back and forth; A vertical shaft (710) is slidably arranged on the shaft seat (300) in the vertical direction; a vertical shaft nano-motor (720) for controlling the vertical movement of the vertical shaft (710) is arranged on the shaft seat (300); on both vertical sides of the vertical shaft (710), fixing grooves (770) are respectively opened at one end close to the probe assembly (600). The buffer cylinder (730) is fixedly installed on the inner wall of the vertical connection hole (750) by a cylinder fixing block (740), and the telescopic end of the buffer cylinder (730) is connected to the inner wall of the fixing groove (770); a probe assembly (600) is arranged on the lower end surface of the vertical shaft (710); The mirror module (500) is composed of a vertical laser mirror (510), a horizontal laser mirror (520), a longitudinal laser mirror (530), a sample fixing surface (540), a rotating shaft (550), and a fixing column (560). The vertical laser mirror (510), the horizontal laser mirror (520), and the longitudinal laser mirror (530) are orthogonally installed on the upper end surface of the sample fixing surface (540) by the fixing column (560). The rotating shaft (550) is assembled on the upper end surface of the sample fixing surface (540), and an angle measuring mechanism for detecting the rotation angle of the rotating shaft (550) is arranged inside the sample fixing surface (540); The probe assembly (600) is composed of a vertical laser interferometer (610), a horizontal laser interferometer (620), a longitudinal laser interferometer (630), a probe (640), and a hanging bracket (650). The vertical laser interferometer (610), the horizontal laser interferometer (620), and the longitudinal laser interferometer (630) are fixedly installed on the hanging bracket (650); the ranging light rays generated by the vertical laser interferometer (610), the horizontal laser interferometer (620), and the longitudinal laser interferometer (630) orthogonally converge at the probe head of the probe (640); the light rays generated by the vertical laser interferometer (610), the horizontal laser interferometer (620), and the longitudinal laser interferometer (630) are respectively perpendicular to the vertical laser mirror (510), the horizontal laser mirror (520), and the longitudinal laser mirror (530); The probe (640) is installed on the hanging bracket (650) and is located inside the relative space of the vertical laser mirror (510), the horizontal laser mirror (520), and the longitudinal laser mirror (530); The shaft seat (300) is provided with a vertically penetrating vertical connection hole (750) in the vertical direction, and an installation groove (760) is formed in the inner wall of the vertical connection hole (750); the vertical-axis nano motor (720) is installed in the installation groove (760), the output shaft of the vertical-axis nano motor (720) moves linearly, and can drive the vertical shaft (710) to slide in the vertical direction.

2. The precision measuring instrument based on the frame-type mirror structure and the orthogonal laser measurement reference according to claim 1, characterized in that: The probe (640) can be in contact with and measure the sample placed on the sample fixed surface (540).

3. The precision measuring instrument based on the frame type mirror structure and the orthogonal laser measurement reference according to claim 1, characterized in that: The vertical laser mirror (510), the horizontal laser mirror (520), and the longitudinal laser mirror (530) are made of glass ceramics.

4. The precision measuring instrument based on the frame-type mirror structure and the orthogonal laser measurement reference according to claim 1, wherein: The laser light emitted by the vertical laser interferometer (610), the horizontal laser interferometer (620), and the longitudinal laser interferometer (630) includes multiple laser beams.

5. The precision measuring instrument based on the frame-type mirror structure and the orthogonal laser measurement reference according to claim 1, wherein: The transverse and longitudinal movement mechanism (400) controls the mirror module (500) to move transversely and longitudinally, and the vertical-axis nano motor (720) controls the vertical shaft (710) to move the probe (640) in the vertical direction; The longitudinal laser interferometer (630) obtains a lateral axis displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The lateral laser interferometer (620) obtains a longitudinal axis displacement of y″ and obtains a rotation angle r x ; The vertical-axis displacement z″ is obtained through the vertical laser interferometer (610); The compensated transverse-axis displacement x′, longitudinal-axis displacement y′, and vertical-axis displacement z′ of the measured sample are calculated according to the supplementary formula; The supplementary formula is:

6. The precision measuring instrument based on the frame-type mirror structure and the orthogonal laser measurement reference according to claim 1, wherein: The horizontal and vertical movement mechanism (400) controls the mirror module (500) to move horizontally and vertically, and the vertical-axis nano-motor (720) controls the vertical axis (710) to move the probe (640) in the vertical direction to obtain the coordinates (a i , b i , c i ) of the i-th position point to be detected, where i = 1,..., N; The rotating shaft (550) drives the sample to be measured to rotate by an angle Rotation angle After that, the transverse and longitudinal movement mechanism (400) controls the mirror module (500) to move transversely and longitudinally, and the vertical-axis nano-motor (720) controls the vertical axis (710) to move the probe (640) in the vertical direction, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the coordinate system of the device under test through the conversion formula, obtaining the coordinates (a j , b j , c j ); where the conversion formula is: Coordinates of several position points to be detected (a j , b j , c j ) and coordinate values of several position points to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the part to be measured (a i , b i , c i ), where i = 1, ..., N + K.

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