Cube - type mirror group and probe integrated geometric error measuring instrument

Abstract

The cube - type mirror group and probe integrated form and position error measuring instrument belongs to precision measuring instruments; in this measuring instrument, the mirror group and the probe are integrally designed and placed inside the relative space of the angular displacement measuring component, making the measuring structure of the instrument simple and compact; moreover, the mirror group and the laser interferometer mounting block are respectively made of a whole piece of zero - expansion microcrystalline glass, eliminating the influence of the main thermal expansion error in ultra - precision measuring instruments on the measuring accuracy. At the same time, a laser interferometer is used to measure angles and displacements. While obtaining sub - nanometer measuring accuracy in the three - axis direction, the instrument can compensate for measurement errors in real time; the present invention combines the characteristics of simple structure and high measuring accuracy and can achieve ultra - precision measurement of micro - nano - level micro - devices.

Description

Technical Field

[0001] The present invention belongs to precision measuring instruments, and mainly relates to a measuring instrument for evaluating the size and geometric tolerance of micro-devices with machining precision in the micro-nano scale. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Against this background, micro / nano technologies aiming at micro-machining, nano-structures and systems have emerged, and various micro / nano-scale micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, micro-steps, etc.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro-nano devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, their measurement accuracy and measurement dimensions cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nano and picometer scales have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro-nano scale devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measuring device that can measure the size and geometric tolerance of three-dimensional devices and has a resolution in the micro-nano scale to reliably evaluate micro-nano scale micro-devices with complex shapes.

[0004] The invention patent "Small Micro-Nano Scale Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro-nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component and a probe to design a small micro-nano scale coordinate measuring machine. This micro-nano coordinate measuring machine has a relatively low cost, but it cannot measure the size and geometric tolerance of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ultra-precision geometric tolerance measuring instrument, which can not only adapt to and meet the micro-nano scale precision measurement of the size and geometric tolerance of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed and high efficiency.

[0006] To achieve the above-mentioned invention purpose, a technical solution provided by the present invention is as follows: a geometric tolerance measuring instrument with an integrated cube-type mirror group and probe, including a main base. On the upper side of the main base, vertical support columns are arranged at intervals, and shaft seats are arranged at the tops of the two vertical support columns.

[0007] A transverse and longitudinal movement mechanism is arranged on the upper side of the main base and between the two vertical support columns, and an angular displacement measurement component is arranged on the upper side of the transverse and longitudinal movement mechanism.

[0008] A vertical shaft is slidably arranged on the shaft seat in the vertical direction; a vertical shaft nano-motor for controlling the vertical movement of the vertical shaft is arranged on the shaft seat, and a buffer cylinder is arranged to compensate for the gravity of the vertical shaft.

[0009] On both vertical sides of the vertical shaft, fixing grooves are respectively opened at one end close to the probe assembly. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a buffer cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove; a probe assembly is arranged on the lower end surface of the vertical shaft.

[0010] The angular displacement measurement assembly is composed of a transverse laser interferometer, a longitudinal laser interferometer, a vertical laser interferometer and a laser interferometer mounting block. The vertical laser interferometer is installed at the inner groove of the laser interferometer mounting block, and the transverse laser interferometer and the longitudinal laser interferometer are installed on the upper top surface of the laser interferometer mounting block; the inner plane of the laser interferometer mounting block is the sample fixing surface; a rotating shaft is arranged on the sample fixing surface, and the measured sample is placed on the upper end of the rotating shaft; an angle measuring mechanism for detecting the rotation angle of the rotating shaft is arranged inside the sample fixing surface.

[0011] The probe assembly is composed of a mirror block and a probe. A vertical laser reflecting surface is arranged on the bottom surface of the mirror block, a longitudinal laser reflecting surface is arranged at the rear side of the mirror block, and a transverse laser reflecting surface is arranged on the left side of the mirror block; the probe is installed inside the relative space of the mirror block; the probe assembly is installed inside the relative space of the angular displacement measurement assembly; the vertical laser reflecting surface, the transverse laser reflecting surface and the longitudinal laser reflecting surface are perpendicular to each other.

[0012] Preferably, both the mirror block and the laser interferometer mounting block are made of microcrystalline glass.

[0013] Preferably, the transverse and longitudinal moving mechanism can drive the angular displacement measurement assembly to move in the transverse and longitudinal directions.

[0014] Preferably, a through vertical connection hole is opened in the shaft seat in the vertical direction, and an installation groove is opened on the inner wall of the vertical connection hole; the vertical shaft nano-motor is installed in the installation groove, and the output shaft of the vertical shaft nano-motor moves in a straight line and can drive the vertical shaft to slide in the vertical direction.

[0015] Preferably, the probe can be abutted against and measured with the sample placed on the angular displacement measurement assembly.

[0016] Preferably, the transverse and longitudinal moving mechanism controls the angular displacement measurement assembly to move in the transverse and longitudinal directions, and the vertical shaft nano-motor controls the vertical shaft to move the probe in the vertical direction.

[0017] The transverse laser interferometer obtains the transverse axis displacement as x″ and the yaw angle as r z, obtain the pitch angle as r y ;

[0018] The longitudinal laser interferometer obtains the longitudinal axis displacement as y″ and obtains the rotation angle r x ;

[0019] Obtain the vertical axis displacement as z″ through the vertical laser interferometer;

[0020] Calculate the compensated transverse axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the supplementary formula;

[0021] The supplementary formula is:

[0022]

[0023] Preferably, in the coordinate system of the component to be measured, when measuring the component to be measured, the transverse and longitudinal moving mechanism controls the angular displacement measurement component to move transversely and longitudinally, and the vertical axis nano-motor controls the vertical axis to move the probe in the vertical direction to obtain the coordinates (a i , b i , c i ) of the i-th position point to be detected, i = 1,..., N;

[0024] The rotating shaft drives the sample to be measured to rotate by an angle Rotation angle After that, the transverse and longitudinal moving mechanism controls the angular displacement measurement component to move transversely and longitudinally, and the vertical axis nano-motor controls the vertical axis to move the probe in the vertical direction to obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers;

[0025] Convert the surface coordinates (a2 j , b2 j , c2 j ) to the coordinate system of the component to be measured through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula is:

[0026]

[0027] The coordinates (a j , b j , c j ) of several position points to be detected and the coordinate values (a i , b i , ci ) Combine to obtain a set of surface coordinate sets (a i , b i , c i ) of the components to be measured, where i = 1,..., N + K.

[0028] The present invention provides a form and position error measuring instrument integrating a cubic mirror group and a probe. The moving mechanism and the vertical axis are provided to drive the angular displacement measuring component and the probe component to move respectively. The transverse laser interferometer, the longitudinal laser interferometer, and the vertical laser interferometer generate laser beams perpendicular to the transverse laser reflecting surface, the longitudinal laser reflecting surface, and the vertical laser reflecting surface respectively, and the transverse laser interferometer, the longitudinal laser interferometer, and the vertical laser interferometer can measure displacement and angle. Thus, a form and position error measuring instrument integrating a cubic mirror group and a probe is formed.

[0029] The present invention uses a laser interferometer to measure the relative displacement between the probe and the component to be measured, and can obtain sub-nanometer measurement accuracy in the XYZ three-axis directions. Its accuracy is much higher than that of traditional size and form and position error measuring instruments, and it has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability.

[0030] Specifically, the technical innovation and good effects of the present invention are as follows:

[0031] 1) The present invention uses a laser interferometer to detect the relative displacement and relative rotation between the probe and the component to be measured in real time, and compensates the displacement error in real time, so as to achieve ultra-high-precision measurement of the form and position error of the surface of the component to be measured.

[0032] 2) The mirror block and the laser interferometer mounting block of the present invention are made of microcrystalline glass, ensuring that the positions of the laser interferometer and the mirror group are not affected by the main error of ultra-precision instruments - thermal expansion, and can greatly improve the measurement accuracy.

[0033] 3) The mirror block and the angular displacement measuring component proposed by the present invention are easy to transplant and can be installed in existing low-precision form and position error measuring instruments, enabling low-precision form and position error measuring instruments to also have the ability to measure micro-nano-level micro-devices with high precision.

[0034] In the present invention, the probe is combined with the cubic mirror block, and together with the angular displacement measuring component, the relative movement between the probe and the component to be measured is realized through the transverse and longitudinal moving mechanisms and the vertical axis nano drive motor, achieving high measurement accuracy with a simple structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a schematic structural diagram of a form and position error measuring instrument integrating a cubic mirror group and a probe according to the present invention;

[0036] Figure 2 For Figure 1 Figure showing the structure of the mirror block of a form and position error measuring instrument integrating a cubic mirror group and a probe according to the present invention;

[0037] Figure 3 For Figure 1 Figure showing the structure of the angular displacement measuring component of a form and position error measuring instrument integrating a cubic mirror group and a probe according to the present invention;

[0038] Figure 4 Schematic diagram highlighting the vertical driving mechanism of a form and position error measuring instrument integrating a cubic mirror group and a probe according to the present invention;

[0039] Description of component numbers in the figure: 100, main machine base; 200, vertical support column; 300, shaft seat; 400, horizontal and vertical movement mechanism; 410, longitudinal guide rail; 420, horizontal guide rail; 430, horizontal moving block; 500, angular displacement measuring component; 510, horizontal laser interferometer; 520, longitudinal laser interferometer; 530, vertical laser interferometer; 540, laser interferometer mounting block; 550, sample fixing surface; 560, rotating shaft; 600, probe component; 610, mirror block; 611, longitudinal laser reflecting surface; 612, vertical laser reflecting surface; 613, horizontal laser reflecting surface; 620, probe; 700, vertical movement mechanism; 710, vertical shaft; 720, vertical shaft nanomotor; 730, buffer cylinder; 740, cylinder fixing block; 750, vertical connection hole; 760, mounting groove; 770, fixing groove; Detailed implementation manners

[0040] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0041] Embodiment

[0042] The present invention provides a form and position error measuring instrument integrating a cubic mirror group and a probe. Refer to Figures 1-4 , which includes a main machine base 100. Vertical support columns 200 are arranged at intervals on the upper side of the main machine base 100, and a shaft seat 300 is arranged at the top of the two vertical support columns 200;

[0043] A horizontal and vertical movement mechanism 400 is arranged on the upper side of the main machine base 100 and between the two vertical support columns 200, and an angular displacement measuring component 500 is arranged on the upper side of the horizontal and vertical movement mechanism 400;

[0044] A vertical shaft 710 is slidably arranged on the shaft seat 300 in the vertical direction; a vertical shaft nano-motor 720 for controlling the vertical movement of the vertical shaft 710 is arranged on the shaft seat 300, and a buffer cylinder 730 is arranged to compensate for the gravity of the vertical shaft 710.

[0045] On both vertical sides of the vertical shaft 710, fixing grooves 770 are respectively opened at one end close to the probe assembly 600. The buffer cylinder 730 is fixedly installed on the inner wall of the vertical connection hole 750 by a buffer cylinder fixing block 740, and the telescopic end of the buffer cylinder 730 is connected to the inner wall of the fixing groove 770; the probe assembly 600 is arranged on the lower end surface of the vertical shaft 710.

[0046] The angular displacement measurement assembly 500 is composed of a transverse laser interferometer 510, a longitudinal laser interferometer 520, a vertical laser interferometer 530 and a laser interferometer mounting block 540. The vertical laser interferometer 530 is installed at the inner groove of the laser interferometer mounting block 540, and the transverse laser interferometer 510 and the longitudinal laser interferometer 520 are installed on the top surface of the laser interferometer mounting block 540.

[0047] The inner plane of the laser interferometer mounting block 540 is a sample fixed surface 550.

[0048] A rotating shaft 560 is arranged on the sample fixed surface 550, and the measured sample is placed on the upper end of the rotating shaft 560; an angle measuring mechanism for detecting the rotation angle of the rotating shaft 560 is arranged inside the sample fixed surface 550.

[0049] The probe assembly 600 is composed of a mirror block 610 and a probe 620. A vertical laser reflecting surface 612 is arranged on the bottom surface of the mirror block 610, a longitudinal laser reflecting surface 611 is arranged at the rear side of the mirror block 610, and a transverse laser reflecting surface 613 is arranged on the left side of the mirror block 610; the probe 620 is installed inside the relative space of the mirror block 610; the probe assembly 600 is installed inside the relative space of the angular displacement measurement assembly 500.

[0050] The vertical laser reflecting surface 612, the transverse laser reflecting surface 613 and the longitudinal laser reflecting surface 611 are perpendicular to each other.

[0051] Both the mirror block 610 and the laser interferometer mounting block 540 are made of microcrystalline glass.

[0052] The transverse and longitudinal movement mechanism 400 can drive the angular displacement measurement assembly 500 to move in the transverse and longitudinal directions.

[0053] The shaft seat 300 is provided with a vertically penetrating vertical connection hole 750 in the vertical direction, and an installation groove 760 is formed in the inner wall of the vertical connection hole 750; the vertical shaft nano motor 720 is installed in the installation groove 760, and the output shaft of the vertical shaft nano motor 720 moves linearly and can drive the vertical shaft 710 to slide in the vertical direction.

[0054] The probe 620 can be in contact with the sample placed on the angular displacement measurement assembly 500 for measurement.

[0055] Among them, the vertical shaft nano motor 720 mentioned above is a prior art, which can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other drive motors that can achieve linear movement, and is not limited here.

[0056] Among them, the transverse and longitudinal movement mechanism 400 mentioned above is a prior art, which can be the two-dimensional displacement stage in the paper "Design and Control of a Dual-Stage Feed Drive", or other two-dimensional displacement stages that can achieve transverse and longitudinal movement, and is not limited here.

[0057] When the test piece assembled on the rotary shaft 560 moves horizontally or longitudinally, or when the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, yaw angle, and rotation angle. The pitch angle refers to the angular value r generated by the sample fixing seat around the Y axis y , the rotation angle refers to the angular value r generated by the sample fixing seat around the X axis x , the yaw angle refers to the angular value r generated around the Z axis z , where during the measurement process of the instrument, it is necessary to compensate for the three-axis displacement measurement errors caused by the pitch angle, yaw angle, and rotation angle.

[0058] The compensation process is as follows. The transverse and longitudinal movement mechanism 400 is used to control the horizontal and vertical movement of the test sample, and the vertical shaft nano motor 720 is used to control the vertical movement of the vertical shaft 710.

[0059] The horizontal laser interferometer 510 obtains the horizontal axis displacement as x″ and obtains the yaw angle as r z , and obtains the pitch angle as r y ;

[0060] The longitudinal laser interferometer 520 obtains the longitudinal axis displacement as y″ and obtains the rotation angle r x ;

[0061] The vertical laser interferometer 530 is used to obtain the vertical axis displacement as z″;

[0062] The measured pitch angle r y 、yaw angle r z 、rotation angle rx After that, based on the pitch angle, yaw angle, and rotation angle, the lateral axis displacement x″, longitudinal axis displacement y″, and vertical axis displacement z″ are compensated using supplementary formulas to obtain the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′. The supplementary formulas are as follows:

[0063]

[0064] When measuring the workpiece to be measured, in the instrument coordinate system, the angle displacement measurement component 500 is controlled by the lateral and longitudinal movement mechanism 400 to move laterally and longitudinally, and the vertical axis nanomotor 720 controls the vertical axis 710 to move the probe 620 in the vertical direction; when the probe 620 contacts the workpiece to be measured and the feedback of the probe 620 reaches the set threshold, this contact position is the position point to be detected.

[0065] In the coordinate system of the workpiece to be measured, when the probe 620 and the workpiece to be measured move relative to each other, the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ can be obtained. The probe 620 and the workpiece to be measured are continuously moved into contact. When the probe 620 contacts the workpiece to be measured, this contact position is set as the i-th position point to be detected. According to the axial displacements in the lateral, longitudinal, and vertical directions, in the instrument coordinate system, the coordinate values (a i , b i , c i ) of the i-th group of position points to be detected can be obtained, where i = 1,..., N.

[0066] If the rotary shaft 560 is used for measurement, after the rotary shaft 560 drives the workpiece to be measured to rotate by an angle , the probe 620 is moved again to measure the workpiece to be measured. According to the axial displacements in the lateral, longitudinal, and vertical directions, the coordinate values (a2 j , b2 j , c2 j ) of the j-th position point to be detected are measured in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers.

[0067] Since the rotary shaft 560 drives the workpiece to be measured to rotate, when the probe 620 contacts the workpiece to be measured before rotation, this contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, where i = 1,... N; after rotation, when the probe 620 contacts the workpiece to be measured, this contact position is set as the j-th position point to be detected, and this set of new coordinate values (a2 j , b2 j , c2 j), for \(j = N + 1,\cdots,N + K\), the coordinate system also changes. It is necessary to process this new set of coordinate values \((a_2 j , b_2 j , c_2 j ) obtained after rotation through the conversion formula to map them to the same coordinate system, that is, to convert them to the coordinate system of the part to be measured. The processed coordinate values are \((a j , b j , c j ). Among them, the conversion formula is:

[0068]

[0069] The coordinates of several points to be detected \((a j , b j , c j ) and the coordinate values of several points to be detected \((a i , b i , c i ) are combined. Finally, a set of surface coordinates of the part to be measured \((a i , b i , c i ), \(i = 1,\cdots,N + K\) is obtained. As mentioned above, a set of surface coordinates of the part to be measured includes the coordinates of several points to be detected.

[0070] Based on this set of surface coordinates of the part to be measured \((a i , b i , c i ), \(i = 1,\cdots,N + K\), the dimensions and form and position errors of the part to be measured can be quickly evaluated.

[0071] If the rotary shaft 560 is not used, the displacements of each axis \(x'\), \(y'\), \(z'\) can be measured by the transverse laser interferometer 510, the longitudinal laser interferometer 520, and the vertical laser interferometer 530. After the probe determines a qualified contact once, based on the displacements of each axis \(x'\), \(y'\), \(z'\), through error compensation and data processing, the coordinates of a measuring point \((x, y, z)\) on the surface of the part to be measured can be obtained. By measuring several measuring points on the surface of the part to be measured, high-precision measurement of the form and position errors of the part to be measured with a complex shape can be achieved.

[0072] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0073] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0074] The above-described embodiments only express the implementation manners of the present invention, and the description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A form and position error measuring instrument integrating a cubic mirror group and a probe, characterized in that: It includes a main base (100), and vertical support columns (200) are arranged at intervals on the upper side of the main base (100). A shaft seat (300) is arranged at the top of the two vertical support columns (200); A transverse and longitudinal movement mechanism (400) is arranged on the upper side of the main base (100) and between the two vertical support columns (200). An angular displacement measurement component (500) is arranged on the upper side surface of the transverse and longitudinal movement mechanism (400); A vertical shaft (710) is slidably arranged on the shaft seat (300) in the vertical direction; A vertical shaft nano-motor (720) for controlling the vertical movement of the vertical shaft (710) is arranged on the shaft seat (300), and a buffer cylinder (730) is arranged to perform gravity compensation on the vertical shaft (710); On both vertical sides of the vertical shaft (710), fixing grooves (770) are respectively opened at one end close to the probe assembly (600). The buffer cylinder (730) is fixedly installed on the inner wall of the vertical connection hole (750) by a buffer cylinder fixing block (740), and the telescopic end of the buffer cylinder (730) is connected to the inner wall of the fixing groove (770); A probe assembly (600) is arranged on the lower end surface of the vertical shaft (710); The angular displacement measurement component (500) is composed of a transverse laser interferometer (510), a longitudinal laser interferometer (520), a vertical laser interferometer (530) and a laser interferometer mounting block (540). The vertical laser interferometer (530) is installed at the inner groove of the laser interferometer mounting block (540), and the transverse laser interferometer (510) and the longitudinal laser interferometer (520) are installed on the upper top surface of the laser interferometer mounting block (540); The inner plane of the laser interferometer mounting block (540) is a sample fixing surface (550); A rotating shaft (560) is arranged on the sample fixing surface (550). The measured sample is placed on the upper end of the rotating shaft (560); An angle measurement mechanism for detecting the rotation angle of the rotating shaft (560) is arranged inside the sample fixing surface (550); The probe assembly (600) is composed of a mirror block (610) and a probe (620). A vertical laser reflecting surface (612) is arranged on the bottom surface of the mirror block (610), a longitudinal laser reflecting surface (611) is arranged at the rear side of the mirror block (610), and a transverse laser reflecting surface (613) is arranged on the left side of the mirror block (610); The probe (620) is installed inside the relative space of the mirror block (610); The probe assembly (600) is installed inside the relative space of the angular displacement measurement component (500); The vertical laser reflecting surface (612), the transverse laser reflecting surface (613), and the longitudinal laser reflecting surface (611) are mutually orthogonal.

2. The cube-shaped mirror group and probe integrated geometric error measuring instrument according to claim 1, characterized in that: Both the mirror block (610) and the laser interferometer mounting block (540) are made of microcrystalline glass.

3. The cube-shaped mirror group and probe integrated geometric error measuring instrument according to claim 1, characterized in that: The transverse and longitudinal movement mechanism (400) can drive the angular displacement measurement component (500) to move horizontally and longitudinally.

4. The cube-type mirror group and probe integrated geometric error measuring instrument according to claim 1, characterized in that, The shaft seat (300) is provided with a through vertical connection hole (750) in the vertical direction, and an installation groove (760) is formed in the inner wall of the vertical connection hole (750); The vertical shaft nano-motor (720) is installed in the installation groove (760), the output shaft of the vertical shaft nano-motor (720) moves linearly, and can drive the vertical shaft (710) to slide in the vertical direction.

5. The cube-shaped mirror group and probe integrated geometric error measuring instrument according to claim 1, characterized in that: The probe (620) can be in contact with and measure a sample placed on the angular displacement measurement component (500).

6. The geometric error measuring instrument with an integrated cube-shaped mirror group and probe according to claim 1, characterized in that: The transverse and longitudinal movement mechanism (400) controls the angular displacement measurement component (500) to move transversely and longitudinally, and the vertical shaft nano-motor (720) controls the vertical shaft (710) to move the probe (620) in the vertical direction; The lateral laser interferometer (510) obtains a lateral axis displacement of x″ and obtains a yaw angle of r z , and obtains a pitch angle of r y ; The longitudinal laser interferometer (520) obtains a longitudinal axis displacement of y″ and obtains a rotation angle r x ; The vertical laser interferometer (530) is used to obtain the vertical axis displacement as z″; The compensated transverse axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample are calculated according to the supplementary formula; The supplementary formula is:

7. The geometric error measuring instrument with an integrated cube-shaped mirror group and probe according to claim 1, characterized in that: The lateral and longitudinal movement mechanism (400) controls the angular displacement measurement component (500) to move laterally and longitudinally, and the vertical-axis nano motor (720) controls the vertical axis (710) to move the probe (620) in the vertical direction to obtain the coordinates (a i , b i , c i ) of the i-th position point to be detected, where i = 1,..., N; The rotating shaft (560) drives the sample to be measured to rotate by an angle Rotation angle After that, the horizontal and vertical movement mechanism (400) controls the angle displacement measurement component (500) to move horizontally and vertically, and the vertical axis nano-motor (720) controls the vertical axis (710) to move the probe (620) in the vertical direction, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the coordinate system of the device under test through the conversion formula, and obtain the coordinates (a j , b j , c j ); where the conversion formula is: Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the component to be measured (a i , b i , c i ), i = 1, ..., N + K.

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