Precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench

Abstract

The precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench belongs to precision measuring instruments; the machine consists of a main frame base, a support base for the pillar, and a vertical support pillar to form a frame; a transverse air-bearing sleeve with a V-shaped workbench is longitudinally and transversely movably assembled on the main frame base; the ranging laser beams emitted by the longitudinal laser interferometer, the first laser interferometer, and the second laser interferometer orthogonally converge at the probe measuring ball, and through structural design, the first-order measurement error is eliminated; the laser interferometer is used to measure angles and displacements, and while obtaining sub-nanometer measurement accuracy in the three-axis direction, the instrument can compensate for measurement errors in real time; the present invention has the characteristics of simple structure and high measurement accuracy, and can achieve ultra-precise measurement of micro-nano-level micro-devices.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement equipment, and mainly relates to a geometric error measuring instrument for evaluating the form and position errors of micro-devices with machining precision in the micro-nano scale. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Against this background, micro / nano technology aiming at micro-machining, nano-structures and systems has emerged as the times require, and various micro / nano-scale micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, micro-steps, etc.

[0003] When facing the measurement scenarios of micro-nano devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measurement dimensions of traditional coordinate measuring machines cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nano and picometer scales have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro-nano scale devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measurement device that can measure the three-dimensional device dimensions and form and position errors and has a resolution in the micro-nano scale to reliably evaluate micro-nano scale micro-devices with complex shapes.

[0004] The invention patent "Small Micro-Nano Scale Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro-nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component and a probe to design a small micro-nano scale coordinate measuring machine. This micro-nano coordinate measuring machine has a relatively low cost, but it cannot measure the dimensions and form and position errors of parts with complex shapes. Summary of the Invention

[0005] The purpose of the present invention is to address the problems existing in the above-mentioned prior art, and in combination with the actual needs of current measurement and evaluation of micro-nano scale micro-devices with complex shapes, research and design a precision measuring machine with a new structure of an inclined orthogonal laser frame and an integrated V-shaped workbench, so as to not only adapt to and meet the micro-nano scale precision measurement of the dimensions and form and position errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed and high efficiency.

[0006] The purpose of the present invention is achieved as follows: A precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench, characterized in that vertical support columns are respectively installed on the left and right lateral parts of the pillar base, and a shaft seat support is assembled on the vertical support columns;

[0007] On the upper end face of the pillar base, a horizontal air bearing sleeve is fitted so as to be longitudinally and transversely movable. Longitudinal guide rails are symmetrically and fixedly installed on the left and right lateral parts of the pillar base where the horizontal air bearing sleeve is located. Air bearing surfaces are arranged at the contact positions between the bottom and the inner side of the horizontal air bearing sleeve and the longitudinal moving shaft. The horizontal air bearing sleeve is supported and inserted on the longitudinal moving shaft in a reciprocating transverse movement manner, and the longitudinal moving shaft is supported and inserted on the longitudinal guide rails in a reciprocating longitudinal movement manner; A vertical shaft is vertically and movably inserted on the shaft seat, a hanging bracket is installed at the lower end of the vertical shaft, and a probe is installed at the upper end of the hanging bracket;

[0008] A V-shaped workbench is fixedly installed on the horizontal air bearing sleeve by using a support plate. The V-shaped workbench is made of microcrystalline glass. The first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface of the V-shaped workbench are orthogonal to each other in space;

[0009] The probe is located at the relative inner side part of the V-shaped workbench. A first laser interferometer, a second laser interferometer, and a longitudinal laser interferometer are installed on the hanging bracket. The laser light rays generated by the first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer are respectively perpendicular to the three corresponding surfaces of the V-shaped workbench, and the extension lines of the three laser light rays exactly converge at the measuring ball center of the probe;

[0010] On both vertical sides of the vertical shaft, fixing grooves are respectively opened at one end close to the probe. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove;

[0011] A through vertical connection hole is opened in the shaft seat along the vertical direction, and an installation groove is opened on the inner wall of the vertical connection hole;

[0012] The vertical shaft nano motor is installed in the installation groove. The output shaft of the vertical shaft nano motor moves in a straight line and can drive the vertical shaft driving surface to slide in the vertical direction.

[0013] Preferably, the laser light rays emitted by the first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer include multiple laser beams.

[0014] Preferably, the horizontal air bearing sleeve drives the V-shaped workbench to move horizontally and longitudinally, and the vertical movement mechanism controls the vertical movement of the vertical shaft to move the probe;

[0015] The longitudinal laser interferometer obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ;

[0016] The second laser interferometer obtains a displacement of y″ and obtains a rotation angle of r x ;

[0017] The first laser interferometer obtains the vertical axis displacement as z″;

[0018] Calculate the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula;

[0019] The compensation formula is:

[0020]

[0021] Preferably, in the coordinate system of the workpiece to be measured, when measuring the workpiece to be measured, the lateral air bearing sleeve drives the V-shaped workbench to move horizontally and longitudinally, and the vertical moving mechanism controls the vertical axis to move the probe in the vertical direction to obtain the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N;

[0022] The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through the conversion formula (1) to obtain the coordinates (a i , b i , c i ), i = 1,..., N

[0023] The conversion formula (1) is:

[0024] Where: θ = -45°

[0025] The rotary shaft drives the workpiece to be measured to rotate by an angle The rotation angle After that, the lateral air bearing sleeve drives the V-shaped workbench to move horizontally and longitudinally, and the vertical moving mechanism controls the vertical axis to move the probe in the vertical direction to obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers;

[0026] Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula (2) to obtain the coordinates (a j , b j , c j ); where the conversion formula (2) is:

[0027]

[0028] Coordinates of several position points to be detected (a j , b j , c j ) and coordinate values of several position points to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinate sets of the workpiece to be measured (a i , b i , c i ), where i = 1,..., N + K.

[0029] The present invention provides a precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench. The present invention uses a laser interferometer to measure the relative displacement between the probe and the workpiece to be measured, eliminates the Abbe error through structural design, and can obtain sub-nanometer measurement accuracy in the XYZ three-axis directions. Its accuracy is much higher than that of traditional dimensional and geometric error measuring instruments, and it has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability.

[0030] Specifically, the technical innovation and good effects of the present invention are as follows:

[0031] 1) In the measurement structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line. First-order measurement error is eliminated through structural innovation, achieving high measurement accuracy.

[0032] 2) The mirror proposed by the present invention is of an integrated design and is made of zero-expansion microcrystalline glass. The main thermal expansion error influence in ultra-precision measurement is eliminated through structural innovation. At the same time, this structure is easy to assemble and process, effectively improving the measurement accuracy of the whole machine.

[0033] 3) The present invention is designed to use a laser interferometer to detect the relative displacement and relative rotation between the probe and the workpiece to be measured in real time, and calibrate in real time the measurement error caused by the rotation between the probe and the workpiece to be measured, effectively improving the measurement accuracy.

[0034] 4) The laser measurement reference and the probe of the present invention are relatively stationary during the measurement process, dynamically conform to the Abbe principle, effectively eliminate the measurement error caused by the Abbe error in the dynamic measurement of the instrument, effectively reduce the measurement uncertainty of the instrument, and improve the measurement repeatability of the instrument.

[0035] The present invention eliminates Abbe errors in the X, Y, and Z measurement directions, improves measurement accuracy, uses a laser interferometer to measure displacement, and can obtain sub-nanometer measurement accuracy in the XYZ three-axis directions. Its accuracy is much higher than that of traditional coordinate measuring machines, and it has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability. Brief Description of the Drawings

[0036] Figure 1 FIG. is a schematic diagram of the overall structure of a precision measuring machine with an obliquely arranged orthogonal laser frame and an integrated V-shaped workbench according to the present invention;

[0037] Figure 2 FIG. is a schematic diagram of the assembly structure of the probe and the longitudinal, vertical, and horizontal laser interferometers of a precision measuring machine with an obliquely arranged orthogonal laser frame and an integrated V-shaped workbench according to the present invention;

[0038] Figure 3 FIG. is a schematic diagram of the assembly structure of the prominent horizontal and longitudinal movement structures and the V-shaped workbench of a precision measuring machine with an obliquely arranged orthogonal laser frame and an integrated V-shaped workbench according to the present invention;

[0039] Figure 4 FIG. is a schematic diagram of the prominent vertical drive mechanism of a precision measuring machine with an obliquely arranged orthogonal laser frame and an integrated V-shaped workbench according to the present invention;

[0040] Description of the part numbers in the figure: 1-1, shaft seat; 1-2, vertical support column; 1-3, pillar base; 2-1, vertical shaft; 2-2, hanging bracket; 2-3, probe; 2-4, longitudinal laser interferometer; 2-5, first laser interferometer; 2-6, second laser interferometer; 3-1, V-shaped workbench; 3-2, support plate; 3-3, longitudinal movement axis; 3-4, horizontal air bearing bushing; 3-5, longitudinal guide rail; 3-6, rotating shaft; 3-7, first laser reflection surface; 3-8, second laser reflection surface; 3-9, longitudinal laser reflection surface; 4, vertical movement mechanism; 4-1, vertical shaft drive surface; 4-2, vertical shaft nano motor; 4-3, buffer cylinder; 4-4, cylinder fixing block; 4-5, vertical connection hole; 4-6, installation groove; 4-7, fixing groove; Detailed Description of the Invention

[0041] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described below in conjunction with the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

[0042] Embodiment

[0043] The present invention provides a precision measuring machine with an obliquely placed orthogonal laser frame and an integrated V-shaped workbench. Vertical support columns 1-2 are respectively installed on the left and right lateral parts of the pillar base 1-3. The shaft seat 1-1 is supported and assembled on the vertical support column 1-2.

[0044] A horizontal air bearing sleeve 3-4 is movably assembled longitudinally and laterally on the upper end surface of the pillar base 1-3. Longitudinal guide rails 3-5 are symmetrically fixed on the left and right lateral parts of the pillar base 1-3 where the horizontal air bearing sleeve 3-5 is located. Air bearing surfaces are arranged at the contact positions between the bottom and the inner side of the horizontal air bearing sleeve 3-4 and the longitudinal moving shaft 3-3. The horizontal air bearing sleeve 3-4 is supported and inserted into the longitudinal moving shaft 3-3 in a reciprocating lateral movement manner, and the longitudinal moving shaft 3-3 is supported and inserted into the longitudinal guide rails 3-5 in a reciprocating longitudinal movement manner. A vertical shaft 2-1 is inserted into the shaft seat 1-1 in a vertically reciprocating movement manner. A hanging bracket 2-2 is installed at the lower end of the vertical shaft 2-1, and a probe 2-3 is installed at the upper end of the hanging bracket 2-2.

[0045] The V-shaped workbench 3-1 is fixedly installed on the horizontal air bearing sleeve 3-4 by using a support plate 3-2. The V-shaped workbench 3-1 is made of microcrystalline glass. The first laser reflection surface 3-7, the second laser reflection surface 3-8, and the longitudinal laser reflection surface 3-9 of the V-shaped workbench 3-1 are orthogonal to each other in space.

[0046] The probe 2-3 is located at the relative inner side part of the V-shaped workbench 3-1. A first laser interferometer 2-5, a second laser interferometer 2-6, and a longitudinal laser interferometer 2-4 are installed on the hanging bracket 2-2. The laser beams generated by the first laser interferometer 2-5, the second laser interferometer 2-6, and the longitudinal laser interferometer 2-4 are respectively perpendicular to the three corresponding surfaces of the V-shaped workbench 3-1, and the extended lines of the three laser beams intersect exactly at the measuring ball center of the probe 2-3.

[0047] On both vertical sides of the vertical shaft 2-1, fixing grooves 4-7 are respectively opened at one end close to the probe 2-3. The buffer cylinder 4-3 is fixedly installed on the inner wall of the vertical connection hole 4-5 by a cylinder fixing block 4-4, and the telescopic end of the buffer cylinder 4-3 is connected to the inner wall of the fixing groove 4-7.

[0048] The shaft seat 1-1 is provided with a through vertical connection hole 4-5 in the vertical direction, and an installation groove 4-6 is opened on the inner wall of the vertical connection hole 4-5.

[0049] The vertical shaft nano motor 4-2 is installed in the installation groove 4-6. The output shaft of the vertical shaft nano motor 4-2 moves linearly and can drive the vertical shaft driving surface 4-1 to slide in the vertical direction.

[0050] Further, the laser beams emitted by the first laser interferometer 2-5, the second laser interferometer 2-6, and the longitudinal laser interferometer 2-4 include multiple laser beams.

[0051] Further, the transverse air bearing sleeve 3-4 drives the V-shaped workbench 3-1 to move horizontally and longitudinally, and the vertical movement mechanism 4 controls the vertical movement of the vertical shaft 2-1 to move the probe 2-3 in the vertical direction;

[0052] Among them, the vertical shaft nanomotor 4-2 mentioned above is a prior art, which can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other drive motors that can achieve linear movement, and is not limited here.

[0053] When the test piece mounted on the rotating shaft 3-6 moves horizontally or longitudinally, or when the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angular value r generated by the probe assembly around the axis perpendicular to the second laser mirror. y The rotation angle refers to the angular value r generated by the probe assembly around the axis perpendicular to the longitudinal laser mirror. x The yaw angle refers to the angular value r generated by the probe assembly around the axis perpendicular to the first laser mirror. z Among them, during the measurement process of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacement caused by the pitch angle, the yaw angle, and the rotation angle.

[0054] The compensation process is as follows. Through the horizontal and longitudinal movements generated by the transverse air bearing sleeve 3-4 on the longitudinal movement axis 3-3 and the longitudinal guide rail, the test sample fixed on the V-shaped workbench 3-1 generates horizontal and longitudinal movements. The vertical shaft nanomotor 4-2 controls the vertical movement of the vertical shaft 2-1 to move the probe 2-3; the longitudinal laser interferometer 2-4 obtains a displacement of x″ and obtains a yaw angle of r. y Obtain a pitch angle of r. z The second laser interferometer 2-6 obtains a displacement of y″ and obtains a rotation angle r. x The first laser interferometer 2-5 obtains a vertical axis displacement of z″ by obtaining; calculate the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; the compensation formula is:

[0055]

[0056] When measuring the test piece, in the instrument coordinate system, through the lateral and longitudinal movements generated by the lateral air bearing sleeve 3-4 on the longitudinal movement axis 3-3 and the longitudinal guide rail, the test sample fixed on the V-shaped workbench 3-1 generates lateral and longitudinal movements. The vertical axis nano motor 4-2 controls the vertical movement of the vertical axis 2-1 to move the probe 2-3. When the probe 2-3 contacts the test piece, after the feedback of the probe 2-3 reaches the set threshold, this contact position is the position point to be detected.

[0057] In the instrument coordinate system, when the probe 2-3 and the test piece move relative to each other, the probe 2-3 is continuously moved to contact the test piece. When the probe 2-3 contacts the test piece, this contact position is set as the i-th position point to be detected. According to the displacement values compensated by the first laser interferometer 2-5, the second laser interferometer 2-6, and the longitudinal laser interferometer 2-4, in the instrument coordinate system, the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, where i = 1,..., N. The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N, need to be converted to the standard coordinate system through the conversion formula 1 to obtain the coordinates (a i , b i , c i ), where i = 1,..., N.

[0058] The conversion formula (1) is:

[0059] where: θ = -45°.

[0060] If the rotary shaft 3-6 is used for combined measurement, the rotary shaft 3-6 drives the test piece to rotate by an angle Rotation angle After that, the lateral air bearing sleeve 3-4 drives the V-shaped workbench 3-1 to move laterally and longitudinally. The vertical movement mechanism 4 controls the vertical movement of the vertical axis 2-1 to move the probe 2-3. The coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers.

[0061] Since the rotary shaft 3-6 drives the test piece to rotate, when the probe 2-3 contacts the test piece before rotation, this contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i), i = 1, ..., N; After rotation, when the probe 2-3 contacts the sample to be measured, the contact position is set as the j-th position point to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained. The coordinate system where j = N + 1, …, N + K also changes. It is necessary to process this new set of coordinate values (a2 j , b2 j , c2 j ) obtained after rotation through the conversion formula (2), and convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); Among them, the conversion formula (2) is:

[0062]

[0063] A number of coordinates of position points to be detected (a j , b j , c j ) and a number of coordinate values of position points to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinate sets of the workpiece to be measured (a i , b i , c i ), i = 1, ..., N + K.

[0064] If the rotary shaft 3-6 is not used, the displacements of each axis x′, y′, z′ can be measured according to the first laser interferometer 2-5, the second laser interferometer 2-6, and the longitudinal laser interferometer 2-4. After a qualified contact is determined by the probe, based on the displacements of each axis x′, y′, z′, after error compensation and data processing, a measurement point coordinate (x, y, z) on the surface of the workpiece to be measured can be obtained. By measuring a number of measurement points on the surface of the workpiece to be measured, high-precision measurement of the shape and position errors of the workpiece to be measured with a complex shape can be achieved.

[0065] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0066] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0067] The above-described embodiments only represent the implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench, characterized in that: Vertical support columns (1-2) are respectively installed on the left and right lateral parts of the pillar base (1-3), and the shaft seat (1-1) is supported and assembled on the vertical support column (1-2). On the upper end surface of the pillar base (1-3), a horizontal air bearing sleeve (3-4) is assembled so as to be longitudinally and laterally movable. On the left and right lateral parts of the pillar base (1-3) where the horizontal air bearing sleeve (3-4) is located, longitudinal guide rails (3-5) are symmetrically and fixedly installed. Air bearing surfaces are arranged at the contact positions between the bottom and the inner side of the horizontal air bearing sleeve (3-4) and the longitudinal moving shaft (3-3). The horizontal air bearing sleeve (3-4) is supported and inserted on the longitudinal moving shaft (3-3) so as to be reciprocally movable in the lateral direction, and the longitudinal moving shaft (3-3) is supported and inserted on the longitudinal guide rails (3-5) so as to be reciprocally movable in the longitudinal direction. A vertical shaft (2-1) is inserted on the shaft seat (1-1) so as to be vertically movable up and down. A hanging bracket (2-2) is installed at the lower end of the vertical shaft (2-1), and a probe (2-3) is installed at the upper end of the hanging bracket (2-2). A V-shaped workbench (3-1) is fixedly installed on the horizontal air bearing sleeve (3-4) by using a support plate (3-2). The V-shaped workbench (3-1) is made of microcrystalline glass. The first laser reflection surface (3-7), the second laser reflection surface (3-8), and the longitudinal laser reflection surface (3-9) of the V-shaped workbench (3-1) are orthogonal to each other in space. The probe (2-3) is located at the relative inner part of the V-shaped workbench (3-1). A first laser interferometer (2-5), a second laser interferometer (2-6), and a longitudinal laser interferometer (2-4) are installed on the hanging bracket (2-2). The laser beams generated by the first laser interferometer (2-5), the second laser interferometer (2-6), and the longitudinal laser interferometer (2-4) are respectively perpendicular to the three corresponding surfaces of the V-shaped workbench (3-1), and the extended lines of the three laser beams intersect exactly at the measuring ball center of the probe (2-3). On both vertical sides of the vertical shaft (2-1), fixing grooves (4-7) are respectively opened at one end close to the probe (2-3). A buffer cylinder (4-3) is fixedly installed on the inner wall of the vertical connection hole (4-5) by a buffer cylinder fixing block (4-4), and the telescopic end of the buffer cylinder (4-3) is connected to the inner wall of the fixing groove (4-7). The shaft seat (1-1) is provided with a through vertical connection hole (4-5) in the vertical direction, and an installation groove (4-6) is opened on the inner wall of the vertical connection hole (4-5). A vertical shaft nano motor (4-2) is installed in the installation groove (4-6). The output shaft of the vertical shaft nano motor (4-2) moves in a straight line and can drive the vertical shaft driving surface (4-1) to slide in the vertical direction.

2. The precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench according to claim 1, characterized in that: The laser beams emitted by the first laser interferometer (2-5), the second laser interferometer (2-6), and the longitudinal laser interferometer (2-4) include multiple laser beams.

3. The precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench according to claim 1, characterized in that: The horizontal air-bearing sleeve (3-4) drives the V-shaped workbench (3-1) to move horizontally and vertically, and the vertical movement mechanism (4) controls the vertical movement of the vertical shaft (2-1) to move the probe (2-3); The longitudinal laser interferometer (2-4) obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The second laser interferometer (2-6) obtains a displacement y″ and a rotation angle r x ; The first laser interferometer (2-5) obtains the vertical axis displacement as z″; Calculate the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; The compensation formula is:

4. The precision measuring machine with an inclined orthogonal laser frame and an integrated V-shaped workbench according to claim 1, characterized in that: In the coordinate system of the workpiece to be measured, when measuring the workpiece to be measured, the transverse air bearing sleeve (3-4) drives the V-shaped workbench (3-1) to move horizontally and vertically, and the vertical moving mechanism (4) controls the vertical shaft (2-1) to move the probe (2-3) in the vertical direction to obtain the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N; The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1, ..., N, need to be transformed into the standard coordinate system through the transformation formula (1) to obtain the coordinates (a i , b i , c i ), i = 1, ..., N The conversion formula (1) is as follows: Where: θ = -45° The rotating shaft (3-6) drives the sample to be measured to rotate by an angle Rotation angle After that, the horizontal air bearing sleeve (3-4) drives the V-shaped workbench (3-1) to move horizontally and vertically, and the vertical moving mechanism (4) controls the vertical shaft (2-1) to move the probe (2-3) in the vertical direction, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula (2) is: The coordinates of several positions to be detected (a j , b j , c j ) are combined with the coordinate values of several positions to be detected (a i , b i , c i ) to obtain a set of surface coordinates of the part to be measured (a i , b i , c i ), where i = 1, ..., N + K.

Images