Large-stroke high-precision geometric error measuring instrument based on frame-type laser measurement reference

Abstract

The present invention relates to a large-stroke high-precision geometric error measuring instrument based on a frame-type laser measurement reference, belonging to the technical field of precision measurement equipment, and includes a main machine base and vertical support columns. Shaft seats are arranged at the tops of the two vertical support columns; a sample fixing base is arranged on the upper side of the main machine base, and a moving mechanism is arranged on the main machine base; a transverse laser reflector, a longitudinal laser reflector and a vertical laser reflector are arranged on the upper end surface of the sample fixing base; a hanging frame is installed on the lower end surface of the vertical shaft, and a transverse laser interferometer, a longitudinal laser interferometer and a vertical laser interferometer are arranged at the lower end of the hanging frame. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and geometric errors of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to precision measuring instruments, and mainly relates to a measuring instrument for evaluating the dimensional and geometric errors of micro-devices with machining precision in the micro-nano scale. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Micro / nano technologies aimed at microfabrication, nanostructures, and systems have emerged under this background, and various micro / nano-scale micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, and micro-steps.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro-nano devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measured dimensions cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nano and picometer scales have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro-nano devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measurement device that can measure the dimensional and geometric errors of three-dimensional devices and has a resolution in the micro-nano scale to reliably evaluate the shape-complex micro-nano scale micro-devices.

[0004] The invention patent "Small Micro-Nano Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro-nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component, and a probe to design a small micro-nano coordinate measuring machine. This micro-nano coordinate measuring machine has a relatively low cost, but it cannot measure the dimensional and geometric errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ultra-precision geometric error measuring instrument, which can not only adapt to and meet the micro-nano scale precision measurement of the dimensional and geometric errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed, and high efficiency.

[0006] In order to achieve the above-mentioned invention purpose, a technical solution provided by the present invention is as follows:

[0007] A large-stroke high-precision geometric error measuring instrument based on a frame-type laser measurement reference, including a main base. Vertical support columns are arranged on the left and right sides of the main base, and shaft seats are arranged at the tops of the two vertical support columns; an installation space is provided in the left vertical support column to accommodate a probe assembly; a through hole is provided in the main base to allow a vertical laser beam to irradiate onto a vertical laser mirror;

[0008] A transverse and longitudinal movement mechanism is provided above the main seat and between two vertical support columns. The mirror module is fixedly connected to the left end of the longitudinal movement block in the transverse and longitudinal movement mechanism. The longitudinal movement block is sleeved on the longitudinal guide rail in a reciprocating longitudinal movement manner, and the longitudinal guide rail is installed in the transverse guide rail in a reciprocating transverse movement manner.

[0009] A vertical shaft is slidably arranged on the shaft seat in the vertical direction. A vertical shaft nano-motor for controlling the vertical movement of the vertical shaft is arranged on the shaft seat. Fixed slots are respectively opened at one ends of the two vertical sides of the vertical shaft close to the probe assembly. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixed slot. A probe assembly is arranged on the lower end face of the vertical shaft.

[0010] The mirror module is made of a whole piece of microcrystalline glass. The left side of the mirror module is set as a transverse laser mirror, the rear side is set as a longitudinal laser mirror, the bottom surface is set as a vertical laser mirror, and a rotary shaft is assembled inside the mirror module. The end face of the rotary shaft is in the same plane as the sample fixing surface. The vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror are perpendicular to each other.

[0011] The probe assembly is composed of a vertical laser interferometer, a transverse laser interferometer, a longitudinal laser interferometer, a probe, and a hanging bracket. The probe is installed on the hanging bracket, and the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer are fixedly installed on the hanging bracket. The ranging light rays generated by the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer orthogonally converge at the probe tip. The light rays generated by the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer are respectively perpendicular to the vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror.

[0012] The shaft seat is provided with a through vertical connection hole in the vertical direction, and an installation groove is opened on the inner wall of the vertical connection hole. The vertical shaft nano-motor is installed in the installation groove, and the output shaft of the vertical shaft nano-motor moves in a straight line and can drive the vertical shaft to slide in the vertical direction.

[0013] Preferably, the probe can be in contact with the sample placed on the sample fixing surface for measurement.

[0014] Preferably, the laser light rays emitted by the vertical laser interferometer, the transverse laser interferometer, and the longitudinal laser interferometer include multiple laser beams.

[0015] Preferably, the transverse and longitudinal movement mechanism controls the mirror module to move horizontally and longitudinally, and the vertical shaft nano-motor controls the vertical shaft to move the probe in the vertical direction.

[0016] The longitudinal laser interferometer obtains a longitudinal axis displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ;

[0017] The transverse laser interferometer obtains a transverse axis displacement of y″ and a rotation angle of r x ;

[0018] The vertical laser interferometer obtains a vertical axis displacement of z″;

[0019] According to the supplementary formula, calculate the compensated longitudinal axis displacement x′, transverse axis displacement y′, and vertical axis displacement z′ of the measured sample;

[0020] The supplementary formula is:

[0021]

[0022] Preferably, the transverse and longitudinal moving mechanism controls the mirror module to move horizontally and longitudinally, and the vertical axis nano-motor controls the vertical axis to move the probe vertically to obtain the coordinates (a i , b i , c i ) of the i-th position point to be detected, i = 1,..., N;

[0023] The rotating shaft drives the sample to be measured to rotate by an angle Rotation angle After that, the transverse and longitudinal moving mechanism controls the mirror module to move horizontally and longitudinally, and the vertical axis nano-motor controls the vertical axis to move the probe vertically to obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers;

[0024] Convert the surface coordinates (a2 j , b2 j , c2 j ) into the coordinate system of the measured part through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula is:

[0025]

[0026] The coordinates (a j , b j , c j ) of several position points to be detected and the coordinate values (a i , bi , c i ) combined to obtain a set of surface coordinate sets (a i , b i , c i ), where i = 1,..., N + K.

[0027] The structural design of the present invention conforms to the Abbe principle, with small measurement errors. At the same time, a laser interferometer is used to measure displacement and angle, achieving sub-nanometer measurement accuracy in the horizontal, vertical, and longitudinal directions. And the displacement error is compensated in real time through the angle, and its accuracy is much higher than that of traditional dimensional and geometric error measurement instruments. It has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability.

[0028] Specifically, the technical innovation and good effects of the present invention are as follows:

[0029] 1) The structural design of the present invention conforms to the Abbe principle in the horizontal, vertical, and longitudinal directions. First-order measurement errors are eliminated through the structural design, achieving high measurement accuracy.

[0030] 2) The present invention proposes a frame-type orthogonal laser measurement reference, which can monitor the six-degree-of-freedom motion structure of the probe and the workpiece to be measured. It can accurately measure the relative displacement and deflection angle between the probe and the workpiece to be measured in the three-axis directions, realize real-time compensation of measurement errors, and ensure high measurement accuracy of the measuring instrument.

[0031] 3) The probe assembly and mirror module proposed by the present invention are easy to transplant and can be installed in existing low-precision geometric error measuring instruments, enabling low-precision geometric error measuring instruments to also have the ability to measure micro-nano-scale micro-devices with high precision.

[0032] 4) A frame-type orthogonal laser measurement reference proposed by the present invention places the Z-axis at the bottom of the moving seat, which can effectively expand and increase the measurement range. The displacement and angle are detected by a laser interferometer. The structure of this frame-type orthogonal laser measurement reference enables the present invention to have both high precision and large stroke.

[0033] The structure of the present invention is unique and reasonable, and its accuracy is much higher than that of traditional dimensional and geometric error measurement instruments. It can have both high measurement accuracy and large stroke in a relatively small volume. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a schematic structural diagram of a large-stroke and high-precision geometric error measuring instrument based on a frame-type laser measurement reference according to the present invention;

[0035] Figure 2 is a schematic diagram of the structure and relative spatial position of the mirror module and probe assembly of a large-stroke and high-precision geometric error measuring instrument based on a frame-type laser measurement reference according to the present invention;

[0036] Figure 3 Schematic diagram of the main frame structure of a large-stroke and high-precision form and position error measuring instrument based on a frame-type laser measurement reference according to the present invention;

[0037] Figure 4 Schematic diagram of a large-stroke and high-precision form and position error measuring instrument based on a frame-type laser measurement reference according to the present invention, highlighting the vertical drive mechanism;

[0038] Description of component numbers in the figure:

[0039] 100, main frame; 200, vertical support column; 300, shaft seat; 400, transverse and longitudinal movement mechanism; 410, longitudinal movement block; 420, longitudinal guide rail; 430, transverse guide rail; 500, mirror module; 510, vertical laser mirror; 520, transverse laser mirror; 530, longitudinal laser mirror; 540, sample fixing surface; 550, rotating shaft; 600, probe assembly; 610, vertical laser interferometer; 620, transverse laser interferometer; 630, longitudinal laser interferometer; 640, probe; 650, hanging bracket; 700, vertical movement mechanism; 710, vertical shaft; 720, vertical shaft nano motor; 730, buffer cylinder; 740, cylinder fixing block; 750, vertical connection hole; 760, installation groove; 770, fixing groove; Detailed implementation mode

[0040] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0041] Embodiment

[0042] The present invention provides a large-stroke and high-precision form and position error measuring instrument based on a frame-type laser measurement reference. Refer to Figures 1-4 , which includes a main frame 100. Vertical support columns 200 are arranged on the left and right sides of the main frame 100. Shaft seats 300 are arranged at the tops of the two vertical support columns 200; an installation space is provided in the left vertical support column 200 to accommodate the probe assembly 600; a through hole is provided in the main frame 100 so that the laser beam emitted by the vertical laser interferometer 610 can pass through the main frame 100 and irradiate onto the vertical laser mirror 510;

[0043] A transverse and longitudinal movement mechanism 400 is provided above the main seat 100 and between two vertical support columns 200. The mirror module 500 is fixedly connected to the left end of the longitudinal movement block 410 in the transverse and longitudinal movement mechanism 400. The longitudinal movement block 410 is sleeved on the longitudinal guide rail 420 in a longitudinally reciprocating manner, and the longitudinal guide rail 420 is installed in the transverse guide rail 430 in a laterally reciprocating manner.

[0044] A vertical shaft 710 is slidably arranged on the shaft seat 300 in the vertical direction. A vertical shaft nano-motor 720 for controlling the vertical movement of the vertical shaft 710 is provided on the shaft seat 300. Fixing grooves 770 are respectively opened at one ends of the two vertical sides of the vertical shaft 710 close to the probe assembly 600. The buffer cylinder 730 is fixedly installed on the inner wall of the vertical connection hole 750 by a cylinder fixing block 740, and the telescopic end of the buffer cylinder 730 is connected to the inner wall of the fixing groove 770. The probe assembly 600 is arranged on the lower end surface of the vertical shaft 710.

[0045] The mirror module 500 is made of a whole piece of microcrystalline glass. The left side surface of the mirror module 500 is set as a transverse laser mirror 520, the rear side surface is set as a longitudinal laser mirror 530, the bottom surface is set as a vertical laser mirror 510, and the rotary shaft 550 is fitted inside the mirror module 500. The end surface 550 of the rotary shaft is in the same plane as the sample fixing surface 540. The vertical laser mirror 510, the transverse laser mirror 520, and the longitudinal laser mirror 530 are perpendicular to each other.

[0046] The probe assembly 600 is composed of a vertical laser interferometer 610, a transverse laser interferometer 620, a longitudinal laser interferometer 630, a probe 640, and a hanging bracket 650. The probe 640 is installed on the hanging bracket 600, and the vertical laser interferometer 610, the transverse laser interferometer 620, and the longitudinal laser interferometer 630 are fixedly installed on the hanging bracket 650. The ranging light rays generated by the vertical laser interferometer 610, the transverse laser interferometer 620, and the longitudinal laser interferometer 630 orthogonally converge at the probe head of the probe 640. The light rays generated by the vertical laser interferometer 610, the transverse laser interferometer 620, and the longitudinal laser interferometer 630 are respectively perpendicular to the vertical laser mirror 510, the transverse laser mirror 520, and the longitudinal laser mirror 530.

[0047] The shaft seat 300 is provided with a through vertical connection hole 750 in the vertical direction, and an installation groove 760 is opened on the inner wall of the vertical connection hole 750. The vertical shaft nano-motor 720 is installed in the installation groove 760, and the output shaft of the vertical shaft nano-motor 710 moves linearly and can drive the vertical shaft 600 to slide in the vertical direction.

[0048] Further, the probe 640 can be in contact with the sample placed on the sample fixing surface 540 for contact measurement.

[0049] Further, the laser beams emitted by the vertical laser interferometer 610, the lateral laser interferometer 620, and the longitudinal laser interferometer 630 include multiple laser beams.

[0050] Among them, the vertical-axis nano motor 720 mentioned above is a prior art, which can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other driving motors that can achieve linear movement, and is not limited herein.

[0051] Among them, the lateral and longitudinal movement mechanism 400 mentioned above is a prior art, which can be the two-dimensional displacement stage in the paper "Research on the Control of H-Type Motion Platform Driven by Dual Linear Motors", or other two-dimensional displacement platforms that can achieve lateral and longitudinal movement, and is not limited herein.

[0052] When the workpiece to be measured mounted on the rotary shaft 550 moves laterally or longitudinally, or when the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angular value r generated by the mirror module around the Y-axis y , and the rotation angle refers to the angular value r generated by the mirror module around the X-axis x , and the yaw angle refers to the angular value r generated by the mirror module around the Z-axis z . During the measurement process of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacements caused by the pitch angle, the yaw angle, and the rotation angle.

[0053] The compensation process is as follows. The lateral and longitudinal movement mechanism 400 controls the mirror module 500 to move laterally and longitudinally, and the vertical-axis nano motor 720 controls the vertical shaft 710 to move the probe 640 in the vertical direction; the longitudinal laser interferometer 630 obtains the longitudinal-axis displacement as x″ and obtains the yaw angle as r y , and obtains the pitch angle as r z ; the lateral laser interferometer 620 obtains the lateral-axis displacement as y″ and obtains the rotation angle r x ; the vertical laser interferometer 610 obtains the vertical-axis displacement as z″;

[0054] Calculate the compensated longitudinal-axis displacement χ′, lateral-axis displacement y′, and vertical-axis displacement z′ of the measured sample according to the compensation formula;

[0055] The compensation formula is:

[0056]

[0057] When measuring the workpiece to be measured, in the instrument coordinate system, the mirror module 500 is controlled by the transverse and longitudinal movement mechanism 400 to move transversely and longitudinally, and the vertical axis nano-motor 720 controls the vertical axis 710 to move the probe 640 in the vertical direction; when the probe 640 contacts the workpiece to be measured and the feedback of the probe 640 reaches the set threshold, the contact position is the position point to be detected.

[0058] In the coordinate system of the workpiece to be measured, when the probe 640 and the workpiece to be measured move relative to each other, the compensated longitudinal axis displacement x′, transverse axis displacement y′, and vertical axis displacement z′ can be obtained. Continuously move the probe 640 to contact the workpiece to be measured. When the probe 640 contacts the workpiece to be measured, the contact position is set as the i-th position point to be detected. According to the axial displacements in the transverse, longitudinal, and vertical directions, in the instrument coordinate system, the coordinate values (a i , b i , c i ) of the i-th group of position points to be detected can be obtained, where i = 1,..., N.

[0059] If the rotary shaft 550 is used for cooperative measurement, after the rotary shaft 550 drives the workpiece to be measured to rotate by an angle , the probe 640 is moved again to measure the workpiece to be measured. According to the axial displacements in the transverse, longitudinal, and vertical directions, the coordinate values (a2 j , b2 j , c2 j ) of the j-th position point to be detected are measured in the instrument coordinate system, where j = N + 1,…, N + K, and N and K are integers.

[0060] Since the rotary shaft 550 drives the workpiece to be measured to rotate, when the probe 640 contacts the workpiece to be measured before rotation, the contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, where i = 1,..., N; after rotation, when the probe 640 contacts the workpiece to be measured, the contact position is set as the j-th position point to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained. The coordinate system where j = N + 1,…, N + K has also changed. The new set of coordinate values (a2 j , b2 j , c2 j ) obtained after rotation, where j = N + 1,…, N + K, need to be processed through the conversion formula to map the two to the same coordinate system, that is, transformed to the coordinate system of the workpiece to be measured. The processed coordinate values are (a j , b j , c j ). The conversion formula is as follows:

[0061]

[0062] Coordinates of several position points to be detected (a j , b j , c j ) and coordinate values of several position points to be detected (a i , b i , c i ) are combined to finally obtain a set of surface coordinates of the workpiece to be measured (a i , b i , c i ), where i = 1,..., N + K. Among the above, a set of surface coordinates of the workpiece to be measured includes the coordinates of several position points to be detected.

[0063] Based on this set of surface coordinates of the workpiece to be measured (a i , b i , c i ), where i = 1,..., N + K, the dimensions and form and position errors of the workpiece to be measured can be quickly evaluated.

[0064] If the rotary shaft 550 is not used, the longitudinal axis displacement x′, the transverse axis displacement y′, and the vertical axis displacement z′ are measured by the longitudinal laser interferometer 630, the transverse laser interferometer 620, and the vertical laser interferometer 610. After a qualified contact is determined by the probe once, based on the axis displacements x′, y′, and z′, through error compensation and data processing, a measurement point coordinate (x, y, z) on the surface of the workpiece to be measured can be obtained. By measuring several measurement points on the surface of the workpiece to be measured, high-precision measurement of the form and position errors of the workpiece to be measured with a complex shape can be achieved.

[0065] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0066] In the description of the present invention, it should be noted that, unless otherwise clearly specified and defined, the terms "installed", "connected", and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium; it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0067] The above-described embodiments merely represent the implementation manners of the present invention, and the description thereof is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the appended claims.

Claims

1. A large-stroke high-precision geometric error measuring instrument based on a frame-type laser measurement reference, characterized in that: It includes a main base (100), vertical support columns (200) are arranged on the left and right sides of the main base (100), and a shaft seat (300) is arranged at the top of the two vertical support columns (200); an installation space is provided in the left vertical support column (200) to accommodate a probe assembly (600); a through hole is provided in the main base (100). A transverse and longitudinal movement mechanism (400) is arranged above the main base (100) and between the two vertical support columns (200), and a mirror module (500) is fixedly connected to the left end of a longitudinal movement block (410) in the transverse and longitudinal movement mechanism (400); the longitudinal movement block (410) is sleeved on a longitudinal guide rail (420) that can move reciprocally in the longitudinal direction, and the longitudinal guide rail (420) is installed in a transverse guide rail (430) that can move reciprocally in the transverse direction. A vertical shaft (710) is slidably arranged on the shaft seat (300) in the vertical direction; a vertical shaft nano-motor (720) for controlling the vertical movement of the vertical shaft (710) is arranged on the shaft seat (300); fixing grooves (770) are respectively provided at one ends of the vertical shaft (710) close to the probe assembly (600) on both vertical sides; a buffer cylinder (730) is fixedly installed on the inner wall of the vertical connection hole (750) by a cylinder fixing block (740), and the telescopic end of the buffer cylinder (730) is connected to the inner wall of the fixing groove (770); a probe assembly (600) is arranged on the lower end face of the vertical shaft (710). The mirror module (500) is made of a single piece of microcrystalline glass. The left side of the mirror module (500) is set as a transverse laser mirror (520), the rear side is set as a longitudinal laser mirror (530), the bottom surface is set as a vertical laser mirror (510), a rotation shaft (550) is assembled inside the mirror module (500), and the end face of the rotation shaft (550) is in the same plane as the sample fixing surface (540); the vertical laser mirror (510), the transverse laser mirror (520), and the longitudinal laser mirror (530) are perpendicular to each other. The probe assembly (600) is composed of a vertical laser interferometer (610), a transverse laser interferometer (620), a longitudinal laser interferometer (630), a probe (640), and a hanging bracket (650). The probe (640) is installed on the hanging bracket (650), and the vertical laser interferometer (610), the transverse laser interferometer (620), and the longitudinal laser interferometer (630) are fixedly installed on the hanging bracket (650); the ranging light rays generated by the vertical laser interferometer (610), the transverse laser interferometer (620), and the longitudinal laser interferometer (630) orthogonally converge at the probe head of the probe (640); the light rays generated by the vertical laser interferometer (610), the transverse laser interferometer (620), and the longitudinal laser interferometer (630) are respectively perpendicular to the vertical laser mirror (510), the transverse laser mirror (520), and the longitudinal laser mirror (530). The shaft seat (300) is provided with a vertically penetrating vertical connection hole (750) in the vertical direction, and an installation groove (760) is formed on the inner wall of the vertical connection hole (750); the vertical-axis nano motor (720) is installed in the installation groove (760), the output shaft of the vertical-axis nano motor (720) moves linearly, and can drive the vertical shaft (710) to slide in the vertical direction.

2. The large-stroke high-precision geometric error measuring instrument based on a frame-type laser measurement reference according to claim 1, characterized in that: The probe (640) can be in contact with the sample placed on the sample fixed surface (540) for measurement.

3. The large-stroke high-precision geometric error measuring instrument based on a frame-type laser measurement reference according to claim 1, characterized in that: The laser light rays emitted by the vertical laser interferometer (610), the horizontal laser interferometer (620), and the longitudinal laser interferometer (630) include multiple laser beams.

4. The large-stroke high-precision form and position error measuring instrument based on a frame-type laser measurement reference according to claim 1, characterized in that: The horizontal and longitudinal movement mechanism (400) controls the mirror module (500) to move horizontally and longitudinally, and the vertical-axis nano motor (720) controls the vertical shaft (710) to move the probe (640) in the vertical direction; The longitudinal laser interferometer (630) obtains a longitudinal axis displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The lateral laser interferometer (620) obtains a lateral axis displacement of y″ and obtains a rotation angle r x ; The vertical-axis displacement z″ is obtained through the vertical laser interferometer (610); The compensated horizontal-axis displacement x′, longitudinal-axis displacement y′, and vertical-axis displacement z′ of the measured sample are calculated according to the supplementary formula; The supplementary formula is:

5. The large-stroke high-precision form and position error measuring instrument based on a frame-type laser measurement reference according to claim 1, characterized in that: The horizontal and vertical movement mechanism (400) controls the mirror module (500) to move horizontally and vertically, and the vertical-axis nano motor (720) controls the vertical axis (710) to move the probe (640) in the vertical direction to obtain the coordinates (a i , b i , c i ) of the i-th position point to be detected, where i = 1,..., N; The rotating shaft (550) drives the sample to be measured to rotate by an angle Rotation angle After that, the transverse and longitudinal movement mechanism (400) controls the mirror module (500) to move transversely and longitudinally, and the vertical axis nano-motor (720) controls the vertical axis (710) to move the probe (640) in the vertical direction, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the coordinate system of the device under test through the conversion formula, and obtain the coordinates (a j , b j , c j ); among them, the conversion formula is: Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the component to be measured (a i , b i , c i ), where i = 1,..., N + K.

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