Probe equipment workbench, probe equipment, control method and probe testing method

Abstract

This application relates to the field of semiconductor device testing technology, specifically to a probe device's worktable, probe device, control method, and probe testing method. A longitudinal guide rail is mounted on a base, and a receiving assembly slides vertically with the longitudinal guide rail. One end of a tension spring is fixed to the receiving assembly, and the other end is fixed to the base. A cam is located between the base and the receiving assembly in the vertical direction. The top end of a push rod is fixed to the receiving assembly, and the bottom end of the push rod slides with the edge of the cam. A motor is fixedly connected to the cam. The intersection of the edges of two adjacent eccentric portions is located on the edge of the base circle. The purpose of this application is to address at least one technical problem described in the background art by providing a probe device's worktable, probe device, control method, and probe testing method.

Description

Technical Field

[0001] This application relates to the field of semiconductor device testing technology, and more specifically, to a probe device stage, probe device, control method, and probe testing method. Background Technology

[0002] Probe equipment is mainly used for electrical performance testing of semiconductor chips / devices. This testing is a core and critical process to ensure the proper functioning of semiconductor devices. By ensuring good and stable contact between the chip / device and the probes of the testing instrument, accurate measurements of various electrical performance parameters are achieved.

[0003] Traditional probe testing equipment uses a motor-driven eccentric cam as the lifting mechanism on its worktable. This mechanism moves the chip / device, placed on a support platform, vertically, allowing for contact and separation between the chip / device and the probe. During operation, the motor drives the cam to its highest point, where it contacts the support platform, resulting in chip / device contact with the probe. Separation occurs when the highest point contacts the platform, and the chip / device reaches its zero-return position when the lowest point contacts the platform. However, because the eccentric cam structure lacks a stable low point, the chip / device's zero-return position is inaccurate. It cannot precisely return to its set origin position, causing repeated zero-return attempts in the Z-axis direction or preventing the device from performing zero-return operations altogether, thus reducing the efficiency of automated testing. Summary of the Invention

[0004] The purpose of this application is to provide a probe device worktable, probe device, control method and probe testing method to address at least one of the technical problems described in the background art.

[0005] To achieve the above objectives, this application adopts the following technical solution:

[0006] One aspect of this application provides a worktable for a probe device, including a base, a longitudinal guide rail, a receiving assembly, and a lifting assembly. The longitudinal guide rail is mounted on the base, and the receiving assembly is slidably engaged with the longitudinal guide rail in the vertical direction. The lifting assembly includes a push rod, a motor, a cam, and a tension spring. In the vertical direction, one end of the tension spring is fixed to the receiving assembly, and the other end is fixed to the base. In the vertical direction, the cam is located between the base and the receiving assembly. The top end of the push rod is fixed to the receiving assembly, and the bottom end of the push rod is slidably engaged with the edge of the cam. The motor is fixedly connected to the cam.

[0007] The cam includes a base circle portion and a plurality of eccentric portions connected to the base circle portion. Each eccentric portion is evenly distributed in the circumferential direction of the base circle portion. The edge of each eccentric portion is arc-shaped, and the intersection of the edges of two adjacent eccentric portions is located on the edge of the base circle portion.

[0008] Optionally, the receiving assembly includes a receiving turntable and a slider. The top rod and the receiving turntable are both mounted on the slider. The receiving turntable is horizontally arranged, and the slider slides in the vertical direction with the longitudinal guide rail.

[0009] Optionally, the receiving assembly further includes a rotation drive mounted on the slider, and the receiving turntable is mounted on the slider via the rotation drive.

[0010] Optionally, the bottom end of the top rod is an arc-shaped end or a pointed end.

[0011] Optional, includes two tension springs.

[0012] Another aspect of this application provides a probe device, including the worktable of the probe device provided in this application.

[0013] Optionally, the system includes a main platform, a slide support platform, a microscope module, a loading / unloading module, a testing module, and a worktable. The microscope module is mounted on the main platform, the worktable is located below the main platform, and the slide support platform is disposed on the worktable. In the vertical direction, the microscope module, the slide support platform, and the worktable are arranged sequentially from top to bottom. In the horizontal direction, the loading / unloading module is fixed to the side of the worktable, and the testing module is used to contact the test item.

[0014] Another aspect of this application provides a method for controlling the stage of a probe device, comprising:

[0015] The motor in the stage of the control probe device is operated so that the cam drives the receiving assembly to move in the vertical direction.

[0016] Another aspect of this application provides a probe testing method, comprising:

[0017] Determine whether the current preset test program has been completed. If not, control the worktable in the probe device to move in the horizontal plane in the horizontal direction based on the test program, and control the cam to drive the test item in the receiving platform on the receiving assembly to move in the vertical direction, so that the test item contacts the probe and performs probe testing, or so that the test item and the probe are separated after the probe testing is completed.

[0018] Optionally, before determining whether the currently preset test program has been completed, the method further includes:

[0019] The slide support platform, microscope module, testing module, and worktable in the probe device are initialized and configured.

[0020] The robotic arm is controlled to grab the test item from the loading and unloading module of the probe device and place it on the support platform;

[0021] The worktable and the microscope module are controlled to move so that the image of the test item acquired after the microscope is focused is displayed on the display. The worktable is controlled to move according to the image of the test item on the display until the first test point of the test item is determined and a trial test is performed to obtain the probe test process parameters, and the test program corresponding to the probe test process parameters is started.

[0022] The technical solution provided in this application can achieve the following beneficial effects:

[0023] The probe device, probe equipment, control method, and probe testing method provided in this application embodiment involve placing the probe equipment's support platform on top of the receiving assembly, placing the test item on the support platform, starting the motor, and driving the cam. As the cam rotates, the bottom end of the push rod slides relative to the outer edge of the cam, alternately passing through the high and low points on the cam. When the bottom end of the push rod contacts the high point of the cam, the position of the test item rises to its highest point and contacts the probe. When the bottom end of the push rod leaves the high point of the cam, the test item separates from the probe. When the push rod contacts the low point of the cam, the position of the test item drops to its lowest point, and the position of the test item returns to zero in the vertical direction. Since the low point is the common intersection of the edges of two adjacent eccentric parts and the edges of the base circle, and there is a unique low point between two adjacent eccentric parts, the low point is a precise and stable position on the edge of the cam. This makes the accuracy of the test item's position returning to zero in the vertical direction higher, and it is less likely to have repeated zeroing and / or failure to return to zero between two adjacent high points, thus improving the efficiency of automatic testing.

[0024] The additional technical features and advantages of this application will become more apparent from the following description or from practical application. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the specific embodiments of this application, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 A partial perspective structural schematic diagram of the worktable of the probe device provided in an embodiment of this application;

[0027] Figure 2 This is a schematic diagram of a structural embodiment of the cam and push rod cooperation provided in this application.

[0028] Figure 3 A three-dimensional structural schematic diagram of one embodiment of the probe device provided in this application;

[0029] Figure 4 A flowchart illustrating the control method for the worktable of the probe device provided in this application embodiment;

[0030] Figure 5 This is a schematic flowchart of the probe testing method provided in an embodiment of this application.

[0031] Figure label:

[0032] 01-Receiving turntable; 02-Longitudinal guide rail;

[0033] 03-Motor; 04-Base;

[0034] 05-Cam; 06-Tension spring;

[0035] 07-Slider; 08-Eccentric part;

[0036] 09 - Base circle; 10 - Top rod;

[0037] 11 - Low point; 12 - High point;

[0038] 13 - Base circle; 14 - Circumference;

[0039] 15-Microscope module; 16-Main platform;

[0040] 17-Slab receiving platform; 18-Workbench;

[0041] 19-Loading / unloading module; 20-Display. Detailed Implementation

[0042] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0044] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0045] like Figures 1 to 3 As shown, one aspect of this application provides a worktable 18 for a probe device, including a base 04, a longitudinal guide rail 02, a receiving assembly, and a lifting assembly. The longitudinal guide rail 02 is mounted on the base 04, and the receiving assembly slides in the vertical direction with the longitudinal guide rail 02. The lifting assembly includes a push rod 10, a motor 03, a cam 05, and a tension spring 06. In the vertical direction, one end of the tension spring 06 is fixed to the receiving assembly, and the other end is fixed to the base 04. In the vertical direction, the cam 05 is located between the base 04 and the receiving assembly. The top end of the push rod 10 is fixed to the receiving assembly, and the bottom end of the push rod 10 slides in the edge of the cam 05. The motor 03 is fixedly connected to the cam 05.

[0046] The cam 05 includes a base circle portion 09 and a plurality of eccentric portions 08 connected to the base circle portion 09. Each eccentric portion 08 is evenly distributed in the circumferential direction of the base circle portion 09. The edge of each eccentric portion 08 is arc-shaped, and the intersection of the edges of two adjacent eccentric portions 08 is located on the edge of the base circle portion 09.

[0047] Understandably, each eccentric part 08 has the same shape and size; the base circle part 09 is the part of the cam 05 including the base circle 13 and the part within the base circle 13, while the eccentric part 08 is the part outside the base circle 13.

[0048] In this embodiment, the number of eccentric parts 08 can be 3-5. In this embodiment, it is preferred to set 3 eccentric parts 08. The corresponding cam 05 has three low points 11 and three high points 12. The low point 11 is located at the edge of the base circle 09, and the low point 11 is the intersection of the edges of two adjacent eccentric parts 08. The high point 12 is the point farthest from the center of the base circle 09 on the edge of the eccentric part 08. Each high point 12 is located on the circumference 14 of the same circle. When the cam 05 has a certain thickness in the direction perpendicular to the plane of the base circle 13, both the low point 11 and the high point 12 can be represented as lines perpendicular to the plane of the base circle 13.

[0049] In this embodiment of the application, the worktable 18 of the probe device is used by placing the plate-bearing platform of the probe device on top of the receiving assembly. The test item is placed on the plate-bearing platform, and the motor 03 is started. The motor 03 drives the cam 05. As the cam 05 rotates, the bottom end of the push rod 10 slides relative to the outer edge of the cam 05, alternately passing through the high point 12 and the low point 11 on the cam 05. When the bottom end of the push rod 10 contacts the high point 12 of the cam 05, the position of the test item rises to its highest point and contacts the probe. The bottom end of the push rod 10 leaves the high point 12 of the cam 05, and the test item separates from the probe. When the push rod 10 contacts the low point 11 of the cam 05, the position of the test item is lowered to the lowest point, and the position of the test item returns to zero in the vertical direction. Since the low point 11 is the common intersection of the edges of the two adjacent eccentric parts 08 and the edge of the base circle part 09, and there is a unique low point 11 between the two adjacent eccentric parts 08, the low point 11 is a precise and stable position on the edge of the cam 05, which makes the position of the test item return to zero more accurately in the vertical direction. It is less likely to have repeated zeroing and / or failure to return to zero between the two adjacent high points 12, thus improving the efficiency of automatic testing.

[0050] Furthermore, some traditional probe equipment's worktable 18 employs a guide rail and lead screw lifting mechanism. Due to the backlash in the lead screw, the Z-axis motion accuracy is low, and the manufacturing cost of the mechanism is high. This guide rail and lead screw lifting mechanism is characterized by Z-axis guidance of the guide rail, with the motor 03 driving the support platform up and down via forward and reverse connection to the lead screw, thereby achieving contact and separation between the chip / device and the probe. Since Z-axis motion directly affects the reliability and accuracy of the test, the accuracy requirement is relatively high, and the error must be limited to an acceptable range. To further improve motion accuracy, one must reduce the machining error of the lead screw and improve the control accuracy of the motor 03, which inadvertently increases the manufacturing cost of the mechanism by a significant margin. However, the probe equipment's worktable 18 used in this application replaces the guide rail and lead screw lifting mechanism with a cam 05 mechanism, thus avoiding the problems of backlash in the lead screw, low Z-axis motion accuracy, and high manufacturing cost.

[0051] Optionally, the receiving assembly includes a receiving turntable 01 and a slider 07. The top rod 10 and the receiving turntable 01 are both mounted on the slider 07. The receiving turntable 01 is horizontally arranged, and the slider 07 slides in conjunction with the longitudinal guide rail 02 in the vertical direction.

[0052] Optionally, the receiving assembly further includes a rotation drive unit mounted on the slider 07, and the receiving turntable 01 is mounted on the slider 07 via the rotation drive unit.

[0053] Optionally, the bottom end of the push rod 10 is an arc-shaped end or a pointed end. This allows the bottom end of the push rod 10 to fit well with the edge of the cam 05.

[0054] Optionally, the stage 18 of the probe device provided in this embodiment includes two tension springs 06. The two tension springs 06 provide sufficient tension to drive the resetting movement of the receiving assembly.

[0055] Another aspect of this application provides a probe device, including the stage 18 of the probe device provided in the embodiments of this application.

[0056] The probe device provided in this embodiment uses the worktable 18 of the probe device provided in this embodiment. In use, the plate-bearing platform 17 of the probe device is set on top of the receiving assembly. The test item is placed on the plate-bearing platform 17, and the motor 03 is started. The motor 03 drives the cam 05. As the cam 05 rotates, the bottom end of the push rod 10 slides relative to the outer edge of the cam 05, alternately passing through the high point 12 and the low point 11 on the cam 05. When the bottom end of the push rod 10 contacts the high point 12 of the cam 05, the position of the test item rises to the highest point and contacts the probe. The bottom end of the push rod 10 then leaves the high point of the cam 05. 12. When the test item separates from the probe and the push rod 10 contacts the low point 11 of the cam 05, the position of the test item is lowered to the lowest point, and the position of the test item returns to zero in the vertical direction. Since the low point 11 is the common intersection of the edges of the two adjacent eccentric parts 08 and the edge of the base circle part 09, and there is a unique low point 11 between the two adjacent eccentric parts 08, the low point 11 is a precise and stable position on the edge of the cam 05, which makes the position of the test item return to zero in the vertical direction more accurate. It is less likely to have repeated zeroing and / or failure to return to zero between the two adjacent high points 12, thus improving the efficiency of automatic testing.

[0057] Optionally, the probe device provided in this application embodiment includes a main platform 16, a slide support platform 17, a microscope module 15, a loading / unloading module 19, a testing module, and a worktable 18. The microscope module 15 is installed on the main platform 16, the worktable 18 is located below the main platform 16, and the slide support platform 17 is disposed on the worktable 18. In the vertical direction, the microscope module 15, the slide support platform 17, and the worktable 18 are arranged sequentially from top to bottom. In the horizontal direction, the loading / unloading module 19 is fixed to the side of the worktable 18. The testing module is used to contact the test item. In this application embodiment, the probe device also preferably includes a display 20. The testing process of the probe device provided in this application embodiment is as follows: (1) The test item is placed in the loading / unloading module 19, the device is started, each motion mechanism returns to zero, indicating that the zeroing is normal and testing is possible. (2) The robotic arm picks up the test item and places it on the slide support platform 17. The worktable 18 and the microscope module 15 move, the microscope is focused, and the test item can be clearly seen on the display 20. (3) The workbench 18 moves to find the first test point and aligns the test item. (4) The probe process parameters are determined through trial testing, the test process parameters are retrieved, and the test program is started. (5) The test item is moved up and down by the cam 05 to complete one test; the test module can be used to complete the detection of the test item. (6) After the test is completed, the robot arm picks up the tested chip / device and puts it into the loading / unloading module 19.

[0058] like Figure 4 and Figure 5 As shown, a third aspect of this application provides a control method for the stage of a probe device, which specifically includes the following:

[0059] The motor in the stage of the probe device provided in the foregoing embodiment is controlled to operate so that the cam drives the receiving assembly to move in the vertical direction.

[0060] Specifically, because the cam is designed with three high points and three precise and stable low points, the Z-axis (vertical) lifting mechanism achieves higher zero-return accuracy. See also Figure 4 The control process for the probe device's stage is as follows:

[0061] (1) The cam rotates one revolution clockwise (counterclockwise);

[0062] (2) Read the Z-axis height change and period of the grating;

[0063] (3) The software records the data;

[0064] (4) Initial trial of the Z-axis lifting mechanism;

[0065] (5) The cam rotates and rises in the Z direction to the high point position recorded by the software;

[0066] (6) Testing;

[0067] (7) The cam rotates and descends in the Z direction to the low point position recorded by the software that is adjacent to the previous high point;

[0068] (8) The worktable moves in the XY direction (horizontal plane in the horizontal direction);

[0069] (9) Repeat process (5) to process (8) until all test points are completed.

[0070] Based on the embodiments of the control method for the worktable of the aforementioned probe device and / or the embodiments of the aforementioned probe device, this application also provides a probe testing method, which can be implemented by a controller or processor. The controller or processor is at least communicatively connected to the slide platform, microscope module, testing module, and motor in the worktable of the probe device to control the movement or operation of each component. In addition, to further improve the automation level of the probe testing method, this application may also provide a robotic arm, which is communicatively connected to the controller or processor to move according to the instructions of the controller or processor.

[0071] Based on this, the probe testing method provided in this application specifically includes the following:

[0072] Step 1: Determine whether the current preset test program is completed. If not, control the worktable in the probe device to move in the horizontal plane in the horizontal direction based on the test program, and control the cam to drive the test item in the receiving platform on the receiving assembly to move in the vertical direction, so that the test item contacts the probe and performs probe testing, or so that the test item and the probe are separated after the probe test is completed.

[0073] Furthermore, prior to step 1, the probe testing method provided in this application embodiment may also include the following:

[0074] Step 01: Initialize the slide platform, microscope module, testing module and worktable in the probe device.

[0075] Step 02: Control the robotic arm to grab the test item from the loading and unloading module of the probe device and place it on the support platform.

[0076] Step 03: Control the movement of the worktable and the microscope module so that the image of the test item acquired after the microscope is focused is displayed on the display; control the movement of the worktable according to the image of the test item on the display until the first test point of the test item is determined and a trial test is performed to obtain the probe test process parameters, and start the test program corresponding to the probe test process parameters.

[0077] Specifically, see Figure 5 The probe testing method is as follows:

[0078] (1) Place the object to be tested (i.e., the aforementioned test items, such as chips) into the loading and unloading module. The equipment starts, and each motion mechanism returns to zero. A message indicates that the zero return is normal and testing is possible.

[0079] (2) The robotic arm picks up the object to be tested and places it on the stage module. The worktable and microscope module move, the microscope in the microscope module focuses, and the object to be tested can be clearly seen on the display.

[0080] (3) Move the workbench to find the first measurement point and align the object to be measured.

[0081] (4) Determine the probe process parameters through trial testing, retrieve the test process parameters, and start the test program.

[0082] (5) The test object is moved up and down by the multi-contact cam lifting mechanism (i.e., the aforementioned lifting component) to complete one test; the test module can be used to detect the test object.

[0083] (6) After the test is completed, the tested object (such as chip / device) is picked up by a robotic arm and placed into the loading and unloading module.

[0084] It is understandable that the Z-axis lifting and lowering of the automatic probe station platform is one of the key processes in automatic testing. The ability to quickly and accurately return to zero in the Z-axis direction significantly impacts the efficiency of automatic testing. Furthermore, during automatic testing, the probe station primarily utilizes a Z-axis lifting mechanism to achieve contact and separation between the chip / device and the probes connected to the test instrument. The quality of contact between the test object and the probe directly affects the accuracy of the test data. The accuracy and efficiency of the Z-axis lifting directly determine the quality of contact and testing efficiency. This application's automatic probe station mainly employs a multi-contact cam Z-axis lifting mechanism to achieve the vertical movement of the platform. This mechanism primarily uses a motor directly connected to the multi-contact cam. The motor rotates clockwise or counterclockwise, driving the platform along the Z-axis guide rail. When the cam rotates to its highest position, the test object and probe on the platform contact each other, enabling electrical performance testing of the test object. As the cam continues to rotate to the adjacent lowest position, the test object and probe separate, and the platform moves in the X or Y direction, moving to the next test point. The cam then rotates to its highest point, and the test object and probe contact each other again, achieving the detection of the test point. This process is repeated until all test points on the object under test have been detected. The multi-contact cam mechanism eliminates the backlash error of the traditional lead screw and guide mechanism, and avoids the poor zero-return accuracy of the traditional cam Z-axis lifting mechanism, which often results in repeated zero-returning or failure to perform zero-returning operation. This application features high Z-axis motion accuracy and reliable zero-returning. At the same time, the multi-contact cam mechanism has rotational symmetry characteristics, with the rotation center coinciding with the mechanism's center of gravity, eliminating force imbalance during movement and greatly increasing the reliability of the mechanism.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. The worktable of a probe device, characterized in that, The device includes a base, a longitudinal guide rail, a receiving assembly, and a lifting assembly. The longitudinal guide rail is mounted on the base. The receiving assembly slides vertically with the longitudinal guide rail. The lifting assembly includes a push rod, a motor, a cam, and a tension spring. One end of the tension spring is fixed to the receiving assembly and the other end is fixed to the base. The cam is located between the base and the receiving assembly. The top end of the push rod is fixed to the receiving assembly, and the bottom end of the push rod slides with the edge of the cam. The motor is fixedly connected to the cam. The cam includes a base circle portion and a plurality of eccentric portions connected to the base circle portion. Each eccentric portion is evenly distributed in the circumferential direction of the base circle portion. The edge of each eccentric portion is arc-shaped, and the intersection of the edges of two adjacent eccentric portions is located on the edge of the base circle portion.

2. The worktable of the probe device according to claim 1, characterized in that, The receiving assembly includes a receiving turntable and a slider. The top rod and the receiving turntable are both mounted on the slider. The receiving turntable is horizontally positioned, and the slider slides in the vertical direction with the longitudinal guide rail.

3. The worktable of the probe device according to claim 2, characterized in that, The receiving assembly further includes a rotation drive unit mounted on the slider, and the receiving turntable is mounted on the slider via the rotation drive unit.

4. The worktable of the probe device according to claim 1, characterized in that, The bottom end of the top rod is either arc-shaped or pointed.

5. The worktable of the probe device according to any one of claims 1-4, characterized in that, It includes two tension springs.

6. A probe device, characterized in that, The stage of the probe device as described in any one of claims 1-5.

7. The probe device according to claim 6, characterized in that, The device includes a main platform, a slide-supporting platform, a microscope module, a loading / unloading module, a testing module, and a worktable. The microscope module is mounted on the main platform, and the worktable is located below the main platform. The slide-supporting platform is disposed on the worktable. Vertically, the microscope module, the slide-supporting platform, and the worktable are arranged sequentially from top to bottom. Horizontally, the loading / unloading module is fixed to the side of the worktable. The testing module includes a probe on the worktable and a display connected to the microscope module for contacting and displaying the test item.

8. A method for controlling the stage of a probe device, characterized in that, include: Control the operation of the motor in the stage of the probe device as described in any one of claims 1 to 5, so that the cam drives the receiving assembly to move in the vertical direction.

9. A probe testing method, characterized in that, include: Determine whether the current preset test program has been completed. If not, control the worktable in the probe device as described in claim 7 to move in the horizontal plane in the horizontal direction based on the test program, and control the cam to drive the test item in the support platform on the receiving assembly to move in the vertical direction, so that the test item contacts the probe and performs probe testing, or so that the test item and the probe are separated after the probe testing is completed.

10. The probe testing method according to claim 9, characterized in that, Before determining whether the currently preset test program has been completed, the method further includes: The slide support platform, microscope module, testing module, and worktable in the probe device are initialized and configured. The robotic arm is controlled to grab the test item from the loading and unloading module of the probe device and place it on the support platform; The worktable and the microscope module are controlled to move so that the image of the test item acquired after the microscope is focused is displayed on the display. The worktable is controlled to move according to the image of the test item on the display until the first test point of the test item is determined and a trial test is performed to obtain the probe test process parameters, and the test program corresponding to the probe test process parameters is started.

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