actuator

Abstract

The present invention relates to an actuator. The actuator has a flexible electrode and a base electrode, the flexible electrode has flexibility, an opposite surface of the base electrode facing the flexible electrode is covered by an insulating layer, and the actuator is configured such that, when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms to approach the opposite surface. The actuator comprises a constraining member constraining the flexible electrode on the base electrode. The flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode. The deformed portion deforms in a direction approaching the opposite surface with the constraining member acting as a support point.

Description

TECHNICAL FIELD

[0001] The present application relates to an actuator. BACKGROUND

[0002] A soft actuator that performs mechanical work using deformation of a member having flexibility as a power is known (for example, Japanese Patent No. 5714200). SUMMARY

[0003] Although Japanese Patent No. 5714200 discloses deformation of a dielectric elastomer held between a pair of electrodes, there is still room for refinement as to how to use the deformation to output work of the actuator.

[0004] The present application is designed in view of the above problem, and an object of the present application is to provide an actuator capable of realizing various actions by giving a specific output form of work of the actuator.

[0005] To solve the above problem, the actuator of the present application is an actuator having a flexible electrode and a base electrode, the flexible electrode having flexibility, an opposite surface of the base electrode facing the flexible electrode being covered with an insulating layer, and the actuator being configured such that, when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms to approach the opposite surface. The actuator includes a constraining member that constrains the flexible electrode on the base electrode. The flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode. The deformed portion deforms in a direction approaching the opposite surface with the constraining member serving as a support point.

[0006] With this configuration, the actuator can output its work by displacing a portion of the flexible electrode other than the deformed portion, another member of the actuator, or a target when the deformed portion of the flexible electrode deforms, or by using a space generated when the deformed portion deforms. The actuator can realize various actions such as a jumping action, a throwing action, a collecting, storing, and discharging action, a capturing and releasing action, a tightening and loosening action, and a pump action that cannot be realized by a conventional soft actuator. Therefore, the present application can provide an actuator capable of realizing various actions by giving a specific output form of work thereof.

[0007] As a more preferable aspect: the opposing surface of the base electrode has a recessed surface portion recessed in a direction apart from the flexible electrode; the flexible electrode has a flat plate portion facing the recessed surface portion in a state of being stretched; the constraint member constrains the flexible electrode on the base electrode by fixing edges of the flat plate portion and edges of the recessed surface portion to each other; the flat plate portion has a deformed portion; when a voltage is applied, the deformed portion of the flat plate portion deforms in a direction approaching the recessed surface portion with the constraint member acting as a support point; when the application of the voltage is stopped, the deformed portion deforms in a direction apart from the recessed surface portion beyond the constraint member with the constraint member acting as a support point.

[0008] An actuator having this aspect can press a surface on which the actuator is placed with deformation of the deformed portion of the flat plate portion. This actuator can realize a self-jumping action. Thus, by giving a specific output form of work done thereby, the actuator can realize an action such as a jumping action that a conventional soft actuator cannot realize.

[0009] As a more preferable aspect: the base electrode has a tube portion closed at one end and open at the other end; an outer side surface of the tube portion is the opposing surface of the base electrode; the constraint member is provided outside the outer side surface of the tube portion in a radial direction intersecting an axial direction of the tube portion, constrains deformation of the flexible electrode in the radial direction, and supports the flexible electrode so as to be slidable in the axial direction; the flexible electrode has a body portion supported by the constraint member to face the outer side surface in a state of being inclined with respect to the outer side surface, and a skirt portion continuous with the body portion and extending beyond the other end from the constraint member in the axial direction while expanding outside the constraint member in the radial direction; the body portion has a deformed portion; when a voltage is applied, the deformed portion of the body portion deforms in a direction approaching the outer side surface along the radial direction with the constraint member acting as a support point, so as to pull the skirt portion in the axial direction from the other end toward the one end; when the body portion pulls the skirt portion, a leading end of the skirt portion is displaced toward an inner side in the radial direction with the constraint member acting as a support point.

[0010] An actuator having this aspect can convert deformation of the deformed portion of the body portion into displacement of the leading end of the skirt portion toward the inner side in the radial direction, and reduce an occupied area of the skirt portion with the displacement. This actuator can realize an action of scraping and collecting a target with the skirt portion. Thus, by giving a specific output form of work done thereby, such an actuator can realize an action such as a collecting action that a conventional soft actuator cannot realize.

[0011] As a more preferable aspect: the opposing surface of the base electrode has a recessed surface portion recessed in a direction of separation from the flexible electrode; the flexible electrode has an end surface facing the recessed surface portion and another end surface located on a side opposite to the end surface; a plurality of rod-like members are mounted on the another end surface of the flexible electrode; the front ends of the respective rod-like members are disposed at intervals along the another end surface; the constraining member constrains the flexible electrode on the base electrode by fixing the edge of the end surface and the edge of the recessed surface portion to each other; the end surface has a deformed portion; when a voltage is applied, the deformed portion of the end surface deforms in a direction close to the recessed surface portion with the constraining member serving as a support point; when the end surface deforms, the another end surface deforms in a direction close to the recessed surface portion; when the another end surface deforms, the front ends of the respective rod-like members are displaced in a direction of decreasing intervals.

[0012] The actuator having this aspect can convert the deformation of the deformed portion of the end surface into the displacement of the front ends of the respective rod-like members, and utilize the displacement to decrease the intervals between the front ends. The actuator can achieve an action of capturing a target. Thus, by giving a specific output form of work thereof, the actuator can achieve an action such as a capturing action that a conventional soft actuator cannot achieve.

[0013] As a more preferable aspect: the flexible electrode has an inner peripheral surface and an outer peripheral surface, the inner peripheral surface surrounds an outer periphery of a shaft with a gap left between the inner peripheral surface and the shaft in a radial direction intersecting the shaft, the outer peripheral surface is disposed outside the inner peripheral surface in the radial direction; the base electrode is disposed to face the outer peripheral surface in the radial direction; the opposing surface of the base electrode has a recessed surface portion recessed in a direction of separation from the outer peripheral surface; the constraining member constrains the flexible electrode on the base electrode by fixing the edge of the outer peripheral surface and the edge of the recessed surface portion to each other; the outer peripheral surface has a deformed portion; when a voltage is applied, the deformed portion of the outer peripheral surface deforms in a direction close to the recessed surface portion along the radial direction with the constraining member serving as a support point; when the outer peripheral surface deforms, the inner peripheral surface is displaced in a direction close to the recessed surface portion along the radial direction to increase the gap.

[0014] The actuator having this aspect can convert the deformation of the deformed portion of the outer peripheral surface into the displacement of the inner peripheral surface, and utilize the displacement to increase the gap between the inner peripheral surface and the shaft. The actuator can achieve an action of loosening a target that is tightened. Thus, by giving a specific output form of work thereof, the actuator can achieve an action such as a loosening action that a conventional soft actuator cannot achieve.

[0015] As a more preferable aspect: the opposing surface of the base electrode has a recessed surface portion recessed in a direction apart from the flexible electrode; the flexible electrode has a flow path wall covering the recessed surface portion with a gap left between the flow path wall and the recessed surface portion so as to form a flow path in the gap; the constraining member constrains the flexible electrode on the base electrode by fixing edges of the flow path wall and edges of the recessed surface portion to each other; the flow path wall has a deformed portion; when a voltage is applied, the deformed portion of the flow path wall deforms in a direction approaching the recessed surface portion with the constraining member serving as a support point to reduce the gap.

[0016] An actuator having this aspect can reduce the gap between the flow path wall and the recessed surface portion using deformation of the deformed portion of the flow path wall, thereby reducing the volume of the flow path. The actuator can achieve an action of expelling a target from within the flow path. Thus, by giving a specific output form of work, the actuator can achieve an action such as an expelling action that a conventional soft actuator cannot achieve.

[0017] The present application can provide an actuator capable of achieving various actions by giving a specific output form of work of the actuator. BRIEF DESCRIPTION OF DRAWINGS

[0018] Features, advantages, and technical and industrial significance of exemplary embodiments of the present application will be described below with reference to the accompanying drawings, wherein like numerals denote like elements, and wherein:

[0019] Figure 1 is a view schematically showing a configuration of an actuator of Embodiment 1;

[0020] Figure 2 is a view showing a state after Figure 1 the voltage is applied between the flexible electrode and the base electrode shown;

[0021] Figure 3 is a view showing a state where the voltage is stopped being applied after the state shown in Figure 2 ;

[0022] Figure 4 is a view of another example of the base electrode shown in Figure 1 ;

[0023] Figure 5 is a view schematically showing a configuration of an actuator of Embodiment 2;

[0024] Figure 6 is a view showing a state where voltage application between the flexible electrode and the base electrode shown in Figure 5 is stopped;

[0025] Figure 7This is a view schematically illustrating the configuration of the actuator in Embodiment 3;

[0026] Figure 8 It is shown in Figure 7 A view of the actuator with a voltage applied between the flexible electrode and the base electrode;

[0027] Figure 9 It is shown in Figure 8 A view of the actuator after a reverse voltage is applied, as shown in the diagram;

[0028] Figure 10 It is shown in Figure 9 A view of the actuator after the applied voltage is stopped, as shown in the diagram;

[0029] Figure 11 yes Figure 7 A view of another example of the actuator shown;

[0030] Figure 12 It is shown in Figure 11 A view of the actuator with a voltage applied between the flexible electrode and the base electrode;

[0031] Figure 13 This is a view schematically illustrating the configuration of the actuator in Embodiment 4;

[0032] Figure 14 It is shown in Figure 13 A view of the actuator with a voltage applied between the flexible electrode and the base electrode;

[0033] Figure 15 yes Figure 13 A view of another example of the actuator shown;

[0034] Figure 16 yes Figure 13 A view of another example of the drive circuit shown;

[0035] Figure 17 This is a view schematically illustrating the configuration of the actuator in Embodiment 5;

[0036] Figure 18 It is shown in Figure 17 A view of the actuator with a voltage applied between the flexible electrode and the base electrode;

[0037] Figure 19 This is a view schematically illustrating the configuration of the actuator in Embodiment 6; and

[0038] Figure 20 It is shown in Figure 19 A view of the actuator with a voltage applied between the flexible electrode and the base electrode. DETAILED DESCRIPTION

[0039] Embodiments of the present application will be described below with reference to the drawings. Unless otherwise mentioned, components denoted by the same reference numerals in each embodiment have similar functions in each embodiment, and thus will not be described repeatedly.

[0040] Embodiment 1

[0041] A use Figures 1 to 4 The actuator 1 of Embodiment 1 will be described.

[0042] Figure 1 is a view schematically showing the configuration of the actuator 1 of Embodiment 1.

[0043] The actuator 1 is a soft actuator that performs mechanical work using deformation of a flexible electrode 10 having flexibility as a motive force. Unlike a conventional soft actuator that uses deformation of an electro-elastic body held between a pair of electrodes as a motive force, the actuator 1 deforms the flexible electrode 10 itself. The actuator 1 can be applied to various types of actuators for various types of industrial machines, robots, and the like.

[0044] The actuator 1 of Embodiment 1 has the flexible electrode 10 placed on a surface P1 outside the actuator 1 to be in contact with the surface P1 (see Figure 2 ). The actuator 1 of Embodiment 1 deforms the flexible electrode 10 to approach an opposite surface 21 of the base electrode 20 facing the flexible electrode 10 by a Coulomb force generated when a voltage is applied between the two electrodes of the flexible electrode 10 and the base electrode 20. Thereafter, the actuator 1 stops the application of the voltage between the flexible electrode and the base electrode to restore the flexible electrode 10 (see Figure 3 ). Thus, the actuator 1 can realize a motion of jumping on the surface P1. A target against which work is output by the actuator 1 of Embodiment 1 is the surface P1 on which the actuator 1 is placed.

[0045] The actuator 1 includes the flexible electrode 10 having flexibility and the base electrode 20 to which a voltage is applied to generate a Coulomb force for deforming the flexible electrode 10. The actuator 1 further includes a constraint member 40 that constrains the flexible electrode 10 on the base electrode 20.

[0046] The flexible electrode 10 has a portion in a predetermined direction that is constrained by the constraint member 40, and a deformed portion 10a that deforms when a voltage is applied between the two electrodes of the flexible electrode 10 and the base electrode 20. When a voltage is applied between these electrodes, the deformed portion 10a deforms in a direction approaching the opposite surface 21 of the base electrode 20 with the constraint member 40 serving as a support point.

[0047] The flexible electrode 10 is formed of a conductor having flexibility. The flexibility of the flexible electrode 10 causes the flexible electrode 10 to be deformed by the action of a Coulomb force generated when a voltage is applied between the flexible electrode 10 and the base electrode 20, and to return to its original shape (a shape before deformation, i.e., a shape before the voltage is applied) when the application of the voltage is stopped.

[0048] The flexible electrode 10 can be formed using a conductive rubber, a conductive gel, or the like. Examples of such a conductive rubber include an elastomer molded together with a conductive material mixed therein. Examples of such a conductive material include fine powders of carbon black, acetylene black, and carbon nanotubes, fine powders of metals of silver and copper, and fine powders of a conductor having a core-shell structure obtained by sputtering an insulator such as silica or alumina with a metal. Examples of a conductive gel include a functional gel material obtained by holding a solvent such as water or a humectant, an electrolyte, an additive, or the like in a three-dimensional polymer matrix. An example of such a functional gel material includes ST-gel(R) of Sekisui Kasei Co., Ltd. Alternatively, the flexible electrode 10 can be formed of a leaf spring or the like formed using a metal material so as to be able to elastically deform.

[0049] The flexible electrode 10 is formed in a circular or polygonal plate shape. In the present embodiment, the flexible electrode 10 is formed in a circular plate shape. The flexible electrode 10 has a flat plate portion 12 facing a recessed surface portion 27 to be described later of the rear surface of the base electrode 20. The flat plate portion 12 is fixed by a constraint member 40 so as to face the recessed surface portion 27 in a state of being tensioned in a direction along the flat plate portion 12. The state of tensioning the flat plate portion 12 is a state of pulling the flat plate portion 12 in a direction along the flat plate portion 12 so as not to sag under its own weight.

[0050] The flat plate portion 12 has an edge 12a and a main portion 12b that is a portion other than the edge 12a of the flat plate portion 12. The edge 12a of the flat plate portion 12 is fixed to an edge 27a of the recessed surface portion 27 by the constraint member 40. By being fixed by the constraint member 40, the edge 12a of the flat plate portion 12 is constrained from deforming in a direction along the flat plate portion 12 and in a direction intersecting the flat plate portion 12. The direction intersecting the flat plate portion 12 includes a direction approaching the recessed surface portion 27 of the opposing surface 21 of the base electrode 20 and a direction separating from the recessed surface portion 27 of the opposing surface 21 of the base electrode 20.

[0051] The main portion 12b of the flat plate portion 12 is a portion of the flat plate portion 12 that is not fixed by the constraint member 40. The main portion 12b of the flat plate portion 12 is not deformed in a direction approaching the recessed surface portion 27 and a direction separating from the recessed surface portion 27. The main portion 12b of the flat plate portion 12 is a deformed portion 10a of the flexible electrode 10. When a voltage is applied between the flexible electrode 10 and the base electrode 20, the main portion 12b of the flat plate portion 12 is deformed in a direction approaching the recessed surface portion 27 with the constraint member 40 serving as a support point. When the application of the voltage is stopped, the main portion 12b of the flat plate portion 12 as the deformed portion 10a is deformed in a direction separating from the recessed surface portion 27 beyond the constraint member 40 with the constraint member 40 serving as a support point.

[0052] The base electrode 20 is formed of a conductor having rigidity. Examples of a material used to form the base electrode 20 include metal materials such as iron, copper, and aluminum. Alternatively, the base electrode 20 can be formed by covering a surface of a substrate formed of a non-metal material having heat resistance, rigidity, and insulating properties such as ceramic with a conductive metal film or the like. The surface of the substrate covered with the metal film is a surface facing the flexible electrode 10.

[0053] The opposite surface 21 of the base electrode 20 facing the flexible electrode 10 is covered with an insulating layer 22. The insulating layer 22 is formed using a ferroelectric substance composed of ceramic, thereby reliably maintaining electric charges accumulated in the base electrode 20 due to the application of a voltage between the base electrode 20 and the flexible electrode 10. In particular, the insulating layer 22 is formed using a ferroelectric substance having a perovskite structure. Examples of the ferroelectric substance having a perovskite structure include barium titanate (BaTiO3), lead titanate (PbTiO3), lead zirconate titanate (Pb(Zr,Ti)O3), lead lanthanum zirconate titanate ((Pb,La)(Zr,Ti)O3), strontium titanate (SrTiO3), barium strontium titanate ((Ba,Sr)TiO3), and potassium sodium niobate ((Nak)NbO3). Barium titanate can contain a substance such as CaZrO3 or BaSnO3 as a solid solution.

[0054] Preferably, the material used to form the insulating layer 22 is a material having a high dielectric constant enabling the generation of a Coulomb force to deform the flexible electrode 10. By employing ceramic (fine ceramic), the dielectric constant of the insulating layer 22 can be, for example, 1000 or more. The dielectric constant of barium titanate is approximately 1000 to 10000. The dielectric constant of lead zirconate titanate is 500 to 5000. The dielectric constant of strontium titanate is 200 to 500. These ferroelectric substances having a perovskite structure are materials having a high dielectric constant.

[0055] The base electrode 20 is formed in a columnar shape or a polygonal columnar shape. From the viewpoint of weight reduction, the base electrode 20 can be formed to have a hollow structure. In the present embodiment, the base electrode 20 is formed in a columnar shape. A bottom surface on one side of the base electrode 20 is an opposite surface 21 facing the flexible electrode 10. The opposite surface 21 of the base electrode 20 has a recessed surface portion 27 recessed in a direction separating from the flexible electrode 10. The recessed surface portion 27 is formed at a position facing the flat plate portion 12 of the flexible electrode 10. The recessed surface portion 27 is formed in a shape corresponding to the shape of the flat plate portion 12 of the flexible electrode 10. In the present embodiment, the recessed surface portion 27 can be formed by a curved surface such as a semispherical surface. A space 24 is formed between the recessed surface portion 27 and the flat plate portion 12, that is, between the base electrode 20 and the flexible electrode 10. The space 24 is a space for receiving the flexible electrode 10, which deforms to approach the opposite surface 21 of the base electrode 20 when a voltage is applied between the flexible electrode 10 and the base electrode 20.

[0056] The constraint member 40 constrains the flexible electrode 10 on the base electrode 20 by fixing the edge 12a of the flat plate portion 12 of the flexible electrode 10 and the edge 27a of the recessed surface portion 27 of the base electrode 20 to each other. The constraint member 40 supports the edge 12a of the flat plate portion 12 as a fixed end. The constraint member 40 is formed of an insulator. The constraint member 40 can be formed by a fixing member such as a bracket or a joint, a fastener such as a screw, an adhesive, or the like.

[0057] The actuator 1 is connected to a drive circuit 60, which drives the actuator 1 by applying a voltage between the flexible electrode 10 and the base electrode 20.

[0058] The drive circuit 60 includes a power supply 61 formed of a direct-current voltage source or the like, wiring 62 connecting components of the drive circuit 60 to the flexible electrode 10 and the base electrode 20, switches 63a to 64b formed of semiconductor devices or the like, and a control unit 65 formed of an integrated circuit or the like.

[0059] The flexible electrode 10 is connected to one of the positive and negative electrodes of the power supply 61 and to a frame ground (or ground) through the wiring 62. The base electrode 20 is connected to the other of the positive and negative electrodes of the power supply 61 and to the frame ground through the wiring 62. The switch 63a is connected between the flexible electrode 10 and the power supply 61. The switch 63b is connected between the flexible electrode 10 and the frame ground. The switch 64a is connected between the base electrode 20 and the power supply 61. The switch 64b is connected between the base electrode 20 and the frame ground.

[0060] The control unit 65 is a circuit that controls the components of the drive circuit 60. The control unit 65 switches between application and stop of application of a voltage between the flexible electrode 10 and the base electrode 20 by controlling ON and OFF states of the switches 63a to 64b. The control unit 65 can control the magnitude of the voltage to be applied by controlling the magnitude of the output voltage of the power supply 61. Thus, the control unit 65 can control the magnitude of the Coulomb force acting on the flexible electrode 10, thereby controlling the amount of deformation of the flexible electrode 10. Further, the control unit 65 can control the speed of deformation of the flexible electrode 10 by controlling the speed of switching between application and stop of application of a voltage. Further, the control unit 65 can control the timing of deformation of the flexible electrode 10 by controlling the timing of switching between application and stop of application of a voltage.

[0061] Figure 2 is a view of the actuator 1 in a case where a voltage is applied between the flexible electrode 10 and the base electrode 20 as shown in Figure 1 Figure 3 is a view of the actuator 1 in a case where the application of a voltage is stopped after the case shown in Figure 2

[0062] As shown in Figure 2 , the control unit 65 of the drive circuit 60 controls the switches 63a, 64a to be in an ON state and controls the switches 63b, 64b to be in an OFF state. Then, a voltage is applied between the flexible electrode 10 and the base electrode 20. In this case, the flexible electrode 10 connected to the positive electrode of the power supply 61 has a positive charge, and the base electrode 20 connected to the negative electrode of the power supply 61 has a negative charge. The insulating layer 22 covering the opposing surface 21 of the base electrode 20 undergoes dielectric polarization. In the insulating layer 22, a portion near the interface with the opposing surface 21 has a positive charge, and a portion near the surface on the side opposite to the interface (on the side of the space 24) has a negative charge. A Coulomb force is generated between the insulating layer 22 and the flexible electrode 10. Due to this Coulomb force, the flexible electrode 10 is attracted to the insulating layer 22. Specifically, due to the Coulomb force, the flat plate portion 12 of the flexible electrode 10 is deformed to approach the concave surface portion 27 of the opposing surface 21 of the base electrode 20. The main portion 12b of the flat plate portion 12, which is the deformed portion 10a, is deformed in a direction approaching the concave surface portion 27 with the constraint member 40 serving as a support point.

[0063] After the case shown in Figure 2 , as shown in Figure 3 ​​As shown, the control unit 65 of the drive circuit 60 controls the switches 63b, 64b to be in the on state, and controls the switches 63a, 64a to be in the off state. Then, the application of the voltage between the flexible electrode 10 and the base electrode 20 is stopped. In this case, the electric charge accumulated between the flexible electrode 10 and the base electrode 20 is discharged to the frame ground. Due to the restoring force of the flexible electrode 10, the flexible electrode 10 is deformed to separate from the opposing surface 21 of the base electrode 20. Specifically, due to the restoring force, the flat plate portion 12 of the flexible electrode 10 is deformed so as to separate from the recessed surface portion 27 of the opposing surface 21 of the base electrode 20. Here, the flat plate portion 12 is in a state of being fixed to the surface Pl on which the actuator 1 is placed, before the application of the voltage. Figure 1 As shown in the initial stage, the flat plate portion 12 is fixed in a state of being stretched as described above. Therefore, in the initial stage, the flat plate portion 12 is in a state of being in contact with the recessed surface portion 27 of the opposing surface 21 of the base electrode 20. Figure 3 As shown in the case, the flat plate portion 12 is deformed so as to separate from the recessed surface portion 27. Figure 1 As shown in the initial stage, the flat plate portion 12 is fixed in a state of being stretched as described above. Therefore, in the initial stage, the flat plate portion 12 is in a state of being in contact with the recessed surface portion 27 of the opposing surface 21 of the base electrode 20.

[0064] Therefore, the actuator 1 can realize the action of jumping by itself by pressing the surface Pl on which the actuator 1 is placed using the deformation of the deformed portion 10a of the flat plate portion 12. The deformed portion 10a of the flat plate portion 12 can function as an output portion that outputs the work output of the actuator 1 to the outside. By giving a specific output form of the work thereof, the actuator 1 of Embodiment 1 can realize an action such as a jumping action that a conventional soft actuator cannot realize.

[0065] Figure 4 is a view showing Figure 1 is a view showing another example of the base electrode 20. In Figure 4 In the example shown in FIG. 17, the insulating layer 22 is not shown.

[0066] As shown in Figure 4As shown, the base electrode 20 of Embodiment 1 can be divided into multiple electrode portions 25a to 25d by dividing the recessed surface portion 27 of the opposing surface 21 of the base electrode 20. The number of electrode portions into which the base electrode 20 is divided is arbitrary. The electrode portions 25a to 25d are insulated from each other by a plate-like insulating portion 26. The plate-like insulating portion 26 allows voltage to be applied individually between each of the electrode portions 25a to 25d and the flexible electrode 10. The control unit 65 of the drive circuit 60 can control the magnitude of the voltage applied to each of the electrode portions 25a to 25d, and control the timing of applying and stopping the voltage application. Therefore, the flexible electrode 10 can be deformed into various forms depending on which electrode portion 25a to 25d is subjected to voltage. Therefore, the actuator 1 of Embodiment 1 can jump off the surface P1 with any force, any direction, and any timing.

[0067] Example 2

[0068] Will use Figure 5 and Figure 6 The actuator 1 of Embodiment 2 is described. Descriptions of the components and operation of the actuator 1 of Embodiment 2, which are identical to those in the foregoing embodiments, will be omitted.

[0069] Figure 5 This is a view schematically showing the configuration of actuator 1 in embodiment 2. Figure 5 The diagram illustrates the application of a voltage between the flexible electrode 10 and the base electrode 20. Figure 6 It is shown in Figure 5 A view of the actuator 1 when the applied voltage between the flexible electrode 10 and the base electrode 20 is stopped. Figure 5 and Figure 6 The drive circuit 60 is not shown in the diagram.

[0070] The actuator 1 of Embodiment 1 has a flexible electrode 10, which is placed on and in contact with the surface P1. The work performed by the actuator 1 of Embodiment 1 is directed towards the surface P1 on which the actuator 1 is placed. The actuator 1 of Embodiment 1 achieves a self-jumping action by compressing the surface P1 on which the actuator 1 is placed by utilizing the deformation of the deformable portion 10a of the flat plate portion 12.

[0071] On the other hand, the actuator 1 of Embodiment 2 has a base electrode 20 placed on and in contact with surface P1. The base electrode 20 of Embodiment 2 can be fixed to surface P1 so as not to move in the direction intersecting with surface P1. Figure 5 and Figure 6As shown, the target against which the actuation of the actuator 1 of Example 2 is output is a target T1 placed on the flexible electrode 10. The actuator 1 of Example 2 can pop out the target T1 to achieve the action of throwing the target T1 by utilizing the deformation of the deformed portion 10a of the flat plate portion 12. By giving a specific output form of its actuation, the actuator 1 of Example 2 can achieve an action such as a throwing action that a conventional soft actuator cannot achieve.

[0072] As with the base electrode 20 shown in Figure 4 Example 2, the base electrode 20 of Example 2 can be divided into a plurality of electrode portions 25a to 25d to which voltages are applied individually. The actuator 1 of Example 2 can throw the target T1 with an arbitrary force, in an arbitrary direction, at an arbitrary timing, similarly to Example 1.

[0073] Example 3

[0074] The actuator 1 of Example 3 will be described using Figures 7 to 12 The description of the components and actions of the actuator 1 of Example 3 that are the same as those of the foregoing examples will be omitted.

[0075] Figure 7 is a view schematically showing the configuration of the actuator 1 of Example 3. In Figure 7 , the insulating layer 22 that covers the opposite surface 21 of the base electrode 20 is not shown. In Figures 8 to 20 , the insulating layer 22 is also not shown.

[0076] The actuator 1 of Example 3 is disposed on a target T2. The target T2 is a liquid, a powder, or the like on a surface P2 outside the actuator 1. By applying a voltage between the two electrodes of the flexible electrode 10 and the base electrode 20, the actuator 1 of Example 3 displaces the back of the skirt portion 14 to be described later of the flexible electrode 10 to the inside in the radial direction of the tube portion 28 to be described later of the base electrode 20 (see Figure 8 ). Thus, the actuator 1 of Example 3 is capable of achieving the action of collecting the target T2. The target against which the actuation of the actuator 1 of Example 3 is output is the target T2 on the surface P2.

[0077] The base electrode 20 of Example 3 has a tube portion 28 with one end 28a closed and the other end 28b open. The tube portion 28 has a hollow structure and is formed in a cylindrical or polygonal tubular shape. The tube portion 28 is formed so that a cross section in the axial direction of the tube portion 28 has the shape of a comb. The tube portion 28 has a bottom portion 29, a flange 30, an opening 31, an outer wall 32, and an inner wall 33.

[0078] The bottom 29 is provided at one end 28a of the tube portion 28 and closes the one end 28a. The bottom 29 can have a hole through which air inside the tube portion 28 is discharged to the outside of the tube portion 28 from the one end 28a. The bottom 29 extends in a radial direction of the tube portion 28. The radial direction of the tube portion 28 is a direction intersecting (orthogonal to) an axial direction of the tube portion 28 which is an extending direction of a central axis of the tube portion 28. The flange 30 extends from the bottom 29 to an outer side in the radial direction of the tube portion 28. The outer side in the radial direction of the tube portion 28 is a side in the radial direction of the tube portion 28 toward the outside of the tube portion 28. The flange 30 has a lower surface 30a continuous with an outer side surface 28c of the tube portion 28. The lower surface 30a extends in the radial direction of the tube portion 28 and intersects (orthogonally) the axial direction of the tube portion 28. The outer side surface 28c of the tube portion 28 extends in the axial direction of the tube portion 28 and intersects (orthogonally) the radial direction of the tube portion 28.

[0079] The outer wall 32 and the inner wall 33 extend in the axial direction of the tube portion 28 from the bottom 29 to the opening 31. The outer wall 32 forms the outer side surface 28c of the tube portion 28. The inner wall 33 is provided with a gap left toward the inner side in the radial direction from the outer wall 32. The outer wall 32 and the inner wall 33 can be formed in a cylindrical shape or a polygonal tubular shape having a common central axis. The opening 31 is formed by the front end of the outer wall 32 and the front end of the inner wall 33 and by only the front end of the inner wall 33. The front end of the outer wall 32 and the front end of the inner wall 33 are end portions of the outer wall 32 and the inner wall 33, respectively, on a side opposite to the bottom 29 in the axial direction.

[0080] As described later, the opposite surface 21 of the base electrode 20 of Embodiment 3 is formed by the outer side surface 28c of the tube portion 28 and the lower surface 30a of the flange 30. As in Embodiment 1, the lower surface 30a of the flange 30 is covered with the insulating layer 22. The outer side surface 28c of the tube portion 28 is covered with the insulating layer 23 sufficiently thicker than the insulating layer 22. In the case where the target T2 is an electrically conductive liquid such as water or an electrolyte, not only the lower surface 30a of the flange 30 but also the inner surface of the tube portion 28 (the inner surface and the front end surface of the outer wall 32, the inner surface and the outer surface and the front end surface of the inner wall 33, and the lower surface of the bottom 29) is covered with the insulating layer 22.

[0081] The restraint member 40 of Embodiment 3 includes a first restraint member 41 and a second restraint member 42. The first restraint member 41 is disposed outside the outer side surface 28c of the tube portion 28 in the radial direction of the tube portion 28. The first restraint member 41 is mounted on the insulating layer 23 covering the outer side surface 28c at a position near the front end of the outer wall 32. The first restraint member 41 restrains the deformation of the flexible electrode 10 in the radial direction of the tube portion 28. The first restraint member 41 supports the flexible electrode 10 so as to be slidable in the axial direction of the tube portion 28. Specifically, the first restraint member 41 supports the front end 13b of the body portion 13 of the flexible electrode 10 so as to be slidable in the axial direction of the tube portion 28, and restrains the deformation of the front end 13b in the radial direction. Thus, the first restraint member 41 restrains the flexible electrode 10 on the base electrode 20 in the radial direction of the tube portion 28.

[0082] The second restraint member 42 is disposed outside the first restraint member 41 in the radial direction of the tube portion 28. The second restraint member 42 is mounted on the insulating layer 22 covering the lower surface 30a at a position near the edge of the flange 30. The second restraint member 42 restrains the flexible electrode 10 on the base electrode 20 by fixing the base end 13a of the body portion 13 of the flexible electrode 10 and the edge of the flange 30 to each other. The second restraint member 42 supports the base end 13a of the body portion 13 as a fixed end. The second restraint member 42 can be formed similarly to the restraint member 40 of Embodiment 1.

[0083] The flexible electrode 10 of Embodiment 3 is formed in a band shape or a plate shape covering the periphery of the tube portion 28 of the base electrode 20. The flexible electrode 10 has a body portion 13 and a skirt portion 14. The body portion 13 is a portion of the flexible electrode 10 extending from the first restraint member 41 and in a direction from the other end 28b to the one end 28a of the tube portion 28. The body portion 13 is disposed between the first restraint member 41 and the second restraint member 42. The body portion 13 has a base end 13a and a front end 13b located on the one end 28a side and the other end 28b side, respectively, in the axial direction of the tube portion 28, and a main portion 13c which is a portion other than the base end 13a and the front end 13b. The base end 13a of the body portion 13 is a portion fixed by the second restraint member 42. The front end 13b of the body portion 13 is a portion supported by the first restraint member 41. The main portion 13c of the body portion 13 is a portion not supported or fixed by the first restraint member 41 or the second restraint member 42. The main portion 13c of the body portion 13 is a deformed portion 10a of the flexible electrode 10.

[0084] The body portion 13 is supported by a first constraint member 41 and a second constraint member 42 so as to face each of the outer surface 28c of the tube portion 28 and the lower surface 30a of the flange 30 in an inclined state relative to each of the outer surface 28c and the lower surface 30a. The outer surface 28c of the tube portion 28 and the lower surface 30a of the flange 30 are the opposing surfaces 21 of the base electrode 20 facing the flexible electrode 10. A space 24 is formed between the outer surface 28c of the tube portion 28 and the lower surface 30a of the flange 30 on one side and the body portion 13 on the other side to receive the flexible electrode 10, which deforms to approach the opposing surface 21 of the base electrode 20 when a voltage is applied between the flexible electrode 10 and the base electrode 20.

[0085] Skirt 14 is a portion of the flexible electrode 10 that extends from the first constraint member 41 and in a direction from one end 28a to the other end 28b of the tube 28. Skirt 14 is continuous with the front end 13b of the body portion 13. Skirt 14 covers the target T2 placed on the surface P2. Skirt 14 extends axially from the first constraint member 41 beyond the other end 28b, while extending radially outward from the first constraint member 41 in the tube 28. The front end 14a of skirt 14 contacts the surface P2.

[0086] Compared to the drive circuit 60 of Embodiment 1, the drive circuit 60 of Embodiment 3 further includes a power supply 66 and a switch 67. The power supply 66 is connected in parallel with the power supply 61 and in the opposite direction to the power supply 61. The switch 67 is connected between the power supply 61 and power supply 66 on one side and the switch 63a on the other side, or between the power supply 61 and power supply 66 on one side and the switch 64a on the other side. The switch 67 switches between applying the output voltage of the power supply 61 and applying the output voltage of the power supply 66 as the voltage to be applied between the flexible electrode 10 and the base electrode 20. The switch 67 is controlled by the control unit 65.

[0087] Figure 8 It is shown in Figure 7 A view of the actuator 1 when a voltage is applied between the flexible electrode 10 and the base electrode 20. Figure 9 It is shown in Figure 8 The view shown is of actuator 1 under the condition that a reverse voltage is applied afterward. Figure 10 It is shown in Figure 9 The view shown is of actuator 1 after the voltage is stopped.

[0088] like Figure 8As shown, the control unit 65 of the drive circuit 60 electrically connects the switch 67 to the power supply 61, controls the switches 63a, 64a to the on state, and controls the switches 63b, 64b to the off state. Then, the output voltage of the power supply 61 is applied between the flexible electrode 10 and the base electrode 20. In this case, the body portion 13 of the flexible electrode 10 is deformed to approach the outer side surface 28c of the tube portion 28 and the lower surface 30a of the flange 30. The main portion 13c of the body portion 13 as the deformed portion 10a is deformed in the direction of approaching the outer side surface 28c and in the direction of approaching the lower surface 30a of the flange 30 in the radial direction of the tube portion 28 with the first and second restriction members 41, 42 serving as support points.

[0089] Here, the first restriction member 41 supports the flexible electrode 10 so as to be slidable in the axial direction of the tube portion 28. Therefore, in the axial direction of the tube portion 28, the skirt portion 14 is pulled in the direction from the other end 28b toward the one end 28a in continuity with the body portion 13. Specifically, by the deformation as described above, the main portion 13c of the body portion 13 as the deformed portion 10a pulls the skirt portion 14 in the axial direction of the tube portion 28 in the direction from the other end 28b toward the one end 28a. Further, the first restriction member 41 restricts the deformation of the tube portion 28 of the flexible electrode 10 in the radial direction. Therefore, when the main portion 13c of the body portion 13 pulls the skirt portion 14, the front end 14a of the skirt portion 14 is displaced toward the inner side in the radial direction of the tube portion 28 with the first restriction member 41 serving as a support point. The occupied area, which is the area of the surface P2 surrounded by the front end 14a of the skirt portion 14, decreases from the initial stage before the voltage application as shown by the occupied area Q1 to the occupied area Q2 at the time of the voltage application. Figure 7 The occupied area Q2 at the time of the voltage application. Figure 8 The occupied area Q2 at the time of the voltage application.

[0090] Therefore, the actuator 1 of Embodiment 3 can realize the action of scraping and collecting the target T2 together by the skirt portion 14 by converting the deformation of the deformed portion 10a of the body portion 13 into the displacement of the front end 14a of the skirt portion 14 toward the inner side in the radial direction and reducing the occupied area of the skirt portion 14 by the displacement. The front end 14a of the skirt portion 14 can serve as an output portion that outputs the work of the actuator 1 to the outside.

[0091] The lower surface 30a of the flange 30 is covered with the insulating layer 22, and the outer lateral surface 28c of the tube portion 28 is covered with the insulating layer 23 which is thicker than the insulating layer 22. The Coulomb force generated between the body portion 13 and the insulating layer 22 covering the lower surface 30a is greater than the Coulomb force generated between the body portion 13 and the insulating layer 23 covering the outer lateral surface 28c. Therefore, the body portion 13 is deformed to approach the lower surface 30a of the flange 30 first, and then to approach the outer lateral surface 28c of the tube portion 28. Specifically, the body portion 13 is deformed to approach the portion of the opposite surface 21 of the base electrode 20 which is farther from the first restraining member 41 first, and then to approach the portion of the opposite surface 21 which is closer to the first restraining member 41. In this way, the main portion 13c of the body portion 13 can reliably and sufficiently pull the skirt portion 14 in the axial direction of the tube portion 28 in the direction from the other end 28b toward the one end 28a. The front end 14a of the skirt portion 14 can be reliably and sufficiently displaced toward the inside in the radial direction of the tube portion 28 with the first restraining member 41 serving as a support point. The actuator 1 of Embodiment 3 can more reliably achieve the action of collecting the target T2.

[0092] When the voltage is applied, the target T2 contacts the skirt portion 14. When the target T2 is an electrically conductive liquid, as the electric charges move from the skirt portion 14, the target T2 has electric charges of the same polarity as the flexible electrode 10. In the case shown, the target T2 has positive electric charges. The Coulomb force is generated between the tube portion 28 of the base electrode 20 and the target T2. Due to this Coulomb force, the target T2 is sucked into the tube portion 28 through the opening 31 of the tube portion 28. Therefore, the actuator 1 of Embodiment 3 can quickly collect more of the target T2. Furthermore, by continuously applying the voltage, the actuator 1 of Embodiment 3 can achieve the action of storing the sucked target T2 inside the tube portion 28. Figure 8 In the case shown, the target T2 has positive electric charges. The Coulomb force is generated between the tube portion 28 of the base electrode 20 and the target T2. Due to this Coulomb force, the target T2 is sucked into the tube portion 28 through the opening 31 of the tube portion 28. Therefore, the actuator 1 of Embodiment 3 can quickly collect more of the target T2. Furthermore, by continuously applying the voltage, the actuator 1 of Embodiment 3 can achieve the action of storing the sucked target T2 inside the tube portion 28.

[0093] Figure 8 After the case shown, as shown in Figure 9 The control unit 65 of the drive circuit 60 electrically connects the switch 67 to the power supply 66. Then, the output voltage of the power supply 66 is applied between the flexible electrode 10 and the base electrode 20. In this case, in contrast to the case shown in Figure 8 In contrast to the case shown in Figure 8 In contrast to the case shown in Figure 8 As in the case shown in

[0094] ​When the target T2 is a conductive liquid, the tube portion 28 of the base electrode 20 has the same polarity of electric charge as the target T2 stored in the inside of the tube portion 28. Due to the repulsive force acting on the tube portion 28, the target T2 stored in the inside of the tube portion 28 is expelled to the outside through the opening 31 of the tube portion 28. Here, by expelling the target T2 onto the surface P3, which is a surface located outside the actuator 1 and different from the surface P2, the actuator 1 can move the target T2 from the surface P2 onto the surface P3.

[0095] After the case shown in Figure 9 , the control unit 65 of the drive circuit 60 controls the switches 63b, 64b to be in the on state and controls the switches 63a, 64a to be in the off state, as shown in Figure 10 . Then, the application of the voltage between the flexible electrode 10 and the base electrode 20 is stopped. In this case, due to the restoring force of the flexible electrode 10, the main portion 13c of the body portion 13, which is the deformed portion 10a, deforms in a direction separating from the outer side surface 28c of the tube portion 28 and the lower surface 30a of the flange 30 and returns to the initial position before the voltage is applied, as shown in Figure 7 . The front end 14a of the skirt portion 14 is displaced to the outside in the radial direction and returns to its initial position. The occupied area of the front end 14a of the skirt portion 14 returns to its initial occupied area Q1.

[0096] Therefore, the actuator 1 of Embodiment 3 can realize the action of collecting the target T2 by converting the deformation of the deformed portion 10a of the body portion 13 into the displacement of the skirt portion 14 constituting the output portion. When the target T2 is a conductive liquid, the actuator 1 of Embodiment 3 can realize the actions of storing and expelling the target T2. By giving a specific output form of its work, the actuator 1 of Embodiment 3 can realize actions such as the collection, storage, and expulsion actions that cannot be realized by a conventional soft actuator.

[0097] Figure 11 is a view of another example of the actuator 1 shown in Figure 7 . Figure 12 is a view of the actuator 1 in a case where a voltage is applied between the flexible electrode 10 and the base electrode 20 shown in Figure 11 .

[0098] As shown in Figure 11 , the actuator 1 of Embodiment 3 should be provided at least with the first constraint member 41, and the second constraint member 42 that fixes the base end 13a of the body portion 13 of the flexible electrode 10 can be omitted. Figure 11The actuator 1 shown includes a housing 34, which has the shape of a tube closed at one end and houses a tube portion 28 of the base electrode 20. The housing 34 is formed of an insulator. The housing 34 extends along the axial direction of the tube portion 28. A bottom 34a of the housing 34 is provided on the side of one end 28a of the tube portion 28. The bottom 34a of the housing 34 is mounted on the bottom 29 of the tube portion 28. An edge 34b forming an opening in the housing 34 is provided on the side of the other end 28b of the tube portion 28.

[0099] Figure 11 The first constraint member 41 shown is mounted on the edge 34b of the housing 34. Figure 11 The first constraint member 41 shown is disposed on the outer side of the outer surface 28c of the tube portion 28 in the radial direction. Figure 11 The first constraint member 41 shown constrains the deformation of the flexible electrode 10 in the radial direction of the tube 28. Figure 11 The first constraint member 41 shown supports the flexible electrode 10 so that it can slide along the axial direction of the tube 28. Figure 11 The first constraint member 41 shown constrains the flexible electrode 10 to the base electrode 20 through the housing 34.

[0100] Figure 11 The body portion 13 of the flexible electrode 10 shown is supported by the first constraint member 41 and faces the outer surface 28c of the tube portion 28 in an inclined state relative to the outer surface 28c. Figure 11 The skirt 14 shown is continuous with the body 13 and extends axially beyond the other end 28b from the first constraint member 41, while extending radially to the outside of the first constraint member 41.

[0101] Figure 11 The opposing surface 21 of the base electrode 20 shown is formed by the outer surface 28c of the tube portion 28. Although not shown, the outer surface 28c of the tube portion 28 is divided along the axial direction of the tube portion 28, thus... Figure 11 The base electrode 20 shown is divided into multiple electrode sections. Voltage can be applied to these electrode sections individually.

[0102] Although not shown, Figure 12 The drive circuit 60 of the actuator 1 shown applies voltage to the electrode section sequentially along the direction from one end 28b of the tube 28 to the other end 28a. Then, as... Figure 7As shown, the main portion 13c of the body portion 13 of the flexible electrode 10, which is the deformable portion 10a, deforms to approach the outer surface 28c of the tube portion 28, while simultaneously shifting along the axial direction of the tube portion 28 in the direction from the other end 28b to one end 28a. The main portion 13c of the body portion 13, which is the deformable portion 10a, pulls the skirt portion 14 along the axial direction of the tube portion 28 in the direction from the other end 28b to one end 28a. When the body portion 13 pulls the skirt portion 14, the front end 14a of the skirt portion 14 shifts inward in the radial direction of the tube portion 28, with the first constraint member 41 acting as a support point.

[0103] Therefore, with Figure 11 The actuator shown is the same as 1. Figures 13 to 16 The actuator 1 shown can achieve the action of collecting the target T2 by converting the deformation of the deformable portion 10a of the main body 13 into the displacement of the skirt 14 constituting the output part.

[0104] Example 4

[0105] Will use Figure 13 The actuator 1 of Embodiment 4 is described. Descriptions of the components and operation of the actuator 1 of Embodiment 4, which are identical to those in the embodiments described above, will be omitted.

[0106] Figure 14 This is a view schematically illustrating the configuration of actuator 1 in embodiment 4.

[0107] By applying a voltage between the flexible electrode 10 and the base electrode 20, the actuator 1 of Embodiment 4 deforms the flexible electrode 10 such that the rear end surface 16 of the flexible electrode 10 (described later) approaches the recessed surface portion 35 (described later) of the base electrode 20 (see [link]). Figure 14 Therefore, the actuator 1 of embodiment 4 can achieve the action of capturing the target by a plurality of rod-shaped members 50 mounted on the other end surface 17, which will be described later, behind the flexible electrode 10.

[0108] In Embodiment 4, the base electrode 20 can be formed in the shape of a plate having a recess with a ridge along one end surface 16 of the flexible electrode 10. The opposing surface 21 of the base electrode 20 has a recessed surface portion 35 that is recessed in a direction separate from the flexible electrode 10. The recessed surface portion 35 is inclined relative to the end surface 16. A space 24 is formed between the recessed surface portion 35 and the end surface 16. The recessed surface portion 35 can be formed from a surface bent into a V-shape in cross-section.

[0109] The flexible electrode 10 of Embodiment 4 is formed as a hexahedron 15, such as a cuboid. The flexible electrode 10 has one end surface 16 facing the recessed surface portion 35 and another end surface 17 located on the side opposite to the one end surface 16 in the direction from the flexible electrode 10 toward the base electrode 20.

[0110] The one-end surface 16 of the flexible electrode 10 has an edge 16a and a main portion 16b that is a portion other than the edge 16a. The edge 16a of the one-end surface 16 is a portion fixed by the restraint member 40. The main portion 16b of the one-end surface 16 is a portion not fixed by the restraint member 40. The main portion 16b of the one-end surface 16 is the deformed portion 10a. The other-end surface 17 of the flexible electrode 10 includes an edge 17a and a main portion 17b that is a portion other than the edge 17a. The rod-like members 50 are mounted on the edge 17a of the other-end surface 17. The main portion 17b of the other-end surface 17 is a portion on which the rod-like members 50 are not mounted.

[0111] Each of the rod-like members 50 is formed of an insulator. The front ends 50a of the respective rod-like members 50 are disposed at intervals Gl along the other-end surface 17. The front ends 50a of the respective rod-like members 50 can be formed in a shape that allows them to easily catch a target, for example, like tweezers.

[0112] The restraint member 40 of Embodiment 4 restrains the flexible electrode 10 on the base electrode 20 by fixing the edge 16a of the one-end surface 16 of the flexible electrode 10 and the edge 35a of the recessed surface portion 35 of the base electrode 20 together. The restraint member 40 supports the edge 16a of the one-end surface 16 as a fixed end. The restraint member 40 can be configured similarly to the restraint member 40 of Embodiment 1.

[0113] Figure 13 is a view of the actuator 1 in a case where a voltage is applied between the flexible electrode 10 and the base electrode 20. Figure 14 is a view of the actuator 1 in a case where a voltage is applied between the flexible electrode 10 and the base electrode 20.

[0114] As shown in Figure 14 The control unit 65 of the drive circuit 60 controls the switches 63a, 64a to be in an on state and controls the switches 63b, 64b to be in an off state. Then, a voltage is applied between the flexible electrode 10 and the base electrode 20. In this case, the one-end surface 16 of the flexible electrode 10 is deformed to approach the recessed surface portion 35. The main portion 16b of the one-end surface 16 that is the deformed portion 10a is displaced in a direction of approaching the recessed surface portion 35 with the restraint member 40 acting as a support point. When the main portion 16b of the one-end surface 16 is deformed, the main portion 17b of the other-end surface 17 of the flexible electrode 10 is deformed in a direction of approaching the recessed surface portion 35. Each of the rod-like members 50 turns to reduce the intervals Gl. Specifically, when the main portion 17b of the other-end surface 17 is deformed, the front ends 50a of the respective rod-like members 50 are displaced in a direction of reducing the intervals Gl. As a result, the front ends 50a of the respective rod-like members 50 are able to catch a target.

[0115] Accordingly, the actuator 1 of Embodiment 4 can realize the action of capturing the target by converting the deformation of the deformed portion 10a of the one-end surface 16 into the displacement of the front end 50a of the corresponding rod-shaped member 50 and reducing the interval G1 between the front ends 50a of the corresponding rod-shaped members 50 using the displacement. The front end 50a of the corresponding rod-shaped member 50 can serve as an output portion that outputs the work of the actuator 1 to the outside.

[0116] After the case shown in Figure 13 The control unit 65 of the drive circuit 60 controls the switches 63b, 64b to be in the on state and controls the switches 63a, 64a to be in the off state. Then, the application of the voltage between the flexible electrode 10 and the base electrode 20 is stopped. In this case, due to the restoring force of the flexible electrode 10, the main portion 16b of the one-end surface 16 that is the deformed portion 10a deforms in a direction separating from the recessed surface portion 35 with the constraint member 40 serving as a support point and returns to its initial position, as shown in Figure 15 When the main portion 16b of the one-end surface 16 that is the deformed portion 10a deforms and the main portion 17b of the other-end surface 17 deforms, the front end 50a of the corresponding rod-shaped member 50 is displaced in a direction in which the interval G1 increases and returns to its initial position. As a result, the front end 50a of the corresponding rod-shaped member 50 can release the target that it has captured.

[0117] Accordingly, the actuator 1 of Embodiment 4 can realize the action of capturing the target by converting the deformation of the deformed portion 10a of the one-end surface 16 into the displacement of the front end 50a of the corresponding rod-shaped member 50 that constitutes the output portion. By giving a specific output form of its work, the actuator 1 of Embodiment 4 can realize an action such as the action of capturing and releasing the target that a conventional soft actuator cannot realize.

[0118] Figure 13 is Figure 15 A view of another example of the actuator 1 shown in

[0119] As Figure 16As shown, the base electrode 20 of Embodiment 4 can be divided into a plurality of electrode portions 25e, 25f according to the mounting positions of the respective rod-shaped members 50. For example, the base electrode 20 can be divided into the electrode portions 25e, 25f so that the planar surface including the plate-shaped insulating portion 26 of the divided opposing surface 21 divides each of the rod-shaped members 50. The electrode portions 25e, 25f are insulated from each other by the insulating portion 26. The insulating portion 26 allows the voltage to be applied individually between each of the electrode portions 25e, 25f and the flexible electrode 10. The control unit 65 of the drive circuit 60 can control the magnitude of the voltage applied to each of the electrode portions 25e, 25f, and control the timing of applying the voltage and stopping the application of the voltage. Thus, the actuator 1 of Embodiment 4 is able to accurately control the position of the front end 50a of the respective rod-shaped members 50 and the force with which the front end 50a captures the target.

[0120] Figure 13 is a view showing Figure 16 Another example of the drive circuit 60 shown.

[0121] As Figure 16 As shown, the drive circuit 60 of Embodiment 4 does not need to connect the flexible electrode 10 and the base electrode 20 to the frame ground. Figure 16 The drive circuit 60 shown has switches 68a, 68b instead of the switches 63a to 64b. In Figure 16 In the drive circuit 60 shown, the flexible electrode 10 and the base electrode 20 are connected to the power source 61 through the switch 68a. The flexible electrode 10 and the base electrode 20 are connected to each other through the switch 68b.

[0122] To apply the voltage between the flexible electrode 10 and the base electrode 20, Figure 16 The control unit 65 of the drive circuit 60 shown only needs to control the switch 68a to the on state and the switch 68b to the off state. To stop the voltage from being applied between the flexible electrode 10 and the base electrode 20, Figure 16 The control unit 65 of the drive circuit 60 shown only needs to control the switch 68b to the on state and the switch 68a to the off state. The electric charges accumulated in each of the flexible electrode 10 and the base electrode 20 move until neutralized and the potentials of the flexible electrode 10 and the base electrode 20 become equal, thereby stopping the voltage from being applied.

[0123] Thus, Figure 13 The drive circuit 60 shown can have a simpler circuit configuration than Figure 16 The drive circuit 60 shown. Figure 17The illustrated drive circuit 60 is also applicable to the drive circuit 60 of the actuator 1 in the embodiments other than Embodiment 4. When the target is not affected by electrification, the rod-shaped member 50 can be omitted from the actuator 1 of Embodiment 4, and the flexible electrode 10 can be configured to directly capture the target.

[0124] Embodiment 5

[0125] The actuator 1 of Embodiment 5 will be described. The description of the components and actions of the actuator 1 of Embodiment 5 that are the same as those of the above-described embodiments will be omitted. Figure 18 Figure 17 is a view schematically showing the configuration of the actuator 1 of Embodiment 5.

[0126] Figure 18 The actuator 1 of Embodiment 5 deforms the flexible electrode 10 so that the rear face of the flexible electrode 10, a peripheral surface 182 to be described later, approaches a rear face of the base electrode 20, a recessed surface portion 36 to be described later, by applying a voltage between the two electrodes of the flexible electrode 10 and the base electrode 20 (see ). Thus, the actuator 1 of Embodiment 5 is able to achieve the action of loosening a target T3 that is tightened by a rear face of the flexible electrode 10, an inner peripheral surface 181 to be described later. The target T3 is a member such as a pin, a shaft, or a screw that extends in the axial direction of the shaft A.

[0127] Figure 18 The flexible electrode 10 of Embodiment 5 is formed into a cylindrical body 18 that surrounds the outer periphery of the predetermined shaft A. The flexible electrode 10 has an inner peripheral surface 181 that surrounds the outer periphery of the shaft A with a gap G2 left between the inner peripheral surface 181 and the shaft A in a radial direction that intersects (is orthogonal to) the shaft A, and an outer peripheral surface 182 that is provided outside the inner peripheral surface 181 in the radial direction.

[0128] The inner peripheral surface 181 of the flexible electrode 10 is provided so as to face the shaft A. The inner peripheral surface 181 is a surface that contacts the target T3 and tightens the target T3. The inner peripheral surface 181 can be covered with an insulating layer. The inner peripheral surface 181 has an edge 181a and a main portion 181b that is a portion other than the edge 181a. The edge 181a of the inner peripheral surface 181 is a portion that is fixed by the constraint member 40. The main portion 181b of the inner peripheral surface 181 is a portion that is not fixed by the constraint member 40. The outer peripheral surface 182 of the flexible electrode 10 has an edge 182a and a main portion 182b that is a portion other than the edge 182a. The edge 182a of the outer peripheral surface 182 is a portion that is fixed by the constraint member 40. The main portion 182b of the outer peripheral surface 182 is a portion that is not fixed by the constraint member 40. The main portion 182b of the outer peripheral surface 182 is a deformed portion 10a.

[0129] The inner peripheral surface 181 of the flexible electrode 10 is provided so as to face the shaft A. The inner peripheral surface 181 is a surface that contacts the target T3 and tightens the target T3. The inner peripheral surface 181 can be covered with an insulating layer. The inner peripheral surface 181 has an edge 181a and a main portion 181b that is a portion other than the edge 181a. The edge 181a of the inner peripheral surface 181 is a portion that is fixed by the constraint member 40. The main portion 181b of the inner peripheral surface 181 is a portion that is not fixed by the constraint member 40. The outer peripheral surface 182 of the flexible electrode 10 has an edge 182a and a main portion 182b that is a portion other than the edge 182a. The edge 182a of the outer peripheral surface 182 is a portion that is fixed by the constraint member 40. The main portion 182b of the outer peripheral surface 182 is a portion that is not fixed by the constraint member 40. The main portion 182b of the outer peripheral surface 182 is a deformed portion 10a. ​

[0130] The base electrode 20 of Embodiment 5 is formed as a tubular body that encloses the outer peripheral surface 182 of the flexible electrode 10 in the circumferential direction of the axis A. The base electrode 20 is disposed to face the outer peripheral surface 182 in the radial direction. The opposite surface 21 of the base electrode 20 has a recessed surface portion 36 that is recessed in a direction apart from the outer peripheral surface 182. The recessed surface portion 36 is inclined with respect to the outer peripheral surface 182. A space 24 is formed between the recessed surface portion 36 and the outer peripheral surface 182. The recessed surface portion 36 can be formed of a surface that is curved in a V-shape in cross section.

[0131] The constraint member 40 of Embodiment 5 constrains the flexible electrode 10 on the base electrode 20 by fixing the edge 181a of the inner peripheral surface 181 of the flexible electrode 10, the edge 182a of the outer peripheral surface 182 thereof, and the edge 36a of the recessed surface portion 36 to each other. The constraint member 40 supports the edge 181a of the inner peripheral surface 181 and the edge 182a of the outer peripheral surface 182 as fixed ends. The constraint member 40 can be formed of a pair of plate-like members 43. The pair of plate-like members 43 extends in the radial direction. The pair of plate-like members 43 holds the flexible electrode 10 and the base electrode 20 from both sides in the axial direction of the axis A. The pair of plate-like members 43 is provided with a through-hole that extends in the axial direction, through which the target T3 can pass.

[0132] Figure 17 is a view of the actuator 1 in a case where a voltage is applied between the flexible electrode 10 and the base electrode 20. Figure 18 is a view of the actuator 1 in a case where a voltage is applied between the flexible electrode 10 and the base electrode 20.

[0133] As shown in Figure 18 The control unit 65 of the drive circuit 60 controls the switches 63a, 64a to be in an on state and controls the switches 63b, 64b to be in an off state. Then, a voltage is applied between the flexible electrode 10 and the base electrode 20. In this case, the outer peripheral surface 182 of the flexible electrode 10 is deformed to approach the recessed surface portion 36. The main portion 182b of the outer peripheral surface 182 that is a deformed portion 10a is deformed in the direction of approaching the recessed surface portion 36 along the radial direction with the position at which the constraint member 40 supports the edge 182a serving as a support point. When the main portion 182b of the outer peripheral surface 182 that is a deformed portion 10a is deformed, the main portion 181b of the inner peripheral surface 181 of the flexible electrode 10 is displaced in the direction of approaching the recessed surface portion 36 in the radial direction. The main portion 181b of the inner peripheral surface 181 increases the gap G2 between the inner peripheral surface 181 and the axis A. As a result, a space S is formed between the inner peripheral surface 181 and the target T3. The inner peripheral surface 181 can loosen the tightening of the target T3.

[0134] Accordingly, the actuator 1 of Embodiment 5 can realize the loosening action of the tightened target T3 by converting the deformation of the deformed portion 10a of the outer peripheral surface 182 into the displacement of the main portion 181b of the inner peripheral surface 181 and using the displacement to increase the gap G2 between the inner peripheral surface 181 and the shaft A. The main portion 181b of the inner peripheral surface 181 can serve as an output portion that externally outputs the work of the actuator 1.

[0135] After the case shown in Figure 17 The control unit 65 of the drive circuit 60 controls the switches 63b and 64b to be in the on state and controls the switches 63a and 64a to be in the off state. Then, the application of the voltage between the flexible electrode 10 and the base electrode 20 is stopped. In this case, due to the restoring force of the flexible electrode 10, the main portion 182b of the outer peripheral surface 182 that is the deformed portion 10a deforms in the radial direction in a direction away from the recessed surface portion 36 with the position at which the restraint member 40 supports the outer peripheral surface 182 serving as a support point and returns to the original shape as shown in Figure 19 When the main portion 182b of the outer peripheral surface 182 that is the deformed portion 10a deforms, the main portion 181b of the inner peripheral surface 181 is displaced in a direction in which the gap G2 is reduced and returns to its initial position. Accordingly, the inner peripheral surface 181 can again tighten the target T3.

[0136] Accordingly, the actuator 1 of Embodiment 5 can realize the tightening and loosening actions of the target T3 by converting the deformation of the deformed portion 10a of the outer peripheral surface 182 into the displacement of the main portion 181b of the inner peripheral surface 181 that constitutes the output portion. By giving a specific output form of the work thereof, the actuator 1 of Embodiment 5 can realize actions such as the tightening and loosening actions of the target T3 that cannot be realized by a conventional soft actuator.

[0137] The restraint member 40 of Embodiment 5 should at least fix the edge 182a of the outer peripheral surface 182 of the flexible electrode 10 and the edge 36a of the recessed surface portion 36 to each other. The restraint member 40 of Embodiment 5 does not necessarily fix the edge 181a of the inner peripheral surface 181 and the edge 36a of the recessed surface portion 36 to each other.

[0138] The base electrode 20 of Embodiment 5 can be divided into a plurality of electrode portions arranged in the circumferential direction of the axis A. The electrode portions are insulated from each other by the insulating portions 26. The insulating portions 26 allow voltages to be applied individually between each of the electrode portions and the flexible electrode 10. The control unit 65 of the driving circuit 60 can control the magnitude of the voltage applied to each of the electrode portions, and control the timing of applying the voltage and stopping the application of the voltage. Furthermore, the actuator 1 of Embodiment 5 can have a plurality of sets of the flexible electrode 10 and the base electrode 20 arranged in the circumferential direction of the axis A, each set consisting of one flexible electrode 10 and one base electrode 20. The flexible electrode 10 that forms part of one set has a shape obtained by dividing the cylindrical body 18 that surrounds the outer periphery of the axis A into portions corresponding to the respective sets in the circumferential direction of the axis A. The base electrode 20 that forms part of one set has a shape obtained by dividing the tubular body that surrounds the outer peripheral surface 182 of the flexible electrode 10 into portions corresponding to the respective sets in the circumferential direction of the axis A. Voltages can be applied individually between the flexible electrode 10 and the base electrode 20 that form each set. A plurality of driving circuits 60 can be provided so as to correspond to the respective sets. The control unit 65 of each driving circuit 60 can control the magnitude of the voltage to be applied to the corresponding set, and control the timing of applying the voltage and stopping the application of the voltage. Thus, the actuator 1 of Embodiment 5 is able to accurately control the position of the main portion 181b of the inner peripheral surface 181 of each flexible electrode 10 and the tightening force of the inner peripheral surface 181 of each flexible electrode 10 against the target T3.

[0139] Embodiment 6

[0140] The actuator 1 of Embodiment 6 will be described using Figure 20 and Figure 19 . The description of the components and actions of the actuator 1 of Embodiment 6 that are the same as those of the above-described embodiments will be omitted.

[0141] Figure 20 is a view that schematically shows the configuration of the actuator 1 of Embodiment 6.

[0142] By applying a voltage between the two electrodes of the flexible electrode 10 and the base electrode 20, the actuator 1 of Embodiment 6 deforms the flexible electrode 10 so that the rear face of the flexible electrode 10, a flow path wall 191 to be described later, approaches the rear face of the base electrode 20, a recessed surface portion 38 to be described later (see Figure 20 ). Thus, the actuator 1 of Embodiment 6 is able to achieve the action of discharging a target T4 from within a flow path F formed by the flow path wall 191 and the recessed surface portion 38. The target T4 is a gas, a liquid, a powder, or the like.

[0143] The base electrode 20 of Embodiment 6 can be formed in the shape of a plate provided with a groove 37 having a predetermined length. The opposite surface 21 of the base electrode 20 has a recessed surface portion 38 constituting the groove 37 and a flat surface portion 39 surrounding the groove 37. The recessed surface portion 38 is recessed in a direction in which the flexible electrode 10 is separated. The recessed surface portion 38 extends in the direction of extension of the groove 37. The recessed surface portion 38 can be formed of a surface curved in cross section. The flat surface portion 39 is continuous with the edge 38a of the recessed surface portion 38. The flat surface portion 39 is spread in the direction of extension of the groove 37 and in a direction intersecting the groove 37.

[0144] The flexible electrode 10 of Embodiment 6 can be formed in the shape of a plate provided with a semi-tubular flow path wall 191. The flexible electrode 10 has the flow path wall 191 corresponding to the groove 37 and a plate portion 192 surrounding the flow path wall 191. The flow path wall 191 covers the recessed surface portion 38 in a case where a gap G3 is left between the flow path wall 191 and the recessed surface portion 38. A space 24 is formed between the flow path wall 191 and the recessed surface portion 38. The space 24 serves as a flow path F of the target T4. Thus, the flow path wall 191 forms the flow path F in the gap G3 together with the recessed surface portion 38. The flow path wall 191 extends in the direction of extension of the groove 37. The flow path wall 191 can be formed in a shape that fits into the recessed surface portion 38 when deformed to approach the recessed surface portion 38 upon application of a voltage.

[0145] The flow path wall 191 has an edge 191a and a main portion 191b that is a portion other than the edge 191a. The edge 191a of the flow path wall 191 is a portion fixed by the constraint member 40. The main portion 191b of the flow path wall 191 is a portion not fixed by the constraint member 40. The main portion 191b of the flow path wall 191 is the deformed portion 10a. An inner surface 191c of the flow path wall 191 can be covered with an insulating layer. The plate portion 192 is continuous with the edge 191a of the flow path wall 191. The plate portion 192 is spread in the direction of extension of the groove 37 and in a direction intersecting the groove 37. An inner surface 192a of the plate portion 192 faces the flat surface portion 39 of the base electrode 20.

[0146] The constraint member 40 of Embodiment 6 constrains the flexible electrode 10 on the base electrode 20 by fixing the edge 191a of the flow path wall 191 and the edge 38a of the recessed surface portion 38 to each other. The constraint member 40 supports the edge 191a of the flow path wall 191 as a fixed end. The constraint member 40 can be formed of an adhesive 44 having insulating properties. The adhesive 44 bonds the inner surface 192a of the plate portion 192 of the flexible electrode 10 and the flat surface portion 39 of the base electrode 20 together.

[0147] Figure 19 is a view showing the flexible electrode 10 of Embodiment 6 in a state where the flexible electrode 10 is separated from the base electrode 20. Figure 20A view of the actuator 1 when a voltage is applied between the flexible electrode 10 and the base electrode 20.

[0148] like Figure 20 As shown, the control unit 65 of the drive circuit 60 controls switches 63a and 64a to the on state and switches 63b and 64b to the off state. Then, a voltage is applied between the flexible electrode 10 and the base electrode 20. In this case, the flow path wall 191 of the flexible electrode 10 deforms to approach the recessed surface portion 38. The main portion 191b of the flow path wall 191, which is the deformable portion 10a, acts as a support point at the position of the support edge 191a of the constraint member 40, deforming in the direction of approaching the recessed surface portion 38 along the direction intersecting with the groove 37. The main portion 191b of the flow path wall 191, which is the deformable portion 10a, reduces the gap G3 between the flow path wall 191 and the recessed surface portion 38. As a result, the volume of the flow path F decreases. The flow path wall 191 allows the target T4 to be discharged from the flow path F.

[0149] Therefore, the actuator 1 in Embodiment 6 can reduce the gap G3 between the flow path wall 191 and the recessed surface portion 38 by utilizing the deformation of the deformable portion 10a of the flow path wall 191, thereby reducing the volume of the flow path F and thus realizing the action of discharging the target T4 from the flow path F. The deformable portion 10a of the flow path wall 191 can serve as an output portion to output the work done by the actuator 1 to the outside.

[0150] exist Figure 19 Following the situation described, the control unit 65 of the drive circuit 60 controls switches 63b and 64b to the on state and switches 63a and 64a to the off state. Then, the voltage applied between the flexible electrode 10 and the base electrode 20 is stopped. In this case, due to the restoring force of the flexible electrode 10, the main part 191b of the flow path wall 191, which is the deformable part 10a, acts as a support point at the position of the support edge 191a of the constraint member 40, deforms in the direction intersecting the groove 37 and in the direction separating from the recessed surface part 38, and returns to the state as shown. ​ The original shape is shown. The gap G3 is increased and returns to its initial length before the voltage was applied. As a result, the volume of the flow path F increases. The flow path wall 191 allows the target T4 to be drawn into the flow path F.

[0151] Therefore, the actuator 1 of Embodiment 6, by utilizing the deformation of the deformable portion 10a of the flow path wall 191 to reduce or increase the volume of the flow path F, can realize the actions of discharging the target T4 from the flow path F and drawing the target T4 into the flow path F, i.e., the action of a pump. By providing a specific output form of its work, the actuator 1 of Embodiment 6 can realize actions that conventional soft actuators cannot achieve, such as the action of a pump.

[0152] As described above, the actuator 1 is an actuator having a flexible electrode 10 having flexibility and a base electrode 20 whose opposite surface 21 facing the flexible electrode 10 is covered with an insulating layer 22, and configured so that, when a voltage is applied between these electrodes, the flexible electrode 10 deforms to approach the opposite surface 21. The actuator 1 includes a constraint member 40 that constrains the flexible electrode 10 on the base electrode 20. The flexible electrode 10 has a deformed portion 10a that deforms when a voltage is applied between the flexible electrode and the base electrode. The deformed portion 10a deforms in a direction approaching the opposite surface 21 with the constraint member 40 serving as a support point.

[0153] Configured in this way, the actuator 1 can output its work in various forms, such as displacing a portion of the flexible electrode 10 other than the deformed portion 10a, another member of the actuator 1, or a target, using a space created when the deformed portion 10a deforms, when the deformed portion 10a deforms. The actuator 1 is capable of realizing various actions that a conventional soft actuator cannot realize, such as a jumping action, a throwing action, a collecting, storing, and discharging action, a capturing and releasing action, a tightening and loosening action, and a pump action. By giving a specific output form of its work, the actuator 1 can realize various actions.

[0154] Although embodiments of the present application have been described in detail above, the present application is not limited to these embodiments, and various changes can be made thereto without departing from the gist of the present application described in the claims. In the present application, components of one embodiment can be added to components of another embodiment, or components of one embodiment can be exchanged with components of another embodiment, or some components of one embodiment can be omitted.

Claims

1. An actuator having a flexible electrode and a base electrode, wherein, The flexible electrode has flexibility, and an opposite surface of the base electrode facing the flexible electrode is covered with an insulating layer, the actuator is configured so that when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposite surface, wherein: the actuator includes a constraint member that constrains the flexible electrode on the base electrode; the flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode; and the deformed portion deforms in a direction approaching the opposite surface with the constraint member acting as a support point, wherein the base electrode has a tubular portion that is closed at one end and open at the other end; an outer side surface of the tubular portion is the opposite surface of the base electrode; the constraint member is disposed outside the outer side surface of the tubular portion in a radial direction intersecting an axial direction of the tubular portion, and the constraint member constrains deformation of the flexible electrode in the radial direction and supports the flexible electrode so as to be slidable in the axial direction; the flexible electrode has a body portion supported by the constraint member so as to face the outer side surface in a state inclined with respect to the outer side surface, and a skirt portion continuous with the body portion and extending from the constraint member beyond the other end in the axial direction while expanding outside the constraint member in the radial direction; the body portion has the deformed portion; when the voltage is applied, the deformed portion of the body portion deforms in the radial direction in a direction approaching the outer side surface with the constraint member acting as a support point so as to pull the skirt portion in a direction from the other end toward the one end in the axial direction; and as the body portion pulls the skirt portion, a leading end of the skirt portion is displaced toward an inner side in the radial direction with the constraint member acting as a support point.

2. An actuator having a flexible electrode and a base electrode, wherein, The flexible electrode has flexibility, and an opposite surface of the base electrode facing the flexible electrode is covered with an insulating layer, the actuator is configured so that when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposite surface, wherein: the actuator includes a constraint member that constrains the flexible electrode on the base electrode; the flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode; and the deformed portion deforms in a direction approaching the opposite surface with the constraint member acting as a support point, wherein the opposite surface of the base electrode has a recessed surface portion recessed in a direction separating from the flexible electrode; the flexible electrode has one end surface facing the recessed surface portion and another end surface on a side opposite to the one end surface; a plurality of rod-shaped members are mounted on the another end surface of the flexible electrode; the flexible electrode has flexibility, and an opposite surface of the base electrode facing the flexible electrode is covered with an insulating layer, the actuator is configured so that when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposite surface, wherein: the actuator includes a constraint member that constrains the flexible electrode on the base electrode; the flexible electrode has a deformed portion that deforms when the voltage is applied between the flexible electrode and the base electrode; and the deformed portion deforms in a direction approaching the opposite surface with the constraint member acting as a support point, wherein the opposite surface of the base electrode has a recessed surface portion recessed in a direction separating from the flexible electrode; the flexible electrode has one end surface facing the recessed surface portion and another end surface on a side opposite to the one end surface; a plurality of rod-shaped members are mounted on the another end surface of the flexible electrode; a front end of the corresponding rod-shaped member is disposed apart from the other end surface; the constraint member constrains the flexible electrode on the base electrode by fixing edges of the one end surface and edges of the recessed surface portion to each other; the one end surface has the deformation portion; when the voltage is applied, the deformation portion of the one end surface deforms in a direction approaching the recessed surface portion with the constraint member serving as a support point; as the one end surface deforms, the other end surface deforms in a direction approaching the recessed surface portion; and as the other end surface deforms, the front end of the corresponding rod-shaped member is displaced in a direction of decreasing the interval.

3. An actuator having a flexible electrode and a base electrode, wherein, the flexible electrode has flexibility, and an opposite surface of the base electrode facing the flexible electrode is covered with an insulating layer, the actuator is configured such that, when a voltage is applied between the flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposite surface, wherein: the actuator includes a constraint member that constrains the flexible electrode on the base electrode; the flexible electrode has a deformation portion that deforms when the voltage is applied between the flexible electrode and the base electrode; and the deformation portion deforms in a direction approaching the opposite surface with the constraint member serving as a support point, wherein the flexible electrode has: an inner peripheral surface that, with a gap left between the inner peripheral surface and a predetermined axis in a radial direction intersecting the axis, encloses an outer periphery of the axis; and an outer peripheral surface disposed outside the inner peripheral surface in the radial direction; the base electrode is disposed to face the outer peripheral surface in the radial direction; the opposite surface of the base electrode has a recessed surface portion that is recessed in a direction separating from the outer peripheral surface; the constraint member constrains the flexible electrode on the base electrode by fixing edges of the outer peripheral surface and edges of the recessed surface portion to each other; the outer peripheral surface has the deformation portion; when the voltage is applied, the deformation portion of the outer peripheral surface deforms in a direction approaching the recessed surface portion along the radial direction with the constraint member serving as a support point; and as the outer peripheral surface deforms, the inner peripheral surface is displaced in a direction approaching the recessed surface portion along the radial direction so as to increase the gap.

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