Cross-moving surface and ultra-precision geometric error measuring instrument with dynamic compliance with the Abbe principle

Abstract

The cross-shaped moving surface and the ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle belong to precision measuring equipment. The machine is composed of a main frame base, a vertical support column, and an axle seat to form a frame. A cross-shaped moving surface equipped with a triangular laser mirror, a mirror mounting bracket, and a longitudinal laser mirror can be longitudinally and transversely moved and installed on the main frame base. The horizontal and vertical movement driving mechanisms composed of a horizontal air bearing sleeve, a vertical air bearing sleeve, a horizontal connecting piece, and a vertical connecting piece are installed on the moving seat and can drive the cross-shaped moving surface to move with high precision in the horizontal and vertical directions. The first laser interferometer, the second laser interferometer, the third laser interferometer, and the probe can be vertically moved through the vertical movement mechanism. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and geometric errors of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measuring equipment, and particularly relates to a cross moving surface and a super-precision geometric error measuring instrument that dynamically conforms to the Abbe principle. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Micro / nano technologies aiming at microfabrication, nanostructures, and systems have emerged accordingly, and various micro / nano-level micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, and micro-steps.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro / nano devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measured dimensions cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nanometer and picometer ranges have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro / nano-level devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measuring device that can measure the three-dimensional device dimensions and geometric errors and has a resolution in the micro / nano range to reliably evaluate the shape-complex micro / nano-level micro-devices.

[0004] The invention patent "Small Micro / Nano-Level Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro / nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component, and a probe head to design a small micro / nano-level coordinate measuring machine. This micro / nano coordinate measuring machine has a relatively low cost, but it cannot measure the dimensions and geometric errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide a cross moving surface and a super-precision geometric error measuring instrument that dynamically conforms to the Abbe principle, which can not only adapt to and meet the micro / nano-level precision measurement of the dimensions and geometric errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed, and high efficiency.

[0006] To achieve the above invention purpose, a technical solution provided by the present invention is as follows: A super-precision geometric error measuring instrument with a cross moving surface and dynamically conforming to the Abbe principle, in which vertical support columns are respectively installed on the left and right sides of the main frame; the shaft seat support is assembled on the vertical support columns;

[0007] The shaft seat is provided with a through vertical connection hole in the vertical direction, and an installation groove is provided on the inner wall of the vertical connection hole; a vertical shaft is inserted into the vertical connection hole in a vertically movable manner, an installation block is fixedly installed at the lower end of the vertical shaft, and a probe is installed on the lower end surface of the installation block;

[0008] On both vertical sides of the vertical shaft, fixing grooves are respectively provided at one end close to the probe. The buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove; a vertical shaft nano-motor is installed in the installation groove, and the output shaft of the vertical shaft nano-motor moves linearly and can drive the vertical shaft to slide in the vertical direction.

[0009] On the upper end surface of the main seat and inside two vertical support columns, a moving seat is equipped. Transverse air bearing bushings are respectively installed on the left and right sides of the moving seat. The left and right transverse air bearing bushings are connected by a transverse connecting piece. Longitudinal air bearing bushings are respectively installed on the front and rear sides of the moving seat. The front and rear longitudinal air bearing bushings are connected by a longitudinal connecting piece. An air bearing bushing upper cover is installed on the upper end of the transverse and longitudinal air bearing bushings to fix the cross movement surface. A sample fixing seat is equipped on the upper end surface of the cross movement surface. Mirror mounting brackets are installed on the left and right sides of the sample fixing seat. Triangular laser reflectors are symmetrically installed on the mirror mounting brackets respectively. A longitudinal laser reflector is fixedly installed at the rear of the mirror mounting bracket. The reflecting surfaces of the two triangular laser reflectors and the longitudinal laser reflector are perpendicular to each other. The two triangular laser reflectors and the longitudinal laser reflector are made of microcrystalline glass; a rotary shaft is installed inside the relative space of the two laser reflectors and the longitudinal laser reflector at the upper end of the sample fixing seat;

[0010] Laser interferometer mounting brackets are respectively installed on the left, right, and rear sides of the installation block. A first laser interferometer, a second laser interferometer, and a third laser interferometer are respectively installed on the corresponding laser interferometer mounting brackets. The laser light rays emitted by the first laser interferometer, the second laser interferometer, and the third laser interferometer are perpendicular to the corresponding laser interferometer reflecting surfaces respectively, and the ranging laser light rays among the three laser light rays are exactly converged at the measuring sphere center of the probe.

[0011] Preferably, the laser light rays emitted by the first laser interferometer, the second laser interferometer, and the third laser interferometer include multiple laser beams.

[0012] Preferably, during operation, the probe tip is located at the relative inner part between the two triangular laser reflectors and the longitudinal laser reflector;

[0013] Preferably, the cross movement surface drives the sample fixing seat to move horizontally and vertically, and the vertical movement mechanism controls the vertical shaft to move the probe in the vertical direction;

[0014] The third laser interferometer obtains a displacement of x″ and obtains a yaw angle of ry to obtain a pitch angle of r z ;

[0015] The second laser interferometer obtains a displacement of y″ and a rotation angle r x ;

[0016] The first laser interferometer obtains a vertical axis displacement of z″ by

[0017] Calculate the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula

[0018] The compensation formula is

[0019]

[0020] Preferably, in the instrument coordinate system, when measuring the workpiece to be measured, the cross movement surface drives the sample fixing seat to move horizontally and longitudinally, and the vertical movement mechanism controls the vertical axis to move the probe in the vertical direction; obtain the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N

[0021] The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through the conversion formula to obtain the coordinates (a i , b i , c i ), i = 1,..., N

[0022] The conversion formula is

[0023] where: θ = -45°

[0024] The rotary shaft drives the workpiece to be measured to rotate by an angle Rotation angle After that, the lateral air bearing sleeve drives the sample fixing seat to move longitudinally and horizontally, and the vertical axis nano motor controls the vertical axis to move the probe in the vertical direction; obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers

[0025] The surface coordinates (a2 j , b2 j , c2 j)Convert to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula is:

[0026]

[0027] Combine the coordinates (a j , b j , c j ) of a number of position points to be detected and the coordinate values (a i , b i , c i ) of a number of position points to be detected to obtain a set of surface coordinate sets (a i , b i , c i ), i = 1,..., N + K.

[0028] The present invention provides a cross moving surface and an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle. During the movement of the moving mechanism and the vertical axis provided, the first laser interferometer, the second laser interferometer, the third laser interferometer, two triangular laser reflectors and a longitudinal laser reflector can be driven to move respectively. The laser reflecting surfaces of the two triangular laser reflectors and the longitudinal laser reflector are perpendicular to each other in space; a hanging bracket is installed at the lower end of the vertical axis, a probe is installed at the lower end of the hanging bracket, the first laser interferometer, the second laser interferometer, and the third laser interferometer are installed on the hanging bracket, and the laser beams generated by the first laser interferometer, the second laser interferometer, and the third laser interferometer are respectively perpendicular to the corresponding laser reflecting surfaces of the two triangular laser reflectors and the longitudinal laser reflector, and the ranging laser beams in the laser beams converge at the center of the probe measuring sphere. Thus, an ultra-precision geometric error measuring instrument with a cross moving surface and dynamically conforming to the Abbe principle is formed.

[0029] Specifically, the technical innovation and good effects of the present invention are as follows:

[0030] 1) In the measurement structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line, and this structure eliminates the first-order measurement error and realizes high measurement accuracy.

[0031] 2) The present invention is designed to use a laser interferometer to detect the relative displacement and relative rotation between the probe and the workpiece to be measured in real time, and calibrate the measurement error caused by the rotation between the probe and the workpiece to be measured in real time, effectively improving the measurement accuracy.

[0032] 3) The laser measurement reference and the probe of the present invention are relatively stationary during the measurement process, dynamically conform to the Abbe principle, effectively eliminate the measurement error caused by the Abbe error in the dynamic measurement of the instrument, effectively reduce the measurement uncertainty of the instrument, and improve the measurement repeatability of the instrument.

[0033] In the sample moving mechanism of the present invention, the three-axis coplanar movement is realized through the combination of guide rails. Cooperating with the nano drive motor, the structure is compact and has strong stability, achieving high movement accuracy and large stroke within a small volume. Description of the Drawings

[0034] Figure 1 It is a schematic structural diagram of a cross movement surface and a super-precision form and position error measuring instrument that dynamically conforms to the Abbe principle of the present invention;

[0035] Figure 2 is Figure 1 A partial structural schematic diagram of a cross movement surface and a super-precision form and position error measuring instrument that dynamically conforms to the Abbe principle of the present invention;

[0036] Figure 3 It is a schematic diagram highlighting the driving mechanism in a cross movement surface and a super-precision form and position error measuring instrument that dynamically conforms to the Abbe principle of the present invention;

[0037] Figure 4 It is an exploded schematic diagram highlighting the moving mechanism in a cross movement surface and a super-precision form and position error measuring instrument that dynamically conforms to the Abbe principle of the present invention;

[0038] Figure 5 It is a schematic diagram highlighting the rotating shaft in a cross movement surface and a super-precision form and position error measuring instrument that dynamically conforms to the Abbe principle of the present invention.

[0039] Description of the part numbers in the figure:

[0040] 1-1, shaft seat; 1-2, vertical support column; 1-3, main machine seat; 2-1, mounting block; 2-2, laser interferometer mounting bracket; 2-3, probe; 2-4, first laser interferometer; 2-5, second laser interferometer; 2-6, third laser interferometer; 3-1, triangular laser reflector; 3-2, reflector mounting bracket; 3-3, horizontal air bearing sleeve; 3-4, air bearing sleeve upper cover; 3-5, moving seat; 3-6, cross movement surface; 3-7, horizontal connecting piece; 3-8, longitudinal connecting piece; 3-9, longitudinal air bearing sleeve; 3-10, sample fixing seat; 3-11, longitudinal laser reflector; 3-12, rotating shaft; 4, vertical moving mechanism; 4-1, vertical shaft; 4-2, vertical shaft nano motor; 4-3, buffer cylinder; 4-4, cylinder fixing block; 4-5, vertical connection hole; 4-6, mounting groove; 4-7, fixing groove; Detailed Implementation Modes

[0041] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0042] Embodiment

[0043] The present invention provides a cross motion surface and an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle. Refer to Figures 1-5 , vertical support columns 1-2 are respectively installed on the left and right sides of the main frame 1-3; the shaft seat 1-1 is supported and assembled on the vertical support column 1-2;

[0044] The shaft seat 1-1 is provided with a through vertical connection hole 4-5 along the vertical direction, and an installation groove 4-6 is provided on the inner wall of the vertical connection hole 4-5; a vertical shaft 4-1 is vertically and movably inserted into the vertical connection hole 4-5, an installation block 2-1 is fixedly installed at the lower end of the vertical shaft 4-1, and a probe 2-3 is installed on the lower end surface of the installation block 2-1;

[0045] On both vertical sides of the vertical shaft 4-1, fixing grooves 4-7 are respectively provided at one end close to the probe 2-3. The buffer cylinder 4-3 is fixedly installed on the inner wall of the vertical connection hole 4-5 by a cylinder fixing block 4-4, and the telescopic end of the buffer cylinder 4-3 is connected to the inner wall of the fixing groove 4-7; the vertical shaft nano motor 4-2 is installed in the installation groove 4-6, and the output shaft of the vertical shaft nano motor 4-2 moves linearly and can drive the vertical shaft 4-1 to slide vertically.

[0046] On the upper end face of the main base 1-3 and inside the two vertical support columns 1-2, a moving seat 3-5 is installed. On the left and right sides of the moving seat 3-5, horizontal air bearing sleeves 3-3 are respectively installed. The left and right horizontal air bearing sleeves 3-3 are connected by a horizontal connecting piece 3-7. On the front and rear sides of the moving seat 3-5, vertical air bearing sleeves 3-9 are respectively installed. The front and rear vertical air bearing sleeves 3-9 are connected by a vertical connecting piece 3-8. An air bearing sleeve upper cover 3-4 is installed on the upper ends of the horizontal and vertical air bearing sleeves to fix the cross movement surface 3-6. On the upper end face of the cross movement surface 3-6, a sample fixing seat 3-10 is installed. On the left and right sides of the sample fixing seat 3-10, mirror mounting brackets 3-2 are installed. Triangular laser reflectors 3-1 are symmetrically installed on the mirror mounting brackets 3-2 respectively. A vertical laser reflector 3-11 is fixedly installed on the rear side of the mirror mounting bracket 3-2. The reflecting surfaces of the two triangular laser reflectors 3-1 and the vertical laser reflector 3-11 are perpendicular to each other. The two triangular laser reflectors 3-1 and the vertical laser reflector 3-11 are made of microcrystalline glass. Inside the relative space of the two laser reflectors 3-1 and the vertical laser reflector 3-11, a rotating shaft 3-10 is installed at the upper end of the sample fixing seat 3-10.

[0047] On the left, right, and rear sides of the mounting block 2-1, a laser interferometer mounting bracket 2-2, a first laser interferometer 2-4, a second laser interferometer 2-5, and a third laser interferometer 2-6 are respectively installed on the corresponding laser interferometer mounting brackets 2-2. The laser light rays emitted by the first laser interferometer 2-4, the second laser interferometer 2-5, and the third laser interferometer 2-6 are respectively perpendicular to the corresponding laser interferometer reflecting surfaces, and the ranging laser light rays in the three laser light rays are exactly converged at the probe ball center of the probe 2-3.

[0048] Further, the laser light rays emitted by the first laser interferometer 2-4, the second laser interferometer 2-5, and the third laser interferometer 2-6 include multiple laser beams.

[0049] Further, during operation, the probe tip of the probe 2-3 is located at the relative inner part of the two triangular laser reflectors 3-1 and the vertical laser reflector 3-11.

[0050] Among them, the vertical axis nano motor 4-2 mentioned above is a prior art, which can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other driving motors that can achieve linear movement, and is not limited here.

[0051] When the workpiece to be measured installed on the rotating shaft 3-12 moves horizontally or vertically, or when the vertical axis moves vertically, three angular errors will be generated, namely pitch angle, yaw angle, and rotation angle. The pitch angle refers to the angle value r generated by the rotation of the sample fixing seat 3-10 around the axis direction of the laser light ray of the second laser interferometer 2-5. y, the rotation angle refers to the angular value r generated by the rotation of the sample fixing seat 3-10 around the axis direction of the laser beam of the third laser interferometer 2-6 x , the yaw angle is the angular value r generated by the rotation of the sample fixing seat 3-10 around the axis direction of the laser beam of the first laser interferometer 2-4 z , during the measurement process of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacement caused by the pitch angle, yaw angle, and rotation angle.

[0052] Furthermore, the cross motion surface 3-6 drives the sample fixing seat 3-10 to move horizontally and vertically, and the vertical moving mechanism 4 controls the vertical movement of the vertical axis 4-1 to move the probe 2-3; the third laser interferometer 2-6 obtains a displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ; the second laser interferometer 2-5 obtains a displacement of y″ and a rotation angle r x ; the first laser interferometer 2-4 obtains a vertical axis displacement of z″; calculates the compensated horizontal axis displacement x′, vertical axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; the compensation formula is:

[0053]

[0054] Furthermore, in the instrument coordinate system, when measuring the workpiece to be measured, the cross motion surface 3-6 drives the sample fixing seat 3-10 to move horizontally and vertically, and the vertical moving mechanism 4 controls the vertical movement of the vertical axis 4-1 to move the probe 2-3; when the probe 2-3 contacts the workpiece to be measured and the feedback of the probe 2-3 reaches the set threshold, this contact position is the position point to be detected.

[0055] In the instrument coordinate system, when the probe 2-3 and the workpiece to be measured move relative to each other, the probe 2-3 and the workpiece to be measured are continuously moved into contact. When the probe 2-3 contacts the workpiece to be measured, this contact position is set as the i-th position point to be detected. According to the displacement values compensated by the first laser interferometer 2-4, the second laser interferometer 2-5, and the third laser interferometer 2-6, in the instrument coordinate system, the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, where i = 1,..., N; the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N need to be converted to the standard coordinate system through transformation formula 1 to obtain the coordinates (a i , b i , c i ), where i = 1,..., N

[0056] The conversion formula 1 is as follows:

[0057] Where: θ = -45°

[0058] If the rotating shaft 3-12 is used in conjunction with the measurement, the rotating shaft 3-12 drives the sample to be measured to rotate by an angle Rotating angle After that, the transverse air bearing sleeve 3-5 drives the sample fixing seat 3-10 to move longitudinally and transversely, and the vertical shaft nano-motor 4-2 controls the vertical shaft 4-1 to move the probe 2-3 in the vertical direction; the coordinates (a2 j , b2 j , c2 j ) of the j-th position to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers;

[0059] Since the rotating shaft 3-12 drives the sample to be measured to rotate, when the probe 2-3 contacts the sample to be measured before rotation, this contact position is set as the i-th position to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, where i = 1,..., N; after rotation, when the probe 2-3 contacts the sample to be measured, this contact position is set as the j-th position to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained, where j = N + 1,..., N + K. The coordinate system also changes, and the new set of coordinate values (a2 j , b2 j , c2 j ) obtained after rotation, where j = N + 1,..., N + K, need to be processed through the conversion formula 2.

[0060] The surface coordinates (a2 j , b2 j , c2 j ) are converted to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula 2 is as follows:

[0061]

[0062] The coordinates (a j , b j , c j ) of several positions to be detected and the coordinate values (a i , b i , ci ) Combine to obtain a set of surface coordinate sets (a i , b i , c i ) of the parts to be measured, where i = 1,..., N + K.

[0063] If the rotary shaft 3-12 is not used, the displacements are measured according to the first laser interferometer 2-4, the second laser interferometer 2-5, and the third laser interferometer 2-6. After the probe determines a qualified contact once, based on the displacements measured by each laser interferometer, through error compensation and data processing, a measuring point coordinate on the surface of the part to be measured can be obtained. By processing several measuring point coordinates on the surface of the part to be measured, high-precision measurement of the shape and position errors of the part to be measured with a complex shape can be achieved.

[0064] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0065] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection, an electrical connection. It can be directly connected, or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0066] The above-described embodiments only express the implementation manners of the present invention, and the description is relatively specific and detailed, but it cannot be understood as a limitation to the scope of the patent of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A cross-moving surface and an ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle, characterized in that: Vertical support columns (1-2) are respectively installed on the left and right sides of the main frame (1-3); the shaft seat (1-1) is supported and assembled on the vertical support column (1-2). The shaft seat (1-1) is provided with a through vertical connection hole (4-5) along the vertical direction, and an installation groove (4-6) is provided on the inner wall of the vertical connection hole (4-5); a vertical shaft (4-1) is inserted into the vertical connection hole (4-5) so as to be vertically movable up and down, an installation block (2-1) is fixedly installed at the lower end of the vertical shaft (4-1), and a probe (2-3) is installed on the lower end surface of the installation block (2-1). On both vertical sides of the vertical shaft (4-1), fixing grooves (4-7) are respectively provided at one end close to the probe (2-3). The buffer cylinder (4-3) is fixedly installed on the inner wall of the vertical connection hole (4-5) by a cylinder fixing block (4-4), and the telescopic end of the buffer cylinder (4-3) is connected to the inner wall of the fixing groove (4-7); the vertical shaft nano-motor (4-2) is installed in the installation groove (4-6), and the output shaft of the vertical shaft nano-motor (4-2) moves linearly and can drive the vertical shaft (4-1) to slide along the vertical direction. On the upper end surface of the main frame (1-3) and inside the two vertical support columns (1-2), a moving seat (3-5) is assembled. Transverse air floating bushings (3-3) are respectively assembled on the left and right sides of the moving seat (3-5). The left and right transverse air floating bushings (3-3) are connected by a transverse connecting piece (3-7). Longitudinal air floating bushings (3-9) are respectively assembled on the front and rear sides of the moving seat (3-5). The front and rear longitudinal air floating bushings (3-9) are connected by a longitudinal connecting piece (3-8). An air floating bushing upper cover (3-4) is installed on the upper ends of the transverse air floating bushing (3-3) and the longitudinal air floating bushing (3-9) to fix the cross movement surface (3-6). A sample fixing seat (3-10) is assembled on the upper end surface of the cross movement surface (3-6). Mirror mounting brackets (3-2) are installed on the left and right sides of the sample fixing seat (3-10). Triangular laser reflectors (3-1) are symmetrically installed on the mirror mounting brackets (3-2) respectively. A longitudinal laser reflector (3-11) is fixedly installed at the rear of the mirror mounting bracket (3-2). The reflecting surfaces of the two triangular laser reflectors (3-1) and the longitudinal laser reflector (3-11) are perpendicular to each other. The two triangular laser reflectors (3-1) and the longitudinal laser reflector (3-11) are made of microcrystalline glass; a rotating shaft (3-12) is installed inside the relative space of the two laser reflectors (3-1) and the longitudinal laser reflector (3-11) at the upper end of the sample fixing seat (3-10). On the left, right, and rear sides of the mounting block (2-1), a laser interferometer mounting bracket (2-2), a first laser interferometer (2-4), a second laser interferometer (2-5), and a third laser interferometer (2-6) are respectively installed on the corresponding laser interferometer mounting brackets (2-2). The laser beams emitted by the first laser interferometer (2-4), the second laser interferometer (2-5), and the third laser interferometer (2-6) are respectively perpendicular to the corresponding laser interferometer reflecting mirrors, and the ranging laser beams among the three laser beams are exactly converged at the measuring ball center of the probe (2-3).

2. The cross-moving surface and the ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, characterized in that: The laser beams emitted by the first laser interferometer (2-4), the second laser interferometer (2-5), and the third laser interferometer (2-6) include multiple laser beams.

3. The cross-moving surface and the ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, characterized in that: During operation, the probe tip of the probe (2-3) is located at the relatively inner parts of the two triangular laser reflectors (3-1) and the longitudinal laser reflector (3-11).

4. The ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, characterized in that: The cross-movement surface (3-6) drives the sample fixing seat (3-10) to move horizontally and longitudinally, and the vertical movement mechanism (4) controls the vertical movement of the vertical axis (4-1) to move the probe (2-3). The third laser interferometer (2-6) obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The second laser interferometer (2-5) obtains a displacement of y″ and obtains a rotation angle r x ; The first laser interferometer (2-4) obtains the vertical axis displacement as z″. Calculate the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula. The compensation formula is:

5. The ultra-precision geometric error measuring instrument that dynamically conforms to the Abbe principle according to claim 1, characterized in that: In the instrument coordinate system, when measuring the workpiece to be measured, the cross movement surface (3-6) drives the sample fixing seat (3-10) to move horizontally and longitudinally, and the vertical movement mechanism (4) controls the vertical axis (4-1) to move the probe (2-3) in the vertical direction; the coordinates (a′ i , b′ i , c′ i ) of the i-th position point to be detected are obtained, where i = 1,..., N; The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N, need to be transformed into the standard coordinate system through the transformation formula (1) to obtain the coordinates (a i , b i , c i ), i = 1,..., N The conversion formula (1) is as follows: Where: θ = -45° The rotating shaft (3-12) drives the sample to be measured to rotate by an angle Rotation angle After that, the horizontal air bearing sleeve (3-3) drives the sample fixing seat (3-10) to move longitudinally and transversely, and the vertical shaft nano motor (4-2) controls the vertical shaft (4-1) to move the probe (2-3) in the vertical direction; the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula (2) is: Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the part to be measured (a i , b i , c i ), where i = 1,..., N + K.

Images