Form and position error measuring instrument with separate orthogonal measurement reference and cross-moving surface matching

Abstract

The present invention relates to a split orthogonal measurement reference and a shape and position error measuring instrument with a cross-shaped moving surface, belonging to the technical field of precision measurement equipment. It includes a main machine base and vertical support columns. The tops of the two vertical support columns are provided with shaft seats; a sample fixing seat is arranged on the upper side of the main machine base, and a moving mechanism is arranged on the main machine base; a transverse laser reflector and a longitudinal laser reflector are vertically arranged on the upper side surface of the sample fixing seat; a vertical shaft is slidably arranged in the vertical direction on the shaft seat; a vertical laser reflector is arranged at the upper end of the vertical shaft, a hanging frame is installed at the lower end of the vertical shaft, and a transverse laser interferometer and a longitudinal laser interferometer are arranged at the lower end of the hanging frame; a probe is arranged in the middle of the lower end of the vertical shaft; a vertical support frame is arranged on the upper side of the shaft seat, and a vertical laser interferometer is arranged on the vertical support frame. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and shape and position errors of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement equipment, and particularly relates to a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-moving surface fit. Background Technique

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Under this background, micro / nano technologies aiming at micron processing, nano structures and systems have emerged, and various micro / nano-level micro-devices have appeared, such as MEMS products like micro gears, micro holes, micro nozzles, micro steps, etc.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro / nano devices with geometric dimensions between dozens of microns and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measurement size cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolution in the nano and picometer ranges have a small measurement range and short probes, and cannot meet the three-dimensional measurement requirements of micro / nano-level devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measurement device that can measure the three-dimensional device size and form and position errors and has a resolution in the micro / nano range to reliably evaluate micro / nano-level micro-devices with complex shapes.

[0004] The invention patent "Small Micro / Nano-Level Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro / nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component and a probe to design a small micro / nano-level coordinate measuring machine. This micro / nano coordinate measuring machine has a relatively low cost, but it cannot measure the size and form and position errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-moving surface fit, which can not only adapt to and meet the micro / nano-level precision measurement of the size and form and position errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed and high efficiency.

[0006] In order to achieve the above-mentioned invention purpose, a technical solution provided by the present invention is as follows:

[0007] A form and position error measuring instrument with a separable orthogonal measurement reference and a cross-shaped moving surface combination, comprising a main base. Vertical support columns are arranged at intervals on the upper side of the main base, and a shaft seat is arranged at the top of the two vertical support columns. A sample fixing seat is arranged on the upper side of the main base and between the two vertical support columns, and a moving mechanism for controlling the horizontal movement of the sample fixing seat is arranged on the main base. On the upper side surface of the sample fixing seat and at the edge position, a transverse laser reflector and a longitudinal laser reflector are arranged vertically, and the transverse laser reflector and the longitudinal laser reflector are perpendicular to each other. A vertical shaft is slidably arranged on the shaft seat in the vertical direction, and a driving mechanism for controlling the vertical movement of the vertical shaft is arranged on the shaft seat. A vertical laser reflector is horizontally arranged at the upper end of the vertical shaft, a hanging frame is fixedly installed at the lower end of the vertical shaft, and a transverse laser interferometer and a longitudinal laser interferometer are arranged at the lower end of the hanging frame. The transverse laser interferometer is perpendicular to the mirror surface of the transverse laser reflector; the longitudinal laser interferometer is perpendicular to the mirror surface of the longitudinal laser reflector. A probe for abutting against a measured sample placed on the upper side of the sample fixing seat is arranged in the middle of the lower end of the vertical shaft. A vertical support frame is arranged on the upper side of the shaft seat, and a vertical laser interferometer is arranged on the vertical support frame and above the vertical laser reflector.

[0008] Preferably, the moving mechanism includes a fixed seat fixed on the upper side of the main base. The fixed seat includes a moving block on the upper side and support blocks around the moving block. A cross-shaped moving frame is arranged above the fixed seat, and a transverse moving component for driving the cross-shaped moving frame to move horizontally and a longitudinal moving component for driving the cross-shaped moving frame to move longitudinally are arranged on the moving block.

[0009] Preferably, the transverse moving component includes a C-shaped transverse air bearing sleeve. The transverse air bearing sleeve is sleeved on the edge of the moving block, and a group is arranged on each of the two relatively parallel sides of the moving block. A first horizontal linear driving motor is arranged inside the transverse air bearing sleeve, and the driving end of the first horizontal linear driving motor is connected to the moving block. A transverse connecting plate is connected between the two groups of transverse air bearing sleeves and on the upper side of the moving block. A first sliding hole is opened on the transverse air bearing sleeve and above the transverse connecting plate, and the two relatively far sides of the cross-shaped moving frame slide in the first sliding hole respectively.

[0010] Preferably, the longitudinal moving component includes a longitudinally-shaped air-bearing sleeve in a C shape. The longitudinally-shaped air-bearing sleeve is sleeved on the edge of the moving block, and a set is respectively arranged on two relatively parallel sides of the moving block. A second horizontal linear driving motor is arranged inside the longitudinally-shaped air-bearing sleeve, and the driving end of the second horizontal linear driving motor is connected to the moving block. A longitudinal connecting plate is connected between two sets of longitudinally-shaped air-bearing sleeves and below the moving block. The moving direction of the longitudinally-shaped air-bearing sleeve is perpendicular to the moving direction of the laterally-shaped air-bearing sleeve. A second sliding hole is formed above the moving block on the longitudinally-shaped air-bearing sleeve. Two ends of the cross-shaped moving frame away from the first sliding hole are respectively slidably connected inside the second sliding hole.

[0011] Preferably, the shaft seat is provided with a vertically penetrating vertical connecting hole in the vertical direction. An installation groove is formed on the inner wall of the vertical connecting hole. The driving mechanism includes a vertical shaft nano-motor fixed in the installation groove. The output shaft of the vertical shaft nano-motor moves linearly and can drive the vertical shaft to slide in the vertical direction.

[0012] Preferably, fixing grooves are respectively formed at two vertical sides of the vertical shaft and at one end away from the vertical laser reflector. A buffer cylinder is arranged in the fixing groove. The buffer cylinder is fixedly installed on the inner wall of the vertical connecting hole, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove. The buffer cylinder compensates for the gravity of the vertical shaft.

[0013] Preferably, a rotating shaft is arranged on the sample fixing seat, and the sample to be measured is placed at the upper end of the rotating shaft. An angle measuring mechanism for detecting the rotation angle of the rotating shaft is arranged inside the sample fixing seat.

[0014] Preferably, covers are respectively formed above the first sliding hole and the second sliding hole on the laterally-shaped air-bearing sleeve and the longitudinally-shaped air-bearing sleeve. The covers can open or close the first sliding hole and the second sliding hole.

[0015] Preferably, the lateral moving component controls the lateral movement of the sample fixing seat, the longitudinal moving component controls the longitudinal movement of the sample fixing seat, the driving mechanism controls the vertical movement of the vertical shaft to move the probe; the lateral laser interferometer obtains the lateral shaft displacement as x″ and obtains the yaw angle as r y , and obtains the pitch angle as r z ; the longitudinal laser interferometer obtains the longitudinal shaft displacement as y″ and obtains the rotation angle r x ; the vertical laser interferometer obtains the vertical shaft displacement as z″; the compensated lateral shaft displacement x′, longitudinal shaft displacement y′, and vertical shaft displacement z′ of the sample to be measured are calculated according to the supplementary formula; the supplementary formula is:

[0016]

[0017] Preferably, when measuring the component under test in the coordinate system of the component under test, the lateral movement assembly controls the lateral movement of the sample fixing seat, the longitudinal movement assembly controls the longitudinal movement of the sample fixing seat, and the driving mechanism controls the vertical movement of the vertical shaft. The coordinates (a i , b i , c i ) of the i-th position point to be detected are measured, where i = 1,..., N; the rotary shaft drives the component under test to rotate by an angle Rotation angle . After that, the lateral movement assembly controls the lateral movement of the sample fixing seat, the longitudinal movement assembly controls the longitudinal movement of the sample fixing seat, and the driving mechanism controls the vertical movement of the vertical shaft. The coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K. The surface coordinates (a2 j , b2 j , c2 j ) are converted into the coordinate system of the component under test through the conversion formula to obtain the coordinates (a j , b j , c j ). The conversion formula is as follows:

[0018]

[0019] Combining several coordinates (a j , b j , c j ) of the position points to be detected and several coordinate values (a i , b i , c i ), a set of surface coordinate sets (a i , b i , c i ) of the component under test are obtained, where i = 1,..., N + K.

[0020] The present invention provides a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-moving surface cooperation. When the moving mechanism and the vertical axis are set and during their movement, they can drive the sample fixing seat, the transverse laser mirror, the longitudinal laser mirror, the vertical laser mirror, the transverse laser interferometer, the longitudinal laser interferometer, and the vertical laser interferometer to move respectively. The vertical laser mirror, the transverse laser mirror, and the longitudinal laser mirror are orthogonally arranged in space; a hanging bracket is installed at the lower end of the vertical axis, the probe is installed at the lower end of the hanging bracket, the transverse laser interferometer and the longitudinal laser interferometer are installed on the hanging bracket, and the laser beams generated by the transverse laser interferometer, the longitudinal laser interferometer, and the vertical laser interferometer are perpendicular to the transverse laser mirror, the longitudinal laser mirror, and the vertical laser mirror respectively, and the ranging laser beams in the laser beams converge at the center of the probe measuring sphere. Thus, a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-moving surface cooperation is formed.

[0021] The present invention eliminates the Abbe error in the X, Y, and Z measurement directions, improves the measurement accuracy. Using a laser interferometer to measure displacement, sub-nanometer measurement accuracy can be obtained in the XYZ three-axis directions, and its accuracy is much higher than that of traditional dimensional and form and position error measuring instruments. It has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability.

[0022] Specifically, the technical innovation and the good effects produced by the present invention are as follows:

[0023] 1) In the measurement structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line, and this structure eliminates the first-order measurement error and realizes high measurement accuracy.

[0024] 2) The present invention proposes to set a Z-direction displacement laser measurement device outside the instrument body. The design of separating from the instrument body can effectively eliminate the Z-direction measurement error caused by the vibration and deformation of the instrument itself; at the same time, X-direction and Y-direction displacement laser measurement devices and angle measurement devices synchronized with the probe are set in the X and Y directions, which can accurately measure the relative deflection angles between the probe and the measured part in the three-axis directions, realize real-time compensation of measurement errors, and effectively improve the measurement accuracy.

[0025] In the sample movement mechanism of the present invention, the three-axis coplanar movement is realized through the combination of air-floating guides, and together with the nano drive motor, high movement accuracy and large stroke are realized within a small volume. Brief Description of the Drawings

[0026] Figure 1 It is a schematic structural diagram of a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-moving surface cooperation according to the present invention;

[0027] Figure 2 is Figure 1Schematic diagram of a partial structure of a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-shaped moving surface

[0028] Figure 3 Schematic diagram highlighting the driving mechanism in a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-shaped moving surface according to the present invention

[0029] Figure 4 Explosion schematic diagram highlighting the moving mechanism in a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-shaped moving surface according to the present invention

[0030] Figure 5 Schematic diagram highlighting the rotating shaft in a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-shaped moving surface according to the present invention

[0031] Reference numerals in the figure:

[0032] 100, main machine base; 200, vertical support column; 300, shaft seat; 310, vertical connection hole; 320, installation groove; 400, sample fixing seat; 410, horizontal laser reflector; 420, longitudinal laser reflector; 430, rotating shaft; 500, moving mechanism; 510, fixed seat; 511, moving block; 512, support block; 520, cross-shaped moving frame; 530, horizontal moving component; 531, horizontal air bearing sleeve; 531a, first sliding hole; 532, horizontal connecting plate; 533, cover; 540, longitudinal moving component; 541, longitudinal air bearing sleeve; 541a, second sliding hole; 542, longitudinal connecting plate; 600, vertical shaft; 600a, fixing groove; 610, vertical laser reflector; 620, hanging frame; 630, horizontal laser interferometer; 640, longitudinal laser interferometer; 650, probe; 700, driving mechanism; 710, vertical shaft nanomotor; 720, buffer cylinder; 800, vertical support frame; 810, vertical laser interferometer. Detailed implementation manners

[0033] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0034] Embodiment

[0035] The present invention provides a form and position error measuring instrument with a separated orthogonal measurement reference and a cross-shaped moving surface. Refer to Figures 1-5, including a main frame 100, vertical support columns 200 are arranged at intervals on the upper side of the main frame 100, and a shaft seat 300 is arranged at the top of the two vertical support columns 200; a sample fixing seat 400 is arranged on the upper side of the main frame 100 and between the two vertical support columns 200, and a moving mechanism 500 for controlling the horizontal movement of the sample fixing seat 400 is arranged on the main frame 100; on the upper side surface of the sample fixing seat 400 and at the edge position, a transverse laser reflector 410 and a longitudinal laser reflector 420 are arranged vertically, and the transverse laser reflector 410 and the longitudinal laser reflector 420 are perpendicular to each other; a vertical shaft 600 is slidably arranged vertically on the shaft seat 300; a driving mechanism 700 for controlling the vertical movement of the vertical shaft 600 is arranged on the shaft seat 300; a vertical laser reflector 610 is arranged horizontally at the upper end of the vertical shaft 600, a hanging frame 620 is fixedly installed at the lower end of the vertical shaft 600, and a transverse laser interferometer 630 and a longitudinal laser interferometer 640 are arranged at the lower end of the hanging frame 620; the transverse laser interferometer 630 is perpendicular to the mirror surface of the transverse laser reflector 410; the longitudinal laser interferometer 640 is perpendicular to the mirror surface of the longitudinal laser reflector 420; a probe 650 capable of abutting against a measured sample placed on the upper side of the sample fixing seat 400 is arranged in the middle of the lower end of the vertical shaft 600; a vertical support frame 800 is arranged on the upper side of the shaft seat 300, and a vertical laser interferometer 810 is arranged on the vertical support frame 800 and above the vertical laser reflector 610.

[0036] The moving mechanism 500 includes a fixed seat 510 fixed on the upper side of the main frame 100. The fixed seat 510 includes a moving block 511 on the upper side and support blocks 512 around the moving block 511.

[0037] A cross-shaped moving frame 520 is arranged above the fixed seat 510. A transverse moving component 530 for driving the cross-shaped moving frame 520 to move horizontally and a longitudinal moving component 540 for driving the cross-shaped moving frame 520 to move longitudinally are arranged on the moving block 511.

[0038] The lateral movement component 530 includes a laterally air-floating bushing 531 in a C shape. The laterally air-floating bushing 531 is sleeved on the edge of the moving block 511, and a set is provided on each of the two relatively parallel sides of the moving block 511. A first horizontal linear drive motor is arranged inside the laterally air-floating bushing 531, and the drive end of the first horizontal linear drive motor is connected to the moving block 511. A lateral connecting plate 532 is connected between the two sets of laterally air-floating bushings 531 and above the moving block 511. On the laterally air-floating bushing 531 and above the lateral connecting plate 532, a first sliding hole 531a is formed. The two relatively remote pairs of the cross-shaped moving frame 520 slide in the first sliding hole 531a respectively. During operation, the first horizontal linear drive motor can control the linear sliding of the laterally air-floating bushing 531 along the edge of the moving block 511. During the sliding process, the cross-shaped moving frame 520 is driven to move laterally. Through the provided first sliding hole 531a, when the longitudinal movement component 540 controls the longitudinal movement of the cross-shaped moving frame 520, the cross-shaped moving frame 520 can slide in the first sliding hole 531a.

[0039] The longitudinal movement component 540 includes a longitudinally air-floating bushing 541 in a C shape. The longitudinally air-floating bushing 541 is sleeved on the edge of the moving block, and a set is provided on each of the two relatively parallel sides of the moving block 511. A second horizontal linear drive motor is arranged inside the longitudinally air-floating bushing 541, and the drive end of the second horizontal linear drive motor is connected to the moving block 511. A longitudinal connecting plate 542 is connected between the two sets of longitudinally air-floating bushings 541 and below the moving block 511. The moving direction of the longitudinally air-floating bushing 541 is perpendicular to the moving direction of the laterally air-floating bushing 531. On the longitudinally air-floating bushing 541 and above the moving block 511, a second sliding hole 541a is formed. The two ends of the cross-shaped moving frame far from the first sliding hole 531a are respectively slidably connected in the second sliding hole 541a. During operation, the second horizontal linear drive motor can control the movement of the longitudinally air-floating bushing 541 along the edge of the moving block 511, and the cross-shaped moving frame 520 can be driven to move longitudinally during the movement process. Through the provided second sliding hole 541a, when the lateral movement component 530 controls the lateral movement of the cross-shaped moving frame 520, the cross-shaped moving frame 520 can slide through the second sliding hole 541a, avoiding interference with the drive of the longitudinal movement component 540.

[0040] Furthermore, on the laterally air-floating bushing 531 and the longitudinally air-floating bushing 541, covers 533 are respectively formed above the first sliding hole 531a and the second sliding hole 541a, and the covers 533 can open or close the first sliding hole 531a and the second sliding hole 541a.

[0041] The seat 300 is provided with a vertically penetrating vertical connection hole 310 in the vertical direction; an installation groove 320 is formed on the inner wall of the vertical connection hole 310;

[0042] The drive mechanism 700 includes a vertical-axis nano motor 710 fixed in the installation groove 320. The output shaft of the vertical-axis nano motor 710 moves linearly and can drive the vertical shaft 600 to slide in the vertical direction.

[0043] Furthermore, on both vertical sides of the vertical shaft 600 and at one end far from the vertical laser mirror 610, fixing grooves 600a are respectively provided. Buffer cylinders 720 are arranged in the fixing grooves 600a. The buffer cylinders 720 are fixedly installed on the inner wall of the vertical connection hole 310, and the telescopic ends of the buffer cylinders 720 are connected to the inner wall of the fixing grooves 600a. Among them, the buffer cylinders 720 perform gravity compensation on the vertical shaft 600.

[0044] In one embodiment, a rotating shaft 430 is provided on the sample fixing base 400, and the sample to be measured is placed on the upper end of the rotating shaft 430; an angle measuring mechanism for detecting the rotation angle of the rotating shaft 430 is arranged inside the sample fixing base 400.

[0045] Finally, it should be noted that the transverse laser mirror 410, the longitudinal laser mirror 420, and the vertical laser mirror 610 can be made of microcrystalline glass. The first horizontal linear drive motor, the second horizontal linear drive motor, and the vertical shaft 600 nano motor mentioned above are prior arts, and they can be the linear motors in the paper

[0046] "A Biped-Driven Piezoelectric Linear Motor", or other drive motors that can achieve linear movement, which are not limited here.

[0047] When the sample fixing base moves horizontally or longitudinally, or the vertical shaft moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the roll angle. The pitch angle refers to the angular value r generated by the sample fixing base around the Y axis y The roll angle refers to the angular value r generated by the sample fixing base around the X axis x The yaw angle refers to the angular value r generated by the sample fixing base around the Z axis z Among them, during the measurement process of the instrument, it is necessary to compensate for the measurement errors of the three-axis displacements caused by the pitch angle, the yaw angle, and the roll angle.

[0048] The compensation process is as follows. The sample fixing base 400 is controlled to move horizontally by the horizontal moving assembly 530, the sample fixing base 400 is controlled to move longitudinally by the longitudinal moving assembly 540, the drive mechanism 700 controls the vertical shaft 600 to move in the vertical direction, the horizontal laser interferometer 630 obtains the horizontal axis displacement as x", and obtains the pitch angle as r y and obtains the yaw angle as r z ; the longitudinal laser interferometer 640 obtains the longitudinal axis displacement as y″ and obtains the roll angle r x; The vertical axis displacement z" is obtained by the vertical laser interferometer 810. The pitch angle r is measured. y , the yaw angle r z , the rotation angle r x After that, based on the pitch angle, yaw angle, and rotation angle, the supplementary formula is used to compensate the lateral axis displacement x″, longitudinal axis displacement y″, and vertical axis displacement z″ to obtain the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′. The supplementary formula is:

[0049]

[0050] When measuring the workpiece to be measured, in the instrument coordinate system, the sample fixing seat 400 is controlled to move laterally by the lateral moving component 530, the sample fixing seat 400 is controlled to move longitudinally by the longitudinal moving component 540, the driving mechanism 700 controls the vertical shaft 600 to move in the vertical direction, and the probe 650 is used to measure the workpiece to be measured. When the probe 650 contacts the workpiece to be measured and the feedback of the probe 650 reaches the set threshold, this contact position is the position point to be detected.

[0051] In the coordinate system of the workpiece to be measured, when the probe 650 and the workpiece to be measured move relative to each other, the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ can be obtained. Continuously move the probe 650 to contact the workpiece to be measured. When the probe 650 contacts the workpiece to be measured, this contact position is set as the i-th position point to be detected. According to the axial displacements in the lateral, longitudinal, and vertical directions, in the instrument coordinate system, the coordinate values (a i , b i , c i ) of the i-th group of position points to be detected can be obtained, where i = 1,..., N.

[0052] If the rotary shaft 430 is used for cooperative measurement, after the rotary shaft 430 drives the workpiece to be measured to rotate by an angle , the probe 650 is moved again to measure the workpiece to be measured. According to the axial displacements in the lateral, longitudinal, and vertical directions, the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are measured in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers.

[0053] Since the rotary shaft 430 drives the workpiece to be measured to rotate, when the probe 650 contacts the workpiece to be measured before rotation, this contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i), i = 1, ..., N; after rotation, when the probe 650 contacts the sample to be measured, the contact position is set as the j-th position point to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained. The coordinate system where j = N + 1, …, N + K has also changed. It is necessary to process this new set of coordinate values (a2 j , b2 j , c2 j ), j = N + 1, …, N + K through the conversion formula and map them to the same coordinate system, that is, transform them to the coordinate system of the part to be measured. The processed coordinate values are (a j , b j , c j ). Among them, the conversion formula is:

[0054]

[0055] The coordinates of several position points to be detected (a j , b j , c j ) and the coordinate values of several position points to be detected (a i , b i , c i ) are combined to finally obtain a set of surface coordinate sets of the part to be measured (a i , b i , c i ), i = 1, ..., N + K. A set of surface coordinates of the part to be measured above includes the coordinates of several position points to be detected.

[0056] Based on this set of surface coordinate sets of the part to be measured (a i , b i , c i ), i = 1, ..., N + K, the dimensions and form and position errors of the part to be measured can be quickly evaluated.

[0057] When the rotary shaft 430 is not installed, the displacements of each axis x′, y′, z′ can be measured by the horizontal laser interferometer 630, the vertical laser interferometer 640, and the vertical laser interferometer 810. After one qualified contact is determined by the probe, based on the displacements of each axis x′, y′, z′, after error compensation and data processing, a measuring point coordinate (x, y, z) on the surface of the part to be measured can be obtained. By measuring several measuring points on the surface of the part to be measured, high-precision measurement of the form and position errors of the part to be measured with a complex shape can be achieved.

[0058] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0059] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "coupled" shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection, an electrical connection; it may be a direct connection, or an indirect connection through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0060] The above-described embodiments only represent the implementation manners of the present invention, and the description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the appended claims.

Claims

1. A form and position error measuring instrument with a separated orthogonal measurement reference and a cross-moving surface fit, characterized in that : It includes a main base (100), and vertical support columns (200) are arranged at intervals on the upper side of the main base (100). An axle seat (300) is arranged at the top of the two vertical support columns (200); On the upper side of the main base (100) and between the two vertical support columns (200), a sample fixing seat (400) is arranged. A moving mechanism (500) for controlling the horizontal movement of the sample fixing seat (400) is arranged on the main base (100); On the upper side surface of the sample fixing seat (400) and at the edge position, a transverse laser reflector (410) and a longitudinal laser reflector (420) are vertically arranged. The transverse laser reflector (410) and the longitudinal laser reflector (420) are perpendicular to each other; A vertical shaft (600) is slidably arranged on the axle seat (300) in the vertical direction; a driving mechanism (700) for controlling the vertical movement of the vertical shaft (600) is arranged on the axle seat (300); A vertical laser reflector (610) is horizontally arranged at the upper end of the vertical shaft (600). A hanging frame (620) is fixedly installed at the lower end of the vertical shaft (600). A transverse laser interferometer (630) and a longitudinal laser interferometer (640) are arranged at the lower end of the hanging frame (620); the transverse laser interferometer (630) is perpendicular to the mirror surface of the transverse laser reflector (410); the longitudinal laser interferometer (640) is perpendicular to the mirror surface of the longitudinal laser reflector (420); In the middle of the lower end of the vertical shaft (600), a probe (650) that can abut against the measured sample placed on the upper side of the sample fixing seat (400) is arranged; A vertical support frame (800) is arranged on the upper side of the axle seat (300). A vertical laser interferometer (810) is arranged on the vertical support frame (800) and above the vertical laser reflector (610); A rotary shaft (430) is arranged on the sample fixing seat (400). The measured sample is placed at the upper end of the rotary shaft (430); an angle measuring mechanism for detecting the rotation angle of the rotary shaft (430) is arranged inside the sample fixing seat (400); The transverse moving component (530) controls the transverse movement of the sample fixing seat (400), the longitudinal moving component (540) controls the longitudinal movement of the sample fixing seat (400), and the driving mechanism (700) controls the vertical movement of the vertical shaft (600) to move the probe; The lateral laser interferometer (630) obtains a lateral axis displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The longitudinal laser interferometer (640) obtains the longitudinal axis displacement as y″ and obtains the rotation angle r x ; The vertical shaft displacement z″ is obtained through the vertical laser interferometer (810); The compensated transverse shaft displacement x′, longitudinal shaft displacement y′, and vertical shaft displacement z′ of the measured sample are calculated according to the supplementary formula; The supplementary formula is:

2. The form and position error measuring instrument with a separated orthogonal measurement reference and a cross moving surface mating according to claim 1, characterized in that : The moving mechanism (500) includes a fixed seat (510) fixed on the upper side of the main base (100). The fixed seat (510) includes a moving block (511) on the upper side and support blocks (512) around the moving block (511); Above the fixed seat (510), a cross-shaped moving frame (520) is provided. On the moving block (511), a lateral moving component (530) for driving the cross-shaped moving frame (520) to move horizontally and a longitudinal moving component (540) for driving the cross-shaped moving frame (520) to move longitudinally are provided.

3. The form and position error measuring instrument with a separable orthogonal measurement reference and a cross-moving surface fit according to claim 2, characterized in that : The lateral moving component (530) includes a C-shaped lateral air bearing sleeve (531). The lateral air bearing sleeve (531) is sleeved on the edge of the moving block (511), and a set is provided on each of the two relatively parallel sides of the moving block (511); inside the lateral air bearing sleeve (531), a first horizontal linear driving motor is provided, and the driving end of the first horizontal linear driving motor is connected to the moving block (511); A lateral connecting plate (532) is connected between the two sets of lateral air bearing sleeves (531) and on the upper side of the moving block (511); on the lateral air bearing sleeve (531) and on the upper side of the lateral connecting plate (532), a first sliding hole (531a) is opened, and the two relatively distant pairs of the cross-shaped moving frame (520) slide in the first sliding hole (531a) respectively.

4. The form and position error measuring instrument with a separable orthogonal measurement reference and a cross movement surface according to claim 3, characterized in that : The longitudinal moving component (540) includes a C-shaped longitudinal air bearing sleeve (541). The longitudinal air bearing sleeve (541) is sleeved on the edge of the moving block (511), and a set is provided on each of the two relatively parallel sides of the moving block (511); inside the longitudinal air bearing sleeve (541), a second horizontal linear driving motor is provided, and the driving end of the second horizontal linear driving motor is connected to the moving block (511); A longitudinal connecting plate (542) is connected between the two sets of longitudinal air bearing sleeves (541) and on the lower side of the moving block (511); The moving direction of the longitudinal air bearing sleeve (541) is perpendicular to the moving direction of the lateral air bearing sleeve (531); On the longitudinal air bearing sleeve (541) and on the upper side of the moving block (511), a second sliding hole (541a) is opened; the two ends of the cross moving frame far from the first sliding hole (531a) are respectively slidably connected in the second sliding hole (541a).

5. The form and position error measuring instrument with a separable orthogonal measurement reference and a cross-moving surface fit according to claim 1, characterized in that : The shaft seat (300) is provided with a through vertical connecting hole (310) in the vertical direction; an installation groove (320) is opened on the inner wall of the vertical connecting hole (310); The driving mechanism (700) includes a vertical shaft nano motor (710) fixed in the installation groove (320). The output shaft of the vertical shaft nano motor (710) moves linearly and can drive the vertical shaft (600) to slide in the vertical direction.

6. The form and position error measuring instrument with a separated orthogonal measurement reference and a cross moving surface according to claim 5, characterized in that : On the two vertical sides of the vertical shaft (600) and at the end far from the vertical laser reflector (610), fixing grooves (600a) are respectively opened, A buffer cylinder (720) is arranged in the fixing groove (600a). The buffer cylinder (720) is fixedly installed on the inner wall of the vertical connecting hole (310), and the telescopic end of the buffer cylinder (720) is connected to the inner wall of the fixing groove (600a), The buffer cylinder (720) compensates for the gravity of the vertical shaft (600).

7. The form and position error measuring instrument with a separable orthogonal measurement reference and a cross-moving surface mating according to claim 1, characterized in that : Covers are formed on the lateral air floating bushing (531) and the longitudinal air floating bushing (541) and are respectively located above the first sliding hole (531a) and the second sliding hole (541a), and the covers can open or close the first sliding hole (531a) and the second sliding hole (541a).

8. The form and position error measuring instrument with a separable orthogonal measurement reference and a cross movement surface according to claim 1, characterized in that : In the coordinate system of the component to be measured, when measuring the component to be measured, the lateral movement assembly (530) controls the lateral movement of the sample fixing base (400), the longitudinal movement assembly (540) controls the longitudinal movement of the sample fixing base (400), and the driving mechanism (700) controls the vertical movement of the vertical shaft (600) to obtain the coordinates (a i , b i , c i ) of the i-th position point to be detected, where i = 1,..., N; The rotating shaft (430) drives the sample to be measured to rotate by an angle Rotation angle After that, the lateral movement assembly (530) controls the lateral movement of the sample fixing seat (400), the longitudinal movement assembly (540) controls the longitudinal movement of the sample fixing seat (400), and the driving mechanism (700) controls the vertical movement of the vertical shaft (600). The coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the coordinate system of the component to be measured through the conversion formula, obtaining the coordinates (a j , b j , c j ); where the conversion formula is: Coordinates of several position points to be detected (a j , b j , c j ) and coordinate values of several position points to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinate sets of the component to be measured (a i , b i , c i ), i = 1, ..., N + K.

Images