Form and position error measuring instrument with cross moving surface and obliquely arranged orthogonal measurement reference

Abstract

The form and position error measuring instrument with a cross-shaped moving surface and an obliquely arranged orthogonal measuring reference belongs to precision measuring equipment. The machine is composed of a main frame base, a vertical support column and a shaft seat to form a frame. A cross-shaped moving surface with a microcrystalline glass sample stage is longitudinally and transversely movably installed on the main frame base. The transverse and longitudinal movement driving mechanisms composed of a transverse air bearing sleeve, a longitudinal air bearing sleeve, a transverse connecting piece and a longitudinal connecting piece are installed on the moving seat and can drive the cross-shaped moving surface to move with high precision in the transverse and longitudinal directions. On the shaft seat, a hanging bracket for a first laser interferometer, a second laser interferometer, a longitudinal laser interferometer and a probe is vertically movably installed through a vertical shaft. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and form and position errors of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measuring equipment, and particularly relates to a geometric error measuring instrument with a cross moving surface and an obliquely arranged orthogonal measuring reference. Background Art

[0002] In recent years, the progress of microelectronic technology has triggered a miniaturization revolution in many fields. Micro / nano technology aimed at microfabrication, nanostructures, and systems has emerged accordingly, and various micro / nano-scale micro-devices have appeared, such as MEMS products like microgears, microholes, micro-nozzles, and micro-steps.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro / nano-devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measured dimensions cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nanometer and picometer ranges have small measurement ranges and short probes, and cannot meet the three-dimensional measurement requirements of micro / nano-scale devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measuring device that can measure the dimensions and geometric errors of three-dimensional devices and has a resolution in the micro / nano range to reliably evaluate the shape of complex micro / nano-scale micro-devices.

[0004] The invention patent "Small Micro / Nano Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro / nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component, and a probe to design a small micro / nano coordinate measuring machine. This micro / nano coordinate measuring machine has a relatively low cost, but it cannot measure the dimensions and geometric errors of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide a geometric error measuring instrument with a cross moving surface and an obliquely arranged orthogonal measuring reference, which can not only adapt to and meet the micro / nano-scale precision measurement of the dimensions and geometric errors of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed, and high efficiency.

[0006] In order to achieve the above-mentioned invention purpose, a technical solution provided by the present invention is as follows:

[0007] A geometric error measuring instrument with a cross moving surface and an obliquely arranged orthogonal measuring reference, wherein vertical support columns are respectively installed on the left and right sides of the main frame; a shaft seat support is assembled on the vertical support columns;

[0008] The shaft seat is provided with a vertically penetrating vertical connection hole, and an installation groove is provided on the inner wall of the vertical connection hole; a vertical shaft is inserted into the vertical connection hole so as to be vertically movable up and down, a hanging bracket is installed at the lower end of the vertical shaft, and a probe is installed at the upper end of the hanging bracket; fixing grooves are respectively provided at one ends of the vertical shaft close to the probe on both vertical sides, a buffer cylinder is fixedly installed on the inner wall of the vertical connection hole by a cylinder fixing block, and the telescopic end of the buffer cylinder is connected to the inner wall of the fixing groove; a vertical shaft nano motor is installed in the installation groove, and the output shaft of the vertical shaft nano motor moves in a straight line and can drive the vertical shaft to slide in the vertical direction.

[0009] On the upper end surface of the main machine seat and inside two vertical support columns, a moving seat is equipped. Horizontal air bearing bushings are respectively equipped on the left side and the right side of the moving seat. The left and right horizontal air bearing bushings are connected by a horizontal connecting piece. Longitudinal air bearing bushings are respectively equipped on the front side and the rear side of the moving seat. The front and rear longitudinal air bearing bushings are connected by a longitudinal connecting piece. An air bearing bushing upper cover is installed on the upper ends of the horizontal air bearing bushings and the longitudinal air bearing bushings to fix the cross-shaped moving surface. Sample table support surfaces are respectively installed on the front side and the rear side of the cross-shaped moving surface. A conical microcrystalline glass sample table is fixedly installed on the sample table support surface. The conical microcrystalline glass sample table is made of microcrystalline glass, and its three surfaces are respectively a first laser reflection surface, a second laser reflection surface, and a longitudinal laser reflection surface. The first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface are perpendicular to each other.

[0010] A rotating shaft is installed inside the first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface at the upper end of the sample fixing surface.

[0011] A hanging bracket is installed at the lower end of the vertical shaft, and a probe is installed at the upper end of the hanging bracket. A first laser interferometer, a second laser interferometer, and a longitudinal laser interferometer are installed on the hanging bracket. The laser light rays emitted by the first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer are respectively perpendicular to the first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface, and the ranging function laser beams in the three laser light rays are exactly converged at the measuring ball center of the probe.

[0012] Preferably, the laser light rays emitted by the first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer include ranging function laser beams and angle measuring function laser beams.

[0013] Preferably, during operation, the probe tip is located at the relatively inner side parts of the first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface.

[0014] Preferably, the cross-shaped moving surface drives the conical microcrystalline glass sample table to move horizontally and longitudinally, and the vertical moving mechanism controls the vertical shaft to move the probe in the vertical direction.

[0015] The longitudinal laser interferometer obtains a displacement of x″ and a yaw angle of r y , and obtains a pitch angle of r z ;

[0016] The second laser interferometer obtains a displacement of y″ and a rotation angle of r x ;

[0017] The first laser interferometer obtains a vertical axis displacement of z″ by;

[0018] Calculate the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula;

[0019] The compensation formula is:

[0020]

[0021] Preferably, in the coordinate system of the test piece, when measuring the test piece, the cross-shaped moving surface drives the conical microcrystalline glass sample stage to move horizontally and longitudinally, and the vertical moving mechanism controls the vertical axis to move the probe vertically to obtain the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N;

[0022] The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through the conversion formula to obtain the coordinates (a i , b i , c i ), i = 1,..., N. The conversion formula is:

[0023]

[0024] Where: θ = -45°

[0025] The rotating shaft drives the test sample to rotate by an angle Rotation angle After that, the cross-shaped moving surface drives the conical microcrystalline glass sample stage to move horizontally and longitudinally, and the vertical moving mechanism controls the vertical axis to move the probe vertically to obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers;

[0026] The surface coordinates (a2j , b2 j , c2 j ) are converted to the standard coordinate system through a conversion formula to obtain coordinates (a j , b j , c j ); where the conversion formula is:

[0027]

[0028] The coordinates (a j , b j , c j ) of a number of position points to be detected and the coordinate values (a i , b i , c i ) of a number of position points to be detected are combined to obtain a set of surface coordinate sets (a i , b i , c i ), i = 1,..., N + K.

[0029] The present invention provides a form and position error measuring instrument that combines a cross moving surface and an obliquely arranged orthogonal measuring reference. By setting a moving mechanism and a vertical axis, during its movement, the first laser interferometer, the second laser interferometer, the longitudinal laser interferometer, the first laser reflecting surface, the second laser reflecting surface, and the longitudinal laser reflecting surface can be driven to move respectively. The first laser reflecting surface, the second laser reflecting surface, and the longitudinal laser reflecting surface are orthogonally arranged in space; a hanging bracket is installed at the lower end of the vertical axis, and a probe is installed at the lower end of the hanging bracket. The first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer are installed on the hanging bracket. The laser rays generated by the first laser interferometer, the second laser interferometer, and the longitudinal laser interferometer are perpendicular to the first laser reflecting surface, the second laser reflecting surface, and the longitudinal laser reflecting surface respectively, and the ranging laser beams in the laser rays converge at the center of the probe measuring sphere. Thus, a form and position error measuring instrument that combines a cross moving surface and an obliquely arranged orthogonal measuring reference is formed.

[0030] The present invention eliminates the Abbe error in the X, Y, and Z measurement directions, improves the measurement accuracy, uses a laser interferometer to measure displacement, and can obtain sub-nanometer measurement accuracy in the XYZ three-axis directions. Its accuracy is much higher than that of traditional size and form and position error measuring instruments, and it has the characteristics of unique, reasonable structure, strong applicability, wide application range, high measurement accuracy, fast speed, and good repeatability.

[0031] Specifically, the technical innovation and good effects of the present invention are as follows:

[0032] 1) In the measurement structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line, and this structure eliminates the first-order measurement error and realizes high measurement accuracy.

[0033] 2) The present invention is designed to use a laser interferometer to detect the relative displacement and relative rotation between the probe and the workpiece to be measured in real time, calibrate in real time the measurement error caused by the rotation between the probe and the workpiece to be measured, and effectively improve the measurement accuracy.

[0034] 3) The conical microcrystalline glass sample stage proposed by the present invention is of an integrated design, made of zero-expansion microcrystalline glass, eliminates the influence of the main thermal expansion error in ultra-precision measurement through structural innovation, and at the same time, this structure is easy to assemble, effectively improving the measurement accuracy of the whole machine.

[0035] 4) The laser measurement reference and the probe of the present invention are relatively stationary during the measurement process, dynamically conform to the Abbe principle, effectively eliminate the measurement error caused by the Abbe error in the dynamic measurement of the instrument, effectively reduce the measurement uncertainty of the instrument, and improve the measurement repeatability of the instrument.

[0036] In the sample movement mechanism of the present invention, the three-axis coplanar movement is realized through the combination of air-bearing guides, and with the cooperation of a nano drive motor, high movement accuracy and large stroke are achieved within a smaller volume. Description of the Drawings

[0037] Figure 1 is a schematic structural diagram of a form and position error measuring instrument with a cross movement surface and an obliquely arranged orthogonal measurement reference according to the present invention;

[0038] Figure 2 is Figure 1 a schematic structural diagram of the installation space of the probe and the laser interferometer of a form and position error measuring instrument with a cross movement surface and an obliquely arranged orthogonal measurement reference according to the present invention;

[0039] Figure 3 is an exploded view of the prominent moving mechanism in a form and position error measuring instrument with a cross movement surface and an obliquely arranged orthogonal measurement reference according to the present invention;

[0040] Figure 4 is a schematic diagram of a partial structure in a form and position error measuring instrument with a cross movement surface and an obliquely arranged orthogonal measurement reference according to the present invention;

[0041] Figure 5 is a schematic diagram of the prominent driving structure in a form and position error measuring instrument with a cross movement surface and an obliquely arranged orthogonal measurement reference according to the present invention.

[0042] Description of the reference numerals in the drawings:

[0043] 1-1. Axis base; 1-2. Vertical support column; 1-3. Main machine base; 2-1. Hanging bracket; 2-2. Probe; 2-3. First laser interferometer; 2-4. Second laser interferometer; 2-5. Longitudinal laser interferometer; 3-1. Conical microcrystalline glass sample stage; 3-1-1. Sample fixing surface; 3-1-2. First laser reflection surface; 3-1-3. Second laser reflection surface; 3-1-4. Longitudinal laser reflection surface; 3-2. Sample stage support surface; 3-3. Transverse air bearing sleeve; 3-4. Air bearing sleeve upper cover; 3-5. Moving seat; 3-6. Cross-shaped moving surface; 3-7. Transverse connecting piece; 3-8. Longitudinal connecting piece; 3-9. Longitudinal air bearing sleeve; 3-10. Rotating shaft; 4. Vertical moving mechanism; 4-1. Vertical shaft; 4-2. Vertical shaft nano motor; 4-3. Buffer cylinder; 4-4. Cylinder fixing block; 4-5. Vertical connection hole; 4-6. Installation groove; 4-7. Fixing groove; Detailed implementation manners

[0044] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0045] Embodiment

[0046] The present invention provides a form and position error measuring instrument with a cross-shaped moving surface and an obliquely arranged orthogonal measurement reference, which is characterized in that: vertical support columns 1-2 are respectively installed on the left and right sides of the main machine base 1-3; the axis base 1-1 is supported and assembled on the vertical support column 1-2;

[0047] The axis base 1-1 is provided with a through vertical connection hole 4-5 along the vertical direction, and an installation groove 4-6 is provided on the inner wall of the vertical connection hole 4-5; a vertical shaft 4-1 is inserted into the vertical connection hole 4-5 so as to be vertically movable up and down, a hanging bracket 2-1 is installed on the lower end of the vertical shaft 4-1, and a probe 2-2 is installed at the upper end of the hanging bracket 2-1; fixing grooves 4-7 are respectively provided at one ends close to the probe 2-2 on both vertical sides of the vertical shaft 4-1, the buffer cylinder 4-3 is fixedly installed on the inner wall of the vertical connection hole 4-5 by a cylinder fixing block 4-4, and the telescopic end of the buffer cylinder 4-3 is connected to the inner wall of the fixing groove 4-7; the vertical shaft nano motor 4-2 is installed in the installation groove 4-6, and the output shaft of the vertical shaft nano motor 4-2 moves in a straight line and can drive the vertical shaft 4-1 to slide along the vertical direction.

[0048] On the upper end surface of the main seat 1-3 and on the inner sides of two vertical support columns 1-2, a moving seat 3-5 is installed. Transverse air bearing sleeves 3-3 are respectively installed on the left and right sides of the moving seat 3-5. The left and right transverse air bearing sleeves 3-3 are connected by a transverse connecting piece 3-7. Longitudinal air bearing sleeves 3-9 are respectively installed on the front and rear sides of the moving seat 3-5. The front and rear longitudinal air bearing sleeves 3-9 are connected by a longitudinal connecting piece 3-8. An air bearing sleeve upper cover 3-4 is installed on the upper ends of the transverse air bearing sleeves 3-3 and the longitudinal air bearing sleeves 3-9 to fix the cross-shaped moving surface 3-6. On the front and rear sides of the cross-shaped moving surface 3-6, sample table support surfaces 3-2 are respectively installed. A conical microcrystalline glass sample table 3-1 is fixedly installed on the sample table support surface 3-2. The conical microcrystalline glass sample table 3-1 is made of microcrystalline glass, and its three surfaces are respectively a first laser reflection surface 3-1-2, a second laser reflection surface 3-1-3, and a longitudinal laser reflection surface 3-1-4. The first laser reflection surface 3-1-2, the second laser reflection surface 3-1-3, and the longitudinal laser reflection surface 3-1-4 are perpendicular to each other;

[0049] On the upper end of the sample fixed matching surface 3-1-1, a rotary shaft 3-10 is installed inside the first laser reflection surface 3-1-2, the second laser reflection surface 3-1-3, and the longitudinal laser reflection surface 3-1-4;

[0050] At the lower end of the vertical shaft 4-1, a hanging bracket 2-1 is installed. A probe 2-2 is installed at the upper end of the hanging bracket 2-1. A first laser interferometer 2-3, a second laser interferometer 2-4, and a longitudinal laser interferometer 2-5 are installed on the hanging bracket 2-1. The laser light rays emitted by the first laser interferometer 2-3, the second laser interferometer 2-4, and the longitudinal laser interferometer 2-5 are respectively perpendicular to the first laser reflection surface 3-1-2, the second laser reflection surface 3-1-3, and the longitudinal laser reflection surface 3-1-4, and the ranging function light beams in the three laser light rays are exactly converged at the probe ball center of the probe 2-2.

[0051] Furthermore, the laser light rays emitted by the first laser interferometer 2-3, the second laser interferometer 2-4, and the longitudinal laser interferometer 2-5 include ranging function laser light beams and angle measurement function laser light beams. Furthermore, during operation, the probe tip of the probe 2-2 is located at the relatively inner side parts of the first laser reflection surface 3-1-2, the second laser reflection surface 3-1-3, and the longitudinal laser reflection surface 3-1-4;

[0052] Among them, the vertical shaft nanomotor 4-2 mentioned above is a prior art, and it can be the linear motor in the paper "A Biped-Driven Piezoelectric Linear Motor", or other drive motors that can achieve linear movement, which is not limited here.

[0053] When the conical glass-ceramics sample stage moves horizontally or longitudinally, or when the vertical axis moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angular value r generated when the conical glass-ceramics sample stage rotates around the axis of the laser beam emitted by the second laser interferometer. y The rotation angle refers to the angular value r generated when the conical glass-ceramics sample stage rotates around the axis of the laser beam emitted by the longitudinal laser interferometer. x The yaw angle refers to the angular value r generated when the conical glass-ceramics sample stage rotates around the axis of the laser beam emitted by the first laser interferometer. z During the measurement process of the instrument, it is necessary to compensate for the displacement measurement errors caused by the pitch angle, the yaw angle, and the rotation angle.

[0054] The compensation process is as follows. The cross-shaped moving surface 3-6 drives the conical glass-ceramics sample stage 3-1 to move horizontally and longitudinally, and the vertical moving mechanism 4 controls the vertical axis 4-1 to move the probe 2-2 vertically; the longitudinal laser interferometer 2-5 obtains a displacement of x″ and a yaw angle of r y and obtains a pitch angle of r. z The second laser interferometer 2-4 obtains a displacement of y″ and a rotation angle r. x The first laser interferometer 2-3 obtains a vertical axis displacement of z″; the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample are calculated according to the compensation formula; the compensation formula is:

[0055]

[0056] When measuring the part to be measured, in the instrument coordinate system, the cross-shaped moving surface 3-6 drives the conical glass-ceramics sample stage 3-1 to move horizontally and longitudinally, and the vertical moving mechanism 4 controls the vertical axis 4-1 to move the probe 2-2 vertically; when the probe 2-2 contacts the part to be measured, after the feedback of the probe 2-2 reaches the set threshold, this contact position is the position point to be detected.

[0057] In the instrument coordinate system, when the probe 2-2 and the part to be measured move relative to each other, the probe 2-2 and the part to be measured are continuously moved into contact. When the probe 2-2 contacts the part to be measured, this contact position is set as the i-th position point to be detected. According to the displacement values compensated by the longitudinal laser interferometer 2-5, the first laser interferometer 2-3, and the second laser interferometer 2-4, in the instrument coordinate system, the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, where i = 1,..., N; the coordinates (a i ′, b i ′, c i′), for i = 1, ..., N, it needs to be transformed into the standard coordinate system through transformation formula (1) to obtain the coordinates (a i , b i , c i ), for i = 1, ..., N

[0058] The transformation formula (1) is:

[0059] where: θ = -45°

[0060] If the rotary shaft 3-10 is used for combined measurement, the rotary shaft 3-10 drives the sample to be measured to rotate by an angle The rotation angle After that, the cross-shaped moving surface 3-6 drives the conical glass-ceramic sample stage 3-1 to move horizontally and vertically, and the vertical moving mechanism 4 controls the vertical shaft 4-1 to move the probe 2-2 in the vertical direction to obtain the coordinates (a2 j , b2 j , c2 j ) of the j-th position to be detected in the instrument coordinate system, where j = N + 1, ..., N + K, and N, K are integers;

[0061] Since the rotary shaft 3-10 drives the sample to be measured to rotate, when the probe 2-2 contacts the sample to be measured before rotation, this contact position is set as the i-th position to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, for i = 1, ..., N; after rotation, when the probe 2-2 contacts the sample to be measured, this contact position is set as the j-th position to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained, for j = N + 1, …, N + K. The coordinate system where they are located also changes. The new set of coordinate values (a2 j , b2 j , c2 j ) obtained after rotation, for j = N + 1, …, N + K need to be processed through transformation formula (2), and the surface coordinates (a2 j , b2 j , c2 j ) are transformed into the standard coordinate system through the transformation formula to obtain the coordinates (a j , b j , c j );

[0062] where the transformation formula (2) is:

[0063]

[0064] The coordinates of several positions to be detected (a j , b j , c j ) and the coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinate sets of the workpiece to be measured (a i , b i , c i ), where i = 1,..., N + K.

[0065] If the rotary shaft 3-10 is not used, according to the displacement values measured by the longitudinal laser interferometer 2-5, the first laser interferometer 2-3, and the second laser interferometer 2-4, after the probe determines a qualified contact once, based on each displacement value, and after error compensation and data processing, a measurement point coordinate on the surface of the workpiece to be measured can be obtained. By measuring several measurement points on the surface of the workpiece to be measured, high-precision measurement of the shape and position errors of the workpiece to be measured with a complex shape can be achieved.

[0066] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0067] In the description of the present invention, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0068] The above-described embodiments only express the implementation manners of the present invention, and the description is relatively specific and detailed, but cannot be construed as a limitation of the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A form and position error measuring instrument with a cross-moving surface and an obliquely arranged orthogonal measurement reference, characterized in that: Vertical support columns (1-2) are respectively installed on the left and right sides of the main frame (1-3); the shaft seat (1-1) is supported and assembled on the vertical support column (1-2). The shaft seat (1-1) is provided with a through vertical connection hole (4-5) in the vertical direction, and an installation groove (4-6) is provided on the inner wall of the vertical connection hole (4-5); a vertical shaft (4-1) is inserted into the vertical connection hole (4-5) so as to be vertically movable up and down, a hanging bracket (2-1) is installed at the lower end of the vertical shaft (4-1), and a probe (2-2) is installed at the upper end of the hanging bracket (2-1); fixing grooves (4-7) are respectively provided at one ends of the vertical shaft (4-1) on the vertical two sides close to the probe (2-2), a buffer cylinder (4-3) is fixedly installed on the inner wall of the vertical connection hole (4-5) by a buffer cylinder fixing block (4-4), and the telescopic end of the buffer cylinder (4-3) is connected to the inner wall of the fixing groove (4-7); a vertical shaft nano motor (4-2) is installed in the installation groove (4-6), the output shaft of the vertical shaft nano motor (4-2) moves in a straight line and can drive the vertical shaft (4-1) to slide in the vertical direction. On the upper end surface of the main frame (1-3) and inside the two vertical support columns (1-2), a moving seat (3-5) is assembled. Horizontal air bearing bushings (3-3) are respectively assembled on the left and right sides of the moving seat (3-5). The left and right horizontal air bearing bushings (3-3) are connected by a horizontal connecting member (3-7). Longitudinal air bearing bushings (3-9) are respectively assembled on the front and rear sides of the moving seat (3-5). The front and rear longitudinal air bearing bushings (3-9) are connected by a longitudinal connecting member (3-8). An air bearing bushing upper cover (3-4) is installed on the upper ends of the horizontal air bearing bushings (3-3) and the longitudinal air bearing bushings (3-9) to fix the cross-shaped moving surface (3-6). Sample table support surfaces (3-2) are respectively installed on the front and rear sides of the cross-shaped moving surface (3-6). A conical microcrystalline glass sample table (3-1) is fixedly installed on the sample table support surface (3-2). The conical microcrystalline glass sample table (3-1) is made of microcrystalline glass, and its three surfaces are respectively a first laser reflection surface (3-1-2), a second laser reflection surface (3-1-3), and a longitudinal laser reflection surface (3-1-4). The first laser reflection surface (3-1-2), the second laser reflection surface (3-1-3), and the longitudinal laser reflection surface (3-1-4) are perpendicular to each other. A rotary shaft (3-10) is installed inside the first laser reflection surface (3-1-2), the second laser reflection surface (3-1-3), and the longitudinal laser reflection surface (3-1-4) at the upper end of the sample fixing surface (3-1-1). A suspension bracket (2-1) is installed at the lower end of the vertical axis (4-1), a probe (2-2) is installed at the upper end of the suspension bracket (2-1), a first laser interferometer (2-3), a second laser interferometer (2-4), and a longitudinal laser interferometer (2-5) are installed on the suspension bracket (2-1). The laser beams emitted by the first laser interferometer (2-3), the second laser interferometer (2-4), and the longitudinal laser interferometer (2-5) are respectively perpendicular to the first laser reflection surface (3-1-2), the second laser reflection surface (3-1-3), and the longitudinal laser reflection surface (3-1-4), and the ranging function beams in the three laser beams are exactly converged at the probe ball center of the probe (2-2).

2. The form and position error measuring instrument with a cross-moving surface and an obliquely arranged orthogonal measuring reference according to claim 1, wherein: The laser beams emitted by the first laser interferometer (2-3), the second laser interferometer (2-4), and the longitudinal laser interferometer (2-5) include ranging function laser beams and angle measurement function laser beams.

3. The form and position error measuring instrument with a cross moving surface and an obliquely arranged orthogonal measuring reference according to claim 1, characterized in that: During operation, the probe tip of the probe (2-2) is located at the relatively inner side of the first laser reflection surface (3-1-2), the second laser reflection surface (3-1-3), and the longitudinal laser reflection surface (3-1-4).

4. The geometric error measuring instrument with a cross-shaped moving surface and an obliquely arranged orthogonal measurement reference according to claim 1, characterized in that: The cross-shaped moving surface (3-6) drives the conical microcrystalline glass sample stage (3-1) to move horizontally and longitudinally, and the vertical moving mechanism (4) controls the vertical axis (4-1) to move the probe (2-2) in the vertical direction; The longitudinal laser interferometer (2-5) obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The second laser interferometer (2-4) obtains a displacement of y″ and obtains a rotation angle r x ; The first laser interferometer (2-3) obtains the vertical axis displacement as z″; Calculate the compensated horizontal axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; The compensation formula is:

5. The geometric error measuring instrument with a cross-shaped moving surface and an obliquely arranged orthogonal measurement reference according to claim 1, characterized in that: In the coordinate system of the component under test, when measuring the component under test, the cross-shaped moving surface (3-6) drives the tapered glass-ceramic sample stage (3-1) to move horizontally and vertically, and the vertical moving mechanism (4) controls the vertical shaft (4-1) to move the probe (2-2) in the vertical direction to obtain the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N; The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, where i = 1,..., N, need to be transformed into the standard coordinate system through the transformation formula (1) to obtain the coordinates (a i , b i , c i ), i = 1,..., N The conversion formula (1) is as follows: Where: θ = -45° The rotating shaft (3-10) drives the sample to be measured to rotate by an angle Rotation angle After that, the cross-shaped moving surface (3-6) drives the tapered glass-ceramics sample stage (3-1) to move horizontally and vertically. The vertical moving mechanism (4) controls the vertical shaft (4-1) to move the probe (2-2) in the vertical direction, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula (2) is: Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinates of the part to be measured (a i , b i , c i ), where i = 1,..., N + K.

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