Imaging system based on homogenized oblique illumination

Abstract

The application discloses an imaging system based on uniform light oblique irradiation, wherein a light generation module is used to form parallel light with uniform light energy distribution from light emitted by a light source and to make the parallel light obliquely irradiate a sample; an imaging module comprises a lens assembly and a light wave modulation element, the lens assembly collects light transmitted through the sample and performs imaging based on the light transmitted through the sample, and the light wave modulation element is used to make a zero-order light or / and diffracted light transmitted through the sample and entering the lens assembly generate an intensity change amount and a phase change amount, and the zero-order light and the diffracted light entering the lens assembly interfere after transmitting through the light wave modulation element, so that imaging of the sample is realized. The application generates the parallel light with uniform light energy distribution through the light generation module, and makes the parallel light obliquely irradiate the sample, compared with the existing phase contrast imaging method, and can weaken the halo phenomenon.

Description

Technical Field

[0001] The present invention relates to the field of microscopic imaging, and in particular to an imaging system based on uniform light oblique illumination. Background Art

[0002] Phase-type objects, which only slightly alter light intensity, are weakly absorbing and typically appear transparent or translucent. Biological cells are examples of phase-type objects. While these objects only slightly alter light intensity, they significantly alter the phase of the light. Consequently, various label-free microscopy methods, such as the classic Zernike phase contrast imaging, convert phase changes into intensity changes.

[0003] Zernike phase contrast imaging involves placing an annular phase plate at the rear focal plane of the microscope objective and an annular aperture in the illumination path. The position, shape, and size of the annular aperture are conjugate to those of the annular phase plate. By modulating the intensity and phase of the zero-order light and diffracted light passing through the object, interference occurs at the image plane, and this change in phase information is reflected in the image. However, for objects with a thickness gradient, this gradient can cause the zero-order light passing through the object to be deflected. Consequently, Zernike phase contrast imaging can exhibit halos, especially in edge regions with large surface gradients or refractive index variations. Severe halos can reduce image contrast and resolution. Summary of the Invention

[0004] The object of the present invention is to provide an imaging system based on uniform light oblique illumination, which can reduce the halo phenomenon.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] An imaging system based on uniform light oblique illumination comprises a light generating module and an imaging module. The light generating module is used to convert light emitted by a light source into parallel light with uniform light energy distribution, and to cause the parallel light to obliquely illuminate a sample. The imaging module comprises a lens assembly and a light wave modulation element. The lens assembly is used to collect light transmitted through the sample and to perform imaging based on the light transmitted through the sample. The light wave modulation element is used to cause zero-order light and / or diffracted light that pass through the sample and enter the lens assembly to produce an intensity change and a phase change, so that the zero-order light and diffracted light that enter the lens assembly interfere with each other after passing through the light wave modulation element.

[0007] Preferably, the light generating module includes a collimating component and a light homogenizing element, the collimating component is used to form the light emitted by the light source into parallel light so that the parallel light is incident on the light homogenizing element, and the light homogenizing element is used to make the light energy passing through the light homogenizing element uniformly distributed.

[0008] Preferably, the sample faces the imaging module, and the optical axis of the imaging module deviates from the optical axis of the light homogenizing element.

[0009] Preferably, the vertical distance from the imaging module to the light homogenizing element is changeable, and the horizontal distance from the center of the light beam emitted by the light homogenizing element to the sample is changeable.

[0010] Preferably, the light homogenizing element is used to scatter the light transmitted into the light homogenizing element and transmit the light out of the light homogenizing element, so that the energy distribution of the light after passing through the light homogenizing element is uniform.

[0011] Preferably, the light generating module further comprises a first aperture, which is used to allow light emitted by the light source to pass through, so that the light is emitted from the first aperture in the form of point light source emission, and the emitted light is incident on the collimating component.

[0012] Preferably, the light generating module further comprises a turning element disposed between the collimating component and the light homogenizing element, wherein the turning element is used to guide the parallel light emitted by the collimating component to propagate so that the parallel light is incident on the light homogenizing element.

[0013] Preferably, the turning element includes a reflecting element, and the reflecting element is used to reflect the parallel light emitted by the collimating component to guide the parallel light emitted by the collimating component to propagate so that the parallel light is incident on the light homogenizing element.

[0014] Preferably, the light wave modulation element includes a plurality of light-transmitting regions, and the light-transmitting regions generate intensity changes and phase changes after light passes through the light-transmitting regions.

[0015] Preferably, the lens assembly includes a first lens group and a second lens group, the light wave modulation element is arranged between the first lens group and the second lens group, the first lens group is used to collect light passing through the sample and emit the light in the form of parallel light, so that the light passes through the light wave modulation element, and the second lens group is used to perform imaging based on the light passing through the light wave modulation element.

[0016] It can be seen from the above technical solution that the present invention provides an imaging system based on uniform light oblique illumination, wherein the light generating module is used to convert the light emitted by the light source into parallel light with uniform light energy distribution, and make the parallel light obliquely illuminate the sample; the imaging module includes a lens assembly and a light wave modulation element, the lens assembly is used to collect the light passing through the sample and perform imaging based on the light passing through the sample, and the light wave modulation element is used to make the zero-order light or / and diffracted light passing through the sample and entering the lens assembly produce an intensity change and a phase change, so that the zero-order light and the diffracted light entering the lens assembly interfere after passing through the light wave modulation element, thereby realizing imaging of the sample.

[0017] The imaging system of the present invention uses a light generation module to generate parallel light with uniform light energy distribution, which is then directed obliquely onto the sample. For samples with a thickness gradient, this thickness gradient deflects the light passing through the sample, causing it to enter the light wave modulation element, thereby imaging the sample. Compared to existing phase contrast imaging methods, this system can reduce haloing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 A schematic diagram of an imaging system based on uniform light oblique illumination provided by an embodiment of the present invention;

[0020] Figure 2 A schematic diagram of a light generating module provided in one embodiment of the present invention;

[0021] Figure 3 A schematic diagram of an imaging system based on uniform light oblique illumination provided by yet another embodiment of the present invention;

[0022] Figure 4 A schematic diagram of a light wave modulation element provided in one embodiment of the present invention;

[0023] Figure 5 Schematic diagram of the principle of imaging a sample by an imaging module in an imaging system based on uniform light oblique illumination according to an embodiment of the present invention;

[0024] Figure 6 A schematic diagram of an imaging module provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0025] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0026] Please refer to Figure 1 , Figure 1This is a schematic diagram of an imaging system based on uniform light oblique illumination provided in this embodiment. As shown in the figure, the imaging system includes a light generating module 101 and an imaging module 102. The light generating module 101 is used to convert the light emitted by the light source into parallel light with uniform light energy distribution, and make the parallel light obliquely illuminate the sample 100. The imaging module 102 includes a lens assembly ( Figure 1 The lens assembly is used to collect light passing through the sample 100 and perform imaging based on the light passing through the sample 100, and the light wave modulation element 103 is used to cause the zero-order light or / and diffracted light passing through the sample 100 and entering the lens assembly to produce an intensity change and a phase change, so that the zero-order light and the diffracted light entering the lens assembly interfere with each other after passing through the light wave modulation element 103.

[0027] The light generating module 101 collimates the light emitted by the light source and performs light energy homogenization processing to form parallel light with uniform light energy distribution. Parallel light obliquely irradiates the sample 100, which means that the incident angle of the parallel light on the sample 100 is greater than 0° and less than 90°.

[0028] Parallel light irradiates sample 100. After passing through sample 100, the light generates zero-order light and diffracted light. These light then enters the lens assembly and is incident on lightwave modulation element 103. Lightwave modulation element 103 causes the zero-order light to undergo an intensity change and a phase change, or causes the diffracted light to undergo an intensity change and a phase change, or causes both the zero-order light and the diffracted light to undergo an intensity change and a phase change. This causes the zero-order light and the diffracted light from the same area of ​​sample 100 to interfere after passing through lightwave modulation element 103. Based on this, imaging module 102 forms an image based on the light that has passed through sample 100, thereby imaging sample 100.

[0029] The imaging system of this embodiment uses light generating module 101 to generate parallel light with uniform light energy distribution, and directs the parallel light obliquely onto sample 100 for illumination. For sample 100 with a thickness gradient, this thickness gradient deflects light passing through sample 100, causing it to enter light wave modulation element 103, thereby imaging sample 100. Because the imaging system of this embodiment directs the parallel light obliquely onto sample 100, haloing can be reduced compared to existing phase contrast imaging methods.

[0030] In this embodiment, the optical structure of the light generating module 101 is not limited; it only needs to be able to convert the light emitted by the light source into parallel light with uniform light energy distribution. Preferably, the optical structure of the light generating module 101 is relatively simple. As an optional embodiment, the light generating module 101 may include a collimating assembly and a light homogenizing element. The collimating assembly is used to convert the light emitted by the light source into parallel light, so that the parallel light is incident on the light homogenizing element. The light homogenizing element is used to uniformly distribute the light energy passing through the light homogenizing element.

[0031] In this embodiment, the optical structure of the collimator assembly is not limited, as long as it can collimate the light emitted by the light source. Optionally, the collimator assembly may include any one or more of a convex lens, a concave lens, a plano-convex lens, or a plano-concave lens. In practical applications, the optical structure of the collimator assembly can be designed according to application requirements, and preferably the optical structure of the collimator assembly is as simple as possible.

[0032] Preferably, the light homogenizing element can be used to scatter light that enters the light homogenizing element and transmit the light out of the light homogenizing element, so that the energy distribution of the light after passing through the light homogenizing element is uniform. The light homogenizing element scatters the light entering the light homogenizing element and modulates the emission angle of the light to achieve a uniform energy distribution of the transmitted light.

[0033] Preferably, the light generating module 101 may further include a first aperture, which is used to allow the light emitted by the light source to pass through, so that the light is emitted from the first aperture in the form of light emitted by a point light source, and the emitted light is incident on the collimating component. In this way, the light emitted by the light source is filtered by the first aperture, so that the light is emitted from the first aperture in the form of light emitted by a point light source and is incident on the collimating component, so that the light can be collimated well after passing through the collimating component, forming approximately parallel light, so that the light loss during the propagation process is small and the stray light is greatly reduced. Optionally, the first aperture can be a pinhole aperture. Preferably, the first aperture can be set on the back focal plane of the collimating component. For example, reference can be made to Figure 2 , Figure 2 This is a schematic diagram of a light generating module according to one embodiment. As shown, light generating module 101 includes a light source 104, a first aperture 105, a collimating assembly 106, and a light homogenizing element 107. Light emitted by light source 104 passes through first aperture 105 and is emitted toward collimating assembly 106. Collimating assembly 106 collimates the light into parallel light, which is then emitted. The parallel light enters light homogenizing element 107, where it transmits light, achieving uniform light energy distribution.

[0034] Optionally, the light generating module 101 may further include a second aperture provided on the side of the collimating assembly 106 emitting light, the second aperture being used to limit the transverse size of the parallel light beam emitted by the light generating module 101 and to filter out stray light. The transverse size of the light beam is the size of the cross section of the light beam. Figure 2 As shown, the second aperture 108 is arranged on the side of the collimating component 107 that emits light. In actual application, the aperture size of the second aperture 108 can be set according to application requirements.

[0035] Further optionally, the light generating module 101 may also include a turning element arranged between the collimating component 106 and the light homogenizing element 107, and the turning element is used to guide the propagation of the parallel light emitted by the collimating component 106 so that the parallel light is incident on the light homogenizing element 107. The turning element plays the role of turning the light path in the light generating module 101 to arrange the light path structure of the light generating module 101 so that the structure of the light generating module 101 is compact. The turning element can be a reflecting element, which is used to reflect the parallel light emitted by the collimating component 106 to guide the propagation of the parallel light emitted by the collimating component 106 so that the parallel light is incident on the light homogenizing element 107. Alternatively, the turning element can also use other optical elements to guide the propagation of parallel light, which is also within the scope of protection of the present invention. For example, reference can be made to Figure 3 , Figure 3 A schematic diagram of an imaging system based on uniform light oblique illumination is provided in yet another embodiment. As shown in the figure, a first reflective element 109 and a second reflective element 110 are disposed between the collimating assembly 106 and the uniform light element 107. Parallel light emitted by the collimating assembly 106 is sequentially reflected by the first reflective element 109 and the second reflective element 110 before being incident on the uniform light element 107. The first reflective element 109 or the second reflective element 110 can be, but is not limited to, a mirror.

[0036] The light generating module 101 emits light to illuminate the sample 100, and the light is irradiated obliquely to the sample 100 as parallel light. Optionally, the sample 100 can be directly facing the imaging module 102, and the optical axis of the imaging module 102 is offset from the optical axis of the light homogenizing element 107, so that the light transmitted by the light homogenizing element 107 can be irradiated obliquely to the sample 100 as parallel light. Figure 3 As shown, the sample 100 can face the imaging module 102, the light beam transmitted by the light homogenizing element 107 diverges, and the optical axis of the imaging module 102 deviates from the optical axis of the light homogenizing element 107, so that the transmitted light of the light homogenizing element 107 can be irradiated obliquely to the sample 100, and the divergence angle of the light irradiated on the sample 100 is very small, which is approximately parallel light.

[0037] Optionally, the vertical distance between the imaging module 102 and the light homogenizing element 107 can be changed, and the horizontal distance between the center of the light beam emitted by the light homogenizing element 107 and the sample 100 can be changed. The vertical distance between the imaging module 102 and the light homogenizing element 107 refers to the distance between the imaging module 102 and the light homogenizing element 107 along the optical axis of the imaging module 102, and the horizontal distance between the center of the light beam emitted by the light homogenizing element 107 and the sample 100 refers to the distance between the center of the light beam emitted by the light homogenizing element 107 and the sample 100 on the plane where the sample 100 is located. By changing the vertical distance between the imaging module 102 and the light homogenizing element 107, and / or the horizontal distance between the center of the light beam emitted by the light homogenizing element 107 and the sample 100, the incident angle of the parallel light irradiating the sample 100 can be changed. In actual applications, these can be adjusted according to application requirements.

[0038] Optionally, the light generating module 101 can also achieve the goal of homogenizing the light energy so that the light is obliquely irradiated onto the sample 100 through other means. For example, an optical element that can change the propagation direction of the outgoing light can be set on the side of the light emitting element 107 so that the light after passing through the light homogenizing element 107 is obliquely irradiated onto the sample 100.

[0039] Optionally, the light wave modulation element 103 may include multiple light-transmitting regions, each of which causes light passing through the light wave modulation element 103 to produce an intensity change and a phase change. Different light-transmitting regions may cause different intensity changes and phase changes in the transmitted light. Zero-order light and diffracted light from the same region of the sample 100 pass through different light-transmitting regions of the light wave modulation element 103, respectively, causing different intensity changes and phase changes in the zero-order light and the diffracted light.

[0040] In this embodiment, there is no limitation on the shape or number of the light-transmitting regions included in the light wave modulation element 103, and there is no limitation on the intensity change and phase change of the transmitted light by each light-transmitting region. In practical applications, these can be set according to imaging requirements. As an optional embodiment, the light wave modulation element 103 can be provided with multiple annular light-transmitting regions. For example, reference can be made to Figure 4 , Figure 4 This is a schematic diagram of a light wave modulation element provided in an embodiment. As shown in the figure, the light wave modulation element 103 includes a first light-transmitting area 201 in the middle, and an annular light-transmitting area surrounding the first light-transmitting area 201, including a second light-transmitting area 202 and a third light-transmitting area 203.

[0041] The imaging principle of the imaging system of this embodiment is described below.

[0042] Assume that the light wave incident on the sample 100 is expressed as Since the change of light intensity by sample 100 is very small and can be ignored, let its modulation of light wave be Therefore, the complex amplitude of the light wave passing through the sample 100 can be expressed as Because the amplitude A of the incident light wave and the initial phase are all constants, so the complex amplitude of the light wave passing through the sample 100 can be normalized and expressed as in n represents the refractive index, d represents the sample thickness. The complex amplitude is expanded by Fourier to obtain because Very small, omitting the higher order terms yields The 1 corresponds to the zero-order light passing through the sample 100, represents the diffracted light passing through the sample 100.

[0043] The light passing through the sample 100 enters the lens assembly and is incident on different light-transmitting areas of the light wave modulation element 103, such as Figure 4 In the light wave modulation element 103 shown in FIG, the attenuation coefficient of the second light-transmitting region 202 to the light intensity is a, and the phase delay generated is The light passing through the sample 100 is incident on the second light-transmitting region 202 of the light wave modulation element 103. The complex amplitude of the light wave after passing through is expressed as: At this time, the light intensity at the image plane is the modulus of the conjugate product of the complex amplitude of the light wave, which can be expressed as: If you take but Again, omitting the higher-order terms, we get At this point, the phase change of the object is converted into a change in the final light intensity, which means that clear imaging of the phase object can be achieved.

[0044] For an object with a thickness gradient as the sample 100, light irradiated by the sample 100 with different thickness gradients will be deflected and incident on different light-transmitting areas of the light wave modulation element 103 after entering the lens assembly. Figure 5 As shown, Figure 5 This is a schematic diagram of the principle of imaging the sample by the imaging module in the imaging system based on uniform light oblique illumination of this embodiment. The light ray a is incident on the left edge of the sample 100, passes through the sample 100, enters the imaging module 102, and is incident on the first light-transmitting area 201 of the light wave modulation element 103; the light ray b is incident on the middle area of ​​the sample 100, passes through the sample 100, enters the imaging module 102, and is incident on the second light-transmitting area 202 of the light wave modulation element 103; the light ray c is incident on the right edge of the sample 100, passes through the sample 100, enters the imaging module 102, and is incident on the third light-transmitting area 203 of the light wave modulation element 103.

[0045] For example, for Figure 5In the light wave modulation element 103 shown, the first light-transmitting region 201 and the third light-transmitting region 203 do not change the intensity and phase of the light passing through. The attenuation coefficient of the light intensity of the second light-transmitting region 202 is a, and the phase delay generated is

[0046] Light b passes through the middle area of ​​the sample 100, and the transmitted zero-order light is incident on the second light-transmitting area 202 of the light wave modulator 103. The diffracted light passes through the first light-transmitting area 201 and the third light-transmitting area 203 of the light wave modulator 103, and the two interfere with each other on the image plane, which can normally present the phase contrast effect. Light c passes through the right side of the sample 100. Due to the surface curvature and refraction, the transmitted zero-order light is incident on the third light-transmitting area 203 of the light wave modulator 103. Since the diffracted light of light c passes through the second light-transmitting area 202 of the light wave modulator 103, it finally destructively interferes with the zero-order light to obtain a light intensity of Therefore, the area corresponding to the light c in the sample 100 appears as a dark area.

[0047] Considering a more extreme case, the zero-order transmitted light c closer to the edge will exit the optical system and cannot be collected by the lens assembly, so it is darker. The light passing through the left side of the sample 100 is emitted from the first light-transmitting area 201 in the middle of the light wave modulation element 103 due to the opposite bending direction of the surface, for example Figure 5 Regarding light ray a, since both the zero-order light and the diffracted light pass through the first light-transmitting region 201 without any attenuation, the region corresponding to light ray a in the sample 100 appears as a bright region.

[0048] Optionally, the lens assembly may include a first lens group and a second lens group, with the light wave modulation element 103 disposed between the first lens group and the second lens group. The first lens group is configured to collect light transmitted through the sample 100 and emit the light as parallel light, thereby transmitting the light through the light wave modulation element 103. The second lens group is configured to generate an image based on the light transmitted through the light wave modulation element 103. By having the first lens group collect light transmitted through the sample 100 and emit the light as parallel light, other optical elements can be flexibly disposed on the optical path between the first lens group and the second lens group.

[0049] Optionally, the first lens group may include any one or more of a convex lens, a concave lens, a plano-convex lens, or a plano-concave lens. The second lens group may include any one or more of a convex lens, a concave lens, a plano-convex lens, or a plano-concave lens. In practical applications, the specific structures of the first lens group and the second lens group can be designed according to application requirements. For example, please refer to Figure 6 , Figure 6This is a schematic diagram of an imaging module provided in one embodiment. As shown in the figure, the first lens group 111 emits the light transmitted through the sample 100 in the form of parallel light, which is then transmitted through the light wave modulation element 103. The second lens group 112 converges the parallel light emitted by the first lens group 111 to the detection device 114. A reflective element 113 can be provided between the second lens group 112 and the detection device 114 to reflect the light emitted by the second lens group 112 to the detection device 114.

[0050] The imaging system of this embodiment can be used to image phase-type objects, such as biological cells. The objects will change the phase of the transmitted light, and the objects have a thickness gradient. Different thickness gradient regions of the object will change the phase of the transmitted light differently.

[0051] The above is a detailed introduction to the imaging system based on uniform oblique illumination provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only intended to help understand the method and core concept of the present invention. It should be noted that for those skilled in the art, without departing from the principles of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. An imaging system based on uniform light oblique illumination, characterized in that: The system comprises a light generating module and an imaging module. The light generating module is used to convert the light emitted by the light source into parallel light with uniform light energy distribution, and to make the parallel light irradiate the sample obliquely. For samples with thickness gradient, the thickness gradient of the sample deflects the light passing through the sample. The imaging module includes a lens assembly and a light wave modulation element. The lens assembly is used to collect light that has passed through the sample and to perform imaging based on the light that has passed through the sample. The light wave modulation element is used to cause zero-order light and / or diffracted light that has passed through the sample and entered the lens assembly to produce an intensity change and a phase change, so that the zero-order light and the diffracted light that have entered the lens assembly interfere with each other after passing through the light wave modulation element. The light wave modulation element includes a first light-transmitting area in the middle, a second light-transmitting area in an annular shape surrounding the first light-transmitting area, and a third light-transmitting area in an annular shape. The first light-transmitting area and the third light-transmitting area do not change the intensity and phase of the light passing through. The attenuation coefficient of the light intensity of the second light-transmitting area is a, and the phase delay generated is ; After light passes through the sample, zero-order light and diffracted light are generated. The zero-order light and diffracted light from the same area of ​​the sample pass through different light-transmitting areas of the light wave modulation element respectively. The light wave incident on the sample is expressed as , assuming that the sample modulates the light wave to be , then the normalized complex amplitude of the light wave passing through the sample is expressed as ,in , n represents the refractive index, d represents the sample thickness, the complex amplitude is Fourier expanded and the high-order terms are ignored to obtain , where 1 corresponds to the zero-order light passing through the sample, represents the diffracted light passing through the sample. The zero-order light passing through the sample is incident on the second light-transmitting area. The diffracted light passes through the first light-transmitting area and the third light-transmitting area, and the two interfere with each other on the image plane. The complex amplitude of the light wave of the zero-order light passing through the sample after passing through the second light-transmitting area is expressed as , then the light intensity on the image plane is expressed as: .

2. The imaging system based on uniform light oblique illumination according to claim 1, characterized in that: The light generating module includes a collimating component and a light homogenizing element. The collimating component is used to form the light emitted by the light source into parallel light so that the parallel light is incident on the light homogenizing element. The light homogenizing element is used to make the light energy passing through the light homogenizing element uniformly distributed.

3. The imaging system based on uniform light oblique illumination according to claim 2, characterized in that: The sample faces the imaging module, and the optical axis of the imaging module deviates from the optical axis of the light homogenizing element.

4. The imaging system based on uniform light oblique illumination according to claim 3, characterized in that: The vertical distance between the imaging module and the light homogenizing element can be changed, and the horizontal distance between the center of the light beam emitted by the light homogenizing element and the sample can be changed.

5. The imaging system based on uniform light oblique illumination according to claim 2, characterized in that: The light homogenizing element is used to scatter the light that enters the light homogenizing element and transmit the light out of the light homogenizing element, so that the energy distribution of the light after passing through the light homogenizing element is uniform.

6. The imaging system based on uniform light oblique illumination according to claim 2, characterized in that: The light generating module further includes a first aperture, which is used to allow light emitted by the light source to pass through, so that the light is emitted from the first aperture in the form of point light source emission, and the emitted light is incident on the collimating component.

7. The imaging system based on uniform light oblique illumination according to claim 2, characterized in that: The light generating module further includes a turning element disposed between the collimating component and the light homogenizing element, and the turning element is used to guide the parallel light emitted by the collimating component to propagate so that the parallel light is incident on the light homogenizing element.

8. The imaging system based on uniform light oblique illumination according to claim 7, characterized in that: The turning element includes a reflecting element, and the reflecting element is used to reflect the parallel light emitted by the collimating component to guide the parallel light emitted by the collimating component to propagate and make the parallel light incident on the light homogenizing element.

9. The imaging system based on uniform light oblique illumination according to any one of claims 1 to 8, characterized in that: The lens assembly includes a first lens group and a second lens group, and the light wave modulation element is arranged between the first lens group and the second lens group. The first lens group is used to collect light passing through the sample and emit the light in the form of parallel light so that the light passes through the light wave modulation element. The second lens group is used to perform imaging based on the light passing through the light wave modulation element.

Images