Lift-rotate combination motion device

Abstract

The application relates to the technical field of semiconductor wet processing equipment, in particular to a lifting-rotating combined motion device which comprises a base, a hollow rotating swing table, a ball spline pair, a cylinder and a floating structure; the hollow rotating swing table is fixed to the upper portion of the base, the upper portion of the ball spline pair is installed in the hollow rotating swing table, the lower portion of the ball spline pair is connected with the floating structure, the floating structure is connected with the piston rod of the cylinder through a lifting plate, and the cylinder is fixed to the side portion of the base. The application is simple to install and easy to maintain, and effectively reduces the links that need to be manually adjusted.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wet process equipment, in particular to a lifting and rotating combined motion device. Background Art

[0002] In semiconductor wet process equipment, especially single-wafer wet process equipment, different process media are often required to be scanned and sprayed onto substrates for processing. Furthermore, in order for the process media spray device to pass over the outer wall of the fluid splash guard and enter the center of the splash guard to process the substrate, its motion mechanism often requires a combination of lift and rotation functions.

[0003] The existing technology generally uses a cylinder to provide lifting power, a motor + belt drive (indirect drive) to provide rotational driving force, and a ball screw pair to realize the lifting motion guide function; the above device has overlapping mechanisms, which makes installation and maintenance difficult, and the belt drive requires adjustment of the belt tightness and prevention of belt slippage, the belt requires a tensioning device, and the belt is prone to fatigue failure. Summary of the Invention

[0004] In order to effectively solve the problems in the above-mentioned background technology, the present invention proposes a lifting and rotating combined motion device.

[0005] The specific technical solutions are as follows:

[0006] A lifting and rotating combined motion device includes a base, a hollow rotating swing table, a ball spline pair, a cylinder and a floating structure; the hollow rotating swing table is fixed to the upper part of the base, the upper part of the ball spline pair is installed in the hollow rotating swing table, the lower part of the ball spline pair is connected to the floating structure, the floating structure is connected to the piston rod of the cylinder through a lifting plate, and the cylinder is fixed to the side of the base.

[0007] Preferably, the floating structure includes a floating joint, a nest and a locking sleeve, the nest is sleeved on the lower part of the ball spline pair, the floating joint is sleeved outside the nest, and the locking sleeve is fixed on the lower part of the ball spline pair to limit the axial movement of the nest and the floating joint.

[0008] Preferably, the interior of the ball spline pair is a hollow structure.

[0009] Preferably, the base is composed of an upper base, a lower base and support columns, the upper base and the lower base are connected together through four support columns, and the hollow rotating swing table is installed on the upper base.

[0010] Compared with existing technologies, the present invention has the following advantages: it adopts a modular design concept, utilizing a combination of three modules: a cylinder (lifting power source), a ball spline pair (which inherently enables rotation and lifting motion), and a hollow rotary table (motor-driven for rotational motion), to achieve the relevant functions. This allows for simple installation and easy maintenance, effectively reducing the need for manual adjustments. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a perspective view of the present invention;

[0012] Figure 2 is a top view of the invention;

[0013] Figure 3 yes Figure 2 Cross-sectional view in the AA direction;

[0014] Figure 4 It is another directional stereogram of the present invention. DETAILED DESCRIPTION

[0015] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways, rotated 90 degrees or in other orientations, and the spatially relative descriptions used herein are interpreted accordingly.

[0016] The specific implementation of the present invention is described in detail below with reference to the accompanying drawings and preferred embodiments.

[0017] like Figures 1-4As shown, a lifting and rotating combination motion device comprises a base, a hollow rotating platform 1, a ball spline pair 2, a cylinder 3 and a floating structure 4; the cylinder is used to provide lifting motion power and is fixed on the side of the base; the hollow rotating platform is fixed on the upper part of the base and is used to provide rotating power; specifically, the base is composed of an upper base 5, a lower base 6 and support columns 7; the upper base and the lower base are connected together through the four support columns; the hollow rotating platform is installed on the upper base; the upper part of the ball spline pair is installed in the hollow rotating platform; the lower part of the ball spline pair is connected with the floating structure; the floating joint is used to correct the deviation caused by the linear motion of the spline shaft in the ball spline pair (ball spline shaft + ball spline female flange); the floating structure is connected with the piston rod of the cylinder through a lifting plate 8.

[0018] Specifically, the floating structure comprises a floating joint 9, a nest 10 and a lock sleeve 11; the nest is nested in the lower part of the ball spline pair; the floating joint is sleeved outside the nest; the lock sleeve is fixed on the lower part of the ball spline pair and limits the axial motion of the nest and the floating joint; the ball spline shaft can rotate relative to the nest 10 in the floating structure; the lock sleeve is a conventional standard part; its locking shaft principle is consistent with the principle of the pipe clamp of the pipeline at home; the nest plays a lubricating role.

[0019] The inside of the ball spline pair is a hollow structure 12; a process fluid pipeline can pass through the hollow structure.

[0020] The floating joint in the floating structure can be made of metal / non-metal material; the nest is made of non-metal material; the lock sleeve is made of metal / non-metal material; the fixed base, the support column and the lifting plate can be made of metal or non-metal material respectively.

[0021] The above description is only the preferred embodiment of the present application; it should be pointed out that, for ordinary skilled in the art, without departing from the principles of the present application, several improvements and refinements can be made; these improvements and refinements should also be considered as the protection scope of the present application.

Claims

1. A lifting and rotating combined motion device, characterized in that: The invention comprises a base, a hollow rotating swing table, a ball spline pair, a cylinder and a floating structure; the hollow rotating swing table is fixed to the upper part of the base, the upper part of the ball spline pair is installed in the hollow rotating swing table, the lower part of the ball spline pair is connected to the floating structure, the floating structure is connected to the piston rod of the cylinder through a lifting plate, and the cylinder is fixed to the side of the base; The floating structure includes a floating joint, a nest and a locking sleeve. The nest is sleeved on the lower part of the ball spline pair, the floating joint is sleeved outside the nest, and the locking sleeve is fixed on the lower part of the ball spline pair to limit the axial movement of the nest and the floating joint. The interior of the ball spline pair is a hollow structure; The base is composed of an upper base, a lower base and support columns. The upper base and the lower base are connected together by four support columns. The hollow rotating swing table is installed on the upper base. The floating joint is used to correct the deviation caused by the linear motion of the spline shaft in the ball spline pair; The nesting is made of non-metallic material, which plays a lubricating role.

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