Energy ray irradiation device

Abstract

An energy ray irradiation device includes an electron emission unit having an electron emission portion in a long strip shape, a housing having a window portion through which an energy ray based on an electron emitted from the electron emission portion is emitted, and a unit housing portion capable of housing the electron emission unit. A plurality of positioning portions that slidably abut against an outer surface of the electron emission unit or an inner surface of the unit housing portion and perform positioning of the electron emission portion with respect to the unit housing portion are provided between the outer surface of the electron emission unit and the inner surface of the unit housing portion.

Description

TECHNICAL FIELD

[0001] The present application relates to an energy ray irradiation apparatus. BACKGROUND

[0002] An electron beam irradiation apparatus including an elongated electron emitting portion is described in Patent Literature 1. In the electron beam irradiation apparatus, the electron emitting portion is mounted on an elongated link plate, and the link plate is slidably placed on an elongated rail. Thus, in the electron beam irradiation apparatus, the electron emitting portion can be taken out together with the link plate by sliding the link plate along the rail.

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent Application Laid-Open No. 2003-149398 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] The above-described electron beam irradiation apparatus is configured such that, when the electron emitting unit including the electron emitting portion is disposed in the housing, the lower surface of the elongated link plate is brought into abutment with the upper surface of the elongated rail. Therefore, in the electron beam irradiation apparatus, it is susceptible to the precision of each of the rail and the link plate, and the disposition precision of each component, and the like, and sometimes the electron emitting unit cannot be stably disposed.

[0008] Therefore, an object of the present application is to provide an energy ray irradiation apparatus capable of stably disposing an electron emitting unit.

[0009] MEANS OF SOLVING THE PROBLEM

[0010] An energy ray irradiation apparatus of one embodiment of the present application includes an electron emitting unit including an elongated electron emitting portion, a housing including a window portion through which an energy ray based on an electron emitted from the electron emitting portion is emitted, and a unit housing portion fixed in the housing, which is a cylindrical shape capable of housing the elongated electron emitting unit, and which is formed with an electron emitting opening at a portion of an outer peripheral surface opposite to the window portion, and a plurality of positioning portions provided between an outer surface of the electron emitting unit and an inner surface of the unit housing portion, which slidably abut against the outer surface of the electron emitting unit or the inner surface of the unit housing portion and perform positioning of the electron emitting portion with respect to the unit housing portion, and the electron emitting unit is capable of being inserted into the unit housing portion from an end portion of the unit housing portion.

[0011] In the energy ray irradiation apparatus, between the outer surface of the electron emission unit and the inner surface of the unit housing portion, a plurality of positioning portions that slidably abut against the outer surface of the electron emission unit or the inner surface of the unit housing portion is provided. That is, the elongated electron emission unit is disposed in the unit housing portion by being supported at a plurality of positions where the positioning portions are provided. Thus, the energy ray irradiation apparatus can stably dispose the electron emission unit even if the electron emission unit is elongated.

[0012] The energy ray irradiation apparatus can further include a power supply portion that supplies power to the electron emission unit, the electron emission unit being capable of being inserted with respect to the unit housing portion from one end portion of the unit housing portion, the power supply portion being provided inside the housing on the side of the other end portion of the unit housing portion and being electrically connected to the electron emission unit by abutting against the electron emission unit in a state where the electron emission unit is inserted into the unit housing portion. In this case, in the energy ray irradiation apparatus, the operation of disposing the electron emission unit in the unit housing portion (the operation of inserting the electron emission unit into the unit housing portion) can be performed without performing a special operation for connecting the electron emission unit to the power supply portion, thereby electrically connecting the electron emission unit to the power supply portion.

[0013] An introduction opening through which the electron emission unit can be introduced and which is opened and closed by a cover portion can be provided at one end portion of the housing. In this case, in the energy ray irradiation apparatus, the electron emission unit can be attached to and detached from the unit housing portion via the introduction opening of the housing.

[0014] The outer surface of the positioning portion can be a convex curved surface. In this case, the positioning portion can smoothly slide with respect to the outer surface of the electron emission unit or the inner surface of the unit housing portion. Thus, the energy ray irradiation apparatus can easily attach and detach the electron emission unit with respect to the unit housing portion.

[0015] The positioning portion can include a spherical body that abuts against the outer surface of the electron emission unit or the inner surface of the unit housing portion, and a holding portion that rotatably holds the spherical body. In this case, the electron emission unit can smoothly slide in the unit housing portion by the spherical body of the positioning portion being rotated. Thus, the energy ray irradiation apparatus can easily attach and detach the electron emission unit with respect to the unit housing portion.

[0016] A plurality of positioning portions can be provided along the extension direction of the electron emission portion. In this case, the energy ray irradiation apparatus can suppress the electron emission unit from being received inclined with respect to the extension direction of the unit housing portion, and can stably dispose the electron emission unit.

[0017] The positioning portions can also be provided at both end portions on one side and the other side in a direction along the extension direction of the electron emitting portion. In this case, the energy ray irradiation apparatus can further suppress the electron emitting unit from being received obliquely with respect to the extension direction of the unit housing portion, and can further stably arrange the electron emitting unit.

[0018] The positioning portions can also be provided on the outer surface of the electron emitting unit, and at a plurality of positions along the extension direction of the electron emitting portion at positions closer to the front end side of the insertion direction to the unit housing portion than a central position in the extension direction. In this case, the energy ray irradiation apparatus, when the elongated electron emitting unit is inserted into the unit housing portion, the two or more positioning portions arranged at the end portions closer to the front end side of the insertion direction than the central position in the extension direction abut against the unit housing portion at an early stage of the insertion. That is, in the energy ray irradiation apparatus, when the elongated electron emitting unit is inserted, the positioning of the electron emitting unit with respect to the unit housing portion is performed at a stage when the front end thereof is inserted. Thus, the energy ray irradiation apparatus can stably attach and detach the electron emitting unit with respect to the unit housing portion even when the electron emitting unit is elongated.

[0019] The positioning portions can also be provided in a plurality along the circumferential direction of the electron emitting unit. In this case, the energy ray irradiation apparatus can stabilize the position of the electron emitting unit in a direction orthogonal to the extension direction of the electron emitting portion within the unit housing portion.

[0020] The energy ray irradiation apparatus can also include a protrusion portion protruding from the outer surface side of the unit housing portion to the inner surface side of the unit housing portion, and the electron emitting unit can also have a slot portion formed in the rotation restricting member of the outer edge portion extending along the extension direction of the electron emitting portion, and the position in the rotation direction of the electron emitting unit within the unit housing portion can be determined by the protrusion portion being inserted into the slot portion. In this case, the energy ray irradiation apparatus can determine the position (orientation) in the rotation direction of the electron emitting unit when viewed along the extension direction of the electron emitting unit by the slot portion and the protrusion portion.

[0021] The protrusion portions can be provided on both end sides of the unit housing portion, and the rotation restricting members can be provided on both end sides of the electron emitting unit. In this case, the energy ray irradiation apparatus can determine the position in the rotation direction of the electron emitting unit on both end sides of the electron emitting unit, and can stably arrange the electron emitting unit.

[0022] The aforementioned energy irradiation apparatus can also be configured as an electron beam irradiation apparatus that emits electrons from a window as energy rays. Alternatively, the aforementioned energy irradiation apparatus can also include an X-ray generating unit that generates X-rays by incident electrons emitted from the electron emitting unit, thus configuring an X-ray irradiation apparatus that emits X-rays from a window as energy rays. In this case, both an electron beam irradiation apparatus and an X-ray irradiation apparatus capable of stably configuring the electron emitting unit can be obtained.

[0023] The effects of the invention

[0024] According to the present invention, the electron emission unit can be stably configured. Attached Figure Description

[0025] Figure 1 This is a perspective view of the electron beam irradiation device according to the embodiment.

[0026] Figure 2 It means Figure 1 A partial cross-sectional view of the internal structure of the electron beam irradiation device.

[0027] Figure 3 It is along Figure 1 A cross-sectional view of line III-III.

[0028] Figure 4 This is a 3D view of the filament unit.

[0029] Figure 5 This is a partial cross-sectional view of the filament unit.

[0030] Figure 6 This is a partial cross-sectional view showing the insertion of the filament unit into the track.

[0031] Figure 7 This is a cross-sectional view showing the structure around the end of the terminal holding component of the filament unit.

[0032] Figure 8 This is a cross-sectional view showing the structure around the end of the filament unit on the side of the rotation restriction component.

[0033] Figure 9 It is along Figure 7 A cross-sectional view of the IX-IX line.

[0034] Figure 10 It is along Figure 8 A cross-sectional view of the XX line.

[0035] Figure 11 (a) is a cross-sectional view showing the structure of the filament unit and the track when the filament unit is irradiated with an electron beam in the horizontal direction. Figure 11(b) is a sectional view of the structure of the filament unit and the rail in a case where the filament unit irradiates the electron beam in a downward direction. DETAILED DESCRIPTION

[0036] Embodiments of the present application will be described below with reference to the accompanying drawings. Note that the same or similar components are denoted by the same reference numerals throughout the drawings, and repeated explanation is omitted.

[0037] Figure 1 The electron beam irradiation apparatus (energy ray irradiation apparatus) 1 illustrated is used to perform, for example, hardening of ink, sterilization, or surface modification of an irradiation target by irradiating the irradiation target with an electron beam (energy ray) EB. Note that hereinafter, the side on which the electron beam EB is irradiated by the electron beam irradiation apparatus 1, i.e., the electron beam exit side (window portion 9 side) is referred to as the "front side".

[0038] As Figures 1-3 As illustrated in FIG. 1, the electron beam irradiation apparatus 1 includes a filament unit (electron beam emission unit) 2, a vacuum container (housing) 3, a cathode holding member 4, a cathode holding member 5, a rail portion (unit housing portion) 6, a high-voltage lead-through insulating member (power supply portion) 7, and an insulating support member 8. The filament unit 2 is an electron beam generation portion that generates an electron beam EB. Note that the filament unit 2 is a long, thin unit.

[0039] The vacuum container 3 is formed of an electrically conductive material such as metal. The vacuum container 3 is substantially cylindrical. The vacuum container 3 forms a substantially cylindrical vacuum space R inside. The filament unit 2 is arranged inside the vacuum container 3 in the axis direction (long axis direction) of the substantially cylindrical vacuum space R. An opening portion 3a that communicates the vacuum space R with the space outside is provided at a position on the front side of the filament unit 2 in the vacuum container 3. The vacuum container 3 includes a window portion 9 through which electrons emitted from the filament unit 2 pass. The window portion 9 is fixed to the opening portion 3a in a vacuum-sealed manner.

[0040] The window portion 9 includes a window member 9a and a support body 9b. The window member 9a is formed in a thin film shape. As the material of the window member 9a, a material with excellent electron beam EB permeability (e.g., beryllium, titanium, aluminum, or the like) is used. The support body 9b is arranged at a position closer to the vacuum space R side than the window member 9a and supports the window member 9a. The support body 9b is a mesh-shaped member having a plurality of holes through which the electron beam EB passes.

[0041] An exhaust port 3b for discharging air from the vacuum container 3 is provided at the rear side of the filament unit 2. A vacuum pump (not shown) is connected to the exhaust port 3b, and the air inside the vacuum container 3 is discharged by the vacuum pump. Thus, the interior of the vacuum container 3 becomes a vacuum space R. The opening 3c at the other end of the generally cylindrical vacuum container 3 is closed by the flange 7a of the high voltage induction insulation member 7. A shell end plate 3f is provided at one end of the vacuum container 3. An insertion port (induction opening) 3d (see reference) communicating with the inner and outer spaces of the vacuum container 3 is provided on the shell end plate 3f. Figure 6 The insertion port 3d is sized to allow the filament unit 2 to be inserted. The insertion port 3d is configured to close relative to the cover 3e, which is removable (openable and detachable) relative to the end plate 3f of the housing.

[0042] A pair of cathode holding members 4 and 5, which serve as the cathode potential, are respectively disposed within the vacuum container 3. Between the cathode holding member 4 on one side and the cathode holding member 5 on the other side, a track portion 6 is provided, which serves as both the cathode potential and the surrounding electrode surrounding the filament unit 2. The track portion 6 is a conductive, elongated component with a roughly C-shaped cross-section. The track portion 6 is configured with an opening of a roughly C-shaped cross-section facing forward (towards the window 9). The track portion 6 holds the filament unit 2 in its inner portion (internal space). In other words, the track portion 6 is a long, cylindrical tube capable of housing the filament unit 2. Furthermore, an opening (electron emission opening) is formed on the outer peripheral surface of the track portion 6 opposite to the window 9. The two ends of the track portion 6 are respectively fixed to the vacuum container 3 by the cathode holding member 4, the high-voltage induction insulating member 7, the cathode holding member 5, and the insulating support member 8.

[0043] The insertion port 3d of the housing end plate 3f is opposite to one end of the track part 6 (the end fixed to the cathode holding member 5). With the cover 3e of the vacuum container 3 removed (opened), the filament unit 2 passes through the insertion port 3d of the housing end plate 3f and the insertion holes 5a and 8a respectively provided in the cathode holding member 5 and the insulating support member 8 (see reference). Figure 8 The filament unit 2 is inserted into the inner side (inner space) of the track section 6 from one end of the track section 6. Thus, the filament unit 2 is held in the track section 6. In this way, the filament unit 2 can be inserted and removed from the track section 6 from one end of the track section 6 (it can be detachably inserted).

[0044] The high-voltage induction insulating member 7 supplies power to the filament unit 2. The high-voltage induction insulating member 7 is located at the end of the opening 3c on the other side of the vacuum container 3. The end of the high-voltage induction insulating member 7 on the other side protrudes outward from the opening 3c of the vacuum container 3. The high-voltage induction insulating member 7 has a flange 7a extending radially outward, sealing the opening 3c of the vacuum container 3. The high-voltage induction insulating member 7 is formed of an insulating material (e.g., an insulating resin such as epoxy resin, ceramic, etc.). The cathode holding member 4 holds the end of the high-voltage induction insulating member 7 in a state of electrical insulation from the vacuum container 3, which is at ground potential.

[0045] Furthermore, the high-voltage induction insulating component 7 is a high-voltage-resistant connector used to receive high-voltage supply from an external power supply device of the electron beam irradiation device 1. A high-voltage supply plug (not shown) is inserted into the high-voltage induction insulating component 7. Internal wiring for supplying high-voltage from the outside to the filament unit 2 and the like is provided inside the high-voltage induction insulating component 7. This internal wiring is covered by the insulating material constituting the high-voltage induction insulating component 7 to ensure insulation from the vacuum container 3. The end of the high-voltage induction insulating component 7 disposed within the vacuum container 3 (the end supporting the cathode holding component 4) faces the end of the track portion 6 (the end fixed to the cathode holding component 4).

[0046] An insulating support member 8 is disposed at one end of the housing end plate 3f (the end on the cover 3e side) within the vacuum container 3. The insulating support member 8 is formed of an insulating material (e.g., an insulating resin such as epoxy resin, ceramic, etc.). The insulating support member 8 is supported by the housing end plate 3f. The cathode holding member 5 is supported by the insulating support member 8 in an electrically insulated state relative to the vacuum container 3.

[0047] like Figures 3-6 As shown, the filament unit 2 is configured as a unit that can be attached to and detached from the track section 6. The filament unit 2 includes a filament (electron emission section) 10, a main frame 11, a gate electrode 12, a sub-frame 13, a power supply line 14, a guide member 15, a terminal holding member (rotation limiting member) 16, a filament fixing member 17, a rotation limiting member 18, and a tension holding unit 19.

[0048] The main frame 11 is a long strip with a roughly C-shaped cross-section. The main frame 11 is positioned with its roughly C-shaped opening facing forward (towards the window 9). A filament fixing member 17 is provided at one end of the main frame 11, inside the inner space. Additionally, a tension retaining unit 19 is provided at one end of the main frame 11, inside the inner space.

[0049] The filament 10 is an electron emission portion that emits electrons that become the electron beam EB by being heated by electric current. The filament 10 is a linear member and is a long strip-shaped member that extends from one side to the other side in the desired axis line L. The filament 10 is formed of a high melting point metal material, such as a material in which tungsten is a main component, or the like. One end portion of the filament 10 is connected to the tension holding unit 19. The other end portion of the filament 10 is connected to the filament fixing member 17.

[0050] The terminal holding member 16 is installed to the other end portion of the main frame 11. The terminal holding member 16 holds the filament terminal T1 that supplies electric current for the filament 10 to emit electrons, the high voltage terminal T2 that supplies a cathode potential to the filament unit 2, and the gate electrode terminal T3 that supplies an applied voltage to the gate electrode 12 in a state of being electrically insulated from each other. The filament terminal T1 is connected to the other end portion of the power supply line 14. The high voltage terminal T2 is electrically connected to the filament fixing member 17. A guide groove (groove portion) 16a that extends in the axis line L direction (the extension direction of the filament 10) is provided to the outer edge portion of the terminal holding member 16. In the present embodiment, two guide grooves 16a are provided to the terminal holding member 16. When viewed in the axis line L direction, the two guide grooves 16a are provided in a manner of facing each other with the axis line L interposed therebetween. The filament unit 2 is inserted from one end portion of the rail portion 6 to the inside of the rail portion 6, via the insertion hole 5a and 8a provided to the cathode holding member 5 and the insulating support member 8, and the insertion port 3d of the case end plate 3f, starting from the end portion on the other side where the terminal holding member 16 is provided.

[0051] The rotation restricting member 18 is installed to the one end portion of the main frame 11. That is, the filament fixing member 17 and the rotation restricting member 18 are provided at positions of both end portions of the filament unit 2, respectively. A guide groove (groove portion) 18a that extends in the axis line L direction (the extension direction of the filament 10) is provided to the outer edge portion of the rotation restricting member 18. In the present embodiment, two guide grooves 18a are provided to the rotation restricting member 18. When viewed in the axis line L direction, the two guide grooves 18a are provided in a manner of facing each other with the axis line L interposed therebetween. In the present embodiment, the guide groove 16a and the guide groove 18a are provided so as to overlap each other when viewed in the axis line L direction.

[0052] The sub frame 13 is a long strip-shaped member in which the cross section is substantially in the shape of aコ. The sub frame 13 is disposed in parallel to the main frame 11. The power supply line 14 is connected to the tension holding unit 19 through the inside (the inside space) of the sub frame 13 from the connection position of the filament terminal T1, and the sub frame 13 has a function of protecting the power supply line 14. The main frame 11 and the sub frame 13 are linked to each other by a plurality of guide members 15.

[0053] In this embodiment, the guide member 15 includes a first guide portion 15a, a second guide portion 15b, and a third guide portion 15c. The first guide portion 15a connects the main frame 11 and the sub-frame 13 at the end of the filament unit 2 on the side where the terminal holding member 16 is provided. The third guide portion 15c connects the main frame 11 and the sub-frame 13 at the end of the filament unit 2 on the side where the rotation limiting member 18 is provided. Thus, the first guide portion 15a and the third guide portion 15c are respectively provided at both ends of the filament unit 2. The second guide portion 15b connects the main frame 11 and the sub-frame 13 at a position between the first guide portion 15a and the third guide portion 15c. Here, as... Figure 5 As shown, the central position in the extending direction of the filament unit 2 is designated as the central position P. Furthermore, in the filament unit 2, the portion closer to the terminal holding member 16 (the other side: the front end side in the insertion direction towards the track portion 6) than the central position P is designated as the front end portion Y. In this embodiment, the second guide portion 15b is provided in the front end portion Y of the filament unit 2. That is, the first guide portion 15a and the second guide portion 15b are provided in the front end portion Y.

[0054] A plurality of positioning portions 20 are provided on the outer surface of the first guide portion 15a. The positioning portions 20 slidably abut against the inner surface of the track portion 6 to position the filament unit 2 relative to the track portion 6. In this embodiment, as... Figure 3 As shown, multiple positioning parts 20 are provided on the outer surface of the first guide part 15a (filament unit 2) along the circumference of the filament unit 2. Furthermore, the circumference of the filament unit 2 refers to the direction in which it rotates around the filament unit 2 about the extending direction of the elongated filament unit 2. Four positioning parts 20 are provided relative to the first guide part 15a.

[0055] The positioning part 20 includes a spherical body 20a and a holding part 20b. The spherical body 20a abuts against the inner surface of the track part 6. The holding part 20b rotatably holds the spherical body 20a relative to the first guide part 15a. Furthermore, the holding part 20b holds the spherical body 20a in a state where a portion of the spherical body 20a is exposed, allowing it to abut against the inner surface of the track part 6. Thus, when the filament unit 2 slides inside the track part 6 (internal space), it can slide easily by rotating the spherical body 20a.

[0056] Multiple positioning parts 20 are provided in the second guide section 15b and the third guide section 15c respectively. The positioning parts 20 provided in the second guide section 15b and the third guide section 15c have the same structure as the positioning parts 20 provided in the first guide section 15a, and detailed description is omitted.

[0057] Thus, by providing positioning parts 20 in the first guide part 15a to the third guide part 15c respectively, multiple positioning parts 20 are provided along the extension direction of the filament 10. That is, the positioning parts 20 are respectively provided at multiple positions along the extension direction of the filament 10.

[0058] In addition, positioning portions 20 are respectively provided at the first guide portion 15a and the third guide portion 15c located at both ends of the filament unit 2. That is, the positioning portions 20 are respectively provided at both ends of one side and the other side of the filament unit 2 in the direction along the extension direction of the filament 10.

[0059] A first guide portion 15a and a second guide portion 15b are provided on the front end side portion Y of the filament unit 2. That is, on the front end side portion Y of the filament unit 2, a positioning portion 20 of the first guide portion 15a and a positioning portion 20 of the second guide portion 15b are respectively provided at multiple positions along the extension direction of the filament unit 2.

[0060] The gate electrode 12 is disposed on the front side of the filament 10 and is supported by the guide member 15 across the insulating member 22. Multiple holes are formed in the gate electrode 12 (see reference). Figure 4 (etc.). Gate electrode 12 is electrically connected to gate electrode terminal T3 via wiring not shown.

[0061] The tension holding unit 19 maintains the tension of the filament 10. Here, the tension holding unit 19 maintains the tension of the filament 10 by using a spring to press or stretch a movable body connected to one end of the filament 10. The tension holding unit 19 is installed on the main frame 11 in a state of electrical insulation from the main frame 11 via an insulating member or the like. A power supply line 14 is connected to one end of the tension holding unit 19. The tension holding unit 19 maintains the tension of the filament 10 and supplies power to the filament 10 via the power supply line 14.

[0062] like Figures 6-8 As shown, the filament unit 2, starting from the end on the other side where the terminal holding member 16 is provided, is inserted into and fixed to the inner side (inner space) of the track portion 6 via the insertion port 3d of the housing end plate 3f, the insertion hole 8a provided in the insulating support member 8, and the insertion hole 5a provided in the cathode holding member 5. Here, as... Figure 7 and Figure 8 As shown, the track section 6 includes a surrounding section 60, a first annular section 61, and a second annular section 62.

[0063] The surrounding portion 60 surrounds the part of the filament unit 2 where the filament 10 is located. The surrounding portion 60 is a long, strip-shaped component with a roughly C-shaped cross-section. For example... Figure 7As shown, the first annular portion 61 is connected to the other end of the surrounding portion 60. The end of the track portion 6 on the side of the first annular portion 61 (the other side) is fixed to the cathode holding member 4. The cathode holding member 4 is cylindrical in shape, surrounding the end of the track portion 6 on the other side where the first annular portion 61 is located. Figure 8 As shown, the second annular portion 62 is connected to one end of the surrounding portion 60. The end of the track portion 6 on the side of the second annular portion 62 (one side) is fixed to the cathode holding member 5. The cathode holding member 5 is cylindrical in shape, surrounding the end of the track portion 6 on the side where the second annular portion 62 is provided.

[0064] like Figure 7 As shown, the first annular portion 61 has an abutment surface 61b facing one side, namely the insertion port 3d side (enclosing portion 60 side) of the housing end plate 3f. When the filament unit 2 is inserted into the track portion 6, the abutment surface 61b abuts against the front end face of the other side of the filament unit 2 (the end face of the other side of the terminal holding member 16). Thus, the abutment surface 61b can determine the insertion depth of the filament unit 2. The position of the filament unit 2 with its front end face abutting against the abutment surface 61b is defined as the insertion completion position. The high voltage conduction insulation member 7 abuts against the filament unit 2 and is electrically connected to the filament unit 2 when the filament unit 2 is inserted relative to the track portion 6 to the insertion completion position.

[0065] More specifically, three connection terminals T for supplying power to the filament unit 2 are provided on the track portion 6 side (one side) of the high-voltage conducting insulating member 7. The connection terminals T pass through the through holes in the wall portion 4a of the cathode holding member 4 without contacting the cathode holding member 4, and are exposed on the track portion 6 side (one side). When the filament unit 2 is inserted to the fully inserted position, the front ends of the filament terminal T1, the high-voltage terminal T2, and the gate electrode terminal T3 respectively abut against the front ends of the three connection terminals provided on the high-voltage conducting insulating member 7. Thus, the filament terminal T1, etc., are electrically connected to the connection terminals T of the high-voltage conducting insulating member 7.

[0066] Here, the filament terminal T1 can also be a structure that is elastically deformable in the insertion direction of the filament unit 2. In this case, the filament terminal T1 can be more reliably brought into abutment with the connection terminal T to be electrically connected. Also, it is a structure in which the end surface of the filament terminal T1 abuts against the end surface of the connection terminal T. Therefore, even if there is a positional shift between the center position of the filament terminal T1 and the center position of the connection terminal T, as long as the end surfaces abut against each other, the filament terminal T1 and the connection terminal T will be electrically connected. Likewise, even if there is a deviation in the protruding length of the filament terminal T1 and the connection terminal T, the filament terminal T1 can absorb the deviation in the protruding length by elastic deformation to be able to abut against the connection terminal T. Further, the impact at the time of insertion of the filament unit 2 to abut the filament terminal T1 against the connection terminal T can be mitigated by the elastic deformation of the filament terminal T1. Likewise, the high-voltage terminal T2 and the grid electrode terminal T3 can also be structures that are elastically deformable in the insertion direction of the filament unit 2. As with the filament terminal T1, it can also be a structure in which the connection terminal T is elastically deformable in the insertion direction of the filament unit 2.

[0067] As shown in Figure 7 and Figure 9 , the first annular portion 61 surrounds the terminal holding member 16 in a state in which the front end surface of the filament unit 2 abuts against the abutment surface 61b. Here, in Figure 9 , the illustration of the cathode holding member 4 is omitted. The first annular portion 61 is provided with a guide protrusion (protrusion portion) 61a that protrudes from the outer surface side (outer peripheral side) of the first annular portion 61 (the track portion 6) toward the inner surface side (inner side) of the first annular portion 61 (the track portion 6). In the present embodiment, two guide protrusions 61a are provided in the first annular portion 61. When viewed in the direction along the axis L, the two guide protrusions 61a are provided in a manner of facing each other with the axis L interposed therebetween. When the filament unit 2 is inserted into the track portion 6, the guide protrusion 61a of the first annular portion 61 is fitted into the guide groove 16a of the terminal holding member 16 provided at the front end portion of the filament unit 2. Thereby, the position (orientation) in the rotational direction of the filament unit 2 within the track portion 6 is determined. Also, the filament unit 2 can be aligned with and connected to the three connection terminals T provided in the high-voltage lead-through insulating member 7 and the filament terminal T1 to the grid electrode terminal T3.

[0068] As shown in Figure 8 and Figure 10 , the second annular portion 62 surrounds the rotation restricting member 18 in a state in which the front end surface of the filament unit 2 abuts against the abutment surface 61b. Here, in Figure 10The cathode holding member 5 is omitted from the illustration. The second annular portion 62 is provided with guide protrusions (protrusions) 62a that protrude from the outer surface (outer peripheral side) of the second annular portion 62 (track portion 6) towards the inner surface (inner side) of the second annular portion 62 (track portion 6). In this embodiment, two guide protrusions 62a are provided in the second annular portion 62. When viewed along the axis L, the two guide protrusions 62a are arranged opposite each other, sandwiching the axis L. Thus, guide protrusions 61a and 62a are respectively provided at the two ends of the track portion 6. In this embodiment, guide protrusions 61a and 62a are arranged such that when viewed along the axis L, guide protrusions 61a and 62a overlap each other. When the filament unit 2 is inserted into the track portion 6, the guide protrusions 62a of the second annular portion 62 are embedded in the guide grooves 18a provided in the rotation limiting member 18 of the filament unit 2. Therefore, the position (or orientation) in the rotational direction with the extension direction of the filament unit 2 in the track section 6 as the axis is determined.

[0069] like Figure 8 As shown, with the filament unit 2 inserted into the track portion 6, a unit pressing part 21 is installed in the insertion hole 5a of the cathode holding member 5. The unit pressing part 21 includes a fixing part 21a and a pressing member 21b. The fixing part 21a is detachably installed on the cathode holding member 5 such that it covers the insertion hole 5a of the cathode holding member 5. The pressing member 21b is installed on the side of the fixing part 2a on the filament unit 2 side (track portion 6 side), that is, the other side. The pressing member 21b presses the filament unit 2 toward the inward side in the insertion direction (cathode holding member 4 side), that is, the other side. The pressing member 21b is, for example, a compression spring. By pressing the filament unit 2 with the unit pressing part 21, the front end face of the filament unit 2 is maintained in contact with the contact surface 61b of the first annular portion 61. Furthermore, the unit pressing part 21 is not limited to being installed on the cathode holding member 5; it can be detachably installed on the insulating support member 8 or detachably installed on the housing end plate 3f.

[0070] When the filament 10 is in the fully inserted position of the filament unit 2 into the track section 6, it is heated by being energized and emits electrons by applying a high negative voltage of 10kV to 100kV. A predetermined voltage is applied to the gate electrode 12. For example, a voltage approximately 100V to 150V closer to the positive side than the negative voltage applied to the filament 10 can be applied to the gate electrode 12. Electrons are drawn out by the gate electrode 12, and an electric field is formed to suppress diffusion. As a result, the electrons emitted from the filament 10 are emitted forward as an electron beam EB through the hole provided in the gate electrode 12.

[0071] Here, the electron beam irradiation device 1 is configured with its window 9 facing horizontally, for example, when irradiating the electron beam EB in a horizontal direction. Alternatively, the electron beam irradiation device 1 is configured with its window 9 facing downwards, for example, when irradiating the electron beam EB downwards. In this way, the orientation of the electron beam irradiation device 1 is determined according to the orientation of the irradiated electron beam EB. Even when the electron beam irradiation device 1 is configured in various orientations, the filament unit 2 can be stably arranged via the track section 6.

[0072] Specifically, such as Figure 11 As shown in (a), four positioning portions 20 are provided at predetermined intervals along the circumference of the filament unit 2 on the outer surface of the first guide portion 15a. Additionally, as... Figure 11 As shown in (a), when the electron beam EB is irradiated horizontally from the filament unit 2, the four positioning portions 20 provided on the first guide portion 15a are arranged such that two positioning portions 20 are located on the downward-facing surface of the guide member 15 (filament unit 2). Furthermore, the "downward-facing surface" includes not only the surface directly downward but also the surface diagonally downward. That is, the downward-facing surface refers to the surface that faces downward compared to the horizontal direction. Therefore, even when the filament unit 2 is affected by gravity, the two positioning portions 20 provided on the downward-facing surface abut against the inner surface 60a of the surrounding portion 60 of the track portion 6.

[0073] like Figure 11 As shown in (b), when the electron beam EB is irradiated from the filament unit 2 in a directly downward direction, the four positioning portions 20 provided on the first guide portion 15a are arranged such that two positioning portions 20 are located on the downward-facing surface of the guide member 15 (filament unit 2). Therefore, even when the filament unit 2 is affected by gravity, the two positioning portions 20 provided on the downward-facing surface abut against the inner surface 60a of the surrounding portion 60 of the track portion 6.

[0074] In addition, similar to the case where the electron beam EB is irradiated in the horizontal and downward directions, the four positioning parts 20 provided in the first guide part 15a are configured such that even when the electron beam EB is irradiated in the upward direction from the filament unit 2, two of the positioning parts 20 are located on the downward side of the guide member 15 (filament unit 2).

[0075] Thus, even in the case where the electron beam irradiation apparatus 1 is arranged so as to irradiate the electron beam EB in any direction, the filament unit 2 is arranged in a stable state with respect to the track portion 6 by the two positioning portions 20 provided on the face of the first guide portion 15a facing the lower side. The second guide portion 15b and the third guide portion 15c are also arranged in the same configuration as the positioning portions 20 of the first guide portion 15a. Thus, even in the case where the electron beam irradiation apparatus 1 is arranged so as to irradiate the electron beam EB in any direction, the filament unit 2 can be arranged in a stable state with respect to the track portion 6 by the positioning portions 20 provided on the second guide portion 15b and the positioning portions 20 provided on the third guide portion 15c.

[0076] In addition, the electron beam irradiation apparatus 1 is not limited to the case where the electron beam EB is irradiated in the horizontal direction, the directly downward direction, and the directly upward direction, and is sometimes arranged so as to irradiate the electron beam EB in various directions such as the obliquely downward direction and the obliquely upward direction. Even in this case, with respect to each of the first guide portion 15a to the third guide portion 15c, two positioning portions 20 are provided on the face facing the lower side.

[0077] Thus, in a state where the filament unit 2 is arranged so as to irradiate the electron beam EB in the first direction, the plurality of positioning portions 20 provided on the first guide portion 15a are arranged so as to be provided on the face of the first guide portion 15a (the filament unit 2) facing the lower side in a number of two or more. In addition, in a state where the filament unit 2 is arranged so as to irradiate the electron beam EB in the second direction different from the first direction, the plurality of positioning portions 20 provided on the first guide portion 15a are arranged so as to be provided on the face of the first guide portion 15a (the filament unit 2) facing the lower side in a number of two or more. The positioning portions 20 provided on the second guide portion 15b and the third guide portion 15c are also arranged in the same configuration as the positioning portions 20 provided on the first guide portion 15a.

[0078] In addition, among the plurality of positioning portions 20 provided on the first guide portion 15a, the positioning portions 20 along the circumferential direction of the filament unit 2 are arranged so as to have the maximum interval therebetween shorter than the semicircumferential amount. The positioning portions 20 provided on the second guide portion 15b and the third guide portion 15c are also arranged so as to have the same interval therebetween as the positioning portions 20 provided on the first guide portion 15a.

[0079] The four positioning portions 20 provided on the first guide portion 15a can be arranged so as to be linearly symmetrical with respect to a desired reference line or point-symmetrical with respect to a predetermined reference point when viewed along the extension direction of the filament 10. The positioning portions 20 provided on the second guide portion 15b and the third guide portion 15c can also be arranged in the same configuration as the positioning portions 20 provided on the first guide portion 15a.

[0080] As described above, in the electron beam irradiation apparatus 1, between the outer surface of the filament unit 2 and the inner surface 60a of the track portion 6, there are the plurality of positioning portions 20 that slidably abut against the inner surface 60a of the track portion 6. That is, the long strip-shaped filament unit 2 is disposed within the track portion 6 by being supported at a plurality of positions where the positioning portions 20 are provided. Thus, the electron beam irradiation apparatus 1 easily causes the positioning portions 20 of the filament unit 2 to abut against the inner surface 60a of the track portion 6, for example, as compared with a case where the entire lower surface of the filament unit 2 abuts against the bottom surface of the track portion 6. That is, the electron beam irradiation apparatus 1, by the filament unit 2 having the plurality of positioning portions 20, can perform positioning of the filament unit 2 with respect to the track portion 6 and hold the filament unit 2 by the track portion 6. As described above, the electron beam irradiation apparatus 1 can stably dispose the filament unit 2 even if the filament unit 2 is long strip-shaped.

[0081] The three connection terminals T provided to the high-voltage lead-in insulating member 7 are electrically connected to the filament terminal T1 to the gate electrode terminal T3 of the filament unit 2, respectively, in a state where the filament unit 2 is inserted into the track portion 6 and inserted to the insertion completion position. In this case, in the electron beam irradiation apparatus 1, the operation of disposing the filament unit 2 within the track portion 6 (the operation of inserting the filament unit 2 into the track portion 6) can be performed without performing a special operation for connecting the filament unit 2 and the connection terminals T of the high-voltage lead-in insulating member 7, thereby electrically connecting the filament unit 2 and the high-voltage lead-in insulating member 7.

[0082] At a portion of the vacuum container 3 that is opposite to one end portion of the track portion 6, there is provided an insertion opening 3d that is opened and closed by a lid portion 3e. In this case, in the electron beam irradiation apparatus 1, the filament unit 2 can be attached to and detached from the one end portion of the track portion 6 via the insertion opening 3d of the vacuum container 3.

[0083] The positioning portion 20 includes a spherical body 20a. In this case, by rotating the spherical body 20a of the positioning portion 20, the filament unit 2 can smoothly slide within the track portion 6. Thus, the electron beam irradiation apparatus 1 can easily attach to and detach from the filament unit 2 with respect to the track portion 6.

[0084] The positioning portions 20 are provided to the first guide portion 15a to the third guide portion 15c that are provided along the extension direction of the filament 10, respectively. That is, the positioning portions 20 are provided in plurality along the extension direction of the filament 10. In this case, the electron beam irradiation apparatus 1 can suppress the filament unit 2 from being received obliquely with respect to the extension direction of the track portion 6, and can stably dispose the filament unit 2.

[0085] The positioning portions 20 are provided to both end portions of the filament unit 2, respectively. In this case, the electron beam irradiation apparatus 1 can further suppress the filament unit 2 from being received obliquely with respect to the extension direction of the track portion 6, and can further stably dispose the filament unit 2.

[0086] The first guide portion 15a and the second guide portion 15b including the positioning portion 20 are provided at the front end side portion Y of the filament unit 2. In this case, in the electron beam irradiation apparatus 1, the positioning portion 20 of the first guide portion 15a and the second guide portion 15b provided at the front end side portion Y of the filament unit 2 on the front end side in the insertion direction of the track portion 6 comes into contact with the inner surface 60a of the track portion 6 at an early stage of the insertion. That is, in the electron beam irradiation apparatus 1, the positioning of the filament unit 2 with respect to the track portion 6 is performed at an early stage at the time of the insertion of the filament unit 2. Thus, the electron beam irradiation apparatus 1 can stably attach and detach the filament unit 2 with respect to the track portion 6 even in the case where the filament unit 2 is long. Further, the insertion of the filament unit 2 in an inclined state can be suppressed, and the filament unit 2 can be prevented from being caught at other portions.

[0087] The positioning portion 20 is provided at a plurality of positions on the outer surface of the filament unit 2 along the circumferential direction of the filament unit 2. In this case, the electron beam irradiation apparatus 1 can stabilize the position of the filament unit 2 in a direction orthogonal to the extending direction of the filament unit 2 within the track portion 6.

[0088] The guide groove 16a of the terminal holding member 16 provided at the end portion of the filament unit 2 is fitted with the guide protrusion 61a of the first annular portion 61 provided at the track portion 6. Further, the guide groove 18a of the rotation restricting member 18 provided at the end portion of the filament unit 2 is fitted with the guide protrusion 62a of the second annular portion 62 provided at the track portion 6. In this case, the electron beam irradiation apparatus 1 can determine the position (orientation) in the rotation direction of the filament unit 2 as viewed in the extending direction of the filament unit 2 by the guide grooves 16a and 18a and the guide protrusions 61a and 62a.

[0089] Further, the guide grooves 16a and 18a are provided at both end portions of the filament unit 2. The guide protrusions 61a and 62a are provided at both end portions of the track portion 6. In this case, the electron beam irradiation apparatus 1 can determine the position in the rotation direction of the filament unit 2 at both end portions of the filament unit 2, and can stably arrange the filament unit 2. Further, for example, when the filament unit 2 is inserted into the track portion 6 in a manner that the guide protrusions 61a and 62a are fitted into the guide grooves 16a and 18a, respectively, the guide protrusion 61a and the guide groove 16a on the inner side (the other side) of the insertion direction are sometimes not visible from the operator. Even in this case, by fitting the guide protrusion 62a into the guide groove 18a on the front side (the one side) of the insertion direction, the guide protrusion 61a is also fitted into the guide groove 16a on the inner side of the insertion direction. In this way, the electron beam irradiation apparatus 1 can easily insert and arrange the filament unit 2 into the track portion 6 even in the structure where the guide grooves 16a and 18a are provided at both end portions of the filament unit 2 to determine the position in the rotation direction.

[0090] The above describes embodiments and various modifications of the present application, but the present application is not limited to the above-described embodiments and various modifications. For example, the positioning portion 20 is not limited to being provided to the outer surface of the filament unit 2, but can be provided to the inner surface 60a of the track portion 6. In this case, the positioning portion 20 abuts against the outer surface of the filament unit 2. In addition, the positioning portion 20 is not limited to the structure including the spherical body 20a. For example, the positioning portion 20 can be a convex portion whose outer surface is a convex curved surface. In this case, the filament unit 2 can slide while suppressing the convex curved surface-shaped convex portion as the positioning portion from smoothly being caught against the inner surface 60a of the track portion 6. Thus, the electron beam irradiation apparatus 1 can easily attach and detach the filament unit 2 with respect to the track portion 6. Furthermore, in the case where the positioning portion 20 is a convex portion, the outer surface of the positioning portion 20 can not be a convex curved surface. The positioning portion 20 is not limited to being provided to the outer surface of the guide member 15. It can be directly provided to the outer surface of the track portion 6 or the like. The guide member 15 has three guide portions as the first to third guide portions 15a to 15c, but the number of guide portions is not limited to three. In addition, the number of positioning portions 20 provided to one guide portion is not limited to four.

[0091] The guide protrusions 61a and 62a that determine the position in the rotation direction of the filament unit 2 are not limited to being provided at both end portions of the track portion 6. For example, the guide protrusions can be provided one or a plurality of positions between both end portions of the track portion 6 in addition to both end portions of the track portion 6, or can be integrally provided along the extension direction of the track portion 6. In this case, the position in the rotation direction of the filament unit 2 can be determined also at a stage of being inserted halfway into the track portion 6. In addition, the guide protrusions 61a and 62a are provided to the track portion 6, and the guide grooves 16a and 18a are provided to the filament unit 2, but they are not limited thereto. For example, the guide grooves can be provided to the track portion 6, and the guide protrusions can be provided to the filament unit 2.

[0092] The method of supplying power to the filament unit 2 from the high-voltage introduction insulating member 7 is not limited to the method of using the filament terminal T1 to the grid electrode terminal T3. The insulating support member 8 can not be a structure of being fixed to the housing end plate 3f. For example, it can be a structure of one end portion of the insulating support member 8 being fixed to the inner peripheral surface of the cylindrical portion of the vacuum container 3, and the other end portion of the insulating support member 8 being fixed to the cathode holding member 5.

[0093] The surrounding portion 60 of the track portion 6 is not limited to a shape of a substantially C-letter-shaped cross section. For example, the surrounding portion 60 can be a shape of a polygonal cross section. As for the shape of the guide member 15, it is not limited to the above-described shape, but can be a shape corresponding to the surrounding portion 60.

[0094] In addition, the electron beam irradiation apparatus 1 as the energy ray irradiation apparatus can also be configured as an X-ray irradiation apparatus that irradiates X-rays. In the case of being configured as the X-ray irradiation apparatus, an X-ray target (for example, tungsten, molybdenum, or the like) that generates X-rays by the incidence of the electron beam EB emitted from the filament unit 2 is included as an X-ray generation portion, and the X-rays generated by the X-ray target can be emitted from the window portion 9. In this case, as one example, Figure 1 The window portion 9 illustrated can also be changed to a window portion for X-ray irradiation that is composed of a window material (for example, beryllium, diamond, or the like) that has high transparency to X-rays and an X-ray target provided to the side of the vacuum space R of the face of the window material. Thereby, the electron beam EB emitted from the filament unit 2 can be caused to be incident to the X-ray target, and the X-rays can be caused to be emitted from the X-ray target.

[0095] At least a part of the above-described embodiments and various modifications can also be combined arbitrarily.

[0096] Explanation of Symbols

[0097] 1…electron beam irradiation apparatus (energy ray irradiation apparatus), 2…filament unit (electron emission unit), 3…vacuum container (housing), 3d…insertion port (introduction opening), 3e…cover portion, 6…rail portion (unit housing portion), 7…high-voltage introduction insulating member (power supply portion), 10…filament (electron emission portion), 16…terminal holding member (rotation restriction member), 16a, 18a…guide groove (groove portion), 18…rotation restriction member, 20…positioning portion, 20a…spherical body, 20b…holding portion, 61a, 62a…guide protrusion (protrusion portion).

Claims

1. An energy ray irradiation apparatus, wherein includes: an electron emitting unit having an electron emitting portion in a long strip shape; a housing having a window portion through which an energy ray based on an electron emitted from the electron emitting portion is emitted; and a unit housing portion fixed in the housing, in a cylindrical shape capable of housing the long strip of the electron emitting unit, and having an electron emitting opening formed in a portion of an outer peripheral surface opposite to the window portion, a plurality of positioning portions slidably abutting against an outer surface of the electron emitting unit or an inner surface of the unit housing portion and performing positioning of the electron emitting portion with respect to the unit housing portion are provided between the outer surface of the electron emitting unit and the inner surface of the unit housing portion, the electron emitting unit is capable of being inserted with respect to the unit housing portion from an end portion of the unit housing portion, a plurality of the positioning portions are provided along a circumferential direction of the electron emitting unit, a maximum interval of the positioning portions from each other along the circumferential direction of the electron emitting unit is shorter than a half of the circumferential direction of the electron emitting unit.

2. The energy ray irradiation apparatus according to claim 1, wherein the energy ray irradiation apparatus further includes a power supply portion that supplies power to the electron emitting unit, the electron emitting unit is capable of being inserted with respect to the unit housing portion from the end portion of one side of the unit housing portion, the power supply portion is provided in the housing at the end portion side of the other side of the unit housing portion, and is electrically connected to the electron emitting unit by abutting against the electron emitting unit in a state where the electron emitting unit is inserted in the unit housing portion.

3. The energy ray irradiation apparatus according to claim 2, wherein a lead-in opening through which the electron emitting unit is capable of being led in and which is opened and closed by a cover portion is provided at one end portion of the housing.

4. The energy ray irradiation apparatus according to claim 1, wherein an outer surface of the positioning portion is in a convex curved surface shape.

5. The energy ray irradiation apparatus according to claim 1, wherein the positioning portion includes a spherical body that abuts against the outer surface of the electron emitting unit or the inner surface of the unit housing portion, and a holding portion that rotatably holds the spherical body.

6. The energy ray irradiation apparatus according to claim 2, wherein the positioning portion includes a spherical body that abuts against the outer surface of the electron emitting unit or the inner surface of the unit housing portion, and a holding portion that rotatably holds the spherical body.

7. The energy ray irradiation apparatus according to claim 3, wherein the positioning portion includes a spherical body that abuts against the outer surface of the electron emitting unit or the inner surface of the unit housing portion, and a holding portion that rotatably holds the spherical body.

8. The energy ray irradiation apparatus according to any one of claims 1 to 7, wherein a plurality of the positioning portions are provided along an extension direction of the electron emitting portion.

9. The energy ray irradiation apparatus according to any one of claims 1 to 7, wherein the positioning portions are respectively provided at both end portions of one side and the other side in a direction along the extension direction of the electron emitting portion.

10. The energy ray irradiation apparatus according to any one of claims 1 to 7, wherein The positioning portions are provided on the outer surface of the electron emitting unit and are provided at a plurality of positions along the extending direction of the electron emitting portion at positions closer to the front end side in the insertion direction toward the unit housing portion than the central position in the extending direction of the electron emitting portion.

11. The energy ray irradiation apparatus according to claim 8, wherein The positioning portions are provided on the outer surface of the electron emitting unit and are provided at a plurality of positions along the extending direction of the electron emitting portion at positions closer to the front end side in the insertion direction toward the unit housing portion than the central position in the extending direction of the electron emitting portion.

12. The energy ray irradiation apparatus according to claim 9, wherein The positioning portions are provided on the outer surface of the electron emitting unit and are provided at a plurality of positions along the extending direction of the electron emitting portion at positions closer to the front end side in the insertion direction toward the unit housing portion than the central position in the extending direction of the electron emitting portion.

13. The energy ray irradiation apparatus according to any one of claims 1 to 7, wherein The energy ray irradiation apparatus further includes a protruding portion that protrudes from the outer surface side of the unit housing portion toward the inner surface side of the unit housing portion, The electron emitting unit further has a slot portion formed in the outer edge portion along the extending direction of the electron emitting portion as a rotation restricting member, The position of the electron emitting unit in the rotation direction within the unit housing portion is determined by the protruding portion being fitted into the slot portion.

14. The energy ray irradiation apparatus according to claim 8, wherein The energy ray irradiation apparatus further includes a protruding portion that protrudes from the outer surface side of the unit housing portion toward the inner surface side of the unit housing portion, The electron emitting unit further has a slot portion formed in the outer edge portion along the extending direction of the electron emitting portion as a rotation restricting member, The position of the electron emitting unit in the rotation direction within the unit housing portion is determined by the protruding portion being fitted into the slot portion.

15. The energy ray irradiation apparatus according to claim 9, wherein The energy ray irradiation apparatus further includes a protruding portion that protrudes from the outer surface side of the unit housing portion toward the inner surface side of the unit housing portion, The electron emitting unit further has a slot portion formed in the outer edge portion along the extending direction of the electron emitting portion as a rotation restricting member, The position of the electron emitting unit in the rotation direction within the unit housing portion is determined by the protruding portion being fitted into the slot portion.

16. The energy ray irradiation apparatus according to claim 10, wherein The energy ray irradiation apparatus further includes a protruding portion that protrudes from the outer surface side of the unit housing portion toward the inner surface side of the unit housing portion, The electron emitting unit further has a slot portion formed in the outer edge portion along the extending direction of the electron emitting portion as a rotation restricting member, The position of the electron emitting unit in the rotation direction within the unit housing portion is determined by the protruding portion being fitted into the slot portion.

17. The energy ray irradiation apparatus according to claim 11, wherein the unit housing portion further includes a protrusion portion that protrudes from an outer surface side of the unit housing portion toward an inner surface side of the unit housing portion, the electron emitting unit further has a slot portion formed in an outer edge portion extending in an extending direction of the electron emitting portion, the protrusion portion is inserted into the slot portion, thereby determining a position of the electron emitting unit in a rotational direction within the unit housing portion.

18. The energy ray irradiation apparatus according to claim 12, wherein the unit housing portion further includes a protrusion portion that protrudes from an outer surface side of the unit housing portion toward an inner surface side of the unit housing portion, the electron emitting unit further has a slot portion formed in an outer edge portion extending in an extending direction of the electron emitting portion, the protrusion portion is inserted into the slot portion, thereby determining a position of the electron emitting unit in a rotational direction within the unit housing portion.

19. The energy ray irradiation apparatus according to claim 13, wherein the protrusion portions are respectively provided on both end sides of the unit housing portion, the rotation restricting members are respectively provided on both end sides of the electron emitting unit.

20. The energy ray irradiation apparatus according to claim 14, wherein the protrusion portions are respectively provided on both end sides of the unit housing portion, the rotation restricting members are respectively provided on both end sides of the electron emitting unit.

21. The energy ray irradiation apparatus according to claim 15, wherein the protrusion portions are respectively provided on both end sides of the unit housing portion, the rotation restricting members are respectively provided on both end sides of the electron emitting unit.

22. The energy ray irradiation apparatus according to claim 16, wherein the protrusion portions are respectively provided on both end sides of the unit housing portion, the rotation restricting members are respectively provided on both end sides of the electron emitting unit.

23. The energy ray irradiation apparatus according to claim 17, wherein the protrusion portions are respectively provided on both end sides of the unit housing portion, the rotation restricting members are respectively provided on both end sides of the electron emitting unit.

24. The energy ray irradiation apparatus according to claim 18, wherein the protrusion portions are respectively provided on both end sides of the unit housing portion, the rotation restricting members are respectively provided on both end sides of the electron emitting unit.

25. The energy ray irradiation apparatus according to any one of claims 1 to 7, wherein an electron beam irradiation apparatus that emits the electron as the energy ray from the window portion is provided.

26. The energy ray irradiation apparatus according to claim 8, wherein an electron beam irradiation apparatus that emits the electron as the energy ray from the window portion is provided.

27. The energy ray irradiation apparatus according to claim 9, wherein an electron beam irradiation apparatus that emits the electron as the energy ray from the window portion is provided.

28. The energy ray irradiation apparatus according to claim 10, wherein an electron beam irradiation apparatus that emits the electron as the energy ray from the window portion is provided. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 29. The energy ray irradiation apparatus according to claim 13, wherein an electron beam irradiation apparatus configured to emit the electrons from the window portion as the energy ray.

30. The energy ray irradiation apparatus according to claim 19, wherein an electron beam irradiation apparatus configured to emit the electrons from the window portion as the energy ray.

31. The energy ray irradiation apparatus according to any one of claims 1 to 7, wherein the energy ray irradiation apparatus further includes an X-ray generating portion configured to generate X-rays by the electrons emitted from the electron emission portion being incident thereon, an X-ray irradiation apparatus configured to emit the X-rays from the window portion as the energy ray.

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