Ultra-precision Geometric Error Measuring Instrument Based on the Cooperation of Star Probe and V-shaped Workbench

Abstract

The ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench belongs to precision measuring equipment. The frame is composed of a main frame base, a longitudinal moving block, and a vertical support frame. A star probe is installed at the lower end of a vertical shaft, and a longitudinal laser interferometer fiber optic probe, a second laser interferometer fiber optic probe, and a first laser interferometer fiber optic probe are installed on the star probe. The ranging function beams in the laser light emitted by the laser interferometer fiber optic probes orthogonally converge at the center of the probe tip, and the laser light is respectively perpendicular to the laser reflectors in the V-shaped workbench. By adopting the above scheme, it can adapt to and meet the micro-nano level precision measurement of the dimensions and geometric errors of parts with complex shapes.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision measurement, and particularly relates to an ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench. Background Art

[0002] In recent years, the progress of microelectronics technology has triggered a miniaturization revolution in many fields. Micro / nano technology aiming at microfabrication, nanostructures and systems has emerged accordingly, and various micro / nano-scale micro-devices have appeared, such as MEMS products like micro-gears, micro-holes, micro-nozzles, micro-steps, etc.

[0003] When traditional coordinate measuring machines face the measurement scenarios of micro / nano-devices with geometric dimensions between dozens of micrometers and several millimeters and dimensional uncertainties between dozens of nanometers and hundreds of nanometers, the measurement accuracy and measurement size cannot meet the three-dimensional precision measurement requirements of these devices. At the same time, methods such as scanning probe microscopes (SPMs) and laser heterodyne interferometry techniques with resolutions in the nanometer and picometer ranges have a small measurement range and short probes, and cannot meet the three-dimensional measurement requirements of micro / nano-scale devices. Therefore, there is an urgent need in the existing industrial and academic circles for a measurement device that can measure the three-dimensional device size and geometric error and has a resolution in the micro / nano range to reliably evaluate the shape-complex micro / nano-scale micro-devices.

[0004] The invention patent "Small Micro / Nano-scale Coordinate Measuring Machine" (Publication No.: CN104457563A, Li Zhigang) provides a small micro / nano coordinate measuring machine. This invention uses a nano-positioning workbench, a CCD component and a probe head to design a small micro / nano-scale coordinate measuring machine. This micro / nano coordinate measuring machine has a relatively low cost, but it cannot measure the size and geometric error of parts with complex shapes. Summary of the Invention

[0005] Aiming at the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide an ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench, which can not only adapt to and meet the micro / nano-scale precision measurement of the size and geometric error of parts with complex shapes, but also achieve the purposes of high measurement accuracy, good measurement repeatability, fast measurement speed and high efficiency.

[0006] To achieve the above invention purpose, a technical solution provided by the present invention is as follows: An ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench, including a main machine base, a longitudinal movement block, a vertical support frame, and a vertical shaft. A longitudinally reciprocating movable longitudinal movement block is equipped on the upper end surface of the main machine base. The vertical support frame is equipped on both sides of the main machine base, and a vertical shaft is equipped on the upper end of the vertical support frame. The vertical shaft reciprocates longitudinally and transversely on the vertical support frame.

[0007] A star probe is installed at the lower end of the vertical shaft. The star probe consists of a probe connecting frame, a star-shaped frame, a probe tip, a longitudinal laser interferometer fiber optic probe tip, a second laser interferometer fiber optic probe tip, and a first laser interferometer fiber optic probe tip. The probe tip is installed at the lower end of the star-shaped frame. A probe connecting frame is installed on the upper end face of the star-shaped frame. The upper end of the probe connecting frame has three positioning pins, which are connected to the lower end face of the vertical shaft.

[0008] The star-shaped frame has four extension parts. The left, right, and rear extension parts are respectively used to fix the first laser interferometer fiber optic probe tip, the second laser interferometer fiber optic probe tip, and the longitudinal laser interferometer fiber optic probe tip. The front extension part is used to balance the gravity distribution of the star-shaped frame.

[0009] The V-shaped workbench is supported and fixed on the upper end face of the longitudinal moving block by two workbench support surfaces on the front and rear sides. In the middle of the sample fixing surface of the V-shaped workbench, a rotating shaft is arranged at a position relatively inside the first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface.

[0010] When the measuring instrument is working, the V-shaped workbench is located inside the space formed by the first laser interferometer fiber optic probe tip, the second laser interferometer fiber optic probe tip, the longitudinal laser interferometer fiber optic probe tip, and the star-shaped frame. The probe tip is located inside the space formed by the first laser reflection surface, the second laser reflection surface, the longitudinal laser reflection surface, and the sample fixing surface.

[0011] The laser light rays emitted by the first laser interferometer fiber optic probe tip, the second laser interferometer fiber optic probe tip, and the longitudinal laser interferometer fiber optic probe tip are respectively perpendicular to the first laser reflection surface, the second laser reflection surface, and the longitudinal laser reflection surface. And the ranging function light beams in the laser light rays emitted by the first laser interferometer fiber optic probe tip, the second laser interferometer fiber optic probe tip, and the longitudinal laser interferometer fiber optic probe tip orthogonally converge at the center of the probe ball of the probe tip.

[0012] Preferably, the V-shaped workbench is made of a single piece of microcrystalline glass.

[0013] Preferably, the laser light rays emitted by the first laser interferometer fiber optic probe tip, the second laser interferometer fiber optic probe tip, and the longitudinal laser interferometer fiber optic probe tip include angle measuring function light beams and ranging function light beams.

[0014] Preferably, the longitudinal moving block drives the V-shaped workbench to move in the transverse direction, and the vertical shaft drives the star probe to move in the vertical and transverse directions.

[0015] The longitudinal laser interferometer fiber optic probe tip obtains a displacement of x″ and obtains a yaw angle of r y and obtains a pitch angle of r z ;

[0016] The first laser interferometer fiber optic probe obtains a displacement of y″ and a rotation angle r x ;

[0017] The second laser interferometer fiber optic probe obtains a vertical axis displacement of z″;

[0018] Calculate the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula;

[0019] The compensation formula is:

[0020]

[0021] Preferably, in the coordinate system of the workpiece to be measured, when measuring the workpiece to be measured, the longitudinal movement block drives the V-shaped workbench to move in the lateral direction, and the vertical axis drives the star probe to move in the vertical and lateral directions, obtaining the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N;

[0022] The coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through the conversion formula to obtain the coordinates (a i , b i , c i ), i = 1,..., N

[0023] The conversion formula is:

[0024] Where: θ = -45°

[0025] The rotary shaft drives the workpiece to be measured to rotate by an angle Rotation angle After that, the longitudinal movement block drives the V-shaped workbench to move in the lateral direction, and the vertical axis drives the star probe to move in the vertical and lateral directions. The coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, j = N + 1,..., N + K, where N and K are integers;

[0026] Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , bj , c j ); among which, the conversion formula is:

[0027]

[0028] Coordinates of several positions to be detected (a j , b j , c j ) and coordinate values of several positions to be detected (a i , b i , c i ) are combined to obtain a set of surface coordinate sets of the workpiece to be measured (a i , b i , c i ), i = 1,..., N + K.

[0029] The present invention provides an ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench. Through the provided moving mechanism, when it moves, it drives the star probe and the V-shaped workbench to move horizontally, longitudinally, and vertically respectively. A longitudinal laser interferometer fiber optic probe, a second laser interferometer fiber optic probe, and a first laser interferometer fiber optic probe are installed on the star probe. The laser beams emitted by the longitudinal laser interferometer fiber optic probe, the second laser interferometer fiber optic probe, and the first laser interferometer fiber optic probe are respectively perpendicular to the longitudinal laser reflection surface, the second laser reflection surface, and the first laser reflection surface, and the ranging function laser beam converges at the center of the probe tip sphere. Thus, an ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench is formed.

[0030] Specifically, the technical innovation and good effects of the present invention are as follows:

[0031] 1) In the measurement structure proposed by the present invention, the probe displacement measurement and the probe touch point are on the same straight line, and this structure eliminates the first-order measurement error and realizes high measurement accuracy.

[0032] 2) The present invention is designed to use a laser interferometer to detect the relative displacement and relative rotation between the probe and the workpiece to be measured in real time, and calibrate the measurement error caused by the rotation between the probe and the workpiece to be measured in real time, effectively improving the measurement accuracy.

[0033] 3) The conical microcrystalline glass sample stage proposed by the present invention is an integrated design and is made of zero-expansion microcrystalline glass. Through structural innovation, the main thermal expansion error influence in ultra-precision measurement is eliminated. At the same time, this structure is easy to assemble and effectively improves the measurement accuracy of the whole machine.

[0034] 4) In the present invention, the laser measurement reference and the probe head are relatively stationary during the measurement process, dynamically conforming to the Abbe principle, effectively eliminating the measurement error caused by the Abbe error in the dynamic measurement of the instrument, effectively reducing the measurement uncertainty of the instrument, and improving the measurement repeatability of the instrument.

[0035] 5) The star probe and the V-shaped workbench of the present invention can be transplanted onto other existing low-precision form and position error measurement devices through simple operations, improving the measurement accuracy of the existing low-precision form and position error measurement devices to the micro-nano level, enabling them to measure micro-nano devices with complex shapes.

[0036] The star probe and the V-shaped workbench of the present invention cooperate with each other to achieve high-precision measurement of micro-nano devices with complex shapes. Brief Description of the Drawings

[0037] Figure 1 is a schematic structural diagram of a super-precision form and position error measuring instrument based on the cooperation of a star probe and a V-shaped workbench of the present invention;

[0038] Figure 2 is Figure 1 a schematic partial structural diagram of a super-precision form and position error measuring instrument based on the cooperation of a star probe and a V-shaped workbench of the present invention, highlighting the star probe and the V-shaped workbench;

[0039] Figure 3 is a schematic diagram of a super-precision form and position error measuring instrument based on the cooperation of a star probe and a V-shaped workbench of the present invention, highlighting the driving mechanism; an exploded schematic diagram of the moving mechanism;

[0040] Figure 4 is a schematic partial structural diagram of a super-precision form and position error measuring instrument based on the cooperation of a star probe and a V-shaped workbench of the present invention;

[0041] Description of the reference numerals in the drawings: 100, main machine base; 200, longitudinal moving block; 300, vertical support frame; 400, vertical shaft; 500, star probe; 510, probe connecting frame; 520, star frame; 530, probe head; 540, longitudinal laser interferometer fiber optic probe; 550, second laser interferometer fiber optic probe; 560, first laser interferometer fiber optic probe; 600, V-shaped workbench; 610, workbench support surface; 620, rotation shaft; 630, sample fixing surface; 640, longitudinal laser reflection surface; 650, second laser reflection surface; 660, first laser reflection surface; Detailed Description of the Invention

[0042] In order to make the objectives, technical solutions and advantages of the present invention more clear and understandable, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0043] Embodiment

[0044] The present invention provides an ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench, including a main frame 100, a longitudinal moving block 200, a vertical support frame 300, and a vertical shaft 400. A longitudinally reciprocating movable longitudinal moving block 200 is installed on the upper end surface of the main frame 100. The vertical support frame 300 is installed on both sides of the main frame 100, and a vertical shaft 400 is installed on the upper end of the vertical support frame 300. The vertical shaft 400 reciprocates longitudinally and transversely on the vertical support frame 300;

[0045] A star probe is installed at the lower end of the vertical shaft 400. The star probe is composed of a probe connecting frame 510, a star frame 520, a probe tip 530, a longitudinal laser interferometer fiber optic probe 540, a second laser interferometer fiber optic probe 550, and a first laser interferometer fiber optic probe 560. The probe tip 530 is installed at the lower end of the star frame 520. A probe connecting frame 510 is installed on the upper end surface of the star frame 520. The upper end of the probe connecting frame 510 has three positioning pins and is connected to the lower end surface of the vertical shaft 400;

[0046] The star frame 520 has four extension parts. The left, right, and rear extension parts are respectively used to fix the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, and the longitudinal laser interferometer fiber optic probe 540. The front extension part is used to balance the gravity distribution of the star frame 520;

[0047] The V-shaped workbench 600 is supported and fixed on the upper end surface of the longitudinal moving block 200 by two workbench support surfaces 610 on the front and rear sides. At the middle of the sample fixing surface 630 of the V-shaped workbench 600, a rotary shaft 620 is arranged at a position relatively inside the first laser reflection surface 660, the second laser reflection surface 650, and the longitudinal laser reflection surface 640;

[0048] When the measuring instrument is working, the V-shaped workbench 600 is located inside the space formed by the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, the longitudinal laser interferometer fiber optic probe 540, and the star frame 520. The probe tip 530 is located inside the space formed by the first laser reflection surface 660, the second laser reflection surface 650, the longitudinal laser reflection surface 640, and the sample fixing surface 630;

[0049] The laser light rays emitted by the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, and the longitudinal laser interferometer fiber optic probe 540 are respectively perpendicular to the first laser reflection surface 660, the second laser reflection surface 650, and the longitudinal laser reflection surface 640. Moreover, the ranging function light beams in the laser light rays emitted by the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, and the longitudinal laser interferometer fiber optic probe 540 orthogonally converge at the center of the probe ball of the probe head 530.

[0050] Furthermore, the V-shaped workbench 600 is made of a single piece of microcrystalline glass.

[0051] Furthermore, the laser light rays emitted by the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, and the longitudinal laser interferometer fiber optic probe 540 include angle measurement function light beams and ranging function light beams.

[0052] As mentioned above, the laser interferometer fiber optic probe is a prior art, which can be the Renishaw fiber laser ruler product RLU - a lightweight laser device with fiber optic conduction, or other laser interferometer devices that can achieve the same function, and is not limited herein.

[0053] As mentioned above, the vertical axis reciprocating in the vertical and horizontal directions is a prior art, which can be the vertical axis movement mode of a fixed-bridge coordinate measuring machine, or other driving devices that can achieve the same function, and is not limited herein.

[0054] When the V-shaped workbench 600 moves horizontally or longitudinally, or the vertical axis moves vertically, three angular errors will be generated, namely the pitch angle, the yaw angle, and the rotation angle. The pitch angle refers to the angle value generated when the V-shaped workbench 600 rotates around the axis of the laser beam emitted by the second laser interferometer. The rotation angle refers to the angle value generated when the V-shaped workbench 600 rotates around the axis of the laser beam emitted by the longitudinal laser interferometer. The yaw angle refers to the angle value generated when the V-shaped workbench 600 rotates around the axis of the laser beam emitted by the first laser interferometer. During the measurement process of the instrument, it is necessary to compensate for the displacement measurement errors caused by the pitch angle, the yaw angle, and the rotation angle.

[0055] The compensation process is as follows. The longitudinal moving block 200 drives the V-shaped workbench 600 to move in the horizontal direction, and the vertical axis 400 drives the star probe 500 to move in the vertical and horizontal directions. The longitudinal laser interferometer fiber optic probe 540 obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; the first laser interferometer fiber optic probe 560 obtains a displacement of y″ and obtains a rotation angle of r x; The second laser interferometer fiber optic probe 550 obtains the vertical axis displacement as z″; calculates the compensated lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample according to the compensation formula; the compensation formula is:

[0056]

[0057] Further, in the coordinate system of the workpiece to be measured, when measuring the workpiece to be measured, the longitudinal moving block 200 drives the V-shaped workbench 600 to move in the lateral direction, and the vertical shaft 400 drives the star probe 500 to move in the vertical and lateral directions, obtaining the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N;

[0058] In the instrument coordinate system, when the probe head 530 and the workpiece to be measured move relative to each other, the probe head 530 is continuously moved to contact the workpiece to be measured. When the probe head 530 contacts the measured sample, this contact position is set as the i-th position point to be detected. Based on the displacement values measured and compensated by the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, and the longitudinal laser interferometer fiber optic probe 540, in the instrument coordinate system, the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected are obtained, i = 1,..., N; the coordinates (a i ′, b i ′, c i ′) of the i-th position point to be detected, i = 1,..., N need to be converted to the standard coordinate system through transformation formula 1 to obtain the coordinates (a i , b i , c i ), i = 1,..., N, i = 1,..., N

[0059] Transformation formula 1 is:

[0060] where: θ = -45°

[0061] If the rotary shaft 620 is used for cooperative measurement, the rotary shaft 620 drives the workpiece to be measured to rotate by an angle Rotation angle After that, the longitudinal moving block 200 drives the V-shaped workbench 600 to move in the lateral direction, and the vertical shaft 400 drives the star probe 500 to move in the vertical and lateral directions. The coordinates (a2 j , b2 j , c2j ), j = N + 1, ..., N + K, where N and K are integers;

[0062] Since the rotation axis 620 drives the component under test to rotate, when the probe tip 530 contacts the component under test before rotation, the contact position is set as the i-th position point to be detected, and a set of coordinate values (a i , b i , c i ) are obtained, i = 1, ..., N; after rotation, when the probe tip 530 contacts the component under test, the contact position is set as the j-th position point to be detected, and a new set of coordinate values (a2 j , b2 j , c2 j ) are obtained. The coordinate system where j = N + 1, …, N + K also changes. It is necessary to process the new set of coordinate values (a2 j , b2 j , c2 j ) obtained after rotation through transformation formula 2, and transform the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the transformation formula, obtaining the coordinates (a j , b j , c j );

[0063] Transform the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the transformation formula, obtaining the coordinates (a j , b j , c j ); where the transformation formula 2 is:

[0064]

[0065] Combining the coordinates (a j , b j , c j ) of several position points to be detected and the coordinate values (a i , b i , c i ) of several position points to be detected, a set of surface coordinate sets (a i , b i , c i ) of the component under test are obtained, i = 1, ..., N + K.

[0066] If the rotation shaft 620 is not used, according to the displacement values measured by the first laser interferometer fiber optic probe 560, the second laser interferometer fiber optic probe 550, and the longitudinal laser interferometer fiber optic probe 540, after the probe determines a qualified contact once, based on each displacement value, through error compensation and data processing, a measuring point coordinate on the surface of the workpiece to be measured can be obtained. By measuring several measuring points on the surface of the workpiece to be measured, high-precision measurement of the shape and position errors of the workpiece to be measured with a complex shape can be achieved.

[0067] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0068] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection, an electrical connection. It can be directly connected, or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. Without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0069] The above-described embodiments only express the implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. An ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench, comprising a main frame (100), a longitudinal moving block (200), a vertical support frame (300), and a vertical shaft (400), characterized in that: A longitudinal moving block (200) capable of longitudinal reciprocating motion is installed on the upper end surface of the main seat (100). Vertical support frames (300) are installed on both sides of the main seat (100). A vertical shaft (400) is installed at the upper end of the vertical support frame (300), and the vertical shaft (400) reciprocates longitudinally and transversely on the vertical support frame (300); A star probe is installed at the lower end of the vertical shaft (400). The star probe is composed of a probe connecting frame (510), a star frame (520), a probe head (530), a longitudinal laser interferometer fiber head (540), a second laser interferometer fiber head (550), and a first laser interferometer fiber head (560). The probe head (530) is installed at the lower end of the star frame (520). A probe connecting frame (510) is installed on the upper end surface of the star frame (520). The upper end of the probe connecting frame (510) has three positioning pins and is connected to the lower end surface of the vertical shaft (400); The star frame (520) has four extension parts. The left, right, and rear extension parts are respectively used to fix the first laser interferometer fiber head (560), the second laser interferometer fiber head (550), and the longitudinal laser interferometer fiber head (540). The front extension part is used to balance the gravity distribution of the star frame (520); The V-shaped workbench (600) is supported and fixed on the upper end surface of the longitudinal moving block (200) by two workbench support surfaces (610) on the front and rear sides. In the middle of the sample fixing surface (630) of the V-shaped workbench (600), a rotating shaft (620) is arranged at a position relatively inside the first laser reflection surface (660), the second laser reflection surface (650), and the longitudinal laser reflection surface (640); When the measuring instrument is working, the V-shaped workbench (600) is located inside the space formed by the first laser interferometer fiber head (560), the second laser interferometer fiber head (550), the longitudinal laser interferometer fiber head (540), and the star frame (520). The probe head (530) is located inside the space formed by the first laser reflection surface (660), the second laser reflection surface (650), the longitudinal laser reflection surface (640), and the sample fixing surface (630); The laser beams emitted by the first laser interferometer fiber head (560), the second laser interferometer fiber head (550), and the longitudinal laser interferometer fiber head (540) are respectively perpendicular to the first laser reflection surface (660), the second laser reflection surface (650), and the longitudinal laser reflection surface (640). And the ranging function beams in the laser beams emitted by the first laser interferometer fiber head (560), the second laser interferometer fiber head (550), and the longitudinal laser interferometer fiber head (540) orthogonally converge at the center of the probe ball of the probe head (530); The longitudinal moving block (200) drives the V-shaped workbench (600) to move in the longitudinal direction, and the vertical shaft (400) drives the star probe (500) to move in the vertical and transverse directions; The longitudinal laser interferometer fiber optic probe (540) obtains a displacement of x″ and obtains a yaw angle of r y , and obtains a pitch angle of r z ; The first laser interferometer fiber optic probe (560) obtains a displacement of y″ and obtains a rotation angle r x ; The second laser interferometer fiber head (550) obtains the vertical axis displacement as z″; Calculate the lateral axis displacement x′, longitudinal axis displacement y′, and vertical axis displacement z′ of the measured sample after compensation according to the compensation formula; The compensation formula is as follows:

2. The ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench according to claim 1, wherein: The V-shaped workbench (600) is made of a single piece of microcrystalline glass.

3. The ultra-precision geometric error measuring instrument based on the cooperation of a star probe and a V-shaped workbench according to claim 1, characterized in that: The laser beams emitted by the first laser interferometer fiber optic probe (560), the second laser interferometer fiber optic probe (550), and the longitudinal laser interferometer fiber optic probe (540) include an angle measurement function beam and a distance measurement function beam.

4. The ultra-precision form and position error measuring instrument based on the cooperation of a star probe and a V-shaped workbench according to claim 1, characterized in that: In the coordinate system of the workpiece under test, when measuring the workpiece under test, the longitudinal movement block (200) drives the V-shaped workbench (600) to move in the longitudinal direction, and the vertical shaft (400) drives the star probe (500) to move in the vertical and transverse directions, obtaining the coordinates (a i ', b i ', c i ) of the i-th position point to be detected, where i = 1,..., N; The coordinates (a i ', b i ', c i ') of the i-th position point to be detected, where i = 1, ..., N, need to be transformed into the standard coordinate system through the transformation formula (1) to obtain the coordinates (a i , b i , c i ), where i = 1, ..., N The conversion formula (1) is: Where: θ = -45°, The rotating shaft (620) drives the sample to be measured to rotate by an angle Rotation angle After that, the longitudinal movement block (200) drives the V-shaped workbench (600) to move in the longitudinal direction, and the vertical shaft (400) drives the star probe (500) to move in the vertical and horizontal directions, and the coordinates (a2 j , b2 j , c2 j ) of the j-th position point to be detected are obtained in the instrument coordinate system, where j = N + 1,..., N + K, and N and K are integers; Convert the surface coordinates (a2 j , b2 j , c2 j ) to the standard coordinate system through the conversion formula to obtain the coordinates (a j , b j , c j ); where the conversion formula (2) is: Coordinates (a j , b j , c j ) of several positions to be detected and coordinate values (a i , b i , c i ) of several positions to be detected are combined to obtain a set of surface coordinates of the workpiece to be measured (a i , b i , c i ), i = 1, ..., N + K.

Images