LED optical equipment for DI exposure machine

Abstract

The invention discloses an LED optical device for a DI exposure machine, relates to the field of LED optical devices for DI exposure machines, and solves the problem that when the LED optical device of the existing DI exposure machine is in use, the imaging lens is in a high-intensity operating state for a long time, generates heat, and seriously affects the operating effect of the service life. The invention comprises a rotating device, a temperature sensing device, a switching device, and multiple groups of photolithography equipment. Two groups of imaging lenses are fixedly connected to the multiple groups of photolithography equipment. The sides of the imaging lenses are fixedly connected to near-ultraviolet LED light source devices. The LED optical device of the DI exposure machine is convenient for setting two groups of imaging lenses and receiving the temperature states of the two groups of imaging lenses through the temperature sensing device, and gradually accumulates power as the operating temperature of one group of imaging lenses increases. When the temperature reaches the set temperature, the rotating device is triggered to rotate 180 degrees, thereby improving the operating efficiency of the imaging lens and extending the service life of the machine body.

Description

Technical Field

[0001] The present invention relates to the technical field of LED optical equipment of a DI exposure machine, and in particular to LED optical equipment of a DI exposure machine. Background Art

[0002] DI exposure machine is also called DI direct imaging exposure machine. It is an integrated optical device design. DI optical equipment does not need to scan the entire exposure surface. It is a direct imaging printing machine. UV exposure machine refers to a machine that transfers the image information on the film or other transparent body to the surface coated with photosensitive material by turning on the light to emit UVA wavelength ultraviolet light.

[0003] According to the existing patent CN111610697A, the LED optical equipment of the existing DI exposure machine is very likely to generate a lot of heat when in use because the LED optical lamp tube is in a high-intensity exposure state for a long time, which leads to a reduction in the service life, which is not conducive to the long-term and stable use of the equipment. For this reason, we propose an LED optical equipment for a DI exposure machine. Summary of the invention

[0004] The object of the present invention is to provide an LED optical device of a DI exposure machine that is convenient for switching imaging lenses to extend their service life, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an LED optical device of a DI exposure machine, comprising a rotating device, a temperature sensing device, a switching device and multiple groups of photolithography devices, the multiple groups of photolithography devices are connected to each other and distributed in a straight line, two groups of imaging lenses are fixedly connected to the multiple groups of photolithography devices, the two groups of imaging lenses are symmetrically distributed on both sides of the photolithography devices, and the sides of the imaging lenses are fixedly connected with near-ultraviolet LED light source devices, the rotating device is installed on the exposure machine body, and is used to drive the photolithography device to rotate 180° to achieve switching between the two groups of imaging lenses, the temperature sensing device is installed on the photolithography device, and is used to sense the temperature of the imaging lens, and when the temperature changes, the rotating device is linked to store power and release the power storage limit after reaching the set temperature to trigger the rotating device. The switching device is installed in the imaging lens and is used for automatically switching the working states of the two groups of imaging lenses according to the positions of the two groups of imaging lenses. It is convenient to set the two groups of imaging lenses and receive the temperature states of the two groups of imaging lenses through the temperature sensing device, and gradually accumulate power as the operating temperature of one group of imaging lenses increases. When the temperature reaches the set temperature, the rotating device is triggered to rotate 180°, and automatically limit the position again to complete the state switching between the two groups of imaging lenses. At the same time, the switching device is used to automatically put the downward-facing imaging lens into the operating state, while the upward-facing imaging lens is isolated from light transmission and stops working. The device is easy to use and can realize automatic temperature sensing, power storage and switching operations without manual operation and motor drive, thereby improving the operating efficiency of the imaging lens and extending the service life of the body.

[0006] Preferably, the switching device includes multiple groups of mounting rings fixedly mounted on the exposure machine body, the bottom of the mounting ring is provided with an opening for preventing the imaging lens from being blocked during exposure operation, the near-ultraviolet LED light source device is fixedly connected with a slide rail slidably connected to the mounting ring, the mounting ring is used to connect electrical signals and conduct heat dissipation with the lithography device through the slide rail and the near-ultraviolet LED light source device, an imaging tube is provided on the imaging lens, an inclined tube connected to the imaging tube is provided on the side of the imaging tube, a ball is rolled inside the inclined tube, and the inner diameter of the inclined tube is larger than the inner diameter of the imaging tube, so as to facilitate switching of the working states of the two groups of imaging lenses.

[0007] Preferably, the temperature sensing device includes a device box fixedly mounted on the lithography equipment, a lifting block slidably connected inside the device box, upper and lower sides of the lifting block are fixedly connected with bellows slidably connected to the inner wall of the device box, one end of the bellows is fixedly connected to the device box, the bellows is used for storing liquid that expands due to heat, and the lifting block is provided with a force storage member for movably driving the rotating member to store force when the lifting block is moved, so as to facilitate sensing the temperature of the imaging lens.

[0008] Preferably, the rotating device includes a mounting frame fixedly mounted on the fixed ring, the mounting frame is fixedly connected to a fixed disk, the fixed disk is rotatably connected to a driving shaft, the outer wall of the driving shaft is fixedly connected to a clockwork spring, the clockwork spring is fixedly connected to a rotating ring fixedly connected to the device box, the mounting frame is provided with a limiting member for limiting the rotating ring, the force storage member is used to drive the driving shaft to rotate and store force, so as to drive the imaging lens to rotate.

[0009] Preferably, the limiting member includes a fixing ring fixedly mounted on the mounting frame, the fixing ring is fixedly connected to a mounting box, a first spring is fixedly connected inside the mounting box, the first spring is fixedly connected to a clamping block slidably connected to the mounting box, the rotating ring is provided with two groups of clamping grooves clamped to the clamping blocks, both ends of the device box are fixedly connected to guide blocks slidably connected to the inner wall of the fixing ring, so as to facilitate limiting the rotating ring.

[0010] Preferably, the force storage member includes two groups of fixed boxes respectively fixedly installed on both sides of the lifting block, and sliding grooves are provided on the two groups of fixed boxes, in which sliding blocks are slidably connected, and a rack is fixedly connected to the sliding block, and a gear is coaxially fixedly connected to the driving shaft, and the rack is meshed with the gear. A switching member for switching the meshing relationship between the rack and the gear on both sides is provided on the sliding block, and a releasing member for triggering the release of the clamping state of the clamping block on the clamping groove after the lifting block moves to a set position, so as to facilitate force storage through the movement linkage of the lifting block.

[0011] Preferably, the switching member includes a first tension spring fixedly mounted on the sliding block, the first tension spring is fixedly connected to the sliding groove, a push rod is fixedly connected to the sliding block, one side of the fixed ring is fixedly connected to a push plate for pushing the push rod so that the rack and the gear are meshed, one end of the push rod is slidably connected to the edge of the push plate, so as to facilitate switching the meshing relationship between the racks and the gears on both sides.

[0012] Preferably, the releasing member includes a top block fixedly mounted on both ends of the rack, a pushing block is slidably connected in the snap-in groove, and a second spring fixedly connected to the pushing block and fixedly connected to the rotating ring is used to trigger the release of the snap-in state of the snap-in block from the snap-in groove after the lifting block moves to the set position.

[0013] Preferably, both ends of the device box are provided with heat conducting plates respectively fixedly connected to the side surfaces of the two groups of imaging lenses, so as to facilitate sensing the temperature of the imaging lenses.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The present invention solves the problem that the imaging lens of the existing DI exposure machine is in a high-intensity operating state for a long time, generates heat and seriously affects the operating effect of the service life. By providing a rotating device and a temperature sensing device, it is convenient to provide two groups of imaging lenses and receive the temperature status of the two groups of imaging lenses through the temperature sensing device, and gradually accumulate power as the operating temperature of one group of imaging lenses increases;

[0016] 2. When the temperature reaches the set temperature, the rotating device is triggered to rotate 180° and automatically limit again to complete the state switching between the two groups of imaging lenses. The device is easy to use and can realize automatic temperature sensing, power storage and switching operations without manual operation and motor drive, which improves the operating efficiency of the imaging lens and extends the service life of the body;

[0017] 3. The switching device automatically puts the imaging lens facing downward into operation, while the imaging lens facing upward is isolated from light transmission and stops working. When the rotating device drives the imaging lens to rotate, it will first rotate toward one side of the inclined tube, so that the ball rolls into the inclined tube until the imaging lens is vertically downward. At this time, the ball rolls to the bottom of the inclined tube, and the imaging tube is in a smooth state and can work. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the side structure of the present invention;

[0020] Figure 3 It is an exploded view of the overall structure of the present invention;

[0021] Figure 4 It is a cross-sectional view of the structure of the switching device of the present invention;

[0022] Figure 5 It is a schematic diagram of the internal structure of the present invention;

[0023] Figure 6 It is a schematic diagram of the structure of the rotating device of the present invention;

[0024] Figure 7 for Figure 6 A magnified image of area A;

[0025] Figure 8 It is a schematic diagram of the structure of the temperature sensing device of the present invention;

[0026] Fig. 9 for Figure 8 Enlarged view of area B;

[0027] Fig.10 It is a cross-sectional view of the structure of the temperature sensing device of the present invention.

[0028] In the figure: 1-photolithography equipment; 2-imaging lens; 3-near ultraviolet LED light source equipment; 4-rotating device; 5-temperature sensing device; 6-switching device; 7-mounting ring; 8-opening; 9-slide rail; 10-imaging tube; 11-oblique tube; 12-ball; 13-device box; 14-lifting block; 15-bellows; 16-force storage member; 17-mounting frame; 18-fixed plate; 19-driving shaft; 20-spring spring; 21-rotating Ring; 22-limiting member; 23-fixing ring; 24-installing box; 25-first spring; 26-clamping block; 27-clamping groove; 28-guide block; 29-fixing box; 30-sliding groove; 31-sliding block; 32-rack; 33-gear; 34-switching member; 35-releasing member; 36-first tension spring; 37-pushing rod; 38-pushing plate; 39-top block; 40-pushing block; 41-second spring; 42-heat conducting plate. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Example 1

[0031] See also Figure 1-Figure 5 The LED optical device of a DI exposure machine shown in the figure includes a rotating device 4, a temperature sensing device 5, a switching device 6 and multiple groups of lithography devices 1. The multiple groups of lithography devices 1 are connected to each other and distributed in a straight line. Two groups of imaging lenses 2 are fixedly connected to the multiple groups of lithography devices 1. The two groups of imaging lenses 2 are symmetrically distributed on both sides of the lithography devices 1. The sides of the imaging lenses 2 are fixedly connected with near-ultraviolet LED light source devices 3. The rotating device 4 is installed on the exposure machine body, and is used to drive the lithography device 1 to rotate 180° to achieve switching between the two groups of imaging lenses 2. The temperature sensing device 5 is installed on the lithography device 1, and is used to sense the temperature of the imaging lens 2, and when the temperature changes, the rotating device 4 is linked to store power, and when the set temperature is reached, the power storage limit is released to trigger the rotation of the rotating device 4. The switching device 6 is installed in the imaging lens 2, and is used to automatically switch the working states of the two groups of imaging lenses 2 according to the positions of the two groups of imaging lenses 2.

[0032] See also Figure 1-Figure 4The switching device 6 shown in the figure includes a plurality of mounting rings 7 fixedly mounted on the exposure machine body, an opening 8 for preventing the imaging lens 2 from being blocked during exposure operation is provided at the bottom of the mounting ring 7, a slide rail 9 slidably connected to the mounting ring 7 is fixedly connected to the near-ultraviolet LED light source device 3, the mounting ring 7 is used to connect electrical signals and conduct heat dissipation with the lithography device 1 through the slide rail 9 and the near-ultraviolet LED light source device 3, an imaging tube 10 is provided on the imaging lens 2, an inclined tube 11 connected to the imaging tube 10 is provided on the side of the imaging tube 10, a rolling connection ball 12 is provided in the inclined tube 11, and the inner diameter of the inclined tube 11 is larger than the inner diameter of the imaging tube 10.

[0033] In this embodiment, the electrical signal is transmitted to the slide rail 9 through the mounting ring 7 and is transmitted to the photolithography device 1 and the imaging lens 2 through the near-ultraviolet LED light source device 3. At the same time, the imaging lens 2 pointing vertically downward will be exposed through the opening 8. The heat on the two groups of imaging lenses 2 will be sensed by the temperature sensing device 5, and will be continuously stored until the set temperature is reached, and then the rotating device 4 will be triggered to rotate 180°, and automatically limit again, completing the state switching between the two groups of imaging lenses 2. At the same time, the setting of the inclined tube 11 makes it possible for the imaging lens 2 to be at the upper side. When the imaging lens 2 is in the open position, the ball 12 slides down into the imaging tube 10 to block the imaging tube 10, thereby blocking the upward light and making the upper imaging lens 2 stop working. When the rotating device 4 drives the imaging lens 2 to rotate, it will first rotate toward the side of the inclined tube 11, so that the ball 12 rolls into the inclined tube 11 until the imaging lens 2 is vertically downward. At this time, the ball 12 rolls to the bottom of the inclined tube 11, and the imaging tube 10 is in a smooth state and can work. The setting of the slide rail 9 ensures that they can still be slidably connected to each other when in the opening 8 position.

[0034] Example 2

[0035] See also Figure 5-Figure 10 Embodiment 2 is described. This embodiment further describes Embodiment 1. The temperature sensing device 5 shown in the figure includes a device box 13 fixedly mounted on the lithography device 1. A lifting block 14 is slidably connected inside the device box 13. The upper and lower sides of the lifting block 14 are fixedly connected with bellows 15 slidably connected to the inner wall of the device box 13. Both ends of the device box 13 are provided with heat conducting plates 42 fixedly connected to the side surfaces of two groups of imaging lenses 2 respectively. One end of the bellows 15 is fixedly connected to the device box 13. The bellows 15 is used for storing liquid that expands due to heat. The lifting block 14 is provided with a force storage member 16 for storing force when the lifting block 14 is movably driven to rotate.

[0036] See also Figure 1-Figure 7The rotating device 4 shown in the figure includes a mounting frame 17 fixedly mounted on a fixing ring 23, a fixing disk 18 is fixedly connected to the mounting frame 17, a driving shaft 19 is rotatably connected to the fixing disk 18, a clockwork spring 20 is fixedly connected to the outer wall of the driving shaft 19, the clockwork spring 20 is fixedly connected to a rotating ring 21 fixedly connected to the device box 13, a limiting member 22 for limiting the rotating ring 21 is provided on the mounting frame 17, and the force storage member 16 is used to drive the driving shaft 19 to rotate and store force.

[0037] See also Figure 5-Figure 10 The limiting member 22 shown in the figure includes a fixing ring 23 fixedly mounted on the mounting frame 17, a mounting box 24 is fixedly connected to the fixing ring 23, a first spring 25 is fixedly connected inside the mounting box 24, the first spring 25 is fixedly connected to a clamping block 26 slidably connected to the mounting box 24, two groups of clamping grooves 27 clamped to the clamping block 26 are provided on the rotating ring 21, and both ends of the device box 13 are fixedly connected to guide blocks 28 slidably connected to the inner wall of the fixing ring 23.

[0038] In this embodiment, the temperature of the imaging lenses 2 on both sides is sensed by the heat conducting plate 42. The temperature of the imaging lens 2 in the working state at the bottom gradually rises, which will cause the heat-expandable liquid in the lower bellows 15 to gradually expand, pushing the lower bellows 15 to push the lifting block 14 upward. The liquid in the upper bellows 15 is less heated and gradually shrinks, so that the force storage member 16 gradually drives the drive shaft 19 to rotate, causing the clockwork spring 20 to rotate and store force. At this time, the clamping block 26 is clamped with the clamping groove 27 to limit the rotating ring 21, until the lifting block 14 moves up to the set position and the clamping block 26 is released. The rotating ring 21 can drive the device box 13 and the imaging lens 2 to rotate 180°, and then the clamping block 26 is clamped with another set of clamping grooves 27 to limit the position, and the switching can be completed.

[0039] Example 3

[0040] See also Figure 6-Figure 9 Embodiment 3 is described. This embodiment further describes embodiment 1. The force storage member 16 shown in the figure includes two groups of fixed boxes 29 respectively fixedly installed on both sides of the lifting block 14. Both groups of fixed boxes 29 are provided with sliding grooves 30. A sliding block 31 is slidably connected in the sliding groove 30. A rack 32 is fixedly connected to the sliding block 31. A gear 33 is coaxially fixedly connected to the driving shaft 19. The rack 32 meshes with the gear 33. A switching member 34 for switching the meshing relationship between the racks 32 and the gear 33 on both sides is provided on the sliding block 31. A releasing member 35 for triggering the release of the clamping state of the clamping block 26 to the clamping groove 27 after the lifting block 14 moves to the set position.

[0041] See also Figure 8-Figure 9The switching member 34 shown in the figure includes a first tension spring 36 fixedly mounted on the sliding block 31, the first tension spring 36 is fixedly connected to the sliding groove 30, a push rod 37 is fixedly connected to the sliding block 31, and a push plate 38 for pushing the push rod 37 so that the rack 32 and the gear 33 are meshed is fixedly connected to one side of the fixed ring 23, and one end of the push rod 37 is slidably connected to the edge of the push plate 38.

[0042] See also Figure 6-Figure 7 The release member 35 shown in the figure includes a top block 39 fixedly mounted on both ends of the rack 32, a push block 40 is slidably connected in the clamping groove 27, and a second spring 41 fixedly connected to the rotating ring 21 is fixedly connected to the push block 40.

[0043] The toothed rack 32 is then moved back and forth to move in a direction opposite to the toothed rack 33. The toothed rack 32 is moved back and forth to move in a direction opposite to the toothed rack 33. The toothed rack 32 is then moved back and forth to move in a direction opposite to the toothed rack 33.

[0044] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0045] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An LED optical device for a DI exposure machine, characterized in that: include: A plurality of groups of photolithography equipment (1), wherein the plurality of groups of photolithography equipment (1) are connected to each other and are arranged in a straight line, and each of the plurality of groups of photolithography equipment (1) is fixedly connected to two groups of imaging lenses (2), and the two groups of imaging lenses (2) are symmetrically distributed on two sides of the photolithography equipment (1), and a near-ultraviolet LED light source device (3) is fixedly connected to the side of the imaging lens (2); Also includes: A rotating device (4), the rotating device (4) being mounted on the exposure machine body and used for driving the photolithography device (1) to rotate 180° to achieve switching between the two groups of imaging lenses (2); A temperature sensing device (5), the temperature sensing device (5) being installed on the photolithography device (1) and being used to sense the temperature of the imaging lens (2), and to link the rotating device (4) to store power when the temperature changes, and to release the power storage limit to trigger the rotation of the rotating device (4) when the set temperature is reached; A switching device (6), the switching device (6) being installed in the imaging lens (2) and being used for automatically switching the working states of the two groups of imaging lenses (2) according to the positions of the two groups of imaging lenses (2).

2. The LED optical device of a DI exposure machine according to claim 1, characterized in that: The switching device (6) comprises a plurality of mounting rings (7) fixedly mounted on the exposure machine body, the bottom of the mounting ring (7) is provided with an opening (8) for preventing the imaging lens (2) from being blocked during exposure operation, the near-ultraviolet LED light source device (3) is fixedly connected with a slide rail (9) slidably connected with the mounting ring (7), the mounting ring (7) is used to connect electrical signals and conduct heat and dissipate heat with the lithography device (1) through the slide rail (9) and the near-ultraviolet LED light source device (3), the imaging lens (2) is provided with an imaging tube (10), the side of the imaging tube (10) is provided with an inclined tube (11) connected with the imaging tube (10), a rolling connection ball (12) is provided inside the inclined tube (11), and the inner diameter of the inclined tube (11) is larger than the inner diameter of the imaging tube (10).

3. The LED optical device of a DI exposure machine according to claim 2, characterized in that: The temperature sensing device (5) comprises a device box (13) fixedly mounted on the photolithography device (1), a lifting block (14) being slidably connected inside the device box (13), a bellows (15) slidably connected to the inner wall of the device box (13) being fixedly connected to the upper and lower sides of the lifting block (14), one end of the bellows (15) being fixedly connected to the device box (13), the bellows (15) being used for storing liquid that expands due to heat, and a force storage member (16) for storing force when the lifting block (14) is movably driven to rotate.

4. The LED optical device of a DI exposure machine according to claim 3, characterized in that: The rotating device (4) comprises a mounting frame (17) fixedly mounted on a fixing ring (23); a fixing disk (18) is fixedly connected to the mounting frame (17); a driving shaft (19) is rotatably connected to the fixing disk (18); a spring spring (20) is fixedly connected to the outer wall of the driving shaft (19); the spring spring (20) is fixedly connected to a rotating ring (21) fixedly connected to the device box (13); a limiting member (22) for limiting the rotating ring (21) is provided on the mounting frame (17); and the force storage member (16) is used to drive the driving shaft (19) to rotate and store force.

5. The LED optical device of a DI exposure machine according to claim 4, characterized in that: The limiting member (22) comprises a fixing ring (23) fixedly mounted on the mounting frame (17); a mounting box (24) is fixedly connected to the fixing ring (23); a first spring (25) is fixedly connected inside the mounting box (24); the first spring (25) is fixedly connected to a clamping block (26) slidably connected to the mounting box (24); two groups of clamping grooves (27) clamped to the clamping block (26) are formed on the rotating ring (21); and guide blocks (28) slidably connected to the inner wall of the fixing ring (23) are fixedly connected to both ends of the device box (13).

6. The LED optical device of a DI exposure machine according to claim 5, characterized in that: The force storage member (16) comprises two groups of fixed boxes (29) respectively fixedly mounted on both sides of the lifting block (14), and the two groups of fixed boxes (29) are provided with sliding grooves (30), and sliding blocks (31) are slidably connected in the sliding grooves (30), and a rack (32) is fixedly connected to the sliding block (31), and a gear (33) is coaxially fixedly connected to the driving shaft (19), and the rack (32) meshes with the gear (33), and a switching member (34) for switching the meshing relationship between the racks (32) and the gear (33) on both sides is provided on the sliding block (31), and a releasing member (35) for triggering the release of the clamping state of the clamping block (26) on the clamping groove (27) after the lifting block (14) moves to a set position.

7. The LED optical device of a DI exposure machine according to claim 6, characterized in that: The switching member (34) includes a first tension spring (36) fixedly mounted on the sliding block (31), the first tension spring (36) being fixedly connected to the sliding groove (30), a push rod (37) being fixedly connected to the sliding block (31), a push plate (38) being fixedly connected to one side of the fixing ring (23) for pushing the push rod (37) so that the rack (32) and the gear (33) are meshed, and one end of the push rod (37) is slidably connected to the edge of the push plate (38).

8. The LED optical device of a DI exposure machine according to claim 7, characterized in that: The release member (35) comprises a top block (39) fixedly mounted on both ends of the rack (32); a push block (40) is slidably connected in the clamping groove (27); and a second spring (41) fixedly connected to the rotating ring (21) is fixedly connected to the push block (40).

9. The LED optical device of a DI exposure machine according to claim 3, characterized in that: Both ends of the device box (13) are provided with heat conducting plates (42) respectively fixedly connected to the side surfaces of the two groups of imaging lenses (2).

Images