Multifunctional integrated valve for low-temperature vacuum environment

Abstract

This invention relates to the field of valve technology and discloses a multifunctional integrated valve for use in low-temperature vacuum environments. The valve includes a valve body with a cavity inside. The valve body is equipped with a vacuum gauge for vacuum detection, a first solenoid valve for gas path on / off control, a second solenoid valve for waste discharge control in conjunction with the first solenoid valve, a safety valve for pressure relief, and a purge gas connection connector for connecting to external purge gas. The vacuum gauge and purge gas connection connector are mounted on the same mounting surface of the valve body. The first and second solenoid valves are also mounted on the same mounting surface of the valve body. Installation interfaces and expansion interfaces are also installed at both ends of the valve body. The installation interfaces, expansion interfaces, vacuum gauge, and safety valve are all connected to the cavity. This invention installs multiple devices on the valve body to achieve multiple functions. The expansion and installation interfaces increase its functionality. The valve body structure can be modified as needed to form various types of mounting surfaces, and other components can be integrated to achieve even more functions.

Description

Technical Field

[0001] This invention relates to the field of valve technology, and in particular to a multifunctional integrated valve for use in low-temperature vacuum environments. Background Technology

[0002] Vacuum equipment often requires multiple functions during operation, including online monitoring of vacuum level, safety pressure relief, purging and regeneration, exhaust gas emission, and vacuum acquisition. Currently, these functions are typically achieved through multiple independent components, resulting in very low integration and failing to meet requirements in many applications. For equipment requiring higher integration or miniaturization, the valve described in this application offers a novel solution, and its functionality can be expanded via an expansion interface.

[0003] This invention is applied to multi-functional scenarios of detection and control in the field of cryogenic vacuum. Its main purpose is to meet the multi-functional needs of vacuum equipment, including online monitoring of vacuum level, safety pressure relief, purging and regeneration, and exhaust gas emission. At the same time, it allows other functional requirements to be met through expansion ports, such as expanding vacuum valves to achieve vacuum control requirements.

[0004] Patent application CN201810511127.8 discloses a vacuum-venting integrated valve, comprising: a high-vacuum valve, a vacuum pressure relief valve, and a valve body base plate. The valve body base plate has process holes and is also equipped with one, two, three, or more sets of solenoid valves. The process holes are connected to the solenoid valves. Both the high-vacuum valve and the vacuum pressure relief valve are controlled to open or close via the solenoid valves. This valve integrates multiple two-position, three-way solenoid valves. Through a designed mechanical structure, it can control the opening and closing of vacuum pipelines and relieve pressure within the material tank. However, the functional design of this valve is relatively simple and cannot meet the multi-functional requirements for detection and control in the low-temperature vacuum field. Summary of the Invention

[0005] This invention addresses the shortcomings of existing technologies by providing a multifunctional integrated valve for use in low-temperature vacuum environments.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0007] A multifunctional integrated valve for use in low-temperature vacuum environments includes a valve body with a cavity inside. The valve body is equipped with a vacuum gauge for vacuum detection, a first solenoid valve for gas path on / off control, a second solenoid valve for waste discharge control in conjunction with the first solenoid valve, a safety valve for safe pressure relief, and a purge gas connection connector for connecting to external purge gas. The vacuum gauge and purge gas connection connector are mounted on the same mounting surface of the valve body, as are the first and second solenoid valves. The valve body also has mounting interfaces and expansion interfaces at both ends, and the mounting interfaces, expansion interfaces, vacuum gauge, and safety valve are all connected to the cavity. A single valve body integrates regenerative purging, waste discharge, safety pressure relief, and vacuum detection functions. One end has an expansion interface for adding other functions, and the other end has an installation interface for equipment installation. The regenerative purging function connects to external purging gas via a purging gas connector, and the opening and closing of the gas path within the valve body is controlled by the first solenoid valve. The waste discharge function controls waste discharge when excessive impurities or harmful gases remain in the vacuum environment by opening and closing the first and second solenoid valves. The safety pressure relief function releases gas to the other side of the safety valve when the internal pressure exceeds a preset value. The vacuum detection function uses a vacuum gauge mounted on one of the valve body's mounting surfaces for vacuum measurement.

[0008] Preferably, the connection between the first solenoid valve and the valve body is provided with a first air passage and a second air passage. The first air passage is located above the second air passage, and the valve core of the first solenoid valve passes through the second air passage. The connection between the second solenoid valve and the valve body is provided with a third air passage and a fourth air passage. The third air passage is located above the fourth air passage, and the valve core of the second solenoid valve passes through the fourth air passage. Both the first and third air passages are connected to the interior of the valve body. The movement of the valve core of the first solenoid valve controls the opening and closing of the second air passage and the first air passage; the movement of the valve core of the second solenoid valve controls the opening and closing of the fourth air passage and the third air passage.

[0009] Preferably, the safety valve has a valve core inside and a valve seat inside the valve body. The valve seat contacts the edge of the valve core. The valve seat has a waste discharge hole on the side of the valve core, which is connected to the fourth air passage. The installation interface has a purge connector, which is connected to the second air passage.

[0010] Preferably, the valve body internally comprises a common channel, a purge channel, and a waste discharge channel. One end of the common channel connects to the purge air path connector, and the other end of the common channel extends along the third air path to the first air path. The common channel connects to both the third and first air path channels. One end of the purge channel connects to the second air path, and the other end connects to the purge connector. One end of the waste discharge channel connects to the fourth air path, and the other end connects to the waste discharge port. The valve body internally comprises three channels: the common channel, the purge channel, and the waste discharge channel. The air path is controlled by opening and closing two solenoid valves: a first solenoid valve and a second solenoid valve. The first solenoid valve controls the connection between the common channel and the purge channel; the second solenoid valve, in conjunction with the first solenoid valve, controls the connection between the waste discharge channel and the safety valve.

[0011] Preferably, the safety valve also includes a connector, with the lower end of the valve core inserted into the connector. A spring for controlling the unloading pressure is fitted onto the valve core, with the end of the spring contacting the connector. A first O-ring for achieving internal and external sealing control is fitted onto the upper end of the valve core, contacting the inner side of the valve seat. A first sealing ring is also provided at the connection between the safety valve and the valve body. An opening is also provided inside the safety valve on the lower side of the connector. The opening is used for pressure relief and exhaust gas discharge.

[0012] Preferably, a second sealing ring is provided at the connection between the first solenoid valve and the valve body, a second O-ring is provided at the connection between the first solenoid valve and the valve body on the outside of the second air passage, a third sealing ring is provided at the connection between the second solenoid valve and the valve body, and a third O-ring is provided at the connection between the second solenoid valve and the valve body on the outside of the fourth air passage.

[0013] Preferably, a mounting base is provided at the connection between the vacuum gauge and the valve body. The mounting base is connected to the valve body by screws, and a washer is provided at the end of the vacuum gauge that penetrates into the valve body. The vacuum gauge is a conventional vacuum measuring device that realizes vacuum detection function, and the connection with the valve body can be adjusted according to different models.

[0014] Preferably, the valve body has a through hole on the side of the expansion interface, the through hole is connected to the common channel, and a plug is provided inside the through hole.

[0015] Preferably, the valve body is a square prism, pentagonal prism, hexagonal prism, or a prism with more than one hexagonal prism. The valve body structure is a square prism with two end connectors. The four mounting surfaces formed by the square prism are used for mounting detection or control devices; the two end connectors are used for installation connections and as expansion interfaces, such as expanding vacuum valves for on / off control of equipment. The square prism structure of the valve body can be changed to other prism structures as needed to form various types of mounting surfaces, integrate other devices, and achieve more functions, such as temperature detection, humidity detection, and special gas detection.

[0016] This invention, by adopting the above technical solutions, has significant technical effects: This application designs a new valve body to meet the multi-functional needs of vacuum equipment, integrating regeneration purging, waste discharge, safety pressure relief, and vacuum detection functions onto a single valve body. Simultaneously, one end has an expansion interface for expanding other functions, and the other end has an installation interface for equipment installation. The valve body internally has three channels: a common channel, a purging channel, and a waste discharge channel. The regeneration purging function connects to external purging gas via a purging gas connection connector, and the first solenoid valve is opened and closed. The solenoid valve controls the connection between the common channel and the purging channel, realizing the opening and closing of the gas path in the valve body and achieving purging control; the exhaust function, that is, when there are too many impurities or harmful gases in the vacuum environment, the opening and closing of the gas path is achieved through the opening and closing of two solenoid valves, namely the first solenoid valve and the second solenoid valve. The second solenoid valve works with the first solenoid valve to control the connection between the exhaust channel and the safety valve, realizing exhaust control; the safety pressure relief function, that is, when the pressure of the internal environment of the valve exceeds a certain preset value, gas is discharged to the other side of the safety valve; the vacuum detection function, a vacuum gauge is set on one of the mounting surfaces of the valve body to realize vacuum measurement.

[0017] This invention allows for the installation of multiple devices on the valve body to achieve various functions. It also provides expansion and installation interfaces to enhance functionality. The valve body structure can be modified as needed to create various types of mounting surfaces and integrate other components to achieve even more functions. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention.

[0019] Figure 2 This is a schematic diagram of the internal structure of a safety valve.

[0020] Figure 3 This is a structural diagram of the first, second, third, and fourth air passages.

[0021] Figure 4 This is a schematic diagram of the valve seat and waste discharge hole.

[0022] Figure 5 This is a schematic diagram of the public passageway and the purging passageway.

[0023] Figure 6 This is a schematic diagram of public passageways and waste disposal passageways.

[0024] Figure 7 This is a structural diagram of the valve core and spring.

[0025] Figure 8 This is a structural diagram of the connector.

[0026] Figure 9 This is a schematic diagram of the purging connector.

[0027] Figure 10 This is a structural diagram of a washer.

[0028] Figure 11 This is a schematic diagram of a solenoid valve.

[0029] The parts referred to by the numbers in the above attached diagrams are as follows: 1—valve body, 101—cavity, 102—valve seat, 1021—waste drain hole, 103—through hole, 1031—gasket, 2—vacuum gauge, 201—washer, 3—first solenoid valve, 301—first air passage, 302—second air passage, 303—second sealing ring, 304—second O-ring, 4—second solenoid valve, 401—third air passage. 402—Fourth air passage; 403—Third sealing ring; 404—Third O-ring; 5—Safety valve; 501—Valve core; 502—Connector; 503—Spring; 504—First O-ring; 505—First sealing ring; 506—Opening; 6—Purge air passage connector; 7—Installation interface; 701—Purge connector; 8—Extension interface; 9—Common passage; 10—Purge passage; 11—Waste discharge passage; 12—Fixed seat. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0031] Example 1

[0032] A multi-functional integrated valve for use in low-temperature vacuum environments, such as Figure 1-11As shown, the valve body includes a valve body 1, which contains a cavity 101. The valve body 1 is equipped with a vacuum gauge 2 for vacuum detection, a first solenoid valve 3 for gas path opening and closing, a second solenoid valve 4 for waste discharge control in conjunction with the first solenoid valve 3, a safety valve 5 for safe pressure relief, and a purge gas path connector 6 for connecting to external purge gas. The vacuum gauge 2 and the purge gas path connector 6 are mounted on the same mounting surface of the valve body 1. The first solenoid valve 3 and the second solenoid valve 4 are also mounted on the same mounting surface of the valve body 1. The valve body 1 is also equipped with an installation interface 7 and an expansion interface 8 at both ends. The installation interface 7, the expansion interface 8, the vacuum gauge 2, and the safety valve 5 are all connected to the cavity 101. A valve body 1 integrates regeneration purging, waste discharge, safety pressure relief, and vacuum detection functions. One end has an expansion interface 8 for expanding other functions, and the other end has an installation interface 7 for equipment installation. The regeneration purging function connects to external purging gas via the purging gas connector 6, and the opening and closing of the gas path within the valve body 1 is controlled by the first solenoid valve 3, thus achieving purging control. The waste discharge function controls waste discharge when excessive impurities or harmful gases remain in the vacuum environment by opening and closing the first solenoid valve 3 and the second solenoid valve 4. The safety pressure relief function releases gas to the other side of the safety valve 5 when the pressure inside the valve exceeds a preset value. The vacuum detection function uses a vacuum gauge mounted on one of the valve body's mounting surfaces for vacuum measurement.

[0033] The connection between the first solenoid valve 3 and the valve body 1 is provided with a first air passage 301 and a second air passage 302. The first air passage 301 is located above the second air passage 302, and the valve core of the first solenoid valve 3 passes through the second air passage 302. The connection between the second solenoid valve 4 and the valve body 1 is provided with a third air passage 401 and a fourth air passage 402. The third air passage 401 is located above the fourth air passage 402, and the valve core of the second solenoid valve 4 passes through the fourth air passage 402. Both the first air passage 301 and the third air passage 401 are connected to the interior of the valve body 1. The movement of the valve core of the first solenoid valve 3 controls the opening and closing of the second air passage 302 and the first air passage 301; the movement of the valve core of the second solenoid valve 4 controls the opening and closing of the fourth air passage 402 and the third air passage 401.

[0034] The safety valve 5 is provided with a valve core 501, and the valve body 1 is provided with a valve seat 102. The valve seat 102 is in contact with the edge of the valve core 501. The valve seat 102 is provided with a waste discharge hole 1021 on the side of the valve core 501. The waste discharge hole 1021 is connected to the fourth air passage 402. The mounting interface 7 is provided with a purge connector 701, which is connected to the second air passage 302.

[0035] The valve body 1 has a common channel 9, a purge channel 10, and a waste discharge channel 11 inside. One end of the common channel 9 is connected to the purge air connector 6, and the other end of the common channel 9 is set along the third air channel 401 to the first air channel 301. The common channel 9 is connected to the third air channel 401 and the first air channel 301. One end of the purge channel 10 is connected to the second air channel 302, and the other end of the purge channel 10 is connected to the purge connector 701. One end of the waste discharge channel 11 is connected to the fourth air channel 402, and the other end of the waste discharge channel 11 is connected to the waste discharge hole 1021. The valve body has three channels inside, namely the common channel 9, the purge channel 10, and the waste discharge channel 11. The on / off of the air channels is controlled by the opening and closing of two solenoid valves, namely the first solenoid valve 3 and the second solenoid valve 4. The first solenoid valve 3 controls the connection between the common channel 9 and the purge channel 10. The second solenoid valve 4, in conjunction with the first solenoid valve 3, controls the connection between the waste discharge channel 11 and the safety valve 5.

[0036] The safety valve 5 also includes a connector 502. The lower end of the valve core 501 passes through the connector 502. A spring 503 for controlling the unloading pressure is fitted on the valve core 501. The end of the spring 503 contacts the connector 502. A first O-ring 504 for achieving internal and external sealing control is fitted on the upper end of the valve core 501. The first O-ring 504 contacts the inner side of the valve seat 102. A first sealing ring 505 is also provided at the connection between the safety valve 5 and the valve body 1. An opening 506 is also provided inside the safety valve 5, located below the connector 502. The opening 506 is used for pressure relief and exhaust gas discharge.

[0037] A second sealing ring 303 is provided at the connection between the first solenoid valve 3 and the valve body 1. A second O-ring 304 is provided at the connection between the first solenoid valve 3 and the valve body 1 on the outside of the second air passage 302. A third sealing ring 403 is provided at the connection between the second solenoid valve 4 and the valve body 1. A third O-ring 404 is provided at the connection between the second solenoid valve 4 and the valve body 1 on the outside of the fourth air passage 402.

[0038] A mounting base 12 is provided at the connection between the vacuum gauge 2 and the valve body 1. The mounting base 12 is connected to the valve body 1 by screws. A washer 201 is provided at the end of the vacuum gauge 2 that penetrates into the valve body 1. The vacuum gauge 2 is a conventional vacuum measuring device that realizes the vacuum detection function. The connection with the valve body 1 can be adjusted according to different models.

[0039] A through hole 103 is provided on the side of the expansion interface 8 on the valve body 1. The through hole 103 is connected to the common channel 9. A plug 1031 is provided inside the through hole 103.

[0040] Valve body 1 is a quadrangular prism. The structure of valve body 1 is a quadrangular prism with two end connectors. The four mounting surfaces formed by the quadrangular prism are used for mounting detection or control devices; the two end connectors are used for installation connections and as expansion interfaces, such as expanding a vacuum valve for on / off control of the equipment. The quadrangular prism structure of the valve body can be changed to other prism structures as needed, forming various types of mounting surfaces, integrating other devices, and realizing more functions, such as temperature detection, humidity detection, and special gas detection.

[0041] Working Principle: This application designs a novel valve body to meet the multi-functional needs of vacuum equipment. A single valve body 1 integrates regeneration purging, waste discharge, safety pressure relief, and vacuum detection functions. One end has an expansion interface 8 for expanding other functions, and the other end has an installation interface 7 for equipment installation. The valve body internally has three channels: a common channel 9, a purging channel 10, and a waste discharge channel 11. The regeneration purging function connects to external purging gas via the purging gas connector 6. The first solenoid valve 3 controls the connection between the common channel 9 and the external purging gas. The connection of the purging channel 10 enables the opening and closing of the gas path in the valve body 1, achieving purging control; the waste discharge function, that is, when too many impurities or harmful gases remain in the vacuum environment, the opening and closing of the gas path is achieved through the opening and closing of two solenoid valves, namely the first solenoid valve 3 and the second solenoid valve 4. The second solenoid valve 4, in conjunction with the first solenoid valve 3, controls the connection between the waste discharge channel 11 and the safety valve 5, achieving waste discharge control; the safety pressure relief function, that is, when the pressure of the internal environment of the valve exceeds a certain preset value, gas is discharged to the other side of the safety valve 5; the vacuum detection function, a vacuum gauge is installed on one of the mounting surfaces of the valve body to achieve vacuum measurement.

[0042] This invention allows for the installation of multiple devices on the valve body to achieve various functions. It also provides expansion and installation interfaces to enhance functionality. The valve body structure can be modified as needed to create various types of mounting surfaces and integrate other components to achieve even more functions.

[0043] Example 2

[0044] A multi-functional integrated valve for use in low-temperature vacuum environments, such as Figure 1-4As shown, the valve body includes a valve body 1, which contains a cavity 101. The valve body 1 is equipped with a vacuum gauge 2 for vacuum detection, a first solenoid valve 3 for gas path opening and closing, a second solenoid valve 4 for waste discharge control in conjunction with the first solenoid valve 3, a safety valve 5 for safe pressure relief, and a purge gas path connector 6 for connecting to external purge gas. The vacuum gauge 2 and the purge gas path connector 6 are mounted on the same mounting surface of the valve body 1. The first solenoid valve 3 and the second solenoid valve 4 are also mounted on the same mounting surface of the valve body 1. The valve body 1 is also equipped with an installation interface 7 and an expansion interface 8 at both ends. The installation interface 7, the expansion interface 8, the vacuum gauge 2, and the safety valve 5 are all connected to the cavity 101. A valve body 1 integrates regeneration purging, waste discharge, safety pressure relief, and vacuum detection functions. One end has an expansion interface 8 for expanding other functions, and the other end has an installation interface 7 for equipment installation. The regeneration purging function connects to external purging gas via the purging gas connector 6, and the opening and closing of the gas path within the valve body 1 is controlled by the first solenoid valve 3, thus achieving purging control. The waste discharge function controls waste discharge when excessive impurities or harmful gases remain in the vacuum environment by opening and closing the first solenoid valve 3 and the second solenoid valve 4. The safety pressure relief function releases gas to the other side of the safety valve 5 when the pressure inside the valve exceeds a preset value. The vacuum detection function uses a vacuum gauge mounted on one of the valve body's mounting surfaces for vacuum measurement.

[0045] Example 3

[0046] A multi-functional integrated valve for use in low-temperature vacuum environments, such as Figure 1-9As shown, the valve body includes a valve body 1, which contains a cavity 101. The valve body 1 is equipped with a vacuum gauge 2 for vacuum detection, a first solenoid valve 3 for gas path opening and closing, a second solenoid valve 4 for waste discharge control in conjunction with the first solenoid valve 3, a safety valve 5 for safe pressure relief, and a purge gas path connector 6 for connecting to external purge gas. The vacuum gauge 2 and the purge gas path connector 6 are mounted on the same mounting surface of the valve body 1. The first solenoid valve 3 and the second solenoid valve 4 are also mounted on the same mounting surface of the valve body 1. The valve body 1 is also equipped with an installation interface 7 and an expansion interface 8 at both ends. The installation interface 7, the expansion interface 8, the vacuum gauge 2, and the safety valve 5 are all connected to the cavity 101. A valve body 1 integrates regeneration purging, waste discharge, safety pressure relief, and vacuum detection functions. One end has an expansion interface 8 for expanding other functions, and the other end has an installation interface 7 for equipment installation. The regeneration purging function connects to external purging gas via the purging gas connector 6, and the opening and closing of the gas path within the valve body 1 is controlled by the first solenoid valve 3, thus achieving purging control. The waste discharge function controls waste discharge when excessive impurities or harmful gases remain in the vacuum environment by opening and closing the first solenoid valve 3 and the second solenoid valve 4. The safety pressure relief function releases gas to the other side of the safety valve 5 when the pressure inside the valve exceeds a preset value. The vacuum detection function uses a vacuum gauge mounted on one of the valve body's mounting surfaces for vacuum measurement.

[0047] The connection between the first solenoid valve 3 and the valve body 1 is provided with a first air passage 301 and a second air passage 302. The first air passage 301 is located above the second air passage 302, and the valve core of the first solenoid valve 3 passes through the second air passage 302. The connection between the second solenoid valve 4 and the valve body 1 is provided with a third air passage 401 and a fourth air passage 402. The third air passage 401 is located above the fourth air passage 402, and the valve core of the second solenoid valve 4 passes through the fourth air passage 402. Both the first air passage 301 and the third air passage 401 are connected to the interior of the valve body 1. The movement of the valve core of the first solenoid valve 3 controls the opening and closing of the second air passage 302 and the first air passage 301; the movement of the valve core of the second solenoid valve 4 controls the opening and closing of the fourth air passage 402 and the third air passage 401.

[0048] The safety valve 5 is provided with a valve core 501, and the valve body 1 is provided with a valve seat 102. The valve seat 102 is in contact with the edge of the valve core 501. The valve seat 102 is provided with a waste discharge hole 1021 on the side of the valve core 501. The waste discharge hole 1021 is connected to the fourth air passage 402. The mounting interface 7 is provided with a purge connector 701, which is connected to the second air passage 302.

[0049] The valve body 1 has a common channel 9, a purge channel 10, and a waste discharge channel 11 inside. One end of the common channel 9 is connected to the purge air connector 6, and the other end of the common channel 9 is set along the third air channel 401 to the first air channel 301. The common channel 9 is connected to the third air channel 401 and the first air channel 301. One end of the purge channel 10 is connected to the second air channel 302, and the other end of the purge channel 10 is connected to the purge connector 701. One end of the waste discharge channel 11 is connected to the fourth air channel 402, and the other end of the waste discharge channel 11 is connected to the waste discharge hole 1021. The valve body has three channels inside, namely the common channel 9, the purge channel 10, and the waste discharge channel 11. The on / off of the air channels is controlled by the opening and closing of two solenoid valves, namely the first solenoid valve 3 and the second solenoid valve 4. The first solenoid valve 3 controls the connection between the common channel 9 and the purge channel 10. The second solenoid valve 4, in conjunction with the first solenoid valve 3, controls the connection between the waste discharge channel 11 and the safety valve 5.

Claims

1. A multifunctional integrated valve for use in low-temperature vacuum environments, comprising a valve body (1), wherein the valve body (1) has a cavity (101), characterized in that: The valve body (1) is equipped with a vacuum gauge (2) for vacuum detection, a first solenoid valve (3) for gas path opening and closing, a second solenoid valve (4) for cooperating with the first solenoid valve (3) to achieve waste discharge control, a safety valve (5) for safe pressure relief, and a purge gas path connector (6) for connecting external purge gas. The vacuum gauge (2) and the purge gas path connector (6) are installed on the same mounting surface of the valve body (1). The first solenoid valve (3) and the second solenoid valve (4) are installed on the same mounting surface of the valve body (1). The valve body (1) is also equipped with an installation interface (7) and an expansion interface (8) at both ends. The installation interface (7), the expansion interface (8), the vacuum gauge (2) and the safety valve (5) are all connected to the cavity (101). The connection between the first solenoid valve (3) and the valve body (1) is provided with a first air passage (301) and a second air passage (302). The first air passage (301) is located on the upper side of the second air passage (302). The valve core of the first solenoid valve (3) is inserted into the second air passage (302). The connection between the second solenoid valve (4) and the valve body (1) is provided with a third air passage (401) and a fourth air passage (402). The third air passage (401) is located on the upper side of the fourth air passage (402). The valve core of the second solenoid valve (4) is inserted into the fourth air passage (402). The first air passage (301) and the third air passage (401) are both connected to the interior of the valve body (1). The safety valve (5) is provided with a valve core (501), and the valve body (1) is provided with a valve seat (102). The valve seat (102) is in contact with the edge of the valve core (501). The valve seat (102) is provided with a waste discharge hole (1021) on the side of the valve core (501). The waste discharge hole (1021) is connected to the fourth air passage (402). The installation interface (7) is provided with a purge connector (701). The purge connector (701) is connected to the second air passage (302). The valve body (1) is provided with a common channel (9), a purge channel (10) and a waste discharge channel (11). One end of the common channel (9) is connected to the purge air connector (6), and the other end of the common channel (9) is set along the third air channel (401) to the first air channel (301). The common channel (9) is connected to the third air channel (401) and the first air channel (301). One end of the purge channel (10) is connected to the second air channel (302), and the other end of the purge channel (10) is connected to the purge connector (701). One end of the waste discharge channel (11) is connected to the fourth air channel (402), and the other end of the waste discharge channel (11) is connected to the waste discharge hole (1021). The safety valve (5) is also provided with a connector (502). The lower end of the valve core (501) is inserted into the connector (502). A spring (503) for controlling the unloading pressure is sleeved on the valve core (501). The end of the spring (503) is in contact with the connector (502). A first O-ring (504) for achieving internal and external sealing control is sleeved on the upper end of the valve core (501). The first O-ring (504) is in contact with the inner side of the valve seat (102). A first sealing ring (505) is also provided at the connection between the safety valve (5) and the valve body (1). An opening (506) is also provided inside the safety valve (5) on the lower side of the connector (502).

2. The multifunctional integrated valve for use in low-temperature vacuum environments according to claim 1, characterized in that: A second sealing ring (303) is provided at the connection between the first solenoid valve (3) and the valve body (1). A second O-ring (304) is provided at the connection between the first solenoid valve (3) and the valve body (1) outside the second air passage (302). A third sealing ring (403) is provided at the connection between the second solenoid valve (4) and the valve body (1). A third O-ring (404) is provided at the connection between the second solenoid valve (4) and the valve body (1) outside the fourth air passage (402).

3. A multifunctional integrated valve for use in low-temperature vacuum environments according to claim 1, characterized in that: A fixing seat (12) is provided at the connection between the vacuum gauge (2) and the valve body (1). The fixing seat (12) is connected to the valve body (1) by screws. A washer (201) is provided at the end of the vacuum gauge (2) that penetrates into the valve body (1).

4. A multifunctional integrated valve for use in low-temperature vacuum environments according to claim 1, characterized in that: A through hole (103) is provided on the side of the expansion interface (8) on the valve body (1). The through hole (103) is connected to the common channel (9). A plug (1031) is provided inside the through hole (103).

5. A multifunctional integrated valve for use in low-temperature vacuum environments according to claim 1, characterized in that: The valve body (1) is a prism with a square, pentagonal, hexagonal or higher shape.

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