Radio frequency ion source neutralizer

Abstract

The application discloses a radio frequency ion source neutralizer, which is characterized in that a holding electrode is sunken into a ceramic cup to form a good electric field to a transmitting electrode, so that the electron extraction efficiency is improved by about 15%, and the electron extraction efficiency and the ion adsorption efficiency are better, and the holding electrode (1), the transmitting electrode (3), the ceramic cup (4), the transmitting coil (5), the insulating inflation head (6), the RF power supply (7), the holding electrode insulating ceramic (8) and the grounding shell (10) are included, the holding electrode (1) is sunken into the ceramic cup (4), the insulating ring (2) is arranged on the outer periphery of the sunken part of the holding electrode (1) in the ceramic cup (4), and the holding electrode center small hole (9) is arranged at the middle part of the sunken end of the holding electrode (1).

Description

Technical Field

[0001] This invention relates to the field of plasma coating equipment technology, specifically to a radio frequency ion source neutralizer. Background Technology

[0002] like Figure 1 As shown, the existing radio frequency ion source neutralizer uses a radio frequency power supply as the plasma generation mechanism. Plasma emission takes place in a sealed, insulated environment, consisting of a ceramic cup 4 and a ceramic cover plate 17. The ceramic cover plate 17 has a small hole 18 in the center to ensure that the gas pressure inside the ceramic cup 4 meets the high-pressure conditions for ionization. Ionization gas is filled into the lower side, and the ceramic cup 4 contains an emission electrode 3. The ionized plasma 14 is then selectively extracted by electrons through the generating electrode and the electric field relative to ground. At the same time, the extracted electron beam needs to be shaped. Therefore, a holding electrode 1 is inserted between the emission electrode 3 and the electric field relative to ground. A voltage is superimposed between the holding electrode 1 and the emission electrode 3 to correct the shape and direction of the emitted electron beam 12. However, in existing technology, the emitting electrode 1 and the holding electrode 3 are separated by a certain distance, using a high-temperature ceramic plate as the insulating material. This structure requires electrons to pass through the ceramic cover plate 17 before they can be extracted, resulting in low extraction efficiency. This is because, in order to ensure that the interior of the ceramic cup 4 is under ionized high pressure, the ceramic cover plate 17 must have a small hole in its center. However, the conductivity of this small hole is not very good. The small gas conductivity leads to weak electron migration energy, resulting in a large impedance between the emitting electrode and the electric field to ground and the electric field to the holding electrode. Consequently, electrons cannot be effectively extracted from the ceramic cup (RF ionization ceramic cup) 4, and the extraction current is small. This results in scattered electrons 13 being formed in addition to the emitted electron beam when the electron beam passes through the distance between the ceramic cover plate 17 and the holding electrode 1. Summary of the Invention

[0003] The purpose of this invention is to design a radio frequency ion source neutralizer, in which the holding electrode is recessed into the interior of the ceramic cup to form a good electric field for the emitting electrode, thereby achieving better electron extraction efficiency and better ion adsorption efficiency, which can improve the electron extraction efficiency by about 15%.

[0004] The present invention is achieved through the following technical solution: a radio frequency ion source neutralizer, including a holding electrode, a transmitting electrode, a ceramic cup, a transmitting coil, an insulating gas-filling head, an RF power supply, a holding electrode insulating ceramic, and a grounded shell. The holding electrode is recessed into the interior of the ceramic cup, and an insulating ring is sleeved on the outer periphery of the portion of the holding electrode recessed into the ceramic cup. A small hole in the center of the recessed end of the holding electrode is provided.

[0005] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the holding electrode is arranged with a transition zone and an open zone, and the cross section of the open zone along the direction of the emitted electron beam is in the shape of an isosceles trapezoid, and the cross section of the transition zone along the direction of the emitted electron beam is in the shape of a rectangle, and the edge of the rectangle connecting with the isosceles trapezoid is located at the short base of the isosceles trapezoid.

[0006] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the insulating ring is arranged in a stepped double-layer structure, and the inner ring located at the inner side of the ceramic cup has a diameter larger than that of the outer ring, and the diameter of the outer ring is less than or equal to the inner diameter of the emitting electrode.

[0007] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the diameter E of the center hole of the holding electrode, the diameter C of the transition zone of the holding electrode, and the outlet diameter D of the open zone of the holding electrode are arranged as 2-3:20-30:36.5-55.

[0008] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the diameter E of the center hole of the holding electrode, the diameter C of the transition zone of the holding electrode, and the outlet diameter D of the open zone of the holding electrode are arranged as 2:20:36.5.

[0009] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the depth A of the transition zone and the depth B of the open zone are arranged as 5-6:8-9.

[0010] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the depth A of the transition zone and the depth B of the open zone are arranged as 5.2:8.3.

[0011] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the insulating ring is made of silicon nitride material.

[0012] Further, in order to better realize the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the ground shell is connected with the ground workpiece.

[0013] Compared with the prior art, the present application has the following advantages and beneficial effects:

[0014] The present application realizes the following advantages and beneficial effects:

[0015] The insulating ring and the ground shell insulating contact protect the holding electrode from short circuiting to the ground, and the inner side is sealed and insulated with the holding electrode.

[0016] The insulating ring is made of silicon nitride material, which meets the long-term use requirement and eliminates the problem of short service life and easy explosion of alumina ceramic.

[0017] Compared with the conventional method of disassembling the fixing screw of the holding electrode and the ceramic cover plate screw to clean and maintain the interior, the present application is simple to install and disassemble, and the ceramic cup can be directly removed by cutting off the holding electrode during maintenance, thereby improving the efficiency and simplifying the structure. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Structure diagram of the neutralizer of the prior art radio frequency ion source.

[0019] Figure 2 Structure diagram of the present application.

[0020] Figure 3 Structure diagram of the holding electrode of the present application.

[0021] Wherein, 1-holding electrode, 2-insulating ring, 3-emitting electrode, 4-ceramic cup, 5-radio frequency coil, 6-insulating inflation joint, 7-RF power supply, 8-holding electrode insulating ceramic, 9-holding electrode center small hole, 10-ground shell, 11-ground workpiece, 12-emitting electron beam, 13-scattered electron, 14-plasma, 15-transition zone, 16-open zone, 17-ceramic cover plate, 18-small hole. DETAILED DESCRIPTION

[0022] The present application will be further described in conjunction with the embodiments, but the embodiments of the present application are not limited thereto.

[0023] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application.

[0024] In the description of the present application, it needs to be understood that the terms such as indicated position or location relationship are based on the position or location relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements indicated must have a particular position, be constructed and operated in a particular position, and therefore cannot be understood as a limitation on the present application.

[0025] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0026] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "setting", "arrangement", "fixing" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated, and the specific means is not limited to various conventional mechanical connection modes such as screwing, interference fit, riveting, threaded auxiliary connection, etc. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific situation.

[0027] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0028] Embodiment 1:

[0029] As Figures 2-3 shown, a radio frequency ion source neutralizer, which sinks the holding electrode into the ceramic cup to form a good electric field to the emitting electrode, so as to have better extraction efficiency of electrons and better adsorption efficiency of ions, can improve the electron extraction efficiency by about 15%, comprising a holding electrode 1, an emitting electrode 3, a ceramic cup 4, an emitting coil 5, an insulating inflation head 6, an RF power supply 7, a holding electrode insulating ceramic 8, and a grounding shell 10. The holding electrode 1 sinks into the ceramic cup 4, and the insulating ring 2 is sleeved on the outer periphery of the part of the holding electrode 1 sinking into the ceramic cup 4. The holding electrode center hole 9 is arranged at the middle part of the sinking end of the holding electrode 1.

[0030] As a preferred configuration, the retaining electrode 1 is recessed into the ceramic cup 4. A recessed mounting position is formed on the outer periphery of the portion of the retaining electrode 1 recessed within the ceramic cup 4 for mounting the insulating ring 2. The insulating ring 2 is further fixed to the rim of the ceramic cup 4 by the grounding housing 10. A small central hole 9 is formed in the center of the recessed end of the retaining electrode 1. This entire mating structure between the retaining electrode 1 and the ceramic cup 4 allows a large area of ​​the retaining electrode to be exposed inside the ceramic cup, forming a good electric field with the emitting electrode 3. The mating relationship with the insulating ring 2 ensures that the insulating ring 2 makes insulated contact with the grounding housing 10, protecting the retaining electrode 1 from short circuits to ground, while also providing good sealing and insulation to the inner side of the retaining electrode 1.

[0031] During operation, argon gas (ionized gas) is introduced through a metal tube into the insulated gas filling connector 6, which then introduces the gas into the relatively sealed space formed by the ceramic cup 4, the insulating ring 2, and the holding electrode 1. The RF power supply 7 then introduces radio frequency energy into the RF coil 5, causing electromagnetic oscillation that ionizes the gas inside the ceramic cup 4, generating plasma 14. A voltage is applied to the emitting electrode 3 to absorb positive ions, while simultaneously accelerating electrons towards the insulating ring 2. These electrons are then extracted and focused by the holding electrode 1. The extraction process passes through the small hole 9 in the center of the holding electrode, ultimately forming an electron beam (electron beam 12). The holding electrode 1 and the grounding shell 10 are insulated by the holding electrode insulating ceramic 8. Finally, the extracted and focused electrons (electron beam 12) are emitted onto the grounded workpiece 11. The extracted electrons are completely focused into the electron beam 12, without forming scattered electrons, achieving better extraction efficiency and better ion adsorption efficiency.

[0032] Example 2:

[0033] This embodiment is a further optimization based on the above embodiments. The similarities with the aforementioned technical solutions will not be repeated here. Figure 2 , Figure 3 As shown, to further better realize the radio frequency ion source neutralizer of the present invention, the following configuration structure is specifically adopted: the holding electrode 1 is provided with a transition region 15 and an open region 16, and the cross section of the open region along the direction of the emitted electron beam 13 is in the shape of an isosceles trapezoid, the cross section of the transition region along the direction of the emitted electron beam 13 is in the shape of a rectangle, and the side connecting the rectangle and the isosceles trapezoid is located on the short base side of the isosceles trapezoid.

[0034] Example 3:

[0035] This embodiment is a further optimization based on any of the above embodiments. The similarities with the aforementioned technical solutions will not be repeated here. Figure 2 , Figure 3As shown in the figure, further, to better achieve the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the insulating ring 2 is a stepped double-layer structure, and the inner ring diameter on the inner side of the ceramic cup 4 is larger than the outer ring diameter, and the outer ring diameter is less than or equal to the inner diameter of the emitting electrode 3.

[0036] Embodiment 4:

[0037] This embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the foregoing technical solutions will not be repeated here. Figure 2 、 Figure 3 As shown in the figure, further, to better achieve the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the hole diameter E of the center hole 9 of the holding electrode, the diameter C of the transition zone 15 of the holding electrode 1, and the outlet diameter D of the open zone 16 of the holding electrode 1 are 2-3:20-30:36.5-55, preferably 2:20:36.5.

[0038] Embodiment 5:

[0039] This embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the foregoing technical solutions will not be repeated here. Figure 2 、 Figure 3 As shown in the figure, further, to better achieve the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the depth A of the transition zone 15 and the depth B of the open zone 16 are 5-6:8-9, preferably 5.2:8.3.

[0040] Embodiment 6:

[0041] This embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the foregoing technical solutions will not be repeated here. Figure 2 、 Figure 3 As shown in the figure, further, to better achieve the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the insulating ring 2 adopts a silicon nitride material, which satisfies high-temperature use and eliminates the problem of short service life and easy explosion of the previous aluminum oxide ceramic.

[0042] Embodiment 7:

[0043] This embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the foregoing technical solutions will not be repeated here. Figure 2 、 Figure 3 As shown in the figure, further, to better achieve the neutralizer of the radio frequency ion source, the following arrangement structure is adopted: the ground shell 10 is connected with the ground workpiece 11.

[0044] Embodiment 8:

[0045] The embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the foregoing technical solutions will not be described again here. Figure 2 , Figure 3 As shown in the drawings, a radio frequency ion source neutralizer comprises a holding electrode 1, an emitting electrode 3, a ceramic cup 4 made of silicon nitride material, an emitting coil 5, an insulating gas charging connector 6, an RF power supply 7, a holding electrode insulating ceramic 8, and a grounded shell 10. The holding electrode 1 is sunken into the interior of the ceramic cup 4, and a circle of mounting positions for the insulating ring 2 is formed by concave recessing on the outer periphery of the sunken part of the holding electrode 1 in the interior of the ceramic cup 4. The insulating ring 2 is further fixed at the cup opening of the ceramic cup 4 through the grounded shell 10. A holding electrode center hole 9 is formed in the middle of the sunken end of the holding electrode 1. The cooperation structure of the entire holding electrode 1 and the ceramic cup 4 can expose a large area of the holding electrode to the interior of the ceramic cup to form a good electric field with the emitting electrode 3. The cooperation with the insulating ring 2 insulates the insulating ring 2 from the grounded shell 10, thereby protecting the holding electrode 1 from short circuiting to ground. The inner side is well sealed and insulated from the holding electrode 1. The grounded shell 10 is connected with a grounded workpiece 11. The holding electrode 1 is provided with a transition zone 15 and an open zone 16. The cross section of the open zone along the direction of the emitting electron beam 13 is isosceles trapezoidal, and the cross section of the transition zone along the direction of the emitting electron beam 13 is rectangular. The edge connecting the rectangle and the isosceles trapezoid is located at the short base of the isosceles trapezoid. The insulating ring 2 is a stepped double-layer structure, and the inner ring diameter on the side close to the interior of the ceramic cup 4 is larger than the outer ring diameter. The outer ring diameter is less than or equal to the inner diameter of the emitting electrode 3. The following dimensions can be referred to when setting the holding electrode 1: the hole diameter E of the holding electrode center hole 9 is 2 mm, the diameter C of the transition zone 15 of the holding electrode 1 is 20 mm, the outlet diameter D of the open zone 16 of the holding electrode 1 is 36.5 mm, the depth A of the transition zone 15 is 5.2 mm, and the depth B of the open zone 16 is 8.3 mm.

[0046] In operation, argon gas (ionization gas) is introduced into the relatively closed space formed by the ceramic cup 4, the insulating ring 2, and the holding electrode 1 through the metal pipe and the insulating gas charging connector 6. RF energy is introduced into the RF coil 5 by the RF power supply 7 to perform electromagnetic oscillation on the gas in the interior of the ceramic cup 4, so as to ionize the gas to generate plasma 14. A voltage is applied to the emitting electrode 3 to absorb positive ions, and electrons are accelerated to the direction of the insulating ring 2. The electrons are extracted and focused by the holding electrode 1, and finally form an electron beam stream (emitting electron beam 12) through the holding electrode center hole 9. The holding electrode 1 is insulated from the grounded shell 10 by the holding electrode insulating ceramic 8. Finally, the extracted and focused electrons (emitting electron beam 12) are emitted to the grounded workpiece 11. The extracted electrons are completely focused into the emitting electron beam 12 without forming scattered electrons, so as to achieve the purpose of better extraction efficiency and better ion absorption efficiency.

[0047] The above is only the preferred embodiment of the present application, and does not limit the present application in any form. Any simple modification or equivalent change of the above embodiment according to the technical essence of the present application is within the protection scope of the present application.

Claims

1. A radio frequency ion source neutralizer, comprising a holding electrode (1), an emitting electrode (3), a ceramic cup (4), an emitting coil (5), an insulating gas-filled head (6), an RF power supply (7), a holding electrode insulating ceramic (8), and a grounded housing (10), characterized in that: The retaining electrode (1) is recessed into the ceramic cup (4). A mounting position is formed on the outer periphery of the part of the retaining electrode (1) that is recessed into the ceramic cup (4) for fitting an insulating ring (2). The insulating ring (2) is fixed to the mouth of the ceramic cup (4) by the grounding shell (10). A small hole (9) is provided in the center of the recessed end of the retaining electrode (1).

2. The radio frequency ion source neutralizer according to claim 1, characterized in that: The holding electrode (1) is provided with a transition region (15) and an open region (16). The open region has an isosceles trapezoidal shape in cross section along the direction of the emitted electron beam (13), and the transition region has a rectangular shape in cross section along the direction of the emitted electron beam (13). The side connecting the rectangle and the isosceles trapezoid is located at the short base of the isosceles trapezoid.

3. The radio frequency ion source neutralizer according to claim 2, characterized in that: The insulating ring (2) has a stepped double-layer structure, and the inner ring diameter located near the inner side of the ceramic cup (4) is the large inner ring diameter, which is less than or equal to the inner diameter of the emitting electrode (3).

4. The radio frequency ion source neutralizer according to claim 2, characterized in that: The aperture E of the small hole (9) in the center of the holding electrode, the diameter C of the transition zone (15) of the holding electrode (1), and the outlet diameter D of the open area (16) of the holding electrode (1) are 2~3: 20~30: 36.5~55.

5. A radio frequency ion source neutralizer according to claim 4, characterized in that: The aperture E of the retaining electrode center hole (9), the diameter C of the transition zone (15), and the outlet diameter D of the open zone (16) are 2:20:36.

5.

6. A radio frequency ion source neutralizer according to any one of claims 2 to 5, characterized in that: The depth A of the transition zone (15) and the depth B of the open zone (16) are 5~6 and 8~9 respectively.

7. A radio frequency ion source neutralizer according to claim 6, characterized in that: The depth A of the transition zone (15) and the depth B of the open zone (16) are 5.2 and 8.3, respectively.

8. A radio frequency ion source neutralizer according to any one of claims 1 to 5 and 7, characterized in that: The insulating ring (2) is made of silicon nitride.

9. A radio frequency ion source neutralizer according to any one of claims 1 to 5 and 7, characterized in that: The grounding housing (10) is connected to the grounding workpiece (11).

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